CN106770033B - A kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice constant gradual change - Google Patents
A kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice constant gradual change Download PDFInfo
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Abstract
The present invention relates to a kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice constant gradual change.The present invention is in 1-dimention nano beam silicon waveguide, first passage introduces the rectangular opening being gradually reduced from chamber center to two sides lattice constant, form air mode photonic crystal nanometer beam chamber, so that light field predominant local is in region of low refractive index, to enhance the time and intensity of light-matter interaction, the sensitivity and quality factor of sensor are improved.When two sides, air hole count is respectively 8, quality factor is up to 1.27 × 105, mode volume is down to 0.018 (λ/n)3, sensitivity 252nm/RIU, structure size is only 0.7 μm of 8 μ m (long × wide).The present invention is greatly improved compared to medium mould nanometer bundle chamber, sensitivity, is suitable for gas sensing；Compare with other kinds of air mode photonic crystal nanometer beam chamber (nanometer bundle width gradual change, Kong great little gradual change), in the case where not sacrificing quality factor, structure length can reduce half, and micromation and the on piece for being conducive to device are integrated.
Description
Technical field
The present invention relates to a kind of 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening gradual change, belongs to photonic crystal
Sensor technical field.
Background technique
In recent years, the 1-D photon crystal nanometer bundle chamber with high-quality-factor (Q) and small mode volume (V) has caused
The extensive concern of optical sensor researcher.This is because high Q/V ratio represents strong light object interaction, optics can be made to pass
Sensor obtains high-resolution and high sensitivity.But (the document 1:Qimin in typical 1-D photon crystal nanometer bundle sensor
Quan,Daniel L.Floyd,Ian B.Burgess,Parag B.Deotare,Ian W.Frank,Sindy K.Y.Tang,
Rob Ilic,and Marko Loncar."Single particle detection in CMOS compatible
photonic crystal nanobeam cavities,"Optics express 21.26(2013):32225-32233；Text
Offer 2:Xingwang Zhang, Guangya Zhou, Peng Shi, Han Du, Tong Lin, Jinghua Teng, and
Fook Siong Chau."On-chip integrated optofluidic complex refractive index
sensing using silicon photonic crystal nanobeam cavities."Optics letters 41.6
(2016): 1197-1200.), light field major part local realizes high Q in high-refractive-index regions, therefore in region of low refractive index
Testing and analyzing object can only be with the disappearance field interactions of mode of resonance, and the interaction between light field and analyte is very weak, sensitive
It spends low.
Therefore the photonic crystal nanometer beam chamber based on air mode starts to be studied.But, it has been found that it has been delivered at present
Air mode photonic crystal nanometer beam cavity configuration in (document 3:Liang, Feng, and Qimin Quan. " Detecting
single gold nanoparticles(1.8nm)with ultrahigh-Q air-mode photonic crystal
nanobeam cavities."ACS Photonics 2.12(2015):1692-1697；Document 4:Ping Yu, Huiye
Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,and Jianyi Yang."High-Q
and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in
Silicon."IEEE Photonic Technology Letters 28.20(2016):2121-2124；Document 5:Yang,
Daquan,Huiping Tian,and Yuefeng Ji."High-Q and high-sensitivity width-
modulated photonic crystal single nanobeam air-mode cavity for refractive
index sensing."Applied optics 54.1(2015):1-5；Document 6:Zhang, Yuguang, and Yaocheng
Shi."Temperature insensitive lower-index-mode photonic crystal nanobeam
cavity."Optics letters 40.2(2015):264-267；Document 7:Lijun Huang, Jian Zhou, Fujun
Sun,Zhongyuan Fu,and Huiping Tian."Optimization of One Dimensional Photonic
Crystal Elliptical-Hole Low-Index Mode Nanobeam Cavities for On-chip
Sensing. " Journal of lightwave technology 34.15 (2016): 3496-3502.), a large amount of number of perforations
It is the necessary condition for realizing high q-factor.This makes the length of device longer, and is not easy to manufacture.
