CN105954234A - Nano beam waveguide filter and micro cavity cascaded structure-based one-dimensional photonic crystal integrated sensor - Google Patents
Nano beam waveguide filter and micro cavity cascaded structure-based one-dimensional photonic crystal integrated sensor Download PDFInfo
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- CN105954234A CN105954234A CN201610274148.3A CN201610274148A CN105954234A CN 105954234 A CN105954234 A CN 105954234A CN 201610274148 A CN201610274148 A CN 201610274148A CN 105954234 A CN105954234 A CN 105954234A
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N2021/436—Sensing resonant reflection
- G01N2021/438—Sensing resonant reflection with investigation of wavelength
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Abstract
The invention discloses a nano beam waveguide filter and micro cavity cascaded structure-based one-dimensional photonic crystal integrated sensor, which comprises a one-dimensional photonic crystal nano-beam band gap filter, and a nano-beam micro-cavity sensor. The one-dimensional photonic crystal nano-beam band gap filter and the nano-beam micro-cavity sensor are connected in series. The nano beam waveguide filter and micro cavity cascaded structure-based one-dimensional photonic crystal integrated sensor is simple and compact in structural design, and the size thereof is about 0.7 mum * 10 mum. The actual manufacturing process of the sensor is very simple. However, similar high-performance photonic crystal sensor structure models are designed based on a structurally complex photonic crystal micro cavity structure, and are relatively complicated in structure optimized design. Moreover, similar high-performance photonic crystal sensor structure models are very high in the requirement of the micro/nano processing and preparing technique and difficult in actual manufacture.
Description
Technical field
The present invention relates to a kind of 1-D photon crystal integrated sensor based on nanometer bundle waveguide filter Yu microcavity cascade structure, belong to
In photonic crystal micro-nano integrated technology field.
Background technology
In the past ten years, there is ultra high quality factor (Q-value) and ultralow mode volume (Vm) 1-D photon crystal (PC)
Nanometer bundle microcavity is it is verified that have the biggest application advantage in different field.Such as, nanometer bundle laser instrument (document 1, P.Lee,
T.Lu,and L.Chiu,“Dielectric-Band Photonic Crystal Nanobeam Lasers,”
Journal of Lightwave Technology, Vol.31, pp.36-42,2013.), roll-off filter (document 2,
X.Ge,Y.Shi,and S.He,“Ultra-compact channel drop filter based on photonic
crystal nanobeam cavities utilizing a resonant tunneling effect,”Opt.Lett.Vol.39,
Pp.6973-6976,2014.), electrooptic modulator (document 3, J.Hendrickson, R.Soref, J.Sweet, and
W.Buchwald,“Ultrasensitive silicon photonic-crystal nanobeam electro-optical
Modulator:Design and simulation, " Opt.Exp., Vol.22, pp.3271-3283,2014.),
Nanoparticle capture (document 4, S.Lin, J.Hu, L.Kimerling, and K.Crozier, " Design of
nanoslotted photonic crystal waveguide cavities for single nanoparticle trapping
And detection, " Opt.Lett.Vol.34, pp.3451-3453,2009.), opto-mechanical (document 5, T.Lin,
C.Lin,J.Hsu,“Strong Optomechanical Interaction in Hybrid Plasmonic-Photonic
Crystal Nanocavities with Surface Acoustic Waves,”Scientific Reports,Vol.5,
13782,2015.), quantum dot (document 6, Y.Zhang, C.Zeng, H.Zhang, D.Li, G.Gao, Q.Huang,
Y.Wang,J.Yu,and J.Xia,“Single-Mode Emission From Ge Quantum Dots in
Photonic Crystal Nanobeam Cavity,”IEEE Photonics Technology Lett.,Vol.27,
Pp.1026-1029,2015.), nanometer LED (document 7, R.Miura, S.Imamura, R.Ohta, A.Ishii,
X.Liu,T.Shimada,S.Iwamoto,Y.Arakawa,and Y.K.Kato,“Ultralow
mode-volume photonic crystal nanobeam cavities for high-efficiency coupling to
Individual carbon nanotube emitters, " Nat.Comm.Vol.5, p.5580,2014. documents 8,
Y.Li,K.Cui,X.Feng,Y.Huang,D.Wang,Z.Huang,and W.Zhang,“Photonic
Crystal Nanobeam Cavity With Stagger Holes for Ultrafast Directly Modulated
Nano-Light-Emitting Diodes,”IEEE Photonics Journal,Vol.5,no.1,4700306,
2011.), slower rays strengthens nonlinear effect (document 9, S.Makino, Y.Ishizaka, K.Saitoh, and M.
