CN101083511B - Cone fiber microball type optical add-drop multiplexer and method of manufacture - Google Patents
Cone fiber microball type optical add-drop multiplexer and method of manufacture Download PDFInfo
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- CN101083511B CN101083511B CN2006100849574A CN200610084957A CN101083511B CN 101083511 B CN101083511 B CN 101083511B CN 2006100849574 A CN2006100849574 A CN 2006100849574A CN 200610084957 A CN200610084957 A CN 200610084957A CN 101083511 B CN101083511 B CN 101083511B
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Abstract
The invention belongs to the light guide and other optical element's installment, especially belongs to the multiplexer and its manufacture method for the installment which has the wave length choosing function. The invention is an awl optical fiber micro-balloon multiplexer, which includes optical fiber, the micro-balloon. Its structural features are that it also has a load bearing substrate. On the load bearing substrate there are many parallel V die for holding the optical fiber. Between two V dies, open a depression for hold 1 to 2 micro-balloons. The optical fiber fixes in V die. The pit longitudinal pitch is bigger than 3 times of micro-balloon diameter. The micro-balloons fixes in the pit. Two neighbor optical fiber's waist parallel to equatorial of micro-balloon. The virtue of the invention is: the spectral line band width is narrow, wave length channel is small, suit for fiber optic communications with crowded wave channel. The processing for the inputs and output light is convenient and the structure is compact, which can carry on the industrialization production and has good usability.
Description
Technical field
The invention belongs to the device of photoconduction and other optical element, especially belong to optical add/drop multiplexer and manufacture method thereof that wavelength selection system is arranged.
Background technology
Optical add/drop multiplexer (Optical Add/Drop Multiplexer---OADM) is meant the device (or equipment) that can make light wavelength channel tell and insert in wavelength-division multiplex system, be a kind of passive device.Current society is an information society, and the increase of quantity of information promotes the development of optical communication, and requires more and more intensive channel spacing is provided, as the dense wavelength division multiplexing system of 10GHz.This has also proposed more and more narrow spectral line width and more and more littler spectral line requirement at interval to passive device, the OADM of the inteferometer coating filter plate type that uses is for adapting to more and more narrow bandwidth requirement at present, constantly increase different media coatings, even reach nearly hundred layers, difficulty continues to increase, the cost straight line rises, and the OADM that seeks narrow-band filtering is imperative.
Optical medium microballoon (diameter from tens μ m to hundreds of μ m) resonator cavity all causes people's concern more and more widely in basic scientific research field and the integrated application of photonics, (can reach 1 * 10 because exist a series of special high-quality-factors (Q value) in the microballoon intra resonant cavity
9) and the unusual claustra mould of small mode volume, be called for short the WG mould.The frequency of these WG patterns and the size of microballoon, medium refraction index are relevant, are called the shape characteristic resonance line of microballoon.The microballoon resonator cavity of high Q value has determined that shape characteristic resonance spectrum live width is very little, possesses the potential possibility that is made as narrow-band filtering OADM.
When signal light-wave is the shape characteristic resonance spectrum, just form resonance with microcavity, can be coupled into/go out microcavity.But the optical field distribution on the pairing nearly ball of WG pattern surface is the ripple that dies a flash (suddenly), is not propagation wave.Therefore, if signal light-wave with plane wave mode direct irradiation microballoon resonator, fail to be coupled in the WG pattern owing to very most of light passes the microballoon chamber, thereby coupling efficiency is very low.Must adopt a kind of near-field coupler, it produces the ripple that dies in wink (suddenly), can very high coupling efficiency be arranged with the WG pattern in microballoon chamber.At present, confirm that by experiment effective near-field coupler is biconical fiber (hereinafter to be referred as an awl optical fiber), will bore like this that optical fiber and microballoon are combined just can to constitute a kind of efficient arrowband OADM.
