CN105973841B - The index sensor of two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology - Google Patents
The index sensor of two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology Download PDFInfo
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- CN105973841B CN105973841B CN201610274157.2A CN201610274157A CN105973841B CN 105973841 B CN105973841 B CN 105973841B CN 201610274157 A CN201610274157 A CN 201610274157A CN 105973841 B CN105973841 B CN 105973841B
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
- G02B1/005—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of photonic crystals or photonic band gap materials
Abstract
The invention discloses the index sensors of two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology, belong to photonic crystal and optical fiber integrated sensor technical field.The index sensor includes tunable optical source, three port circulators, photodetector, mode transmission single mode optical fiber and two-dimensional columns array photonic crystal, the tunable optical source, photodetector pass through two ports that the mode transmission optical fiber connects three port circulators respectively, the mode transmission fiber end face of the third port connection of three port circulator processes two-dimensional columns array photonic crystal, forms sensing arrangement.The present invention has many advantages, such as that photonic crystal is small in size, loss is low, low in energy consumption, light field locality is good.Structure of the invention is compact to design, and actual fabrication is simple.
Description
Technical field
The present invention relates to a kind of novel refractive index based on two-dimensional columns array photonic crystal Yu single mode optical fiber integrated morphology
Sensor belongs to photonic crystal and optical fiber integrated sensor technical field.
Background technique
Currently, the High-performance micro-nano sensor that New-type photon crystal sensor is completely new as one kind, due to its distinctive height
Sensitivity, high-resolution, response time be rapid, easy of integration, strong antijamming capability small in size and can realize no label detection etc.
Advantage has obtained the special attention from different application field Many researchers;With the development of micro-nano technology technology of preparing, light
Sub- crystal probe has all obtained remarkable progress no matter in terms of theoretical research, or in experimental study and Applied research fields,
It is considered having huge performance potential and integrated advantage in realization Lab-on-a-Chip application aspect.At the same time, with body domain
The research of network technology is goed deep into, and wearable, the implantable custodial care facility for serving human health has already appeared, as core element,
Ultra-compact, highly sensitive micro-nano integrated sensor meets the following sensing network and carries out real-time accurate measurements to human health information
Application demand, the research in relation to New-type photon crystal sensor High-performance micro-nano perceive detection Applied research fields by pass
Note.
The application study report in relation to photonic crystal sensors is more and more in the world at present, and involved photon is brilliant
The functional type of body sensor mainly has biochemical sensor (document 1, Di Falco, A., L.O ' Faolain, and
T.F.Krauss.Chemical sensing in slotted photonic crystal heterostructure
Cavities.Applied physics letters 94.6 (2009) 063503), pressure detecting sensor (document 2, Yang
Yi,Daquan Yang,Huiping Tian,and Yuefeng Ji.Photonic crystal stress sensor
with high sensitivity in double directions based on shoulder-coupled aslant
193 (2013) 149-154 of nanocavity, Sensors and Actuators A:Physical), humidity sensor (document
3, Shi, Jinjie, Vincent KS Hsiao, Thomas R.Walker, and Tony Jun Huang.Humidity
sensing based on nanoporous polymeric photonic crystals,Sensors and Actuators
B:Chemical 129, no.1 (2008) 391-396), index sensor (document 4, D.F Dorfner, T.H ü rlimann,
T.Zabel,L.H.Frandsen,G.Abstreiter,and J.J.Finley.Silicon photonic crystal
nanostructures for refractive index sensing,Applied Physics Letters,93,181103
(2008)), micro-displacement detecting sensor (document 5, Daquan Yang, Huiping Tian, and Yuefeng
Ji.Microdisplacement sensor based on high-Q nanocavity in slot photonic
Crystal, Optical Engineering, 50 (5), 054402, (2011)), temperature sensor (document 6, H.Lu,
M.P.Bernal.Integrated temperature sensor based on an enhanced pyroelectric
Photonic crystal.Optics express, 21 (14), 16311-16318 (2013)) etc..Above-mentioned achievable difference
The photonic crystal sensors basic principle of sensing function is all based on photonic crystal forbidden photon band (PBG, photonics band
Gap) the local effect to guided mode in forbidden band planar, coupled modes are carried out in photonic crystal plane.With light
Sub- crystal probe application study is goed deep into, performance parameter (quality factor Q value, sensitivity, the resolution of photonic crystal sensors
Rate, integrated level) all it is greatly improved.But at the same time, the type high-performance photonic crystal sensors are also faced with two
A key technology difficulty needs to solve: 1) complex structural designs, and actual fabrication is difficult: above-mentioned high-performance photonic crystal sensors knot
Structure model is all based on complicated photon crystal micro cavity structure, and the optimization design of sensing arrangement is relatively complicated, and
It is very high for micro-nano technology technology of preparing required precision, it is unfavorable for the actual fabrication of photonic crystal sensors;2) coupling calibration
Complexity, difficult using test: current research and application in relation to photonic crystal sensors part are all based on photonic crystal knot mostly
Structure realizes guide-lighting Local Characteristic of the light wave in structural plan, so that such photonic crystal sensors is tested in practical application
Middle needs carry out calibration coupling by two fiber coupling lens at senser element input and output both ends, cause in practical application
It is complicated for operation in test process, the problems such as calibration difficulties, coupling efficiency is not high.
