CN107664791A - A kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure - Google Patents
A kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure Download PDFInfo
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- CN107664791A CN107664791A CN201710940177.3A CN201710940177A CN107664791A CN 107664791 A CN107664791 A CN 107664791A CN 201710940177 A CN201710940177 A CN 201710940177A CN 107664791 A CN107664791 A CN 107664791A
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- waveguide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
Abstract
The embodiment of the invention discloses a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure, belong to optical field.The single-particle acquisition equipment includes the waveguide of rectangle plate profile structure；Using the first center line of waveguide as symmetry axis, the nanometer groove of waveguide is provided through along the length direction of waveguide, the first center line is the center line parallel to the length direction of waveguide；Waveguide is provided with the bellmouth of the first quantity and the cycle hole of the second quantity in the side of the second center line, and the second center line is the center line of the length direction perpendicular to waveguide；Using the second center line as symmetry axis, waveguide is symmetrically arranged with the bellmouth of the first quantity and the cycle hole of the second quantity in the opposite side of the second center line；The center of circle of bellmouth and the center of circle in cycle hole are on the first center line.The device of the present invention can possess the advantages that strong optical trapping force, low input power and high operation accuracy simultaneously.
Description
Technical field
The present invention relates to optical field, the single-particle capture of more particularly to a kind of 1-D photon crystal nanometer groove micro-cavity structure
Device.
Background technology
In the last few years, with the needs of exploitation active nano system, how nano particle is carried out accurate microoperation into
For the focus studied at present.Wherein, by advantage high its Q/V, (wherein Q is quality factor to photon crystal micro cavity, and V is pattern
Volume), good optical acquisition and detection platform are considered by researcher.Particularly 1-D photon crystal nanometer microcavity,
Possess the advantage of ultra-compact chip area and excellent integration, cause integrated chip capture and manipulate the very big concern in field.
However, when 1-D photon crystal microcavity at this stage is used for single nanoparticle capture and detected, due to capturing object
Interaction between light field is very poorly efficient, limits the accuracy of the less nano particle of system manipulation.Generally for reality
Now big optical trapping force accurately operates nano particle, it is necessary to which higher input optical power, such nano particle is due to light
Absorption causes temperature to raise, and influences or damages its structure and performance.
The content of the invention
The purpose of the embodiment of the present invention is the single-particle capture for providing a kind of 1-D photon crystal nanometer groove micro-cavity structure
Device, strong optical trapping force, low input power and high the advantages that operating accuracy can be possessed simultaneously.Concrete technical scheme is such as
Under：
It is described the embodiments of the invention provide a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure
Single-particle acquisition equipment includes：
The waveguide of rectangle plate profile structure；
Using the first center line of the waveguide as symmetry axis, the ripple is provided through along the length direction of the waveguide
The nanometer groove led, first center line are the center line parallel to the length direction of the waveguide；
The waveguide is provided with the bellmouth of the first quantity and the cycle hole of the second quantity, institute in the side of the second center line
State the center line that the second center line is the length direction perpendicular to the waveguide；It is described using second center line as symmetry axis
Waveguide is symmetrically arranged with the bellmouth of first quantity and the week of second quantity in the opposite side of second center line
Phase hole；
The center of circle in the center of circle of the bellmouth and the cycle hole is on first center line.
Optionally, the bellmouth is according to the direction from close to second center line to away from second center line
The circular hole that radius reduces one by one, the cycle hole are the equal circular holes of radius.
Optionally, the radius of the bellmouth successively decreases one by one according to the default half price formula radius that successively decreases.
Optionally, the bellmouth of first quantity is close to second center line；
The cycle hole of second quantity away from second center line, the radius in the cycle hole is equal to the bellmouth
The radius of the minimum circular hole of middle radius.
Optionally, the bellmouth of first quantity is away from second center line；
The cycle hole of second quantity close to second center line, the radius in the cycle hole is equal to the bellmouth
The radius of the maximum circular hole of middle radius.
Optionally, the distance of center circle between two circular holes adjacent in the bellmouth and the cycle hole is equal.
Optionally, the single-particle acquisition equipment also includes substrate, and the substrate is cuboid, and the waveguide is arranged on institute
The upper top surface of substrate is stated, the long side of the waveguide and the substrate long side are parallel and equal.
Optionally, the medium of the waveguide is silicon, and the medium of the substrate is silica.
