CN107884874B - A kind of plasmon resonance wavelength division multiplexer - Google Patents
A kind of plasmon resonance wavelength division multiplexer Download PDFInfo
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- CN107884874B CN107884874B CN201711174343.XA CN201711174343A CN107884874B CN 107884874 B CN107884874 B CN 107884874B CN 201711174343 A CN201711174343 A CN 201711174343A CN 107884874 B CN107884874 B CN 107884874B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
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Abstract
The present invention discloses a kind of plasmon resonance wavelength division multiplexer, forms by metallic film, and in the resonant cavity that Openworks shape is provided with 1 on metallic film incident waveguide, 2 or more outgoing waveguides and 2 or more.The quantity for being emitted waveguide resonant cavity is identical, corresponding 1 resonant cavity of 1 outgoing waveguide.By the way that resonant cavity is arranged in the two sides of incident waveguide and/or rear end, and it is led in the other side of resonant cavity setting outgoing wave to constitute multiplexer, and by the way that a metal film block is added in each intra resonant cavity, so that a F-P cavity can be formed in resonant cavity, so that surface phasmon SPP and resonant cavity realize resonance coupling；It is acted in this way using the resonance coupling of surface phasmon SPP and resonant cavity, can realize that the separation of phasmon multiple signals and each channel wavelength are adjusted by the size of metallic film in adjusting resonant cavity；Spacing can be coupled by changing simultaneously, embody specific coupling effect.
Description
Technical field
The present invention relates to micro-nano photon technology fields, and in particular to a kind of plasmon resonance wavelength division multiplexer.
Background technique
Device of the SPP in highly integrated optical circuit has broad application prospects because they overcome it is traditional
Diffraction limit, and light can be manipulated on sub-wavelength dimensions.In the various plasma SPP structures having proposed, metal-Jie
Matter-metal (MIM) waveguiding structure with support surface plasmon (SPPs) mode because can be transmitted and be strapped in mode
In dielectric layer, and there is stronger local ability to light, it is simple and be easy to highly integrated advantage, nano-integrated optics with
There is great application potential in terms of device.
With the continuous development of science and technology, it is passed applied to the wavelength division multiplexer of wavelength selection in optical computing and electric signal
Play the role of in broadcasting it is critically important, such as based on plasma band logical and bandstop filter, the light that the former allows to have certain wavelength
By waveguide, and the latter forbids the transmission of certain wavelength.Both filters have critically important status in nanocomposite optical device.
Scientific research personnel one after another conducts extensive research this, such as the nano plasma waveguide filter of dentation, is based on long-range
The filter and curved waveguide bandpass filter of plasma.However, also less for existing plasma wavelength division multiplexer
Concern.
Summary of the invention
The present invention provides a kind of plasmon resonance wavelength division multiplexer, can be realized different characteristics and function.
To solve the above problems, the present invention is achieved by the following technical solutions:
A kind of plasmon resonance wavelength division multiplexer, is provided on metallic film by metallic film, and in Openworks shape
1 incident waveguide, 2 or more outgoing waveguides and 2 or more resonant cavity composition；It is emitted the quantity phase of waveguide resonant cavity
Together, corresponding 1 resonant cavity of 1 outgoing waveguide；Incident waveguide is strip；The front end of incident waveguide extends to the side of metallic film
At edge, the rear end of incident waveguide extends to the middle part of metallic film；Each resonant cavity is circle；Resonant cavity distribution setting is entering
The two sides and/or rear end that ejected wave is led；Each intra resonant cavity is embedded with the metal film block of 1 rectangle, and metal film block is located at
At the center of resonant cavity；Each outgoing waveguide is strip；It is each outgoing waveguide front end with its corresponding to resonant cavity phase
Right, the rear end of each outgoing waveguide extends to the edge of metallic film；Between resonant cavity and incident waveguide and outgoing waveguide
There are certain distance, and the extending direction that is emitted waveguide is vertical with the incidence extending direction of waveguide and/or on same straight line.
In above scheme, metal film block is strip rectangle.
In above scheme, the symmetrical centre of metal film block and the symmetrical centre of resonant cavity coincide.
In above scheme, the size of the metal film block of all resonant cavities and its inside is consistent.
In above scheme, incident waveguide and it is all outgoing waveguide it is of same size.
In above scheme, the diameter of resonant cavity is equal to twice of the width of incident waveguide and the width of outgoing waveguide.
In above scheme, outgoing the distance between waveguide and resonant cavity be equal between the resonant cavity and incident waveguide away from
From.
In above scheme, the number that the resonant cavity of the two sides of incident waveguide is arranged in is identical.
In above scheme, resonant cavity is arranged in the two sides of incident waveguide in mirror symmetry.