Existing cone fiber microball type optical add-drop multiplexer as shown in Figure 1, the awl waist of two conical fibers and a SiO
2Microballoon is parallel tangent at its equatorial plane opposite position.When certain wavelength of optical signal in the optic fibre input end mouth 23 and microballoon chamber generation resonance (frequency equals its shape characteristic spectrum), this wavelength just is coupled into microballoon, and tell from telling (Drop) port 25, the light of identical wavelength inserts from inserting (Add) port 26, just, realized Add/Drop to a wavelength from output port 24 outputs.At present, this optical add/drop multiplexer is just adjusted fixing to realize its function in the laboratory by the inching frame, can't carry out suitability for industrialized production, poor practicability.
Summary of the invention
The object of the invention is to overcome above-mentioned shortcoming, provides a kind of and can carry out the cone fiber microball type optical add-drop multiplexer of suitability for industrialized production, and its manufacture method is provided.
The technical solution adopted in the present invention is a kind of cone fiber microball type optical add-drop multiplexer, comprise optical fiber, microballoon, its structural feature is, it also has a carrying substrates, every optical fiber middle part drawing-down tapering forms awl optical fiber, on carrying substrates, be shaped on a plurality of parallel V-type grooves that can receiving optical fiber, middle part between two V-type grooves has 1--2 the pit that can hold microballoon, optical fiber is fixed in the V-type groove, the longitudinal pitch of pit is greater than 3 times microsphere diameter, microballoon is fixed in the pit, and the awl waist of adjacent two optical fiber is parallel tangent at the equatorial plane opposite position of microballoon with microballoon.
But the present invention's specific design is:
The awl optical fiber that it is made by three optical fiber, two SiO that have fixed handle
2Microballoon, a carrying substrates is formed, the material selection crystal orientation of carrying substrates is＜100〉monocrystalline silicon, be etched with three parallel V-type grooves, the top width of V-type groove is greater than 0.82 times of the optical fiber external diameter, the best is 1.22 times, 1--2 pit arranged between the V-type groove in twos, pit depth is the microballoon radius, pit centres has a small through hole, the fixed handle of microballoon passes small through hole and fixing, article three, the optical fiber spaced and parallel is fixed in the V-type groove of carrying substrates, the equatorial plane of awl awl waist of optical fiber and microballoon on same surface level, the awl waist of adjacent two optical fiber respectively with SiO
2The equatorial plane of microballoon is parallel tangent.
Can select different microballoons to reach the purpose of selecting the different wave length light signal.
Above-mentioned cone fiber microball type optical add-drop multiplexer manufacture method, comprise awl optical fiber, microballoon, the making of carrying substrates and assembling thereof, the method for making of its carrying substrates is: utilizing the crystal orientation is that＜100〉monocrystalline silicon anisotropic etch characteristic is made V-type groove and pit, manufacture craft is: the mask plate that is designed for photoetching, when selecting the eurymeric photoresist, the photic zone figure of mask plate is similar to the actual figure that will corrode formation, calibration has the V-type groove of placing optical fiber and the photic zone of placing the pit of microballoon on the mask plate, be used for the V-type groove of photoetching corrosion placement optical fiber on silicon chip and the pit of placement microballoon, photoetching process is: earlier monocrystalline silicon is grown SiO with oxidizing process
2Layer, resist coating, oven dry covers mask plate, ultraviolet exposure is taken mask plate away, to carrying substrates develop, rinsing, oven dry, with HF acid corrosion SiO
2, remove photoresist, with Tetramethylammonium hydroxide (TMAH) corrosion silicon, form the V-type groove of placing optical fiber and the pit of placing microballoon.
When microballoon is fixed on the fixed handle, must make the small through hole that is used for fixing fixed handle at carrying substrates, can adopt the dual surface lithography legal system to make small through hole, also can make of laser boring.
The technology of making small through hole with the dual surface lithography legal system is: the 2nd mask plate and the 3rd mask plates that are designed for the photoetching small through hole, when selecting negative photoresist, 2nd, the calibration of 3 mask plates has the light tight district of the small through hole of placing the microballoon fixed handle, be used for pit just, back side photoetching corrosion small through hole, photoetching process is: the carrying substrates of making V-type groove and pit is carried out oxidation again, at V-type groove and pit bottom growth SiO
2Layer, adopt negative photoresist, double spread is dried, is covered the 2nd mask plate, ultraviolet exposure at the back side of carrying substrates V-type groove, take the 2nd mask plate away, with carrying substrates upset one side, cover the 3rd mask plates, ultraviolet exposure, take the 3rd mask plates away, carrying substrates is developed, rinsing, oven dry, corrodes SiO with hydrofluorite
2, remove photoresist, Tetramethylammonium hydroxide (TMAH) corrosion silicon forms small through hole.
