CN109470651A - A kind of multi-mode elliptical aperture 1-D photon crystal nanometer bundle dual sampling device based on lattice constant gradation type - Google Patents
A kind of multi-mode elliptical aperture 1-D photon crystal nanometer bundle dual sampling device based on lattice constant gradation type Download PDFInfo
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- CN109470651A CN109470651A CN201811242183.2A CN201811242183A CN109470651A CN 109470651 A CN109470651 A CN 109470651A CN 201811242183 A CN201811242183 A CN 201811242183A CN 109470651 A CN109470651 A CN 109470651A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Abstract
The present invention relates to a kind of lattice constant gradation type multi-mode elliptical aperture 1-D photon crystal nanometer bundle dual sampling devices, belong to photonic crystal sensor technical field.The elliptical aperture of lattice constant gradual change is firstly introduced based on rectangular silicon waveguide, lattice constant is gradually increased from waveguide core to two sides, constitutes multi-mode 1-D photon crystal nanometer bundle sensor, and basic mode Q value is greater than 1.5 × 105, First-Order Mode Q value about 14696, FSR about 44.75nm.The field distribution of different mode is different, and basic mode refractive index sensitivity, First-Order Mode refractive index sensitivity, basic mode temperature sensitivity and First-Order Mode temperature sensitivity constitute sensing matrix full rank, realizes that temperature refraction rate senses simultaneously.Compared to conventional photonic crystals nanometer bundle sensor, the present invention realizes double parameters while detecting, and the scope of application is wider, and feasibility is higher.Compared to other dual sampling devices, which is only 12 μ m, 0.22 μm of 0.7 μ m (length × width × height), and size greatly reduces, and is more advantageous to integrated.
Description
Technical field
The invention proposes a kind of, and the multi-mode elliptical aperture 1-D photon crystal nanometer bundle based on lattice constant gradation type passes
Sensor structure may be implemented sensing while temperature and refractive index in solution, belong to the technical field of photonic crystal sensors.
Background technique
In recent years, photonic crystal sensors with highly sensitive, low detection limit, without label due to detecting, being easy on piece
The advantages such as integrated, have received widespread attention, achieve many significant research achievements.For example, plate light of the design based on L3 chamber
Sub- crystal structure realizes biochemical sensitive (document 1:Y.Liu, H.Salemink, " All-optical on-chip sensor for
high refractive index sensing,”Applied Physics Letters,vol.106,no.3,
pp.031116,2015)；Design photonic crystal nanometer constriction at structure be applied to temperature sensing (document 2:Y.Zhang, P.Liu,
S.Zhang,W.Liu,J.Chen,Y.Shi,“High sensitivity temperature sensor based on
cascaded silicon photonic crystal nanobeam cavities,”Optics express,vol.24,
no.20,pp.23037-23043,2016)；Design the two dimensional photonic crystal sensor of oblique arrangement direct coupled cavities structure
Applied to pressure sensing (document 3:Y.Yang, H.Tian, D.Yang, N.Wu, J.Zhou, Q.Liu, Y.Ji,
“Nanomechanical three dimensional force photonic crystal sensor using
shoulder-coupled resonant cavity with an inserted pillar,”Sensors and
Actuators A:Physical, vol.209.pp.33-40,2014), etc..