Compared with prior art, the present invention is by being arranged resonant cavity in the two sides of incident waveguide and/or rear end, and in resonance
The other side setting outgoing wave of chamber leads to constitute multiplexer, and by the way that a metal film block is added in each intra resonant cavity, makes
A F-P cavity can be formed by obtaining in resonant cavity, so that surface phasmon SPP and resonant cavity realize resonance coupling；It utilizes in this way
The effect of the resonance coupling of surface phasmon SPP and resonant cavity can be realized by the size of metallic film in adjusting resonant cavity
The separation of phasmon multiple signals and each channel wavelength are adjusted；Spacing can be coupled by changing simultaneously, embody specific coupling
Effect.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of plasmon resonance wavelength division multiplexer.
Fig. 2 is the structural schematic diagram of each plasmon resonance filter unit.
Fig. 3 is the one mode filtering characteristic spectrogram of plasmon resonance filter unit.
Fig. 4 is another Pattern Filter spectrum of properties figure of plasmon resonance filter unit.
Fig. 5 is the spectrum of properties figure of plasmon resonance wavelength division multiplexer.
Figure label: 1, metallic film；2, incident waveguide；3, it is emitted waveguide；4, resonant cavity；5, metal film block.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific example, and referring to attached
Figure, the present invention is described in more detail.It should be noted that the direction term mentioned in example, for example, "upper", "lower",
" in ", " left side " " right side ", "front", "rear" etc., be only the direction with reference to attached drawing.Therefore, the direction used is intended merely to explanation
For limiting the scope of the invention.
A kind of plasmon resonance wavelength division multiplexer, as shown in Figure 1, being provided with by metallic film 1, and in Openworks shape
The resonant cavity 4 of the outgoing waveguide 3 and 2 of 1 incident waveguide 2,2 on metallic film 1 or more or more forms.It is emitted waveguide 3
The quantity of resonant cavity 4 is identical, corresponding 1 resonant cavity 4 of 1 outgoing waveguide 3.Incident waveguide 2 and 1 resonant cavity 4 and 1 outgoing
Waveguide 3 forms a plasmon resonance filter unit, referring to fig. 2.The quantity of resonant cavity 4 and outgoing waveguide 3, determines
The multiplexing quantity of multiplexer of the present invention.In the present embodiment, resonant cavity 4 and outgoing waveguide 3 are 3, are formed identical with 1
Input, the wavelength division multiplexer of 3 different outputs.
Metallic film 1 is made of 1 material of metallic film.In the present embodiment, the generally rectangle of metallic film 1.Metal
By hollow out mode on film 1, incident waveguide 2, outgoing 3 resonant cavity 4 of waveguide are formed, so that incident waveguide 2, outgoing wave
Leading the medium filled in 3 resonant cavities 4 is air.
Incident waveguide 2 is strip.In the present embodiment, incident waveguide 2 is the wide rectangular slat in front and back.Incident waveguide
2 front end extends to the edge of metallic film 1, forms the entrance port of light；The rear end of incident waveguide 2 extends to metallic film 1
Middle part.In the present embodiment, incident 2 horizontal extension of waveguide is arranged on metallic film 1.
Each resonant cavity 4 is circle.Resonant cavity 4 is distributed the two sides and/or rear end that incident waveguide 2 is arranged in, i.e. resonance
The distribution mode of chamber 4 has 2 kinds: one is the two sides that all resonant cavities 4 are distributed in incident waveguide 2；Another kind is 1 resonant cavity
It is located at the rear end of resonant cavity 4 in 4, remaining resonant cavity 4 is distributed in the two sides of incident waveguide 2.And when resonant cavity 4 is distributed in incidence wave
When leading 2 two sides, all resonant cavity 4 can both be allowed all to be distributed in the same sides of incident waveguide 2, and can also allow resonant cavity 4
It is distributed in the two sides of incident waveguide 2.When resonant cavity 4 is distributed in the two sides of incident waveguide 2, preferably with uniformly distributed mode,
The quantity of the resonant cavity 4 of the two sides distribution of i.e. incident waveguide 2 is identical, and resonant cavity 4 is opposite in mirror image in the two sides of incident waveguide 2
Setting.In this embodiment, the rear end of resonant cavity 4 is located in 1 resonant cavity 4, outgoing waveguide 3 corresponding to the resonant cavity 4 with enter
Ejected wave leads 2 on the same line；Other 2 resonant cavities 4 are located at the two sides of incident waveguide 2, and are arranged in mirror symmetry, this
Outgoing waveguide 3 corresponding to 2 resonant cavities 4 and incident waveguide 2 are perpendicular.In order to guarantee symmetrical performance, in this embodiment, own
The size of resonant cavity 4 is consistent.
