CN108288580A - Optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity - Google Patents
Optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract
The invention discloses a kind of optical biosensor preparation methods based on 1-D photon crystal coupled micro-cavity, include the following steps：S1, cleaning SOI samples；S2, SOI samples are placed on 2~5min of baking in the insulating box of 170~200 DEG C of temperature；S3, photoresist is coated on sample by the way of spin coating；S4, sample is placed on to 10~15min of baking in the insulating box of 170~200 DEG C of temperature；S5, electron beam exposure is carried out to sample, exposure figure is that 1-D photon crystal couples micro-ring resonant cavity configuration；S6, developed successively to the sample after exposure-processed, fixing operation；S7, operation is performed etching to sample using ICP；S8, it after being cleaned using Piranha solution to sample, is rinsed using DI water, then is cleaned using HF solution, finally DI water is used to rinse.The characteristics such as the optical biosensor that the preparation method of the present invention makes has high sensitivity, detection limit is small, is easily integrated, it is simple to equipment requirement, it is easy to implement in technique, it is suitble to mass production.
Description
Technical field
It is the invention belongs to optical bio field of sensing technologies, more particularly to a kind of based on 1-D photon crystal coupled micro-cavity
Optical biosensor preparation method.
Background technology
The biosensor being applied at present has electrochemica biological sensor, optical bio to pass for having its detection mechanism
Sensor, hot biosensor, semiconductor biosensor, conductance/impedance biosensor and acoustic wave biosensor etc..Its
In, there is optical biosensor lossless operation pattern, electromagnetism interference, high sensitivity, high speed signal to generate, read at a high speed
The advantages that rate, has boundless foreground, by more and more extensive concern.
SOI optical biosensors are the research hotspots of this field, from it is existing based on the optical biosensor of SOI come
It sees, use evanescent wave detection principle mostly, i.e. the change of the refractive index or concentration of surrounding medium can cause waveguide effectively to reflect
The change of rate, and the change of effective refractive index can lead to the movement of spectrum.The movement composed with photodetector detection light can obtain
Know the concentration or refractive index information of measured matter.The SOI biosensors haveing excellent performance in order to obtain, preparation method become outstanding
For key.
The experiment preparation of SOI optical biosensors mainly has two kinds of wet etching and dry etching.Wherein wet etching
It is to be blocked by mask plate, so that etchant solution is only performed etching to being exposed to outer sample part, be exactly based on this selectivity
Etching, ultimately forms required sensor structure.During wet etching, due to be etched sample and etching solution
Reaction is influenced by factors so that etching process is not easy to control, and the width of lateral etching is all close to vertical etch
Depth.Therefore, pattern etching fidelity is undesirable, and the minimum feature of etched features is difficult to control.For dry etching,
Most common method is plasma etching (Plasma Etching).Compared to wet etching, this method etch rate is inclined
It is low, but good control can be reached to etching process.In addition, for the side wall of optical waveguide, vertical extent can obtain one
Determine the improvement of degree.
Therefore, how with excellent technique the high-performance biology that a kind of high sensitivity, detection limit is small, is easily integrated is prepared
Sensor becomes new research direction.
Invention content
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of based on 1-D photon crystal coupled micro-cavity
Optical biosensor preparation method removes attachment, oxide and the organic matter on the surfaces SOI by cleaning first and dries,
Then it coating photoresist and is dried on preliminary drying treated sample by the way of spin coating, then carries out 1-D photon crystal coupling
The electron beam exposure simultaneously aobvious fixing for closing microcavity, performs etching and cleans to sample finally by ICP, obtain a kind of high sensitivity,
Detection limit is small, is easily integrated.
The purpose of the present invention is achieved through the following technical solutions：Optics based on 1-D photon crystal coupled micro-cavity
Biosensor preparation method, includes the following steps：
SOI samples are cleaned in S1, pretreatment；
S2, preliminary drying, by by pretreated SOI samples be placed in the insulating box of 170~200 DEG C of temperature dry 2~
5min is cooled to room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；
Sample after gluing is placed on 10~15min of baking in the insulating box of 170~200 DEG C of temperature by S4, rear baking, then
It is cooled to room temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
Annular resonant cavity structure；
S6, development, fixing develop successively to the sample after exposure-processed, fixing operation, then are carried out with IPA solution
Cleaning；
S7, etching, using ICP (Inductively Coupled Plasma inductively coupled plasmas) to developing fixing
Treated, and sample performs etching operation；
Then S8, post-processing are rinsed after first using the cleaning of Piranha solution to the sample after etching processing using DI water,
It is cleaned again using HF solution, finally DI water is used to rinse.
