CN103605189B - A kind of surface Plasmon optical waveguide filter - Google Patents
A kind of surface Plasmon optical waveguide filter Download PDFInfo
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- CN103605189B CN103605189B CN201310662001.8A CN201310662001A CN103605189B CN 103605189 B CN103605189 B CN 103605189B CN 201310662001 A CN201310662001 A CN 201310662001A CN 103605189 B CN103605189 B CN 103605189B
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- resonant cavity
- surface plasmon
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Abstract
The present invention relates to optical filter part, more particularly, to a kind of surface Plasmon optical waveguide filter.It includes metal waveguide, is provided with for the incident and passage of reflection light turnover and is filled with electrolyte in producing the resonant cavity of resonance wavelength, passage and resonant cavity, be provided with the metal gap for hindering light wave to pass in and out between passage and resonant cavity in metal waveguide.The present invention is to construct the wave filter of a sub-wavelength on metal waveguide, its simple in construction, and size is little, the most hundreds of nanometer, it is easy to highdensity light is integrated, and its high performance narrow-band filtering contributes to development and Application in the photoswitch of optic communication.And, the wavelength of present invention filtering can be regulated by the electrolyte of the physical dimension of resonant cavity or intracavity different refractivity, that is by manufacturing the device of different geometrical size or filling the electrolyte of different refractivity on device and just can realize the filtering to any wavelength, the range of application of device is substantially increased.
Description
Technical field
The present invention relates to optical filter part, more particularly, to a kind of surface Plasmon optical waveguide filter.
Background technology
The size on the integrated line of electronics (returning) road (IC) subtracted rapidly according to the speed desired by Moore's Law in recent years
Few, its unit component has achieved the breakthrough of tens nanometer magnitude yardstick at laboratory.Due to intrinsic by electronics
The physical restriction such as charge, bandwidth, heat consumption and thermoelectricity crosstalk, the size of electronics IC almost arrives with integrated level
Its theoretical boundary thus be difficult to break through further.In contrast to this, photonic integrated circuit is the most complete
Do not restricted by these factors, and be there is high bandwidth incomparable for electronics IC and response speed, high anti-
The excellent properties such as immunity.But as the fiber waveguide of basic component, the size of photonic integrated circuit unit component
Typically at the range scale of tens of to thousands of wavelength, its lateral dimension be the most still limited in optical wavelength magnitude and
Its potentiality can not be played.In order to break through this wavelength limit, reduce the size of photonic integrated circuit significantly,
Develop integrated level is higher, with better function and power consumption is lower photonic integrated circuit or Planar integration optical device, research
Personnel propose principle and the skills such as high index-contrast Medium Wave Guide (such as SOI silicon slider) and photonic crystal in succession
Art.But, high-index contrast formed traditional sucrose waveguide due in principle still by optical diffraction limit
Limit, the constraint of light wave mode is limited in the optical wavelength magnitude of medium.Although utilizing photonic crystal defect state
The waveguiding effect formed can realize the light constraint ability more higher than traditional sucrose waveguide, but this structure needs
To the photonic crystal of a few periods length, optical interference cancellation could be formed forbidden band restriction effect, i.e. photonic crystal
The most still could not break away from the restriction of physioptial wavelength limit, cause photon crystal device laterally and to be indulged at it
Sub-wavelength or nanometer scale it is unable to reach to direction.Owing to its parallel waveguides isolation spacing must be more than wavelength with really
Protecting the most not coupling crosstalk, integrated level is difficult to be greatly improved.So, this two quasi-optical wave is led and the most still could not be broken away from
Physioptial wavelength limit restricts.Therefore, how to design and make break through diffraction limit various high integration,
High efficiency optic communication device, as wavelength selects and other optical device etc., is to realize nano photoelectric and full light is integrated
Success or failure key point, be also a big study hotspot in the nanocomposite optical field developed rapidly at present.
