CN112414970A - Glucose solution measurement device based on open square ring resonant cavity of surface plasmon - Google Patents
Glucose solution measurement device based on open square ring resonant cavity of surface plasmon Download PDFInfo
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- CN112414970A CN112414970A CN202011469259.2A CN202011469259A CN112414970A CN 112414970 A CN112414970 A CN 112414970A CN 202011469259 A CN202011469259 A CN 202011469259A CN 112414970 A CN112414970 A CN 112414970A
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- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 title claims abstract description 36
- 239000008103 glucose Substances 0.000 title claims abstract description 36
- 238000005259 measurement Methods 0.000 title description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 22
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052709 silver Inorganic materials 0.000 claims abstract description 22
- 239000004332 silver Substances 0.000 claims abstract description 22
- 239000002052 molecular layer Substances 0.000 claims abstract description 18
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 7
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000000411 transmission spectrum Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000007547 defect Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 9
- 230000008859 change Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 4
- 239000011540 sensing material Substances 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N2021/5903—Transmissivity using surface plasmon resonance [SPR], e.g. extraordinary optical transmission [EOT]
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- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
本发明公开了一种表面等离激元的开口方环谐振腔的葡萄糖溶液测量装置，其特征在于，包括自下而上依次叠接的二氧化硅基底层和银纳米层，所述银纳米层的中部设有有互相垂直且相通的两个直波导构成的呈T形状的T型波导，T型波导的一个直波导的内边上设有向内朝向的呈方形的凸起枝节，凸起枝节的旁边设有呈不闭合正方形状的腔体即腔体带开口，开口正对凸起枝节，腔体与T型波导不相通，凸起枝节与T型波导相通，腔体与T型波导和凸起枝节中填充有待测液体即不同浓度的葡萄糖溶液这种测量装置能够确定亚波长约束的同时改进当前SPPs波导器件生物传感灵敏度较低的缺陷，且结构简单、易于制备。
The invention discloses a glucose solution measuring device with an open square ring resonant cavity of surface plasmon, which is characterized in that it comprises a silicon dioxide base layer and a silver nano layer which are sequentially stacked from bottom to top, and the silver nano The middle of the layer is provided with a T-shaped T-shaped waveguide composed of two straight waveguides that are perpendicular to each other and communicated with each other. The inner edge of one of the straight waveguides of the T-shaped waveguide is provided with an inward-facing square convex branch. There is an unclosed square cavity next to the branch node, that is, the cavity has an opening, and the opening is facing the convex branch. The waveguide and the protruding branches are filled with the liquid to be measured, namely glucose solutions of different concentrations. This measuring device can determine the subwavelength confinement while improving the defect of low biosensing sensitivity of the current SPPs waveguide device, and has a simple structure and easy fabrication.
Description
Technical Field
The invention relates to the field of micro-nano sensing, in particular to a glucose solution measuring device of a surface plasmon open square ring resonant cavity.
Background
The surface plasmon is an electromagnetic evanescent wave generated by mutual coupling excitation of free electrons on the metal and the dielectric medium interface through light and the metal surface, can break through the diffraction limit of the light, and has wide application prospect in the sensing field of the surface plasmon under the sub-wavelength size. In 2003, the Chao Chung Yen group proposed a biosensor based on a sharp asymmetric resonance polymer micro-ring, and used for detecting glucose concentration, and a polystyrene micro-ring resonator was prepared by nanoimprint technology, and spectra were measured in glucose solutions of different concentrations, and it was found that the change of resonance wavelength and the change of normalized transmission intensity are in a linear relationship with the concentration of the glucose solution.
Optics Communications published on 2017, volume 465, page 125614
The A nano sensor with ultra-high FOM base on tunable planar resonator, Wang Shuo group, proposes a plasma structure in which a metal baffle plate in the middle of a metal-insulator-metal (MIM) waveguide is coupled with an isosceles triangular cavity, so as to realize triple Fano resonance, and the sensitivity of the sensor is as high as 120 nm/RIU. A series of liquid sensors are proposed in succession in recent decades, but the development and application of biosensors are still limited by technical bottlenecks such as high manufacturing cost, poor usability and low sensitivity.
At present, most of sensors applied to liquid measurement, especially biosensors for measuring the concentration of a glucose solution, mainly focus on the research on evanescent coupling and sensitivity improvement, and have less research on a high-sensitivity multiple Fano resonance biosensor technology.
Disclosure of Invention
The invention aims to provide a glucose solution measuring device of a surface plasmon open square ring resonant cavity, aiming at the defects of the prior art. The measuring device can determine the sub-wavelength constraint and simultaneously improve the defect of low biosensing sensitivity of the current SPPs waveguide device, and has the advantages of simple structure and easy preparation.
The technical scheme for realizing the invention is as follows:
a glucose solution measuring device of a surface plasmon opening square ring resonant cavity comprises a silicon dioxide substrate layer and a silver nano layer which are sequentially connected from bottom to top in a splicing mode, wherein a T-shaped waveguide which is formed by two straight waveguides which are perpendicular to each other and communicated with each other is arranged in the middle of the silver nano layer, an inward-facing square protruding branch is arranged on the inner side of one straight waveguide of the T-shaped waveguide, a non-closed square cavity body which is a cavity body with an opening is arranged beside the protruding branch, the opening is right opposite to the protruding branch, the cavity body is not communicated with the T-shaped waveguide, the protruding branch is communicated with the T-shaped waveguide, liquid to be measured, namely glucose solution with different concentrations, is filled in the cavity body, the T-shaped waveguide and the protruding branch, and the glucose solution has good sensing characteristics and is a good solution measurement sensing material.
The height of the T-shaped waveguide is consistent with the thickness of the silver nano layer.
The height of the cavity is consistent with the thickness of the silver nano layer.