Koshiba,“Slow-Light-Enhanced Nonlinear Characteristics in Slot Waveguides
Composed of Photonic Crystal Nanobeam Cavities,”IEEE Photonic Journal,Vol.5,
P.2700309,2013.) etc..Especially, due to superelevation Q/VmThe optical resonator of value enhances the phase interaction of light and material
With, 1-D photon crystal microcavity is applied to Lab-on-a-Chip field and realizes that there is the optical sensing of high quality factor and inhale recently
Draw the concern of a lot of research worker.(document 10, D.Yang, H.Tian, Y.Ji, and Q.Quan, " Design of
simultaneous high-Q and high-sensitivity photonic crystal refractive index
Sensors, " J.Opt.Soc.Am.B, Vol.30, no.8, pp.2027-2031,2013. document 11, D.Yang,
S.Kita,F.Liang,C.Wang,H.Tian,Y.Ji,M.Loncar,and Q.Quan,“High sensitivity
and high Q-factor nanoslotted parallel quadrabeam photonic crystal cavity for
Real-time and label-free sensing, " Appl.Phys.Lett., Vol.105,063118,2014.) pass through
Experiment it turned out quality factor (FOM=Figure based on multi beam parallel 1-D photon crystal nanometer bundle microcavity integrated sensor
Of Merit) one can be improve more than 2000 than conventional optical pickocff based on traditional two-dimensional photonic crystal microcavity
The order of magnitude.But, the 1-D photon crystal nanometer bundle microcavity of strip has multiple resonance wavelength on its transmission spectrum, and this makes it
Be difficult to be used for realization and be densely integrated sensor array and multiplexed sensing.It addition, this also makes them be difficult to intelligent screening
Detection, because it is in actually detected processing procedure, may select a wrong resonance wavelength (such as low FOM of other high-orders
Pattern) rather than the basic mode (FM=Fundmental Mode) of high FOM can be realized, this will cause sensing detection result not
Accurately.
Summary of the invention
The invention aims to solve the problems referred to above, propose a kind of based on nanometer bundle waveguide filter and microcavity cascade structure
1-D photon crystal integrated sensor, the present invention utilizes the 1-D photon crystal structure of simple in construction, by 1-D photon crystal nanometer
Band gap wave filter is cascaded with 1-D photon crystal nanometer bundle microcavity, filters off other higher order mode and retains basic mode, it is achieved
High-quality-factor and the design of highly sensitive photonic crystal integrated sensor and application, not only structure design is simple, Er Qieti
High degree of accuracy in reality application test process.Present invention can apply to realization and be densely integrated sensor array and multiplexed sensing,
Integreted phontonics light path (PICs=Photonic Integrated Circuits) can be further applied simultaneously.
A kind of 1-D photon crystal integrated sensor based on nanometer bundle waveguide filter Yu microcavity cascade structure, including one-dimensional photon
Crystalline nanometric band gap wave filter and nanometer bundle microcavity sensors, 1-D photon crystal nanometer bundle band gap wave filter and nanometer bundle microcavity
Sensor series.
Compared with conventional photonic crystals integrated device, the present invention has that volume is little, it is low, low in energy consumption to be lost, light field locality is good
Etc. advantage.
