CN106299564A - Plasma curved waveguide wave filter based on microcavity coupled structure - Google Patents
Plasma curved waveguide wave filter based on microcavity coupled structure Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/207—Hollow waveguide filters
- H01P1/208—Cascaded cavities; Cascaded resonators inside a hollow waveguide structure
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Abstract
The present invention discloses a kind of plasma curved waveguide wave filter based on microcavity coupled structure, including metallic film and the curved waveguide resonant cavity that is opened on metallic film.Curved waveguide is made up of incident waveguide, middle waveguide and outgoing waveguide.Resonator cavity is positioned at wherein side and/or the both sides of middle waveguide.Straight wave guide is become the curved waveguide of two right angle compositions by the present invention, and so middle middle waveguide can form a F P chamber；And increase by two rectangular cavities in the both sides of middle middle waveguide, utilize the resonance coupling effect of surface phasmon SPP and resonator cavity, by regulating the length of resonator cavity, it is achieved phasmon filter function；Further, it is also possible to by regulation resonator cavity and the spacing of waveguide, the length of resonator cavity and the number of resonator cavity, realize filtering and electromagnetic induced transparency effect, and a kind of special coupling effect can be embodied.
Description
Technical field
The present invention relates to micro-nano photon technology field, be specifically related to the bending of a kind of plasma based on microcavity coupled structure
Waveguide filter.
Background technology
In the last few years, plasma filled waveguide had attracted domestic and international research worker in the conducting power to light of sub-wavelength dimensions
Extensive concern, promote plasma filled waveguide integrated passive devices and develop further.At the various plasma waveguides having pointed out
In structure, metal-dielectric-metal (MIM) waveguide because can transmit with support surface plasmon (SPPs) pattern and incite somebody to action
Mode beams is tied up in the dielectric layer, and has stronger local ability to light, simple and be prone to highly integrated advantage, in nanometer
Integrated optics and device aspect have great application potential.
Along with the development of science and technology, wave filter as a kind of carrier removing noise jamming, communication, medical treatment,
The field such as military, to automatically control has a wide range of applications.But traditional wave filter is owing to being limited by the condition such as volume, stability
System, it is impossible to well adapt to the needs of optronics technique development.And surface phasmon optical filter is because its volume is little, power consumption
The a series of advantages such as low, reliability is high, cause the attention of more and more people.This has been carried out widely by scientific research personnel one after another
Research, such as the nano plasma waveguide filter of dentation, wave filter based on long-range plasma, and disc band
Bandpass filter.But, all there is function singleness or the problem such as performance is the best in existing plasma wave waveguide filter.
Summary of the invention
The technical problem to be solved is to provide a kind of plasma curved waveguide based on microcavity coupled structure
Wave filter, it is capable of different qualities and function.
For solving the problems referred to above, the present invention is achieved by the following technical solutions:
Plasma curved waveguide wave filter based on microcavity coupled structure, including metallic film and be opened in metal
Curved waveguide resonant cavity on thin film.
Curved waveguide is made up of incident waveguide, middle waveguide and outgoing waveguide；Incident waveguide, middle waveguide and outgoing waveguide
It is rectangle；One end of middle waveguide is connected with one end of incident waveguide, and the other end of middle waveguide is connected with outgoing waveguide；Enter
The other end that ejected wave is led extends to a lateral edges of metallic film and forms the entrance port of light, and the other end of outgoing waveguide extends to gold
The opposite side edge belonging to thin film forms the exit portal of light；Incident waveguide is parallel with outgoing waveguide, and middle waveguide is both perpendicular to entering
Ejected wave is led and outgoing waveguide.The number of resonator cavity is 1 or 2；When the number of resonator cavity is 1, during this resonator cavity is positioned at
Between the wherein side of waveguide；When the number of resonator cavity is 2,2 resonator cavitys lay respectively at the both sides of middle waveguide；Above-mentioned humorous
The chamber that shakes is rectangle, and resonator cavity is all parallel with middle waveguide.
In such scheme, the width of incident waveguide is equal with the width of outgoing waveguide.
In such scheme, the width of middle waveguide is more than or equal to width and the width of outgoing waveguide of incident waveguide.
In such scheme, the width of resonator cavity is equal to width and the width of outgoing waveguide of incident waveguide.
In such scheme, middle waveguide is positioned at the middle of metallic film, the length of incident waveguide and the length of outgoing waveguide
Spend equal.
In such scheme, the length of middle waveguide is between 400nm～600nm；The width of middle waveguide is between 70nm
～between 200nm.
In such scheme, when resonator cavity is positioned at incident waveguide side, the spacing between resonator cavity and incident waveguide between
Between 8nm～35nm, and the spacing between resonator cavity and middle waveguide is between 5nm～250nm.
