KR20100045433A - Coupling structure for optical module and method thereof - Google Patents

Abstract

PURPOSE: A connection structure for an optical module and a manufacturing method thereof are provided to reduce production costs by directly connecting the optical fiber to the optical module without an optical fiber block. CONSTITUTION: A connection structure(30) for an optical module includes a first groove and a second grooves. The first groove(A) supports an optical part on a substrate. The second groove(B) includes the first groove inside and mounts the optical parts. A line or dot of a corner of the first groove guides the reception of the optical part.

Description

Connection structure for optical module and its manufacturing method {COUPLING STRUCTURE FOR OPTICAL MODULE AND METHOD THEREOF}

The present invention relates to a connection structure for an optical module and a method for manufacturing the same, wherein an optical fiber or a ball lens is connected to an optical component such as an optical fiber, a spherical lens, an optical waveguide, a laser diode, a photodiode, a light emitting diode, and a reflective mirror. The present invention relates to a connection structure for an optical module for optically aligning and connecting with each other, and a manufacturing method thereof.

In the flat optical module including the optical waveguide, a method of connecting optical fibers can be generally divided into an active connection method and a passive connection method. In the active connection method, an optical fiber block (or optical fiber) is placed close to an optical waveguide train (or optical waveguide) in which an optical module is cut and polished to expose an end face thereof, and then optically aligned. While passing through, adjust the position of the optical fiber block (or optical fiber) to fix and bond the optical fiber block (or optical fiber) to the optical module at the position where the intensity of the light passing through the optical waveguide is maximum. It is a way to achieve fixation. In this case, the optical fiber block refers to an optical fiber arranged in a groove between a flat plate and another flat plate in which V-shaped groove structures (hereinafter referred to as 'V-spheres') are arranged in a row and cut at the ends thereof. Refers to a polished bundle.

In contrast, the manual connection method is made by directly processing a structure such as a long groove for aligning and fixing the optical fiber directly to the body of the optical module without using a separate device such as an optical fiber block, and inserting the optical fiber into the groove. ㆍ Fixing is a method of optical alignment and fixation between the optical waveguide and the optical fiber by using a physical alignment structure made in the optical module itself.

Conventional coupling of optical fibers to optical waveguides mainly uses an active connection method. Because the alignment accuracy of the passive connection method is still around several micrometers, it does not provide sufficient alignment accuracy of 1 μm or less (which is the required alignment precision compared to the optical fiber core diameter of about 9 μm). This is because the optical fiber is fixed to the optical module at the optimal position by measuring the intensity of light passing through the waveguide, thereby ensuring sufficient alignment accuracy. However, this active connection method requires a costly optical fiber block for every device and an expensive alignment device requires the alignment and fixing of the optical fiber block for each device, which results in a long manufacturing time and high cost of the optical module.

In order to solve the shortcomings of the active connection method using the optical fiber block, several passive connection methods have been proposed. Japanese Patent No. 2982861 relates to a passive connection structure of an optical fiber to a "silica" optical waveguide optical module using a "silicon" substrate. The patent describes a method for making a silica optical waveguide on a silicon substrate, together with a V-groove for fixing an optical fiber aligned with the silica optical waveguide using the boiling angle of the silicon crystals on the substrate. Using this method, a groove structure for passively connecting optical fibers can be manufactured relatively easily on an optical module substrate. However, this method has not been practically used due to various reasons, due to various reasons, it is not possible to secure sufficient precision of 1 µm or less. In addition, the silicon substrate that must be used to apply the method has a large thermal expansion coefficient of 3 × 10 ⁻⁶ / ° C., which is significantly different from the thermal expansion coefficient (0.5 × 10 ⁻⁶ / ° C.) of the silica material constituting the optical waveguide. As a result, a stress acts on the optical waveguide of the optical module to cause birefringence in the optical waveguide (ie, the phenomenon in which the refractive index of the waveguide material varies by about 0.0005 to 0.001 depending on whether the polarization direction of the light is horizontal or perpendicular to the substrate). As a result, the characteristic of the optical module causes a characteristic that varies depending on the polarization state of the input light, that is, polarization dependent loss (PDL). Therefore, in recent years, the manufacture of optical waveguides on silica substrates, rather than silicon, has been increasing significantly, such as the case of an optical splitter used in a subscriber optical communication network commonly referred to as a fiber-to-the-home (FTTH) network. . In the present invention, when the optical waveguide is fabricated in an amorphous dielectric substrate such as a molten quartz substrate such as silica, which is difficult to manufacture V-spheres on the substrate, the optical fiber fixing grooves are formed in the optical module substrate. It is about whether to manufacture the fiber together and passively connect it.

First, it will be described whether the conventional V-sphere manufacturing method of the optical fiber block can be used for the groove fabrication on the optical module substrate. In the manufacture of conventional optical fiber blocks, both silicon and silica substrates can be used. First, in the case of a silicon optical fiber block, a pattern of long square grooves is formed in the [110] direction on the surface of the (100) substrate of silicon to be grooved by a semiconductor photo process, and soaked in a KOH etching solution, so that the etching of the square groove pattern is performed. It is manufactured using the characteristics of the silicon crystal substrate that is stationary at the (111) plane (hereinafter referred to as anisotropic etching). Thus, this method can be used to easily manufacture a silica optical waveguide and a V-sphere on a silicon substrate at the same time. Can be.

However, when the substrate is silica, since the silica is amorphous, the boiling corrosion method cannot be used to make V-spheres. Therefore, when manufacturing a silica optical fiber block is used a method of making a V-sphere by grinding the surface of the silica substrate with a rotary grinding mechanism having a V-shaped blade. However, this method is not applicable to the simultaneous manufacture of V-spheres and optical waveguides. Because the rotary grinding tool is rotated by moving in the direction of movement of the V-sphere with a constant radius, the optical waveguide that is on the extension line of the V-sphere for the purpose of alignment with the V-sphere is ground by the rotary tool. Because.

As an alternative to the method of manufacturing the alignment groove by the rotary grinding mechanism, a dry etching method of the silica substrate by the semiconductor photo process may be considered. Korean Patent Application No. 10-2005-0023238 'Manufacturing method of optical module capable of manual alignment between optical waveguide and optical fiber' is used when forming the optical waveguide core by arranging the optical waveguide core pattern and the optical fiber alignment groove pattern on the same mask. By aligning the optical fiber alignment grooves in the same process, the optical waveguide and the optical fiber alignment grooves are automatically aligned on the substrate surface.

