CN103091783B - Tunable array waveguide grating based on liquid crystal waveguides - Google Patents
Tunable array waveguide grating based on liquid crystal waveguides Download PDFInfo
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Abstract
The invention relates to a tunable array waveguide grating based on liquid crystal waveguides, and belongs to integrated waveguide optical devices. The problems that an existing tunable array waveguide grating is complex in preparation technology, relatively high in cost and relatively poor in consistency of performance are solved. The tunable array waveguide grating based on the liquid crystal waveguides comprises an input coupled area, an array waveguide area, an output coupled area and an output waveguide area, wherein the input coupled area, the array waveguide area, the output coupled area and the output waveguide area are arrayed in sequence on a light path, the input coupled area is formed by a first right trapezoid prism-shaped electrode, a second right trapezoid prism-shaped electrode, a concave-lens-shaped electrode and a first convex-lens-shaped electrode, the array waveguide area is formed by N parallel vertical-bar-shaped electrodes, the output coupled area is formed by second convex-lens-shaped electrodes, and the output waveguide area is formed by M parallel vertical-bar-shaped electrodes. The electrodes in various shapes are all plated on the upper surface of a liquid crystal layer of a liquid crystal waveguide. The tunable array waveguide grating based on the liquid crystal waveguides is simple in structure, easy to manufacture and low in cost, the electrooptic effect of the liquid crystal layer is used to achieve tunable performance, and the tunable array waveguide grating based on the liquid crystal waveguides is beneficial for demultiplexing wave band frequency tuning.
Description
Technical field
The invention belongs to integrated waveguide optical device, particularly a kind of tunable array waveguide grating based on liquid crystal waveguide.
Background technology
Array waveguide grating (hereinafter to be referred as AWG), as one of most important optical device in Networks of Fiber Communications, after within 1988, being proposed by Smit, progressively enters into commercial stage from laboratory stage.As shown in Figure 1, the AWG of traditional structure generally consists of five parts: input waveguide 1, input free transmission range 2, Waveguide array 3, export free transmission range 4, output waveguide 5.Because adjacent waveguide in Waveguide array exists certain optical path difference n Δ L, thereby the light of each wavelength will produce different phase differential, and then realizes the function of grating dispersion.AWG practical function is: the light of each wavelength in the complex light of the composition of different wave length is separated, and is a kind of multiplexing device of Wave Decomposition of realizing.
As important DWDM (dense wave division multipurpose) device, the tunable performance that how to increase existing AWG is an important research topic.In traditional AWG, material used is low electrooptical coefficient, and electro-optical tuning is feasible hardly.The AWG technical scheme of existing integrated tunable, in Waveguide array 3, to adopt electric light phase-shifter, realize its continuous tuning function, on project organization, input, output planar waveguide are still all the planar waveguides that adopts Rowland circle structure, and each waveguide of forming array waveguide is still crooked rectangular waveguide, with existing integrated waveguide technique, complicated process of preparation, cost is higher, and consistency of performance is poor; See Heck, M.J.R., La Porta, A., Leijtens, X.J.M et al., Monolithic AWG-based Discretely Tunable Laser Diode With Nanosecond Switching Speed, IEEE Photonics Technology Letters, 2009,21 (13): 905-907.
The high electrooptical coefficient of liquid crystal (5V voltage variations in refractive index representative value is 0.2) provides possibility for realizing tunable integrated opto-electronic device, has had the report of part correlative study, tunable switch for example, tunable SOI micro-ring resonator.Due to the development of integrated light guide technology, the development that the good electrooptical effect of liquid crystal waveguide is Novel Optoelectronic Device provides new evolutionary path and direction.
Summary of the invention
The invention provides a kind of tunable array waveguide grating based on liquid crystal waveguide, solve existing tunable array waveguide grating complicated process of preparation, cost is higher, the problem that consistency of performance is poor.
