CN107664791B - A kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure - Google Patents
A kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure Download PDFInfo
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- CN107664791B CN107664791B CN201710940177.3A CN201710940177A CN107664791B CN 107664791 B CN107664791 B CN 107664791B CN 201710940177 A CN201710940177 A CN 201710940177A CN 107664791 B CN107664791 B CN 107664791B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
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Abstract
The embodiment of the invention discloses a kind of single-particle acquisition equipments of 1-D photon crystal nanometer slot micro-cavity structure, belong to optical field.The single-particle acquisition equipment includes the waveguide of rectangle plate profile structure;Using the first center line of waveguide as symmetry axis, the nanometer slot of waveguide is provided through along the length direction of waveguide, the first center line is the center line for the length direction for being parallel to waveguide;Waveguide is provided with the period hole of the bellmouth and the second quantity of the first quantity in the side of the second center line, and the second center line is the center line of the length direction perpendicular to waveguide;Using the second center line as symmetry axis, waveguide is symmetrically arranged with the period hole of the bellmouth and the second quantity of the first quantity in the other side of the second center line;The center of circle of bellmouth and the center of circle in period hole are on the first center line.The device of the invention can possess the advantages that strong optical trapping force, low input power and high operation accuracy simultaneously.
Description
Technical field
The present invention relates to optical field, more particularly to the single-particle of a kind of 1-D photon crystal nanometer slot micro-cavity structure captures
Device.
Background technology
In recent years, with the needs of exploitation active nano system, how to nano particle carry out accurate microoperation at
For the hot spot studied at present.Wherein, by the advantage of its Q/V high, (wherein Q is quality factor to photon crystal micro cavity, and V is pattern
Volume), good optical acquisition and detection platform are considered by researcher.Especially 1-D photon crystal nanometer microcavity,
The advantage for possessing ultra-compact chip area and excellent integration causes integrated chip capture and manipulates the very big concern in field.
However, when 1-D photon crystal microcavity at this stage is captured and detected for single nanoparticle, due to capturing object
Interaction between light field is very inefficient, limits the accuracy of the smaller nano particle of system manipulation.Generally for reality
Now big optical trapping force accurately operates nano particle, needs higher input optical power, such nano particle is due to light
Absorption causes temperature to increase, and influences or damage its structure and performance.
Invention content
The embodiment of the present invention is designed to provide a kind of single-particle capture of 1-D photon crystal nanometer slot micro-cavity structure
Device can possess strong optical trapping force, low input power and high the advantages that operating accuracy simultaneously.Specific technical solution is such as
Under:
It is described an embodiment of the present invention provides a kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure
Single-particle acquisition equipment includes:
The waveguide of rectangle plate profile structure;
Using the first center line of the waveguide as symmetry axis, the wave is provided through along the length direction of the waveguide
The nanometer slot led, first center line are the center line for the length direction for being parallel to the waveguide;
The waveguide is provided with the period hole of the bellmouth and the second quantity of the first quantity, institute in the side of the second center line
State the center line that the second center line is the length direction perpendicular to the waveguide;It is described using second center line as symmetry axis
Waveguide is symmetrically arranged with the week of the bellmouth and second quantity of first quantity in the other side of second center line
Phase hole;
The center of circle in the center of circle of the bellmouth and the period hole is on first center line.
Optionally, the bellmouth is according to the direction from close to second center line to far from second center line
The circular hole that radius reduces one by one, the period hole are the equal circular holes of radius.
Optionally, the radius of the bellmouth successively decreases one by one according to the preset half price formula radius that successively decreases.
Optionally, the bellmouth of first quantity is close to second center line;
Far from second center line, the radius in the period hole is equal to the bellmouth in the period hole of second quantity
The radius of the circular hole of middle radius minimum.
Optionally, the bellmouth of first quantity is far from second center line;
Close to second center line, the radius in the period hole is equal to the bellmouth in the period hole of second quantity
The radius of the middle maximum circular hole of radius.
Optionally, the distance of center circle between two circular holes adjacent in the bellmouth and the period hole is equal.
Optionally, the single-particle acquisition equipment further includes substrate, and the substrate is cuboid, and the waveguide is arranged in institute
The upper top surface of substrate is stated, the long side of the waveguide and the substrate long side are parallel and equal.
