CN114397274A - Slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor - Google Patents
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- 239000004038 photonic crystal Substances 0.000 title claims abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- 230000007423 decrease Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 11
- 108700011259 MicroRNAs Proteins 0.000 abstract description 6
- 206010028980 Neoplasm Diseases 0.000 abstract description 6
- 201000011510 cancer Diseases 0.000 abstract description 6
- 239000002679 microRNA Substances 0.000 abstract description 6
- 239000003550 marker Substances 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000001448 refractive index detection Methods 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000000411 transmission spectrum Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000000439 tumor marker Substances 0.000 description 2
- 208000031662 Noncommunicable disease Diseases 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000010206 sensitivity analysis Methods 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12138—Sensor
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Abstract
The invention relates to a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor, which comprises: a silicon waveguide; a nanobeam cavity on the silicon waveguide; the nano-beam cavity is etched with a plurality of through holes, the through holes are centrosymmetric about the silicon waveguide, and a slit is formed in the through holes and penetrates through the through holes. The invention can obtain the low-concentration detection lower limit of the cancer early marker microRNA.
Description
Technical Field
The invention relates to the technical field of photonic crystal sensors, in particular to a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor.
Background
Cancer has become the leading cause of death in non-infectious diseases in the global scope, and the low-concentration detection lower limit detection aiming at the cancer early marker microRNA can improve the five-year survival rate of cancer and reduce the cancer death rate. The photonic crystal sensing technology can realize low-concentration detection lower limit detection of microRNA by using label-free surface modification reaction, has the advantages of strong anti-interference capability and easy integration, and gradually becomes a focus of attention in the field of biomedical sensing.
At present, the sensing research of the one-dimensional photonic crystal nano beam cavity is mainly used for gas sensing, the optimization of quality factors is focused, and the research on the lower limit of low-concentration detection is not common yet. The concentration detection lower limit represents the minimum value of the concentration of the biological target substance which can be detected by the biosensor and is the most comprehensive index for measuring the performance of the biosensor. If a biosensor with a low concentration detection lower limit is to be obtained, a low refractive index detection lower limit needs to be correspondingly obtained. The lower detection limit of the low refractive index can be obtained by improving the quality factor and the refractive index sensitivity, which characterizes the minimum value of the biosensor that can detect the external refractive index change.
The existing one-dimensional photonic crystal nano-beam cavity biosensor has the following problems: 1. the medium mode one-dimensional photonic crystal nano-beam cavity works in a communication waveband C band, so that the problems that a biosensor working in an aqueous solution has overlarge absorption loss and obvious Q value (quality factor) attenuation are caused; 2. in the medium mode one-dimensional photonic crystal nano beam cavity, an optical field is mainly localized in a high-refractive index area to obtain a high-quality factor, so that the problems of small overlapping volume of a biological target object and the optical field and low refractive index sensitivity are caused; 3. the high-quality factor dielectric mode one-dimensional photonic crystal nano beam cavity test needs a high-resolution optical test system, and the robustness of the preparation process error is low.
Disclosure of Invention
The invention aims to solve the technical problem of providing a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor which can obtain the low-concentration detection lower limit of the cancer early marker microRNA.
The technical scheme adopted by the invention for solving the technical problems is as follows: there is provided a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor, comprising:
a silicon waveguide;
a nanobeam cavity on the silicon waveguide;
the nano-beam cavity is etched with a plurality of through holes, the through holes are centrosymmetric about the silicon waveguide, and a slit is formed in the through holes and penetrates through the through holes.
The through holes are round holes, and the radiuses of the round holes gradually change.
The radius of the round hole gradually decreases from the center to two sides in a second gradual change mannerThe formula is as follows: r (i) ═ rc-(i-1)2(rc-re)/N2,i∈[1,N]Wherein i is the ith round hole on one side of the nano beam cavity, N is the total number of the round holes on one side of the nano beam cavity, r (i) is the radius of the ith round hole, and rcRadius of the central circular hole, reIs the radius of the circular holes at the tail ends of the two sides of the nano beam cavity.
The slit penetrates through the circle centers of the round holes.
The lattice constant of the round hole is a constant value, and the lattice constant a of the round hole is 559 nm.
Width W of the slits＝50nm。
The number of the round holes is 25.
The silicon waveguide has a refractive index of 3.46 and a width Wb650nm and a thickness h of 220 nm.