A kind of tunable array waveguide grating based on liquid crystal waveguide provided by the present invention, is included in the input coupled zone, Waveguide array district, output coupled zone and the output waveguide district that in light path, are arranged in order, it is characterized in that:
Described input coupled zone consists of the first right-angled trapezium prism shape electrode being arranged in order in light path, the second right-angled trapezium prism shape electrode, concavees lens shape electrode and the first convex lens shape electrode, forms beam collimation beam-expanding system; Wherein, the first right-angled trapezium prism shape electrode is identical with the shape of the second right-angled trapezium prism shape electrode, and both are spliced into rectangle at inversion;
Described Waveguide array district consists of the parallel vertical bar shape electrode of N bar, forms a straight parallel Waveguide array district, N >=3;
Described output coupled zone consists of the second convex lens shape electrode, forms the interference region of converging of light beam;
Described output waveguide district consists of the parallel vertical bar shape electrode of M bar, forms output waveguide, and M is output channel number, M >=1;
Above-mentioned various shape electrode is all plated in the liquid crystal layer upper surface of liquid crystal waveguide; The side section of described liquid crystal waveguide is followed successively by liquid crystal layer, ducting layer, under-clad layer, substrate from top to bottom.
Incident light enters from the end face of liquid crystal waveguide.
Described tunable array waveguide grating, it is further characterized in that:
Gap between described input coupled zone, Waveguide array district, output coupled zone and output waveguide district each several part is 10 μ m～1000 μ m;
The upper length of side of described the first right-angled trapezium prism shape electrode and the second right-angled trapezium prism shape electrode is 10 μ m～100 μ m, and upper and lower side ratio is 1: 2～1: 4, and height is 50 μ m～2000 μ m;
Described concavees lens shape electrode, the upper and lower length of side is 20 μ m～400 μ m, height is 50 μ m～2000 μ m, focal length 10 μ m～1000 μ m;
Described the first convex lens shape electrode, height is 50 μ m～2000 μ m, focal length 10 μ m～1000 μ m;
Between described the first right-angled trapezium prism shape electrode, the second right-angled trapezium prism shape electrode, concavees lens shape electrode and the first convex lens shape electrode, gap is 5 μ m～20 μ m;
In described Waveguide array district, each vertical bar shape electrode shape and measure-alike, width 2 μ m～5 μ m, length 500 μ m～3000 μ m, interval 10 μ m～20 μ m;
Described the second convex lens shape electrode, height is 50 μ m～2000 μ m, focal length 10 μ m～1000 μ m;
In described output waveguide district, each vertical bar shape electrode shape and measure-alike, width 2 μ m～5 μ m, length 100 μ m～1000 μ m, interval 10 μ m～50 μ m.
Described tunable array waveguide grating, the ducting layer material of described liquid crystal waveguide is silicon (Si) or silicon nitride (Si
3n
4), thickness is 0.3 μ m～2.0 μ m;
Each electrode material in described input coupled zone, Waveguide array district, output coupled zone and output waveguide district is tin indium oxide (ITO).
The present invention is based on dull and stereotyped liquid crystal waveguide, when transmission light, on each electrode that forms input coupled zone, set suitable voltage, make each electrode below liquid crystal waveguide form equivalent the first right-angled trapezium prism, the second right-angled trapezium prism, concavees lens and the first convex lens optical element; Light is through input coupled zone, form collimator and extender directional light, be coupled into equably Waveguide array district, Zai You Waveguide array district is sent to output coupled zone, at the suitable voltage of the second convex lens shape electrode setting that forms output coupled zone, make this electrode below liquid crystal waveguide form equivalent the second convex lens optical element, light is realized multiple beam and is converged interference in output coupled zone, in the Guang Jiang output waveguide district of different wave length, output is converged in the waveguide at diverse location place, realizes the multiplexing function of Wave Decomposition.
The tunable performance principle of the present invention is: the voltage of the vertical bar shape electrode that Waveguide array district is parallel
for:
wherein
for putting on every vertical bar shape electrode, make the below liquid crystal waveguide of vertical bar shape electrode form the voltage of equivalent slab waveguide;
for being attached on every vertical bar shape electrode, make each equivalent slab waveguide produce the voltage of optical path difference; Set every voltage on vertical bar shape electrode
can control the optical path difference of equivalent slab waveguide in Waveguide array district, reach the effect of output light wavelength continuously adjustable.