Compared with similar photonic crystal integrated device, the present invention also has following several advantage:
1, present configuration design is the compactest, size about～0.7 μ m 10 μm, actual fabrication is simple, similar high property
Baroque photon crystal micro cavity structure can be all based on by photonic crystal sensors structural model, the optimization design of sensor construction
Relatively complicated, and the actual system that be unfavorable for photonic crystal sensors the highest for micro-nano technology technology of preparing required precision
Make；
2, the present invention can be preserved for realizing the specific basic model of the photonic crystal nanometer bundle microcavity of sensing, and filters off other
Higher order mode, improves its degree of accuracy；
3, the performance of 1-D photon crystal nanometer bundle microcavity sensors is not had by the 1-D photon crystal nanometer bundle band gap wave filter of series connection
Impact, such as high-quality-factor (Q=quality factor), resonance peak position, sensitivity etc..
Accompanying drawing explanation
Fig. 1 is model schematic based on nanometer bundle waveguide filter Yu the 1-D photon crystal integrated sensor of microcavity cascade structure.
Fig. 2 is 1-D photon crystal nanometer bundle microcavity sensors structural representation.
Fig. 3 1-D photon crystal nanometer bundle band gap filter construction schematic diagram.
Fig. 4 is the transmission plot of the 1-D photon crystal nanometer bundle microcavity sensors in the present invention.
Fig. 5 is transmission spectrum based on nanometer bundle waveguide filter Yu the 1-D photon crystal integrated sensor of microcavity cascade structure.
Fig. 6 is the transmission spectrum that the 1-D photon crystal cascade structure in the present invention obtains under different background medias.
Fig. 7 is wavelength and the graph of relation of background media of resonance peak.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in further detail.
The present invention is a kind of 1-D photon crystal integrated sensor based on nanometer bundle waveguide filter Yu microcavity cascade structure, such as figure
Shown in 1, including 1-D photon crystal nanometer bundle band gap wave filter and nanometer bundle microcavity sensors, 1-D photon crystal nanometer band
Gap wave filter and the series connection of nanometer bundle microcavity sensors；
During making, silicon waveguide is positioned on silicon dioxide flat board, and silicon duct width is w, and thickness is h, a length of L, silicon waveguide
A part is provided with the airport of same radius, airport spaced set, forms nanometer bundle band gap wave filter, another portion of silicon waveguide
Being arranged with the airport that radius is different, the radius of airport is about centrosymmetry, and in every side, airport radius is from center to end
Point is gradually reduced, airport spaced set (central point of each airport is equidistant), forms microcavity sensors；
The enlarged drawing of 1-D photon crystal nanometer bundle microcavity sensors, as in figure 2 it is shown, its Q-value > 107, it is by single one-dimensional
Photonic crystal nanometer bundle microcavity is constituted, and the radius of airport is about center to property, and in every side, airport radius is from center to end
It is gradually reduced, if distance a between airport2=330nm, middle airport radius is rcenter=120nm, end points
Airport radius be rend=85nm, then the radius coincidence formula of airport:
R (i)=rcenter+(i-1)2(rend-rcenter)/(imax-1)2
Wherein, i represents the number of airport, and i starts value from 1, and i is natural number, imaxRepresent the air taken in silicon waveguide
Number of perforations, the span of i is 0 to imax。
The enlarged drawing of nanometer bundle band gap wave filter, as it is shown on figure 3, it is by single perfect 1-D photon crystal nanometer bundle waveguide structure
Becoming, its airport radius is identical, if airport radius r1=90nm, distance a between airport1=390nm.
In described 1-D photon crystal nanometer bundle, medium is silicon, and background media is air.Wherein the thickness of silicon waveguide is 220nm,
Silicon duct width Wnb=700nm, silicon waveguide length is 10um, refractive index N of siliconSi=3.46, the refractive index of airport
Nair=1.0.
