CN102354027A - Optical comb-add/drop multiplexer with track field-shaped microchip ring cavity, manufacturing method and packaging process - Google Patents
Optical comb-add/drop multiplexer with track field-shaped microchip ring cavity, manufacturing method and packaging process Download PDFInfo
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Abstract
The invention discloses an optical comb-add/drop multiplexer with a track field-shaped microchip ring cavity and conical optical fibers, which comprises optical fibers and the track field-shaped microchip ring cavity, wherein the external diameter of a middle section vertical to a straight flange part of the track field-shaped microchip ring cavity is larger than the diameter of each optical fiber; each optical fiber is pulled to be a cone shape with a thin middle part to form a biconical optical fiber; the optical fibers and the track field-shaped microchip ring cavity are arranged at intervals; and a cone waist of each two adjacent optical fibers is tangent to an excircle of the middle section vertical to the straight flange part of the track field-shaped microchip ring cavity. According to the optical comb-add/drop multiplexer with the track field-shaped microchip ring cavity disclosed by the invention, the optical processing of an input signal and an output signal is convenient and simple, the structure is compact, the coupling efficiency and the coupling power are higher, the channel loss is less, the optical integration can be realized, the industrialized production can be achieved, and the practical applicability is good. A test shows that the coupling efficiency of light between each cone optical fiber with resonance wavelength and the track field-shaped microchip ring cavity can reach 98 percent, and a part with half-height and overall-width of the resonance wavelength can be located at 0.03-1nm.
Description
Technical field
The present invention relates to the device of optical waveguide and other optical element, relate in particular to the awl optical fiber stadium of track and field shape little core ring cavity optical comb type wavelength-division multiplexer and the manufacturing approach thereof of the wavelength-division multiplex functional device of multi-wavelength selection.
Background technology
(Optical Comb-add/drop multiplexer is a kind of optical router (Optical Router) that is used in dense wave division multipurpose in the optical fiber communication (DWDM) system OCADM) to optical comb type wavelength-division multiplexer, is a kind of optical passive component.Dwdm system essence mainly is the wave filter of an optical region, and the flashlight of different wave length is separated in frequency field and spatial domain; Perhaps reverse application realizes closing wave energy.Utilize optical comb type wavelength-division multiplexer can improve optical fiber communication dense wave division multipurpose channel quantity, it can further reduce channel spacing on the basis of existing filter bandwidht, improve the system channel closeness.As shown in Figure 1, the function of optical comb type wavelength-division multiplexer is can resolve into two groups of optical channel outputs to single group input dense wave division multipurpose (or optical frequency division multiplex OFDM) light signal, these the two groups equally spaced optical channel outputs of respectively doing for oneself.
Optical comb type wavelength-division multiplexer mainly contains following several at present: full optical fiber mach-Ceng Deer interferometer type (All fiber Mach-Zehnder interferometer), michelson interferometer (Michelson interferometer) add GTR (Gires-ToVrnois Resonator) type (MGTI) and utilize the birefringece crystal type of polarized light interference.Also have in addition that fiber grating is combined, AWG comb type wavelength-division multiplexer etc., these are still in research and development.Be the important channel of realizing light pectination multiplex/demultiplex function at present based on birefringece crystal design light intersection wavelength division multiplexer wherein, it is to utilize the birefringence of crystal and the principle of interference of polarized light to realize.The light of commercialization at present intersects wavelength division multiplexer (Interleaver) and is based on the design of vanadic acid ytterbium (YVO4) birefringece crystal, the birefringece crystal type optical comb type wavelength-division multiplexer of this commercialization has that volume is big, complex structure, with the low and optical loss of the coupling efficiency of optical fiber shortcomings such as big (1.5--1.8dB), cost height.The MGTI type is compared with crystal type Interleaver, structurally will save polarization beam apparatus and polarization beam combiner and complicated polarized controller (MGTI belongs to the polarization irrelevant device), can obtain the passband of flat-top, and the also relative crystal type of temperature compensation comes simply.Adopt the advantage of full optical fiber designs MZI type be simple in structure, have lower Polarization Dependent Loss and added losses, but the subject matter that its exists is that isolation is little, temperature stability difference and be difficult to reach practical application.