The main path solving the problems referred to above is the self-characteristic utilizing surface plasma.Surface plasma swashs
Unit (Surface Plasmon Polaritons, SPPs) is the local a kind of free electron in metal surface and photon phase
The mixed activation state that interaction is formed.One of outstanding feature of SPPs metal waveguide has exactly by electromagnetism field energy
Amount is gathered in the ability of nanoscale scope, has the penetration depth of extremely short (nanoscale), break in metal
Limiting it is considered to be the carrier of most promising nano-integrated optics device of optics wavelength limit, and table
Surface plasma excimer not only has the yardstick of electronics but also has the speed of photonic propulsion, at nano-integrated optics and device
Part aspect has great application potential, metal structure fiber waveguide device the most thus to occupy aobvious at nano-photon device
Write position.SPPs studies in nano metal array of orifices structure transmission enhancing, nanocomposite optical imaging, nanometer
Other field such as photoetching and highly sensitive biochemical sensitive obtains breathtaking result, but at light wave transmissions, light letter
The progress that breath process especially has the aspects such as the nano photoelectronic devices of controllable function is extremely limited, far from full
The application requirement of high function nano integrated opto-electronic device is developed and developed to foot.Visible, carry out relevant surface etc. from
Nanometer (class) metal-dielectric of daughter excimer-(class) metal integrated optical wave guide device research, particularly nanometer
High efficiency wavelength selects, either for the surface plasma of deep understanding nanometer (class) metal-dielectric micro structure
Rule, promotion nanometer wave leaded light theory and the nanophotonics that body excimer excites and interacts with photon
The development of section, for breaking through the passive nonadjustable restriction of the most existing SPPs components and parts at present, developing and receive
The optic communication key function devices such as the novel optical filter of rice, for promoting nanometer fixing and tunable filter, wavelength
The development of the nanometer SPPs photoelectric device of other wavelength-modulated such as routing switch, or for design novel nano
Optical waveguide structure, development nanometer Planar integration opto-electronic device of future generation, all have facilitation.
Summary of the invention
The present invention is to overcome at least one defect (not enough) described in above-mentioned prior art, it is provided that a kind of size is little,
It is prone to the surface Plasmon optical waveguide filter that high density light is integrated.
For solving above-mentioned technical problem, technical scheme is as follows:
A kind of surface Plasmon optical waveguide filter, including metal waveguide, is provided with for entering in metal waveguide
Penetrate and reflect the passage of light turnover and be filled with in producing the resonant cavity of resonance wavelength, passage and resonant cavity
Electrolyte, is provided with the metal gap for hindering light wave to pass in and out between passage and resonant cavity.
Outside broadband incident light wave is coupled into the passage of the present invention, and electricity Jie in the channel by bonder
Matter forms surface plasma-wave with the metallic interface in metal waveguide, and plasma wave is along channel transfer, part
Light wave enters resonant cavity through metal gap.In resonant cavity, due to the high reflection of metal in metal waveguide,
Light wave at intracavity roundtrip, meets the light wave of resonant wavelength and forms standing wave at intracavity, and the light wave of its commplementary wave length
Through metal gap, come back to passage, and by another bonder, light wave is coupled out, finally realize
Narrow-band filtering function.
In a kind of preferred version, described electrolyte is air.Use air as electrolyte, acquisition methods letter
Just, cost of manufacture is low for folk prescription.
In another kind of preferred version, described metal waveguide is Ag films.
In another kind of preferred version, described resonant cavity is rectangular cavity.
In another kind of preferred version, the duct width of passage is 30 to 70nm.
In further scheme, the duct width of passage is 50nm.
In another kind of preferred version, metal gap is silver structure.
In further scheme, the width of metal gap is 10-50nm.
In another kind of preferred version, a length of 360-500nm of resonant cavity, width is 40-100nm.