The refractive index sensitivity (S) of described photonic crystal sensors can be expressed as: S=Δ λ/Δ n, and wherein Δ λ is resonance wavelength peak
The side-play amount of value；Δ λ is the variable quantity of refractive index in sensing region.When in sensing region, refractive index changes, resonator cavity
Resonant frequency offsets the most therewith, by measuring and analyze the offset variation of resonance wavelength peak value in reflectance spectrum, i.e. can get light
The sensitivity of sub-crystal transducer.
The radius r of the airport in 1-D photon crystal integrated sensor, distance a between airport, the number i of airport,
The width w of silicon waveguide and thickness h, when any one parameter changes, resonance wavelength peak value all can offset.Therefore may be used
To be constituted the refractive index biography of 1-D photon crystal nanometer bundle waveguide and microcavity cascade structure by reasonably designing each structural parameters
The basic structure of sensor.
Utilize Three-dimensional Time Domain finite difference calculus (3D-FDTD), by simulation software, its energy band diagram, field figure transmission spectrum emulated,
Can therefrom find out, the high sensitivity micro-nano sensor that the present invention realizes, its refractive index level of sensitivity is～126.7nm/RIU.
Fig. 4 is the transmission plot that 1-D photon crystal nanometer bundle micro-cavity structure obtains, and its abscissa is wavelength, and vertical coordinate is transmission
Spectrum, wherein has 3 resonance peaks, and wherein resonance peak 1 is the basic mode for sensing.With first resonance peak (the most just need now
It is basic mode) sense, only retain first resonance peak, the degree of accuracy of microcavity sensors is the highest, so will be at its transmission spectrum
Upper elimination two peaks below and only retain basic mode.
Fig. 5 is transmission spectrum based on nanometer bundle waveguide filter Yu the 1-D photon crystal integrated sensor of microcavity cascade structure, it
Abscissa be wavelength, vertical coordinate is transmission spectrum, after adding upper filter, has filtered off other higher order mode, has only remained basic mode
1.Fig. 5 is exactly sensor and the later transmission spectrum of filters in series, and figure can be seen that only remaining first resonance peak, after
Filter.
Fig. 6 is the transmission spectrum that 1-D photon crystal cascade structure obtains under different background medias, and its abscissa is wavelength,
Vertical coordinate is transmission spectrum, and wherein the refractive index of background media is respectively 1.0,1.1,1.2 and 1.3, and corresponding curve is respectively
Shown in figure 1,2,3,4.
Fig. 7 is wavelength and the graph of relation of background media of resonance peak, and its abscissa is refractive index, and vertical coordinate is resonance wave
Long, along with the increase of background media refractive index, the wavelength of resonance peak offsets to long wavelength direction.
Claims (5)
1. a 1-D photon crystal integrated sensor based on nanometer bundle waveguide filter Yu microcavity cascade structure, including one-dimensional light
Sub-crystalline nanometric band gap wave filter and nanometer bundle microcavity sensors, 1-D photon crystal nanometer bundle band gap wave filter and nanometer bundle are micro-
Cavity sensor is connected.
A kind of 1-D photon crystal based on nanometer bundle waveguide filter Yu microcavity cascade structure the most according to claim 1
Integrated sensor, described 1-D photon crystal nanometer bundle band gap wave filter and nanometer bundle microcavity sensors be:
Silicon duct width is w, and thickness is h, a length of L, and a silicon waveguide part is provided with the airport of same radius, airport
Spaced set, forms nanometer bundle band gap wave filter, and silicon waveguide another part is provided with the airport that radius is different, the half of airport
Footpath is about centrosymmetry, and in every side, airport radius is gradually reduced from center to end points, airport spaced set, is formed
Nanometer bundle microcavity sensors.
A kind of 1-D photon crystal based on nanometer bundle waveguide filter Yu microcavity cascade structure the most according to claim 2
Integrated sensor, described nanometer bundle microcavity sensors hollow pore radius be gradually reduced from center to end points particularly as follows:
If distance a between airport2=330nm, middle airport radius is rcenter=120nm, the air of end points
Pore radius is rend=85nm, then the radius coincidence formula of airport:
R (i)=rcenter+(i-1)2(rend-rcenter)/(imax-1)2
Wherein, i represents the number of airport, and i starts value from 1, and i is natural number, imaxRepresent the air taken in silicon waveguide
Number of perforations.
