CN112414970A - Glucose solution measuring device of surface plasmon open square ring resonant cavity - Google Patents
Glucose solution measuring device of surface plasmon open square ring resonant cavity Download PDFInfo
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- CN112414970A CN112414970A CN202011469259.2A CN202011469259A CN112414970A CN 112414970 A CN112414970 A CN 112414970A CN 202011469259 A CN202011469259 A CN 202011469259A CN 112414970 A CN112414970 A CN 112414970A
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- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 title claims abstract description 36
- 239000008103 glucose Substances 0.000 title claims abstract description 36
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052709 silver Inorganic materials 0.000 claims abstract description 23
- 239000004332 silver Substances 0.000 claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000002052 molecular layer Substances 0.000 claims abstract description 18
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 9
- 238000000411 transmission spectrum Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 6
- 230000007547 defect Effects 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 230000008859 change Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 4
- 239000011540 sensing material Substances 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N2021/5903—Transmissivity using surface plasmon resonance [SPR], e.g. extraordinary optical transmission [EOT]
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a glucose solution measuring device of a surface plasmon open square ring resonant cavity, which is characterized by comprising a silicon dioxide substrate layer and a silver nano layer which are sequentially spliced from bottom to top, wherein a T-shaped waveguide formed by two straight waveguides which are perpendicular to each other and communicated is arranged in the middle of the silver nano layer, an inward-facing square convex branch is arranged on the inner edge of one straight waveguide of the T-shaped waveguide, an unclosed square cavity, namely a cavity with an opening, is arranged beside the convex branch, the opening is over against the convex branch, the cavity is not communicated with the T-shaped waveguide, the convex branch is communicated with the T-shaped waveguide, the cavity, the T-shaped waveguide and the convex branch are filled with liquid to be measured, namely glucose solution with different concentrations, so that the measuring device can determine sub-wavelength constraint and simultaneously improve the defect of lower biosensing sensitivity of the current SPPs waveguide device, and the structure is simple and the preparation is easy.
Description
Technical Field
The invention relates to the field of micro-nano sensing, in particular to a glucose solution measuring device of a surface plasmon open square ring resonant cavity.
Background
The surface plasmon is an electromagnetic evanescent wave generated by mutual coupling excitation of free electrons on the metal and the dielectric medium interface through light and the metal surface, can break through the diffraction limit of the light, and has wide application prospect in the sensing field of the surface plasmon under the sub-wavelength size. In 2003, the Chao Chung Yen group proposed a biosensor based on a sharp asymmetric resonance polymer micro-ring, and used for detecting glucose concentration, and a polystyrene micro-ring resonator was prepared by nanoimprint technology, and spectra were measured in glucose solutions of different concentrations, and it was found that the change of resonance wavelength and the change of normalized transmission intensity are in a linear relationship with the concentration of the glucose solution.
Optics Communications published on 2017, volume 465, page 125614
The A nano sensor with ultra-high FOM base on tunable planar resonator, Wang Shuo group, proposes a plasma structure in which a metal baffle plate in the middle of a metal-insulator-metal (MIM) waveguide is coupled with an isosceles triangular cavity, so as to realize triple Fano resonance, and the sensitivity of the sensor is as high as 120 nm/RIU. A series of liquid sensors are proposed in succession in recent decades, but the development and application of biosensors are still limited by technical bottlenecks such as high manufacturing cost, poor usability and low sensitivity.
At present, most of sensors applied to liquid measurement, especially biosensors for measuring the concentration of a glucose solution, mainly focus on the research on evanescent coupling and sensitivity improvement, and have less research on a high-sensitivity multiple Fano resonance biosensor technology.
Disclosure of Invention
The invention aims to provide a glucose solution measuring device of a surface plasmon open square ring resonant cavity, aiming at the defects of the prior art. The measuring device can determine the sub-wavelength constraint and simultaneously improve the defect of low biosensing sensitivity of the current SPPs waveguide device, and has the advantages of simple structure and easy preparation.
