CN104267455A - Surface plasma filter based on connection bridge of rectangular ring resonant cavity and incident waveguide - Google Patents

Surface plasma filter based on connection bridge of rectangular ring resonant cavity and incident waveguide Download PDF

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Publication number
CN104267455A
CN104267455A CN201410525433.9A CN201410525433A CN104267455A CN 104267455 A CN104267455 A CN 104267455A CN 201410525433 A CN201410525433 A CN 201410525433A CN 104267455 A CN104267455 A CN 104267455A
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China
Prior art keywords
resonant cavity
waveguide
ring resonant
surface plasma
straight
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CN201410525433.9A
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Chinese (zh)
Inventor
夏秀山
王继成
宋慈
曲世年
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Jiangnan University
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Jiangnan University
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Priority to CN201410525433.9A priority Critical patent/CN104267455A/en
Publication of CN104267455A publication Critical patent/CN104267455A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters

Abstract

The invention provides a surface plasma filter based on a connection bridge of a rectangular ring resonant cavity and an incident waveguide. The means that the resonant frequency of an existing surface plasma filter is adjusted by changing structure parameters is mainly simplified, and thus the purpose for simplifying the manufacturing technology of the filter can be achieved. The surface plasma filter based on the connection bridge of the rectangular ring resonant cavity and the incident waveguide comprises metal layers arranged on the two sides of a dielectric layer, the single rectangular ring resonant cavity is arranged in the metal layer mounted on one side of the dielectric layer, the waveguide bridge is connected between the resonant cavity and the incident waveguide, and the waveguide bridge is arranged on the symmetry axis of the resonant cavity. The structure has an extremely high light constraint effect, the diffraction limit restriction can be broken through, and light can be transmitted on the nanoscale. The surface plasma filter is effectively connected with an electronic device and a traditional photonic device in a matched mode, the waveguide bridge length only needs to be changed, and thus light waves of different wave lengths can be effectively filtered out. The manufacturing technology of the filter is simple, and high application value can be achieved on the aspects of optical communication, optical integration, optical information processing and the like.