Along with constantly dwindling of channel spacing in the communication system, the reception of signal and treatment technology difficulty strengthen so.Light pectination multiplexer serial connection is used and can be reduced this difficulty so.Such as channel spacing from 50GHz, become 100GHz through one-level light pectination multiplexer, become the process of 200GHz again through the secondary multiplexer.But the serial connection number is too many, inserts loss and increases, and is unfavorable for using.Proposed to bore the little core ring cavity of optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer at present, but but be that kind of photoelectricity is integrated, a kind of multiplexer of the less suitability for industrialized production of loss.This little core ring cavity is good to wavelength selectivity, and quality factor is high, and bandwidth is narrow, can not satisfy the requirement of three dB bandwidth in the communication system.
Summary of the invention
The objective of the invention is to overcome the shortcoming of present optical comb type wavelength-division multiplexer, provide that a kind of coupling efficiency is higher, light inserts that loss is little, coupled power big, can integrated, well behaved a kind of multiplexer, and its manufacturing approach is provided.
The present invention adopts following means to realize: the little core ring cavity of a kind of awl optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer; It is characterized in that; It comprises optical fiber (1), the little core ring cavity of stadium of track and field shape (2); Straight flange place smaller part annulus (21) diameter of the middle section (21) at the vertical straight flange place of the little core ring cavity of stadium of track and field shape (2) is greater than the diameter at awl optical taper waist place (11); Optical fiber (1) and chamber (2) separation, the awl waist (11) of adjacent two optical fiber is tangent with the straight flange place small circle ring (22) of the little core ring cavity of stadium of track and field shape (2).
Preferably; Said multiplexer also comprises a carrying silicon chip (4); On carrying silicon chip (4), be shaped on the V-type groove (41) of some parallel ability receiving optical fibers (1); Two V-type groove center spacings be the little core ring cavity of stadium of track and field shape (2) arc limit shape diameter with the awl optical fiber awl waist (11) diameter with; Awl optical fiber (1) is fixed in the V-type groove (41); Middle part between two V-type grooves (41) is shaped on a little core ring cavity of stadium of track and field shape (2), and the awl waist (11) of adjacent two optical fiber is tangent with the straight flange place small circle ring (22) of the little core ring cavity of stadium of track and field shape (2).
Preferably, the material selection crystal orientation of carrying silicon chip (1) is the monocrystalline silicon of < 100 >, the about 25-30 micron of the top width of V-type groove (41).
Preferably; Be etched with two parallel V-type grooves (41) and a little core ring cavity of stadium of track and field shape (2) on the said carrying silicon chip (4); The top width of V-type groove (41) is 1.22 times of optical fiber external diameter; The awl waist (11) of awl optical fiber and the little core ring cavity of stadium of track and field shape (2) are on same surface level, and the awl waist (11) of adjacent two optical fiber is tangent with the straight flange place small circle ring (22) of the little core ring cavity of stadium of track and field shape (2) respectively.
Preferably; It is characterized in that; The awl optical fiber that said multiplexer is processed by three optical fiber (1), two little core ring cavities of stadium of track and field shape (2), a carrying silicon chip (4) are formed; Be etched with three parallel V-type grooves (41) and two little core ring cavities of stadium of track and field shape (2) on the carrying silicon chip (4); The awl waist (11) of awl optical fiber and the little core ring cavity of stadium of track and field shape (2) are on same surface level, and the awl waist (11) of adjacent two optical fiber is tangent with the small circle ring (22) at the little core ring cavity of stadium of track and field shape (2) straight flange place respectively.
Preferably, wherein the track and field Microchip ring-shaped chamber (2) of the perimeter
μm, which Δυ the channel spacing, c is the speed of light in vacuum, n track and field production Microchip ring-shaped cavity refractive index, FSR Microchip for the track and field ring-shaped cavity free spectral range, the best match with the tapered fiber optic taper waist diameter of 1-3μm, the options include straight edge perimeter length and diameter of the curved edge, while the design size, light must satisfy Straight edges of the cavity into the phase matching coupling.