The metal film block 5 of 1 rectangle is embedded with inside each resonant cavity 4.Metal film block 5 and disk resonant cavity 4 occur
Resonance coupling forms a powerful local electromagnetic field, so that resonator reveals filtering characteristic.In the present embodiment, metal
Film block 5 is strip rectangle.Metal film block 5 is located at the center of resonant cavity 4.In the present embodiment, the symmetrical centre of metal film block 5
It coincides with the symmetrical centre of resonant cavity 4.In this embodiment, the size and shape of all metal film blocks 5 are consistent.Metal film block
5 are parallel to the width of outgoing 3 extending direction of waveguide between 10nm~160nm.Metal film block 5 prolongs perpendicular to outgoing waveguide 3
The width in direction is stretched between 10nm~160nm.The extending direction of metal film block 5 and the extending direction of outgoing waveguide 3 mutually hang down
Directly.
Each outgoing waveguide 3 is strip.In the present embodiment, outgoing waveguide 3 is the wide rectangular slat in front and back.Often
The front end of a outgoing waveguide 3 and resonant cavity 4 corresponding to it are opposite, and the rear end of each outgoing waveguide 3 extends to metallic film 1
Edge forms the exit portal of light.When resonant cavity 4 is located at the two sides of incident waveguide 2, corresponding to outgoing waveguide 3 prolong
It is vertical with the incident extending direction of waveguide 2 to stretch direction；When resonant cavity 4 is located at the front end of incident waveguide 2, outgoing waveguide 3 is prolonged
It is parallel with the incident extending direction of waveguide 2 to stretch direction, and on same straight line.
There is certain distance between resonant cavity 4 and incident waveguide 2 and outgoing waveguide 3.In this embodiment, it is emitted waveguide 3
The distance between resonant cavity 4 is equal to the distance between the resonant cavity 4 and incident waveguide 2.4 one end of resonant cavity and incident waveguide 2
The other end of coupling, resonant cavity 4 is coupled with outgoing waveguide 3.In the present embodiment, the length root of incident waveguide 2 and outgoing waveguide 3
Change according to relevant parameter so that it wherein can extend to the edge of metallic film 1 in one end, but incident waveguide 2 and it is all go out
The width that ejected wave leads 3 is then identical, i.e. W1=W2=W3=W4.The diameter of resonant cavity 4 is equal to the width and outgoing wave of incident waveguide 2
Twice for leading 3 width, i.e. r=2W1.
In actual use, the present invention needs to be overlying in a medium substrate, which can be silicon (Si) or dioxy
SiClx (SiO2).Planar light is by incident 2 glancing incidence of waveguide, and coupled to enter resonant cavity 4, resonant cavity 4 is internally provided with metal
The surface phasmon of film block 5, surface excitation traverses to outgoing waveguide 3 by tunnel-effect, and planar light is transmitted by outgoing waveguide 3
Light outgoing.It is acted on using the resonance coupling of surface phasmon SPP and resonant cavity 4, by adjusting metal film block 5 in resonant cavity 4
Size, the structural parameters such as spacing of resonant cavity 4 and incident waveguide 2 and outgoing waveguide 3 can embody different property, embodiment is not
Same function.It is explained below by a specific example:
For plasmon resonance filter unit shown in Fig. 2, the wide W1=50nm of incident waveguide 2 is emitted waveguide 3
Wide W2=50nm.4 radius r=100nm of resonant cavity, resonant cavity 4 is the same as adjacent waveguide spacing d=10nm.When hanging down for metal film block 5
Directly when the width h for being emitted 3 extending direction of waveguide is larger, is i.e. when h=120nm, passes through and adjust metal film block 5 in resonant cavity 4
It is parallel to outgoing 3 extending direction width s of waveguide, so that width s points for being parallel to outgoing 3 extending direction of waveguide of metal film block 5
Not Wei 30nm, 60nm, 90nm and 120nm, filter curve figure as shown in Figure 3 can be obtained.In Fig. 3, due to embedded metal
Block is wider, and the coupling plasma excimer generated from incident waveguide 2 interferes in coupler with embedded metal block, and transmission peaks produce
Raw latasuture, as the outgoing 3 extending direction width s of waveguide that is parallel to of metal film block 5 increases, the interference of light is continuously increased.Work as metal
When the width h perpendicular to outgoing 3 extending direction of waveguide of film block 5 is smaller, is i.e. when h=20nm, passes through and adjust metal in resonant cavity 4
Film block 5 be parallel to outgoing 3 extending direction width s of waveguide so that metal film block 5 be parallel to outgoing 3 extending direction of waveguide it is wide
Spending s is respectively 40nm, 80nm, 1200nm and 160nm, and filter curve figure as shown in Figure 4 can be obtained.In Fig. 4, gold is embedded
It is relatively narrow to belong to block, will not interfere, but as the outgoing 3 extending direction width s of waveguide that is parallel to of metal film block 5 increases, light
Loss increases, and transmissivity is gradually reduced.