The silver nano layer and the glucose solution sandwiched between the silver nano layers form a metal-insulator-metal surface plasmon Fano resonance structure.
The measuring device increases the coupling strength of the T-shaped waveguide tube and the open square ring resonant cavity, so that sharp and asymmetric Fano resonance lines appear in the transmission spectrum, the Fano resonance lines are sensitive to structural parameters and the surrounding environment, and the sensing super-resolution is realized.
The silica substrate layer in the measuring device is manufactured through a sol-gel process, so that the silica substrate layer can be ensured to have good buffering characteristics, and the generated SPPs are ensured to have smaller loss.
The silver nano layer in the measuring device is formed by depositing a silver film on a silicon dioxide substrate layer, and etching a T-shaped waveguide with branches and an open square ring-shaped resonant cavity by adopting focused ion beams.
Incident light enters the glucose solution from one side of the T-shaped waveguide through optical fiber coupling, emergent light is output from the other side of the T-shaped waveguide, and the power of the output light before and after the concentration of the glucose solution changes is calculated through an optical power meter, so that the change of the concentration of glucose can be detected.
Compared with other metals, the metal Ag has lower energy loss, the glucose solution has smaller influence on the optical property of the metal Ag, the glucose solution is used as a sensing material, the variation of the concentration of the glucose solution can be converted into the variation of the refractive index, and further the coupling strength of the structure is influenced.
The generation of Fano resonance lines by coupled excitation of light in the above described measuring device is twofold.
The measuring device utilizes the influence of different glucose concentrations on the coupling strength to further influence the change of the output light power, so that the liquid measurement is finally realized.
The measuring device can determine the sub-wavelength constraint and simultaneously improve the defect of low biosensing sensitivity of the current SPPs waveguide device, and has the advantages of simple structure and easy preparation.
Drawings
Fig. 1 is a schematic structural diagram of the embodiment.
In the figure, 1, a silicon dioxide substrate layer 2, a metal silver nano layer 3, a T-shaped waveguide 4, a convex branch 5, a cavity 6, an opening 7, incident light 8 and emergent light are arranged.
Detailed Description
The invention will be further elucidated with reference to the drawings and examples, without however being limited thereto.
Example (b):
referring to fig. 1, a glucose solution measuring device of a surface plasmon open square ring resonator comprises a silicon dioxide substrate layer 1 and a silver nano layer 2 which are sequentially overlapped from bottom to top, the middle part of silver nanolayer 2 is equipped with the T type waveguide 3 that is the T shape that has mutually perpendicular and communicating two straight waveguides to constitute, be equipped with the protruding branch and knot 4 that is square that is inwards towards on the interior limit of a straight waveguide of T type waveguide 3, the next door of protruding branch and knot 4 is equipped with the cavity 5 that is unclosed square shape and takes opening 6, opening 6 just is protruding branch and knot 4, cavity 5 and T type waveguide 3 do not communicate with each other, protruding branch and knot 4 communicates with each other with T type waveguide 3, cavity 5 and T type waveguide 3 and protruding branch and knot 4 are filled with the liquid that awaits measuring namely the glucose solution of different concentrations, glucose solution has better sensing characteristic, is better solution measurement response material.
The height of the T-shaped waveguide 3 is consistent with the thickness of the silver nanolayer 2.
The height of the cavity 5 is consistent with the thickness of the silver nano layer 2.
In this example, the glucose solution sandwiched between the silver nano-layer 2 and the silver nano-layer 2 constitutes a metal-insulator-metal surface plasmon Fano resonance structure.
The silica substrate layer 1 in the measuring device of the embodiment is manufactured by a sol-gel process, so that the silica substrate layer 1 can be ensured to have good buffering characteristics, and the generated SPPs can be ensured to have smaller loss.
In the measurement device, a silver nano layer 2 is formed by depositing a silver film on a silicon dioxide substrate layer 1, and etching a T-shaped waveguide 3 with branches and a cavity 5 of a resonant cavity in the shape of an open square ring by using focused ion beams.
The incident light 7 enters the glucose solution from one side of the T-shaped waveguide 3 through optical fiber coupling, the emergent light 8 is output from the other side of the T-shaped waveguide 3, the power of the output light before and after the concentration change of the glucose solution is calculated through an optical power meter, and the detection of the concentration change of the glucose can be realized.
The metal Ag has lower energy loss than other metals, the glucose solution has small influence on the optical property of the metal Ag, the glucose solution is used as a sensing material and can convert the variation of the concentration of the glucose solution into the variation of the refractive index to further influence the coupling strength of the structure, in the measuring device, the coupling strength of the T-shaped waveguide 3 and the cavity 5 resonant cavity is increased, so that a sharp and asymmetric Fano resonance line appears in a transmission spectrum, the Fano resonance line is extremely sensitive to structural parameters and the surrounding environment, and meanwhile, the extinction spectrum of the Fano resonance line can increase the resolution of sensing.
Claims (4)
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| CN202011469259.2A CN112414970A (en) | 2020-12-15 | 2020-12-15 | Glucose solution measurement device based on open square ring resonant cavity of surface plasmon |
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| CN202011469259.2A CN112414970A (en) | 2020-12-15 | 2020-12-15 | Glucose solution measurement device based on open square ring resonant cavity of surface plasmon |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115755271A (en) * | 2022-10-28 | 2023-03-07 | 广州市南沙区北科光子感知技术研究院 | A Modulator of VO2 Hybrid Silicon-Based Fano Resonance |
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2020
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115755271A (en) * | 2022-10-28 | 2023-03-07 | 广州市南沙区北科光子感知技术研究院 | A Modulator of VO2 Hybrid Silicon-Based Fano Resonance |
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Application publication date: 20210226 |