The technical scheme for realizing the invention is as follows:
a glucose solution measuring device of a surface plasmon opening square ring resonant cavity comprises a silicon dioxide substrate layer and a silver nano layer which are sequentially connected from bottom to top in a splicing mode, wherein a T-shaped waveguide which is formed by two straight waveguides which are perpendicular to each other and communicated with each other is arranged in the middle of the silver nano layer, an inward-facing square protruding branch is arranged on the inner side of one straight waveguide of the T-shaped waveguide, a non-closed square cavity body which is a cavity body with an opening is arranged beside the protruding branch, the opening is right opposite to the protruding branch, the cavity body is not communicated with the T-shaped waveguide, the protruding branch is communicated with the T-shaped waveguide, liquid to be measured, namely glucose solution with different concentrations, is filled in the cavity body, the T-shaped waveguide and the protruding branch, and the glucose solution has good sensing characteristics and is a good solution measurement sensing material.
The height of the T-shaped waveguide is consistent with the thickness of the silver nano layer.
The height of the cavity is consistent with the thickness of the silver nano layer.
The silver nano layer and the glucose solution sandwiched between the silver nano layers form a metal-insulator-metal surface plasmon Fano resonance structure.
The measuring device increases the coupling strength of the T-shaped waveguide tube and the open square ring resonant cavity, so that sharp and asymmetric Fano resonance lines appear in the transmission spectrum, the Fano resonance lines are sensitive to structural parameters and the surrounding environment, and the sensing super-resolution is realized.
The silica substrate layer in the measuring device is manufactured through a sol-gel process, so that the silica substrate layer can be ensured to have good buffering characteristics, and the generated SPPs are ensured to have smaller loss.
The silver nano layer in the measuring device is formed by depositing a silver film on a silicon dioxide substrate layer, and etching a T-shaped waveguide with branches and an open square ring-shaped resonant cavity by adopting focused ion beams.
Incident light enters the glucose solution from one side of the T-shaped waveguide through optical fiber coupling, emergent light is output from the other side of the T-shaped waveguide, and the power of the output light before and after the concentration of the glucose solution changes is calculated through an optical power meter, so that the change of the concentration of glucose can be detected.
Compared with other metals, the metal Ag has lower energy loss, the glucose solution has smaller influence on the optical property of the metal Ag, the glucose solution is used as a sensing material, the variation of the concentration of the glucose solution can be converted into the variation of the refractive index, and further the coupling strength of the structure is influenced.
The generation of Fano resonance lines by coupled excitation of light in the above described measuring device is twofold.
The measuring device utilizes the influence of different glucose concentrations on the coupling strength to further influence the change of the output light power, so that the liquid measurement is finally realized.
The measuring device can determine the sub-wavelength constraint and simultaneously improve the defect of low biosensing sensitivity of the current SPPs waveguide device, and has the advantages of simple structure and easy preparation.
Drawings
Fig. 1 is a schematic structural diagram of the embodiment.
In the figure, 1, a silicon dioxide substrate layer 2, a metal silver nano layer 3, a T-shaped waveguide 4, a convex branch 5, a cavity 6, an opening 7, incident light 8 and emergent light are arranged.
Detailed Description
The invention will be further elucidated with reference to the drawings and examples, without however being limited thereto.
Example (b):
referring to fig. 1, a glucose solution measuring device of a surface plasmon open square ring resonator comprises a silicon dioxide substrate layer 1 and a silver nano layer 2 which are sequentially overlapped from bottom to top, the middle part of silver nanolayer 2 is equipped with the T type waveguide 3 that is the T shape that has mutually perpendicular and communicating two straight waveguides to constitute, be equipped with the protruding branch and knot 4 that is square that is inwards towards on the interior limit of a straight waveguide of T type waveguide 3, the next door of protruding branch and knot 4 is equipped with the cavity 5 that is unclosed square shape and takes opening 6, opening 6 just is protruding branch and knot 4, cavity 5 and T type waveguide 3 do not communicate with each other, protruding branch and knot 4 communicates with each other with T type waveguide 3, cavity 5 and T type waveguide 3 and protruding branch and knot 4 are filled with the liquid that awaits measuring namely the glucose solution of different concentrations, glucose solution has better sensing characteristic, is better solution measurement response material.
The height of the T-shaped waveguide 3 is consistent with the thickness of the silver nanolayer 2.
The height of the cavity 5 is consistent with the thickness of the silver nano layer 2.