In another kind of preferred version, described passage and resonant cavity are tied by focused ion bundle or beamwriter lithography
Close the nanofabrication techniques such as dry etching on metal waveguide, carve formation.
Compared with prior art, technical solution of the present invention provides the benefit that:
The present invention is to construct the wave filter of a sub-wavelength on metal waveguide, its simple in construction, and size is little,
The most hundreds of nanometer, it is easy to highdensity light is integrated, and its high performance narrow-band filtering contribute to development and Application in
The photoswitch of optic communication.And, the wavelength of present invention filtering can by the physical dimension of resonant cavity or intracavity not
Regulate with the electrolyte of refractive index, say, that by manufacturing the device of different geometrical size or on device
The electrolyte filling different refractivity just can realize the filtering to any wavelength, substantially increases the application of device
Scope.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure diagram of the present invention a kind of surface Plasmon optical waveguide filter specific embodiment.
Fig. 2 is the schematic top plan view of the present invention a kind of surface Plasmon optical waveguide filter specific embodiment.
Fig. 3 is the reflectance spectrum of a kind of example in the present invention a kind of surface Plasmon optical waveguide filter specific embodiment
Figure.
Detailed description of the invention
Accompanying drawing being merely cited for property explanation, it is impossible to be interpreted as the restriction to this patent；
In order to the present embodiment is more preferably described, some parts of accompanying drawing have omission, zoom in or out, and do not represent reality
The size of border product；
To those skilled in the art, in accompanying drawing, some known features and explanation thereof may be omitted is to manage
Solve.
In describing the invention, it is to be understood that term " first ", " second " are only used for describing purpose,
And it is not intended that indicate or imply relative importance or the quantity of implicit indicated technical characteristic.Thus, limit
The feature of fixed " first ", " second " can express or implicitly include one or more this feature.?
In description of the invention, except as otherwise noted, " multiple " are meant that two or more.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " peace
Dress ", " connection " should be interpreted broadly, for example, it may be fixing connection, it is also possible to be to removably connect, or
It is integrally connected；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be logical
Cross intermediary to be indirectly connected with, it may be said that the connection of two element internals.For those of ordinary skill in the art
For, the above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
With embodiment, technical scheme is described further below in conjunction with the accompanying drawings.
Embodiment 1
As illustrated in fig. 1 and 2, for the knot of the present invention a kind of surface Plasmon optical waveguide filter specific embodiment
Structure schematic diagram.See such as Fig. 1, a kind of surface Plasmon optical waveguide filter of this specific embodiment, including
Metal waveguide 1, is provided with for the incident and passage 2 of reflection light turnover with for producing in metal waveguide 1
Be filled with in the resonant cavity 3 of resonance wavelength, passage 2 and resonant cavity 3 electrolyte, passage 2 and resonant cavity 3 it
Between be provided with the metal gap 4 for hindering light wave to pass in and out.
Outside broadband incident light wave is coupled into the passage 2 of this specific embodiment by bonder, and at passage
Electrolyte in 2 forms surface plasma-wave with the metallic interface in metal waveguide 1, and plasma wave is along logical
Road 2 transmits, and part light wave enters resonant cavity 3 through metal gap 4.In resonant cavity 3, due to metal wave
Leading the high reflection of metal in 1, light wave, at intracavity roundtrip, meets the light wave of resonant wavelength in intracavity shape
Become standing wave, and the light wave of its commplementary wave length is through metal gap 4, comes back to passage 2, and by another coupling
Light wave is coupled out by clutch, finally achieves narrow-band filtering function.
In specific implementation process, described metal waveguide 1 can use Ag films to realize.Additionally, metal waveguide
1 can also use other metal mediums to realize, numerous to list herein.
In specific implementation process, electrolyte can directly use air.Air can be filled into automatically, conveniently obtains
Access method is simple and convenient, and cost of manufacture is low.Additionally, electrolyte can also be that other are with regard to dielectric, Er Qietong
Electrolyte in road and resonant cavity can be the same or different.