Therefore, in order to obtain the sensor of high q-factor, high sensitivity and small structure size, we are a kind of to propose to be based on rectangle
The air mode photonic crystal nanometer beam chamber of hole lattice constant gradual change.In the case where not sacrificing Q value, structure length is compared to
The air mode photonic crystal nanometer beam chamber of proposition can reduce half.
Summary of the invention
(1) technical problems to be solved
It is an object of the invention to solve the problems, such as that existing 1-D photon crystal nanometer bundle cavity sensor exists: first is that being situated between
Matter mould 1-D photon crystal nanometer bundle chamber, light field predominant local obtain high Q to high refractivity region, so that analyte and light field phase
Interaction is weak, thus the problem that sensitivity is not high；Second is that existing air mode 1-D photon crystal nanometer bundle chamber, needs more
Airport could obtain high Q, so that structure size is longer, be unfavorable for the problem of making.
(2) technical solution
To solve the problem above-mentioned, the invention proposes the air mode photonic crystal nanos based on rectangular opening lattice constant gradual change
Rice beam chamber.In 1-D photon crystal silicon waveguide, the rectangular opening about waveguide core number symmetric crystal lattice constant gradual change is etched, from
And light field local is obtained to region of low refractive index, structure size is small, the high ridge waveguide structure of Q value, thus constitutes and is able to achieve sky
The nanometer bundle cavity configuration of gas mould sensing.
In above scheme, rectangular opening of the etching about waveguide core number symmetric crystal lattice constant gradual change, is on edge
In 1-D photon crystal silicon wave guide direction, etches and formed about the rectangle pore structure of waveguide core number symmetric crystal lattice constant gradual change
Gauss decaying mirror image, wherein the refractive index of silicon is 3.48, duct width 700nm, and with a thickness of 220nm, the size of rectangular opening is
200nm × 500nm, lattice constant ai=a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i refer to the i-th of structure side
A rectangular opening, aiRefer to the lattice constant of i-th of rectangular opening, wherein a1=500nm, an=424nm.
In above scheme, the air mode 1-D photon crystal nanometer bundle cavity configuration, is to instigate center position rectangle
In the air mode local of hole unit cell unit to the forbidden band of both sides unit cell units, the local intensity of light is improved, enhancing light object effect
Time improves the sensitivity and quality factor of sensor.
In above scheme, when the number n of two sides airport is respectively 8, high-quality-factor can be obtained, this is because should
Structure is small in the loss of waveguide transmission direction, and light local ability is strong.
The principle of the present invention is, by being gradually reduced the lattice constant of rectangular opening from center to two sides, so that center is to two
The effective refractive index of side unit cell units is gradually reduced, so that photonic band gap is gradually translated to high frequency, centre bore unit cell units
Air mode to form air mode photonic crystal nanometer beam chamber by the forbidden band local of two sides unit cell units.
(3) beneficial effect
Compared with prior art, the invention has the following advantages:
1. the present invention is compared to medium mould nanometer bundle chamber, under the premise of not sacrificing quality factor, sensitivity is greatly improved,
Suitable for gas sensing.
2. the present invention compares and other kinds of air mode photonic crystal nanometer beam chamber (nanometer bundle width gradual change, Kong great little
Gradual change), in the case where not sacrificing quality factor, structure length can reduce half, be conducive to the micromation and on piece of device
It is integrated.
3. the present invention has high q-factor, Gao Ling compared to other kinds of photonic crystal nanometer beam cavity sensor
Sensitivity, low mode volume and small structure size.
4. the present invention only changes the position of rectangular opening, and the size of rectangular opening remains unchanged, so that its production production letter
It is single.
Detailed description of the invention
The air mode 1-D photon crystal nanometer bundle cavity configuration parameter for the rectangular opening lattice gradual change that following figure is taken and
Background refractive index is identical with specific embodiment.
Fig. 1 (a) is the air mode 1-D photon crystal nanometer bundle cavity configuration schematic diagram based on rectangular opening lattice constant gradual change.
The refractive index of silicon is 3.48, duct width 700nm, and with a thickness of 220nm, the size of rectangular opening is 200nm × 500nm, hole folding
It penetrates rate and background refractive index is 1.