In the present invention, a U-sphere is used as an alignment groove, and the optical fiber inserted into the U-sphere is contacted at three points on the left, right, and bottom surfaces of the U-sphere, thereby dynamically fixing the optical fiber. However, the diameter tolerance of the optical fiber is usually ± 1 μm, so in this method, the optical fiber has an alignment error equal to the diameter tolerance vertically and vertically in the U-groove. Also, in order for an optical fiber to be inserted into a U-sphere, the width of the U-sphere must be larger than the diameter of the optical fiber. Therefore, the U-sphere must have a constant optical fiber tolerance.

In addition, the method of the present invention assumes that the vertical alignment between the optical waveguide and the optical fiber is determined by the etching depth of the U-sphere, so that a very precise etching equipment having an etching uniformity of 2% on the substrate is used when etching the U-sphere. Even if the etching tolerance is at least 2㎛. (Usually, since the diameter of the optical fiber is 125㎛ and the upper cover layer of the optical waveguide is 30㎛, the U-sphere of the present invention should be etched to a depth of about 100㎛.) The alignment error of the optical fiber in the optical fiber is aligned vertically and horizontally by the sum of the diameter tolerance of the optical fiber, the tolerance of U-sphere insertion and the etching tolerance by the etching uniformity.

In addition, in the method of the present invention, even when the depth of the U-sphere is corrected by additional deposition or etching of the film by chemical vapor deposition (CVD) or dry etching, the depth of the U-sphere is CVD on both sidewalls of the U-groove. The film is deposited, so that the width of the U-sphere is narrowed, or both sidewalls of the U-groove are inclined at an angle and etched, thereby increasing the width of the U-sphere. That is, the width of the U-groove is influenced by the depth of the U-groove by the anisotropic deposition or the etch undercut, and this effect is transmitted to the alignment error of the optical fiber. As another patent application, the purpose of the invention of PCT / KR2002 / 002484 is also similar to that of the above invention.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an optical module or a ball lens for an optical module manufactured on a flat dielectric substrate. The present invention provides a connection structure for an optical module for optically aligning and connecting optical parts and a method of manufacturing the same.

Another object of the present invention is to produce an optical module having excellent productivity and low production cost when connecting an optical fiber to an optical module of a silica substrate including an optical waveguide.

Another object of the present invention is to make the optical alignment of the optical waveguide in the substrate automatically to the optical waveguide, the vertical alignment method by the process conditions such as etching or deposition, independent of the horizontal alignment on the substrate In order to improve production yield and process flexibility.

Still another object of the present invention is to devise a structure that can withstand the pressure or impact applied to the groove structure when inserting the optical fiber into the alignment groove.

Yet another object of the present invention is to provide economics of the etching process by minimizing the depth of the groove to be etched for vertical alignment by preventing the deposition of the upper clad film inside the alignment groove.

It is still another object of the present invention to provide a connection structure of an optical module and a method of manufacturing the connection structure for optically aligning and connecting an optical fiber or a sphere lens to optical connection elements such as a laser diode, a photodiode, a light emitting diode, and a reflective mirror. To devise.

Another object of the present invention is to provide a spherical lens adhesion method for preventing contamination of the spherical lens surface by the epoxy by not using an epoxy when fixing the spherical lens to the alignment groove.

In order to solve the above-mentioned problems, the first aspect of the present invention provides a space in which the optical component is mounted in a form in which the first groove and the first groove are formed therein to support the optical component on the substrate. It is provided with a second groove for securing, when the optical component is seated provides a connection structure for the optical module is guided by the line or point of the edge of the first groove.

Herein, the term 'optical module' refers to a structure including an optical fiber or a spherical lens, in which optical elements used in optical communication, optical connection, or optical sensor are arranged together with one or more other structures.

Here, the term 'optical parts' is to be understood as a concept consisting of a unit optical device or a combination of unit optical devices as optically aligned elements constituting an optical module, and the optical fiber, sphere lens, optical waveguide, and laser diode of the present specification. The concept includes a photodiode, a light emitting diode, a sphere lens, a reflective surface, and the like. The optical component may be manufactured integrally on the substrate, or may be manufactured as a separate component from the substrate and fixed to the substrate.

The term “optical waveguide” refers to an optical waveguide in which the optical waveguide core is manufactured by a semiconductor photo process. The cross-section of the core may have various shapes such as square, mound, circular or elliptical shape. It may also be an embossed waveguide in which the optical waveguide protrudes convexly from the substrate surface by etching with the positive pattern, and the core film is formed inside the negative pattern by etching the optical waveguide core in the negative pattern in the lower cladding. As a result, it may be an intaglio waveguide having a structure in which the optical waveguide is concavely recessed in the substrate surface.

The term “substrate” may be a semiconductor substrate, a dielectric substrate, a glass substrate, a polymer substrate, a crystal substrate, a composite substrate of these substrates, and the like, and is particularly useful for the purpose of the present invention with respect to a silica substrate.

The first groove has at least one 'edge line' or 'edge point', the edge line or corner point is located on the lower surface of the second groove to support and fix the optical fiber or sphere lens It is a mechanical structure having a double groove that provides an alignment position of an optical fiber or a sphere lens with respect to an optical component.

In the case of the groove for the purpose of the alignment of the optical fiber is a structure having a U-groove inside the U-groove (hereinafter referred to as double U-groove). Supporting the optical fiber usually uses two edge lines inside the double U-groove, but in the case of supporting only one edge line, an additional fixing surface supporting the optical fiber is required. The fixing surface is usually perpendicular to the substrate, but may be inclined at an angle.

Three edges or corner points are usually used for grooves aimed at aligning the spherical lens, but two or one additional fixing surface is needed for one or two corner points or edges. . The fixing surface may be inclined or perpendicular to the substrate.

The first grooves and / or the second grooves are not limited to the processing method, and mean structures that can be variously manufactured by semiconductor photo-etching processes, laser processing, press molds, and the like.

The second groove determines the depth of the first groove edge line or corner point from the substrate surface. In addition, the second groove provides a minimum space for accommodating the optical fiber or the spherical lens.

The optical module may further have at least one uneven groove connected to an edge line of the first groove or the second groove. The uneven groove may be connected to the first groove and the second groove to be an integrated structure. The uneven groove helps to remove the dust and dirt adhering to the optical fiber, especially when the optical part is an optical fiber, so that the optical fiber adheres well to the edges, and the distribution path of epoxy between the first groove and the second groove Epoxy penetrates well into the groove and discharges, helping to align and fix the optical fiber with a minimum amount of epoxy.

According to a second aspect of the present invention, a first optical part connection part and a second optical part connection part are formed on a substrate, and each optical part connection part includes a first groove formed to support the optical part and a first groove formed therein. And a second groove for securing a space in which the optical component is mounted, wherein the optical component is guided by a line or a point of an edge of the first groove when the optical component is seated, and the first optical component connection part and the The second optical component connecting portion provides a connecting structure for an optical module having a structure aligned with each other.

