CN105947675A - Conveying device - Google Patents

Conveying device Download PDF

Info

Publication number
CN105947675A
CN105947675A CN201610474532.8A CN201610474532A CN105947675A CN 105947675 A CN105947675 A CN 105947675A CN 201610474532 A CN201610474532 A CN 201610474532A CN 105947675 A CN105947675 A CN 105947675A
Authority
CN
China
Prior art keywords
thing
support bar
transmitted
transporter
described support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610474532.8A
Other languages
Chinese (zh)
Other versions
CN105947675B (en
Inventor
吴春晖
余世荣
孟庆勇
杨涛
蒋盛超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Hefei BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201610474532.8A priority Critical patent/CN105947675B/en
Publication of CN105947675A publication Critical patent/CN105947675A/en
Application granted granted Critical
Publication of CN105947675B publication Critical patent/CN105947675B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass

Landscapes

  • Warehouses Or Storage Devices (AREA)

Abstract

The invention provides a conveying device. The conveying device comprises a conveying body support, a supporting unit used for supporting a to-be-conveyed object and conveying units. The supporting unit comprises a plurality of supporting rods used for being supported on the two opposite sides of the to-be-conveyed object. The conveying units are arranged on the conveying body support and connected with the supporting unit and can move on the conveying body support to drive the supporting unit to move so that the to-be-conveyed object can be conveyed. The conveying units are arranged on the two sides of the conveying body support and are used for supporting and conveying the to-be-conveyed object. Compared with the prior art, contact between the to-be-conveyed object and the conveying device in the conveying process is reduced, the breakage rate in the carrying process is reduced, and the production yield is increased. When to-be-conveyed objects with patterns on the back side are encountered, the locality and possibility of scratching of the back side patterns can be greatly reduced, the quality is guaranteed, and the conveying speed is more easily controlled. Compared with a traditional conveying device, the number of wheels is reduced, and the equipment purchasing and installing and maintaining cost is saved.