The present invention also discloses the little core ring cavity of a kind of awl optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer manufacturing approach; Comprise awl optical fiber (1); The little core ring cavity of stadium of track and field shape (2); The making of carrying silicon chip (4); It is characterized in that; The making of wherein carrying silicon chip (4) is that to utilize the crystal orientation be that the isotropic etch characteristic of < 100>monocrystalline silicon is made V-type groove (41) and SiO2 disk; May further comprise the steps: the mask plate that is designed for photoetching; Earlier monocrystalline silicon is grown the SiO2 layer with oxidizing process; Be coated with the eurymeric photoresist; Oven dry; Cover mask plate; Ultraviolet exposure; Silicon chip is developed; Rinsing; Oven dry; Corrode SiO2 with hydrofluorite; Remove photoresist, corrode, form the V-type groove of placing optical fiber and the SiO2 dish of making the little core ring cavity of stadium of track and field shape with silicon corrosion thing;
Wherein the method for making of the little core ring cavity of stadium of track and field shape (2) is: the SiO2 dish is carried out high temperature melt with laser, and the cooling back forms the stadium of track and field little core ring cavity of shape (2) under surface tension effects.
Preferably; Assembling process is placed into the V-type groove for awl optical fiber: at first will bore optical fiber is fixed on the V-shaped groove; Then V-shaped groove and the silicon chip of making the little core ring cavity of stadium of track and field shape respectively are fixed on the fine adjustment frame; Regulate the fine adjustment frame respectively; Examine under a microscope the position of awl optical fiber and the little core ring cavity of stadium of track and field shape simultaneously; Adjustment makes that the straight flange in awl optical taper waist place and chamber is tangent, and tapering part (part about diameter 25-30 micron) drops in the V-type groove; Block ultra-violet curing glue on the part place point at the outer V-type groove of awl, with uv-exposure light irradiation 30 seconds, with the chamber and bore optical fiber and fix, the outside of boring optical fiber suitably bending was adopted to use the same method and is fixed on the other carrying substrates, and silicon chip then is fixed on this.
The present invention also discloses a kind of packaging technology of boring the little core ring cavity of optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer; It is characterized in that; Select temperature characterisitic and optical fiber and the little core ring cavity of stadium of track and field shape material to be complementary during encapsulation; Refractive index also should be lower than the material of optical fibre refractivity; As packing material, the adhesive that can supply adopt comprises acryl resin, epoxy resin.
Preferably, encapsulating material is selected silicon elastic resin, fluorinated polymer, silicone oil and glycerine for use, and wherein the silicon elastic resin can be suitable for as the filler clad material of holding concurrently most.
The invention has the advantages that, to input, output optical processing conveniently, simply, compact conformation, coupling efficiency and coupled power are higher, can realize that light is integrated, but suitability for industrialized production, practicality is good.Learn through test; Coupling efficiency to light between resonance wavelength awl optical fiber and the little core ring cavity of stadium of track and field shape can reach 98%, the relative broad of spectral bandwidth, and it is little to tell the loss of insertion wavelength channel; Very little to the through connect signal wavelength loss, be fit to the optical fiber communication of intensive wavelength channel.If can a plurality of serial connections, can obtain the characteristic spectrum of flat-top, more suitable.
Description of drawings
Fig. 1 is existing light intersection wavelength division multiplexer principle schematic;
Fig. 2 is a theory structure synoptic diagram of the present invention;
Fig. 3 is the structural representation of first embodiment of the invention;
Fig. 4 is A-A cut-open view of Fig. 3;
Fig. 5 is B-B cut-open view of Fig. 3;
Fig. 6 is the structural representation of second embodiment of the invention unequal interval wavelength division multiplexer;
Fig. 7 is the structural representation of two groups of wavelength division multiplexers of third embodiment of the invention;
Fig. 8 is the structural representation of third embodiment of the invention.
Wherein: small circle ring 23 arc limit small circle rings 24 grooves 15 at the straight flange place, 22 chamber, middle section at the little core ring cavity of 1 optical fiber, 11 awl waist 13 input ports, 14 output ports, 2 stadium of track and field shapes 21 vertical cavity straight flange places are told port one 6 and are inserted port 4 silicon chips 41 V-type grooves 5 signal light-waves 6 light intersection wavelength division multiplexer.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below will do further explain to the present invention through specific embodiment and relevant drawings.