Optionally, the parameter of the waveguide is used to make list of the incident light to the 1-D photon crystal nanometer groove micro-cavity structure
The force trapping of particle in particle catch arrangement reaches maximum；
Width of the parameter of the waveguide including the nanometer groove, first quantity, second quantity, the taper
The radius in hole, the radius in the cycle hole, the distance of center circle of the bellmouth, the distance of center circle in the cycle hole, the width of the waveguide
It is one or more in degree and thickness.
The embodiment of the invention discloses a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure, the list
Particle catch arrangement includes the waveguide of rectangle plate profile structure；Using the first center line of waveguide as symmetry axis, along the length of waveguide
Degree direction is provided through the nanometer groove of waveguide, and the first center line is the center line parallel to the length direction of waveguide；Waveguide exists
The side of second center line is provided with the bellmouth of the first quantity and the cycle hole of the second quantity, and the second center line is perpendicular to ripple
The center line for the length direction led；Using the second center line as symmetry axis, waveguide is symmetrically arranged with the opposite side of the second center line
The cycle hole of the bellmouth of first quantity and the second quantity；The center of circle of bellmouth and the center of circle in cycle hole are on the first center line.
The device of the present invention possesses the advantages that strong optical trapping force, low input power and high operation accuracy, can be in low input power
Under conditions of possess very strong optical trapping force, and can accurately move or fixed nanometer groove in particle.Certainly, it is real
Any product or method for applying the present invention are not necessarily required to reach all the above advantage simultaneously.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure provided in an embodiment of the present invention
Structural representation；
Fig. 2 is a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure provided in an embodiment of the present invention
Structural representation；
Fig. 3 is a kind of single-particle force trapping provided in an embodiment of the present invention and the graph of a relation of single-particle position.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
In the prior art, the single-particle acquisition equipment of 1-D photon crystal micro-cavity structure generally includes rectangle plate profile structure
Waveguide, when in use, can waveguide a width face inject laser, length direction of the laser along waveguide, from waveguide
Another width face is projected, and laser can form light field in waveguide, the intensity of the light field can by adjust the power of incident light come
Regulation.Several microns to several nanometers of particle can be moved or fixed using the light field in waveguide.
The embodiment of the invention discloses a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure, general
A nanometer groove is added in the single-particle acquisition equipment of logical 1-D photon crystal micro-cavity structure, the single-particle is captured below
Device is described in detail.
As shown in figure 1, Fig. 1 is a kind of simple grain of 1-D photon crystal nanometer groove micro-cavity structure provided in an embodiment of the present invention
The structural representation of sub- acquisition equipment, the single-particle acquisition equipment include the waveguide of rectangle template.The coordinate set in figure is former
Point position, for the center of guide floor, the direction using the length direction of waveguide as x-axis, using the width of waveguide as y-axis
Direction.Waveguide is provided through waveguide and on first on center line (can be described as the first center line) along the x-axis direction
The symmetrical nanometer groove of center line, center line (can be described as the second center line) side in y-axis direction is provided with the cone of the first quantity
Shape hole (taper region) and the cycle hole (mirror region) of the second quantity, set in the opposite side of the second center line
There are symmetrical bellmouth and cycle hole.Wherein, the center of circle in bellmouth and cycle hole is all on the first center line.
Optionally, the bellmouth in waveguide according to from close to the second center line to away from the second center line direction radius by
The circular hole of individual reduction, the cycle hole be the equal circular hole of radius.
In force, bellmouth can be that radius reduces one by one, or, one group of circular hole that radius increases one by one.The present invention
In, the radius of bellmouth can reduce one by one according to the direction from close to the second center line to away from the second center line, also, bore
The circular hole quantity that shape hole is included can be determined by particle of the technical staff in single-particle acquisition equipment.Cycle, hole can set
The equal circular hole of the distance of center circle that is set between two circular holes that radius is equal, adjacent.
Optionally, the radius of bellmouth successively decreases one by one according to the default half price formula radius that successively decreases.
In force, the radius of the bellmouth decreasing fashion such as can successively decrease according to linear decrease mode or half price is become
Change.In single-particle acquisition equipment provided in an embodiment of the present invention, the radius of bellmouth be according to from close to the second center line to remote
What the mode reduced one by one from the direction of the second center line was configured, the formula is ri=rcenter+(i-1)2(rend+
rcenter)/(Nt-1)2(riRepresent the radius of i-th of bellmouth；I is bigger, further away from center, i=1,2 ..., Nt；NtRepresent second
The total number of the bellmouth of center line side；rcenterRepresent in bellmouth near the circle hole radius of the second center line, rendTable
Show the circle hole radius farthest from the second center line, i.e. r1=rcenter,)。
Optionally, the bellmouth of the first quantity in waveguide is close to the second center line；Second quantity cycle hole away from
Two center lines, and the radius in cycle hole is equal to the radius of the circular hole that radius is minimum in bellmouth.