Description

A kind of transporter
Technical field
The present invention relates to field of mechanical technique, particularly relate to a kind of transporter.
Background technology
In the prior art, transporter is typically all the mode using roller to transmit.With TFT-LCD (Thin Film Transistor-Liquid Crystal Display) in manufacture field as a example by, glass substrate is passed by substrate Send device from an operation to another operation.During transmitting, glass substrate is mounted on roller, logical Cross the rotation of roller, glass substrate and roller and produce relative motion, drive glass substrate to move along the horizontal plane. But base plate transfer device utilizes roller transmitting during substrate in prior art, roller inevitably with Glass substrate bump contact, easy damaged during glass substrate transmission, causes production bad;Further, logical Cross roller rolling and transmit glass substrate, the bad control of transfer rate;Additionally, number of rollers is too much, increase Shop equipment purchase cost and maintenance cost etc., and bump contact, especially, for there being back view The glass substrate of case, its regionality scratched and probability all have certain risk.
Summary of the invention
The invention provides a kind of transporter, it is possible to reduce thing to be transmitted (such as glass substrate) was transmitting With the contacting of transporter in journey, reduce the damage probability of thing to be transmitted, improve and produce yield.
Technical scheme provided by the present invention is as follows:
A kind of transporter, including:
Transmit main body rack;
For supporting the support unit of thing to be transmitted, described support unit includes waiting to transmit for being respectively supported at Multiple support bars of the opposite sides of thing;
And, it is arranged on described transmission main body rack, and is connected with described support unit, it is possible to described Transmit and move on main body rack, drive described support unit to move, to transmit the delivery unit of thing to be transmitted.
Further, between the support bar of thing opposite sides to be transmitted, it is additionally provided with multiple roller.
Further, multiple rollers are arranged as string along the direction of transfer of delivery unit.
Further, described support unit also includes: be arranged on described support bar, and being used for will thing be transmitted It is fixed on the fixed component on described support bar.
Further, described support bar is perpendicular to the direction of transfer of delivery unit and arranges, and each support bar includes The first end in the middle part of described transmission rack body and the second end near described transmission rack body edge, Wherein said fixed component is arranged on the second end of described support bar, with treat transmit thing edge be fixed.
Further, described fixed component includes the latch components being arranged on the second end of described support bar;
Described latch components has lock-out state and open mode, in described lock-out state, described latch components Lock thing to be transmitted on described support bar;In described open mode, described latch components is opened, to decontrol Thing to be transmitted.
Further, described latch components includes:
It is connected to the connecting portion of the second end of described support bar;
And, it is connected to the latch part of one end away from described support bar of described connecting portion;
Wherein, described latch part can rotate with the junction of described connecting portion around it,
At described lock-out state, described latch part rotates to the primary importance being superimposed on above described support bar, With the thing to be transmitted on lock support bar;In described open mode, described latch part rotates to described support bar Outside the second position, to decontrol the thing to be transmitted on support bar.
Further, described latch part be enclosed with on the outer surface that contacts with described thing to be transmitted soft Quality guarantee sheath.
Further, described support bar is provided with lifting support member, on described support bar, described liter Fall support member can lift, to lift thing to be transmitted on the direction being perpendicular to thing to be transmitted.
Further, described lifting support member includes: the bearing of trend along described support bar is spaced at Multiple support pins on described support bar, each described support pin can lift on described support bar.
Further, multiple support bars are divided into two row along the direction of transfer of delivery unit, treat to be respectively supported at Transmit the opposite sides of thing.
Further, described delivery unit is arranged around described transmission main body rack, and can be around described biography Send main body rack to move, and form a conveyer structure.
Beneficial effects of the present invention is as follows:
Such scheme, supports and transmits wait to transmit by arranging delivery unit in the both sides transmitting main body rack Thing, the support bar wherein arranged in delivery unit can be supported on the both sides of thing to be transmitted, thus with existing skill Art uses roller to transmit the mode of thing to be transmitted and compares, decrease thing to be transmitted in transportation with transmission The contact of device, is conducive to the fragmentation greatly reducing thing to be transmitted (such as glass substrate) in handling process Rate, improves and produces yield;When running into the thing to be transmitted (such as glass substrate) having rear surface pattern, then can be significantly Reduce regionality and probability that rear surface pattern is scratched, it is ensured that quality, and passed by delivery unit Send thing to be transmitted, control the transfer rate phase of thing to be transmitted by controlling the rotating speed of roller in prior art Ratio, is easier to control the transfer rate of thing to be transmitted by the transfer rate controlling delivery unit;Additionally, with Conventional conveyor compares the quantity decreasing roller, has not only saved equipment purchase and has installed maintenance cost.
Accompanying drawing explanation
Fig. 1 represents the top view when transporter that the embodiment of the present invention is provided does not transmits substrate;
Fig. 2 represents the top view when transporter that the embodiment of the present invention provided transmits substrate;
Fig. 3 represents that in the transporter that the embodiment of the present invention is provided, support pin rises when placing substrate Structural representation;
Fig. 4 represents that in the transporter that the embodiment of the present invention is provided, support pin declines latch components locking Structural representation during substrate;
