CN106019473A - Micro-nano-structured wave division multiplexer based on Ag/air medium - Google Patents
Micro-nano-structured wave division multiplexer based on Ag/air medium Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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Abstract
The invention relates to a micro-nano-structured wave division multiplexer based on an Ag/air medium, which comprises a waveguide substrate. A light wave incident channel is arranged on the waveguide substrate along a direction parallel with the central axis; n resonant cavities which can be coupled with incident light waves are processed at one side or two sides of the light wave incident channel, and n is no smaller than 1; the outer wall of the waveguide substrate is provided with light wave emergent channels corresponding to the resonant cavities. The interaction between light waves and free electrons on the surface of metal Ag is used, a coupling effect happens to the light and the Ag medium surface, the light is coupled to enter the resonant cavities and then outputted from the light wave emergent channels, the light can be used more highly, more than 80% of light can be outputted through the coupling effect, output of pulsed light with a fixed wavelength from a specified channel is realized through output of different light wave emergent channels, light of multiple different directions can be outputted in one resonant cavity, the practicability of the structure is greatly enhanced, the light wave output direction can be changed, and multichannel output can be realized.
Description
Technical field
The invention belongs to technical field of photo communication, be specifically related to a kind of based in the micro-nano knot of Ag/ air dielectric
Structure wavelength division multiplexer.
Background technology
Wavelength division multiplexer is one of optical communication field important devices with light sensor measuring field, leads in optic communication
Territory, wavelength division multiplexer realizes tens times, the channel of hundred times in the case of laying light network without increase
Dilatation, in light sensor measuring field, the microminiature spectroanalysis instrument with wavelength division multiplexer as core can be applicable to food
The detection of product safety detection, mine safety, air Water Pollution Monitoring, medical science detection etc..
The most conventional light wavelength division multiplexing has medium membranous type and grating type, and wherein medium membranous type is commonly used
Solution is that thin film filters (TFF) technology, and its light beam order of reflection in transmitting procedure all differs,
The optical path of each wavelength light beam is different, and Stimulated Light device chip, collimating lens and the position angle of diaphragm
Degree impact (as offset because of thermal expansion), light beam order of reflection too much can cause beam deviation amount excessive,
Causing light beam unstable, the reliability causing wavelength division multiplexer is relatively low.
Grating type wavelength division multiplexer stable performance, it is prone to batch production, low cost, is suitable for doing dense wavelength division
Multiplexing and be widely studied and apply, such as array waveguide grating, it is by a M channel pattern multiplexer
Part combines with M wavelength division multiplex device, thus overall channel number is doubled.But the deficiency of this mode
It is that required wavelength division multiplex device quantity is big, causes integral device size relatively big, and difficult during actual fabrication
Completely the same to ensure large number of AWG.
Above-mentioned medium membranous type and the wavelength division multiplexer of grating type all exist that size is relatively big, composition is higher and ties
The problems such as structure is complicated, stability difference.Therefore, micro-to wavelength division multiplexer of existing communication integration field
Coordination between type, integrability and stable performance just becomes the bottleneck of technology development.
Chinese patent CN105388562A discloses a kind of efficiently photonic crystal 1.31/1.55 μm wavelength-division multiplex
Device, the dielectric posts of total is with triangular crystal lattice structural arrangement, lattice paprmeter a=0.6 μm, dielectric posts half
Footpath r=0.12 μm, Refractive Index of Material is 2.95, and its length direction contains 29 or 30 dielectric posts, width
Direction contains 14 dielectric posts, wherein: removes the 6th row's dielectric posts reciprocal and introduces a Luciola substriata, for waveguide I；
Removing positive number the 6th row's mid portion dielectric posts, both sides respectively retain 4, form one and put down with waveguide I
The waveguide of row, draws at right-hand member, for waveguide II；Two row's medium cylindricalitys it are spaced between waveguide I and waveguide II
Interaction area, two waveguides is become to constitute direction Coupled Passive Waveguide Structure.But this kind of structure is only capable of being maintained at micron
Magnitude, for nano level applied environment, it still can not meet, and the transmitance of its light is the highest, shadow
Ring the efficiency of transmission of light.