The graphic designs of three mask plates: when adopting eurymeric glue, the photic zone figure of mask plate is similar to the actual figure that will corrode formation, for: there is width identical with V-type channel opening width some rectangular vertically, transversely be furnished with the pit horizontal stripe of placing microballoon at interval, the center distance of two taeniaes be diameter of micro ball with awl optical taper waist diameter and, the center distance of two horizontal stripes is greater than 3 times microsphere diameter, the width of horizontal stripe equals 1.6-2 times of microballoon radius, when adopting minus glue, its light tight district figure of the 2nd mask plates is a square, the length of side is directly proportional with the thickness of diameter of micro ball and carrying substrates, two squares are not worn and are linked as limit during with corrosion, be spaced apart 50 μ m between general two squares, foursquare center overlaps with the center of mask plate pit; The light tight district figure of the 3rd mask plates is: circular identical with the fixed handle diameter of diameter or be this circular circumscribed square, the center is identical with the center of mask plate pit.
The method for making of microballoon is: sintering is carried out with electric arc (or laser) in the termination of optical fiber form microballoon, become the microballoon of band handle.
Its assembling process is 1. putting into of microballoon: be coated with a little ultra-violet curing glue in the junction of optical fiber and microballoon, clamp fixing microballoon optical fiber handle with tweezers, by magnifier optical fiber is passed small through hole on the silicon chip pit; 2. bore optical fiber and be placed into the V-type groove: at first will bore optical fiber and be fixed on the fixture, then this fixture and the carrying substrates of making respectively are fixed on the fine adjustment frame, regulate the fine adjustment frame respectively, examine under a microscope awl optical fiber and microballoon simultaneously, make awl waist and microballoon tangent, the outer part of awl drops in the V-type groove; 3. bore after optical fiber puts into the V-type groove, block ultra-violet curing glue on the part place point, with uv-exposure light irradiation ultra-violet curing glue 30 seconds, with microballoon and bore optical fiber and fix at the outer V-type groove of awl.
A kind of packaging technology of cone fiber microball type optical add-drop multiplexer, its main points are: should select temperature characterisitic and optical fiber and micro-sphere material to be complementary during encapsulation, refractive index also should be hanged down the material of hand optical fibre refractivity as packing material, can acryl resin, epoxy resin be arranged for the adhesive that adopts, encapsulating material is selected silicon elastic resin, fluorinated polymer, silicone oil and glycerine for use, and wherein the silicon elastic resin can be suitable for as the filler clad material of holding concurrently most.
The invention has the advantages that to input, output optical processing conveniently, simply, compact conformation can carry out suitability for industrialized production, practicality is good.Learn by test, coupling efficiency to light between resonance wavelength awl optical fiber and microballoon can reach 90%, with present commercial inteferometer coating filter plate type, and fiber grating+annular type OADM compares, spectral bandwidth of the present invention is narrow, it is little to tell the loss of insertion wavelength channel, very little to the through connect signal wavelength loss, is fit to the optical fiber communication of intensive wavelength channel.