In specific implementation process, resonant cavity 3 can be existed by the method for beamwriter lithography or focused ion bundle
On metal waveguide, engraving is formed.Usually, resonant cavity 3 uses rectangular cavity structure.Its length is typically designed as
360-500nm, width is 40-100nm, it is preferable that its a length of 380nm, and width is 60nm.
In specific implementation process, passage 2 can be by the method for beamwriter lithography or focused ion bundle at gold
Belong to engraving in waveguide to be formed.Its duct width is 30 to 70nm.Preferably, the duct width of passage is 50nm.
In specific implementation process, being provided in of metal gap 4 forms a reflecting mirror, and it can be silver knot
Structure.Its width is typically designed as 10-50nm, it is therefore preferable to 20nm.
As it is shown on figure 3, be a length of 380nm in the chamber of resonant cavity 3 in this specific embodiment, a width of 60nm in chamber,
The a width of 20nm of metal gap, reflection spectrogram during a width of 50nm of passage.
Light wave can only penetrate into inside metal with evanescent waves form, and therefore at electrolyte (such as air) and metal
Interface is reflected back the most completely.The wave filter of this specific embodiment proposes have two high reflecting metal end faces
Short waveguides sections, for construct have support standing wave resonant cavity 3.As it is shown in figure 1, electrolyte supposes
For the refractive index air equal to 1.Covered by argent around metal waveguide 1.When incident light wave is from metal waveguide
The left side of 1 along straight wave guide transmit time, part light wave can enter in resonant cavity 3.Inside resonant cavity 3,
The light wave of forward and backward is reflected the most completely at two air-silver interface of resonant cavity 3.And part light will
The straight wave guide on the left side can be entered.Obviously, this structure is a structure of resonant cavity, when nano level resonant cavity 3
In when meeting some suitable condition, standing wave just can be formed.DefinitionFor light each circle in resonant cavity 3
Phase delay, obtainWhereinHereWith
Be respectively light beam at the two ends of resonant cavity 3 because of the additional phase shift that causes of reflection, and L is the length of resonant cavity 3,Effective refractive index for waveguide.Based on resonant cavity principle, when resonance condition meetsPermissible
Setting up stable standing wave, positive integer m is the antinode number of plasma standing wave here.Based on Fa Poli resonant cavity
Optical theory and the effective refractive index of plasma mould, the resonant wavelength in chamber can be derived:
From formula, it is known that resonant wavelength λ m and length L and the effective refractive index of waveguideIt is directly proportional.
Because effective refractive index becomes the relation of class inverse ratio with the width of waveguide, so resonant wavelength also becomes with the width of waveguide
Class inverse relation.As a chamber, its effective refractive index is also relevant with the stiffness of coupling in chamber.Therefore effective refractive index
Having certain relation with the metal gap 4 in two waveguides, in like manner, resonant wavelength also has necessarily with metal gap 4
Relation.The direct method realizing any wavelength filtering is to select applicable length L.And waveguide
Width w dominates the effective refractive index of wave guide mode, therefore also contributes to resonant wavelength.So, can pass through
Choose the length of resonant cavity 3 and/or width goes to realize the narrow-band filtering function of required any wavelength.For
One resonant wavelength, its required minimum cavity is a length of
The wave filter of the present invention can reduce the frequency using local oscillation signal source, reduces the bit error rate, improves systematicness
The optical-fiber wireless transmission system of energy, size, in sub-wavelength rank, can apply to highly integrated nano-photon loop.
The corresponding same or analogous parts of same or analogous label；
Described in accompanying drawing, position relationship is used for the explanation of being merely cited for property, it is impossible to be interpreted as the limit to this patent
System；
Obviously, the above embodiment of the present invention is only for clearly demonstrating example of the present invention, and not
It it is the restriction to embodiments of the present invention.For those of ordinary skill in the field, in described above
On the basis of can also make other changes in different forms.Here without also cannot be to all of enforcement
Mode gives exhaustive.All any amendment, equivalent and improvement made within the spirit and principles in the present invention
Deng, within should be included in the protection domain of the claims in the present invention.