A kind of 1-D photon crystal based on nanometer bundle waveguide filter Yu microcavity cascade structure the most according to claim 2
Integrated sensor, airport in described nanometer bundle band gap wave filter is particularly as follows: airport radius r1=90nm, between airport
Distance a1=390nm.
A kind of 1-D photon crystal based on nanometer bundle waveguide filter Yu microcavity cascade structure the most according to claim 2
Integrated sensor, described silicon duct thickness is 220nm, and width is 700nm, a length of 10um.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106772703A (en) * | 2016-12-16 | 2017-05-31 | 北京邮电大学 | 1 × 8 high-performance photonic crystal parallel multiplied sensor array structure of the one kind based on silicon on insulator (SOI) |
| CN107703101A (en) * | 2017-09-25 | 2018-02-16 | 电子科技大学 | Biology sensor based on 1-D photon crystal coupling micro-loop chamber |
| CN108288580A (en) * | 2017-09-25 | 2018-07-17 | 电子科技大学 | Optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity |
| CN108333680A (en) * | 2018-02-14 | 2018-07-27 | 北京邮电大学 | A kind of photon crystal micro cavity and sensor |
| CN109443399A (en) * | 2018-10-29 | 2019-03-08 | 北京邮电大学 | A kind of photonic crystal nanometer beam microcavity sensors array based on micro-nano fiber |
| CN110737114A (en) * | 2019-10-10 | 2020-01-31 | 深圳大学 | Optical modulator |
| CN114397274A (en) * | 2021-12-29 | 2022-04-26 | 中国科学院上海微系统与信息技术研究所 | Slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor |
-
2016
- 2016-04-28 CN CN201610274148.3A patent/CN105954234A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| DAQUAN WANG,CHUAN WANG, YUEFENG JI: "Silicon On-Chip One-dimensional Photonic Crystal Nanobeam Bandgap Filter Integrated With Nanobeam Cavity for Accurate Refractive Index Sensing", 《IEEE PHOTONICS JOURNAL》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106772703A (en) * | 2016-12-16 | 2017-05-31 | 北京邮电大学 | 1 × 8 high-performance photonic crystal parallel multiplied sensor array structure of the one kind based on silicon on insulator (SOI) |
| CN106772703B (en) * | 2016-12-16 | 2019-08-13 | 北京邮电大学 | One kind being based on the parallel multiplied sensor array structure of 1 × 8 high-performance photonic crystal of silicon on insulator (SOI) |
| CN107703101A (en) * | 2017-09-25 | 2018-02-16 | 电子科技大学 | Biology sensor based on 1-D photon crystal coupling micro-loop chamber |
| CN108288580A (en) * | 2017-09-25 | 2018-07-17 | 电子科技大学 | Optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity |
| CN108288580B (en) * | 2017-09-25 | 2020-04-21 | 电子科技大学 | Preparation method of optical biosensor based on one-dimensional photonic crystal coupling microcavity |
| CN107703101B (en) * | 2017-09-25 | 2021-04-20 | 电子科技大学 | Biosensor based on one-dimensional photonic crystal coupling micro-ring cavity |
| CN108333680A (en) * | 2018-02-14 | 2018-07-27 | 北京邮电大学 | A kind of photon crystal micro cavity and sensor |
| CN109443399A (en) * | 2018-10-29 | 2019-03-08 | 北京邮电大学 | A kind of photonic crystal nanometer beam microcavity sensors array based on micro-nano fiber |
| CN110737114A (en) * | 2019-10-10 | 2020-01-31 | 深圳大学 | Optical modulator |
| CN114397274A (en) * | 2021-12-29 | 2022-04-26 | 中国科学院上海微系统与信息技术研究所 | Slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor |
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