Advantageous effects
Due to the adoption of the technical scheme, compared with the prior art, the invention has the following advantages and positive effects: compared with other medium mode nano beam cavity biosensors, the medium mode nano beam cavity biosensor has the advantages that the refractive index sensitivity is greatly improved and the lower limit of refractive index detection is reduced on the premise of higher quality factor, and is suitable for detecting the microRNA of the early cancer marker; according to the invention, the communication waveband U band is selected as the working waveband, so that the attenuation of the absorption loss of the aqueous solution to the quality factor is effectively reduced; according to the invention, the slits are embedded into the gradually-changed round holes, so that the refractive index sensitivity of the nano-beam cavity biosensor is effectively improved; the method has higher robustness to the error of the preparation process, and is easy to realize.
Drawings
FIG. 1 is a structural diagram of a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of edge frequencies of a first-order dielectric band and an air band corresponding to different circular hole radii in an embodiment of the present invention;
FIG. 3 is a schematic view of mirror image intensities corresponding to different radii of end circular holes on two sides in an embodiment of the present invention;
FIG. 4 is a schematic diagram of a transmission spectrum when the number of the gradually-varied circular holes of the nano-beam cavity is 21 according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of a first order dielectric mode resonance peak transmission spectrum when the ambient refractive index is increased from 1.33 to 1.36 in accordance with an embodiment of the present invention;
FIG. 6 is a schematic diagram of a medium-nanobeam cavity first-order dielectric mode refractive index sensitivity analysis according to an embodiment of the present invention.
Detailed Description
The invention will be further illustrated with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.
The embodiment of the invention relates to a slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor, which refers to fig. 1 and comprises a silicon waveguide 1 and a nano-beam cavity, wherein the nano-beam cavity is positioned on the silicon waveguide 1. The structure of the nano beam cavity is as follows: a row of through holes 3, which are centrosymmetric with respect to the silicon waveguide 1 and embedded in the slit 4, is etched. In this embodiment, the through hole 3 is a circular hole with gradually changing radius, so that the optical field is localized in the slit 4 to realize a first-order dielectric mode sensing nano-beam cavity structure, wherein the refractive index of the silicon waveguide 1 is 3.46, and the width of the silicon waveguide 1 is Wb650nm, the thickness h of the silicon waveguide 1 is 220nm, the lattice constant of the circular hole is constant, and the lattice constant a of the circular hole is 559 nm.
The nano beam cavity of the embodiment is positioned on the top silicon waveguide 1 of the SOI chip with the buried oxide layer 2 removed, and specifically comprises the following steps: the silicon waveguide 1 is provided with extension bodies 1-1 at two ends, and the extension bodies 1-1 are in contact with the buried oxide layer 2 to support the silicon waveguide 1.
Further, in order to obtain the first-order dielectric mode harmonic peak, the radius of the circular hole needs to be decreased from the middle to two sides twice, so that the first-order dielectric mode of the middle primitive cell is localized in the forbidden bands of the primitive cells at two sides, and the radius of the circular hole gradually decreases from the center to two sides twice, and the formula is as follows:
r(i)＝rc-(i-1)2(rc-re)/N2,i∈[1,N]
wherein i is the ith round hole on one side of the nano beam cavity, N is the total number of the round holes on one side of the nano beam cavity, r (i) is the radius of the ith round hole, and rcRadius of the central circular hole, reIs the radius of the circular holes at the tail ends of the two sides of the nano beam cavity.
It should be noted that, in order to improve the refractive index sensitivity, the slit 4 is introduced in the present embodiment to increase the overlapping volume of the optical field and the biological target. The nano-beam cavity biosensor is realized by etching a round hole embedded in a slit 4 on an SOI chip top layer silicon waveguide 1 with a buried oxide layer 2 removed, wherein the width of the slit 4 is Ws＝50nm。
Further, the operating wavelength of the nanobeam-cavity biosensor is determined by the first-order dielectric band edge frequency. Fig. 2 shows the edge frequencies of the first order dielectric band and the air band corresponding to different circular hole radii. In order to make the first-order dielectric mode of the nano-beam cavity work in the communication band U band (179. 185THz) with low absorption loss, the radius r of the central circular hole is set in the embodimentcSet to 260nm, the operating frequency for the first order dielectric mode is 184 THz. In order to increase the local characteristics of the optical field to obtain a high quality factor, the radius of the circular hole at the two ends corresponding to the maximum mirror intensity is generally selected. FIG. 3 shows the mirror image intensities corresponding to the radii of the end circular holes on different sides, where the mirror image intensity is the maximum when the radius of the end circular hole is 210nm, but the transmittance of the first-order dielectric mode resonance peak is less than 5%. Considering the mirror intensity and transmittance factors comprehensively, the radius r of the end circular hole is adjusted according to the embodimenteThe transmittance of the first-order dielectric mode resonance peak at this time was set to 240nm, and reached 50%.