The present invention is simple in structure, be easy to make, with low cost, Waveguide array district consists of parallel vertical bar shape electrode, compares the flexure type Waveguide array of traditional AWG equivalent constructions, consistency of performance is good; Utilize the electrooptical effect of liquid crystal layer, realize tunable performance, the audio range frequency that is conducive to its demultiplexing is tuning.
Accompanying drawing explanation
Fig. 1 is traditional array wave-guide grating structure schematic diagram;
Fig. 2 is structural representation of the present invention;
Fig. 3 is the side cross-sectional view of liquid crystal waveguide;
Fig. 4 is input coupled zone electrode shape schematic diagram;
Fig. 5 is Waveguide array region electrode shape schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further described.
As shown in Figure 2, present invention resides in input coupled zone 7, Waveguide array district 8, output coupled zone 9 and the output waveguide district 10 being arranged in order in light path; Each part mentioned above is all plated in the liquid crystal layer upper surface of liquid crystal waveguide 6; Incident light enters from the end face of liquid crystal waveguide 6.
As shown in Figure 3, described liquid crystal waveguide 6 is followed successively by liquid crystal layer 6-1, ducting layer 6-2, under-clad layer 6-3, substrate 6-4 from top to bottom.
As shown in Figure 4, described input coupled zone 7 consists of the first right-angled trapezium prism shape electrode 7-1 being arranged in order in light path, the second right-angled trapezium prism shape electrode 7-2, concavees lens shape electrode 7-3 and the first convex lens shape electrode 7-4, forms beam collimation beam-expanding system; Wherein, the first right-angled trapezium prism shape electrode 7-1 is identical with the shape of the second right-angled trapezium prism shape electrode 7-2, and both are spliced into rectangle at inversion;
As shown in Figure 5, described Waveguide array district 8 consists of the parallel vertical bar shape electrode of N bar, forms a straight parallel Waveguide array district;
Described output coupled zone 9 consists of the second convex lens shape electrode, forms the interference region of converging of light beam;
Described output waveguide district 10 consists of the parallel vertical bar shape electrode of M bar, forms output waveguide, and M is output channel number.
Embodiments of the invention 1:
Gap between described input coupled zone 7, Waveguide array district 8, output coupled zone 9 and output waveguide district 10 each several parts is 300 μ m;
Described the first right-angled trapezium prism shape electrode 7-1 and the second right-angled trapezium prism shape electrode 7-2, the upper length of side 100 μ m, upper and lower side ratio 1: 4, high 2000 μ m,
Described concavees lens shape electrode 7-3, the upper and lower length of side 400 μ m, high 2000 μ m, focal length 500 μ m,
The first convex lens shape electrode 7-4, high 2000 μ m, focal length 500 μ m,
Between described the first right-angled trapezium prism shape electrode 7-1, the second right-angled trapezium prism shape electrode 7-2, concavees lens shape electrode 7-3 and the first convex lens shape electrode 7-4, gap is 20 μ m;
Described Waveguide array district 8 consists of 80 parallel vertical bar shape electrodes, each vertical bar shape electrode shape and measure-alike, width 5 μ m, length 3000 μ m, interval 20 μ m;
Described the second convex lens shape electrode, high 2000 μ m, focal length 500 μ m,
Described output waveguide district 10 consists of 8 parallel vertical bar shape electrodes, each vertical bar shape electrode shape and measure-alike, width 5 μ m, length 1000 μ m, interval 50 μ m.
Described tunable array waveguide grating, the ducting layer 6-2 material of described liquid crystal waveguide 6 is silicon nitride (Si
3n
4), thickness is 0.3 μ m;
Each electrode material in described input coupled zone 7, Waveguide array district 8, output coupled zone 9 and output waveguide district 10 is tin indium oxide (ITO).