Claims (10)
1. a surface Plasmon optical waveguide filter, it is characterized in that, including metal waveguide, metal waveguide is provided with for the incident and passage of reflection light turnover with for producing the resonant cavity of resonance wavelength, be filled with electrolyte in passage and resonant cavity, be provided with between passage and resonant cavity formed a reflecting mirror for the metal gap hindering light wave to pass in and out.
Surface Plasmon optical waveguide filter the most according to claim 1, it is characterised in that described electrolyte is air.
Surface Plasmon optical waveguide filter the most according to claim 1, it is characterised in that described metal waveguide is Ag films.
Surface Plasmon optical waveguide filter the most according to claim 1, it is characterised in that described resonant cavity is rectangular cavity.
Surface Plasmon optical waveguide filter the most according to claim 1, it is characterised in that the duct width of passage is 30 to 70nm.
Surface Plasmon optical waveguide filter the most according to claim 5, it is characterised in that the duct width of passage is 50nm.
Surface Plasmon optical waveguide filter the most according to claim 1, it is characterised in that metal gap is silver structure.
Surface Plasmon optical waveguide filter the most according to claim 7, it is characterised in that the width of metal gap is 10-50nm.
Surface Plasmon optical waveguide filter the most according to claim 1, it is characterised in that a length of 360-500nm of resonant cavity, width is 40-100nm.
10. according to the surface Plasmon optical waveguide filter described in any one of claim 1 to 9, it is characterised in that described passage and resonant cavity combine the method for dry etching by focused ion bundle or beamwriter lithography and carve formation on metal waveguide.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108761650A (en) * | 2018-05-08 | 2018-11-06 | 桂林电子科技大学 | A kind of more transmission peaks plasma wave-filters coupling cavity configuration based on MIM waveguides |
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| EP3570101A1 (en) | 2014-01-10 | 2019-11-20 | King's College London | Device and method |
| CN104267455A (en) * | 2014-10-08 | 2015-01-07 | 江南大学 | Surface plasma filter based on connection bridge of rectangular ring resonant cavity and incident waveguide |
| CN109716177B (en) * | 2016-09-15 | 2024-01-30 | 麦格纳国际公司 | Super surface lens assembly for chromaticity separation |
| CN112909456A (en) * | 2019-12-04 | 2021-06-04 | 成都众志天成科技有限公司 | Substrate integrated waveguide filter based on artificial surface plasmon |
| CN112882144B (en) * | 2021-01-21 | 2021-11-30 | 北京理工大学 | Ultraviolet filtering structure based on nanoring patterned interface and design method thereof |
| CN112985478B (en) * | 2021-02-09 | 2022-04-26 | 中北大学 | High-temperature-resistant Fabry-Perot cavity sensing structure and system with micro-nano structure |
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| CN103296343B (en) * | 2012-03-01 | 2017-02-15 | 深圳光启创新技术有限公司 | Filter |
| CN102608707B (en) * | 2012-03-05 | 2014-07-09 | 西南交通大学 | Method for regulating free spectral range by equilong rectangular cavity surface plasma band pass filter |
| CN203616502U (en) * | 2013-12-09 | 2014-05-28 | 华南师范大学 | Surface plasmon optical waveguide filter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108761650A (en) * | 2018-05-08 | 2018-11-06 | 桂林电子科技大学 | A kind of more transmission peaks plasma wave-filters coupling cavity configuration based on MIM waveguides |
| CN108761650B (en) * | 2018-05-08 | 2020-01-03 | 桂林电子科技大学 | Multi-transmission peak plasma filter based on MIM waveguide coupling cavity structure |
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