CN108828714A - A kind of strong local, low-loss hydridization surface plasma waveguide - Google Patents
A kind of strong local, low-loss hydridization surface plasma waveguide Download PDFInfo
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
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Abstract
The present invention relates to a kind of strong locals, low-loss hydridization surface plasma waveguide, from top to bottom successively by high refractive index medium coating, low refractive index dielectric coating, metal strip layer and substrate composition, the metal strip layer is two pieces, the low refractive index dielectric coating is T shape, the low refractive index dielectric coating includes the first low refractive index dielectric coating and the second low refractive index dielectric coating, the two sides of the second low refractive index dielectric coating are bonded with the metal strip layer respectively, it is bonded above the first low refractive index dielectric coating with the high refractive index medium coating, the metal strip layer, the second low refractive index dielectric coating lower section and the substrate attaching.Design philosophy of the invention avoid traditional Light Energy height local in a metal caused by ohm energy loss.
Description
Technical field
The present invention relates to integreted phontonics field, specially a kind of surface plasma waveguide device.
Background technique
Surface plasma excimer（Surface Plasmon polaritons, SPPs）Be existing for the metal surface from
By the electronics vibrated the electromagnetic wave produced by interaction with photons propagated along the metal surface.Surface plasma excimer
（SPPs）It is that can break through the diffraction limit of light at present to realize to the novel quantum state of light manipulation on nanoscale, to realize
The full light of nanometer is integrated to bring dawn.Surface plasma also shows very big on the photonic device of production sub-wavelength magnitude
Potentiality, such as waveguide, reflecting mirror, beam splitter and a series of optical devices of filter, these devices can be used as the full light of nanometer
The basic unit in circuit has established foundation stone for the full light of nanometer is integrated.The present invention is mainly studied for guide electromagnetic waves propagation
SPPs waveguide.It is well known that waveguide is the basis for realizing nano-photon circuit.
SPPs field distribution local is along interface direction, and the electromagnetic wave of this local is in communication process due to the Europe of metal
Nurse loss, so transmission range is limited.Because what metal loss was inherently present, we can only optimize waveguide structure,
The selection of size, dielectric layer material promotes the transmission range of waveguide with this.Traditional waveguiding structure such as metal slab waveguide, gold
Belong to nm cylinder waveguide, metal V-groove, medium loaded type etc. are weaker to the confinement of mode field in the longitudinal direction.And metal-Jie
Although matter-metal waveguide has the characteristic of height local electromagnetic field, the loss as caused by two metal layers is larger.In recent years
Come, Zhang proposes a kind of novel hydridization SPPs waveguide [Zhang Y, Zhang Z. Ultra-Subwavelength
and Low Loss in V-Shaped Hybrid Plasmonic Waveguide. Plasmonics, 2016, 12(1):
1-5], which is that V-type silver is just embedded in low refractive index dielectric layer on a silicon substrate, which can limit light
System is in V-type silver bottom, but the maximum transmission distance of the SPPs supported or very limited, and this shape is not easy to be processed.
Summary of the invention
Against the above deficiency, the purpose of the present invention is to propose to a kind of strong local, low-loss, long distance transmission surface etc. from
Daughter waveguide.
For achieving the above object, the technical solution adopted by the present invention is that：A kind of strong local, low-loss hydridization surface
Plasma filled waveguide, from top to bottom successively by high refractive index medium coating, low refractive index dielectric coating, metal strip layer and lining
Bottom composition, the metal strip layer are two pieces, and the low refractive index dielectric coating is T shape, the low refractive index dielectric coating
Including the first low refractive index dielectric coating and the second low refractive index dielectric coating, the second low refractive index dielectric coating
Two sides be bonded respectively with the metal strip layer, above the first low refractive index dielectric coating with the high refractive index medium
Coating fitting, the metal strip layer, the second low refractive index dielectric coating lower section and the substrate attaching.
Preferably, the refractive index of the high refractive index medium coatingWith the refraction of the low refractive index dielectric coating
RateMeet relationship：；The height of the high refractive index medium coatingIt is covered with the low refractive index dielectric
The height of layerMeet relationship：, identical with low-refraction coating refractive index for being effectively limited in SPPs mode
In metallic slit.In operating wavelength range, always have an effective waveguide mode be constrained to completely it is low between metal block
In index medium section.
Preferably, the high refractive index medium coating, the low refractive index dielectric coating, the metal strip layer and institute
State the width of substrate.It is discovered by experiment that ifIt, can not be in metal strip and dielectric layer table when less than 200nm
Face generates surface plasma excimer, to can not constrain in effective model field in slit.