Optionally, the medium of the waveguide is silicon, and the medium of the substrate is silica.
Optionally, the parameter of the waveguide is for making list of the incident light to the 1-D photon crystal nanometer slot micro-cavity structure
The force trapping of particle in particle catch arrangement reaches maximum value;
The parameter of the waveguide includes the width of the nanometer slot, first quantity, second quantity, the taper
The radius in hole, the radius in the period hole, the distance of center circle of the bellmouth, the distance of center circle in the period hole, the waveguide width
It is one or more in degree and thickness.
The embodiment of the invention discloses a kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure, the lists
Particle catch arrangement includes the waveguide of rectangle plate profile structure;Using the first center line of waveguide as symmetry axis, along the length of waveguide
Degree direction is provided through the nanometer slot of waveguide, and the first center line is the center line for the length direction for being parallel to waveguide;Waveguide exists
The side of second center line is provided with the bellmouth of the first quantity and the period hole of the second quantity, and the second center line is perpendicular to wave
The center line for the length direction led;Using the second center line as symmetry axis, waveguide is symmetrically arranged in the other side of the second center line
The period hole of the bellmouth of first quantity and the second quantity;The center of circle of bellmouth and the center of circle in period hole are on the first center line.
The device of the invention possesses the advantages that strong optical trapping force, low input power and high operation accuracy, can be in low input power
Under conditions of possess very strong optical trapping force, and accurately can move or fix the particle in nanometer slot.Certainly, real
Any product or method for applying the present invention are not necessarily required to reach all the above advantage simultaneously.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure provided in an embodiment of the present invention
Structural schematic diagram;
Fig. 2 is a kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure provided in an embodiment of the present invention
Structural schematic diagram;
Fig. 3 is a kind of relational graph of single-particle force trapping and single-particle position provided in an embodiment of the present invention.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In the prior art, the single-particle acquisition equipment of 1-D photon crystal micro-cavity structure generally includes rectangle plate profile structure
Waveguide, when in use, can a width face of waveguide inject laser, laser along waveguide length direction, from waveguide
Another width face is projected, and laser can form light field in waveguide, the intensity of the light field can by adjust the power of incident light come
It adjusts.Several microns to several nanometers of particle can be moved or fixed using the light field in waveguide.
The embodiment of the invention discloses a kind of single-particle acquisition equipments of 1-D photon crystal nanometer slot micro-cavity structure, general
A nanometer slot is increased in the single-particle acquisition equipment of logical 1-D photon crystal micro-cavity structure, and the single-particle is captured below
Device is described in detail.
As shown in FIG. 1, FIG. 1 is a kind of simple grains of 1-D photon crystal nanometer slot micro-cavity structure provided in an embodiment of the present invention
The structural schematic diagram of sub- acquisition equipment, the single-particle acquisition equipment include the waveguide of rectangle template.The coordinate being arranged in figure is former
Point position, is the center of guide floor, using the length direction of waveguide as the direction of x-axis, using the width direction of waveguide as y-axis
Direction.Waveguide is provided through waveguide and about first on center line (can be described as the first center line) along the x-axis direction
The symmetrical nanometer slot in center is provided with the cone of the first quantity in center line (can be described as the second center line) side in y-axis direction
The period hole (mirror region) in shape hole (taper region) and the second quantity is arranged in the other side of the second center line
There are symmetrical bellmouth and period hole.Wherein, the center of circle in bellmouth and period hole is all on the first center line.
Optionally, the bellmouth in waveguide according to from close to the second center line to far from the second center line direction radius by
The circular hole of a reduction, period hole are the equal circular holes of radius.
In force, bellmouth can be that radius reduces one by one, alternatively, radius increased one group of circular hole one by one.The present invention
In, the radius of bellmouth can one by one reduce according to the direction from close to the second center line to far from the second center line, also, bore
The circular hole quantity that shape hole is included can be determined by technical staff according to the particle in single-particle acquisition equipment.Period hole can be set
The equal circular hole of the distance of center circle that is set between two circular holes that radius is equal, adjacent.