FIG. 4 is a transmission spectrum obtained by using a three-dimensional finite time domain difference method when the number of circular holes with gradually changing radii in the nano beam cavity is 21. The quality factor increases with the increase of the number of the round holes, and when the quality factor is more than 10000, the lower limit of the refractive index detection can not be obviously reduced with the increase of the quality factor. Considering the absorption loss of the aqueous solution, when the number of the circular holes with gradually changed radii is 25, the quality factor of the leftmost first-order dielectric mode resonance peak (namely the resonance peak at 1650nm at the leftmost side of the graph 4) reaches 10538. Therefore, in the present embodiment, the number of gradation circular holes is set to 25.
As shown in fig. 5, where a corresponds to an ambient refractive index n of 1.32, b corresponds to an ambient refractive index n of 1.33, c corresponds to an ambient refractive index n of 1.34, d corresponds to an ambient refractive index n of 1.35, and e corresponds to an ambient refractive index n of 1.36, the first-order dielectric mode resonance peak is red-shifted when the ambient refractive index is increased from 1.33 to 1.36. According to the change relation of the center wavelength of the linearly fitted resonance peak along with the environmental refractive index and a refractive index sensitivity formula S, namely delta lambda/delta n, wherein delta lambda represents the wavelength shift amount, delta n represents the environmental refraction change amount, and the refractive index sensitivity of the first-order dielectric mode resonance peak is 849nm/RIU, as shown in FIG. 6 (the refractive index sensitivity is the slope).
According to a calculation formula of a lower detection limit of the refractive index:
where λ represents the wavelength, SNR represents the signal-to-noise ratio, Q represents the quality factor, σspect-resThe variance of the spectral resolution error is expressed using a conventional optical test system (spectral resolution of 10pm, σ)spect-res2.9pm), the lower limit of the refractive index detection of the nano-beam cavity biosensor is as low as 1.1 × 10-5Correspondingly, the concentration of the early cancer marker microRNA is 3.4 nM.
The error of the nano beam cavity prepared by electron beam lithography and reactive ion etching is usually about 3nm, the nano beam cavity can be obtained by a three-dimensional finite time domain difference method, when the preparation error is less than 4nm, the attenuation of a Q value (namely a quality factor) is not more than 15%, and the nano beam cavity has high preparation process error robustness.
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.
Claims (8)
1. A slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor, comprising:
a silicon waveguide (1);
a nanobeam cavity located on a silicon waveguide (1);
a plurality of through holes (3) are etched in the nano beam cavity, the through holes (3) are centrosymmetric about the silicon waveguide (1), a slit (4) is formed in the through holes (3), and the slit (4) penetrates through the through holes (3).
2. The slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor as claimed in claim 1, wherein the through hole (3) is a circular hole and the radius of the circular holes gradually changes.
3. The slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor as claimed in claim 2, wherein the radius of the circular hole gradually decreases from the center to both sides in a second order, and the formula is: r (i) ═ rc-(i-1)2(rc-re)/N2,i∈[1,N]Wherein i is the ith round hole on one side of the nano beam cavity, N is the total number of the round holes on one side of the nano beam cavity, r (i) is the radius of the ith round hole, and rcRadius of the central circular hole, reIs the radius of the circular holes at the tail ends of the two sides of the nano beam cavity.
4. The slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor as claimed in claim 2, wherein the slit (4) penetrates through the center of a plurality of circular holes.
5. The slit embedded one-dimensional photonic crystal nano-beam cavity biosensor as claimed in claim 1, wherein the lattice constant of the circular hole is constant and the lattice constant a of the circular hole is 559 nm.
6. Slit-embedded one-dimensional photonic crystal nano-beam cavity biosensor according to claim 1, wherein the width W of the slit (4)s＝50nm。
7. The slit embedded one-dimensional photonic crystal nano-beam cavity biosensor of claim 2, wherein the number of the circular holes is 25.
8. The slit embedded one-dimensional photonic crystal nano-beam cavity biosensor according to claim 1, wherein the silicon waveguide (1) has a refractive index of 3.46 and a width Wb650nm and a thickness h of 220 nm.
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- 2021-12-29 CN CN202111644138.1A patent/CN114397274A/en active Pending
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