Connection structure for the optical module may further include a support that can be combined with other optical components. For example, a support may be further provided to connect the photodiode or the laser diode to the connection structure for the optical module. Generally, the support is provided so as to be integrated with the substrate on the substrate by processing the substrate surface.

The third aspect of the present invention has a V groove having an optical component connecting portion and a predetermined inclined surface on a substrate, wherein the optical component connecting portion includes a first groove and a first groove formed therein for supporting the optical component on the substrate. And a second groove for securing a space in which the optical component is mounted, wherein the optical component is guided by a line or a point at an edge of the first groove when the optical component is seated. Provided is a connection structure for an optical module formed with an inclined surface for optical connection with the optical component seated on the optical component connecting portion.

Preferably, the first groove or the second groove is variously manufactured by a semiconductor photo and etching process, a laser processing or a press mold, the width of the first groove or the second groove is constant when looking down from the substrate, or the stairs It is a structure that changes in shape or tapered shape, or changes continuously or intermittently in the shape of triangle, square or wave serration. That is, when the support structure of the groove is an optical fiber, the first to second grooves are usually straight grooves of a predetermined length. However, these grooves may vary in shape of the supporting structure according to the shape of the optical element to be supported. For example, in the case of the sphere lens, a certain portion of each side constituting the triangle becomes a supporting structure.

A fourth aspect of the invention includes the steps of forming a first groove on the substrate for supporting the optical component; And forming a second groove for securing a space in which the optical component is mounted in a form in which the first groove is included therein, wherein the optical component is guided to an edge of the first groove when the optical component is seated. It provides a method of manufacturing a connection structure for an optical module.

Preferably, the method further comprises the step of forming a third groove between the optical component and the optical waveguide, more preferably, the third groove is simultaneously formed in the formation of the first groove and the second groove.

The method may further include providing an uneven groove in the longitudinal direction at the edge of the first groove.

The third groove removes a structure that interferes with the optical fiber support structure that is easily formed at the boundary between the optical waveguide and the optical fiber fixing groove, thereby ensuring that the end of the optical fiber is as close as possible to the optical component or the optical waveguide side. In addition, the third groove serves as a main supply path of the epoxy to help supply the epoxy together with the uneven groove. Of course, the epoxy may be injected from the upper part of the substrate of the second groove, but when a large amount of epoxy covers the optical fiber or the sphere lens on the substrate, the optical path may be contaminated by the epoxy or may distort the alignment position of the optical fiber or sphere lens. It is necessary to supply and use a minimum amount of epoxy through surface wetting and surface tension through the third and uneven grooves.

According to a fifth aspect of the present invention, there is provided a method for forming a mask for forming a first groove on an optical waveguide core and an optical part connecting portion using an optical waveguide core film on a substrate;

Etching the first groove using the mask;

Forming an upper cladding on at least the optical waveguide;

It provides a method of manufacturing a connecting structure for an optical module comprising the step of forming a second groove in a structure including the first groove therein.

Preferably, the method further includes forming a third groove between the optical waveguide part and the optical part connection part.

Meanwhile, in the forming of the mask for forming the first groove, the mask may be provided with the uneven groove in the longitudinal direction at the edge of the first groove.

The sixth aspect of the present invention includes the steps of: engraving a pattern for forming a core of an optical waveguide part and a pattern for forming a first groove of an optical part connecting part on a substrate; Etching using the first groove forming pattern; Forming an optical waveguide core material on the entire structure to fill at least the core forming pattern; Forming a second groove with a structure including the first groove therein; And forming an upper clad at least on the core of the optical waveguide.

On the other hand, in the step of forming the optical waveguide core material in the overall structure to fill at least the pattern for forming the core, it is preferable that a part of the edge of the first groove is also filled.

According to a seventh aspect of the present invention, there is provided a method of forming a mask for forming a first groove on an optical waveguide core and an optical part connecting portion using an optical waveguide core film on a substrate; Etching the first groove using the mask; Forming an upper cladding on at least the optical waveguide; It provides a method of manufacturing a connecting structure for an optical module comprising the step of forming a second groove in a structure including the first groove therein.

According to an eighth aspect of the present invention, there is provided a method of manufacturing a connection structure for an optical module, comprising the steps of integrally forming a first optical part connection part and a second optical part connection part, wherein each optical part connection part is configured to support the optical part. A first groove formed therein and a second groove for securing a space in which the optical component is mounted in a form in which the first groove is embedded, and when the optical component is seated, the optical component is guided to an edge line or a point of the first groove. And a first optical part connection part and a second optical part connection part are aligned with each other according to an etching depth of each groove.

A ninth aspect of the present invention includes the steps of forming a first groove to support an optical component on a substrate; Forming a second groove for securing a space in which the optical component is mounted in a form in which the first groove is included therein; And a V groove having a predetermined angle with the optical component connecting portion, wherein the optical component connecting portion includes a first groove and a first groove formed therein for supporting the optical component on a substrate. With a second groove to secure the

When the optical component is seated, the optical component is guided by a line or a point of an edge of the first groove, and the V groove is formed with an inclined surface for optical connection with the optical component seated at the optical component connecting portion. It provides a method for manufacturing a connection structure for.

The above manufacturing steps describe the minimum process steps necessary to implement the spirit of the present invention as an example, and the order of the above processes may be changed without departing from the spirit of each aspect of the present invention.

It is to be understood that the first, second, and third grooves include all of dry etching, wet etching, laser processing, press mold processing, and mechanical processing. Preferably, the first and second grooves are the most effective dry etching by the plasma, the third groove is best implemented by machining, laser processing or dry etching by rotary grinding. Here, laser processing refers to a method of engraving a substrate with a high power pulsed laser.

When the first, second, and third grooves are manufactured by a method of dry etching, wet etching, or mechanical processing, the edge lines are generally sharp edges. Therefore, if a slight pressure is applied to the optical fiber on the substrate so that the inserted optical fiber is well in contact with the edge line, the edge jaw is easily broken. Therefore, an isotropic plasma etching is additionally used when forming the second groove, or an optical waveguide is used. By using chemical vapor deposition to form the upper clad, the edge line can be rounded. This conversion process of the edge line may be added to the process described in the second aspect, or may be performed simultaneously with the processes of the second aspect.

The present invention has the following effects.

(1) According to the present invention, since the optical fiber is directly connected to the optical module without using the optical fiber block, the production cost is reduced.

(2) According to the present invention, since the optical fiber is fixed by two fixed lines inside the double groove, stable optical fiber connection can be achieved.

(3) According to the present invention, since the spherical lens is fixed by a plurality of fixed lines or fixing points inside the double groove, stable spherical lens alignment can be achieved.

(4) Also, since the fixed line or the fixed point of the present invention can be converted into a rounded curved surface, the possibility of breakage of the alignment structure can be reduced by the pressing force on the fixed line or the fixed point applied when the optical fiber or the spherical lens is inserted.