In force, the position in bellmouth and cycle hole can be according to the characteristic of captured particle (for example, particle is straight
Footpath, particle are biomone or abiotic particle etc.) it is interchangeable.A kind of single-particle acquisition equipment provided by the invention, cone
Shape hole close to the second center line, the cycle hole away from the second center line, and to be equal to radius in bellmouth minimum for the radius in cycle hole
Circular hole radius.Structure is as shown in Figure 1.
Optionally, the bellmouth of the first quantity in waveguide is away from the second center line；Second quantity cycle hole close to
Two center lines, and the radius in cycle hole is equal to the radius of the circular hole that radius is maximum in bellmouth.
In force, another single-particle acquisition equipment provided by the invention, bellmouth away from the second center line, the cycle hole
Close to the second center line, and the radius in cycle hole is equal to the radius of the circular hole that radius is maximum in bellmouth.Its structure such as Fig. 2 institutes
Show, cycle hole (mirror region) is close to the second center line, and bellmouth (taper region) is away from the second center line, week
The phase radius in hole is equal to the radius of the circular hole that radius is maximum in bellmouth.
Optionally, the distance of center circle between two circular holes adjacent in bellmouth and cycle hole is equal.
In force, the circle center distance between two circular holes adjacent in bellmouth can be according to the spy of captured particle
Property is adjusted；Circle center distance in cycle hole between two adjacent circular holes is equal, and the concrete numerical value of distance of center circle can also root
It is adjusted according to the characteristic of captured particle.A kind of single-particle acquisition equipment provided by the invention, bellmouth in waveguide and
Distance of center circle in cycle hole between two adjacent circular holes is equal.
Optionally, single-particle acquisition equipment also includes the substrate of rectangular shape, and waveguide is arranged on the upper top surface of substrate, and
And the long side of waveguide is parallel and equal with substrate long side.
In force, waveguide is typically rectangle plate profile structure, and because current technology limits, waveguide needs to be arranged on
Performed etching above substrate, its length is less than or equal to the length of substrate, and the shape of substrate can be arbitrary.Preferably, originally
Inventive embodiments use the substrate of rectangular shape.
In scheme provided in an embodiment of the present invention, single-particle acquisition equipment also includes the substrate of rectangular shape, and waveguide is set
The upper top surface in substrate is put, and the long side of waveguide is parallel and equal with substrate long side.The single-particle acquisition equipment of this structure
Easily manufacture, it is convenient during use to place.
Optionally, the waveguide medium of single-particle acquisition equipment is silicon, and substrate dielectric is silica.
In force, the medium of waveguide can select silicon, lithium niobate and other be capable of guide-lighting metal medium, substrate
Medium is usually using silica.The waveguide medium of single-particle acquisition equipment provided in an embodiment of the present invention is silicon, substrate dielectric
For silica, the chip area of the single-particle acquisition equipment is small, and integration is high, is especially suitable for integrating on piece.
Optionally, the parameter of waveguide is used to make incident light capture the single-particle of 1-D photon crystal nanometer groove micro-cavity structure
The force trapping of particle in device reaches maximum；The width of the parameter of waveguide including nanometer groove, the first quantity, the second quantity,
The radius of bellmouth, the radius in cycle hole, the distance of center circle of bellmouth, the distance of center circle in cycle hole, waveguide width and thickness in
It is one or more.
In force, the parameter of waveguide can be adjusted correspondingly according to the characteristic of captured particle, so as to make incidence
Light reaches maximum to the force trapping of the particle in the single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure.Adjusting
When saving the parameter of waveguide, one or more parameters therein can be adjusted.
In scheme provided in an embodiment of the present invention, the parameters of waveguide can adjust, so can be according to different grains
Son produces the acquisition equipment for the advantages that possessing strong optical trapping force, low input power and high operation accuracy accordingly.
The embodiment of the invention discloses a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure, the list
Particle catch arrangement includes the waveguide of rectangle plate profile structure；Using the first center line of waveguide as symmetry axis, along the length of waveguide
Degree direction is provided through the nanometer groove of waveguide, and the first center line is the center line parallel to the length direction of waveguide；Waveguide exists
The side of second center line is provided with the bellmouth of the first quantity and the cycle hole of the second quantity, and the second center line is perpendicular to ripple
The center line for the length direction led；Using the second center line as symmetry axis, waveguide is symmetrically arranged with the opposite side of the second center line
The cycle hole of the bellmouth of first quantity and the second quantity；The center of circle of bellmouth and the center of circle in cycle hole are on the first center line.