Further, the step S1 specifically includes following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, it is laggard using 5~10min of ultrasonic cleaning
Row is dried, and is to remove the attachment on the surfaces SOI using acetone soln and ultrasonic cleaning；
S12, it will be rushed with DI water through step S11 treated SOI samples are put into Piranha solution 10~15min of cleaning
It washes, processing is dried；The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio mixing and
At being to remove the organic matter for removing SOI surfaces using Piranha solution；
S13, will be through step S12 treated SOI samples are put into HF solution 15~20s of cleaning, the oxygen on the surfaces removal SOI
Compound is dried after being rinsed with DI water；
Further, it is to be dried using nitrogen to be dried in described step S11, S12, S13.
Further, the step S3 concrete methods of realizing is：First 4~6s of spin coating under the rotating speed of 1000~1500rpm,
Then 1~1.5min of spin coating under the rotating speed of 2000~3000rpm uses nitrogen pressure-vaccum SOI samples during spin coating.
The photoresist is positive electronic beam resist ZEP520A.
Further, concrete methods of realizing is in the step S6：Sample after exposure is developed in ZED-N50 solvents
Then 1~1.5min is fixed with MIBK, fixing time is 30~60s.
Further, etching depth is 200~300nm in the step S7, and the etching gas used is SF6/C4F8。
Further, in the step S8,10~15min is cleaned using Piranha solution, is cleaned using HF solution
15~20s.
The beneficial effects of the invention are as follows：The present invention removes the attachment on SOI surfaces, oxide and organic by cleaning first
Object is simultaneously dried, and then coating photoresist and is dried on preliminary drying treated sample by the way of spin coating, then carry out one-dimensional light
The electron beam exposure of sub- crystal coupled micro-cavity and aobvious fixing, perform etching and clean to sample finally by ICP, obtain one kind
Based on the optical biosensor of 1-D photon crystal coupled micro-cavity, the optical bio of preparation method making using the present invention
The characteristics such as sensor has high sensitivity, detection limit is small, is easily integrated, contribute to the sensing of improving optical biosensor
Performance.The preparation method of the present invention is simple to equipment requirement, easy to implement in technique, can reduce and make optical bio sensing
The cost of manufacture of device is suitble to mass production.
Description of the drawings
Fig. 1 is the flow of the optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity of the present invention
Figure；
Fig. 2 is the SOI sample structure schematic diagrames that the present invention uses；
Fig. 3 is the optical biosensor structural schematic diagram one based on 1-D photon crystal coupled micro-cavity of the present invention；
Fig. 4 is the optical biosensor structural schematic diagram two based on 1-D photon crystal coupled micro-cavity of the present invention；
Reference sign：21, silicon base；22, silicon oxide layer；23, silicon ducting layer；31, input and output straight wave guide； 32、
Straight wave guide output；33, Coupling point；34, micro-ring resonant cavity；401~402,433~434, uniform circular hole；403~432, non-equal
Nicely rounded hole.
Specific implementation mode
The technical solution further illustrated the present invention below in conjunction with the accompanying drawings.
As shown in Figure 1, the optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, including following step
Suddenly：
SOI samples are cleaned in S1, pretreatment；
S2, preliminary drying, by by pretreated SOI samples be placed in the insulating box of 170~200 DEG C of temperature dry 2~
5min is cooled to room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；
Sample after gluing is placed on 10~15min of baking in the insulating box of 170~200 DEG C of temperature by S4, rear baking, then
It is cooled to room temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
Annular resonant cavity structure；
S6, development, fixing develop successively to the sample after exposure-processed, fixing operation, then are carried out with IPA solution
Cleaning；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation；
Then S8, post-processing are rinsed after first using the cleaning of Piranha solution to the sample after etching processing using DI water,
It is cleaned again using HF solution, finally DI water is used to rinse.
