CN106019425B - 光学部件的制备方法、光学部件和光学器件 - Google Patents
光学部件的制备方法、光学部件和光学器件 Download PDFInfo
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- CN106019425B CN106019425B CN201610195665.1A CN201610195665A CN106019425B CN 106019425 B CN106019425 B CN 106019425B CN 201610195665 A CN201610195665 A CN 201610195665A CN 106019425 B CN106019425 B CN 106019425B
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- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 235000011008 sodium phosphates Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000005494 tarnishing Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229960004418 trolamine Drugs 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/804—Containers or encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/50—Encapsulations or containers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Laminated Bodies (AREA)
- Engineering & Computer Science (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Manufacturing & Machinery (AREA)
- Optical Filters (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015074498A JP2016195185A (ja) | 2015-03-31 | 2015-03-31 | 光学部品の製造方法、光学部品、光学装置 |
| JP2015-074498 | 2015-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106019425A CN106019425A (zh) | 2016-10-12 |
| CN106019425B true CN106019425B (zh) | 2019-01-08 |
Family
ID=57017090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610195665.1A Expired - Fee Related CN106019425B (zh) | 2015-03-31 | 2016-03-31 | 光学部件的制备方法、光学部件和光学器件 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10074756B2 (enExample) |
| JP (1) | JP2016195185A (enExample) |
| CN (1) | CN106019425B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020030247A (ja) * | 2018-08-20 | 2020-02-27 | 株式会社タムロン | 防汚層付光学素子 |
| CN119960558A (zh) * | 2019-11-11 | 2025-05-09 | 苹果公司 | 计算设备 |
| US11113494B2 (en) * | 2019-11-11 | 2021-09-07 | Apple Inc. | Biometric key including a textured ceramic cover |
| KR102801003B1 (ko) * | 2021-01-07 | 2025-04-29 | 현대모비스 주식회사 | 적층체 및 이의 제조방법 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6531341B1 (en) * | 2000-05-16 | 2003-03-11 | Sandia Corporation | Method of fabricating a microelectronic device package with an integral window |
| US7033855B2 (en) * | 2001-09-25 | 2006-04-25 | Fuji Photo Film Co., Ltd. | Optical component and method of manufacturing the same |
| JP2006177740A (ja) * | 2004-12-22 | 2006-07-06 | Nikon Corp | 多層膜反射鏡及びeuv露光装置 |
| JP2008034502A (ja) * | 2006-07-27 | 2008-02-14 | Epson Toyocom Corp | 固体撮像素子カバー及び固体撮像装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7042662B2 (en) * | 2002-12-26 | 2006-05-09 | Canon Kabushiki Kaisha | Light amount adjusting device, and optical device using the light amount adjusting device |
| WO2005001526A1 (ja) | 2003-06-26 | 2005-01-06 | Nikon Corporation | 多層膜光学素子の製造方法 |
| JP2005098930A (ja) | 2003-09-26 | 2005-04-14 | Nikon Corp | 多層膜反射鏡、その再生方法及び露光装置 |
| JP2007101349A (ja) | 2005-10-04 | 2007-04-19 | Nikon Corp | 多層膜反射鏡、その再生方法および露光装置 |
| JP2007127698A (ja) | 2005-11-01 | 2007-05-24 | Nikon Corp | 多層膜反射鏡、その再生方法および露光装置 |
| JP2007187987A (ja) | 2006-01-16 | 2007-07-26 | Nikon Corp | 多層膜反射鏡、及びeuv露光装置 |
| KR102221907B1 (ko) * | 2013-07-11 | 2021-03-04 | 삼성디스플레이 주식회사 | 광학필름 어셈블리, 이를 갖는 표시장치 및 그 제조방법 |
| US9581733B2 (en) * | 2013-08-23 | 2017-02-28 | Ricoh Imaging Company, Ltd. | Anti-reflection coating and optical member comprising same |
| JP6299772B2 (ja) * | 2013-12-27 | 2018-03-28 | 株式会社ニコン | 撮像ユニット及び撮像装置 |
-
2015
- 2015-03-31 JP JP2015074498A patent/JP2016195185A/ja not_active Withdrawn
-
2016
- 2016-03-25 US US15/081,662 patent/US10074756B2/en not_active Expired - Fee Related
- 2016-03-31 CN CN201610195665.1A patent/CN106019425B/zh not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6531341B1 (en) * | 2000-05-16 | 2003-03-11 | Sandia Corporation | Method of fabricating a microelectronic device package with an integral window |
| US7033855B2 (en) * | 2001-09-25 | 2006-04-25 | Fuji Photo Film Co., Ltd. | Optical component and method of manufacturing the same |
| JP2006177740A (ja) * | 2004-12-22 | 2006-07-06 | Nikon Corp | 多層膜反射鏡及びeuv露光装置 |
| JP2008034502A (ja) * | 2006-07-27 | 2008-02-14 | Epson Toyocom Corp | 固体撮像素子カバー及び固体撮像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US10074756B2 (en) | 2018-09-11 |
| CN106019425A (zh) | 2016-10-12 |
| US20160293780A1 (en) | 2016-10-06 |
| JP2016195185A (ja) | 2016-11-17 |
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