Description of drawings
Fig. 1 is existing cone fiber microball type optical add-drop multiplexer theory structure synoptic diagram
Fig. 2 is the structural representation of fixture
Fig. 3 is a theory structure synoptic diagram of the present invention
Fig. 4 is the structural representation of the embodiment of the invention 2
Fig. 5 is the structural representation of the embodiment of the invention 3
Fig. 6 is the synoptic diagram of embodiment 3 mask plate photic zones
Fig. 7 is the synoptic diagram in the light tight district of embodiment 3 the 2nd mask plates
Fig. 8 is the synoptic diagram in the light tight district of embodiment 3 the 3rd mask plates
Fig. 9 is the structural representation of the embodiment of the invention 4
Wherein: 25 fens outbound ports 26 of 1 carrying substrates 11V type groove, 12 pits, 14 small through hole, 15 mask plates 16 the 2nd mask plates 17 the 3rd mask plates 2 optical fiber, 21 awl waists, 23 input ports, 24 output ports insert port 3 microballoons 31 fixed handles 4 fixtures 41 side frames
Embodiment
A kind of cone fiber microball type optical add-drop multiplexer, it is by carrying substrates 1, optical fiber 2, microballoon 3 is formed, every optical fiber middle part drawing-down tapering forms awl optical fiber, on carrying substrates 1, be shaped on the V-type groove 11 of many parallel energy receiving optical fibers 2, two V-type groove center spacings be microballoon 3 diameter and awl optical taper waist 21 diameters and, optical fiber 2 is fixed in the V-type groove 11, middle part between two V-type grooves has 1 or 2 pit 12 that can hold microballoon 3, the longitudinal pitch of pit 12 is greater than 3 times microballoon 3 diameters, microballoon 3 is fixed in the pit 12, and the awl waist 21 of adjacent two optical fiber is parallel tangent at the equatorial plane opposite position of microballoon with microballoon 3.
Can also further design: the material selection crystal orientation of carrying substrates 1 is＜100〉monocrystalline silicon, thickness is 350 μ m--500 μ m, the awl waist diameter of awl optical fiber may be selected to be 1.5--5 μ m, the top width of V-type groove 11 is greater than 0.82 times of the optical fiber external diameter, pit 12 centers have a small through hole 14, there is a fixed handle 31 lower end of microballoon 3, and fixed handle 31 passes small through hole 14 and fixing.
Can select different microballoons to reach to select the purpose of different wave length light signal, selected light signal is carried out light branch/insert multiplexing.
Above-mentioned cone fiber microball type optical add-drop multiplexer manufacture method comprises the making and the assembling of awl optical fiber 2, microballoon 3, carrying substrates 1, for satisfying the requirement of identical propagation constant, can make awl optical fiber and microballoon with identical common communications standard fiber.
1, the making of awl optical fiber has three kinds of methods at present, is respectively:
1. hydrofluorite (HF) etch
Its operation steps is: (1) peels off about 4cm with the plastic coat layer of optical fiber with the optical fiber hoe scaler, and with absolute ethyl alcohol cotton balls wiped clean, and be fixed in the fixture 4; (2) preparation HF solution, proportioning is: hydrofluorite: ammonium fluoride: deionized water=3 (ml): 6 (g): 10 (ml), adding ammonium fluoride is to make smooth surface for buffered etch; (3) this section bare fibre is dipped in the HF acid solution of vessel, vessel are placed on the moveable platform.The length of corrosion region and tapering can be controlled by changing the fiber lengths that soaks HF solution.(4) in corrosion process, corrosion quality and process will and be measured and monitor by luminous power wherein by microscopic examination.In the time of will ending to corrode, then optical fiber be mentioned at every turn, use deionized water rinsing, oven dry is put into microscopically then and observes, measures, and whole process is at room temperature carried out.
2. flame heating extension
Employing draws awl mechanism to make awl optical fiber.Parameters such as its draw speed, tensile elongation, flame movement speed all can be provided with by computing machine.
3. CO
2LASER Light Source adds hot-drawing method
Use CO
2Laser instrument is as heated light sources, and is clean, controlled, starting is fast, noninertia, and point source of light is equipped with the heating of programmed control vibration mirror scanning, can produce the awl optical fiber of arbitrary taper and awl waist.
2, the preparation of optics microballoon mainly contains dual mode:
(1) high-temperature melting method; High-temperature fusion is mainly used in the preparation of silicon dioxide microsphere.Adopt high-temperature electric arc, clean flame, CO
2A kind of in the laser instrument comes the heating optical fiber end.High temperature forms the sphere than standard with the optical fiber connector partial melting under surface tension effects, be the microballoon of a band optical fiber handle after the cooling.This method can obtain expecting microballoon diameter, that circularity is higher, and its smooth surface, clean has low light WGM loss.