Optionally, the radius of bellmouth successively decreases one by one according to the preset half price formula radius that successively decreases.
In force, the radius of bellmouth can successively decrease according to linear decrease mode or half price waits decreasing fashions to be become
Change.In single-particle acquisition equipment provided in an embodiment of the present invention, the radius of bellmouth be according to from close to the second center line to remote
What the mode that the direction from the second center line reduces one by one was configured, which is ri=rcenter+(i-1)2(rend-
rcenter)/(Nt-1)2(riIndicate the radius of i-th of bellmouth;I is bigger, further away from center, i=1,2 ..., Nt;NtIndicate second
The total number of the bellmouth of center line side;rcenterIndicate the circle hole radius near the second center line, r in bellmouthendTable
Show the circle hole radius farthest from the second center line, i.e.,
Optionally, the bellmouth of the first quantity in waveguide is close to the second center line;The period hole of second quantity is far from
Two center lines, and the radius in period hole is equal to the radius of the circular hole of radius minimum in bellmouth.
In force, the position in bellmouth and period hole can be according to the characteristic of captured particle (for example, particle is straight
Diameter, particle are biomone or abiotic particle etc.) it is interchangeable.A kind of single-particle acquisition equipment provided by the invention, cone
Shape hole is close to the second center line, and period hole is far from the second center line, and the radius in period hole is equal to radius minimum in bellmouth
Circular hole radius.Structure is as shown in Figure 1.
Optionally, the bellmouth of the first quantity in waveguide is far from the second center line;The period hole of second quantity is close to
Two center lines, and the radius in period hole is equal to the radius of the maximum circular hole of radius in bellmouth.
In force, another single-particle acquisition equipment provided by the invention, bellmouth is far from the second center line, period hole
Close to the second center line, and the radius in period hole is equal to the radius of the maximum circular hole of radius in bellmouth.Its structure such as Fig. 2 institutes
Show, period hole (mirror region) is close to the second center line, and bellmouth (taper region) is far from the second center line, week
The radius in phase hole is equal to the radius of the maximum circular hole of radius in bellmouth.
Optionally, the distance of center circle between two circular holes adjacent in bellmouth and period hole is equal.
In force, the circle center distance between two circular holes adjacent in bellmouth can be according to the spy of captured particle
Property is adjusted;Circle center distance in period hole between two adjacent circular holes is equal, and the concrete numerical value of distance of center circle can also root
It is adjusted according to the characteristic of captured particle.A kind of single-particle acquisition equipment provided by the invention, bellmouth in waveguide and
Distance of center circle in period hole between two adjacent circular holes is equal.
Optionally, single-particle acquisition equipment further includes the substrate of rectangular shape, and waveguide is arranged in the upper top surface of substrate, and
And the long side of waveguide is parallel and equal with substrate long side.
In force, waveguide is typically rectangle plate profile structure, and since current technology limits, waveguide needs to be arranged
It is performed etching above substrate, length is less than or equal to the length of substrate, and the shape of substrate can be arbitrary.Preferably, originally
Inventive embodiments use the substrate of rectangular shape.
In scheme provided in an embodiment of the present invention, single-particle acquisition equipment further includes the substrate of rectangular shape, and waveguide is set
It sets in the upper top surface of substrate, and the long side of waveguide is parallel and equal with substrate long side.The single-particle acquisition equipment of this structure
It is easy to manufacture, when use facilitates placement.
Optionally, the waveguide medium of single-particle acquisition equipment is silicon, and substrate dielectric is silica.
In force, the medium of waveguide can select silicon, lithium niobate and other be capable of guide-lighting metal medium, substrate
Medium is usually using silica.The waveguide medium of single-particle acquisition equipment provided in an embodiment of the present invention is silicon, substrate dielectric
Chip area for silica, the single-particle acquisition equipment is small, and integration is high, and it is integrated to be very suitable on piece.
Optionally, the parameter of waveguide is used to make incident light to be captured to the single-particle of 1-D photon crystal nanometer slot micro-cavity structure
The force trapping of particle in device reaches maximum value;The parameter of waveguide include the width of nanometer slot, the first quantity, the second quantity,
The radius of bellmouth, the radius in period hole, the distance of center circle of bellmouth, the distance of center circle in period hole, waveguide width and thickness in
It is one or more.