The device of the present invention possesses the advantages that strong optical trapping force, low input power and high operation accuracy, can be in low input power
Under conditions of possess very strong optical trapping force, and can accurately move or fixed nanometer groove in particle.
A kind of example of single-particle acquisition equipment of the invention is provided below.The single-particle acquisition equipment goes for half
Footpath is 10nm polystyrene particle.Its structure is as shown in figure 1, the width w of whole waveguidenb=650nm, thickness h=220nm,
Nanometer well width wslot=60nm.Lattice constant (distance of center circle between two adjacent circular holes) a=of bellmouth part
560nm, the total number N of the bellmouth of the second center line sidetFor 20, taper pore radius is by close to the second center line
rcenter=0.42a is reduced to the r close to cycle bore portion one by oneend=0.36a, the specific half price formula that successively decreases is ri=
rcenter+(i-1)2(rend+rcenter)/(Nt-1)2(riRepresent the radius of i-th of bellmouth；I is bigger, further away from center, i=1,
2,…,Nt；NtRepresent the total number of the bellmouth of the second center line side；rcenterRepresent in bellmouth near the second center line
Circle hole radius, rendRepresent the circle hole radius farthest from the second center line, i.e. r1=rcenter,).Cycle hole portion
Lattice constant (distance of center circle between the two adjacent circular holes) a=560nm, the total number N of the second center line side being divided tomFor 5
It is individual, cycle pore radius rj=0.36a.The medium of waveguide is silicon, and its refractive index is 3.46；Substrate dielectric is silica, and it is rolled over
Rate is penetrated as 1.45.
The polystyrene particle that radius is 10nm can obtain in the nanometer groove of the single-particle acquisition equipment of the present invention
Greatest optical force trapping has reached 8.28 × 103pN/mW, compared with similar photon crystal micro cavity, improves two orders of magnitude
More than.Maximum capture gesture hydrazine depth has reached 1.15 × 105kBT/mW, far above the required value 10kBT of stable capture.Work
When stablizing trapped state, required minimum power input (threshold power) is only 0.087 μ W, with similar photon crystal micro cavity
Compare, reduce more than two orders of magnitude.
In the case where incident light is constant, the polystyrene particle is subject at x directions and z-axis direction position difference
Optical trapping force is change.As shown in figure 3, the origin of coordinates is arranged on the center of waveguide and substrate contact face, it is left in Fig. 3
F in edge graphxCurve map of the particle in the optical trapping force suffered by x-axis direction with x value changes is represented, wherein, solid line is theoretical
It is worth (Theoretical), dotted line is simulation value (Simulation), as seen from the figure, and at x=± 50nm or so position, Fx
Value it is maximum, in other positions, FxValue change.F in Fig. 3 in the figure of the rightzParticle is in the optics suffered by z-axis direction
Force trapping with z value changes curve map, as seen from the figure, at z=120nm or so position, FzValue it is maximum, in other positions
When, FzValue change.
From above-mentioned concrete scheme, the single-particle of 1-D photon crystal nanometer groove micro-cavity structure provided by the invention is caught
The advantages that device possesses strong optical trapping force, low input power and high operation accuracy is obtained, can be in the condition of low input power
Under possess very strong optical trapping force, and can accurately move or fixed nanometer groove in particle.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply and deposited between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability includes, so that process, method, article or equipment including a series of elements not only will including those
Element, but also the other element including being not expressly set out, or it is this process, method, article or equipment also to include
Intrinsic key element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that
Other identical element also be present in process, method, article or equipment including the key element.
Each embodiment in this specification is described by the way of related, identical similar portion between each embodiment
Divide mutually referring to what each embodiment stressed is the difference with other embodiment.It is real especially for system
For applying example, because it is substantially similar to embodiment of the method, so description is fairly simple, related part is referring to embodiment of the method
Part explanation.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Any modification, equivalent substitution and improvements made within the spirit and principles in the present invention etc., are all contained in protection scope of the present invention
It is interior.