(2) sol-gel process, microballoon refractive index and radius that this method is made can be controlled, but homogeneity and sphericity all await improving.
After the microballoon preparation, its resonance frequency just determined, in order to regulate resonance frequency, can adopt to change temperature and stress and the radius of ball or refractive index are changed regulate resonance frequency.
3, the method for making of carrying substrates is:
Select for use＜100〉monocrystalline silicon, utilizing the crystal orientation is that＜100〉monocrystalline silicon anisotropic etch characteristic is made V-type groove 11 and pit 12.So-called anisotropic etch characteristic is meant: because atomic arrangement density difference has caused the silicon single crystal anisotropy on the various crystal faces, show as the corrosion rate difference highlightedly.During anisotropic etchant corrosion monocrystalline silicon, there is higher corrosion rate on edge＜100〉crystal orientation than＜111〉crystal orientation, is about:＜100 〉:＜110 〉:＜111 〉=50: 30: 1 (μ m/ hour).V-type groove 11 and pit 12 as technology be: the mask plate 15 that is designed for photoetching, calibration has the V-type groove 11 of placing optical fiber and the photic zone of placing the pit 12 of microballoon on the mask plate 15, be used for the V-type groove of photoetching corrosion placement optical fiber on silicon chip and the pit of placement microballoon, manufacturing process is: carrying substrates 1 is used the polishing of standard chemical mechanical polishing technology, then clean two-sided then thermal oxide growth SiO
2Thickness is about
With the two-sided skim eurymeric photoresist (being about 1000nm) that is coated with of sol evenning machine, oven dry covers mask plate, and ultraviolet exposure is taken mask plate 15 away, and carrying substrates 1 is developed, rinsing, oven dry, corrodes SiO with hydrofluorite
2, remove photoresist, with Tetramethylammonium hydroxide (TMAH) corrosion silicon, when reaching the microballoon radius, the degree of depth of pit stops the silicon corrosion, and forming the drift angle of placing optical fiber is 70.52 ° V-shaped groove and the pit of placing microballoon.
Corrosion silicon anisotropic etchant commonly used has KOH and TMAH.TMAH has the silicon of quarter speed height, good, the hypotoxicity of crystal orientation selectivity, is etching agent commonly used in MEMS (micro electro mechanical system) (MEMS) technology.The TMAH wet etching obtains the technology of smooth etching surface.At first, preparation quality number percent is 25% TMAH solution, behind the solution left standstill 48h, takes out 40ml and is placed in the 500ml beaker, adds the 160ml deionized water, after fully stirring, adds the 2g ammonium persulfate, stirs until dissolving fully.Under 85 ℃ of water-baths,＜100〉carry out the V-shaped groove etching on the silicon, etch rate can reach 1.1 μ m/min, and etching surface is smooth.
With TMAH＜100 etching V-shaped groove on the silicon chip, the concentration of TMAH solution is in 25% (mass percent), etching temperature is between 60--90 ℃ of water-bath, recirculatory pipe is used to keep that the concentration of solution is unlikely changes because of aqueous vapor evaporation etc.Etch rate increases along with the rising of temperature, and etch rate is along with the concentration of TMAH increases and reduces.
When microballoon 3 need be fixed on the fixed handle 31, must make the small through hole 14 that is used for fixing fixed handle at carrying substrates, can adopt the dual surface lithography legal system to make small through hole, also can make of laser boring.
On the carrying substrates 1 of making V-type groove and pit, adopt the dual surface lithography legal system to make small through hole 14, manufacture craft is: the 2nd mask plates 16 and the 3rd mask plates 17 that are designed for photoetching small through hole 14,2nd, the calibration of 3 mask plates has the light tight district of the small through hole of placing microballoon, be used for pit just, back side photoetching corrosion small through hole 14, manufacturing process is: carrying substrates 1 is carried out oxidation again, at V-type groove 11 and pit 12 bottoms growth SiO
2Layer, the two-sided negative photoresist that is coated with, oven dry, (one side that the V-type groove arranged is for positive) covers the 2nd mask plates 16 at carrying substrates 1 back side, ultraviolet exposure is taken the 2nd mask plates 16 away, with carrying substrates 1 upset one side, cover the 3rd mask plates, ultraviolet exposure is taken the 3rd mask plates away, and carrying substrates is developed, rinsing, oven dry, corrodes SiO with hydrofluorite
2, remove photoresist, corrode silicon with Tetramethylammonium hydroxide, form small through hole.