In force, the parameter of waveguide can be adjusted correspondingly according to the characteristic of captured particle, so as to make incidence
Light reaches maximum value to the force trapping of the particle in the single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure.It is adjusting
When saving the parameter of waveguide, one or more parameters therein can be adjusted.
In scheme provided in an embodiment of the present invention, the parameters of waveguide can adjust, in this way can be according to different grains
Son produces the acquisition equipment for the advantages that possessing strong optical trapping force, low input power and high operation accuracy accordingly.
The embodiment of the invention discloses a kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure, the lists
Particle catch arrangement includes the waveguide of rectangle plate profile structure;Using the first center line of waveguide as symmetry axis, along the length of waveguide
Degree direction is provided through the nanometer slot of waveguide, and the first center line is the center line for the length direction for being parallel to waveguide;Waveguide exists
The side of second center line is provided with the bellmouth of the first quantity and the period hole of the second quantity, and the second center line is perpendicular to wave
The center line for the length direction led;Using the second center line as symmetry axis, waveguide is symmetrically arranged in the other side of the second center line
The period hole of the bellmouth of first quantity and the second quantity;The center of circle of bellmouth and the center of circle in period hole are on the first center line.
The device of the invention possesses the advantages that strong optical trapping force, low input power and high operation accuracy, can be in low input power
Under conditions of possess very strong optical trapping force, and accurately can move or fix the particle in nanometer slot.
A kind of example of the single-particle acquisition equipment of the present invention is provided below.The single-particle acquisition equipment can be adapted for half
Diameter is the polystyrene particle of 10nm.Its structure as shown in Figure 1, entire waveguide width wnb=650nm, thickness h=220nm,
Nanometer well width wslot=60nm.Lattice constant (distance of center circle between two adjacent circular holes) a=of bellmouth part
560nm, the total number N of the bellmouth of the second center line sidetIt it is 20, taper pore radius is by close to the second center line
rcenter=0.42a is reduced to the r close to period bore portion one by oneend=0.36a, specific half price successively decrease formula as ri=
rcenter+(i-1)2(rend-rcenter)/(Nt-1)2(riIndicate the radius of i-th of bellmouth;I is bigger, further away from center, i=1,
2 ..., Nt;NtIndicate the total number of the bellmouth of the second center line side;rcenterIt indicates in bellmouth near the second center line
Circle hole radius, rendIndicate the circle hole radius farthest from the second center line, i.e. r1=rcenter,).Period hole portion
Lattice constant (distance of center circle between the two adjacent circular holes) a=560nm, the total number N of the second center line side being divided tomIt is 5
It is a, period pore radius rj=0.36a.The medium of waveguide is silicon, refractive index 3.46;Substrate dielectric is silica, folding
It is 1.45 to penetrate rate.
The polystyrene particle that radius is 10nm can obtain in the nanometer slot of the single-particle acquisition equipment of the present invention
Greatest optical force trapping has reached 8.28 × 103pN/mW, compared with similar photon crystal micro cavity, improves two orders of magnitude
More than.Maximum capture gesture hydrazine depth has reached 1.15 × 105kBT/mW, far above the required value 10kBT for stablizing capture.Work
When stablizing trapped state, required minimum power input (threshold power) is only 0.087 μ W, with similar photon crystal micro cavity
It compares, reduces two orders of magnitude or more.
In the case where incident light is constant, which is subject at the directions x and z-axis direction position difference
Optical trapping force is variation.As shown in figure 3, a left side is arranged in the center of waveguide and substrate contact face, Fig. 3 in coordinate origin
F in edge graphxIndicate the curve graph that optical trapping force of the particle suffered by x-axis direction changes with x values, wherein solid line is theoretical
It is worth (Theoretical), dotted line is simulation value (Simulation), as seen from the figure, and at the position of x=± 50nm or so, Fx
Value it is maximum, in other positions, FxValue change.F in Fig. 3 in the figure of the rightzOptics of the particle suffered by z-axis direction
The curve graph that force trapping changes with z values, as seen from the figure, at the position of z=120nm or so, FzValue it is maximum, in other positions
When, FzValue change.