Please refer to Fig. 2 and Fig. 4, the little core ring cavity of a kind of awl optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer, it comprises two awl optical fiber 1, the little core ring cavity 2 of stadium of track and field shape.The chamber is directly on silicon chip 4, to make, and silicon chip 4 thickness 500 μ m have 4 V-type grooves 41 parallel with the chamber straight flange above it.V-type groove 41 top width are about the 25-30 micron, and the centre distance of two V-type grooves 41 is ring cavity 2 arc limit diameters and awl fibre diameter sum.The small circle ring diameter of the little core ring cavity 2 of stadium of track and field shape is 2.5-5 μ m, and awl optical fiber 1 lumbar vertebrae 11 place's diameters are 2.0 μ m.The preparation of awl optical fiber 1 can utilize fused conic clinker, and thin past both sides become big biconical fiber gradually in the middle of obtaining.The optical fiber two ends are standard single-mode fiber size 125 μ m.According to Δ υ=100GHz=FSR, get S=2049.915 μ m, can get L=31.4159 μ m, R=315.821 μ m.The straight flange that is the little core ring cavity 2 of stadium of track and field shape is 31.4 μ m, arc limit radius 315.8 μ m.Two optical fiber and 2 separation, optical fiber are all tangent with the straight flange place small circle ring 22 in chamber 2.One group of DWDM light signal of input port 13 inputs; Have a series of equally spaced wavelength can with ring cavity 2 resonance; Output to through chamber 2 and to tell port one 5, other not the wavelength of resonance directly export from output port 14, realized optical wavelength-division multiplex function to one group of DWDM signal.This device is little to the loss of signal of all wavelengths, inserts loss and can also drop to very low.Here light path is reversible, can realize the function of add-drop multiplexer.Be a series of wavelength of light from 34 inputs of insertion port and chamber resonance, the light of input port 13 inputs and chamber disresonance wavelength just can intert at output port 14 so and realize together.Can also reach the resonance wavelength consistent by little core ring cavity through the stadium of track and field shape of different sizes here, with DWDM wavelengths centered, the wavelength interval of ITU-T standard.
Principle of work of the present invention is: there is the high and little whisper in sb.'s ear Whispering-gallery-mode (WGM) of mode volume of a series of equally spaced quality factors in the little core ring cavity of stadium of track and field shape inside.The size in the frequency of these WGM and bandwidth and chamber, the effective refractive index of pattern are relevant.Luminous energy in being coupled into the little core ring cavity 2 of stadium of track and field shape is interior resonance in the chamber, can excite the shape characteristic resonance spectrum in its chamber, so the light of this wavelength under lossless situation in the chamber continuous circle transmission.This moment, light was realized the function of wavelength-division multiplex with the microcavity that is coupled out so if also have an awl optical fiber to be coupled from the straight flange that was coupled into relatively originally.Here boring optical fiber is a kind of near-field coupler part of high coupling efficiency, can know through test, to the coupling efficiency between resonance wavelength awl optical fiber and the little core ring cavity of stadium of track and field shape up to 98%.
In order to bore the little core ring cavity of optical fiber and stadium of track and field shape one good fixing arranged, the present invention also carries out special design.The little core ring cavity 2 of stadium of track and field shape is silicon based silicon dioxides; Be shaped on some parallel V-type grooves 41 that can receiving optical fibers on silica-based simultaneously; Awl optical fiber is fixed in the V-type groove; A little core ring cavity 2 of stadium of track and field shape is arranged between the two V-type grooves 41, can realize boring the little core ring cavity 2 tangent couplings of optical taper waist 11 places and stadium of track and field shape like this.Two groove center spacings are little core ring cavity 2 arc limit diameters of stadium of track and field shape and the diameter sum of boring optical taper waist 11.
Specifically be designed to: a kind of optical comb type wavelength-division multiplexer; Simply consider; Need two awl optical fiber and the little core ring cavity 2 of stadium of track and field shape; They are to be integrated on silica-based 4; On silicon 4, etch two parallel V-type grooves 41; The about 25-30 micron of the top width of V-type groove 41, this groove 41 are to be used for fixing from more than 12 millimeters outer tapering parts of awl waist.As for the size design of the little core ring cavity 2 of stadium of track and field shape, can adjust according to different wavelengths sigtnal interval and bandwidth.
