CN106770033A - A kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice parameter gradual change - Google Patents
A kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice parameter gradual change Download PDFInfo
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Abstract
The present invention relates to a kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice parameter gradual change.The present invention is in 1-dimention nano beam silicon waveguide, first passage introduces the rectangular opening being gradually reduced to both sides lattice parameter from chamber center, form air mode photonic crystal nanometer beam chamber, so that light field predominant local is in region of low refractive index, so as to strengthen the time and intensity of light-matter interaction, sensitivity and the quality factor of sensor are improved.When both sides air hole count is respectively 8, its quality factor is up to 1.27 × 105, mode volume as little as 0.018 (λ/n)3, sensitivity is 252nm/RIU, and physical dimension is only 0.7 μm of 8 μ m (long × wide).Compared to medium mould nanometer bundle chamber, sensitivity is greatly improved the present invention, it is adaptable to gas sensing；Compare with other kinds of air mode photonic crystal nanometer beam chamber (nanometer bundle width gradual change, hole size gradual change), in the case where quality factor is not sacrificed, its structure length can reduce half, be conducive to device miniaturization and piece on it is integrated.
Description
Technical field
The present invention relates to a kind of 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening gradual change, belong to photonic crystal
Sensor technical field.
Background technology
In recent years, the 1-D photon crystal nanometer bundle chamber with high-quality-factor (Q) and small mode volume (V) has caused
The extensive concern of optical pickocff researcher.Because Q/V ratios high represent strong light thing interacting, can pass optics
Sensor obtains high-resolution and high sensitivity.But (the document 1 in typical 1-D photon crystal nanometer bundle sensor：Qimin
Quan,Daniel L.Floyd,Ian B.Burgess,Parag B.Deotare,Ian W.Frank,Sindy K.Y.Tang,
Rob Ilic,and Marko Loncar."Single particle detection in CMOS compatible
photonic crystal nanobeam cavities,"Optics express 21.26(2013):32225-32233；Text
Offer 2：Xingwang Zhang,Guangya Zhou,Peng Shi,Han Du,Tong Lin,Jinghua Teng,and
Fook Siong Chau."On-chip integrated optofluidic complex refractive index
sensing using silicon photonic crystal nanobeam cavities."Optics letters 41.6
(2016):1197-1200.), light field major part local realizes Q high in high-refractive-index regions, therefore in region of low refractive index
Detection and analysis thing can only be very weak with the disappearance field interactions of mode of resonance, the interaction between light field and analyte, sensitive
Degree is low.
Therefore the photonic crystal nanometer beam chamber based on air mode starts to be studied.But, it has been found that delivered at present
Air mode photonic crystal nanometer beam cavity configuration in (document 3：Liang,Feng,and Qimin Quan."Detecting
single gold nanoparticles(1.8nm)with ultrahigh-Q air-mode photonic crystal
nanobeam cavities."ACS Photonics 2.12(2015):1692-1697；Document 4：Ping Yu,Huiye
Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,and Jianyi Yang."High-Q
and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in
Silicon."IEEE Photonic Technology Letters 28.20(2016):2121-2124；Document 5：Yang,
Daquan,Huiping Tian,and Yuefeng Ji."High-Q and high-sensitivity width-
modulated photonic crystal single nanobeam air-mode cavity for refractive
index sensing."Applied optics 54.1(2015):1-5；Document 6：Zhang,Yuguang,and Yaocheng
Shi."Temperature insensitive lower-index-mode photonic crystal nanobeam
cavity."Optics letters 40.2(2015):264-267；Document 7：Lijun Huang,Jian Zhou,Fujun
Sun,Zhongyuan Fu,and Huiping Tian."Optimization of One Dimensional Photonic
Crystal Elliptical-Hole Low-Index Mode Nanobeam Cavities for On-chip
Sensing."Journal of lightwave technology 34.15(2016):3496-3502.), substantial amounts of number of perforations
It is the necessary condition for realizing high q-factor.This causes that the length of device is more long, and is not easy to manufacture.
Therefore, in order to obtain the sensor of high q-factor, high sensitivity and small physical dimension, we are a kind of to propose to be based on rectangle
The air mode photonic crystal nanometer beam chamber of hole lattice parameter gradual change.In the case where Q values are not sacrificed, its structure length is compared to
The air mode photonic crystal nanometer beam chamber of proposition can reduce half.