Summary of the invention
In order to overcome above-mentioned difficulties, the present invention proposes a kind of completely new based on two-dimensional columns array photonic crystal and single mode optical fiber
The compound index sensor of the High-performance micro-nano of integrated morphology.Present invention firstly provides a kind of completely new two-dimensional columns array is perfect
Photon crystal structure (Pillar-array PhC), the method promise resonance principle based on photonic crystal optimize two-dimensional columns array photon
Two-dimensional columns array photon crystal structure is adhered to mode transmission single mode optical fiber cross using micro-nano panning techniques by the structural parameters of crystal
On section.The present invention utilizes structure simple two by combining two-dimensional columns array photonic crystal with mode transmission single mode optical fiber
Dimension column array perfection photon crystal structure realizes the design of high q-factor and highly sensitive photonic crystal integrated sensor and answers
With, it is not only easy to operate, but also the requirement in practical application test process to calibration accuracy is greatly reduced, it can effectively mention
High coupling efficiency.
The present invention provides a kind of index sensor based on two-dimensional columns array photonic crystal Yu single mode optical fiber integrated morphology,
Including tunable optical source, three port circulators, photodetector, mode transmission single mode optical fiber and two-dimensional columns array photonic crystal.Wherein
The specification of mode transmission single mode optical fiber are as follows: 8~10 μm of fibre core, covering is 125 μm.The two-dimensional columns array photonic crystal can be
Pass through electron beam lithography (Electro beam lithography) and reactive ion etching on semiconductor material substrate (SOI)
The production such as (Refractive ion etching) manufacturing technologies.
In the two-dimensional columns array photonic crystal, background media is air, and dielectric posts are silicon.
In the two-dimensional columns array photonic crystal, using the photonic crystal pillar array structure of triangular crystal lattice, lattice constant
For a=870nm, the radius of dielectric posts is r=174nm, and the height of dielectric posts is h=1.12 μm.
The refractive index of the dielectric posts silicon is 3.42, and the refractive index of background media air is 1.00.
Advantages and beneficial effects of the present invention are:
1. the present invention is small in size with photonic crystal compared with traditional integrated device, low, low in energy consumption, light field local is lost
The advantages that property is good.
2. structure of the invention is compact to design, and actual fabrication is simple compared with similar photonic crystal integrated device, similar high property
Energy photonic crystal sensors structural model is all based on complicated photon crystal micro cavity structure, and the optimization of sensor structure is set
Count it is relatively complicated, and for wiener process the very high reality for being unfavorable for photonic crystal sensors of technology of preparing required precision
Border production.
3. present invention coupling calibration and application test are simple.Current research and application in relation to photonic crystal sensors part,
It is all based on what photon crystal structure realized guide-lighting Local Characteristic of the light wave in structural plan mostly, so that such photon is brilliant
Body sensor needs to carry out at senser element input and output both ends by two fiber coupling lens in practical application test
Calibration coupling, cause it is complicated for operation in practical application test process, the problems such as calibration difficulties, coupling efficiency is low.