In the little core ring cavity 2 of stadium of track and field shape, its resonance-characteristic spectral line is determined by Free Spectral Range at interval:
C is a light speed in a vacuum; N is for making the medium refraction index of the little core ring cavity of stadium of track and field shape, and R is the radius on arc limit in the little core ring cavity of stadium of track and field shape, and L is the length of straight flange.The phase place of introducing when the selection of straight flange here also need be considered with the coupling of awl optical fiber, this is closely related with the power proportions that is coupled in the chamber, satisfies
Wherein C representes to bore the coupling coefficient between optical fiber and the little core ring cavity of stadium of track and field shape, and by distance between the two, the decision of factors such as field distribution separately is tunable.Get c=3.0*108m/s, n=1.465 π=3.14159.
(1) establishes Δ υ=200GHz=FSR Δ λ=1.6nm
Get S=1024.957 μ m, desirable L=pi/2 C=31.4159 μ m (C=0.05 μ m-1), R=153.127 μ m so.
(2) establish Δ υ=100GHz=FSR Δ λ=0.8nm
Get S=2049.915 μ m, desirable L=31.4159 μ m, R=315.821 μ m so.
(3) establish Δ υ=50GHz=FSR Δ λ=0.4nm
Get S=4099.83 μ m, desirable L=31.4159 μ m, R=641.629 μ m so.
Here L can adjust according to the variation of C, the microcavity design that combines and can realize different parameters with reality coupling.
Fig. 4 is the cut-open view of the A-A of Fig. 3, and Fig. 5 is the B-B cut-open view of Fig. 3, the small circle ring diameter 2.5-5 μ m of the little core ring cavity 2 of stadium of track and field shape, the middle section diameter D at vertical straight flange place (=2R) be the hundreds of micron.When making V-type groove 41 with chamber 2, utilize isotropy wet etching method, to SiO2 etching certain thickness, thereby the silicon of its below is the silicon post of stadium shape by forming xsect to internal corrosion, helps the little core ring cavity of stadium of track and field shape of formation rule, circularity circle.
Can control flexibly because of size among the present invention, the FSR of the feasible optical comb type wavelength-division multiplexer of processing can adjust, and it can make narrower channel demultiplex into loose dwdm system so.
Please refer to Fig. 6, in the little core ring cavity of awl optical fiber stadium of track and field shape, can realize one group of equally spaced wavelength, the channel way of output of other one group of unequal interval.This system is with the above, and what just the size in chamber made resonance wavelength is more than 3 times and 3 times of trunk light signal interval at interval.
Please refer to Fig. 7, the light signal that awl optical fiber stadium of track and field shape little core ring cavity system can simultaneously multiplexing two groups and two groups above different interval.This system is made up of the little core ring cavity of stadium of track and field shape of three awls optical fiber and two different sizes.Wherein an awl optical fiber is trunk, and other two is multiplexing input end.Fig. 8 is a structural representation.
The little core ring cavity of above-mentioned awl optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer method for making comprises awl optical fiber, chamber 2, the making of V-type groove and their assembling thereof.
1, the making of awl optical fiber has three kinds of methods at present, is respectively:
Its operation steps is: about 1-2mm osculum is peelled off with the optical fiber hoe scaler earlier with the plastic coat layer of optical fiber in (1), puts into the acetone sonic oscillation, the osculum season crack, and about 4cm to be stripped takes out, and is fixed on the V-arrangement frame; (2) preparation HF solution, proportioning is: hydrofluorite: ammonium fluoride: deionized water=3 (ml): 6 (g): 10 (ml), adding ammonium fluoride is to make optical fiber surface smooth for buffered etch; (3) this section bare fibre is dipped in the HF acid solution of vessel, vessel are placed on the moveable platform.Control the awl optical fiber that forms different taperings and length through changing the fiber lengths that soaks HF solution.Perhaps these vessel have special design to make the fast and past two ends of middle corrosion slow down gradually, or utilize evaporation method to form awl optical fiber naturally; (4) in corrosion process, corrosion quality and process will be monitored through luminous power wherein with measuring through microscopic examination.Corrosion is then slowly mentioned optical fiber after stopping, and with flushings such as deionized water or acetone, is put into microscopically then and observes, measures, and whole process is at room temperature carried out.