Compared with two-dimensional flat plate photon crystal structure, 1-D photon crystal nanometer bundle resonant cavity is with higher Q value and more
Low mode volume, be conducive to extensive on piece it is integrated (document 4:L.Huang, J.Zhou, F.Sun, Z.Fu, H.Tian,
“Optimization of one dimensional photonic crystal elliptical-hole low-index
mode nanobeam cavities for on-chip sensing,”Journal of Lightwave Technology,
vol.34,no.15,pp.3496-3502,2016；Document 5:F.Sun, J.Zhou, L.Huang, Z.Fu, H.Tian, " High
quality factor and high sensitivity photonic crystal rectangular holes slot
nanobeam cavity with parabolic modulated lattice constant for refractive
index sensing,"Optics Communications,vol.399,pp.56-61,2017).Traditional photonic crystal nano
Rice beam sensor usually only studies the sensing of one variable parameter of refractive index, still, deeply with research, it has been found that
When refractive index is sensed, due to thermo-optic effect, the influence of temperature cannot be ignored.Therefore, it reports successively in recent years
The some photonic crystal sensor structures that temperature and refractive index while detection may be implemented in road.For example, 0 chamber of Cascade H and H1 chamber
Slab photonic crystal sensor (document 6:Y.Zhang, Y.Zhao, H.Hu, " Miniature photonic crystal
cavity sensor for simultaneous measurement of liquid concentration and
temperature,"Sensors and Actuators B:Chemical,vol.216,pp.563-571,2015)；Medium mould
With air mode parallel connection nanometer bundle sensor (document 7:P.Liu, Y.Shi, " Simultaneous measurement of
refractive index and temperature using cascaded side-coupled photonic crystal
Nanobeam cavities, " Optics Express, vol.25, no.23, pp.28398-28406,2017) still, these
Structure requires to integrate 2 or multiple resonant cavities, increases structure size and manufacture difficulty.
Therefore, on the basis of guaranteeing sensing capabilities, we have proposed a kind of multi-modes based on lattice constant gradation type
Elliptical aperture 1-D photon crystal nanometer bundle sensing arrangement.It is only necessary to a nanometer bundle chambers, so that it may realize to temperature, refractive index
2 parameters detect sensing simultaneously.Moreover, the size of the structure is only 12 μ m, 0.22 μm of 0.7 μ m (length × width × height), favorably
It is integrated in carrying out extensive on piece.
Summary of the invention
(1) technical problems to be solved
The present invention is directed to overcome the shortcomings of existing photonic crystal sensor technology: firstly, traditional photonic crystal nanometer beam is rolled over
Rate sensor is penetrated, although can achieve preferable sensitivity and Q value, only considers one sensing index of refractive index, and in recent years
Come studies have shown that thermo-optic effect cannot be ignored；Secondly, existing photonic crystal dual sampling structure, needs multiple
With at least two resonant cavity, structure size and manufacture difficulty are considerably increased.
(2) technical solution
In order to achieve the above objectives, the technical solution adopted by the present invention is specific as follows:
Firstly, the present invention in silicon (Si) waveguide, is etched about the consistent slotted eye of the symmetrical size of waveguide core, this
The lattice constant gradual change of a little elliptical apertures, and overall structure is symmetrical about center elliptical aperture, the photonic crystal nanometer beam chamber constituted
It can produce multiple resonance peaks in transmission spectrum.
In the above scheme, the refractive index of silicon waveguide is 3.48, and the width (w) of waveguide is 700nm, ellipse with a thickness of 220nm
The major axis dimension (Ey) of round hole is 500nm, and minor axis dimension (Ex) is 200nm.
In the above scheme, it etches and is formed about the oval-shaped pore structures of the symmetrical lattice constant gradual change of waveguide core number
Gauss decaying mirror image, lattice constant centre is minimum, successively increases to the left and right sides.The calculation formula of lattice constant is a (i)=a
(1)+(i-1)2(a(1)-a(imax))/(imax-1)2,i∈[1,imax], i refers to i-th of hole of structure side, and a (i) refers to i-th of hole
Lattice constant, imaxThe then slotted eye number of representative structure side.Wherein a (1)=330nm, a (imax)=394nm.
In the above scheme, the number of the slotted eye on both sides is all 10, and structure size is only 12 μ m, 0.7 μ m
0.22 μm (length × width × height).
In the above scheme, consider waveguide material and detect the thermo-optic effect of solution, basic mode and First-Order Mode refractive index and
The sensitivity of temperature constitutes the sensing matrix of full rank, by detecting the respective resonance wavelength shift of transmission spectrum, so that it may calculate
Refractive index and the respective variable quantity of temperature out.
(3) beneficial effect
Compared with the prior art scheme, from above scheme, beneficial effects of the present invention are summarized as follows:
1) present invention realizes double parameters to temperature and refractive index while sensing.