(5) With the present invention, alignment of the optical fiber or sphere lens in the horizontal direction with respect to the substrate is automatic, and the height of the optical fiber or sphere lens can be adjusted independently of the horizontal direction in the direction perpendicular to the substrate. have. That is, the height of the optical fiber or the spherical lens may be raised by stacking the CVD film inside the alignment groove, or the height of the optical fiber or the spherical lens may be reduced by dry etching the alignment groove.

(6) By using the present invention, the deposition of the optical waveguide upper clad film in the alignment groove of the optical fiber or the spherical lens can be prevented, so that the etching time of the alignment groove of the optical fiber or spherical lens can be reduced.

(6) With the present invention, the spherical lens can be fixedly bonded in the spherical lens alignment groove by the CVD method without using epoxy.

1 is a perspective view of a connection structure for an optical module according to a first embodiment of the present invention.
2A to 2F are perspective views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a first embodiment of the present invention.
3 is a perspective view of a connection structure for an optical module according to a second embodiment of the present invention.
4A to 4F are perspective views and cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a second embodiment of the present invention.
5A to 5F are perspective views and cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a third embodiment of the present invention.
6 is a perspective view illustrating an optical splitter optical module according to the first to third embodiments of the present invention.
7 is a perspective view showing a connection structure for an optical module according to a fourth embodiment of the present invention.
8A to 8D are perspective views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a fourth embodiment of the present invention.
9 is a perspective view showing a connection structure for an optical module according to a fifth embodiment of the present invention.
10A to 10D are perspective views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a fifth embodiment of the present invention.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art may easily implement the technical idea of the present invention.

(First embodiment)

1 is a perspective view of a connection structure for an optical module according to a first embodiment of the present invention. The connection structure for the optical module includes a first groove A formed to support the optical component and a second groove B for securing a space in which the optical component is mounted in a form in which the first groove is embedded. The optical component is guided to the corner of the first groove A when the component is seated. When the optical component is seated, the optical component may be guided by the edge of the second groove B, so that the optical component may be aligned with the core 102 of the optical waveguide.

On the other hand, in the connection structure for the optical module, it is effective to manufacture the optical waveguide part 20 integrally in addition to the optical fiber connecting portion having the first groove A and the second groove. Optical waveguide portion 20 The optical fiber connection portion 30 is likely to have a jaw 409 at its boundary, and this jaw (409 in FIG. 2D) interferes with bringing the optical fiber close to the optical waveguide to the maximum. Accordingly, the third groove 501 may be formed by grinding the surface of the substrate to a predetermined depth along a boundary between the optical waveguide 20 and the optical fiber connecting portion 30, for example, by using a sawing saw.

2A to 2F are cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a first embodiment of the present invention.

Figure 2a is a perspective view showing a first step process of the connection structure for the optical module according to the first embodiment of the present invention.

Referring to FIG. 2A, first, a film covering the entire substrate including the optical waveguide core layers 102 and 103 (hereinafter referred to as 103) is covered with the substrate 10. In this embodiment, a case where a silica substrate is used is taken as an example, and the silica substrate is used as the lower cladding of the optical waveguide. When silicon is used as a substrate, the surface of the silicon substrate may be oxidized to a thickness of about 10 μm to convert the surface of the substrate into a silica film, or the silica bottom clad film may be coated on the substrate, and the optical waveguide core film 103 may be covered thereon.

Next, an etch mask layer (not shown) is deposited on the optical waveguide core layer 103. In embodiments of the present invention, at least several tens of micrometers or more silica substrates must be dry etched. Therefore, the etching selectivity of the etching mask should be large so that the etching mask is not worn out by plasma ions until the etching of the silica groove structure is finished. As the preferred etching mask, a metal film such as chromium, tungsten, or tantalum is mainly used. Here, the case of using chromium as an etching mask is illustrated.

The etch mask layer is subjected to a photo process with a mask having an embossed core pattern in the optical waveguide 20 and a negative groove pattern in the optical component connecting portion 30 to form a PR (photoresist) pattern. The optical waveguide core 102 and the first groove pattern 104 are formed by transferring the chromium etching mask layer and etching the core film using the etching mask layer.

2B is a perspective view illustrating a second step process of the connection structure for an optical module according to the first embodiment of the present invention. In the second step, the etching mask is overlaid on the optical waveguide part 20 of the substrate except for the optical part connection part 30, and the first groove A of the optical part connection part 30 is dry-etched. As a method of overlaying an etch mask only on the optical waveguide 20, the etching mask is applied to the entire substrate and only the etch mask of the optical component connecting portion 30 is removed by a photo process, or the optical waveguide (Lift-off) process is performed. 20) There is a method to apply an etch mask layer only. In this process, the first groove A of the optical component connection part 30 is formed. Then, remove all the etching mask remaining on the substrate.

2C is a perspective view illustrating a third step process of the connection structure for an optical module according to the first embodiment of the present invention. In the third step, the upper clad film 302 is covered on the optical waveguide core 102 by CVD. In this process, the upper cladding film 302 is also covered by the optical component connecting portion 30, and both edge jaws 305 of the first groove A become rounded curved surfaces, and then support and fix optical components such as optical fibers. Used as a jaw.

2D is a perspective view illustrating a fourth step process of the connection structure for an optical module according to the first embodiment of the present invention. In the fourth step, the chromium etching mask layer is deposited again, a second groove etching mask pattern is formed by using a photo process, and then the second groove B is formed by etching to a predetermined depth. The method of making the dry etching mask of the second groove B is the same as the method of making the dry etching mask of the first groove pattern. Since the first groove A is inside the second groove B, when the second groove B pattern is etched, the first groove A is lowered below the surface of the substrate while maintaining the shape thereof. Is made.

2E is a perspective view illustrating a fifth step of the connection structure for the optical module according to the first embodiment of the present invention. The substrate having finished the fourth step is likely to have a jaw 409 at the boundary between the optical waveguide 20 and the optical component connecting portion 30, and this jaw 409 prevents the optical component from approaching the optical waveguide to the maximum. . Therefore, in the fifth step, the surface of the substrate is ground to a predetermined depth with a rotating saw along the boundary between the optical waveguide 20 and the optical component connecting portion 30 to form the third groove 501. Here, the rotary saw may be a cutting saw or a grinding saw with diamond particles commonly used to cut a semiconductor substrate.

2F is a perspective view illustrating a sixth step process of the connecting structure for an optical module according to the first embodiment of the present invention. The sixth step is a step of inserting and aligning the optical fiber 60 into the double U-grooves A and B and curing and fixing the optical fiber 60 to the grooves with epoxy. The optical fiber is inserted into the double groove by means such as a vacuum holder, and pressure is applied to the optical fiber in a direction perpendicular to the substrate so that the epoxy is physically in good contact with the edge jaws of the double groove, and the epoxy is first and second. After permeating well along the three grooves (A, B, 501), the epoxy is cured with ultraviolet light so that the optical fiber 60 is fixed to the edge line of the double groove.