The content of the invention
(1) technical problem to be solved
It is an object of the invention to solve the problems, such as existing 1-D photon crystal nanometer bundle cavity sensor：One is to be situated between
Matter mould 1-D photon crystal nanometer bundle chamber, light field predominant local obtains Q high to high refractivity region so that analyte and light field phase
Interaction is weak, so that sensitivity problem not high；Two is existing air mode 1-D photon crystal nanometer bundle chamber, it is necessary to more
Airport could obtain Q high, so that physical dimension is more long, the problem for being unfavorable for making.
(2) technical scheme
Above-mentioned to solve the problems, such as, the present invention proposes the air mode photonic crystal nano based on rectangular opening lattice parameter gradual change
Rice beam chamber.In 1-D photon crystal silicon waveguide, the rectangular opening on waveguide core number symmetric crystal lattice constant gradual change is etched, from
And light field local to region of low refractive index is obtained, physical dimension is small, Q values ridge waveguide structure high, and thus constituting can realize sky
The nanometer bundle cavity configuration of gas mould sensing.
In such scheme, described rectangular opening of the etching on waveguide core number symmetric crystal lattice constant gradual change, is on edge
In 1-D photon crystal silicon wave guide direction, rectangle pore structure of the etching on waveguide core number symmetric crystal lattice constant gradual change is formed
Gauss decay mirror image, the wherein refractive index of silicon is 3.48, and duct width is 700nm, and thickness is 220nm, and the size of rectangular opening is
200nm × 500nm, lattice parameter ai=a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i refers to the i-th of structure side
Individual rectangular opening, aiRefer to i-th lattice parameter of rectangular opening, wherein a1=500nm, an=424nm.
In such scheme, described air mode 1-D photon crystal nanometer bundle cavity configuration, is to instigate center position rectangle
The air mode local of hole unit cell unit in the forbidden band of both sides unit cell units, improving the local intensity of light, the thing effect of enhancing light
Time, improve sensitivity and the quality factor of sensor.
In such scheme, when the number n of both sides airport is respectively 8, high-quality-factor just can be obtained, because should
Structure is small in the loss of waveguide transmission direction, and light local ability is strong.
Principle of the invention is, by the lattice parameter that rectangular opening is gradually reduced from center to both sides so that center to two
The effective refractive index of side unit cell units is gradually reduced, so that photonic band gap is gradually translated to high frequency, centre bore unit cell units
Air mode so as to by the forbidden band local of both sides unit cell units, form air mode photonic crystal nanometer beam chamber.
(3) beneficial effect
Compared with prior art, the invention has the advantages that：
1. compared to medium mould nanometer bundle chamber, on the premise of quality factor is not sacrificed, sensitivity is greatly improved the present invention,
Suitable for gas sensing.
2. the present invention is compared and other kinds of air mode photonic crystal nanometer beam chamber (nanometer bundle width gradual change, hole size
Gradual change), in the case where quality factor is not sacrificed, its structure length can reduce half, be conducive in the miniaturization and piece of device
It is integrated.
3. the present invention compared to an other kinds of photonic crystal nanometer beam cavity sensor, while having high q-factor, Gao Ling
Sensitivity, low mode volume and small physical dimension.
4. the present invention only changes the position of rectangular opening, and the size of rectangular opening keeps constant so that it makes production letter
It is single.
Brief description of the drawings
The air mode 1-D photon crystal nanometer bundle cavity configuration parameter of the rectangular opening lattice gradual change that following figure is taken and
Background refractive index is identical with specific embodiment.
Fig. 1 (a) is the air mode 1-D photon crystal nanometer bundle cavity configuration schematic diagram based on rectangular opening lattice parameter gradual change.
The refractive index of silicon is 3.48, and duct width is 700nm, and thickness is 220nm, and the size of rectangular opening is 200nm × 500nm, hole folding
It is 1 to penetrate rate and background refractive index.
Fig. 1 (b) is that the 1-dimention nano beam chamber obtained by Three-dimensional Time Domain finite difference method is existed in x/y plane and xz planes
The distribution map of the electric field of resonance wavelength 1521.74nm.
Fig. 2 is respectively band structure figure during 500nm and 424nm for lattice parameter.
Fig. 3 (a) is the transmission transmission spectrum of the 1-dimention nano beam obtained using Three-dimensional Time Domain finite difference calculus.
Fig. 3 (b) is the Electric Field Distribution corresponding to 0 rank mould, 1 rank mould and 2 rank moulds in transmission spectrum, and its corresponding quality because
Son and mode volume.
Fig. 4 (a) is the transmission spectrum for obtaining when refractive index changes in the range of 1.00 to 1.06, and illustration is different refractions
The enlarged drawing of the transmission transmission spectrum of 0 rank mould under rate.