By above-mentioned concrete scheme as it can be seen that the single-particle of 1-D photon crystal nanometer slot micro-cavity structure provided by the invention is caught
The advantages that device possesses strong optical trapping force, low input power and high operation accuracy is obtained, it can be in the condition of low input power
Under possess very strong optical trapping force, and accurately can move or fix the particle in nanometer slot.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence " including one ... ", it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element.
Each embodiment in this specification is all made of relevant mode and describes, identical similar portion between each embodiment
Point just to refer each other, and each embodiment focuses on the differences from other embodiments.Especially for system reality
For applying example, since it is substantially similar to the method embodiment, so description is fairly simple, related place is referring to embodiment of the method
Part explanation.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Any modification, equivalent replacement, improvement and so within the spirit and principles in the present invention, are all contained in protection scope of the present invention
It is interior.
Claims (9)
1. a kind of single-particle acquisition equipment of 1-D photon crystal nanometer slot micro-cavity structure, which is characterized in that the single-particle is caught
Obtain the waveguide that device includes rectangle plate profile structure;
Using the first center line of the waveguide as symmetry axis, the waveguide is provided through along the length direction of the waveguide
Nanometer slot, first center line is the center line for the length direction for being parallel to the waveguide;
The waveguide is provided with the period hole of the bellmouth and the second quantity of the first quantity in the side of the second center line, and described
Two center lines are the center line of the length direction perpendicular to the waveguide;Using second center line as symmetry axis, the waveguide
The period hole of the bellmouth and second quantity of first quantity is symmetrically arranged in the other side of second center line;
The center of circle in the center of circle of the bellmouth and the period hole is on first center line.
2. single-particle acquisition equipment according to claim 1, which is characterized in that the bellmouth is according to from close to described
The circular hole that second center line reduces one by one to the direction radius far from second center line, the period hole is that radius is equal
Circular hole.
3. single-particle acquisition equipment according to claim 2, which is characterized in that the radius of the bellmouth is according to preset
The half price formula radius that successively decreases successively decreases one by one, wherein the half price formula that successively decreases is:ri=rcenter+(i-1)2(rend-rcenter)/
(Nt-1)2, wherein riIndicate the radius of i-th of bellmouth;I is bigger, and bellmouth is further away from second center line, i=1,
2 ..., Nt;NtIndicate the total number of the bellmouth of second center line side;rcenterIt indicates in bellmouth near described
The circle hole radius of second center line, rendIndicate circle hole radius farthest from second center line in bellmouth,
4. according to any single-particle acquisition equipments of claim 1-3, which is characterized in that the bellmouth of first quantity
Close to second center line;
Far from second center line, the radius in the period hole is equal to half in the bellmouth in the period hole of second quantity
The radius of the circular hole of diameter minimum.
5. according to any single-particle acquisition equipments of claim 1-3, which is characterized in that the bellmouth of first quantity
Far from second center line;
Close to second center line, the radius in the period hole is equal to half in the bellmouth in the period hole of second quantity
The radius of the maximum circular hole of diameter.
6. single-particle acquisition equipment according to claim 1, which is characterized in that phase in the bellmouth and the period hole
Distance of center circle between two adjacent circular holes is equal.
7. single-particle acquisition equipment according to claim 1, which is characterized in that described device further includes substrate, the lining
Bottom is cuboid, and the waveguide is arranged in the upper top surface of the substrate, the long side of the waveguide it is parallel with the substrate long side and
It is equal.
8. single-particle acquisition equipment according to claim 1 or claim 7, which is characterized in that the medium of the waveguide is silicon, described
The medium of substrate is silica.
9. single-particle acquisition equipment according to claim 1, which is characterized in that the parameter of the waveguide is for making incident light
Maximum value is reached to the force trapping of the particle in the single-particle acquisition equipment of the 1-D photon crystal nanometer slot micro-cavity structure;
The parameter of the waveguide includes width, first quantity, second quantity, the bellmouth of the nanometer slot
Radius, the radius in the period hole, the distance of center circle of the bellmouth, the distance of center circle in the period hole, the waveguide width and
It is one or more in thickness.
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