Claims (9)
1. a kind of single-particle acquisition equipment of 1-D photon crystal nanometer groove micro-cavity structure, it is characterised in that the single-particle is caught
Obtaining device includes the waveguide of rectangle plate profile structure；
Using the first center line of the waveguide as symmetry axis, the waveguide is provided through along the length direction of the waveguide
Nanometer groove, first center line are the center line parallel to the length direction of the waveguide；
The waveguide is provided with the bellmouth of the first quantity and the cycle hole of the second quantity in the side of the second center line, and described
Two center lines are the center line of the length direction perpendicular to the waveguide；Using second center line as symmetry axis, the waveguide
The bellmouth of first quantity and the cycle hole of second quantity are symmetrically arranged with the opposite side of second center line；
The center of circle in the center of circle of the bellmouth and the cycle hole is on first center line.
2. single-particle acquisition equipment according to claim 1, it is characterised in that the bellmouth is according to from close to described
The circular hole that second center line reduces one by one to the direction radius away from second center line, the cycle hole is that radius is equal
Circular hole.
3. single-particle acquisition equipment according to claim 2, it is characterised in that the radius of the bellmouth is according to default
The half price formula radius that successively decreases successively decreases one by one.
4. according to any described single-particle acquisition equipments of claim 1-3, it is characterised in that the bellmouth of first quantity
Close to second center line；
The cycle hole of second quantity is equal to half in the bellmouth away from second center line, the radius in the cycle hole
The radius of the minimum circular hole in footpath.
5. according to any described single-particle acquisition equipments of claim 1-3, it is characterised in that the bellmouth of first quantity
Away from second center line；
The cycle hole of second quantity is equal to half in the bellmouth close to second center line, the radius in the cycle hole
The radius of the maximum circular hole in footpath.
6. single-particle acquisition equipment according to claim 1, it is characterised in that phase in the bellmouth and the cycle hole
Distance of center circle between two adjacent circular holes is equal.
7. single-particle acquisition equipment according to claim 1, it is characterised in that described device also includes substrate, the lining
Bottom is cuboid, and the waveguide is arranged on the upper top surface of the substrate, the long side of the waveguide it is parallel with the substrate long side and
It is equal.
8. the single-particle acquisition equipment according to claim 1 or 7, it is characterised in that the medium of the waveguide is silicon, described
The medium of substrate is silica.
9. single-particle acquisition equipment according to claim 1, it is characterised in that the parameter of the waveguide is used to make incident light
Maximum is reached to the force trapping of the particle in the single-particle acquisition equipment of the 1-D photon crystal nanometer groove micro-cavity structure；
The width of the parameter of the waveguide including the nanometer groove, first quantity, second quantity, the bellmouth
Radius, the radius in the cycle hole, the distance of center circle of the bellmouth, the distance of center circle in the cycle hole, the waveguide width and
It is one or more in thickness.
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| CN201710940177.3A CN107664791B (en) | 2017-09-30 | 2017-09-30 | A kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure |
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|---|---|---|---|
| CN201710940177.3A CN107664791B (en) | 2017-09-30 | 2017-09-30 | A kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure |
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| CN107664791A true CN107664791A (en) | 2018-02-06 |
| CN107664791B CN107664791B (en) | 2018-07-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108333680A (en) * | 2018-02-14 | 2018-07-27 | 北京邮电大学 | A kind of photon crystal micro cavity and sensor |
| CN110737114A (en) * | 2019-10-10 | 2020-01-31 | 深圳大学 | Optical modulator |
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| CN1942794A (en) * | 2005-03-11 | 2007-04-04 | 安捷伦科技有限公司 | Apparatus for single nanoparticle detection |
| CN102209920A (en) * | 2008-09-12 | 2011-10-05 | 康奈尔大学 | Optical force based biomolecular analysis in slot waveguides |
| CN103261931A (en) * | 2010-10-08 | 2013-08-21 | 康奈尔大学 | Optical trapping apparatus, methods and applications using photonic crystal resonators |
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2017
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| CN1942794A (en) * | 2005-03-11 | 2007-04-04 | 安捷伦科技有限公司 | Apparatus for single nanoparticle detection |
| CN102209920A (en) * | 2008-09-12 | 2011-10-05 | 康奈尔大学 | Optical force based biomolecular analysis in slot waveguides |
| CN103261931A (en) * | 2010-10-08 | 2013-08-21 | 康奈尔大学 | Optical trapping apparatus, methods and applications using photonic crystal resonators |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108333680A (en) * | 2018-02-14 | 2018-07-27 | 北京邮电大学 | A kind of photon crystal micro cavity and sensor |
| CN110737114A (en) * | 2019-10-10 | 2020-01-31 | 深圳大学 | Optical modulator |
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| Publication number | Publication date |
|---|---|
| CN107664791B (en) | 2018-07-24 |
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