CN106461874B - Array waveguide grating and tunable laser with the array waveguide grating - Google Patents

Array waveguide grating and tunable laser with the array waveguide grating Download PDF

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Publication number
CN106461874B
CN106461874B CN201480077957.4A CN201480077957A CN106461874B CN 106461874 B CN106461874 B CN 106461874B CN 201480077957 A CN201480077957 A CN 201480077957A CN 106461874 B CN106461874 B CN 106461874B
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waveguide
array
tunable laser
grating
array waveguide
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CN106461874A (en
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高磊
王寅
曹权
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/34Optical coupling means utilising prism or grating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

A kind of array waveguide grating (30) and the tunable laser (1000) with the array waveguide grating (30), the array waveguide grating (30) includes input coupler (31), first Waveguide array area (33) and second array waveguide section (34), first Waveguide array area (33) includes multiple first wave guides (331), and the adjacent first wave guide (331) has the first optical path difference, the second array waveguide section (34) includes multiple second waveguides (341), and the adjacent second waveguide (341) has the second optical path difference, wherein, first optical path difference is not equal to second optical path difference.

Description

Array waveguide grating and tunable laser with the array waveguide grating
Technical field
The present invention relates to optical communication field more particularly to a kind of array waveguide grating and with the array waveguide grating can Tuned laser.
Background technique
High-capacity and high-speed optical transport and more flexible optical network structure are the trend of optic communication development.Currently, using High order modulation and the 100G technology of coherent reception come into commercial stage, and become one of the trend of industry.With 100G The optical module of the deployment of coherent system, first generation standard is unable to satisfy requirement in the performances such as size, power consumption, has become The bottleneck of optical module integration density is improved, thus developing, there is the optical module of miniaturization, low-power consumption to have great importance.
A kind of existing solution is the core optical device made in optical module of Planar Lightwave Circuit Technology at present, Such as laser, modulator, receiver, to realize miniaturization, low-power consumption.Wherein, based on the adjustable of Planar Lightwave Circuit Technology Humorous laser is one of key technology.Currently, industry has developed several tunable laser based on Planar Lightwave Circuit Technology, Such as it is based on the tunable laser of array waveguide grating (array waveguide grating, AWG) structure.However, these can Tuned laser is mostly in the presence of more demanding to manufacture craft, manufacturing cost is expensive, is difficult to realize the continuous tuning and tune of wavelength Humorous the problems such as being limited in scope, it is unable to satisfy requirement.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of array waveguide grating and with the array waveguide grating can Tuned laser, the tunable laser can be made in a planar optical waveguide, have integrated level is high, manufacture craft is simple, The advantages that Wavelength tunable range is big.
In a first aspect, providing a kind of array waveguide grating, including input coupler, the first Waveguide array area and second array Waveguide section, first Waveguide array area includes multiple first wave guides, and the adjacent first wave guide has the first optical path difference, The second array waveguide section includes multiple second waveguides, and the adjacent second waveguide has the second optical path difference, wherein institute The first optical path difference is stated not equal to second optical path difference.
In the first possible implementation of the first aspect, the array waveguide grating further includes first electrode, institute It states first electrode and the multiple first wave guide is electrically connected, the first electrode is used to apply electricity to the multiple first wave guide Pressure, to modulate first optical path difference.
In the second possible implementation of the first aspect, the array waveguide grating further includes second electrode, institute It states second electrode and the multiple second waveguide is electrically connected, the second electrode is used to apply electricity to the multiple second waveguide Pressure, to modulate second optical path difference.
Second aspect provides a kind of tunable laser, including reflecting element, reflection and transmission element and gain media and institute The array waveguide grating stated, the array waveguide grating and the gain media are set to the reflecting element and the reflection is saturating It penetrates between element.