Description

The surface plasma fluid filter of bridge is connected based on straight-flanked ring resonant cavity and incident wave
Technical field
The present invention is a kind of micronano optical device, is specifically related to a kind of surface plasma fluid filter connecting bridge based on straight-flanked ring resonant cavity and incident wave.
Background technology
Surface plasma fluid filter has many advantages, such as simple and compact for structure, size is little, not by the restriction of diffraction limit, provide and may wait for the compatibility of electronic loop and photonic device, at numerous areas, especially integrated, the field such as optical oomputing and optical information processing of light, has wide practical use.
The high beam connecting bridge filtering and metal-dielectric-metal waveguide based on metal nano straight-flanked ring resonant cavity and incident wave such as to tie up at the characteristic, and surface plasma fluid filter has the advantage of many uniquenesses.Generally speaking, by between appropriate design straight-flanked ring resonant cavity and incident waveguide connect the resonance wavelength that waveguide bridge length effectively can regulate straight-flanked ring resonant cavity, the light signal of different wave length is filtered in the straight-flanked ring resonant cavity that the different bridge of correspondence is long.
Surface plasma fluid filter as a kind of important accessible site photonic device, effectively solve conventional wave wave filter be subject to diffraction limit restriction and cause bulky, be difficult to the shortcomings such as integrated.Surface plasma is a kind of coherence resonance formed by external electromagnetic field and metal surface free electron, incident light energy is mainly strapped in metal surface and forward direction, it effectively can overcome diffraction limit, development for micro-nano photonic device provides new approach, but the minor alteration of metal structure of resonant cavity parameter, will cause the change that surface plasma resonance frequency is very large.A kind of simple method how is found to be the integrated and optical information processing urgent problem of current micro-nano light to control resonant cavity inside surface Plasmon resonance frequency.
Summary of the invention
The invention provides a kind of surface plasma fluid filter connecting bridge based on straight-flanked ring resonant cavity and incident wave, mainly provide and a kind ofly control the method for resonant cavity inside surface Plasmon resonance frequency by changing waveguide bridge length between straight-flanked ring resonant cavity and incident waveguide.
Technical scheme of the present invention is as follows: this surface plasma fluid filter connecting bridge based on straight-flanked ring resonant cavity and incident wave comprises the metal level being arranged on dielectric layer both sides, single straight-flanked ring resonant cavity is set in the metal level of dielectric layer side, connect a waveguide bridge between straight-flanked ring resonant cavity and incident waveguide, waveguide bridge is arranged on the axis of symmetry of straight-flanked ring resonant cavity.Straight-flanked ring resonant cavity is the ring-like nanometer resonant cavity of rectangle, and metal level is silver metal level, and straight-flanked ring resonant cavity and institute connect in waveguide bridge and be filled with air or other refraction materials.
Beneficial effect of the present invention is as follows: surface plasma fluid filter is made up of metal-insulator-metastructure structure, and this structure has extremely strong light beam and ties up effect, can break through the restriction of diffraction limit, transmit at nanoscale to light.This wave filter is integrated on the argent of a piece several microns, structure is simple, volume is little, and can and electron device and conventional photonic device effectively mate connection, the light signal of specific wavelength is filtered by changing waveguide bridge length between straight-flanked ring resonant cavity and incident waveguide, the present invention, at visible ray and near-infrared band, has wide practical use in, optical information processing integrated at optical communication, light etc.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is that straight-flanked ring resonant cavity optimum resonant frequency is with waveguide bridge length relation figure;
Fig. 3 is by straight-flanked ring resonant cavity optimum resonant frequency conformal ring resonant cavity and met waveguide bridge medium index of refraction relationship figure;
[the effective refractive index figure of Fig. 4 to be width be light in the main waveguide of 50 nanometers;
Fig. 5 is the transmission spectrum that straight-flanked ring resonant cavity and incident wave connect bridge wave filter;
Fig. 6 is the magnetic distribution figure that straight-flanked ring resonant cavity and incident wave connect light signal in bridge wave filter;
In figure: 1-metal (silver) layer; The main waveguide of 2-; 3-waveguide bridge; 4-straight-flanked ring resonant cavity.
Embodiment
Embodiments of the present invention are elaborated below in conjunction with accompanying drawing:
The present invention is based on the surface plasma fluid filter that straight-flanked ring resonant cavity and incident wave connect bridge to form primarily of metal (silver) layer, main waveguide, waveguide bridge, this few part of straight-flanked ring resonant cavity, refer to Fig. 1.Metal level (flat board) can utilize laser molecular beam crystal epitaxy system to make.Main waveguide, straight-flanked ring resonant cavity, waveguide bridge can utilize focused-ion-beam lithography technology to carry out etching to metal plate and obtain.Light signal is incorporated in main waveguide by coupling silicon waveguide or conical fiber, and light signal is incorporated into straight-flanked ring resonant cavity (different bridge is long introduces different optimum resonant frequency) by waveguide bridge, and the best being in chamber when light signal is shaken wavelength X i(i=1,2,) time, incident light can form very strong local resonance in chamber, major part energy is stayed in chamber with standing wave form, small part energy, by main waveguide outgoing, so just can filter the light signal of specific wavelength by changing waveguide bridge length between straight-flanked ring resonant cavity and incident waveguide.Straight-flanked ring resonant cavity optimum resonance wavelength can be regulated by the waveguide bridge length changed between chamber and incident waveguide, changing waveguide bridge length can almost linear regulation straight-flanked ring resonant cavity optimum resonance wavelength, refer to Fig. 2, when waveguide bridge length changes in 50 nanometer ~ 230 nanometer range, the range of adjustment of wavelength is 800 nanometer ~ 1200 nanometers.In addition, also can effectively regulate resonant cavity resonance wavelength by the medium injecting different refractivity in resonant cavity and waveguide bridge, refer to Fig. 3, the straight-flanked ring resonant cavity of a=365nm, b=360nm, w=50nm and d 1when in the waveguide bridge of=50nm, refractive index changes between 1.0 ~ 1.30, the range of adjustment of wavelength is 800 nanometer ~ 1200 nanometers.Air is elected in main waveguide as, and its refractive index is 1.0, and width is 50 nanometers, and its effective refractive index is about 1.4 in operating wavelength range, refers to Fig. 4.Here we devise the surface plasma fluid filter that three long straight-flanked ring resonant cavities of different bridge and incident wave connect bridge, and the structural parameters a of straight-flanked ring resonant cavity, b, d are respectively a=365nm, b=360nm, d=50nm, and the waveguide bridge length that connects is set to d respectively 1=50nm, d 2=80nm, d 3=110nm; The resonance wavelength of corresponding three straight-flanked ring resonant cavities is respectively λ 1=872.5nm, λ 2=887.5, λ 3=905nm.This filtration efficiency connecting the surface plasma fluid filter of bridge based on straight-flanked ring resonant cavity and incident wave, near 95%, refers to Fig. 5.The light signal of three corresponding optimum resonant frequency will form best local resonance at three straight-flanked ring resonant cavities respectively, refers to Fig. 6, and the electromagnetism field pattern of incident monochromatic light signal in wave filter meets completely with transmission results above.The distinguishing feature that this straight-flanked ring resonant cavity and incident wave connect the surface plasma fluid filter of bridge is as follows: the surface plasma fluid filter that straight-flanked ring resonant cavity and incident wave connect bridge utilizes metal-dielectric-metal waveguiding structure, the light with superelevation is bound, overcome diffraction limit, size only has several micron long; Can and electron device and conventional photonic device effectively mate connection; The light signal of specific wavelength is filtered by changing waveguide bridge length between straight-flanked ring resonant cavity and incident waveguide; The wavelength that resonant cavity filters, at visible ray and near-infrared band, has wide practical use in, optical information processing integrated at optical communication, light etc.