The machine-processed awl optical fiber of doing of awl is drawn in employing, and it is long earlier the coat of optical fiber to be peeled off about 2cm, when heating central bare fibre through oxyhydrogen flame its stretching is formed.Parameters such as its draw speed, tensile elongation, flame movement speed all can be provided with through computing machine.
Use CO
2Laser instrument is as heated light sources, and is clean, controlled, starting is fast, noninertia, and point source of light is equipped with the heating of programmed control vibration mirror scanning, can produce the awl optical fiber of arbitrary taper and awl waist.
2, being made as of carrying silicon chip:
Please refer to Fig. 3, select high resistant (> 100 Ω .cm for use) < 100>monocrystalline silicon, size is little, about about 2-3cm is wide.Manufacture craft is: the mask plate that is designed for photoetching; When selecting the eurymeric photoresist; The centre is the black graphics of stadium of track and field shape, and the top at two ends each has two lines identical with the top width of V-type groove with the below, is used to the V-type groove of making the little core ring cavity of stadium of track and field shape and placing awl optical fiber.Manufacturing process is: silicon substrate uses the polishing of standard chemical mechanical polishing technology; Clean; The about 2 μ m of two-sided then thermal oxide growth SiO2 thickness; Be coated with skim photoresist (being about 1000nm) with sol evenning machine afterwards; Preceding baking; Ultraviolet exposure, to silicon chip 4 develop, rinsing, back baking, with the unnecessary SiO of hydrofluorite corrosion
2, with silicon etchants such as HF+HNO3 corrode about tens microns dark, form to place the V-type groove and the SiO that makes the little core ring cavity of stadium of track and field shape of optical fiber
2Dish.
Silicon corrosion thing adopts HF+HNO3 (1:5) can obtain the silicon post that xsect is a stadium shape, and is feasible even everywhere via the heat conduction of silicon post through back carbon dioxide laser fusion, thereby forms the small circle ring of circularity circle.
3, the preparation of optical microcavity:
High-temperature melting method; High-temperature fusion is mainly used in the preparation in the little dish of silicon dioxide stadium of track and field shape chamber.Adopt high-temperature electric arc, clean flame, CO
2A kind of little dish of thermal silicon dioxide that adds in the laser instrument.The coefficient of heat conductivity that utilizes silicon approximately is 100 times of silicon dioxide and silicon dioxide to characteristics such as the light absorption of 10.6 mum wavelengths is strong; Process high temperature is with the little dish fusion of silicon dioxide; The silicone disc edge forms the little core ring cavity of stadium of track and field shape than standard because of reaching fusing point earlier under surface tension effects, and its small circle ring cross-sectional diameter d is 2.5～5 μ m.This method can obtain expecting diameter, the chamber that small circle ring circularity is high, and its smooth surface, clean has low light WGM loss.After the preparation of the little core ring cavity of stadium of track and field shape, its resonance frequency just confirmed, in order to regulate resonance frequency, can adopt to change radius R or refractive index that temperature and stress makes ring and change and regulate resonance frequency.
4, assembling process:
Awl optical fiber is placed into the V-type groove: at first will bore optical fiber and be fixed on the V-arrangement frame; Then V-arrangement frame and the silicon chip of making the chamber respectively are fixed on the fine adjustment frame; Regulate the fine adjustment frame respectively; Examine under a microscope the position of awl optical fiber and the little core ring cavity of stadium of track and field shape simultaneously; Adjustment makes that the straight flange in awl optical taper waist place and chamber is tangent, and tapering part (part about diameter 25-30 micron) drops in the V-type groove; Block the part place at the outer V-type groove of awl and coat ultra-violet curing glue carefully, with uv-exposure light irradiation 30 seconds, with the chamber and bore optical fiber and fix.The outside of awl optical fiber suitably bending is adopted to use the same method and is fixed on the other carrying substrates, and silicon chip then is fixed on this.
5, packaging technology:
Should select temperature characterisitic and optical fiber and the little core ring cavity of stadium of track and field shape material to be complementary during encapsulation; The material that refractive index also should be lower than optical fibre refractivity is as packing material; The adhesive that can supply adopt has acryl resin, epoxy resin; Encapsulating material is selected silicon elastic resin, fluorinated polymer, silicone oil and glycerine for use, and wherein the silicon elastic resin can be suitable for as the filler clad material of holding concurrently most.