Summary of the invention
In order to solve the size of existing wavelength division multiplexer difficulty big, integrated, the problem of poor stability, the present invention
Configuration performance little, integrated is good, light utilization efficiency is high and can process single or multiple light letter simultaneously to provide one
Number the micro-nano structure wavelength division multiplexer based on Ag/ air dielectric of wavelength.
The present invention realizes above-mentioned purpose and be employed technical scheme comprise that this micro-nano structure based on Ag/ air dielectric
Wavelength division multiplexer includes waveguide matrix, is provided with light on waveguide matrix on the direction parallel with central shaft
Ripple incidence channel, being machined with n in the side of light wave incidence channel or both sides can be with incident light wave generation coupling
The resonant cavity of cooperation, n >=1, the outer wall of waveguide matrix is provided with light wave outgoing corresponding with resonant cavity
Passage.
Above-mentioned resonant cavity can be tetragon, it is also possible to be circular or circular ring structure.
When resonant cavity is the circular resonant cavity being set up in parallel, the diameter of resonant cavity is along with light wave incidence light path
Extend cumulative, meet between radius R and number i of resonant cavity of resonant cavity: Ri=180+10 × (i-1).
Further, meet between radius R and incident wavelength λ of resonant cavity: λi=0.99Ri+ 20 (i-1)+572,
Incident wavelength is 700～1300nm.
The outbound course of above-mentioned light wave exit channel is formed with the light incident direction of light wave incidence channel
The angle of 60～120 °.
Spacing G between above-mentioned resonant cavity and light wave incidence channel is 5～20nm.
Compared with prior art, the invention has the beneficial effects as follows:
(1) wavelength division multiplexer of the present invention is based on Ag/ air dielectric, and its structure is little, can realize nanoscale
Magnitude, and configuration is simple, and integration is higher, has preferable application prospect in terms of communication integrated optical circuit.
(2) present invention is light when propagating in the waveguide, utilizes the phase of light wave and metal Ag surface free electron
Interaction, light and Ag dielectric surface generation coupling, be optically coupled into resonant cavity, and then go out from light wave
Penetrating passage output, the utilization making light is higher, has the light more than 80% can be exported by coupling.
(3) present invention can process the optical signal of single or multiple wavelength simultaneously, squeezes into from light wave incidence channel
During the light of a branch of fixed wave length, as long as reaching the resonant wavelength of resonant cavity, light just can reach resonant wavelength
That resonant cavity at there is coupling, enter corresponding resonant cavity, thus light beam separated, pass through
Different light wave exit channels exports, and then the pulsed light realizing fixed wave length exports from the passage specified, also
The light that multiple directions are different can be exported, it is achieved multichannel exports, and can pass through on a resonant cavity
Adjust the outbound course of the Angulation changes light wave of light wave output channel, be greatly reinforced the practicality of structure.
Accompanying drawing explanation
Fig. 1 is the structural representation of the wavelength division multiplexer of embodiment 1.
Fig. 2 is wavelength output schematic diagram of light wave when being 750nm.
Fig. 3 is wavelength output schematic diagram of light wave when being 810nm.
Fig. 4 is wavelength output schematic diagram of light wave when being 880nm.
Fig. 5 is wavelength output schematic diagram of light wave when being 500nm.
Fig. 6 is the structural representation of the wavelength division multiplexer of embodiment 2.
Fig. 7 is the structural representation of the wavelength division multiplexer of embodiment 3.
Fig. 8 is the structural representation of the wavelength division multiplexer of embodiment 4.
Fig. 9 is the output schematic diagram of the light wave of Fig. 8.
Figure 10 is the structural representation of the wavelength division multiplexer of embodiment 5.
Detailed description of the invention
In conjunction with drawings and Examples, technical scheme is further described, but the present invention is not
It is only limitted to following enforcement situation.