Embodiments of the invention 2:
Gap between described input coupled zone 7, Waveguide array district 8, output coupled zone 9 and output waveguide district 10 each several parts is 50 μ m;
Described the first right-angled trapezium prism shape electrode 7-1 and the second right-angled trapezium prism shape electrode 7-2, the upper length of side 10 μ m, upper and lower side ratio 1: 2, high 50 μ m,
Described concavees lens shape electrode 7-3, the upper and lower length of side 20 μ m, high 50 μ m, focal length 100 μ m,
The first convex lens shape electrode 7-4, high 50 μ m, focal length 100 μ m,
Between described the first right-angled trapezium prism shape electrode 7-1, the second right-angled trapezium prism shape electrode 7-2, concavees lens shape electrode 7-3 and the first convex lens shape electrode 7-4, gap is 5 μ m;
Described Waveguide array district 8 consists of 10 parallel vertical bar shape electrodes, each vertical bar shape electrode shape and measure-alike, width 2 μ m, length 1000 μ m, interval 5 μ m;
Described the second convex lens shape electrode, high 50 μ m, focal length 100 μ m,
Described output waveguide district 10 consists of 2 parallel vertical bar shape electrodes, each vertical bar shape electrode shape and measure-alike, width 2 μ m, length 100 μ m, interval 10 μ m.
Described tunable array waveguide grating, the ducting layer 6-2 material of described liquid crystal waveguide 6 is silicon (Si), thickness is 0.6 μ m;
Each electrode material in described input coupled zone 7, Waveguide array district 8, output coupled zone 9 and output waveguide district 10 is tin indium oxide (ITO).
Embodiments of the invention 3:
Gap between described input coupled zone 7, Waveguide array district 8, output coupled zone 9 and output waveguide district 10 each several parts is 100 μ m;
Described the first right-angled trapezium prism shape electrode 7-1 and the second right-angled trapezium prism shape electrode 7-2, the upper length of side 50 μ m, upper and lower side ratio 1: 3, high 1000 μ m,
Described concavees lens shape electrode 7-3, the upper and lower length of side 150 μ m, high 1000 μ m, focal length 100,
The first convex lens shape electrode 7-4, high 1000 μ m, focal length 100 μ m,
Between described the first right-angled trapezium prism shape electrode 7-1, the second right-angled trapezium prism shape electrode 7-2, concavees lens shape electrode 7-3 and the first convex lens shape electrode 7-4, gap is 10 μ m;
Described Waveguide array district 8 consists of 50 parallel vertical bar shape electrodes, each vertical bar shape electrode shape and measure-alike, width 4 μ m, length 2000 μ m, interval 15 μ m;
Described the second convex lens shape electrode, high 1000 μ m, focal length 100m,
Described output waveguide district 10 consists of 4 parallel vertical bar shape electrodes, each vertical bar shape electrode shape and measure-alike, width 4 μ m, length 500 μ m, interval 25 μ m.
Described tunable array waveguide grating, the ducting layer 6-2 material of described liquid crystal waveguide 6 is silicon nitride (Si
3n
4), thickness is 2.0 μ m;
Each electrode material in described input coupled zone 7, Waveguide array district 8, output coupled zone 9 and output waveguide district 10 is tin indium oxide (ITO).
Claims (3)
1. the tunable array waveguide grating based on liquid crystal waveguide, is included in the input coupled zone (7) that is arranged in order in light path, Waveguide array district (8), output coupled zone (9) and output waveguide district (10), it is characterized in that:
Described input coupled zone (7) consists of the first right-angled trapezium prism shape electrode (7-1) being arranged in order in light path, the second right-angled trapezium prism shape electrode (7-2), concavees lens shape electrode (7-3) and the first convex lens shape electrode (7-4), forms beam collimation beam-expanding system; Wherein, the first right-angled trapezium prism shape electrode (7-1) is identical with the shape of the second right-angled trapezium prism shape electrode (7-2), and both are spliced into rectangle at inversion;
Described Waveguide array district (8) consists of the parallel vertical bar shape electrode of N bar, forms a straight parallel Waveguide array district, N >=3;
Described output coupled zone (9) consists of the second convex lens shape electrode, forms the interference region of converging of light beam;
Described output waveguide district (10) consists of the parallel vertical bar shape electrode of M bar, forms output waveguide, and M is output channel number, M >=1;
The side section of described liquid crystal waveguide (6) is followed successively by liquid crystal layer (6-1), ducting layer (6-2), under-clad layer (6-3), substrate (6-4) from top to bottom; Above-mentioned various shape electrode is all plated in the liquid crystal layer upper surface of liquid crystal waveguide (6).