Preferably, the width of the second low refractive index dielectric coating and the value range of height are 20 ~ 100 nm；
The refractive index value range of the substrate is 1.2-1.5.
Preferably, the width 50nm of the second low refractive index dielectric coating, the second low refractive index dielectric covering
60 nm of height value of layer.
Preferably, the metal strip layer is silver or copper；The substrate is quartz and refractive index is 1.45；The low-refraction
Dielectric passivation is silica and its refractive indexIt is 1.44；The high refractive index medium coating is silicon and its refractive index
It is 3.48；The high refractive index medium coating, the low refractive index dielectric coating, the metal strip layer and the substrate
Width=300nm, the height d of the high refractive index medium covering layer by layer1=200nm, the low refractive index dielectric coating（2）
Height d2=100nm；Operation wavelength is 1550 nm.
Beneficial effects of the present invention：（1）The waveguide clamps the second low refractive index dielectric coating using two metal strip layers
Design method, the electric field energy of waveguide can be limited in medium strip and formed coupling to enhance electric field level, low-refraction
The ohmic loss that dielectric passivation can form lesser leakage losses and Energy distribution is avoided to be formed in a metal, thus in sub- wave
The purpose of the long-haul transmission of SPPs is realized in long section.（2）The lesser medium of refractive index is covered using the biggish material of refractive index
Layer forms hydridization waveguide thought, and SPPs electric field energy may make more effectively to be limited in low refractive index dielectric item, realizes SPPs mould
The low-loss transmission of formula.（3）Structure of the invention is according to waveguide preparation characteristic and requirement, only with two kinds of different refractivity material groups
At, comprehensively utilize hybrid structure and energy coupling advantage, realize sub-wavelength within the scope of to the operative constraint of SPPs basic mode with
Long distance transmission.
Detailed description of the invention
Fig. 1 is the cross-sectional structure schematic diagram of hydridization waveguide.
Fig. 2 is the hydridization surface plasma waveguide foundational model field distribution map and normalized energy distribution map.
When the width of second low refractive index dielectric coating of the Fig. 3 between metal strip layer is identical as height, SPPs waveguide
Transmission range and effective model area with the width of low refractive index dielectric block variation relation figure.
Fig. 4 is willWhen being set as 50nm, the effective refractive index real part of SPPs waveguide is with parameterThe dependence of variation
Figure.
Fig. 5 is willWhen being set as 50nm, the transmission range and effective model area of SPPs waveguide are with parameterVariation
Dependence graph.
Fig. 6 is willWhen being set as 50nm, the field distribution of waveguide basic mode withVariation diagram.
Fig. 7 is willWhen being set as 50nm, the effective refractive index real part of SPPs waveguide is with parameterThe dependence of variation
Figure.
Fig. 8 is willWhen being set as 50nm, the transmission range and effective model area of SPPs waveguide are with parameterVariation
Dependence graph.
Fig. 9 is willWhen being set as 50nm, the field distribution of waveguide basic mode withVariation diagram.
In figure：1. high refractive index medium coating；2. low refractive index dielectric coating；The first low refractive index dielectric of 2-1. covers
Cap rock；2-2. the second low refractive index dielectric coating；3. metal strip layer；4. substrate.
Specific embodiment
Present invention will be further explained with reference to the attached drawings and specific examples, but protection scope of the present invention is simultaneously
It is without being limited thereto.
Fig. 1 provides a kind of cross-sectional view of embodiment of the invention.The hydridization surface plasma waveguide on to
Under be made of high refractive index medium coating 1, low refractive index dielectric coating 2, metal strip layer 3 and substrate 4.Metal strip layer 3
It is two pieces, low refractive index dielectric coating 2 is T shape, and low refractive index dielectric coating 2 includes the first low refractive index dielectric coating
2-1 and the second low refractive index dielectric coating 2-2, the two sides of the second low refractive index dielectric coating 2-2 respectively with the metal
Item layer 3 is bonded, and is bonded above the first low refractive index dielectric coating 2-1 with high refractive index medium coating 1, metal strip layer 3, the
It is bonded below two low refractive index dielectric coating 2-2 with substrate 4.Symmetrical metal strip layer 3 and be inserted between metallic slit the
Two low refractive index dielectric coating 2-2 combination be in order to using surface plasma couple to enhance SPPs electric field, will be more
Mould field is pulled out from metal section and is limited in the medium to reduce ohmic loss.