Fig. 5 represents the side view of the transporter that the embodiment of the present invention provided.
Detailed description of the invention
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearer, below in conjunction with the present invention The accompanying drawing of embodiment, is clearly and completely described the technical scheme of the embodiment of the present invention.Obviously, institute The embodiment described is a part of embodiment of the present invention rather than whole embodiments.Based on described Embodiments of the invention, the every other embodiment that those of ordinary skill in the art are obtained, broadly fall into this The scope of bright protection.
The thing to be transmitted caused for employing roller transmission thing to be transmitted in transporter in prior art is easy Damage, the problem such as the bad control of transfer rate, the invention provides a kind of transporter, it is possible to reduce to be passed Send thing (such as glass substrate) during transmitting with the contacting of transporter, reduce the damage machine of thing to be transmitted Rate, improves and produces yield.
As depicted in figs. 1 and 2, the invention provides a kind of transporter, including:
Transmit main body rack 100;
For supporting the support unit of thing 10 to be transmitted, described support unit includes treating for being respectively supported at Transmit multiple support bars 200 of the opposite sides of thing;
And, it is arranged on described transmission main body rack 100, and is connected with described support unit, it is possible to Move on described transmission main body rack 100, drive described support unit to move, to transmit the biography of thing to be transmitted Send unit 600.
Such scheme, supports and transmission is treated by arranging delivery unit in the both sides transmitting main body rack 100 Transmitting thing 10, the support bar 200 wherein arranged in delivery unit can be supported on the both sides of thing 10 to be transmitted, Thus compared with the mode that prior art employing roller transmits substrate, decrease thing 10 to be transmitted in transport During with the contacting of transporter, be conducive to greatly reducing the fragmentation in thing 10 handling process to be transmitted Rate, improves and produces yield;When running into the glass substrate having rear surface pattern, then can greatly reduce rear surface pattern quilt The regionality scratched and probability, it is ensured that quality, and transmit thing 10 to be transmitted by delivery unit, Compared with the transfer rate controlling thing 10 to be transmitted in prior art by controlling the rotating speed of roller, pass through The transfer rate controlling delivery unit 600 is easier to control the transfer rate of thing 10 to be transmitted;Additionally, with Traditional transporter is compared, and decreases the quantity of roller, has saved equipment purchase and has installed maintenance cost.
It should be noted that transporter provided by the present invention may be used for transmitting substrate, it is also possible to be used for Transmit other structures, the following is the explanation as a example by described thing to be transmitted is as substrate, the present invention carried out.
As depicted in figs. 1 and 2, in embodiment provided by the present invention, it is preferred that at thing to be transmitted It is additionally provided with multiple roller 300 between the support bar 200 of 10 opposite sides, and multiple roller 300 is along transmission The direction of transfer of unit 600 is arranged as string.
Use such scheme, by arranging string between the support bar 200 of thing 10 opposite sides to be transmitted Roller 300, utilizes this string roller 300 to support and transmit the middle part of thing 10 to be transmitted, and with to be passed The support bar 200 sending thing 10 opposite sides transmits thing 10 to be transmitted, compared with prior art, rolling jointly The quantity of wheel 300 is few, few with contacting of thing 10 to be transmitted, and reduces the fragment rate of thing 10 to be transmitted, and rolling Take turns 300 quantity to reduce, saved equipment purchase and maintenance cost is installed.Preferably, described roller 300 The politef roller that size is 20mm*20mm, politef has apparent height slickness.
In embodiment provided by the present invention, it is preferred that described support unit also includes: be arranged on described On support bar 200, for thing 10 to be transmitted is fixed on the fixed component on described support bar 200.Adopt With such scheme, by arranging fixed component, thing 10 to be transmitted is fixed on support bar 200, to keep away During exempting to transmit, thing 10 to be transmitted is relative with support bar 200 slides.
In embodiment provided by the present invention, it is preferred that described support bar 200 is perpendicular to delivery unit The direction of transfer of 600 is arranged, and each support bar 200 includes first in the middle part of described transmission rack body End and the second end near described transmission rack body edge, wherein said fixed component is arranged on described support Second end of bar 200, with treat transmit thing 10 edge be fixed.
Using such scheme, transmission thing 10 is treated in the outer end that fixed component is arranged on support bar 200 Edge is fixed, it should be appreciated that in actual applications, for the concrete setting of described fixed component Position is not defined, it is also possible to be provided in other positions, such as: be arranged on described support bar 200 Middle part etc..
Additionally, in embodiment provided by the present invention, it is preferred that as shown in Figures 1 to 4, described solid Limiting-members includes the latch components 400 being arranged on the second end of described support bar 200;Described latch components 400 Having lock-out state and open mode, at described lock-out state, described latch components 400 locks thing to be transmitted 10 on described support bar 200;In described open mode, described latch components 400 is opened, to decontrol Thing 10 to be transmitted.
Using such scheme, described fixed component uses buckle structure to treat transmission thing 10 and is fixed, Carrying wait transmit thing 10 time, be first turned on described latch components 400, will thing 10 be transmitted be placed on prop up On strut 200, then lock described latch components 400, thing 10 to be transmitted is locked in described support bar On 200, after thing 10 to be transmitted is transported to precalculated position, then latch components 400 is opened, to take Under thing 10 to be transmitted.So, utilize latch components 400 simple in construction, easy to operate, it is simple to pick and place and treat Transmit thing 10.It should be appreciated that in actual applications, described fixed component can also use other to tie Structure realizes, and will not enumerate this.