2. tunable array waveguide grating as claimed in claim 1, is characterized in that:
Gap between described input coupled zone (7), Waveguide array district (8), output coupled zone (9) and output waveguide district (10) each several part is 10 μ m～1000 μ m;
The upper length of side of described the first right-angled trapezium prism shape electrode (7-1) and the second right-angled trapezium prism shape electrode (7-2) is 10 μ m～100 μ m, and upper and lower side ratio is 1:2～1:4, and height is 50 μ m～2000 μ m;
Described concavees lens shape electrode (7-3), the upper and lower length of side is 20 μ m～400 μ m, height is 50 μ m～2000 μ m, focal length 10 μ m～1000 μ m;
Described the first convex lens shape electrode (7-4), height is 50 μ m～2000 μ m, focal length 10 μ m～1000 μ m;
Between described the first right-angled trapezium prism shape electrode (7-1), the second right-angled trapezium prism shape electrode (7-2), concavees lens shape electrode (7-3) and the first convex lens shape electrode (7-4), gap is 5 μ m～20 μ m;
In described Waveguide array district (8), each vertical bar shape electrode shape and measure-alike, width 2 μ m～5 μ m, length 500 μ m～3000 μ m, interval 10 μ m～20 μ m;
Described the second convex lens shape electrode, height is 50 μ m～2000 μ m, focal length 10 μ m～1000 μ m;
In described output waveguide district (10), each vertical bar shape electrode shape and measure-alike, width 2 μ m～5 μ m, length 100 μ m～1000 μ m, interval 10 μ m～50 μ m.
3. tunable array waveguide grating as claimed in claim 1 or 2, is characterized in that:
Ducting layer (6-2) material of described liquid crystal waveguide (6) is silicon or silicon nitride, and thickness is 0.3 μ m～2.0 μ m;
Each electrode material of described input coupled zone (7), Waveguide array district (8), output coupled zone (9) and output waveguide district (10) is tin indium oxide.
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| CN103760699B (en) * | 2014-02-19 | 2016-08-17 | 华中科技大学 | Micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide |
| CN106461874B (en) * | 2014-09-26 | 2019-09-27 | 华为技术有限公司 | Array waveguide grating and tunable laser with the array waveguide grating |
| US10359627B2 (en) | 2015-11-10 | 2019-07-23 | Microsoft Technology Licensing, Llc | Waveguide coatings or substrates to improve intensity distributions having adjacent planar optical component separate from an input, output, or intermediate coupler |
| US9915825B2 (en) | 2015-11-10 | 2018-03-13 | Microsoft Technology Licensing, Llc | Waveguides with embedded components to improve intensity distributions |
| US9791696B2 (en) | 2015-11-10 | 2017-10-17 | Microsoft Technology Licensing, Llc | Waveguide gratings to improve intensity distributions |
| CN106773376B (en) * | 2017-01-18 | 2020-11-24 | 西华师范大学 | Liquid crystal waveguide adjustable light delay line and method for continuously adjusting time delay amount |
| CN110658585B (en) * | 2018-06-29 | 2022-01-11 | 华为技术有限公司 | Optical waveguide device |
| CN111323865A (en) * | 2018-12-17 | 2020-06-23 | 施轩杰 | Sectional waveguide display scheme |
| CN113740970A (en) * | 2020-05-30 | 2021-12-03 | 华为技术有限公司 | Grating and characteristic adjusting method and device thereof |
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| US6853758B2 (en) * | 2002-07-12 | 2005-02-08 | Optimer Photonics, Inc. | Scheme for controlling polarization in waveguides |
| US7209212B2 (en) * | 2004-09-15 | 2007-04-24 | China Institute Of Technology | Tunable optical integrated element using liquid crystal as active layer |
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| CN1391116A (en) * | 2002-07-12 | 2003-01-15 | 武汉飞鸿光网络有限公司 | Array waveguide raster |
| CN101001001A (en) * | 2006-12-20 | 2007-07-18 | 武汉光迅科技股份有限公司 | Manufacturing method of low cost DFB laser |
| CN102841407A (en) * | 2012-09-20 | 2012-12-26 | 电子科技大学 | Waveguide type polarizing beam splitter |
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