Above-listed preferred embodiment; The object of the invention, technical scheme and advantage have been carried out further explain; Institute is understood that; The above only is preferred embodiment of the present invention; Not in order to restriction the present invention; All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. bore the little core ring cavity of optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer for one kind; It is characterized in that; It comprises optical fiber (1), the little core ring cavity of stadium of track and field shape (2); Straight flange place small circle ring (22) diameter of the middle section (21) at the vertical straight flange place of the little core ring cavity of stadium of track and field shape (2) is greater than the diameter of awl optical taper waist (11); Optical fiber (1) and the little core ring cavity of stadium of track and field shape (2) separation, the awl waist (11) of adjacent two optical fiber is tangent with the straight flange place small circle ring parallel (22) of the little core ring cavity of stadium of track and field shape (2).
2. the little core ring cavity of a kind of awl optical fiber stadium of track and field shape according to claim 1 optical comb type wavelength-division multiplexer; It is characterized in that; Said multiplexer also comprises a carrying substrates-silicon chip (4); On silicon chip (4), be shaped on the V-type groove (41) of some parallel energy receiving optical fibers (1); Two V-type groove center spacings be the little core ring cavity of stadium of track and field shape (2) semicircle diameter with the awl optical fiber awl waist (11) diameter with; Awl optical fiber (1) is fixed in the V-type groove (41); The little core ring cavity of stadium of track and field shape (2) is located at the middle part between the two V-type grooves (41), and the awl waist (11) of adjacent two optical fiber is tangent with the straight flange place small circle ring (22) of the little core ring cavity of stadium of track and field shape (2).
3. the little core ring cavity of a kind of awl optical fiber stadium of track and field shape according to claim 2 optical comb type wavelength-division multiplexer is characterized in that, the material selection crystal orientation of carrying silicon chip (4) is the monocrystalline silicon of < 100 >, the about 25-30 micron of the top width of V-type groove (41).
4. the little core ring cavity of a kind of awl optical fiber stadium of track and field shape according to claim 2 optical comb type wavelength-division multiplexer; It is characterized in that; Be etched with two parallel V-type grooves (41) on the said carrying silicon chip (4); The top width of V-type groove (41) is 1.22 times of optical fiber external diameter, and the awl waist (11) of awl optical fiber and the little core ring cavity of stadium of track and field shape (2) are on same surface level.
5. the little core ring cavity of a kind of awl optical fiber stadium of track and field shape according to claim 2 optical comb type wavelength-division multiplexer; It is characterized in that; The awl optical fiber that said multiplexer is processed by three optical fiber (1); Two little core ring cavities of stadium of track and field shape (2); A carrying silicon chip (4) is formed; Be etched with three parallel V-type grooves (41) and two little core ring cavities of stadium of track and field shape (2) on the carrying silicon chip (4); The awl waist (11) of awl optical fiber and the little core ring cavity of stadium of track and field shape (2) are on same surface level, and the awl waist (11) of adjacent two optical fiber is tangent with the smaller part annulus (22) at the little core ring cavity of stadium of track and field shape (2) straight flange place respectively.
6. the little core ring cavity of a kind of awl optical fiber stadium of track and field shape according to claim 1 optical comb type wavelength-division multiplexer; It is characterized in that; The girth of the little core ring cavity of stadium of track and field shape (2)
μ m; Wherein Δ υ is a channel spacing; C is a light speed in a vacuum; N makes the medium refraction index of the little core ring cavity of stadium of track and field shape; FSR is the little core ring cavity of a stadium of track and field shape Free Spectral Range; With the awl optical taper waist diameter of its optimum Match be 1-3 μ m; The selection of girth comprises length of straight flange and arc limit diameter; In design size, must satisfy the phase matched of introducing when light is coupled at the straight flange place in chamber.