Detailed description of the invention
Fig. 1 is that the structural model of the index sensor of two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology is illustrated
Figure.
Fig. 2 is two-dimensional columns array photon crystal structure schematic diagram.
Fig. 3 is the transmission plot that the two-dimensional columns array photon crystal structure in the present invention obtains under air conditions.
Fig. 4 is the transmission spectrum that the two-dimensional columns array photon crystal structure in the present invention obtains under different background medias.
Fig. 5 is the wavelength of resonance peak and the graph of relation of background media.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and examples.
The present invention is based on photonic crystal Fano resonance principles, using plane wave expansion method (PWE), from 2 D photon crystal energy
Band structure and Modes In Diffused are started with, selective analysis be located at conduction mode (Guided mode) in band structure light cone region with
Radiation mode (Radiation mode) in photon crystal structure vertical direction) between coupled resonance phenomenon.When light wave passes through
When single mode optical fiber transmission is impinged perpendicularly in two-dimensional columns array photonic crystal plane, Three-dimensional Time Domain finite difference calculus (3D- is utilized
FDTD), further investigation 2 D photon crystal and optical fiber micro-nano integrated structure control ray machine reason and light field Local Characteristic and transmit,
The light-transfer characteristics such as reflection;And then its sensor mechanism for being adapted to different sensing functions is analyzed, on this basis, propose novel base
In the High-performance micro-nano sensor design of 2 D photon crystal and optical fiber micro-nano integrated structure.It is emulated, is simulated by software numerical value
Actually detected environment carries out numerical analysis to the sensing capabilities of New Two Dimensional photonic crystal and optical fiber micro-nano integrated structure sensor
It is verified with assessment, and further completes optimization design, finally obtain 2 D photon crystal and light compact-sized, that perceptual performance is high
Fine micro-nano integrated structure sensor.
Index sensor provided by the invention based on two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology
Structural model is as shown in Figure 1, the index sensor includes tunable optical source, three port circulators, photodetector, transmission
Type optical fiber and two-dimensional columns array photonic crystal.The tunable optical source, photodetector pass through the mode transmission optical fiber respectively
Two ports of three port circulators are connected, the mode transmission fiber end face of the third port connection of three port circulator adds
Work two-dimensional columns array photonic crystal forms sensing arrangement.Tunable optical source generates the light wave of a branch of particular range of wavelengths, passes through three
Port circulator is coupled with the optical fiber sensing structure of two-dimensional columns array photonic crystal, while three port circulator is another
Single port connects photodetector, can detecte reflected light wave by photodetector.The mode transmission optical fiber uses
Common mode transmission single mode optical fiber, the specification of optical fiber are as follows: 8~10 μm of fibre core, covering is 125 μm.2 D photon crystal column array
In, background media is air, and dielectric posts are silicon materials, and wherein the refractive index of silicon dielectric posts is nsi=3.42, background media air
Refractive index be nair=1.00.Using the photonic crystal pillar array structure of triangular crystal lattice, as shown in Fig. 2, slab construction is referred to as
The substrate of photonic crystal column array, with a thickness of t, the specially fibre core of mode transmission optical fiber in the present invention, the photonic crystal column
Array structure lattice constant is a=870nm, and the radius of dielectric posts is r=0.2a=174nm, and the height of dielectric posts is h=1.12
μm.Three structural parameters a, r, h of two-dimensional columns array photon crystal structure, when any one parameter changes, resonance wavelength
Peak value can all shift.Therefore two-dimensional columns array photonic crystal folding can be constituted by reasonably designing each structural parameters
Penetrate the basic structure of rate sensor.
The refractive index sensitivity (S) of the index sensor can indicate are as follows: S=Δ λ/Δ n, wherein Δ λ is resonance
The offset of wavelength peak;Δ n is the variable quantity of refractive index in sensing region.When refractive index changes in sensing region,
The resonance frequency of resonant cavity also shifts therewith, by measuring and analyzing the offset variation of resonance wavelength peak value in reflectance spectrum,
The sensitivity of the index sensor can be obtained.