In the first possible implementation of the second aspect, multiple first wave guides of the array waveguide grating and more One end of a second waveguide is set on the reflecting element, and the other end is coupled with the input coupler, first light beam It is assigned in the multiple first wave guide and multiple second waveguides and transmits through the input coupler, and is anti-by the reflecting element After being incident upon the input coupler, second light beam is generated, the input coupler exports second light beam.
In a second possible implementation of the second aspect, the reflecting element by the multiple first wave guide and The waveguide type catoptric arrangement integrated in multiple second waveguides is constituted.
In the third possible implementation of the second aspect, the array waveguide grating further includes output coupler, Multiple first wave guides of the array waveguide grating and one end of multiple second waveguides are coupled with the output coupler, the other end It is coupled with the input coupler.
In the fourth possible implementation of the second aspect, the tunable laser further includes phase converter, described Phase converter is set between the reflecting element and the reflection and transmission element.
In a fifth possible implementation of the second aspect, the phase converter passes through in first planar optical waveguide Upper covering metal electrode, and obtained by the refractive index that application electric current changes first planar optical waveguide on metal electrode; Alternatively,
The phase converter in first planar optical waveguide by covering metal electrode, and by the metal electrode The upper refractive index acquisition for applying electric current and changing doping, the scheduled phase modulation material being produced on the phase converter.
In the sixth possible implementation of the second aspect, the tunable laser further includes the second plane light wave It leads, the gain media and the reflecting element are made in second planar optical waveguide, the array waveguide grating, phase modulation Device and the reflection and transmission element are made in first planar optical waveguide;Alternatively,
The gain media and the reflection and transmission element are made in second planar optical waveguide, the Waveguide array Grating, phase converter and reflecting element are made in first planar optical waveguide.
In the 7th kind of possible implementation of second aspect, first planar optical waveguide and second planar light Lens are provided between waveguide.
Tunable laser provided in an embodiment of the present invention, by one tool of design, there are two the waveguide battle arrays of different optical path differences Column grating realizes the modeling to first light beam of input, only includes a kind of the second light beam of wavelength with output one, described The wavelength of second light beam can also by cover on the waveguide array grating first electrode and second electrode be adjusted, reality The continuously adjustable effect of wavelength is showed.Tunable laser provided by the invention, due to can integral manufacturing and a planar optical waveguide On, thus have many advantages, such as that integrated level is high, small in size, wavelength tuning range is big and it is of less demanding to make to technique, it meets big The requirement of capacity high-speed optical transmission and New Generation Optical device.
Detailed description of the invention
In order to illustrate more clearly of technical solution of the present invention, attached drawing needed in embodiment will be made below Simply introduce, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, general for this field For logical technical staff, without creative efforts, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram for the tunable laser that first embodiment of the invention provides.
Fig. 2 is the structural schematic diagram of array waveguide grating shown in FIG. 1.
Fig. 3 is the module diagram of array waveguide grating shown in FIG. 1.
Fig. 4 is transmission peaks schematic diagram of the array waveguide grating under different optical path differences.
Fig. 5 is the transmission peaks schematic diagram of the coincidence of the array waveguide grating output of the embodiment of the present invention.
Fig. 6 is another structural schematic diagram of tunable laser shown in FIG. 1.
Fig. 7 is the structural schematic diagram for the tunable laser that second embodiment of the invention provides.
Fig. 8 is the structural schematic diagram for the tunable laser that third embodiment of the invention provides.
Fig. 9 is the structural schematic diagram for the tunable laser that fourth embodiment of the invention provides.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, Fig. 1 is the tunable laser 1000 that first embodiment of the invention provides, first can be made in In planar optical waveguide 100.The tunable laser 1000 includes reflecting element 10, reflection and transmission element 20, Waveguide array light Grid (array waveguide grating, AWG) 30 and gain media 40.Wherein, the reflecting element 10, the reflection are saturating Penetrating element 20, the array waveguide grating 30 and the gain media 40 can be in the difference of first planar optical waveguide 100 Region is obtained by the methods of etching, photoetching, doping, cleavage, plated film or ion implanting.