Fig. 4 (b) is the relation fitted figure of 0 rank mould resonance wavelength and variations in refractive index.
Specific embodiment
To become apparent from the object, technical solutions and advantages of the present invention, below in conjunction with accompanying drawing, to the specific knot invented
Structure, principle and sensing characteristicses are described further.
The present invention proposes a kind of air mode 1-D photon crystal nanometer bundle chamber life based on rectangular opening lattice parameter gradual change
The implementation method of thing sensor, shown in its structural representation such as Fig. 1 (a).In order to obtain the chamber of air mode, effective folding of structure cell
She Shuaixucong centers are gradually reduced to both sides, so that photonic band gap is moved to high-frequency, the sky of centre bore unit cell units
Gas mould increases the local time and intensity of light by the forbidden band of local to a series of unit cell units in both sides.The structure is for reality
Existing air mode nanometer bundle cavity configuration, in 1-D photon crystal silicon wave guide direction, etches symmetrically brilliant on waveguide core number
The refractive index of the rectangular opening that lattice constant is gradually reduced from center to both sides, wherein silicon is 3.48, and rectangular opening and original background are reflected
Rate is 1.00, and duct width is 700nm, and thickness is 220nm, and the size of rectangular opening is 200nm × 500nm, lattice parameter ai=
a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i refers to i-th rectangular opening of structure side, aiRefer to i-th rectangular opening
Lattice parameter, wherein a1=500nm, an=424nm.Fig. 1 (b) is the 1-dimention nano obtained by Three-dimensional Time Domain finite difference calculus
Beam chamber xy and xz planes resonance wavelength 1521.74nm distribution map of the electric field.From Fig. 1 (b) as can be seen that electric field is by strong
In rectangular opening in the middle of local to chamber, illustrate that the present invention is applied to sensing, the interaction of light and material can be strengthened, improve and pass
The sensitivity of sensor.
Air mode nanometer bundle cavity sensor based on rectangular opening lattice parameter gradual change proposed by the present invention, main parameter choosing
It is selected as the lattice constant range and variation pattern of gradual change.Gradation zone lattice parameter excursion and variation pattern selection are：It is first
First with reference to the size of duct width, thickness and rectangular opening, the lattice parameter of centre bore is selected, make the energy of centre bore unit cell units
Air mode obtains the optimal lattice parameter of centre bore for 500nm near 1550nm (194THz) by emulation in band figure.So
Afterwards, using mirror image strength formulaWith reference to the energy band diagram of structure cell, worked as
When lattice parameter is 424nm, mirror image the intensity γ, wherein ω of maximum can be obtained1And ω2It is upper side band and lower sideband marginal frequency,
ωresCentered on hole unit cell unit air mode frequency, ω0It is Intermediate Gray frequency.Fig. 2 illustrates 1-D photon crystal nanometer bundle
The energy band diagram of chamber centre bore unit cell units and last hole unit cell unit.Finally, in order that mirror image intensity is linear with hole site
Change, the present invention makes the change of lattice parameter square ground, i.e. ai=a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i is referred to
I-th rectangular opening of structure side, aiRefer to i-th lattice parameter of rectangular opening, wherein a1=500nm, an=424nm.
Number of the present invention selection per side rectangular opening is 8, i.e. n=8.Number with rectangular opening increases, and Q values can also increase
Plus.But the air mode 1-D photon crystal nanometer bundle chamber of present invention design, has just reached higher than 10 as n=85Q values, for
For sensor, this Q value is sufficiently high.Therefore after balance physical dimension and Q value relations, n=8 is selected.
Fig. 3 (a) is the transmission transmission spectrum of the 1-dimention nano beam obtained using Three-dimensional Time Domain finite difference calculus.Can from figure
Go out, the air die cavity has 3 main resonance peaks, i.e. 0 rank mould, 1 rank mould and 2 rank moulds, resonant frequency is respectively：1521.74nm,
1480.14nm and 1441.83nm.Its corresponding Electric Field Distribution, quality factor and mode volume, shown in such as Fig. 3 (b).It is aobvious and
It is clear to, 0 rank mould has Q values higher, lower V and stronger light field local ability relative to 1 rank mould and 2 rank moulds.Therefore, 0 rank
Mould is more suitable for carrying out optical sensing.