As shown in Fig. 2, the SOI samples that the present invention uses are by lower layer's silicon base 21, intermediate silicon oxide layer 22 and upper layer of silicon wave
Conducting shell 23 is constituted.
As shown in figure 3, for the optical biosensor based on 1-D photon crystal coupled micro-cavity prepared using the present invention,
Including an input and output straight wave guide 31, straight wave guide output 32 and a silicon-based micro ring resonator 34.Input and output straight wave guide
31, straight wave guide output 32 is coupled with micro-ring resonant cavity 34 constitutes 1-D photon crystal coupled micro-cavity.On input and output straight wave guide 31
It is etched with several non-homogeneous circular holes and several uniform circular holes.Non-homogeneous circular hole region and uniform circular hole region are defeated about inputting
The Coupling point 33 for going out straight wave guide 31 and silicon-based micro ring resonator is centrosymmetric distribution.The number of non-homogeneous circular hole is 2N, and N is
15。
As shown in figure 4, the non-homogeneous circular hole on input and output straight wave guide 31 includes 403~432 non-homogeneous circular holes constituted
Region and the uniform circular hole area of 401~402,433~434 compositions.The number of non-homogeneous circular hole is 30.Uniform circular hole
Number is 4, and 2 are distributed per side.The radius of non-homogeneous circular hole 417,418 is r1, 416,419 radius is r2, 415,
420 radius is r3, 414,421 radius is r4, 413,422 radius is r5, 412,423 radius is r6, 411,424
Radius is r7, 410,425 radius is r8, 409,426 radius is r9, 408,427 radius is r10, 407,428 radius
For r11, 406,429 radius is r12, 405,430 radius is r13, 404,431 radius is r14, non-homogeneous circular hole 403,
432 radius is r15；The r1＞ r2＞ ... ＞ r15,(i=1,2 ..., 15).And r1=
0.1025um, r15=0.0725um.The radius of uniform circular hole 401~402,433~434 is r16=0.0725um, described one
Cycle T=0.325um of dimensional photonic crystal.
Technical scheme of the present invention is further detailed below by way of specific embodiment, further to show this hair
Bright operating process and advantage.
Embodiment 1
A kind of optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, includes the following steps：
SOI samples are cleaned in S1, pretreatment；Specifically include following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, using after ultrasonic cleaning 5min use nitrogen
Processing is dried in gas, is to remove the attachment on the surfaces SOI using acetone soln and ultrasonic cleaning；
S12, will through step S11, treated that SOI samples are put into Piranha solution cleans 10min, rinsed with DI water,
Processing is dried using nitrogen；The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio
It mixes, is to remove the organic matter for removing the surfaces SOI using Piranha solution；
S13, will through step S12, treated that SOI samples are put into HF solution cleans 15s, the oxidation on the surfaces removal SOI
Processing is dried using nitrogen after being rinsed with DI water in object；
S2, preliminary drying dry 2min by being placed in the insulating box of 180 DEG C of temperature by pretreated SOI samples, then cool down
To room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；Concrete methods of realizing is：
The first spin coating 5s under the rotating speed of 1500rpm, then the spin coating 1.5min under the rotating speed of 3000rpm, uses during spin coating
Nitrogen pressure-vaccum SOI samples, the thickness of the gluing of acquisition areThe photoresist is positive electronic beam resist ZEP520A.
S4, rear baking, the sample after gluing is placed on and dries 10min in the insulating box of 180 DEG C of temperature, is cooled to room
Temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
The duct width of annular resonant cavity structure, the structure is 500nm；
S6, development, fixing develop the sample after exposure-processed 1min in ZED-N50 solvents, then use MIBK into
Row fixing, fixing time 30s, then cleaned with IPA solution；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation, and etching depth 220nm makes
Etching gas is SF6/C4F8；
S8, post-processing are first used Piranha solution to clean 10min in the sample after etching processing, are then rushed using DI water
It washes, then 15s is cleaned using HF solution, finally DI water is used to rinse.