In embodiments of the present invention, the reflecting element 10 constitutes a resonant cavity with the reflection and transmission element 20, described Array waveguide grating 30 and the gain media 40 are set in the resonant cavity.The array waveguide grating 30 is set to described Between reflecting element 10 and the reflection and transmission element 20, the gain media 40 is set to the reflecting element 10 and the battle array Between train wave guide grating 30.For the gain media 40 under the pumping of a pumping source, transmitting one includes multi-wavelength's (or continuous wave It is long) the first light beam.First light beam enters to inject the array waveguide grating 30, and the array waveguide grating 30 is to described One light beam is demultiplexed the second light beam exported after (or filtering) is handled only including a kind of wavelength, and second light exported The wavelength of beam can be adjusted by adjusting the waveguide index of the array waveguide grating 30.Second light beam is described anti- Roundtrip propagation in the resonant cavity that element 10 and transmissive element 20 are constituted is penetrated, and passes through the array waveguide grating in communication process 30 and gain media 40.When second light beam meets the amplitude condition and phase condition of oscillation simultaneously in the resonant cavity When, second light beam can stablize transmission in the resonant cavity.Wherein, the amplitude condition requires second light beam humorous Shake chamber round trip gain (gain is generated by gain media 40, second light beam when by the gain media 40, by In stimulated radiation effect, the gain media 40 generates and second beam frequencies and the consistent laser of phase, thus to institute Stating the second light beam can get gain) not less than loss, (loss includes that second light beam is saturating in reflecting element 10 and reflection The loss that the transmission of element 20 generates is penetrated, second light beam is in resonant cavity due to scattering, the loss and others of diffraction generation Absorption loss).Wherein, second light beam is output light in the light that the reflection and transmission element 20 transmits.The phase condition Then require the integral multiple that the phase change of the second light beam round trip in the resonant cavity is 2 π.
In embodiments of the present invention, the reflecting element 10 can pass through an end to first planar optical waveguide 100 Face carry out cleavage obtain (often ruptured in a certain direction after mineral crystal stress and generate the property of smooth flat and be known as cleavage, Then above-mentioned end face is smooth flat), there is high reflectivity to second light beam.Wherein, in order to make the reflector Part 10 can also plate reflectance coating in the end face after cleavage, to guarantee larger to the second light beam reflectivity with higher The second partial light beam is reflected on the reflecting element 10.Correspondingly, the reflection and transmission element 20 can also be by institute The other end opposite with the reflecting element 10 for stating the first planar optical waveguide 100 carries out cleavage and obtains, the reflection and transmission Element 20 can transmit simultaneously and reflect second light beam, and the ratio that second light beam is transmitted and reflects can be according to reality Needs, by the reflection and transmission element 20 plate corresponding proportion reflectance coating or transmission film be adjusted.The reflection Element 10 and the reflective lens elements 20 together constitute the resonant cavity of the tunable laser 1000.
It should be noted that in other embodiments of the present invention, the reflecting element 10 and the reflection and transmission element 20 Independent optical device can also be used, such as the reflector made of other planar optical waveguides or reflection and transmission device, or directly general The opposite end of first planar optical waveguide 100 is arranged in the optical devices such as reflecting mirror and reflection and transmission mirror, as long as meeting this Within that scope of the present invention, details are not described herein for the scheme of kind structure design.