4, its assembling process is:
1. putting into of microballoon: the junction at fixed handle 31 and microballoon 3 is coated with a little ultra-violet curing glue, clamps fixed handle 31 with tweezers, by magnifier fixed handle 31 is passed small through hole 14 on the carrying substrates 1; 2. bore the placement of optical fiber: at first will bore optical fiber and be fixed on the fixture 4, as shown in Figure 2, fixture 4 is open on one side framework, the groove that fixed cone optical fiber is arranged at the openend of both sides frame 41, then this fixture 4 and the carrying substrates of making 1 respectively are fixed on the fine adjustment frame, regulate the fine adjustment frame respectively, examine under a microscope awl optical fiber and microballoon simultaneously, make awl waist and microballoon tangent, the outer part of awl drops in the V-type groove; 3. bore after optical fiber puts into the V-type groove, ultra-violet curing glue on the part point that the outer V-type groove of awl blocks opened uv-exposure light irradiation ultra-violet curing glue 30 seconds, microballoon is fixed with boring optical fiber, fixture 4 with bore optical fiber and separate.
Can make following cone fiber microball type optical add-drop multiplexer with said method
Below in conjunction with view the present invention is described in detail
As shown in Figure 6, synoptic diagram for mask plate 15 photic zones (white portion among the figure) of embodiment 3, similar to the actual figure that will corrode formation, there is width to be all the rectangular of 153 μ m mutually vertically with V-type channel opening width, transversely be furnished with the pit horizontal stripe of placing microballoon, the center distance of two taeniaes be microballoon 3 diameter and awl optical taper waist 21 diameters and be 253 μ m, the width of horizontal stripe equals the radius of 1.6-2 times of microballoon 3, specifically be of a size of: shading live width 53 μ m, article two, spacing 253 μ m between the line center line, the horizontal stripe width is 200 μ m, frame and two shading lines form three photic zones, form three pits 12 of placing the V-type groove 11 of optical fiber and placing two microballoons.
As shown in Figure 7, synoptic diagram for the 2nd mask plates 16 light tight districts (dash area among the figure) of embodiment 3, its light tight district figure is a square, the length of side is directly proportional with the thickness of diameter of micro ball and carrying substrates, two squares are not worn and are linked as limit during with corrosion, be spaced apart 50 μ m between general two squares, the foursquare length of side is 200 μ m, and foursquare center overlaps with the center of mask plate 15 pits 12.
As shown in Figure 8, synoptic diagram for the 3rd mask plates 17 light tight districts (dash area among the figure) of embodiment 3, its light tight district figure is: diameter is not less than the circular of fixed handle diameter or is this circular circumscribed square, be the circle of diameter 130 μ m among the figure, the center is identical with the center of the 2nd mask plates 16 figures.
Claims (10)
1. cone fiber microball type optical add-drop multiplexer, comprise optical fiber (2), microballoon (3), it is characterized in that, this cone fiber microball type optical add-drop multiplexer also has a carrying substrates (1), every optical fiber middle part drawing-down tapering forms awl optical fiber, on carrying substrates (1), be shaped on the V-type groove (11) of many parallel energy receiving optical fibers (2), two V-type groove center spacings be microballoon (3) diameter with the awl optical fiber awl waist (21) diameter and, optical fiber (2) is fixed in the V-type groove (11), middle part between two V-type grooves has 1-2 can hold the pit (12) of microballoon (3), the longitudinal pitch of pit (12) is greater than 3 times microballoon (3) diameter, microballoon (3) is fixed in the pit (12), and the awl waist (21) of adjacent two optical fiber is parallel tangent at the equatorial plane opposite position of microballoon with microballoon (3).