Additionally, in embodiment provided by the present invention, it is preferred that as shown in Figure 3 and Figure 4, described lock Buckle assembly 400 includes: be connected to the connecting portion 401 of the second end of described support bar 200;And, it is connected to The latch part 402 of one end away from described support bar 200 of described connecting portion 401;Wherein, described snap close Portion 402 can rotate, as shown in Figure 4, at described locking shape with the junction of described connecting portion 401 around it State, described latch part 402 rotates to the primary importance being superimposed on above described support bar 200, with locking Thing to be transmitted 10 on strut 200;As it is shown on figure 3, in described open mode, described latch part 402 Rotate the second position outside described support bar 200, to decontrol the thing to be transmitted 10 on support bar 200.
Using such scheme, described latch components 400 is rotated by latch part 402 and realizes locking and open The purpose of thing 10 to be transmitted, it should be appreciated that in actual applications, the tool of described latch components 400 Body structure is not limited merely to this.
Furthermore it is preferred that, the appearance being used for contacting with described thing 10 to be transmitted of described latch part 402 Soft protective layer it is enclosed with on face.By arranging soft protective layer, transmission thing 10 can be treated and protect, Latch part 402 is avoided to treat the damage transmitting thing 10.
In a preferred embodiment provided by the present invention, specifically, described latch part 402 can be one big The little square iron clamp for 5mm*5mm, its surface one layer of flexible glue band of parcel, simple in construction.Should manage Solve, in actual applications, described latch part 402 specifically can implementation have multiple.
Furthermore, it is necessary to explanation, the described latch part 402 height adjustable on described support bar 200, Specifically, described connecting portion 401 can be designed as adjustable for height structure.
Additionally, in embodiment provided by the present invention, it is preferred that on described support bar 200, it is provided with liter Fall support member, on described support bar 200, described lifting support member can be perpendicular to thing to be transmitted Lift on the direction of 10, to lift thing 10 to be transmitted.
Use such scheme, by arranging described lifting support member, can arrive when thing 10 to be transmitted During transporter, described latch components 400 is in open mode, and described lifting support member is raised up to make a reservation for Position (is such as raised up to the position higher than metallic support rod 20015cm), and thing 10 to be transmitted is positioned over institute After stating in lifting support member, drop to enable to described metallic support rod by described lifting support member 200 positions supporting thing 10 to be transmitted, recycle described latch components 400 and lock thing 10 to be transmitted.
Preferably, as it is shown on figure 3, described lifting support member includes: along the extension of described support bar 200 Direction is spaced at the multiple support pins 500 on described support bar 200, each described support pin 500 Can lift on described support bar 200.
Using such scheme, the lifting support member on support bar 200 uses the structure of support pin 500, It is with in time transmitting thing 10 support and contact, and little with the contact area of thing 10 to be transmitted, easy damaged is not to be passed send Thing 10.It should be appreciated that in actual applications, described lifting support member can also use other to tie Structure realizes, and is not defined this.
Furthermore, it is necessary to explanation, in embodiment provided by the present invention, it is preferred that described support bar The sensor for obtaining thing to be transmitted 10 current state on described support bar 200 it is provided with on 200, Described sensor can use infrared inductor to realize, if thing to be transmitted during thing to be transmitted 10 transmission 10 occur that fragmentation phenomenon, the most described sensor will be reported to the police, and the driving motor controlling transporter stops Run.
Additionally, as shown in Figures 1 to 5, multiple support bars 200 divide along the direction of transfer of delivery unit 600 Being two row, to be respectively supported at the opposite sides of thing 10 to be transmitted, described delivery unit can include sliding Track, described delivery unit is arranged around described transmission main body rack 100, and can transmit master around described Body support frame 100 moves, and forms a conveyer structure;
Wherein, in described support unit, every three support bars 200 may be constructed a delivery module, a biography Sending in module three support bars 200 to be equidistantly spaced, it is main that described delivery module is arranged on described transmission The opposite sides of body support frame 100, sliding rail can be looped around relative the two of described transmission main body rack 100 Side, is slidably disposed on described delivery module on described sliding rail, can make described delivery unit Transmit thing 10 to be transmitted.
In such scheme, sliding rail along whole transportation route layout, and can prop up around described transmission main body Frame 100 arranges and forms a flat openning type, delivery unit from start unloaded thing to be transmitted 10, To loading thing 10 to be transmitted to precalculated position, arrive precalculated position and unload after transmission thing 10, become again Unloaded thing to be transmitted 10 pattern, thus constitute a circulation.
Additionally, transporter provided by the present invention, when receiving carrying information, its delivery module is along sliding Dynamic track slides with certain speed, and delivery module, can be corresponding according to carrying the size of thing 10 size to be transmitted Making the delivery module mating this thing 10 size to be transmitted, in delivery unit, each part dimension is both needed to according to treating Transmit thing 10 size and do corresponding change.
The above is only the preferred embodiment of the present invention, it is noted that common for the art For technical staff, on the premise of without departing from the technology of the present invention principle, it is also possible to make some improvement and replace Changing, these improve and replace and also should be regarded as protection scope of the present invention.