Please refer to figs. 2 and 3 together, and in embodiments of the present invention, the array waveguide grating 30 can be by described The methods of etching or photoetching obtain in one planar optical waveguide 100, which includes input coupler 31, output coupling Clutch 32, the first Waveguide array area 33, second array waveguide section 34 and output waveguide 35.Wherein, first Waveguide array area 33 and second array waveguide section 34 between the input coupler 31, output coupler 32, and first Waveguide array Area 33 includes at least two first wave guides 331, and the second array waveguide section 34 includes at least two second waveguides 341.It is described Two adjacent first wave guides 331 of first wave guide array area 33 have the first optical path difference n1*ΔL1(assuming that the first Waveguide array area 33 are arranged successively adjacent first waveguide, Article 2 waveguide and Article 3 waveguide, if the length of first waveguide is L, Then Article 2 waveguide length is L- Δ L1, Article 3 waveguide length is L-2* Δ L1), wherein n1It is first wave beam described In first wave guide 331 group index (since the first light beam includes multi-wavelength, due to effect of dispersion, first light beam Refractive index in first wave guide 331 need to be indicated with group index).Adjacent two article in the second array waveguide section 34 Two waveguides 341 have the second optical path difference n2*ΔL2, wherein n2For first light beam the second waveguide group index, n1N can be equal to2, can not also wait.First beam Propagation for including multiple wavelength (or continuous wavelength) is to the input Coupler 31, and in the output coupler 32 output only comprising a kind of the second light beam of wavelength.
Specifically, for conventional array waveguide grating, it is assumed that the optical path difference of its a plurality of waveguide for including is n* Δ L, In, ngIt is the light beam in the group index of waveguide, Δ L is the difference of the length of two adjacent waveguides, then contains multiple wavelength Light beam diffraction occurs in the input coupler of the array waveguide grating, and be coupled into each waveguide.Due to described The output end of a plurality of waveguide is located on the circumference of grating circle, so what light beam generated when diffraction occurs in the input coupler Diffraction light reaches the output end of a plurality of waveguide with identical phase.Since adjacent waveguide maintains identical optical path difference ng* Δ L, thus the diffraction light phase difference having the same of Same Wavelength, and the phase difference of the diffraction light of different wave length is different, because This, diffraction occurs in output coupler and focuses on different positions for the light beam of different wave length.For conventional Waveguide array Grating, the free spectral range (Free Spectral Range, FSR) of transmitted spectrum can be used following formula (1) to indicate:
Wherein, λ0It is free space wavelength.By formula (1) it is found that the FSR is by length difference Δ L and group index ngCertainly It is fixed.The effect of the array waveguide grating be one is demultiplexed comprising the light beam of multiple wavelength (or continuous wavelength), thus Multiple independent transmission peaks are obtained, or the array waveguide grating can also be equivalent to a filter, are only met specific The light beams of diffraction conditions just can pass through the array waveguide grating, the wavelength penetrated is the multiple independent transmissions obtained The wavelength at peak, and other wavelength will be filtered.
In embodiments of the present invention, the first optical path difference n that first Waveguide array area 33 has1*ΔL1With described second The second optical path difference n that Waveguide array area 34 has2*ΔL2It is unequal, therefore the array waveguide grating 30 can be considered as optical path difference For n1*ΔL1Array waveguide grating and optical path difference be n2*ΔL2Array waveguide grating two conventional arrays waveguide optical gratings Cascade, or being considered as with optical path difference is n1*ΔL1Array waveguide grating equivalent filter and with optical path difference be n2*ΔL2 Array waveguide grating equivalent filter two equivalence filters cascade.First light beam passes through the array wave Guide grating 30 is then equivalent to while passing through the filtering of the two equivalent filters, thus the wavelength of the second light beam exported is institute The transmission peaks medium wavelength that the transmission peaks that the first Waveguide array area 33 generates are generated with the second array waveguide section 34 is stated to coincide Transmission peak value.Referring to Figure 4 together and Fig. 5, Fig. 4 be optical path difference are n1*ΔL1Conventional arrays waveguide optical grating be with optical path difference n2*ΔL2Conventional arrays waveguide optical grating transmission peaks Wavelength distribution figure, it can be seen that optical path difference n1*ΔL1Array wave Guide grating and optical path difference are n2*ΔL2Array waveguide grating under the wavelength of transmission peaks be probably 1.564 microns of ground in wavelength Fang Chonghe, therefore, the wavelength for the second light beam that the Waveguide array light beam 30 exports is 1.564 microns, as shown in Figure 5.
