CN105957835B - 一种芯片的切割方法 - Google Patents
一种芯片的切割方法 Download PDFInfo
- Publication number
- CN105957835B CN105957835B CN201610578639.7A CN201610578639A CN105957835B CN 105957835 B CN105957835 B CN 105957835B CN 201610578639 A CN201610578639 A CN 201610578639A CN 105957835 B CN105957835 B CN 105957835B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610578639.7A CN105957835B (zh) | 2016-07-18 | 2016-07-18 | 一种芯片的切割方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610578639.7A CN105957835B (zh) | 2016-07-18 | 2016-07-18 | 一种芯片的切割方法 |
Publications (2)
Publication Number | Publication Date |
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CN105957835A CN105957835A (zh) | 2016-09-21 |
CN105957835B true CN105957835B (zh) | 2018-10-26 |
Family
ID=56901103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610578639.7A Active CN105957835B (zh) | 2016-07-18 | 2016-07-18 | 一种芯片的切割方法 |
Country Status (1)
Country | Link |
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CN (1) | CN105957835B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110867501B (zh) * | 2018-08-28 | 2020-11-27 | 山东浪潮华光光电子股份有限公司 | 一种GaAs基发光二极管芯片的切割方法 |
CN113380702B (zh) * | 2021-06-10 | 2023-05-09 | 东莞安晟半导体技术有限公司 | 一种磷化铟晶圆的切割方法及控制系统 |
CN114030094B (zh) * | 2021-11-18 | 2022-12-09 | 江苏纳沛斯半导体有限公司 | 一种可防止产生崩边的半导体晶圆制备的硅片划片系统 |
CN114986727A (zh) * | 2022-06-27 | 2022-09-02 | 伯恩半导体(河南)有限公司 | 一种半导体晶圆双膜切割方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6015151B2 (ja) * | 1980-03-11 | 1985-04-17 | 株式会社東芝 | 半導体チップの切断方法 |
WO2000059050A1 (en) * | 1999-03-31 | 2000-10-05 | Seiko Epson Corporation | Method of manufacturing semiconductor device, semicondutor device, narrow pitch connector, electrostatic actuator, piezoelectric actuator, ink jet head, ink jet printer, micromachine, liquid crystal panel, and electronic device |
JP5912283B2 (ja) * | 2011-04-20 | 2016-04-27 | 株式会社ディスコ | 粘着テープ及びウエーハの加工方法 |
CN102496602B (zh) * | 2011-12-26 | 2014-03-19 | 成都先进功率半导体股份有限公司 | 一种芯片切割方法 |
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2016
- 2016-07-18 CN CN201610578639.7A patent/CN105957835B/zh active Active
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Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20170419 Address after: 317500 Taizhou, Wenling Taiping Street, wan chang West Road Applicant after: ZHEJIANG E-ZONE INTELLIGENT ELECTRIC CO.,LTD. Address before: 317500 Wenling City, Zhejiang Province Economic Development Zone, Taizhou Applicant before: ZHEJIANG QIANJIANG MOTORCYCLE Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230822 Address after: Room 201, Building 1, Shanglin Industrial Zone (northeast of the intersection of Wanchang West Road and Shanglin Road), Chengxi Street, Wenling City, Taizhou City, Zhejiang Province, 317500 Patentee after: Zhejiang Yizhong Packaging Technology Co.,Ltd. Address before: 317500 Wanchang West Road, Taiping Street, Wenling City, Taizhou, Zhejiang Province Patentee before: ZHEJIANG E-ZONE INTELLIGENT ELECTRIC CO.,LTD. |