Fig. 1 (b) is that the 1-dimention nano beam chamber obtained by Three-dimensional Time Domain finite difference method exists in x/y plane and xz plane
The distribution map of the electric field of resonance wavelength 1521.74nm.
Fig. 2 is band structure figure of lattice constant when being respectively 500nm and 424nm.
Fig. 3 (a) is the transmission transmission spectrum of the 1-dimention nano beam obtained using Three-dimensional Time Domain finite difference calculus.
Fig. 3 (b) be corresponding to 0 rank mould, the field distribution of 1 rank mould and 2 rank moulds and its corresponding quality in transmission spectrum because
Son and mode volume.
Fig. 4 (a) is the obtained transmission spectrum when refractive index changes in 1.00 to 1.06 ranges, and illustration is different refractions
The enlarged drawing of the transmission transmission spectrum of 0 rank mould under rate.
Fig. 4 (b) is the relationship fitted figure of 0 rank mould resonance wavelength and variations in refractive index.
Specific embodiment
To be more clear the object, technical solutions and advantages of the present invention, below in conjunction with attached drawing, to the specific knot of invention
Structure, principle and sensing characteristics are described further.
The invention proposes a kind of, and the air mode 1-D photon crystal nanometer bundle chamber based on rectangular opening lattice constant gradual change is raw
The implementation method of object sensor, shown in structural schematic diagram such as Fig. 1 (a).The chamber of air mode in order to obtain, effective folding of structure cell
The rate of penetrating need to be gradually reduced from center to two sides, thus keep photonic band gap mobile to high-frequency, the sky of centre bore unit cell units
Gas mould increases the local time and intensity of light by the forbidden band of local to a series of unit cell units in two sides.The structure is for reality
Existing air mode nanometer bundle cavity configuration etches symmetrically brilliant about waveguide core number in 1-D photon crystal silicon wave guide direction
The rectangular opening that lattice constant is gradually reduced from center to two sides, wherein the refractive index of silicon is 3.48, rectangular opening and original background refraction
Rate is 1.00, duct width 700nm, and with a thickness of 220nm, the size of rectangular opening is 200nm × 500nm, lattice constant ai=
a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i refer to i-th of rectangular opening of structure side, aiRefer to i-th of rectangular opening
Lattice constant, wherein a1=500nm, an=424nm.Fig. 1 (b) is the 1-dimention nano obtained by Three-dimensional Time Domain finite difference calculus
Beam chamber xy and xz plane resonance wavelength 1521.74nm distribution map of the electric field.From Fig. 1 (b) as can be seen that electric field is by strong
In rectangular opening among local to chamber, illustrates that the present invention is suitable for sensing, the interaction of light and substance can be enhanced, improve and pass
The sensitivity of sensor.
Air mode nanometer bundle cavity sensor proposed by the present invention based on rectangular opening lattice constant gradual change, main parameter choosing
It is selected as the lattice constant range and variation pattern of gradual change.Gradation zone lattice constant variation range and variation pattern selection are as follows: first
The size for first combining duct width, thickness and rectangular opening, selects the lattice constant of centre bore, makes the energy of centre bore unit cell units
For air mode near 1550nm (194THz), obtaining the optimal lattice constant of centre bore by emulation is 500nm in band figure.So
Afterwards, mirror image strength formula is utilizedIn conjunction with the energy band diagram of structure cell, worked as
When lattice constant is 424nm, maximum mirror image intensity γ can be obtained, wherein ω1And ω2For upper side band and lower sideband marginal frequency,
ωresFor the frequency of center hole unit cell unit air mode, ω0For Intermediate Gray frequency.Fig. 2 illustrates 1-D photon crystal nanometer bundle
The energy band diagram of chamber centre bore unit cell units and the last one hole unit cell unit.Finally, in order to keep mirror image intensity linear with hole site
Variation, the present invention make the variation of lattice constant square ground, i.e. ai=a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i is referred to
I-th of rectangular opening of structure side, aiRefer to the lattice constant of i-th of rectangular opening, wherein a1=500nm, an=424nm.