The refractive index of the high refractive index medium coatingWith the refractive index of the low refractive index dielectric coatingMeet
Relationship：；The height of the high refractive index medium coatingWith the height of the low refractive index dielectric coatingMeet relationship：, for SPPs mode is effectively limited in metallic slit identical with low-refraction coating refractive index
In.In operating wavelength range, always having an effective waveguide mode is the second low refraction being constrained between metal block completely
In the section rate dielectric passivation 2-2.The waveguide Energy distribution of Fig. 2 proves that this structure may be implemented SPPs energy height and be limited in Asia
Wavelength region.We advanced optimize the waveguiding structure.（1）The second low refractive index dielectric being clipped between metal strip layer 3 is set
The width of coating 2-2 is identical as height, and result of study is as shown in Figure 3.When Fig. 3 shows that width and height are 50 nm, the wave
It leads and is able to achieve relatively long distance transmission under high local area limit to SPPs.
（2）The height that the second low refractive index dielectric coating 2-2 being clipped between metal strip layer 3 is arranged is 50 nm, research
The transmission range of SPPs is with effective model area with the influence of medium block change width.Fig. 4 shows the effective of the waveguide basic mode
Specific refractivity reduces with the increase of medium strip width, when the second low refractive index dielectric coating 2-2 width is greater than 50 nm
When, effective refractive index coefficient tends to be saturated.The transmission range and effective model area that Fig. 5 shows the waveguide basic mode are to medium strip
Width dependence.The result shows that when the second low refractive index dielectric coating 2-2 width is 50nm, the transmission range of the waveguide
Reach peak value.Fig. 6 illustrates the variation of waveguide Energy distribution with medium block width value variation relation, when the second low refractive index dielectric covers
When cap rock 2-2 width is greater than 50 nm, medium block two sides energy can not be coupled.
（3）The width that the second low refractive index dielectric coating 2-2 being clipped between metal strip layer 3 is arranged is 50nm, research
The transmission range of SPPs is with effective model area with the influence of medium block height change.Fig. 7 shows the effective of the waveguide basic mode
Specific refractivity reduces with the increase of medium strip height, when the second low refractive index dielectric coating 2-2 height is greater than 50 nm
When, effective refractive index coefficient tends to be saturated.The transmission range and effective model area that Fig. 8 shows the waveguide basic mode are to medium strip
The dependence of height.The result shows that when the height of the second low refractive index dielectric coating 2-2 is 60nm, the transmission of the waveguide
Distance reaches peak value.Fig. 9 illustrates the variation of waveguide Energy distribution with the variation relation of medium block height.When the second low-refraction is situated between
When matter coating 2-2 height is less than 50 nm, medium strip two sides energy field can not be coupled.
To sum up, when the width of the second low refractive index dielectric coating 2-2 and height are respectively 50,60nm, the hydridization
The laser propagation effect of the surface plasma waveguide of structure is best.Compared with traditional hydridization waveguide modes, the transmission characteristic of the model
It is more excellent, while without excessive sacrifice energy localization ability, the transmission range of surface plasma can be significantly improved.
Below with the width of medium strip folded between metal strip, heightWhen respectively 50,60 nm, operation wavelength
For 1550 nm.
Embodiment one：Hydridization waveguiding structure is as shown in Figure 1.Metal material is set as silver, and dielectric constant is.Substrate is quartz and refractive index is 1.45.Low refractive index dielectric item and low-refraction coating are two
Silica, refractive indexIt is 1.44.High refractive index cap rock 1 is silicon, refractive indexIt is 3.48.Refringence is met between the twoRelationship.?=300nm, d1=200nm, d2When=100nm, as a result such as Fig. 8 is shown, the surface plasma wave
Lead the transmission range 405.31 for supporting SPPs, effective model area is 0.0135.Under the conditions of identical parameters, tradition
Metal medium metal structure surface plasma waveguide support transmission range be 23.417, effective model area is
0.01078.Therefore, for the hybrid structure in the case where keeping strong local, transmission range improves 17 times.
Claims (7)
1. a kind of strong local, low-loss hydridization surface plasma waveguide, which is characterized in that successively reflected from top to bottom by height
Rate dielectric passivation（1）, low refractive index dielectric coating（2）, metal strip layer（3）And substrate（4）Composition, the metal strip layer
（3）It is two pieces, the low refractive index dielectric coating（2）For T shape, the low refractive index dielectric coating（2）It is low including first
Index medium coating（2-1）With the second low refractive index dielectric coating（2-2）, the second low refractive index dielectric coating
（2-2）Two sides respectively with the metal strip layer（3）Fitting, the first low refractive index dielectric coating（2-1）Top and institute
State high refractive index medium coating（1）Fitting, the metal strip layer（3）, the second low refractive index dielectric coating（2-2）Under
The square and substrate（4）Fitting.