In embodiments of the present invention, the array waveguide grating 30 further includes first electrode 37 and second electrode 38, described First electrode 37 and second electrode 38 can be fixed in first planar optical waveguide 100 by the modes such as being deposited or sputtering, And the first electrode 37 is electrically connected with each first wave guide 331 in first Waveguide array area 33, second electricity Each second waveguide 341 in pole 38 and the second array waveguide section 34 is electrically connected.The first electrode 37 passes through application Electric current or voltage adjust the refractive index of each first wave guide 331 in first Waveguide array area 33, and then adjust described the One optical path difference (group index is generally the function of Refractive Index of Material, and related with the Wavelength distribution of first light beam);It is described Second electrode 38 adjusts the refraction of each second waveguide 341 of the second array waveguide section 34 by application electric current or voltage Rate, and then adjust second optical path difference.Since the array waveguide grating 30 can be according to the first different optical path differences and second Optical path difference generates different transmission peaks distributions, thus the transmission peak value being overlapped also corresponding change, and then the second light beam exported Wavelength also corresponding change realizes the effect of the Wavelength tunable of the second light beam.Wherein, the first electrode 37 and the second electrode The principle that the refractive index of 38 pairs of first wave guides 331 and the second waveguide 341 is modulated includes but is not limited to: hot light efficiency It answers, electrooptic effect, the concentration based on carrier change effect, magneto-optic effect, piezoelectric effect or the electric absorption for changing refractive index Effect etc., as long as the modulation system for meeting design structure provided in an embodiment of the present invention is within the scope of the present invention, It is numerous to list herein to repeat.
It should be noted that in other embodiments of the invention, can also only be provided with first electrode 37 or only be provided with Second electrode 38, these design schemes are within the scope of the present invention.
In embodiments of the present invention, the gain media 40 can by first planar optical waveguide 100 etch or After photoetching mix working media obtain, the working media can for erbium, praseodymium or other be used as laser works medium Material.The gain media 40 is used to generate the first light beam of starting of oscillation, and carries out gain to second light beam simultaneously.Specifically For external pumping source is pumped (can be optical pumping or electrical pump) to the gain media 40, so that the gain Medium 40 generates population inversion (population i.e. on high level is more than the population in low-lying level), and emits first light Beam, first light beam generate second light beam after the array waveguide grating 30, and second light beam is in resonant cavity Roundtrip propagation, and when by the gain media 40, due to stimulated radiation effect, the gain media 40 generate with it is described The consistent laser of the wavelength and phase of second light beam, so that gain amplification is carried out to second light beam, to compensate described the The various losses that two light beams generate in communication process in the resonant cavity.Therefore, second light beam it is sustainable it is stable Carry out back propagation in the resonant cavity, and when 1000 steady operation of tunable laser, the gain of the gain media 40 Effect is exactly equal to the loss generated when second light beam carrys out back propagation in the resonant cavity, wherein the loss includes The loss that second light beam is generated in reflecting element 10 and the transmission of reflection and transmission element 20, second light beam is in resonant cavity The loss and other absorption losss generated due to scattering, diffraction.
In embodiments of the present invention, the tunable laser 1000 further includes phase converter 50, and the phase converter 50 is arranged Between the array waveguide grating 30 and the reflection and transmission element 20.The phase converter 50 can be by first planar light Vapor deposition perhaps splash-proofing sputtering metal electrode and changes described the by applying electric current or voltage on metal electrode in waveguide 1000 One planar optical waveguide 100 or doping, the refractive index of other materials being produced on the phase converter 50 and obtain.The phase modulation Device 50 is used to keep the stabilization of the second light beam Output optical power, as by finely tuning so that the intracavitary longitudinal mode of laser resonator and institute The alignment of the second light beam wavelength is stated, to avoid generating power swing.