2) the elliptical aperture nanometer bundle structure that the present invention designs is designed using lattice gradation type, haves no need to change slotted eye
Size, and only need to change mutual position, make simpler.
3) compared to existing photonic crystal dual sampling structure, it is only necessary to a resonant cavity, so that it may realize to two
The sensing of a parameter.On the basis of not sacrificing sensing capabilities, substantially reduce structure size size, be conducive to element manufacturing and
On piece is integrated.
4) the nanometer bundle sensor designed by the present invention, structure size be only 0.22 μm of 12 μ m, 0.7 μ m (it is long × wide ×
It is high), it is integrated to be conducive to extensive on piece.
Detailed description of the invention
Fig. 1 (a) is the lattice constant gradation type multi-mode elliptical aperture 1-D photon crystal nanometer bundle that present invention implementation provides
The structural schematic diagram of dual sampling device.The refractive index of silicon is 3.48, the width w=700nm of waveguide, with a thickness of 220nm, ellipse
The major axis dimension Ey=500nm in shape hole, minor axis dimension Ex=200nm.The refractive index and background refractive index of slotted eye be
1.316。
Fig. 1 (b) is the nanometer bundle chamber basic mode obtained using Three-dimensional Time Domain finite difference calculus (3D-FDTD) emulation and First-Order Mode
In the distribution map of the electric field of respective resonance wave strong point.
Fig. 2 is the relational graph according to mirror image strength formula, between the lattice constant being calculated and mirror image intensity.
Fig. 3 is the monocrystalline using plane wave expansion method (PWE), when obtained lattice constant is a=330nm and a=394nm
The energy band diagram of born of the same parents.
Fig. 4 is the resonance transmission spectrum when solution refractive index changes, and the value of solution refractive index is respectively 1.316,
1.3178,1.3196,1.3214 and 1.3232, environment temperature keeps 300K constant at this time.
Fig. 5 is the relational graph between resonance wavelength shift amount and refractive index, straight line be calculated it is between the two linear
Fitting a straight line.
Fig. 6 is the resonance transmission spectrum when environment temperature changes, and temperature is respectively set to 300K, 305K, 310K,
315K and 320K, refractive index are set as 1.316 and remain unchanged.The influence of thermo-optic effect is considered, the thermo-optical coeffecient of silicon is
1.84×10-4RIU/K, the thermo-optical coeffecient of NaCl solution are -1.64 × 10-4RIU/K。
Fig. 7 is the relational graph between resonance wavelength shift amount and temperature, and straight line is that Linear Quasi between the two is calculated
Close straight line.
Specific embodiment
To be more clear the object, technical solutions and advantages of the present invention, below with reference to attached drawing, to double ginsengs of the invention
Amount sensing principle, specific structure and sensing capabilities are described further:
Firstly, the present invention specifies the realization principle for carrying out dual sampling using the different mode of single nanometer bundle chamber:
For multi-mode nanometer bundle structure, by basic mode refractive index sensitivity (Sn,0), basic mode temperature sensitivity (ST,0), First-Order Mode folding
Penetrate rate sensitivity (Sn,1), First-Order Mode temperature sensitivity (ST,1) it may be constructed sensing matrixTo construct
Linear equation in two unknowns groupWherein, Δ λ0With Δ λ1Respectively represent the resonance wave of basic mode and First-Order Mode
Long offset, Δ n and Δ T respectively represent the knots modification of refractive index and temperature.When the matrix full rank, linear equation in two unknowns group has
Unique solution.Δ λ is obtained by detection transmission spectrometry0With Δ λ1, can solve equation and calculate Δ n and Δ T.