Finally, the sensitivity to the air mode photonic crystal nanometer beam cavity sensor based on rectangular opening lattice parameter gradual change is entered
Row analysis.Fig. 4 (a) is, when refractive index changes in the range of 1.00 to 1.06, to obtain 1-D photon crystal nanometer bundle cavity configuration
Transmission spectrum, illustration be different refractivity under 0 rank mould transmission transmission spectrum enlarged drawing.Fig. 4 (b) is the resonance wavelength of 0 rank mould
Skew and the fitted figure of index of refraction relationship.As seen from the figure, with the increase of refractive index, resonance peak is to long wavelength shifted, and change
It is linear.When refractive index is changed into 1.06 from 1.00, resonance wavelength fades to 1537.16nm from 1522.06nm, and resonance wavelength is inclined
15.10nm is moved.Therefore, according to Calculation of Sensitivity formula S=Δ λ/Δ n, sensitivity is calculated for 252.62nm/RIU.By
This is visible, present invention can apply to gas sensing, in actual applications, by changing the concentration of environmental gas, light travels
The skew of the resonance peak of transmission spectrum can calculate the concentration of gas.
Claims (4)
1. a kind of air mode 1-D photon crystal nanometer bundle cavity sensor based on rectangular opening lattice parameter gradual change, wherein：The light
Sub- crystalline nanometric beam chamber is in 1-D photon crystal silicon waveguide, to etch the square on the symmetrical lattice parameter gradual change of waveguide core
Shape hole so that in light field local to airport, to realize the photonic crystal nanometer beam cavity configuration that air mode is sensed, the wherein folding of silicon
It is 3.48 to penetrate rate, and duct width is 700nm, and thickness is 220nm, and the size of rectangular opening is 200nm × 500nm.
2. air mode 1-D photon crystal nanometer bundle cavity sensor according to claim 1, it is characterised in that lattice parameter
The implementation method of gradual change：On photon crystal wave-guide direction, lattice parameter is gradually reduced from center to both sides, and structure is in
Heart hole is symmetrical, lattice parameter ai=a1-(i-1)2(a1-an)/(n-1)2, i ∈ [1, n], i refers to i-th square of structure side
Shape hole, aiRefer to i-th lattice parameter of rectangular opening, wherein a1=500nm, an=424nm.
3. the air mode 1-D photon crystal nanometer bundle chamber according to claim 1 and 2, it is characterised in that only change rectangular opening
Position, and the size of rectangular opening keeps constant so that it is simple that it makes production.
4. air mode 1-D photon crystal nanometer bundle cavity sensor according to claim 1, it is characterised in that：When both sides square
When shape hole number is respectively 8, the 0 rank mould obtained near 1520nm, its quality factor is up to 1.27 × 105, mode volume is low
To 0.018 (λ/n)3, and its physical dimension is only 0.7 μm of 8 μ m (long × wide), be conducive to device miniaturization and piece on collect
Into；Change the refractive index of airport and background, resonance peak occurs red shift, obtains its sensitivity up to 252nm/RIU, can be applied to gas
Body is sensed.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108333680A (en) * | 2018-02-14 | 2018-07-27 | 北京邮电大学 | A kind of photon crystal micro cavity and sensor |
| CN112345114A (en) * | 2020-09-15 | 2021-02-09 | 燕山大学 | Double-parameter sensing structure based on one-dimensional photonic crystal nano beam cavity |
| CN113391377A (en) * | 2021-04-23 | 2021-09-14 | 中国科学院微电子研究所 | Resonance mode control method and control system, electronic device, and storage medium |
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| CN102718912A (en) * | 2012-06-25 | 2012-10-10 | 吉林大学 | Method for preparing gradient-controllable colloidal photonic crystal |
| CN102914819A (en) * | 2012-10-25 | 2013-02-06 | 浙江大学 | One-dimensional photonic crystal optical micro-cavity based on waveguide comprising low-refractive-index cores |
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| CN102718912A (en) * | 2012-06-25 | 2012-10-10 | 吉林大学 | Method for preparing gradient-controllable colloidal photonic crystal |
| CN102914819A (en) * | 2012-10-25 | 2013-02-06 | 浙江大学 | One-dimensional photonic crystal optical micro-cavity based on waveguide comprising low-refractive-index cores |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108333680A (en) * | 2018-02-14 | 2018-07-27 | 北京邮电大学 | A kind of photon crystal micro cavity and sensor |
| CN112345114A (en) * | 2020-09-15 | 2021-02-09 | 燕山大学 | Double-parameter sensing structure based on one-dimensional photonic crystal nano beam cavity |
| CN113391377A (en) * | 2021-04-23 | 2021-09-14 | 中国科学院微电子研究所 | Resonance mode control method and control system, electronic device, and storage medium |
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