Referring to Figure 6 together, it is to be understood that in other embodiments of the invention, the array waveguide grating 30, The phase converter 50 such as can be set to the battle array there are many set-up mode by the position of gain media 40 and the phase converter 50 Between train wave guide grating 30 and the gain media 40, or the gain media 40 is set to the array waveguide grating 30 The gain media 40 and the phase converter 50 are set between the phase converter 50, or by the array waveguide grating 30 Between etc. modes, the present invention is without limitation.
Referring to Figure 7 together, Fig. 7 is the schematic diagram for the tunable laser 2000 that second embodiment of the invention provides, institute It states tunable laser 2000 and includes reflection and transmission element 220, array waveguide grating 230, gain media 240 and phase converter 250, The reflection and transmission element 220, array waveguide grating 230, gain media 240, the production method of phase converter 250 and function with The production method of reflection and transmission element 20, array waveguide grating 30, gain media 40, phase converter 50 in above-mentioned first embodiment And function is identical, details are not described herein.
Except that: the gain media 240 is fabricated separately in one second planar optical waveguide 2100, and the reflection is saturating Element 220, the array waveguide grating 230 and the phase converter 250 is penetrated then to be made in first planar optical waveguide 100. Second planar optical waveguide 2100 includes first end face 241 and the second end face 242 relative to the first end face 241, wherein The first end face 241 can plate anti-reflection film, and the second end face 242 then forms a reflecting surface by cleavage, using as reflection Element reflects second light beam.Preferably, reflectance coating can be plated on the reflecting surface in order to obtain higher reflectivity.
It should be noted that in embodiments of the present invention, in first planar optical waveguide 100 and second planar light Between waveguide 2100, an also settable lens 260, the lens 260 are used to collimate the light injected.Specifically, the gain is situated between The second light beam that matter 240 is transmitted is transmitted to the array waveguide grating 230 or the array after the lens 260 collimation The second light beam that waveguide optical grating 230 transmits is transmitted to the gain media 240 after the lens 260 collimation.
It should be noted that in embodiments of the present invention, the tunable laser 2000 may also include functional unit 270, the reflection and transmission element 220 is set between the functional unit 270 and the phase converter 250, the functional unit 270 include but is not limited to: receiving unit, modulation unit or filter unit, to be received to the second light beam of the output, The operation such as modulation or filtering.
It should be noted that in embodiments of the present invention, the array waveguide grating 230, gain media 240, phase converter 250 relative position can be exchanged, second planar optical waveguide 2100 as described in can be separately set in the phase converter 250 In, and the gain media 240 and the array waveguide grating 230 are set to first planar optical waveguide 100, or by institute Array waveguide grating 230, the gain media 240, the phase converter 250 is stated to be all set in approximately the same plane optical waveguide, this A little structural design schemes are within the scope of the present invention, and details are not described herein.
It is the schematic diagram for the tunable laser 3000 that third embodiment of the invention provides also referring to Fig. 8, Fig. 8.Institute Stating tunable laser 3000 includes reflecting element 310, array waveguide grating 330, gain media 340 and phase converter 350.Its In, the gain media 340 is made in one second planar optical waveguide 3100, the array waveguide grating 330 and the phase modulation Device 350 is then made in first planar optical waveguide 100.Second planar optical waveguide 3100 include first end face 341 and Second end face 342, wherein the first end face 341 can plate anti-reflection film, and the second end face 342 then forms one by cleavage Smooth flat, using as reflection and transmission element, so that the second light beam is exported through the second end face 342.
It should be noted that in embodiments of the present invention, in first planar optical waveguide 100 and second planar light Between waveguide 3100, an also settable lens 360, the lens 360 are used to collimate the light injected.Specifically, the gain is situated between The second light beam that matter 340 is transmitted is transmitted to the array waveguide grating 330 or the array after the lens 360 collimation The second light beam that waveguide optical grating 330 transmits is transmitted to the gain media 340 after the lens 360 collimation.