Embodiment 2
A kind of optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, includes the following steps：
SOI samples are cleaned in S1, pretreatment；Specifically include following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, using after ultrasonic cleaning 8min use nitrogen
Processing is dried in gas, is to remove the attachment on the surfaces SOI using acetone soln and ultrasonic cleaning；
S12, will through step S11, treated that SOI samples are put into Piranha solution cleans 12min, rinsed with DI water,
Processing is dried using nitrogen；The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio
It mixes, is to remove the organic matter for removing the surfaces SOI using Piranha solution；
S13, will through step S12, treated that SOI samples are put into HF solution cleans 18s, the oxidation on the surfaces removal SOI
Processing is dried using nitrogen after being rinsed with DI water in object；
S2, preliminary drying dry 3min by being placed in the insulating box of 180 DEG C of temperature by pretreated SOI samples, then cool down
To room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；Concrete methods of realizing is：
The first spin coating 5s under the rotating speed of 1500rpm, then the spin coating 1.5min under the rotating speed of 2500rpm, uses during spin coating
Nitrogen pressure-vaccum SOI samples, the thickness of the gluing of acquisition areThe photoresist is positive electronic beam resist ZEP520A.
S4, rear baking, the sample after gluing is placed on and dries 15min in the insulating box of 180 DEG C of temperature, is cooled to room
Temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
The duct width of annular resonant cavity structure, the structure is 500nm；
Sample after exposure-processed is developed 1.2min in ZED-N50 solvents, then uses MIBK by S6, development, fixing
It is fixed, fixing time 45s, then cleaned with IPA solution；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation, and etching depth 250nm makes
Etching gas is SF6/C4F8；
S8, post-processing are first used Piranha solution to clean 12min in the sample after etching processing, are then rushed using DI water
It washes, then 18s is cleaned using HF solution, finally DI water is used to rinse.
Embodiment 3
A kind of optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, includes the following steps：
SOI samples are cleaned in S1, pretreatment；Specifically include following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, using after ultrasonic cleaning 10min use nitrogen
Processing is dried in gas, is to remove the attachment on the surfaces SOI using acetone soln and ultrasonic cleaning；
S12, will through step S11, treated that SOI samples are put into Piranha solution cleans 15min, rinsed with DI water,
Processing is dried using nitrogen；The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio
It mixes, is to remove the organic matter for removing the surfaces SOI using Piranha solution；
S13, will through step S12, treated that SOI samples are put into HF solution cleans 20s, the oxidation on the surfaces removal SOI
Processing is dried using nitrogen after being rinsed with DI water in object；
S2, preliminary drying dry 5min by being placed in the insulating box of 180 DEG C of temperature by pretreated SOI samples, then cool down
To room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；Concrete methods of realizing is：
The first spin coating 5s under the rotating speed of 1500rpm, then the spin coating 1.5min under the rotating speed of 2000rpm, uses during spin coating
Nitrogen pressure-vaccum SOI samples, the thickness of the gluing of acquisition areThe photoresist is positive electronic beam resist ZEP520A.
S4, rear baking, the sample after gluing is placed on and dries 12min in the insulating box of 180 DEG C of temperature, is cooled to room
Temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
The duct width of annular resonant cavity structure, the structure is 500nm；
Sample after exposure-processed is developed 1.5min in ZED-N50 solvents, then uses MIBK by S6, development, fixing
It is fixed, fixing time 60s, then cleaned with IPA solution；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation, and etching depth 200nm makes
Etching gas is SF6/C4F8；
S8, post-processing are first used Piranha solution to clean 15min in the sample after etching processing, are then rushed using DI water
It washes, then 20s is cleaned using HF solution, finally DI water is used to rinse.