(2nd Example)

3 is a perspective view of a connection structure for an optical module according to a second embodiment of the present invention. Referring to the difference from the first embodiment, the optical module connection structure of the second embodiment includes an optical component mounted in a form in which the first groove C and the first groove are formed to support the optical component. A second groove D is provided to secure a space, and the optical component is guided to an edge of the first groove C to align with the core 702 of the optical waveguide when the optical component is seated. Epoxy is well introduced or discharged into the corners to form the uneven grooves (708 of FIG. 4C) in the longitudinal direction at the edges of the first grooves C to guide and fix the optical parts effectively to the edges of the first grooves C. .

An example of manufacturing the connection structure for the optical module of the second embodiment will be described. First to third grooves C, D and 707 are formed by dry etching, and the upper portion of the optical waveguide is formed on the substrate surface except for the first to third grooves. Explain how to selectively overwrite cladding.

4A to 4F are cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a first embodiment of the present invention.

4A is a perspective view illustrating a first step process of a connection structure for an optical module according to a first embodiment of the present invention. First, the optical waveguide core film 703 is covered on the substrate 10, and an etch mask layer is deposited on the core film. Next, an etch mask pattern is formed by performing a photo process with a mask having an embossed optical waveguide pattern 702 in the optical waveguide part 20 and an optical groove connecting pattern 30 having an intaglio first groove forming pattern 703. This is transferred to a chromium etch mask layer. Subsequently, the core film is dry etched to form the optical waveguide core 702 and the first groove forming pattern 703. In this embodiment, when the first groove forming pattern 703 is made, additional uneven grooves 705 are additionally formed in the longitudinal direction of the corner where the first groove is formed so that the epoxy flows into the first and second grooves well. Or is emitted and helps the optical component (eg optical fiber) to align well with the corner jaws of the double groove.

4B is a perspective view illustrating a second step process of the connection structure for the optical module according to the second embodiment of the present invention. In the second step, the etch mask is overlaid and protected on the optical waveguide 20, and the first groove forming pattern 703 in the optical component connection part 30 is further dry etched. In this process, the first groove forming pattern 703 of the optical component connection part 30 is protected by an etching mask, and the third groove 707 and the first groove C are etched together.

Figure 4c is a perspective view showing a third step process of the connection structure for an optical module according to a second embodiment of the present invention. In the third step, the etching mask used in the second step is removed, and a new etching mask layer is deposited. Then, an etching mask pattern is formed by a photo process on the second etching step and transferred to the etching mask layer to fabricate the second groove (D). Make an etch mask for it. Subsequently, the second groove D and the third groove 707 are etched to a predetermined depth while protecting both the shoulders 703 and the optical waveguide 20 of the second groove with the prepared etching mask. In this process, since the first groove C is in the second groove D, its shape is maintained and descends from the surface of the substrate together with the second groove D. After etching, remove the etching mask.

4D is a cross-sectional view illustrating a fourth step process of the connection structure for an optical module according to the second embodiment of the present invention. The fourth step process is to cover the upper clad film only on the upper surface of the substrate while protecting the first to third grooves (C, D, 707) already made.

In FIG. 4D, (a) is a cross-sectional view of the third step process seen from the optical component connecting portion 30 side of the substrate. First, a photosensitive polymer material 1003 such as SU-8 or photoresist is coated on the substrate (step (b)). Next, the substrate is exposed to light and developed to remove the photosensitive polymer near the substrate surface except the inside of the double groove (step (c)). In this process, it is important to adjust the exposure time so that the photosensitive polymer 1003 remains sufficiently inside the double groove. Subsequently, the upper clad silica film 1007 is deposited by flame hydrolysis deposition (FHD) or plasma enhanced chemical vapor deposition (PECVD) (step (d)).

At this time, the deposition temperature is suitable 120 ~ 250 ℃ and if the deposition temperature is too high it is difficult to remove the photosensitive polymer. Next, the substrate is heated and cooled to crack the upper clad film 1007 by expansion and contraction of the photosensitive polymer, immersed in a boiling water photoresist removal solution to remove the polymer inside the double groove and the silica film thereon ( (e) step).

In the above, the case of protecting the inside of the groove by using the photosensitive polymer. The photosensitive polymer is exemplified because when the photosensitive polymer is used, the polymer can be conveniently removed by exposing the polymer outside the groove on the substrate, and it is not necessary to use the photosensitive polymer for the purpose of the present invention. That is, a method may be used instead of coating the substrate with a polymer material that withstands higher temperatures than the photosensitive polymer and removing the polymer outside the grooves on the substrate with a plasma.

By the above-described process, the upper clad film of the optical waveguide can be selectively stacked only on the surface of the substrate while the upper clad film is not accumulated in the groove. The thickness of the upper clad is usually 20 µm or more. Compared to the second embodiment, the first embodiment stacks the upper clad in the double groove, so that the first to second grooves must be etched by the thickness of the upper clad to align the optical fiber with the optical waveguide core. Therefore, the etching depth of the second groove can be reduced by using the method of the second embodiment.

4E is a perspective view illustrating a fifth step of the connection structure for the optical module according to the second embodiment of the present invention. The depth of the edge of the second groove D determines the alignment of the optical fiber with respect to the optical waveguide core in a direction perpendicular to the substrate, and is a very important process variable for efficient optical coupling. Therefore, in the fifth step, the depth of the second groove D is measured by a measuring instrument such as a three-dimensional measuring instrument, and then the depth of the second groove D is finely adjusted. To deepen the grooves, dry etching may be performed using an isotropic plasma. To make the second grooves D thinner, a silica film may be conformally deposited by chemical vapor deposition. In this process, the edge line for fixing the optical fiber inside the double groove is rounded as in the first embodiment.

4F is a perspective view illustrating a sixth step process of the connection structure for an optical module according to the second embodiment of the present invention. In the sixth step, the optical fiber 60 is mounted in the double U-groove and fixed with epoxy as in the first embodiment. At this time, the uneven groove 708 is added to the first, second grooves (C, D) and etched to help the introduction of epoxy to minimize the use of epoxy.

(Third Embodiment)

In the third embodiment, the optical waveguide and the double U-groove are intaglio, the optical waveguide core is formed by flame hydrolysis deposition in the optical waveguide intaglio groove, and then the optical waveguide core layer on the surface of the substrate except for the optical waveguide groove is removed. Next, another method for forming an optical waveguide and double U-groove for optical fiber passive connection by depositing an optical waveguide upper clad is described.