On the basis of such as Fig. 2, by distinguishing 1 new resonant cavity 4 of each coupling in the two sides of incident waveguide 2, new is humorous
Vibration chamber 4 and outgoing waveguide 3 form the multiplexers with 3 difference output shown in Fig. 1, about incident 2 mirror symmetry of waveguide with this
Realize wavelength-division multiplex characteristic.For plasmon resonance wavelength division multiplexer shown in FIG. 1, the wide W1=50nm of incident waveguide 2.
It is emitted the wide W2=W3=W4=50nm of waveguide 3.4 radius r1=r2=r3=100nm of resonant cavity, the same adjacent waveguide of resonant cavity 4
Spacing d=10nm.The width that 3 metal film blocks 5 are parallel to outgoing 3 extending direction of waveguide is respectively s1=s2=s3=20nm.
Width perpendicular to outgoing 3 extending direction of waveguide is respectively h1=160nm, h2=120nm, h3=80nm.It can be obtained such as Fig. 5 institute
The wavelength-division multiplex spectrogram shown.
It should be noted that although the above embodiment of the present invention be it is illustrative, this be not be to the present invention
Limitation, therefore the invention is not limited in above-mentioned specific embodiment.Without departing from the principles of the present invention, all
The other embodiment that those skilled in the art obtain under the inspiration of the present invention is accordingly to be regarded as within protection of the invention.
Claims (8)
1. a kind of plasmon resonance wavelength division multiplexer, characterized in that be provided with by metallic film (1), and in Openworks shape
The resonant cavity (4) of 1 on metallic film (1) incident waveguide (2), 2 or more outgoing waveguides (3) and 2 or more forms；Out
The quantity that ejected wave leads (3) resonant cavity (4) is identical, corresponding 1 resonant cavity (4) of 1 outgoing waveguide (3)；All resonant cavities (4) and
The size of its internal metal film block (5) is consistent；
Incident waveguide (2) is strip；The front end of incident waveguide (2) extends to the edge of metallic film (1), incident waveguide
(2) rear end extends to the middle part of metallic film (1)；
Each resonant cavity (4) is circle；Resonant cavity (4) distribution is arranged in the two sides and rear end of incident waveguide (2)；Each resonance
The metal film block (5) of 1 rectangle is embedded with inside chamber (4), and metal film block (5) is located at the center of resonant cavity (4)；
Each outgoing waveguide (3) is strip；It is each outgoing waveguide (3) front end and its corresponding to resonant cavity (4) relatively,
The rear end of each outgoing waveguide (3) extends to the edge of metallic film (1)；
There is certain distance between resonant cavity (4) and incident waveguide (2) and outgoing waveguide (3), and is emitted the extension of waveguide (3)
Direction is vertical with the extending direction of incident waveguide (2) and on same straight line.
2. a kind of plasmon resonance wavelength division multiplexer according to claim 1, characterized in that metal film block (5) is
Strip rectangle.
3. a kind of plasmon resonance wavelength division multiplexer according to claim 1 or 2, characterized in that metal film block (5)
Symmetrical centre and the symmetrical centre of resonant cavity (4) coincide.
4. a kind of plasmon resonance wavelength division multiplexer according to claim 1, characterized in that incident waveguide (2) and
It is all to be emitted the of same size of waveguide (3).
5. a kind of plasmon resonance wavelength division multiplexer according to claim 4, characterized in that resonant cavity (4) it is straight
Diameter is equal to twice of the width of incident waveguide (2) and the width of outgoing waveguide (3).
6. a kind of plasmon resonance wavelength division multiplexer according to claim 1, characterized in that outgoing waveguide (3) with
The distance between resonant cavity (4) is equal to the distance between the resonant cavity (4) and incident waveguide (2).
7. a kind of plasmon resonance wavelength division multiplexer according to claim 1, characterized in that be arranged in incident waveguide
(2) number of the resonant cavity (4) of two sides is identical.
8. a kind of plasmon resonance wavelength division multiplexer according to claim 7, characterized in that resonant cavity (4) is entering
The two sides that ejected wave leads (2) are arranged in mirror symmetry.
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| CN109324368A (en) * | 2018-08-15 | 2019-02-12 | 桂林电子科技大学 | A kind of logic output light source based on plasma filled waveguide |
| CN109212664B (en) * | 2018-10-30 | 2020-08-25 | 中天通信技术有限公司 | Bilateral coupling resonant cavity T-shaped wavelength division multiplexer based on plasmon |
| CN110146468B (en) * | 2019-05-14 | 2022-05-17 | 桂林电子科技大学 | Surface plasma optical fiber sensor with circular composite hole array structure |
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| CN106019473A (en) * | 2016-07-14 | 2016-10-12 | 陕西师范大学 | Micro-nano-structured wave division multiplexer based on Ag/air medium |
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