It should be noted that in embodiments of the present invention, the array waveguide grating 330, gain media 340, phase converter 350 relative position can be exchanged, second planar optical waveguide 3100 as described in can be separately set in the phase converter 350 In, and the gain media 340 and the array waveguide grating 330 are set to first planar optical waveguide 100, or by institute Array waveguide grating 330, the gain media 340, the phase converter 350 is stated to be all set in approximately the same plane optical waveguide, this A little structural design schemes are within the scope of the present invention, and details are not described herein.
It is the schematic diagram for the tunable laser 4000 that fourth embodiment of the invention provides also referring to Fig. 9, Fig. 9.Institute Stating tunable laser 4000 includes reflecting element 410, reflection and transmission element 420, array waveguide grating 430, gain media 440 And phase converter 450.Wherein, the reflecting element 410 by end face to first planar optical waveguide 100 carry out cleavage (or Reflectance coating is plated after cleavage) it obtains, the array waveguide grating 430 includes input coupler 431 and a plurality of waveguide 436, Mei Gesuo The one end for stating waveguide 436 is coupled with the input coupler 431, and the other end is then directly produced on the reflecting element 410 (or the reflecting element 410 can also be realized by way of the integrated waveguide type catoptric arrangement in each waveguide 436, The reflecting element 410 can be made of the waveguide type catoptric arrangement in the waveguide 436 at this time), first light beam is through institute It states input coupler 431 to be assigned in each waveguide 436, and reaches the reflecting element after transmitting in the waveguide 436 410, through the reflecting element 410 reflection after, arrive again at the input coupler 431, and export second light beam, i.e., this Shi Suoshu input coupler 431 plays the role of input coupler and output coupler simultaneously.
Also referring to Fig. 1 to Fig. 9, when work, under the pumping of a pumping source, transmitting one includes the gain media 40 There is the first light beam of multiple wavelength (or continuous wavelength), first wave beam is diffracted into the array through the input coupler 31 First Waveguide array area 33 of waveguide optical grating 30 and second array waveguide section 34, the first wave in first Waveguide array area 33 Leading 331 has the first optical path difference n1*ΔL1, there is the second waveguide 341 in the second array waveguide section 34 second optical path difference to be n2*ΔL2, first Waveguide array area 33 is exported by the first optical path difference n1*ΔL1The multiple transmission peaks determined, described the The output of two Waveguide array areas 34 is n by second optical path difference2*ΔL2The multiple transmission peaks determined, thus the output waveguide 35 It exports first Waveguide array area 33 and is overlapped with multiple transmission peaks medium wavelengths that the second array waveguide section 34 exports and is saturating Peak value is penetrated, i.e., the wavelength of described second light beam is the wavelength for the transmission peaks being overlapped.Second light beam is in the reflecting element 10 And roundtrip propagation in the resonant cavity of the composition of transmissive element 20, and by the array waveguide grating 30, increasing in communication process Beneficial medium 40 and phase converter 50.When second light beam meets the amplitude condition and the phase simultaneously in the resonant cavity When condition, second light beam can stablize transmission in the resonant cavity, and continue to export the output light.When needing to change institute It, only need to be by loading required voltage or electricity in the first electrode 37 and second electrode 38 when stating the wavelength of the second light beam Each waveguide 331 in first Waveguide array area 33 and each waveguide 341 of second array waveguide section 34 can be changed in pressure Refractive index is equivalent to and adjusts the first optical path difference n1*ΔL1And second optical path difference be n2*ΔL2, and then change the transmission The Wavelength distribution at peak realizes the effect of the Wavelength tunable of second light beam to change the wavelength of second light beam.
It should be noted that each device in the embodiment of the present invention, such as reflecting element 10, reflection and transmission member Part 20, array waveguide grating 30, gain media 40 and phase converter 50 can be produced in the planar optical waveguide, can also be independent Optical device can also be that part is made in planar optical waveguide, partially use independent optical device, these schemes are at this Within the protection scope of invention.