2. a kind of cone fiber microball type optical add-drop multiplexer according to claim 1, it is characterized in that, the material selection crystal orientation of carrying substrates (1) is＜100〉monocrystalline silicon, the top width of V-type groove (11) is greater than 0.82 times of the optical fiber external diameter, pit (12) center has a small through hole (14), there is a fixed handle (31) lower end of microballoon (3), and fixed handle (31) passes small through hole (14) and fixing.
3. a kind of cone fiber microball type optical add-drop multiplexer according to claim 2 is characterized in that, the awl optical fiber that this cone fiber microball type optical add-drop multiplexer is made by three optical fiber (2), two SiO that have fixed handle (31)
2Microballoon (3), a carrying substrates (1) are formed, be etched with three parallel V-type grooves (11) on the carrying substrates (1), the top width of V-type groove (11) is 1.22 times of optical fiber external diameter, the equatorial plane of awl waist (21) and the microballoon (3) of awl optical fiber on same surface level, the awl waist (21) of adjacent two optical fiber respectively with SiO
2The equatorial plane of microballoon (3) is parallel tangent.
4. a kind of cone fiber microball type optical add-drop multiplexer according to claim 3 is characterized in that, the optical fiber external diameter is 125 μ m, two SiO
2The diameter of microballoon (3) is 250 μ m, with the awl optical taper waist diameter of its optimum matching be 1.5-5 μ m, two V-type groove center spacings are identical.
5. a kind of cone fiber microball type optical add-drop multiplexer according to claim 3 is characterized in that, the optical fiber external diameter is 80 μ m, two SiO
2The diameter of microballoon (3) is respectively 160 μ m, 200 μ m, is about 1.5-5 μ m with the awl optical taper waist diameter of its optimum matching, and the A/F of V-type groove (11) is 90 μ m.
6. method of making cone fiber microball type optical add-drop multiplexer as claimed in claim 1, comprise awl optical fiber, microballoon (3), the making and the assembling thereof of carrying substrates (1), it is characterized in that, the method for making of carrying substrates (1) is: utilizing the crystal orientation is that＜100〉monocrystalline silicon anisotropic etch characteristic is made V-type groove (11) and pit (12), manufacture craft is: the mask plate (15) that is designed for photoetching, when using the eurymeric photoresist, mask plate (15) is gone up calibration the V-type groove of placing optical fiber and the photic zone of placing the pit of microballoon, be used for the V-type groove of photoetching corrosion placement optical fiber on silicon chip and the pit of placement microballoon, manufacturing process is: earlier monocrystalline silicon is grown SiO with oxidizing process
2Layer is coated with the eurymeric photoresist, and oven dry covers mask plate, and ultraviolet exposure is taken mask plate away, and carrying substrates is developed, rinsing, oven dry, corrodes SiO with hydrofluorite
2, remove photoresist, corrode silicon with Tetramethylammonium hydroxide, when reaching the microballoon radius, the degree of depth of pit stops the silicon corrosion, form the V-type groove (11) of placing optical fiber and the pit (12) of placing microballoon.
7. a kind of cone fiber microball type optical add-drop multiplexer manufacture method according to claim 6, it is characterized in that, on the carrying substrates of making V-type groove and pit (1), adopt the dual surface lithography method to make small through hole (14) at pit (12) center small through hole (14), manufacture craft is: the 2nd mask plates (16) and the 3rd mask plates (17) that are designed for photoetching small through hole (14), when using negative photoresist, the 2nd, the calibration of 3 mask plates has the light tight district of the small through hole of placing microballoon, just be used at pit, back side photoetching corrosion small through hole (14), manufacturing process is: carrying substrates is carried out the oxidation second time, at V-type groove and pit bottom growth SiO
2Layer, adopt negative photoresist, double spread is dried, is covered the 2nd mask plates (16), ultraviolet exposure at the back side of carrying substrates V-type groove, take the 2nd mask plates (16) away, with carrying substrates (1) upset one side, cover the 3rd mask plates, ultraviolet exposure, take the 3rd mask plates away, carrying substrates is developed, rinsing, oven dry, corrodes SiO with hydrofluorite
2, remove photoresist, corrode silicon with Tetramethylammonium hydroxide, form small through hole.