The multi-mode elliptical aperture 1-D photon crystal nanometer bundle sensing based on lattice constant gradual change that the invention proposes a kind of
Device, shown in structural schematic diagram such as Fig. 1 (a).Structure uses refractive index as 3.48, width 700nm, with a thickness of 220nm's
Silicon waveguiding structure is etched about the symmetrical slotted eye of waveguide core number.In this configuration, the major axis dimension Ey of slotted eye
=500nm and minor axis dimension Ex=200nm are remained unchanged, and lattice constant is gradually increased from centre to both sides.Lattice constant
Calculation formula be a (i)=a (1)+(i-1)2(a(1)-a(imax))/(imax-1)2,i∈[1,imax], i refers to the of structure side
I hole, a (i) refer to the lattice constant in i-th of hole, imaxThe slotted eye number of representative structure side.Wherein a (1)=330nm, a
(imax)=394nm.Light inputs on the left of waveguide, and detector is located on the right of waveguide, for the transmission spectrum of detection structure.Pass through three
It ties up Finite-Difference Time-Domain Method (3D-FDTD), emulation obtains basic mode, the First-Order Mode distribution map of the electric field, such as Fig. 1 of multi-mode nanometer bundle chamber
(b) shown in.The fundamental resonance wavelength of the nanometer bundle chamber is 1558.03nm, and the resonance wavelength of First-Order Mode is 1607.21nm, and
With different field distributions.
The multi-mode elliptical aperture nanometer bundle chamber dual sampling device of lattice constant gradation type proposed by the present invention, it is main to study
Parameter selection be gradual change lattice constant range and variation pattern.Since resonance peak to be allowed is near 1550nm, we select a
=330nm is as intermediate the smallest lattice constant.Fig. 2, which gives, is utilized mirror image strength formula
Corresponding relationship between the lattice constant being calculated and mirror image intensity, wherein ω1And ω2For the side of upper side band and lower sideband
Edge frequency, ωresFor the frequency of center hole unit cell unit medium mould, ω0For Intermediate Gray frequency.As can be seen that working as a=394nm
When, obtain maximum mirror image intensity.Fig. 3 be the lattice constant obtained using plane wave expansion method (PWE) be 394nm and
The energy band diagram of 330nm.It is a (i)=a (1)+(i-1) using calculation formula2(a(1)-a(imax))/(imax-1)2,i∈[1,
imax], the specific value of lattice constant has been calculated.Wherein, i refers to i-th of hole of structure side, and a (i) refers to the crystalline substance in i-th of hole
Lattice constant, imaxThe then slotted eye number of representative structure side, a (1)=330nm, a (imax)=394nm.
The multi-mode elliptical aperture nanometer bundle chamber dual sampling device of lattice constant gradation type proposed by the present invention, both sides are oval
The number in hole is respectively 10, at this point, basic mode is located at 1558.03nm, Q value is about 63936；First-Order Mode is located at 1607.21nm
Place, Q value is about 6600, it is already possible to be suitable for sensory field.
Refractive index is carried out respectively to the structure using 3D-FDTD algorithm based on specific dual sampling mechanism of the invention
The analysis of sensing and temperature sensing.Fig. 4 is the resonance transmission spectrum when the refractive index of solution changes, and environment temperature is kept
300K is constant, and the value of solution refractive index is respectively that 1.316,1.3178,1.3196,1.3214 and 1.3232, Fig. 5 is resonance wavelength
Relational graph between offset and refractive index.As can be seen from Figure 4 and Figure 5, when refractive index increases, linear red shift occurs for wavelength,
The refractive index sensitivity S of basic moden,0=140.28nm/RIU, the sensitivity S of First-Order Mode refractive indexn,1=168.055nm/RIU.
And then, the influence for considering thermo-optic effect, the thermo-optical coeffecient for introducing silicon is 1.84 × 10-4RIU/K, NaCl solution
Thermo-optical coeffecient is -1.64 × 10-4RIU/K.Fig. 6 is the resonance transmission spectrum when environment temperature changes, and temperature is set respectively
It is set to 300K, 305K, 310K, 315K and 320K, the holding 1.316 of solution refractive index is constant.Fig. 7 is resonance wavelength shift amount and temperature
Linear fitting diagram between degree.As can be seen from Figures 6 and 7, when temperature changes, the resonance of basic mode, First-Order Mode
Linear deflection, sensitivity S of the basic mode to temperature can all occur for wavelengthT,0=48pm/K, sensitivity S of the First-Order Mode to temperatureT,1=
44.5pm/K。
To sum up, in the multimode nanometer bundle structure, by Sn,0, Sn,1, ST,0And ST,1The sensing matrix of compositionMeet the condition of full rank, linear equation in two unknowns group has unique solution.Therefore, it is actually answering
In, solution refractive index and temperature can be calculated by basic mode and the corresponding resonance wavelength shift of First-Order Mode in detection transmission spectrum
Spend respective variable quantity.