It is 8, i.e. n=8 that the present invention, which selects the number of every side rectangular opening,.As the number of rectangular opening increases, Q value can also increase
Add.But the air mode 1-D photon crystal nanometer bundle chamber that the present invention designs just has reached as n=8 higher than 105Q value, for
For sensor, this Q value is sufficiently high.Therefore after tradeoff structure size and Q value relationship, n=8 is selected.
Fig. 3 (a) is the transmission transmission spectrum of the 1-dimention nano beam obtained using Three-dimensional Time Domain finite difference calculus.It can from figure
Out, which has 3 main resonance peaks, i.e. 0 rank mould, and 1 rank mould and 2 rank moulds, resonance frequency are respectively as follows: 1521.74nm,
1480.14nm and 1441.83nm.Its corresponding field distribution, quality factor and mode volume, as shown in Fig. 3 (b).It is aobvious and
It is clear to, 0 rank mould has higher Q value, lower V and stronger light field local ability relative to 1 rank mould and 2 rank moulds.Therefore, 0 rank
Mould is more suitable for carrying out optical sensing.
Finally, to the sensitivity of the air mode photonic crystal nanometer beam cavity sensor based on rectangular opening lattice constant gradual change into
Row analysis.Fig. 4 (a) is to obtain 1-D photon crystal nanometer bundle cavity configuration when refractive index changes in 1.00 to 1.06 ranges
Transmission spectrum, illustration be different refractivity under 0 rank mould transmission transmission spectrum enlarged drawing.Fig. 4 (b) is the resonance wavelength of 0 rank mould
The fitted figure of offset and index of refraction relationship.As seen from the figure, with the increase of refractive index, resonance peak changes to long wavelength shifted
It is in a linear relationship.When refractive index becomes 1.06 from 1.00, resonance wavelength fades to 1537.16nm from 1522.06nm, and resonance wavelength is inclined
15.10nm is moved.Therefore, according to Calculation of Sensitivity formula S=Δ λ/Δ n, it is 252.62nm/RIU that sensitivity, which is calculated,.By
As it can be seen that this is present invention can apply to gas sensing, in practical applications, by changing the concentration of environmental gas, light travels
The offset of the resonance peak of transmission spectrum can calculate the concentration of gas.
Claims (2)
1. a kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice constant gradual change, in which: the light
Sub- crystalline nanometric beam chamber is to etch the square about the symmetrical lattice constant gradual change of waveguide core in 1-D photon crystal silicon waveguide
Shape hole, so that light field local is into airport, to realize the photonic crystal nanometer beam cavity configuration of air mode sensing, the wherein folding of silicon
Penetrating rate is 3.48, duct width 700nm, and with a thickness of 220nm, the size of rectangular opening is 200nm × 500nm；Wherein, lattice is normal
Several gradual changed method are as follows: lattice constant is gradually reduced from center to two sides, and structure is symmetrical about centre bore, lattice constant ai=
A1- (i-1) 2 (a1-an)/(n-1) 2, i ∈ [1, n], i refer to that i-th of rectangular opening of structure side, ai refer to i-th of rectangular opening
Lattice constant, wherein a1=500nm, an=424nm.
2. air mode 1-D photon crystal nanometer bundle cavity sensor according to claim 1, it is characterised in that: when two sides square
When shape hole number is respectively 8, in the 0 rank mould that 1521.74nm is obtained, quality factor is higher than 105, and mode volume and structure ruler
Very little small, micromation and the on piece for being conducive to device are integrated；Change the refractive index of airport and background, resonance peak occurs red shift, obtains
Its sensitivity can be applied to gas sensing up to 252.62nm/RIU.
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| CN112345114B (en) * | 2020-09-15 | 2021-07-30 | 燕山大学 | Double-parameter sensing structure based on one-dimensional photonic crystal nano beam cavity |
| CN113391377B (en) * | 2021-04-23 | 2022-08-09 | 中国科学院微电子研究所 | Resonance mode control method and control system, electronic device, and storage medium |
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