Embodiment 1
As shown in Figure 1, the micro-nano structure wavelength division multiplexer based on Ag/ air dielectric of the present embodiment, including
The waveguide matrix 1 of horizontal positioned, the waveguide matrix 1 of the present embodiment is to use Ag substrate, at waveguide matrix 1
On along being machined with the light wave incidence channel 3 of a diameter of 50nm on the direction parallel with central shaft, at light wave
The side of incidence channel 3 is machined with 3 circular resonant cavities 2 side by side, and it is empty that resonant cavity 2 is filled with air dielectric
Chamber, its diameter is cumulative along with the prolongation of light wave incidence light path, and the radius R of resonant cavity 2 is individual with resonant cavity 2
Meet between number i: Ri=180+10 × (i-1), meets between radius R and incident wavelength λ of resonant cavity 2:
λi=0.99Ri+ 20 (i-1)+572, i.e. the radius R of first resonant cavity 2 of the present embodiment1=180nm, second
The radius R of individual resonant cavity 22=200nm, the radius R of the 3rd resonant cavity 23=220nm, 3 resonant cavities
Spacing between 2 with light wave incidence channel 3 is equal, is G=10nm, on the outer wall of waveguide matrix 1
It is provided with and resonant cavity 2 light wave exit channel one to one, i.e. 3 the most corresponding 3 light of resonant cavity 2
The outbound course of 4,3 light wave output channels 4 of ripple output channel and the light incident direction of light wave incidence channel 3
Vertically, spacing d between 3 resonant cavities 2 and light wave exit channel is equal between light wave incidence channel 3
Spacing G, d=G.
See Fig. 2, when squeezing into a branch of pulse broadband light from light wave incidence channel 3, λ=750nm, light from
Go out inside first resonant cavity 2, and do not enter into resonant cavity 2 below, i.e. light beam just reaches first
, there is coupling with first resonant cavity 2 in the resonant wavelength of individual resonant cavity 2, enters into first resonance
In chamber 2, and then export from first light wave output channel 4.
See Fig. 3, when squeezing into a branch of pulse broadband light from light wave incidence channel 3, λ=810nm, light from
Go out inside second resonant cavity 2, i.e. light beam just reaches the resonant wavelength of second resonant cavity 2, with
There is coupling in two resonant cavities 2, enters in second resonant cavity 2, and then defeated from second light wave
Go out passage 4 to export.
See Fig. 4, when squeezing into a branch of pulse broadband light from light wave incidence channel 3, λ=880nm, light from
Go out inside 3rd resonant cavity 2, i.e. light beam just reaches the resonant wavelength of the 3rd resonant cavity 2, with
There is coupling in three resonant cavities 2, enters in the 3rd resonant cavity 2, and then defeated from the 3rd light wave
Go out passage 4 to export.
See Fig. 5, when squeezing into a branch of pulse broadband light from light wave incidence channel 3, λ=500nm, pulse
When broadband light is by straight wave guide, coupling, i.e. light is not occurred not to enter into resonant cavity 2 with resonant cavity 2
In, but directly by waveguide, absorbed by border.
Thus illustrating, the wavelength division multiplexer of the present embodiment can realize orientation output and can process many simultaneously
The optical signal of individual wavelength.
Embodiment 2
See Fig. 6, the waveguide matrix 1 of the present embodiment be a thickness be the rectangular sheet of 50nm, adopt
Use Ag substrate, waveguide matrix 1 is 50nm along being machined with width on the direction parallel with central shaft
Light wave incidence channel 3, be machined with 3 annular resonant cavities 2 side by side in the side of light wave incidence channel 3,
Resonant cavity 2 is filled with air dielectric cavity, and its diameter is cumulative along with the prolongation of light wave incidence light path, i.e. this reality
Execute the external diameter R of first resonant cavity 2 of exampleOutside 1=180nm, internal diameter RIn 1=150nm, second resonant cavity 2
External diameter ROutside 2=200nm, internal diameter RIn 2=170nm, the external diameter R of the 3rd resonant cavity 2Outside 3=220nm,
Internal diameter RIn 3=180nm, the spacing between 3 resonant cavities 2 and light wave incidence channel 3 is equal, is G=20
Nm, is provided with and resonant cavity 2 light wave exit channel one to one, i.e. 3 on the outer wall of waveguide matrix 1
The outbound course of the most corresponding 4,3 the light wave output channels 4 of 3 light wave output channels of individual resonant cavity 2 and light
The light incident direction of ripple incidence channel 3 is vertical, spacing d between 3 resonant cavities 2 and light wave exit channel
It is equal to spacing G between light wave incidence channel 3, d=G.