2. a kind of strong local according to claim 1, low-loss hydridization surface plasma waveguide, which is characterized in that
The high refractive index medium coating（1）Refractive indexWith the low refractive index dielectric coating（2）Refractive indexMeet
Relationship：。
3. a kind of strong local according to claim 1 or 2, low-loss hydridization surface plasma waveguide, feature exist
In the high refractive index medium coating（1）The height of layerWith the low refractive index dielectric coating（2）HeightMeet
Relationship：。
4. a kind of strong local according to claim 1 or 2, low-loss hydridization surface plasma waveguide, feature exist
In the high refractive index medium coating（1）, the low refractive index dielectric coating（2）, the metal strip layer（3）With it is described
Substrate（4）Width。
5. a kind of strong local according to claim 1 or 2, low-loss hydridization surface plasma waveguide, feature exist
In the second low refractive index dielectric coating（2-2）Width and the value range of height be 20 ~ 100 nm；The lining
Bottom（4）Refractive index value range be 1.2-1.5.
6. a kind of strong local according to claim 5, low-loss hydridization surface plasma waveguide, which is characterized in that
The second low refractive index dielectric coating（2-2）Width 50nm, the second low refractive index dielectric coating（2-2）Height
Spend 60 nm of value.
7. a kind of strong local according to claim 6, low-loss hydridization surface plasma waveguide, which is characterized in that
The metal strip layer（3）For silver or copper；The substrate（4）For quartz and refractive index is 1.45；The low refractive index dielectric covering
Layer（2）For silica and its refractive indexIt is 1.44；The high refractive index medium coating（1）For silicon and its refractive index
It is 3.48；The high refractive index medium coating（1）, the low refractive index dielectric coating（2）, the metal strip layer（3）With
The substrate（4）Width=300nm, the high refractive index medium coating（1）The height d of layer1=200nm, the low folding
Penetrate rate dielectric passivation（2）Height d2=100nm；Operation wavelength is 1550 nm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112067569A (en) * | 2020-08-19 | 2020-12-11 | 吉林大学 | Slit optical waveguide sensor based on surface-enhanced infrared absorption spectrum and preparation and detection methods thereof |
| WO2023119475A1 (en) * | 2021-12-22 | 2023-06-29 | 日本電信電話株式会社 | Optical device |
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| US8879880B2 (en) * | 2012-12-11 | 2014-11-04 | Electronics And Telecommunications Research Institute | Surface plasmon optical waveguide |
| CN104407414A (en) * | 2014-11-21 | 2015-03-11 | 深圳大学 | Optical waveguide and sensor thereof |
| CN105334573A (en) * | 2014-06-20 | 2016-02-17 | 北京三星通信技术研究有限公司 | Surface plasmon waveguide |
| CN206654729U (en) * | 2017-02-13 | 2017-11-21 | 中北大学 | A kind of enhanced infrared radiator structure of surface phasmon |
| CN107526124A (en) * | 2017-08-21 | 2017-12-29 | 中山大学 | A kind of low-loss surface phasmon coupler based on semiconductor base and preparation method thereof |
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2018
- 2018-05-17 CN CN201810473556.0A patent/CN108828714A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8879880B2 (en) * | 2012-12-11 | 2014-11-04 | Electronics And Telecommunications Research Institute | Surface plasmon optical waveguide |
| CN105334573A (en) * | 2014-06-20 | 2016-02-17 | 北京三星通信技术研究有限公司 | Surface plasmon waveguide |
| CN104407414A (en) * | 2014-11-21 | 2015-03-11 | 深圳大学 | Optical waveguide and sensor thereof |
| CN206654729U (en) * | 2017-02-13 | 2017-11-21 | 中北大学 | A kind of enhanced infrared radiator structure of surface phasmon |
| CN107526124A (en) * | 2017-08-21 | 2017-12-29 | 中山大学 | A kind of low-loss surface phasmon coupler based on semiconductor base and preparation method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112067569A (en) * | 2020-08-19 | 2020-12-11 | 吉林大学 | Slit optical waveguide sensor based on surface-enhanced infrared absorption spectrum and preparation and detection methods thereof |
| CN112067569B (en) * | 2020-08-19 | 2021-09-28 | 吉林大学 | Slit optical waveguide sensor based on surface-enhanced infrared absorption spectrum and preparation and detection methods thereof |
| WO2023119475A1 (en) * | 2021-12-22 | 2023-06-29 | 日本電信電話株式会社 | Optical device |
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