Embodiment 4
A kind of optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, includes the following steps：
SOI samples are cleaned in S1, pretreatment；Specifically include following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, using after ultrasonic cleaning 7min use nitrogen
Processing is dried in gas, is to remove the attachment on the surfaces SOI using acetone soln and ultrasonic cleaning；
S12, will through step S11, treated that SOI samples are put into Piranha solution cleans 13min, rinsed with DI water,
Processing is dried using nitrogen；The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio
It mixes, is to remove the organic matter for removing the surfaces SOI using Piranha solution；
S13, will through step S12, treated that SOI samples are put into HF solution cleans 17s, the oxidation on the surfaces removal SOI
Processing is dried using nitrogen after being rinsed with DI water in object；
S2, preliminary drying dry 5min by being placed in the insulating box of 170 DEG C of temperature by pretreated SOI samples, then cool down
To room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；Concrete methods of realizing is：
The first spin coating 6s under the rotating speed of 1000rpm, then the spin coating 1.5min under the rotating speed of 2000rpm, uses during spin coating
Nitrogen pressure-vaccum SOI samples, the photoresist are positive electronic beam resist ZEP520A.
S4, rear baking, the sample after gluing is placed on and dries 15min in the insulating box of 170 DEG C of temperature, is cooled to room
Temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
The duct width of annular resonant cavity structure, the structure is 500nm；
Sample after exposure-processed is developed 1.3min in ZED-N50 solvents, then uses MIBK by S6, development, fixing
It is fixed, fixing time 50s, then cleaned with IPA solution；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation, and etching depth 300nm makes
Etching gas is SF6/C4F8；
S8, post-processing are first used Piranha solution to clean 13min in the sample after etching processing, are then rushed using DI water
It washes, then 17s is cleaned using HF solution, finally DI water is used to rinse.
Embodiment 5
A kind of optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, includes the following steps：
SOI samples are cleaned in S1, pretreatment；Specifically include following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, using after ultrasonic cleaning 5min use nitrogen
Processing is dried in gas, is to remove the attachment on the surfaces SOI using acetone soln and ultrasonic cleaning；
S12, will through step S11, treated that SOI samples are put into Piranha solution cleans 10min, rinsed with DI water,
Processing is dried using nitrogen；The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio
It mixes, is to remove the organic matter for removing the surfaces SOI using Piranha solution；
S13, will through step S12, treated that SOI samples are put into HF solution cleans 15s, the oxidation on the surfaces removal SOI
Processing is dried using nitrogen after being rinsed with DI water in object；
S2, preliminary drying dry 2min by being placed in the insulating box of 200 DEG C of temperature by pretreated SOI samples, then cool down
To room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；Concrete methods of realizing is：
The first spin coating 4s under the rotating speed of 1200rpm, then the spin coating 1.5min under the rotating speed of 3000rpm, uses during spin coating
Nitrogen pressure-vaccum SOI samples, the photoresist are positive electronic beam resist ZEP520A.
S4, rear baking, the sample after gluing is placed on and dries 10min in the insulating box of 200 DEG C of temperature, is cooled to room
Temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is micro- that exposure figure is that 1-D photon crystal couples
The duct width of annular resonant cavity structure, the structure is 500nm；
S6, development, fixing develop the sample after exposure-processed 1min in ZED-N50 solvents, then use MIBK into
Row fixing, fixing time 30s, then cleaned with IPA solution；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation, and etching depth 270nm makes
Etching gas is SF6/C4F8；
S8, post-processing are first used Piranha solution to clean 10min in the sample after etching processing, are then rushed using DI water
It washes, then 15s is cleaned using HF solution, finally DI water is used to rinse.
Those of ordinary skill in the art will understand that the embodiments described herein, which is to help reader, understands this hair
Bright principle, it should be understood that protection scope of the present invention is not limited to such specific embodiments and embodiments.This field
Those of ordinary skill can make according to the technical disclosures disclosed by the invention various does not depart from the other each of essence of the invention
The specific variations and combinations of kind, these variations and combinations are still within the scope of the present invention.
Claims (10)
1. the optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity, it is characterised in that：Including following step
Suddenly：
SOI samples are cleaned in S1, pretreatment；
S2, preliminary drying will be placed on 2~5min of baking in the insulating box of 170~200 DEG C of temperature by pretreated SOI samples, then
It is cooled to room temperature；
S3, gluing coat photoresist by the way of spin coating on preliminary drying treated sample；
Sample after gluing is placed on 10~15min of baking in the insulating box of 170~200 DEG C of temperature, then cooled down by S4, rear baking
To room temperature；
S5, exposure dry treated sample and carry out electron beam exposure to rear, and it is humorous that exposure figure is that 1-D photon crystal couples micro-loop
Resonator structure；
S6, development, fixing develop successively to the sample after exposure-processed, fixing operation, then are cleaned with IPA solution；
S7, etching, using ICP, to developing fixing, treated that sample performs etching operation；
Then S8, post-processing are rinsed, then adopt after first using the cleaning of Piranha solution to the sample after etching processing using DI water
It is cleaned with HF solution, finally DI water is used to rinse.