Operation principle is same as in Example 1.
Embodiment 3
See Fig. 7, the waveguide matrix 1 of the present embodiment be a thickness be the square sheets of 50nm, adopt
Use Ag substrate, waveguide matrix 1 is 50nm along being machined with width on the direction parallel with central shaft
Light wave incidence channel 3, be machined with circular resonant cavity 2 respectively in the both sides up and down of light wave incidence channel 3, altogether
Shake and be full of air dielectric cavity in chamber 2, according to upper resonant cavity group 2-1 of its distributing position distribution and low-resonance chamber
Group 2-2, upper resonant cavity group 2-1 includes the upper resonant cavity of circular resonant cavity 2,3 of 3 equidistant distributions
The diameter of 2 is cumulative along with the prolongation of light wave incidence light path, the radius R of resonant cavity 2 and the number of resonant cavity 2
Meet between i: Ri=180+10 × (i-1), meets between radius R and incident wavelength λ of resonant cavity 2:
λi=0.99Ri+ 20 (i-1)+572, i.e. the radius R of first resonant cavity 2 of the present embodiment1=180nm, second
The radius R of individual resonant cavity 22=200nm, the radius R of the 3rd resonant cavity 23=220nm, 3 resonant cavities
Spacing between 2 with light wave incidence channel 3 is equal, is G=10nm.Light wave incidence channel 3 times
Side be also machined with by 3 with the upper resonant cavity 2 low-resonance chamber group that low-resonance chamber group 2-2 becomes one to one
2-2, low-resonance chamber 2 is consistent with the diameter of upper resonant cavity 2, is satisfied by Ri=180+10 × (i-1), resonant cavity
Meet between radius R and incident wavelength λ of 2: λi=0.99Ri+20(i-1)+572.Resonant cavity on each
2 and the outside in low-resonance chamber 2 be all machined with and resonant cavity 2 light wave exit channel one to one, i.e.
It is provided with on the upper and lower sides outer wall of waveguide matrix 1 and upper resonant cavity 2 and low-resonance chamber 2 light wave one to one
Exit channel so that when entering light wave incidence channel 3 and reaching resonant wavelength, with upper and lower resonant cavity 2
Raw coupling, enters in respective resonant chamber 2, and light wave output channel 4 that can be corresponding from upper and lower both sides exports.
Embodiment 4
See Fig. 8 and 9, the present embodiment waveguide matrix 1 waveguide matrix 1 be use Ag substrate, be one long
Be 2 μm, a width of 200nm, thickness is the thin slice of 50nm, on waveguide matrix 1 along with central shaft
The light wave incidence channel 3 that width is 50nm it is machined with, upper in light wave incidence channel 3 on parallel direction
Side is machined with the circular resonant cavity 2 of 1 full air dielectric, resonant cavity 2 resonant cavity 2 resonant cavity 2 and light
Spacing between ripple incidence channel 3 is 20nm, and resonant cavity 2 light wave incidence channel 3 is at waveguide matrix 1
Be machined with 3 light wave exit channels corresponding with resonant cavity 2 on the outer wall of upside, 3 light wave exit channels and
Angle between light wave incidence channel 3 is respectively 60 °, 90 ° and 120 °, when waveguide matrix 1 resonant cavity
2 resonant cavity 2 light wave incidence channel 3 resonant cavity 2 light wave incidence channel 3 resonance waves are entered by coupling
Can reach to change light from 3 different directions through different light wave exit channel output after resonant cavity 2
The purpose of ripple outbound course, and realize multi-direction output.
Other design and operation principle thereof are same as in Example 1.