5A to 5F are cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a third embodiment of the present invention.

5A is a perspective view illustrating a first step process of a connection structure for an optical module according to a third exemplary embodiment of the present invention. First, an etch mask layer is deposited on the substrate 10, and then a photo process is performed using a mask having a pattern for forming a negative optical waveguide in the optical waveguide part 20 and a negative first groove pattern in the optical part connection part 30. This is carried out to transfer the pattern to the chromium etching mask layer. Subsequently, the silica substrate is dry-etched to form the intaglio pattern F of the optical waveguide core and the intaglio pattern E of the first groove.

5B is a perspective view illustrating a second step process of the connection structure for an optical module according to a third exemplary embodiment of the present invention. In the second step, the etch mask is overlaid and protected on the optical waveguide 20, and the first groove pattern of the optical component connecting portion 30 is further dry etched.

5C is a perspective view illustrating a third step process of the connection structure for an optical module according to the third embodiment of the present invention. The third step is to fill the optical waveguide core material 131 in the indent groove for the optical waveguide made in the first step. (C) of FIG. 5C is sectional drawing which shows the process of performing a 3rd step process to the optical waveguide part 20, and (i)-(iv) of FIG. 5C shows an optical component connection part ( It is sectional drawing which shows the process performed to 30). The optical waveguide part 20 and the optical part connection part 30 may be implemented in separate processes, respectively. However, the optical waveguide part 20 and the optical part connection part 30 may be implemented in the same process. That is, when the process is performed by (a) of FIG. 5C, (c) of FIG. 5C, (b) of FIG. 5C, (ii) of FIG. 5C, etc.

FIG. 5C (a) is a cross section of the optical waveguide part 20, and FIG. 5C (i) is a cross section of the optical component connection part 30. As shown in FIG. First, the etching mask used in the second step is removed in FIGS. 5C and 5C. Next, silica fine particles are deposited by flame hydrolysis deposition (FIG. 5C and FIG. 5C), followed by heat treatment to form a silica core film (FIGS. 5C and 5C). iii)) Then, the core film is etched again by the thickness of the core film formed on the substrate ((d) of FIG. 5C and (iv) of FIG. 5C).

In this process, the silica material filled in the core groove remains. Because, during the heat treatment, the silica particle layer is reduced to about 1/10 of the thickness, and the particles are melted together to form a silica film. If there is a step such as a groove or a step on the substrate surface below the particle layer, This is because the surface tension of the fine particles is smoothly moved by the surface tension to planarize the surface of the silica film.

On the other hand, for the same reason, the silica fine particles accumulated in the optical component connecting portion 30 are rounded with a minimum thickness near the corner jaw where the optical fiber is fixed during the heat treatment, and further near the bottom edge of the first groove E. Gathered round too. Subsequently, in the subsequent core film removal process (FIGS. 5C and 5C), the core film of the optical waveguide 20 except for the core groove F is removed, but the optical fiber fixing edge tuck of the optical component connecting portion 30 is removed. Since the 145 is etched along the shape of the jaw 145 of (iii) of FIG. 5C, its height is lower than that of the substrate (not shown), and the etching depth of the second groove G, which determines the vertical alignment of the optical fiber, is determined. The effect is to reduce. If the optical fiber fixing edge tuck 145 is not desired to be etched, the etching mask of the second step is removed only from the optical waveguide 20, and the third step is performed, and then the second step of the optical part connecting part 30 is removed. Etch mask can also be removed. In this case, the surface of the silica substrate is protected evenly as shown in Fig. 5C (iv).

5D is a perspective view illustrating a fourth step process of the connection structure for an optical module according to the third embodiment of the present invention. In the fourth step, after the new etching mask layer is deposited, an etching mask pattern for fabricating the second groove G is formed on the photo process and transferred to the mask layer. Subsequently, the second groove G is etched to a predetermined depth while protecting the optical waveguide 20. After etching, remove the etching mask.

5E is a perspective view illustrating a fifth step of the connection structure for the optical module according to the third embodiment of the present invention. In the fifth step, as in the fourth step of the second embodiment, the upper clad silica film 179 is deposited while protecting the groove formed in the substrate with the photoresist.

5F is a perspective view illustrating a sixth step process of the connecting structure for an optical module according to the third embodiment of the present invention. In the sixth step, as shown in the first embodiment, the third groove 181 is formed by the rotary grinding mechanism along the boundary between the optical waveguide 20 and the optical component connecting portion 30 on the substrate surface, and the optical fiber 60 is placed in the double U-groove. Insert and fix with epoxy.

In the first to third embodiments described above, a single optical fiber is illustrated for convenience, but a plurality of first grooves may be coupled to one second groove.

6 is a perspective view of a structure in which a plurality of connection structures for optical modules according to the first to third embodiments of the present invention are integrated together on a substrate. This structure will be described taking an optical splitter as an example. The optical splitter has one input port and four output ports. While the first and second grooves of the input port are each one, the output port is a structure in which four first grooves and one second groove are combined, and four U-grooves are coupled to one U-groove. Has a structure of multiple U-grooves. In this example, the optical fiber diameter is 125 mu m and the spacing between the optical fibers is 126 mu m.

(Example 4)

This embodiment exemplifies a mechanism in which optical alignment and fixing between optical components on a planar substrate is made through a spherical lens, and illustrates a manufacturing process of an optical transceiver optical module using the same mechanism.

In this example, it is assumed that the laser diode and the optical fiber are connected to the spherical lens, but the scope of the present embodiment is not applicable only to the pair of the laser diode and the optical fiber, but the optical fiber, the optical waveguide, the light emitting diode, the photodiode, It can be applied well to a pair of laser diodes and the like, and is particularly useful when using a silica substrate.

7 is a perspective view showing a connection structure for an optical module according to a fourth embodiment of the present invention.

In the connection structure for an optical module according to the fourth embodiment, a first optical part connection part L and a second optical part connection part M are formed, and each optical part connection part includes a first groove L formed to support the optical part. -1, M-1 and the second groove (L-2, M-2) for securing a space in which the optical component is mounted in the form of the first groove is built, when the optical component is seated 1 Optical parts are guided by dots or lines at the edges of the grooves L-1 and M-1. The first optical part connection part L and the second optical part connection part M have a structure aligned with each other.

In addition, such a structure may have a structure that is continuously repeated and may be manufactured to have a support 201 to be combined with other optical components such as a light source and a photodiode.

In the fourth embodiment, the first optical part connection part L is an optical fiber, and the second optical part connection part M is a spherical lens, for example. Describes the structure to be mounted.

 The optical fiber 70, the spherical lens 80, and the laser diode 235 are optically connected, and the optical axes of the optical fiber 70 and the spherical lens 80 should be aligned in a straight line for optimal optical connection. In addition, the spherical lens 80 and the optical fiber 70 are spaced apart from each other in the optical axis direction.