Claims (12)

1. a transporter, it is characterised in that including:
Transmit main body rack;
For supporting the support unit of thing to be transmitted, described support unit includes waiting to transmit for being respectively supported at Multiple support bars of the opposite sides of thing;
And, it is arranged on described transmission main body rack, and is connected with described support unit, it is possible to described Transmit and move on main body rack, drive described support unit to move, to transmit the delivery unit of thing to be transmitted.
Transporter the most according to claim 1, it is characterised in that
It is additionally provided with multiple roller between the support bar of thing opposite sides to be transmitted.
Transporter the most according to claim 2, it is characterised in that
Multiple rollers are arranged as string along the direction of transfer of delivery unit.
Transporter the most according to claim 1, it is characterised in that
Described support unit also includes: be arranged on described support bar, for being fixed on described by thing to be transmitted Fixed component on support bar.
Transporter the most according to claim 4, it is characterised in that
Described support bar is perpendicular to the direction of transfer of delivery unit and arranges, and each support bar includes near described biography Send the first end in the middle part of rack body and the second end near described transmission rack body edge, wherein said solid Limiting-members is arranged on the second end of described support bar, with treat transmit thing edge be fixed.
Transporter the most according to claim 5, it is characterised in that
Described fixed component includes the latch components being arranged on the second end of described support bar;
Described latch components has lock-out state and open mode, in described lock-out state, described latch components Lock thing to be transmitted on described support bar;In described open mode, described latch components is opened, to decontrol Thing to be transmitted.
Transporter the most according to claim 6, it is characterised in that
Described latch components includes:
It is connected to the connecting portion of the second end of described support bar;
And, it is connected to the latch part of one end away from described support bar of described connecting portion;
Wherein, described latch part can rotate with the junction of described connecting portion around it,
At described lock-out state, described latch part rotates to the primary importance being superimposed on above described support bar, With the thing to be transmitted on lock support bar;In described open mode, described latch part rotates to described support bar Outside the second position, to decontrol the thing to be transmitted on support bar.
Transporter the most according to claim 7, it is characterised in that
It is enclosed with soft protective layer on the outer surface being used for contacting with described thing to be transmitted of described latch part.
Transporter the most according to claim 1, it is characterised in that
Described support bar is provided with lifting support member, on described support bar, described lifting support member Can lift on the direction being perpendicular to thing to be transmitted, to lift thing to be transmitted.
Transporter the most according to claim 9, it is characterised in that
Described lifting support member includes: the bearing of trend along described support bar is spaced at described support bar On multiple support pins, each described support pin can lift on described support bar.
11. transporters according to claim 1, it is characterised in that
Multiple support bars are divided into two row along the direction of transfer of delivery unit, to be respectively supported at the phase of thing to be transmitted To both sides.
12. transporters according to claim 1, it is characterised in that
Described delivery unit is arranged around described transmission main body rack, and can be around described transmission main body rack Mobile, and form a conveyer structure.
CN201610474532.8A 2016-06-24 2016-06-24 A kind of transmission device Expired - Fee Related CN105947675B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610474532.8A CN105947675B (en) 2016-06-24 2016-06-24 A kind of transmission device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610474532.8A CN105947675B (en) 2016-06-24 2016-06-24 A kind of transmission device