Claims (4)

1. one kind connects the surface plasma fluid filter of bridge based on straight-flanked ring resonant cavity and incident wave, it is characterized in that: comprise the metal level being arranged on dielectric layer both sides, single straight-flanked ring resonant cavity is set in the metal level of dielectric layer side, connect a waveguide bridge between straight-flanked ring resonant cavity and incident waveguide, waveguide bridge is arranged on the axis of symmetry of straight-flanked ring resonant cavity.
2. the surface plasma fluid filter connecting bridge based on straight-flanked ring resonant cavity and incident wave according to claim 1, is characterized in that: described straight-flanked ring resonant cavity is the ring-like resonant cavity of nanometer rectangle.
3. the surface plasma fluid filter connecting bridge based on straight-flanked ring resonant cavity and incident wave according to claim 2, is characterized in that: described metal level is silver metal level.
4. the surface plasma fluid filter connecting bridge based on straight-flanked ring resonant cavity and incident wave according to claim 3, is characterized in that: described straight-flanked ring resonant cavity and institute connect in waveguide bridge and be filled with air or other refraction materials.
CN201410525433.9A 2014-10-08 2014-10-08 Surface plasma filter based on connection bridge of rectangular ring resonant cavity and incident waveguide Pending CN104267455A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105572798A (en) * 2016-02-15 2016-05-11 欧阳征标 MIM-based highly sensitive SPP temperature photoswitch
WO2017140149A1 (en) * 2016-02-15 2017-08-24 深圳大学 Terahertz-wave pulse amplitude-modulation signal and optical-pulse amplitude-modulation signal conversion amplifier
CN107356558A (en) * 2017-08-28 2017-11-17 兰州大学 Micro-nano optical detection device and optical detection system
CN108493527A (en) * 2018-05-09 2018-09-04 桂林电子科技大学 One kind embedding rectangular cavity plasma wave-filter based on MIM waveguides
CN108761650A (en) * 2018-05-08 2018-11-06 桂林电子科技大学 A kind of more transmission peaks plasma wave-filters coupling cavity configuration based on MIM waveguides
CN109901253A (en) * 2019-03-22 2019-06-18 江南大学 A kind of surface plasma fluid filter

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105572798A (en) * 2016-02-15 2016-05-11 欧阳征标 MIM-based highly sensitive SPP temperature photoswitch
WO2017140149A1 (en) * 2016-02-15 2017-08-24 深圳大学 Terahertz-wave pulse amplitude-modulation signal and optical-pulse amplitude-modulation signal conversion amplifier
CN105572798B (en) * 2016-02-15 2018-08-07 欧阳征标 Based on MIM high sensitivity SPP temperature photoswitches
CN107356558A (en) * 2017-08-28 2017-11-17 兰州大学 Micro-nano optical detection device and optical detection system
CN108761650A (en) * 2018-05-08 2018-11-06 桂林电子科技大学 A kind of more transmission peaks plasma wave-filters coupling cavity configuration based on MIM waveguides
CN108761650B (en) * 2018-05-08 2020-01-03 桂林电子科技大学 Multi-transmission peak plasma filter based on MIM waveguide coupling cavity structure
CN108493527A (en) * 2018-05-09 2018-09-04 桂林电子科技大学 One kind embedding rectangular cavity plasma wave-filter based on MIM waveguides
CN109901253A (en) * 2019-03-22 2019-06-18 江南大学 A kind of surface plasma fluid filter
CN109901253B (en) * 2019-03-22 2020-06-09 江南大学 Surface plasma filter

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Application publication date: 20150107