Claims (5)
1. proposing a kind of multi-mode elliptical aperture 1-D photon crystal nanometer bundle sensor of lattice constant gradation type.In silicon (Si) wave
It leads, the slotted eye about the symmetrical lattice constant gradual change of waveguide core is etched, to constitute the photonic crystal nanometer of multi-mode
Beam chamber.Wherein, the refractive index of silicon waveguide is 3.48, and width (w) is 700nm, with a thickness of 220nm, elliptical aperture major axis dimension (Ey)
For 500nm, minor axis dimension (Ex) it is 200nm.
2. proposing a kind of implementation method for carrying out dual sampling using multi-mode photon crystalline nanometric beam chamber: due to basic mode and one
The field distribution of rank mould is different, different to the sensitivity of extraneous environmental change；Utilize basic mode, the respective refractive index of First-Order Mode, temperature
Two can be constructed by detecting the resonance wavelength shift amount of transmission spectrum basic mode and First-Order Mode by spending the sensing matrix that sensitivity is constituted
First linear function group, calculates the variable quantity of temperature and refractive index.
3. multi-mode elliptical aperture 1-D photon crystal nanometer bundle chamber dual sampling device according to claims 1 and 2, special
Sign are as follows: in 1-D photon crystal silicon wave guide direction, the size constancy of elliptical aperture, and lattice constant is from structure centre to two sides
Increase, and about centre bore bilateral symmetry.Wherein, the calculation formula of lattice constant is a (i)=a (1)+(i-1)2(a(1)-a
(imax))/(imax-1)2,i∈[1,imax], i refers to i-th of hole of structure side, and a (i) refers to the lattice constant in i-th of hole, imaxGeneration
The number of the slotted eye of table structure side, a (1)=330nm, a (imax)=394nm.
4. multi-mode elliptical aperture 1-D photon crystal nanometer bundle dual sampling device according to claims 1 and 2, feature
It is: in NaCl solution (refractive index n=1.3160, original ambient temperature T=300K), when refractive index and temperature change
Become, basic mode is respectively 48pm/K and 140.28nm/RIU to the sensitivity of temperature and refractive index, and First-Order Mode is to temperature and refractive index
Sensitivity be respectively 44.5pm/K and 168.055nm/RIU, at this point, the sensing matrix full rank being made of them, binary one
Equation of n th order n group has unique solution, can calculate the knots modification of temperature and refractive index, realizes that double parameters sense simultaneously.
5. multi-mode elliptical aperture 1-D photon crystal nanometer bundle dual sampling device according to claims 1 and 2, feature
Be: the slotted eye number of structure two sides is 10, and structure size is only 12 μ m, 0.22 μm of 0.7 μ m (length × width × height),
The extensive on piece for being conducive to device is integrated.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112345114A (en) * | 2020-09-15 | 2021-02-09 | 燕山大学 | Double-parameter sensing structure based on one-dimensional photonic crystal nano beam cavity |
| CN112557771A (en) * | 2020-12-02 | 2021-03-26 | 清华大学 | High-sensitivity miniature electric field sensor with stable temperature |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112345114A (en) * | 2020-09-15 | 2021-02-09 | 燕山大学 | Double-parameter sensing structure based on one-dimensional photonic crystal nano beam cavity |
| CN112557771A (en) * | 2020-12-02 | 2021-03-26 | 清华大学 | High-sensitivity miniature electric field sensor with stable temperature |
| CN112557771B (en) * | 2020-12-02 | 2021-10-08 | 清华大学 | High-sensitivity miniature electric field sensor with stable temperature |
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Application publication date: 20190315 |