8. a kind of cone fiber microball type optical add-drop multiplexer manufacture method according to claim 7, it is characterized in that, when using the eurymeric photoresist, the photic zone figure of mask plate (15) is similar to the actual figure that will corrode formation, for: there is width identical rectangular vertically with V-type channel opening width, transversely be furnished with the pit horizontal stripe of placing microballoon at interval, the center distance of two taeniaes be microballoon (3) diameter and awl optical taper waist (21) diameter and, the center distance of two horizontal stripes is greater than 3 times microballoon (3) diameter, the width of horizontal stripe equals the radius of 1.6-2 times of microballoon (3), when using negative photoresist, the light tight district figure of the 2nd mask plates is a square, the length of side is directly proportional with the thickness of diameter of micro ball and carrying substrates, two squares are not worn and are linked as limit during with corrosion, be spaced apart 53 μ m between two squares, foursquare center overlaps with the center of mask plate 15 pits; The light tight district figure of the 3rd mask plates (17) is: circular identical with fixed handle (31) diameter of diameter or be this circular circumscribed square, the center is in that to place the center of microballoon pit identical with mask plate (15).
9. according to claim 6 or 7 described a kind of cone fiber microball type optical add-drop multiplexer manufacture methods, it is characterized in that the method for making of microballoon is: sintering is carried out with electric arc or laser in the termination of optical fiber form microballoon, become the microballoon of band handle.
10. according to claim 6 or 7 described a kind of cone fiber microball type optical add-drop multiplexer manufacture methods, it is characterized in that, this cone fiber microball type optical add-drop multiplexer assembling process is 1. putting into of microballoon: be coated with a little ultra-violet curing glue in the junction of optical fiber and microballoon, clamp fixing microballoon optical fiber handle with tweezers, optical fiber is passed small through hole in the silicon chip pit by magnifier; 2. bore the placement of optical fiber: at first will bore optical fiber and be fixed on the fixture (4), then this fixture and the carrying substrates of making respectively are fixed on the fine adjustment frame, regulate the fine adjustment frame respectively, examine under a microscope awl optical fiber and microballoon simultaneously, make awl waist and microballoon tangent, the outer part of awl drops in the V-type groove; 3. bore after optical fiber puts into the V-type groove, ultra-violet curing glue on the part point that the outer V-type groove of awl blocks opened uv-exposure light irradiation ultra-violet curing glue 30 seconds, with microballoon and bore optical fiber and fix.
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| CN2006100849574A CN101083511B (en) | 2006-05-31 | 2006-05-31 | Cone fiber microball type optical add-drop multiplexer and method of manufacture |
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| CN101975763A (en) * | 2010-08-24 | 2011-02-16 | 中北大学 | Integrated probe type microsphere cavity sensor |
| CN104567088B (en) * | 2015-01-30 | 2016-11-30 | 福州大学 | The preparation method of cone fiber optic microsphere type Solid State Laser refrigerator and refrigerating method |
| CN104988505A (en) * | 2015-06-02 | 2015-10-21 | 中国科学院上海技术物理研究所 | Substrate corrosive liquid for preparing Si-based mercury cadmium telluride chip dislocation observation sample |
| CN105047530A (en) * | 2015-06-02 | 2015-11-11 | 中国科学院上海技术物理研究所 | Substrate corrosion technology for preparing dislocation observation sample of Si-based HgCdTe chip |
| CN106921106A (en) * | 2017-04-26 | 2017-07-04 | 中国电子科技集团公司第三十八研究所 | A kind of small-sized Ultra-Low Phase Noise Optical-Electronic Oscillator and its optical microcavity preparation method |
| CN109085680B (en) * | 2018-08-14 | 2019-12-31 | 浙江大学 | Micro-nano optical fiber packaging method based on mechanical tapering |
| CN109855760B (en) * | 2019-02-15 | 2021-03-30 | 哈尔滨工程大学 | Echo wall mode resonant cavity temperature sensor and preparation method thereof |
| CN109827678A (en) * | 2019-03-14 | 2019-05-31 | 哈尔滨工程大学 | A kind of temperature sensor and preparation method thereof that conversion fluorescence is luminous |
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