7. bore the little core ring cavity of optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer manufacturing approach for one kind; This multiplexer comprises the making of awl optical fiber (1), the little core ring cavity of stadium of track and field shape (2), carrying silicon chip (4); It is characterized in that the making of carrying silicon chip (4) is to utilize the crystal orientation to do<100>The anisotropic etch characteristic of monocrystalline silicon makes V-type groove (41) and the isotropic etch characteristic is made the SiO2 disk, may further comprise the steps: be designed for the mask plate of photoetching, will grow SiO with oxidizing process on the monocrystalline silicon piece earlier
2Layer is coated with the eurymeric photoresist, and oven dry covers mask plate, and ultraviolet exposure develops, rinsing, oven dry, corrodes SiO with hydrofluorite silicon chip
2, remove photoresist, corrode with silicon corrosion thing, form the V-type groove of placing optical fiber and the SiO that makes the little core ring cavity of stadium of track and field shape
2Dish; Wherein the method for making of the little core ring cavity of stadium of track and field shape (2) is: with SiO
2Dish carries out high temperature melt with laser, and the cooling back forms the stadium of track and field little core ring cavity of shape (2) under surface tension effects.
As claimed in claim 7, wherein a tapered optical fiber track and field Microchip annulus shaped comb WDM optical manufacturing method characterized in that the assembly of the tapered optical fiber (1) placed into the V-shaped groove (41 ): First, the tapered optical fiber (1) fixed to the V-shaped groove (41), and then the V-shaped groove (41) and making a good track and field Microchip ring-shaped cavity (2) of the carrier wafer (4) of the fixed a micro-adjustable shelves, adjustable micro-adjustable stand, respectively, while the tapered fiber under the microscope (1) and track and field Microchip ring-shaped chamber (2) the position adjustment makes tapered fiber taper waist (11) Department and the ring cavity ( 2) of the straight edge tangent, tapered portion falls V-groove (41) therein; the tapered outer V-shaped groove (41) holding portion at the point UV-curable adhesive, irradiation with UV light exposure for 30 seconds, the ring chamber (2) the tapered optical fiber (1) fixed, tapered optical fibers (1) can be appropriately curved external is fixed using the same carrier in another substrate (such as plate), the wafer is fixed on this.
9. packaging technology of boring the little core ring cavity of optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer; It is characterized in that; Select temperature characterisitic and awl optical fiber (1) and the little core ring cavity of stadium of track and field shape (2) material to be complementary during encapsulation; The material that refractive index also should be lower than optical fibre refractivity is as packing material, and the adhesive that can supply adopt comprises acryl resin, epoxy resin
10, a kind of packaging technology of boring the little core ring cavity of optical fiber stadium of track and field shape optical comb type wavelength-division multiplexer according to claim 9; It is characterized in that; Encapsulating material is selected silicon elastic resin, fluorinated polymer, silicone oil and glycerine for use, and wherein the silicon elastic resin can be suitable for as the filler clad material of holding concurrently most.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111817126A (en) * | 2019-04-10 | 2020-10-23 | 南京大学 | Micro-ring core device and optical soliton generation system |
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| WO2005024481A1 (en) * | 2003-09-05 | 2005-03-17 | Massachusetts Institute Of Technology | Precise and permanent modification of the resonant frequency of a dielectric microcavity and correction of frequency shifts in dielectric coupled-resonator filters |
| CN201039195Y (en) * | 2007-05-15 | 2008-03-19 | 福州大学 | Wimble optical fiber loop cavity optical intercrossed wave division multiplexer |
| CN101308232A (en) * | 2007-05-15 | 2008-11-19 | 福州大学 | Tapered optical fiber annular cavity optical comb type wavelength-division multiplexer and method of manufacture |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005024481A1 (en) * | 2003-09-05 | 2005-03-17 | Massachusetts Institute Of Technology | Precise and permanent modification of the resonant frequency of a dielectric microcavity and correction of frequency shifts in dielectric coupled-resonator filters |
| CN201039195Y (en) * | 2007-05-15 | 2008-03-19 | 福州大学 | Wimble optical fiber loop cavity optical intercrossed wave division multiplexer |
| CN101308232A (en) * | 2007-05-15 | 2008-11-19 | 福州大学 | Tapered optical fiber annular cavity optical comb type wavelength-division multiplexer and method of manufacture |
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| CN111817126A (en) * | 2019-04-10 | 2020-10-23 | 南京大学 | Micro-ring core device and optical soliton generation system |
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