2. the optical biosensor preparation method according to claim 1 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：The SOI samples are made of lower layer's silicon base, intermediate silicon oxide layer and upper layer of silicon ducting layer.
3. the optical biosensor preparation method according to claim 1 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：The step S1 specifically includes following sub-step：
S11, will be blown over nitrogen after SOI samples be put into acetone soln, using 5~10min of ultrasonic cleaning, remove SOI
Then processing is dried in the attachment on surface；
S12, the surfaces SOI will be removed through step S11 treated SOI samples are put into Piranha solution 10~15min of cleaning
Organic matter, then use DI water rinse, processing is dried；
S13, will be through step S12 treated SOI samples are put into 15~20s of cleaning, the oxidations on the surfaces removal SOI in HF solution
Object is dried after being rinsed with DI water；
4. the optical biosensor preparation method according to claim 3 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：The Piranha solution is under the conditions of 150 DEG C, by H2SO4With H2O2By 3：1 ratio mixes.
5. the optical biosensor preparation method according to claim 3 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：It is to be dried using nitrogen to be dried in described step S11, S12, S13.
6. the optical biosensor preparation method according to claim 1 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：The step S3 concrete methods of realizing is：First 4~6s of spin coating under the rotating speed of 1000~1500rpm, then exists
1~1.5min of spin coating under the rotating speed of 2000~3000rpm uses nitrogen pressure-vaccum SOI samples during spin coating.
7. the optical biosensor preparation method based on 1-D photon crystal coupled micro-cavity according to claim 1 or 6,
It is characterized in that：The photoresist is positive electronic beam resist ZEP520A.
8. the optical biosensor preparation method according to claim 1 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：Concrete methods of realizing is in the step S6：Sample after exposure develops in ZED-N50 solvents to 1~
Then 1.5min is fixed with MIBK, fixing time is 30~60s.
9. the optical biosensor preparation method according to claim 1 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：Etching depth is 200~300nm in the step S7, and the etching gas used is SF6/C4F8。
10. the optical biosensor preparation method according to claim 1 based on 1-D photon crystal coupled micro-cavity,
It is characterized in that：In the step S8,10~15min is cleaned using Piranha solution, 15~20s of cleaning is carried out using HF solution.
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| CN101339900A (en) * | 2007-07-02 | 2009-01-07 | 旺宏电子股份有限公司 | Method for surface modification of semiconductor layer and method of manufacturing semiconductor device |
| CN103645158A (en) * | 2013-12-05 | 2014-03-19 | 中国电子科技集团公司第三十八研究所 | Three-ring-shaped athermalized biosensor |
| US9359513B1 (en) * | 2010-05-07 | 2016-06-07 | Thin Film Electronics Asa | Dopant inks, methods of making dopant inks, and methods of using dopant inks |
| CN105954234A (en) * | 2016-04-28 | 2016-09-21 | 北京邮电大学 | Nano beam waveguide filter and micro cavity cascaded structure-based one-dimensional photonic crystal integrated sensor |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101339900A (en) * | 2007-07-02 | 2009-01-07 | 旺宏电子股份有限公司 | Method for surface modification of semiconductor layer and method of manufacturing semiconductor device |
| US9359513B1 (en) * | 2010-05-07 | 2016-06-07 | Thin Film Electronics Asa | Dopant inks, methods of making dopant inks, and methods of using dopant inks |
| CN103645158A (en) * | 2013-12-05 | 2014-03-19 | 中国电子科技集团公司第三十八研究所 | Three-ring-shaped athermalized biosensor |
| CN105954234A (en) * | 2016-04-28 | 2016-09-21 | 北京邮电大学 | Nano beam waveguide filter and micro cavity cascaded structure-based one-dimensional photonic crystal integrated sensor |
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