In conclusion tunable laser 1000 provided in an embodiment of the present invention, includes two length by design one The waveguide array grating 30 of difference, realizes the demultiplexing to first light beam of input or filtering, only includes one with output one Second light beam of kind wavelength, the wavelength of second light beam can also be by being deposited or being sputtered on the waveguide array grating 30 First electrode 37 and second electrode 38 be adjusted, realize the continuously adjustable effect of wavelength.It is provided by the invention tunable Laser 1000 due to can be on integral manufacturing and a planar optical waveguide 100, thus has that integrated level is high, small in size, wavelength adjusts The advantages that range is big and of less demanding to technique production, the use for meeting high-capacity and high-speed optical transport and New Generation Optical device is wanted It asks.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as Protection scope of the present invention.

Claims (10)

1. a kind of array waveguide grating, including input coupler, which is characterized in that the array waveguide grating further includes first gust Arrange waveguide section and second array waveguide section, first Waveguide array area includes multiple first wave guides, and adjacent described first Waveguide has the first optical path difference, and the second array waveguide section includes multiple second waveguides, and the adjacent second waveguide has There is the second optical path difference, wherein first optical path difference is not equal to second optical path difference;
Wherein, the array waveguide grating further includes first electrode, and the first electrode electrically connects with the multiple first wave guide It connects, the first electrode is used to apply voltage to the multiple first wave guide, to modulate first optical path difference.
2. array waveguide grating according to claim 1, which is characterized in that the array waveguide grating further includes the second electricity Pole, the second electrode and the multiple second waveguide are electrically connected, and the second electrode is used for the multiple second waveguide Apply voltage, to modulate second optical path difference.
3. a kind of tunable laser, including reflecting element, reflection and transmission element and gain media, which is characterized in that further include Array waveguide grating as described in claim 1 to 2 any one, the array waveguide grating and the gain media are set to Between the reflecting element and the reflection and transmission element.
4. tunable laser according to claim 3, which is characterized in that multiple first waves of the array waveguide grating It leads and one end of multiple second waveguides is set on the reflecting element, the other end is coupled with the input coupler, the first light Input coupler described in Shu Jing is assigned in the multiple first wave guide and multiple second waveguides and transmits, and by the reflecting element After reflexing to the input coupler, the second light beam is generated, the input coupler exports second light beam.
5. tunable laser according to claim 4, which is characterized in that the reflecting element is by the multiple first The waveguide type catoptric arrangement integrated in waveguide and multiple second waveguides is constituted.
6. tunable laser according to claim 3, which is characterized in that the array waveguide grating further includes output coupling Clutch, multiple first wave guides of the array waveguide grating and one end of multiple second waveguides are coupled with the output coupler, The other end is coupled with the input coupler.
7. according to tunable laser described in claim 3 to 6 any one, which is characterized in that the tunable laser It further include phase converter, the phase converter is set between the reflecting element and the reflection and transmission element.
8. tunable laser according to claim 7, which is characterized in that the phase converter passes through in the first plane light wave Covering metal electrode is led, and is obtained by the refractive index that application electric current changes first planar optical waveguide on metal electrode ?;Alternatively,
The phase converter passes through the application electricity on the metal electrode by covering metal electrode in the first planar optical waveguide Stream, come change doping, the refractive index of scheduled phase modulation material being produced on the phase converter and obtain.
9. tunable laser according to claim 8, which is characterized in that the tunable laser further includes second flat Face optical waveguide, the gain media and the reflecting element are made in second planar optical waveguide, the Waveguide array light Grid, phase converter and the reflection and transmission element are made in first planar optical waveguide;Alternatively,
The gain media and the reflection and transmission element are made in second planar optical waveguide, the Waveguide array light Grid, phase converter and reflecting element are made in first planar optical waveguide.
10. tunable laser according to claim 9, which is characterized in that first planar optical waveguide and described Lens are provided between two planar optical waveguides.
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