In such scheme, when resonator cavity is positioned at outgoing waveguide side, the spacing between resonator cavity and outgoing waveguide between
Between 5nm～15nm, and the spacing between resonator cavity and middle waveguide is between 80nm～300nm.
In such scheme, the medium filled in curved waveguide resonant cavity is air.
Compared with prior art, straight wave guide, on the basis of original straight wave guide phasmon wave filter, is become by the present invention
Becoming the curved waveguide of two right angle compositions, so middle middle waveguide can form a F-P cavity；And in middle centre
The both sides of waveguide increase by two rectangular cavities, utilize the resonance coupling effect of surface phasmon SPP and resonator cavity, by adjusting
The length of joint resonator cavity, it is achieved phasmon filter function；Further, it is also possible to by regulation resonator cavity and the spacing of waveguide, humorous
The length in chamber of shaking and the number of resonator cavity, realize filtering and electromagnetic induced transparency effect, and can embody a kind of special coupling
Close effect.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of plasma curved waveguide wave filter based on microcavity coupled structure.
Fig. 2 is the structural representation of another kind of plasma curved waveguide wave filter based on microcavity coupled structure.
Fig. 3 is the filtering characteristic spectrogram of plasma curved waveguide wave filter based on microcavity coupled structure.
Fig. 4 is the special Coupling effect spectrogram of plasma curved waveguide wave filter based on microcavity coupled structure.
Fig. 5 is the electromagnetic induced transparency spectrogram of plasma curved waveguide wave filter based on microcavity coupled structure.
Figure is numbered: 1, metallic film, 2, incident waveguide, 3, middle waveguide, 4, outgoing waveguide, 5, left resonator cavity, 6,
Right resonator cavity.
Detailed description of the invention
A kind of plasma curved waveguide wave filter based on microcavity coupled structure, including metallic film 1 and be opened in
Curved waveguide resonant cavity on metallic film 1.In the present invention, metallic film 1 is silverskin, fills out in curved waveguide resonant cavity
The medium filled is air.
Curved waveguide is made up of incident waveguide 2, middle waveguide 3 and outgoing waveguide 4.Incident waveguide 2, middle waveguide 3 and go out
Ejected wave is led 4 and is rectangle.Incident waveguide 2, middle waveguide 3 and outgoing waveguide 4 are the most end to end.One end of middle waveguide 3 with
One end of incident waveguide 2 is connected, and forms right angle linking.The other end of middle waveguide 3 is connected with outgoing waveguide 4, forms right angle rank
Connect.The other end of incident waveguide 2 extends to a lateral edges of metallic film 1 and forms the entrance port of light, the other end of outgoing waveguide 4
The opposite side edge extending to metallic film 1 forms the exit portal of light.Incident waveguide 2 is parallel with outgoing waveguide 4, in the present invention
In, incident waveguide 2 extends along horizontal direction with outgoing waveguide 4.Middle waveguide 3 is both perpendicular to incident waveguide 2 and outgoing wave
Leading 4, in the present invention, middle waveguide 3 extends along vertical direction.Planar light is by left side incidence waveguide 2 glancing incidence, through centre
Waveguide 3, in the right outgoing waveguide 4 transmission light outgoing of metallic film 1.When planar light is by medium left side glancing incidence, metal
The surface phasmon of film surface excitation traverses to outgoing waveguide 4 by tunnel-effect, with the curved waveguide of two right angle compositions
Local surface phasmon generation resonance coupling, form a powerful local electromagnetic field, and couple with resonator cavity, make
Obtain body and reveal filter function.Coupling effect also can be had a certain impact by the width of middle waveguide 3.
In the present invention, the width of incident waveguide 2 is equal with the width of outgoing waveguide 4, i.e. W1=W3.Middle waveguide 3
Width is more than or equal to width and the width of outgoing waveguide 4, i.e. W2 >=W1=W3 of incident waveguide 2.Middle waveguide 3 is positioned at metal foil
The middle of film 1, the length of incident waveguide 2 is equal with the length of outgoing waveguide 4.The length of middle waveguide 3 between 400nm～
Between 600nm.The width of middle waveguide 3 is between 70nm～200nm.
The number of resonator cavity is 1 or 2.Above-mentioned resonator cavity is rectangle, and resonator cavity is all parallel with middle waveguide 3.
Seeing Fig. 1, when the number of resonator cavity is 1, this resonator cavity is positioned at the wherein side of middle waveguide 3, during i.e. resonator cavity is positioned at
Between the left side of waveguide 3 or right side.When there being 1 resonator cavity, by regulating the length of resonator cavity, then the present invention realizes filtering merit
Energy.Seeing Fig. 2, when the number of resonator cavity is 2, it is same that 2 resonator cavitys lay respectively at the both sides of middle waveguide 3, i.e. resonator cavity
Time be positioned at left side and the right side of middle waveguide 3.In the presence of having 2 resonator cavitys simultaneously, by regulation both sides cavity length, then
There is electromagnetic induced transparency phenomenon in the present invention.When regulating left resonator cavity 5 and incident waveguide 2 and the spacing of middle waveguide 3 or tune
When saving the spacing of right resonator cavity 6 and outgoing waveguide 4 and middle waveguide 3, then the present invention can embody a kind of special coupling phenomenon.