In this example, the glucose solution sandwiched between the silver nano-layer 2 and the silver nano-layer 2 constitutes a metal-insulator-metal surface plasmon Fano resonance structure.
The silica substrate layer 1 in the measuring device of the embodiment is manufactured by a sol-gel process, so that the silica substrate layer 1 can be ensured to have good buffering characteristics, and the generated SPPs can be ensured to have smaller loss.
In the measurement device, a silver nano layer 2 is formed by depositing a silver film on a silicon dioxide substrate layer 1, and etching a T-shaped waveguide 3 with branches and a cavity 5 of a resonant cavity in the shape of an open square ring by using focused ion beams.
The incident light 7 enters the glucose solution from one side of the T-shaped waveguide 3 through optical fiber coupling, the emergent light 8 is output from the other side of the T-shaped waveguide 3, the power of the output light before and after the concentration change of the glucose solution is calculated through an optical power meter, and the detection of the concentration change of the glucose can be realized.
The metal Ag has lower energy loss than other metals, the glucose solution has small influence on the optical property of the metal Ag, the glucose solution is used as a sensing material and can convert the variation of the concentration of the glucose solution into the variation of the refractive index to further influence the coupling strength of the structure, in the measuring device, the coupling strength of the T-shaped waveguide 3 and the cavity 5 resonant cavity is increased, so that a sharp and asymmetric Fano resonance line appears in a transmission spectrum, the Fano resonance line is extremely sensitive to structural parameters and the surrounding environment, and meanwhile, the extinction spectrum of the Fano resonance line can increase the resolution of sensing.
Claims (4)
1. The utility model provides a glucose solution measuring device of opening square ring resonant cavity of surface plasmon, its characterized in that includes silica substrate layer and the silver nanometer layer of splice in proper order from bottom to top, the middle part of silver nanometer layer is equipped with mutually perpendicular and communicating two straight waveguide constitution be the T type waveguide of T shape, be equipped with the protruding minor matters that is square that inwards faces on the interior limit of a straight waveguide of T type waveguide, the next door of protruding minor matters is equipped with the cavity that is unclosed square shape and is the cavity area opening, the opening is just to protruding minor matters, the cavity is not communicated with each other with T type waveguide, protruding minor matters communicates with each other with T type waveguide, the cavity is filled with the glucose solution that awaits measuring liquid promptly different concentrations with T type waveguide and protruding minor matters.
2. The surface plasmon open square ring resonator glucose solution measurement device of claim 1, wherein the height of said T-shaped waveguide corresponds to the thickness of the silver nanolayer.
3. The surface plasmon open square ring resonator glucose solution measurement device of claim 1, wherein the cavity height corresponds to the thickness of the silver nanolayer.
4. The glucose solution measurement device of the surface plasmon open square ring resonator of claim 1, wherein the measurement device increases the coupling strength of the T-shaped waveguide and the open square ring resonator to realize sharp and asymmetric Fano resonance lines in the transmission spectrum, and the Fano resonance lines are sensitive to structural parameters and the surrounding environment, thereby realizing the super-resolution of sensing.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011469259.2A CN112414970A (en) | 2020-12-15 | 2020-12-15 | Glucose solution measuring device of surface plasmon open square ring resonant cavity |
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| CN202011469259.2A CN112414970A (en) | 2020-12-15 | 2020-12-15 | Glucose solution measuring device of surface plasmon open square ring resonant cavity |
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| CN112414970A true CN112414970A (en) | 2021-02-26 |
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| CN202011469259.2A Withdrawn CN112414970A (en) | 2020-12-15 | 2020-12-15 | Glucose solution measuring device of surface plasmon open square ring resonant cavity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115755271A (en) * | 2022-10-28 | 2023-03-07 | 广州市南沙区北科光子感知技术研究院 | VO (volatile organic compound) 2 Modulator of mixed silicon-based Fano resonance |
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2020
- 2020-12-15 CN CN202011469259.2A patent/CN112414970A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115755271A (en) * | 2022-10-28 | 2023-03-07 | 广州市南沙区北科光子感知技术研究院 | VO (volatile organic compound) 2 Modulator of mixed silicon-based Fano resonance |
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