The position in the direction parallel to the substrate of each optical component is determined by the horizontal position of the alignment structures fabricated by the mask pattern. That is, the position of the spherical lens 80 is determined by three edge lines 226, and the position of the optical fiber 70 is determined by two edge lines 228 (only one is shown) and the optical fiber stop jaw 229. The laser diode 235 is defined by the metal alignment pattern (236 of FIG. 7).

The metal alignment pattern 236 of FIG. 7 may also be used as an electrode for supplying current to the laser diode 235. Since the laser diode 235 has a large heat dissipation, the laser diode 235 needs to be large and thick enough for effective heat dissipation. Preferably, a silicon film having a high thermal conductivity is disposed between the metal film and the substrate.

Next, the vertical height of the spherical lens 80 with respect to the laser diode 235 is determined by the height of the three edges 226 at the connection portion of the M-1 groove and the M-2 groove, and the spherical lens 80 with respect to the spherical lens 80. The vertical height of the optical fiber 70 is determined by the edge 228 of the L-1 groove (only one is shown).

Here, the three corner lines 226 for determining the position of the spherical lens 80 need not necessarily be a line and may be corner points. Alternatively, a portion of the surface may be perpendicular to the substrate, and the surface may be inclined at an angle to the substrate.

The two bottom surfaces of the L-2 groove determine the height of the fiber with the spacing of the two edges (228 (only one shown)). The three bottom surfaces of the M-2 grooves determine the height of the spherical lens 80 together with the spacing of the three edge lines 226.

The bottom surface of the L-2 groove and the bottom surface of the M-2 groove may be the same. In this case, the heights of the central axes of the optical fiber 70 and the spherical lens 80 from the surface of the substrate can be matched with each other by setting the distance between the two edges supporting the optical fiber and the three edges supporting the spherical lens differently in the design of the mask. .

Next, a manufacturing process of the optical module according to the fourth embodiment will be described.

8A to 8F are cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a fourth embodiment of the present invention.

8A is a perspective view illustrating a first step process of a connection structure for an optical module according to a fourth exemplary embodiment of the present invention. The L-1 groove and the M-1 groove are fabricated by the photo process and dry etching in accordance with the first to third embodiments.

8B is a perspective view illustrating a second step process of the connection structure for an optical module according to a fourth embodiment of the present invention. Following the first step, M-2 grooves are fabricated by the photo process and dry etching according to the first to the third embodiments. In this process, the L-1 and M-1 grooves increase in depth at the substrate surface.

8C is a perspective view illustrating a third step process of the connection structure for an optical module according to the fourth embodiment of the present invention. Following the second step, the L-2 groove is manufactured by the photo process and dry etching according to the first to the third embodiments. In this process, L-1 grooves, M-1 grooves and M-2 grooves increase in depth on the substrate surface.

8D is a perspective view illustrating a fourth step process of the connection structure for an optical module according to the fourth embodiment of the present invention. First, a metal mask 236 for laser diode alignment is formed. The alignment metal mask 236 may have a separate alignment pattern shape to help put the laser diode 235 in the correct horizontal position. Next, the laser diode 235 is fixed to the alignment position. Next, the spherical lens 80 is seated on the three corner lines 226 and the spherical lens is attached to the three corner lines 226 by chemical vapor deposition. Here, the silica film deposited by chemical vapor deposition is deposited in the gap between the spherical lens and the three corners in addition to the front surface of the substrate, and attaches the spherical lens to the three corners of the substrate. If the silica film is not desired to be deposited in the grooves L-1 and L-2 for fixing the optical fiber in this process, it can be protected by filling the photoresist in the optical fiber fixing groove by the method of the second embodiment.

The selection of the spherical lens material is such that the coefficient of thermal expansion is the same as that of the substrate material, so that the spherical lens does not crack and fall off from the substrate due to the temperature rise by the laser diode. For example, if the substrate is silicon, a spherical lens is used as a spherical lens, and if the substrate is quartz glass, a quartz glass sphere is used.

In addition to the method of fixing the spherical lens by using the chemical vapor deposition method described above, the epoxy may be injected into the M-1 groove and cured by ultraviolet rays. Next, the optical fiber 70 is inserted into the fixing grooves L-1 and L-2, and epoxy is injected to cure and fix it.

(Example 5)

This embodiment illustrates a mechanism in which optical alignment and fixation between optical coupling elements on a planar substrate is performed as shown in FIG. 9 through a 45 degree mirror, and also illustrates a manufacturing process of an optical module connecting structure using the same mechanism. .

In this example, it is assumed that the photodiode and the optical fiber are connected by a 45 degree mirror. However, the photodiode and the optical fiber may be applied to all other angles in which the photodiode and the optical fiber may be optically connected. In addition, the scope of the present embodiment can be applied not only to a pair of photodiodes and optical fibers, but also to a pair of optical fibers, optical waveguides, light emitting diodes, laser diodes, and the like, in particular, when using a silica substrate. Useful for

9 is a perspective view showing a connection structure for an optical module according to a fifth embodiment of the present invention.

9, the connection structure for the optical module has a V groove having a predetermined angle with the optical component connecting portion. The optical part connecting part includes a first groove K-1 formed to support the optical component on the substrate and a second groove K-2 for securing a space in which the optical component is mounted in a form including the first groove therein. And an optical part is guided by a line or a point at an edge of the first groove when the optical part is seated.

The V groove having a predetermined angle is formed with an inclined surface for optical connection with the optical fiber seated on the optical component connecting portion. For example, it is optically connected to the photodiode 279 via a 45 degree mirror 277. The position in the direction parallel to the substrate of the optical fiber 70 and the photodiode 279 is determined by the horizontal position of the alignment structures produced by the mask pattern. 45 degree mirrors can be fabricated by grinding the surface of a silica substrate with a rotary grinding mechanism having a V-shaped blade with two sides perpendicular to the substrate and 45 degrees each. The position of the optical fiber is defined by two edges 263 (only one shown) and the optical fiber stop jaw 264, and the photodiode 279 is defined by the metal alignment pattern 258. The metal alignment pattern 258 may also be used as the electrode 279 of the photodiode.

Next, a manufacturing process of the connection structure for the optical module according to the fifth embodiment will be described.

10A to 10D are cross-sectional views illustrating a flowchart of a manufacturing process of a connection structure for an optical module according to a fifth embodiment of the present invention.

10A is a perspective view illustrating a first step process of a connection structure for an optical module according to a fifth exemplary embodiment of the present invention. The first grooves K-1 are formed in the substrate by the photo process and the dry etching according to the first to third embodiments.