In the present invention, the width of resonator cavity is equal to width and the width of outgoing waveguide 4, i.e. W4=of incident waveguide 2
W5=W1=W3.The upper dotted line of middle waveguide 3 is the center line of middle waveguide 3, divides W2 equally.When resonator cavity is positioned at incident waveguide 2
During side, the spacing between resonator cavity and incident waveguide 2 is between 8nm～35nm, and between resonator cavity and middle waveguide 3
Spacing is between 5nm～250nm.When resonator cavity is positioned at outgoing waveguide 4 side, between resonator cavity and outgoing waveguide 4 between
Away between 5nm～15nm, and the spacing between resonator cavity and middle waveguide 3 is between 80nm～300nm.
When actually used, this plasma curved waveguide wave filter based on microcavity coupled structure is typically overlying on a medium
In substrate, this medium substrate can be silicon (Si) or silicon dioxide (SiO2).The present invention can by regulate resonator cavity length,
The structural parameters such as the width of resonator cavity and incident waveguide 2 and the spacing of middle waveguide 3 and middle waveguide 3, can embody different
Character, embodies different functions.
Below in conjunction with the accompanying drawings, by instantiation, the present invention is further described:
The long L=2.4um of metallic film 1, wide W0=2um.The wide W1=100nm, long L1=1.2um of incident waveguide 2.Go out
Ejected wave leads the wide W3=100nm of 4, long L2=1.2um.The wide W2=110nm, long h2=510nm of middle waveguide 3；
(1) left side in middle waveguide 3 adds left resonator cavity 5, as shown in Figure 1.The left resonator cavity of Schilling 5 and incident waveguide 2
Distance a1 be fixed as 12nm, left resonator cavity 5 is fixed as 112nm with distance a2 of middle waveguide 3.Again by regulating left resonator cavity
Length h1 of 5, can realize filtering, as allowed h1 be respectively 270nm, 290nm, 310nm, 330nm, i.e. can get as shown in Figure 3
Filter curve figure.
(2) bending due to this filter construction, left resonator cavity 5 and incident waveguide 2, apart from close, couple already.When
Left resonator cavity 5 to the right constantly near time, with middle waveguide 3, coupling effect can occur simultaneously.Now, occurred as soon as one special
Coupling effect.Length h1 of the left resonator cavity 5 of Schilling is 390nm, and the width W4 of left resonator cavity 5 is 100nm；Left resonator cavity 5 with enter
It is 18nm that ejected wave leads distance a1 of 2.Again by changing distance a2 of left resonator cavity 5 and middle waveguide 3, special coupling can be realized
Close effect, as allowed left resonator cavity 5 be respectively 100nm, 50nm, 15nm, 8nm with distance a2 of middle waveguide 3, i.e. obtain such as Fig. 4
Shown connecting curve figure.
(3) it is separately added into left resonator cavity 5 and right resonator cavity 6, as shown in Figure 2 when the left and right sides in middle waveguide 3.Shilling
The width W4 of left resonator cavity 5 is 100nm, and the width W5 of right resonator cavity 6 is 100nm；Left resonator cavity 5 and the distance of middle waveguide 3
A2 is 112nm, and left resonator cavity 5 is 12nm with distance a1 of incident waveguide 2；Right resonator cavity 6 with distance a3 of middle waveguide 3 is
100nm, right resonator cavity 6 is 6nm with distance a4 of outgoing waveguide 4；Length h3 of right resonator cavity 6 is 344nm.Again by changing a left side
Length h1 of resonator cavity 5, i.e. can get electromagnetic induced transparency phenomenon, as allowed length h1 of left resonator cavity 5 be respectively 360nm,
320nm, i.e. can get the curve of the electromagnetic induced transparency shown in Fig. 5.
Claims (9)
1. plasma curved waveguide wave filter based on microcavity coupled structure, it is characterised in that: include metallic film (1), with
And it is opened in the curved waveguide resonant cavity on metallic film (1)；
Curved waveguide is made up of incident waveguide (2), middle waveguide (3) and outgoing waveguide (4)；Incident waveguide (2), middle waveguide
And outgoing waveguide (4) is rectangle (3)；One end of middle waveguide (3) is connected with one end of incident waveguide (2), middle waveguide (3)
The other end be connected with outgoing waveguide (4)；The other end of incident waveguide (2) extends to a lateral edges of metallic film (1) and is formed
The entrance port of light, the other end of outgoing waveguide (4) extends to the opposite side edge of metallic film (1) and forms the exit portal of light；Enter
It is parallel with outgoing waveguide (4) that ejected wave leads (2), and middle waveguide (3) is both perpendicular to incident waveguide (2) and outgoing waveguide (4)；
The number of resonator cavity is 1 or 2；When the number of resonator cavity is 1, this resonator cavity is positioned at its of middle waveguide (3)
Middle side；When the number of resonator cavity is 2,2 resonator cavitys lay respectively at the both sides of middle waveguide (3)；Above-mentioned resonator cavity is equal
For rectangle, and resonator cavity is all parallel with middle waveguide (3).