Publications (2)

Publication Number Publication Date
CN105947675A true CN105947675A (en) 2016-09-21
CN105947675B CN105947675B (en) 2018-11-30

Family

ID=56904900

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610474532.8A Expired - Fee Related CN105947675B (en) 2016-06-24 2016-06-24 A kind of transmission device

Country Status (1)

Country Link
CN (1) CN105947675B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111240161A (en) * 2018-11-28 2020-06-05 江西一诺新材料有限公司 Thick dry film developing process
CN113814099A (en) * 2021-08-31 2021-12-21 鲍成林 Automatic spraying device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1828828A (en) * 2005-02-28 2006-09-06 东京毅力科创株式会社 Substrate processing device, method and program
KR20120026912A (en) * 2010-09-10 2012-03-20 한솔테크닉스(주) Belt driven conveyor system of back light and lcd module assembly
CN103662803A (en) * 2013-12-09 2014-03-26 合肥京东方光电科技有限公司 Substrate conveying device
CN105292917A (en) * 2015-10-20 2016-02-03 江苏国恩信息科技有限公司 Synchronizing wheel conveying mechanism

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1828828A (en) * 2005-02-28 2006-09-06 东京毅力科创株式会社 Substrate processing device, method and program
KR20120026912A (en) * 2010-09-10 2012-03-20 한솔테크닉스(주) Belt driven conveyor system of back light and lcd module assembly
CN103662803A (en) * 2013-12-09 2014-03-26 合肥京东方光电科技有限公司 Substrate conveying device
CN105292917A (en) * 2015-10-20 2016-02-03 江苏国恩信息科技有限公司 Synchronizing wheel conveying mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111240161A (en) * 2018-11-28 2020-06-05 江西一诺新材料有限公司 Thick dry film developing process
CN113814099A (en) * 2021-08-31 2021-12-21 鲍成林 Automatic spraying device

Also Published As

Publication number Publication date
CN105947675B (en) 2018-11-30

Similar Documents

Publication Publication Date Title
JP5152469B2 (en) Substrate transfer device
CN102320472B (en) Substrate conveying system and conveying method
JP2007217079A (en) Turntable
US8776983B2 (en) Turntable device for substrate and substrate transporting system
KR20120106618A (en) Article transport facility
JP2007039157A (en) Conveying device, vacuum treatment device and conveying method
CN110304466B (en) Handling device is used in loading and unloading is carried in commodity circulation
CN105947675A (en) Conveying device
TWI279375B (en) Apparatus for transferring laminated basal plate
JP2012059798A (en) Component mounting apparatus
CN111908123B (en) Stocker conveyor
JP2005262423A (en) Polishing device of plate glass
KR100832472B1 (en) The substrate transfer
TWI253433B (en) Substrate transportation device, substrate transportation method, and substrate transportation apparatus
CN108423406A (en) A kind of bottom frame of substrate bearing device, substrate bearing device and substrate carrying mechanism
KR20140003717A (en) Substrate buffer devices that it is a line, and election possible and drive way
CN209112971U (en) Container transshipment system
KR101570074B1 (en) An apparatus and method to load substrate
CN102887318B (en) Glass substrate carrying system and clamping case and stacking machine thereof
JP3211649U (en) Polishing device for each corner, edge edge surface and edge edge thread surface of substrate
KR102266966B1 (en) Carriage for stocker conveyor
KR200469263Y1 (en) Glass substrate transport apparatus
JP4154269B2 (en) Manufacturing equipment transfer system
TW201023289A (en) Apparatus and method for moving substrate
JP5494563B2 (en) Pallet transport device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181130