Embodiment 5
The present embodiment waveguide matrix 1 is to use Ag substrate, is a length of 2 μm, a width of 200nm,
Thickness is the thin slice of 50nm, sees Figure 10, along on the direction parallel with central shaft on waveguide matrix 1
It is machined with the light wave incidence channel 3 of a diameter of 50nm, in the upper side and lower side of light wave incidence channel 3 respectively
It is machined with the square resonant cavity 2 groups of full air dielectric, is i.e. respectively upper resonant cavity group 2-1 and low-resonance chamber
Group 2-2, the spacing between upper resonant cavity group 2-1 and light wave incidence channel 3 is 5nm, low-resonance chamber group 2-2
And the spacing between light wave incidence channel 3 is 10nm, upper resonant cavity group 2-1 is just not waited by 3 length of sides
Square upper resonant cavity group 2-1 becomes, and low-resonance chamber group 2-2 is the square low-resonance chamber do not waited by 3 length of sides
Group 2-2 becomes, and is machined with the upper light wave outgoing corresponding with upper resonant cavity 2 on the upside outer wall of waveguide matrix 1
Passage, each upper resonant cavity 2 is to having 3 upper light wave exit channels, the 3 of each upper resonant cavity 2 correspondence
Angle between individual upper light wave exit channel and light wave incidence channel 3 is respectively 60 °, 90 ° and 120 °,
60 ° in like manner, is machined with the lower light wave outgoing corresponding with low-resonance chamber 2 on the downside outer wall of waveguide matrix 1
Passage, each low-resonance chamber 2 to there being 3 lower light wave exit channels, the 3 of each low-resonance chamber 2 correspondence
Angle between individual lower light wave exit channel and light wave incidence channel 3 is respectively 60 °, 90 ° and 120 °,
60 ° i.e. resonance wave can be from 3 different directions through different after entering resonant cavity 2 by coupling
Light wave exit channel exports, and reaches to change the purpose of light wave outbound course, and realizes multi-direction output.
Other design and operation principle thereof are same as in Example 1.
The number of the resonant cavity in above-described embodiment can determine according to the size of waveguide matrix, can be 1
Can also be multiple, it addition, the angle of the number of light wave output channel and output can also be answered according to reality
It is determined by demand, the outbound course of light wave can be changed by the angle of light wave output channel and number,
And multichannel output can be realized.
Claims (6)
1. a micro-nano structure wavelength division multiplexer based on Ag/ air dielectric, including waveguide matrix (1), its
It is characterised by: on waveguide matrix (1), on the direction parallel with central shaft, be provided with light wave incidence channel
(3), the one or both sides in light wave incidence channel (3) are machined with n and can couple work with incident light wave
Resonant cavity (2), n >=1, the outer wall of waveguide matrix (1) is provided with corresponding to resonant cavity (2)
Light wave exit channel.
Micro-nano structure wavelength division multiplexer based on Ag/ air dielectric the most according to claim 1, it is special
Levy and be: described resonant cavity (2) is circular or tetragon or circular ring structure.
Micro-nano structure wavelength division multiplexer based on Ag/ air dielectric the most according to claim 2, it is special
Levy and be: described resonant cavity (2) is the circular resonant cavity (2) being set up in parallel, and resonant cavity (2)
Diameter is cumulative along with the prolongation of light wave incidence light path, and the radius R of resonant cavity (2) is individual with resonant cavity (2)
Meet between number i: Ri=180+10 × (i-1).
Micro-nano structure wavelength division multiplexer based on Ag/ air dielectric the most according to claim 3, its feature
It is between radius R and incident wavelength λ of described resonant cavity (2) to meet: λi=0.99Ri+ 20 (i-1)+572,
Incident wavelength is 700～1300nm.
Micro-nano structure wavelength division multiplexer based on Ag/ air dielectric the most according to claim 1, it is special
Levy and be: the outbound course of described light wave exit channel is formed with the light incident direction of light wave incidence channel (3)
The angle of 60～120 °.
Micro-nano structure wavelength division multiplexer based on Ag/ air dielectric the most according to claim 1, it is special
Levy and be: spacing G between described resonant cavity (2) and light wave incidence channel (3) is 5～20nm.
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| CN108519716A (en) * | 2018-05-24 | 2018-09-11 | 华南师范大学 | A kind of optical logic device and method of the more bit inputs of micro-cavity structure |
| CN109212664A (en) * | 2018-10-30 | 2019-01-15 | 南京邮电大学 | A kind of bilateral coupled resonator T-wave division multiplexer based on phasmon |
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| CN109212664A (en) * | 2018-10-30 | 2019-01-15 | 南京邮电大学 | A kind of bilateral coupled resonator T-wave division multiplexer based on phasmon |
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