10B is a perspective view illustrating a second step process of the connection structure for an optical module according to a fifth embodiment of the present invention. Following the first step, the second grooves K-2 are manufactured by the photo process and the dry etching according to the first to third embodiments. In this process, the first groove K-1 is deeper in the substrate surface. Next, a photodiode alignment and electrode metal film 258 is deposited.

10C is a perspective view illustrating a third step process of the connection structure for an optical module according to the fifth embodiment of the present invention. In this step, the V-groove 266 for the production of the 45 degree reflective surface is ground with a rotary grinding tool. A dielectric or metal reflective thin film 267 is then coated on the ground 45 degree surface.

10D is a perspective view illustrating a fourth step process of the connection structure for an optical module according to the fifth embodiment of the present invention. First, fix the photodiode in the alignment position. To assist placing the photodiode in the correct horizontal position, the alignment metal mask may have a separate alignment pattern shape. Next, the optical fiber 70 is inserted into the optical fiber grooves K-1 and K-2, and epoxy is injected and cured to fix it.

Various changes may be made in the present invention without departing from the spirit or scope of the invention. Accordingly, the foregoing description of the embodiments according to the present invention will be provided for purposes of illustration only, and not for the purpose of limiting the invention as defined by the appended claims and their equivalents.

20: optical waveguide,
30: optical fiber connection,
70: optical fiber

Claims (32)

A first groove formed to support the optical component on the substrate;
The second groove is provided with a second groove for securing a space in which the optical component is mounted in a form that is included therein,
Connection structure for an optical module, the optical component is guided by a line or a point of the edge of the first groove when the optical component is seated. The method according to claim 1,
Connection structure for an optical module made of the optical waveguide for the optical component and the optical communication unitary. The method of claim 2,
Connection structure for an optical module provided with a third groove between the optical component and the optical waveguide. The method according to claim 1,
Connection structure for an optical module having a concave-convex groove in the longitudinal direction at the edge of the first groove or the second groove. A first optical part connection part and a second optical part connection part are formed on a substrate,
Each optical component connection part includes a first groove formed to support the optical component and a second groove for securing a space in which the optical component is mounted in a form in which the first groove is embedded, when the optical component is seated. Configured to guide the optical component by a line or a point at the edge of the groove,
And the first optical part connection part and the second optical part connection part have a structure aligned with each other. The method of claim 5,
The optical module connection structure further comprises a support for coupling with other optical components. The method of claim 6,
Connection structure for an optical module further comprising an alignment mask on the support. V-grooves having optical component connection portions and predetermined inclined surfaces are mounted on the substrate,
The optical part connection part includes a first groove formed to support the optical part on a substrate and a second groove for securing a space in which the optical part is mounted in a form including the first groove therein,
When the optical component is seated, the optical component is guided by a line or a point of an edge of the first groove,
The V-groove is an optical module connecting structure formed with an inclined surface for optical connection with the optical component seated on the optical component connecting portion. The method of claim 8,
The inclined surface is substantially 45 degrees optical module connection structure. The method of claim 8,
Connection structure for an optical module having an optical transmitting element or an optical receiving element on the upper portion of the V groove. The connection structure of claim 8, wherein the inclined surface is coated with a dielectric or metal reflective thin film. The method of claim 1, wherein
The substrate is a connection structure for an optical module made of silica. The method of claim 1, wherein
The first groove or the second groove is a connection structure for an optical module manufactured by semiconductor photo and etching process, laser processing or press mold. The method of claim 1, wherein
When the width of the first groove or the second groove is viewed from above the substrate, the optical module has a structure that is constant, stepped or tapered, or continuously or intermittently changed into a sawtooth of the triangle, square or wave shape. Connection structure. The method of claim 1, wherein
The optical module connection structure is a plurality of optical module connection structure is integrated together on the substrate. Forming a first groove to support the optical component on the substrate;
And forming a second groove for securing a space in which the optical component is mounted in a form in which the first groove is included therein,
And the optical part is guided to a line or a point of an edge of the first groove when the optical part is seated. The method of claim 16,
And forming a third groove between the optical component and the optical waveguide. The method of claim 17,
And the third groove and the first groove are simultaneously formed. The method of claim 16,
The method of manufacturing a connection structure for an optical module further comprising the step of providing a concave-convex groove in the longitudinal direction at the edge of the first groove. Forming a mask for forming a first groove on the optical waveguide core and an optical part connecting portion using the optical waveguide core film on a substrate;
Etching the first groove using the mask;
Forming an upper cladding on at least the optical waveguide;
And forming a second groove with a structure including the first groove therein. The method of claim 20,
And forming a third groove between the optical waveguide part and the optical part connection part. The method of claim 20,
In the step of forming a mask for forming the first groove, the manufacturing method of the connection structure for an optical module having a concave-convex groove in the longitudinal direction at the edge of the first groove in the mask. Negatively forming a pattern for forming a core of the optical waveguide part and a pattern for forming a first groove of the optical part connection part on the substrate;
Etching using the first groove forming pattern;
Forming an optical waveguide core material on the entire structure to fill at least the core forming pattern;
Forming a second groove with a structure including the first groove therein; And
And forming an upper clad on at least a core of the optical waveguide. The method of claim 23, wherein
Forming an optical waveguide core material in the entire structure to fill at least the core forming pattern, wherein both sides of the bottom edge of the first groove are also filled; The method of claim 23, wherein
And forming a third groove between the optical waveguide part and the optical part connection part. In the manufacturing method of the connecting structure for the optical module,
And integrally forming the first optical part connection part and the second optical part connection part,
Each optical part connection part includes a first groove formed to support the optical component and a second groove for securing a space in which the optical component is mounted in a form in which the first groove is embedded, and the first groove when the optical component is seated. Method of manufacturing a connection structure for a module in which an optical component is guided by a line or a point of the edge of the. The method of claim 26,
And the first optical part connection part and the second optical part connection part are aligned with each other by varying the etching depth of each groove. The method of claim 26,
The optical module connection structure further comprises the step of forming a support that can be combined with other optical components. The method of claim 28,
And forming an alignment mask on the support. Forming a first groove to support the optical component on the substrate;
Forming a second groove for securing a space in which the optical component is mounted in a form in which the first groove is included therein; And
The V groove having a predetermined angle with the optical part connecting portion,
The optical part connection part includes a first groove formed to support the optical part on a substrate and a second groove for securing a space in which the optical part is mounted in a form including the first groove therein,
When the optical component is seated, the optical component is guided by a line or a point of an edge of the first groove,
And the V-groove is formed with an inclined surface for optical connection with the optical component seated on the optical component connecting portion. The method of claim 30,
And installing an optical transmitting element or an optical receiving element on the upper portion of the V groove. 31. The method of claim 30, further comprising coating a dielectric or metal reflective thin film on the inclined surface.

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