The transmission plot that two-dimensional columns array photon crystal structure obtains under air conditions, as shown in figure 3, light wave is from Vertical Square
To photonic crystal pillar array structure is incident on, the wavelength of two resonance peaks is respectively 1300nm, and 1472nm is in resonance peak center wave
Reflection characteristic at long 1472nm is up to 1.4 × 10 close to 100%, Q value4, field figure shows photonic crystal column array to light field
Local Characteristic it is very good.When the refractive index of surrounding medium is respectively 1.0,1.1,1.2 and 1.3, its resonance peak is obtained
Variation be respectively from left to right four curves in Fig. 4, it can be seen that with the raising of refractive index, resonance peak will be to long wavelength
Mobile, central wavelength will also become larger.The central wavelength of resonance peak and the relationship of background media refractive index are given such as Fig. 5
Curve graph, it can be seen that in the wave-length coverage of 1470nm~1540nm, with the increase of refractive index, resonance peak central wavelength
Variation is linear change, and wavelength is to low frequency offset, it is possible to according to the variation of its resonance peak, to characterize environment where its
The refractive index of medium.
The present invention is using two-dimensional columns array photonic crystal and mode transmission optical fiber micro-nano integrated structure.In mode transmission single mode optical fiber
Two-dimensional columns array perfection photon crystal structure is introduced on the cross section of fibre core as core sensing element, so that light wave is being transmitted across
Only it need to can be done directly efficient coupling resonance transfer by common mode transmission single mode optical fiber transmission in journey, not need to add
Special fiber coupling lens improve coupling efficiency, reduce actual test application cost.It is excellent in optical fiber transmission property simultaneously
On the basis of gesture, the present invention can be further used for building and the remote real time monitoring of sensor network.
By the way that the tip (i.e. two-dimensional columns array photonic crystal part) of optical fiber to be immersed in solution to be detected, when to be detected
When the environment of solution changes, the effective refractive index of 2 D photon crystal part can change, and lead to the resonance peak in reflectance spectrum
It shifts, therefore the detection to analyte in airport may be implemented in the offset by observing resonance peak.
Index sensor based on two-dimensional columns array photonic crystal Yu single mode optical fiber integrated morphology of the invention, with two dimension
Column array perfection photonic crystal is as core sensing element, to realize the variation of the tested measurement of perception, completes specific sensing function
Energy.It being emulated by energy band diagram, field figure transmission spectrum and reflectance spectrum of the simulation software to the light wave, Q value is up to 1.36 ×
104, refractive index sensitivity size is 226nm/RIU, realizes High-performance micro-nano sensor.
Claims (3)
1. a kind of index sensor based on two-dimensional columns array photonic crystal Yu single mode optical fiber integrated morphology, it is characterised in that:
It is described including tunable optical source, three port circulators, photodetector, mode transmission single mode optical fiber and two-dimensional columns array photonic crystal
Tunable optical source, photodetector pass through two ports that the mode transmission single mode optical fiber connects three port circulators respectively,
The mode transmission single mode optical fiber end face of the third port connection of three port circulator processes two-dimensional columns array photonic crystal, shape
At sensing arrangement;Tunable optical source generates the light wave of a branch of particular range of wavelengths, passes through three port circulators and two-dimensional columns array
The optical fiber sensing structure of photonic crystal is coupled, while the another port of three port circulator connects photodetector, is led to
It crosses photodetector and detects reflected light wave, in the two-dimensional columns array photonic crystal, background media is air, medium
Column is silicon, and using the photonic crystal pillar array structure of triangular crystal lattice, lattice constant a=870nm, the radius of dielectric posts is r=
174nm, the height of dielectric posts are h=1.12 μm.
2. a kind of refractive index based on two-dimensional columns array photonic crystal Yu single mode optical fiber integrated morphology according to claim 1
Sensor, it is characterised in that: the specification of mode transmission single mode optical fiber are as follows: 8~10 μm of fibre core, covering is 125 μm.
3. a kind of refractive index based on two-dimensional columns array photonic crystal Yu single mode optical fiber integrated morphology according to claim 1
Sensor, it is characterised in that: the two-dimensional columns array photonic crystal on semiconductor material substrate by electron beam lithography and
The production of reactive ion etching manufacturing technology.
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