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1, its feature
It is: the width of incident waveguide (2) is equal with the width of outgoing waveguide (4).
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1 and 2, it is special
Levy and be: the width of middle waveguide (3) is more than or equal to width and the width of outgoing waveguide (4) of incident waveguide (2).
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1 and 2, it is special
Levy and be: the width of resonator cavity is equal to width and the width of outgoing waveguide (4) of incident waveguide (2).
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1, its feature
It is: middle waveguide (3) is positioned at the middle of metallic film (1), the length of incident waveguide (2) and the length of outgoing waveguide (4)
Equal.
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1, its feature
It is: the length of middle waveguide (3) is between 400nm～600nm；The width of middle waveguide (3) between 70nm～200nm it
Between.
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1, its feature
Being: when resonator cavity is positioned at incident waveguide (2) side, the spacing between resonator cavity and incident waveguide (2) is between 8nm～35nm
Between, and the spacing between resonator cavity and middle waveguide (3) is between 5nm～250nm.
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1, its feature
It is: when resonator cavity is positioned at outgoing waveguide (4) side, the spacing between resonator cavity and outgoing waveguide (4) is between 5nm～15nm
Between, and the spacing between resonator cavity and middle waveguide (3) is between 80nm～300nm.
A kind of plasma curved waveguide wave filter based on microcavity coupled structure the most according to claim 1, its feature
It is: the medium filled in curved waveguide resonant cavity is air.
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Cited By (6)
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| CN107884874A (en) * | 2017-11-22 | 2018-04-06 | 桂林电子科技大学 | A kind of plasmon resonance wavelength division multiplexer |
| CN108110396A (en) * | 2017-12-07 | 2018-06-01 | 中国计量大学 | A kind of transparent resonance device of metal-dielectric two-layer hybrid Meta Materials class electromagnetically induced |
| CN108680974A (en) * | 2018-03-30 | 2018-10-19 | 桂林电子科技大学 | A kind of surface plasmon waveguide adjustable light wave-filter |
| CN108736118A (en) * | 2018-03-29 | 2018-11-02 | 桂林电子科技大学 | A kind of design of the unsymmetric structure cylindrical cavity filter based on surface phasmon |
| CN108761650A (en) * | 2018-05-08 | 2018-11-06 | 桂林电子科技大学 | A kind of more transmission peaks plasma wave-filters coupling cavity configuration based on MIM waveguides |
| CN109324368A (en) * | 2018-08-15 | 2019-02-12 | 桂林电子科技大学 | A kind of logic output light source based on plasma filled waveguide |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884874A (en) * | 2017-11-22 | 2018-04-06 | 桂林电子科技大学 | A kind of plasmon resonance wavelength division multiplexer |
| CN107884874B (en) * | 2017-11-22 | 2019-07-12 | 桂林电子科技大学 | A kind of plasmon resonance wavelength division multiplexer |
| CN108110396A (en) * | 2017-12-07 | 2018-06-01 | 中国计量大学 | A kind of transparent resonance device of metal-dielectric two-layer hybrid Meta Materials class electromagnetically induced |
| CN108736118A (en) * | 2018-03-29 | 2018-11-02 | 桂林电子科技大学 | A kind of design of the unsymmetric structure cylindrical cavity filter based on surface phasmon |
| CN108680974A (en) * | 2018-03-30 | 2018-10-19 | 桂林电子科技大学 | A kind of surface plasmon waveguide adjustable light wave-filter |
| CN108680974B (en) * | 2018-03-30 | 2020-11-27 | 桂林电子科技大学 | Tunable optical filter of surface plasmon waveguide |
| CN108761650A (en) * | 2018-05-08 | 2018-11-06 | 桂林电子科技大学 | A kind of more transmission peaks plasma wave-filters coupling cavity configuration based on MIM waveguides |
| CN108761650B (en) * | 2018-05-08 | 2020-01-03 | 桂林电子科技大学 | Multi-transmission peak plasma filter based on MIM waveguide coupling cavity structure |
| CN109324368A (en) * | 2018-08-15 | 2019-02-12 | 桂林电子科技大学 | A kind of logic output light source based on plasma filled waveguide |
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