CN105938824A - 半导体封装组合结构 - Google Patents
半导体封装组合结构 Download PDFInfo
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Abstract
本发明公开了一种半导体封装组合结构,包括:重分布层结构、半导体芯片、第一焊接掩模层和额外电路结构。其中,该重分布层结构具有互为相反面的芯片接合面和凸块接合面。该半导体芯片接合于该重分布层结构的该芯片接合面上。该第一焊接掩模层设于该芯片接合面上且围绕该半导体芯片;该额外电路结构设于该第一焊接掩模层之一部分上且围绕该半导体芯片;并且,该额外电路结构包括:导电垫部分,具有第一宽度;以及导孔部分,具有第二宽度,其中该第二宽度小于该第一宽度,其中该导孔部分穿过该第一焊接掩模层以耦接至该重分布层结构。本发明,可以加大芯片接合面积。
Description
技术领域
本发明涉及半导体封装技术领域,尤其涉及一种半导体封装组合结构,例如具有加大的芯片接合区域的半导体封装组合结构。
背景技术
为了确保电子装置和通讯装置的微小化和多功能化,半导体封装体较佳具有较小的尺寸,且可支持多针连接、高速度和高功能化。多功能的半导体封装体通常需要具有较大尺寸的半导体芯片。然而,在传统半导体封装体中,很难提供额外的区域使具有较大尺寸的半导体芯片可接合于其上。
因此,业界仍须一种新颖的半导体封装组合结构。
发明内容
有鉴于此,本发明实施例提供了一种半导体封装组合结构,具有加大的芯片接合区域。
本发明提供了一种半导体封装组合结构,包括:
重分布层结构,具有芯片接合面和凸块接合面,其中该芯片接合面与该凸块接合面互为相反面;
半导体芯片,接合于该重分布层结构的该芯片接合面上;
第一焊接掩模层,设于该芯片接合面上,且围绕该半导体芯片;以及
额外电路结构,设于该第一焊接掩模层之一部分上,且围绕该半导体芯片,其中该额外电路结构包括:
导电垫部分,具有第一宽度;以及
导孔部分,具有一第二宽度,其中该第二宽度小于该第一宽度,其中该导孔部分穿过该第一焊接掩模层以耦接至该重分布层结构。
其中,该导孔部分的中心与该半导体芯片之一侧壁之间的第一距离等于或大于该导电垫部分的中心与该半导体芯片的该侧壁之间的第二距离,其中该半导体芯片的该侧壁邻近该导孔部分。
其中,该导孔部分接触该重分布层结构的第一导电垫,其中该第一导电垫邻近该芯片接合面。
其中,该第一导电垫具有第三宽度,其中该第三宽度小于该第一宽度且大于该第二宽度。
其中,该额外电路结构更包括:
绝缘层,设于该导电垫部分上,其中该绝缘层具有第一开口露出该导电垫部分。
其中,该绝缘层包括焊接掩模材料或聚丙烯。
其中,更包括:
模塑料,覆盖该半导体芯片,其中该模塑料具有第二开口对齐该绝缘层的该第一开口;及
第一导电凸块,设于该第一开口与该第二开口中,且接触该导电垫部分。
其中,所述第一导电凸块通过所述导电垫部分和所述导孔部分耦接至所述重分布层的所述第一导电垫。
其中,该第一导电垫的中心与该半导体芯片的一侧壁之间的第三距离等于或大于该第一导电凸块的中心与该半导体芯片的该侧壁之间的第四距离,其中该半导体芯片的该侧壁邻近该第一导电垫。
其中,所述第一导电垫设置在所述芯片接触面中的周边区中。
其中,更包括:
第二焊接掩模层,设于该凸块接合面上;
第二导电凸块,设于该第二焊接掩模层上,且穿过该第二焊接掩模层,其中该第二导电凸块接触该重分布层结构的第二导电垫,其中该第二导电垫邻近该凸块接合面。
其中,其中该第二导电垫具有第四宽度,其中该第四宽度大于该第三宽度。
其中,所述导电垫部分和所述导孔部分形成穿过所述第一焊接掩模层的T型导电结构。
本发明实施例的有益效果是:
以上的半导体封装组合结构,半导体芯片接合于芯片接合面,额外电路结构通过第一焊接掩模层接合于芯片接合面(具体的,额外电路结构中的导孔部分穿过第一焊接掩模层以耦接至重分布层结构),因此该额外电路结构相对于该芯片接合面具有一高度,从而使得芯片接合区域的大小将可以不受导电垫部分与半导体芯片侧壁之间的距离的限制,而可以受导孔部分与半导体芯片侧壁之间的距离的限制;由于,导孔部分的宽度小于导电垫部分的宽度,因此可以加大芯片接合区域。
附图说明
图1为本发明一些实施例的半导体封装组合结构的横截面图。
图2为本发明其它一些实施例的半导体封装组合结构的横截面图。
图3为本发明其它一些实施例的半导体封装组合结构的横截面图。
具体实施方式
为了使本发明所解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。
在附图中,为了清楚说明本发明,部分组件的尺寸可能被放大且并未照实际比例绘制。此尺寸和相对的尺寸并未对应实施本发明时的实际尺寸。
图1为本发明一些实施例的包括半导体封装体的半导体封装组合结构的横截面图。在本发明一些实施例中,半导体封装组合结构500a为晶圆级半导体封装组合结构,例如为覆晶半导体封装组合结构。
如图1所示,半导体封装组合结构500a包括至少一个晶圆级半导体封装体,接合于基材200上。在此实施例中,晶圆级半导体封装体包括:半导体封装体300a。此半导体封装体300a可以为片上系统封装体(system-on-chip(SOC)package)300a。
如图1所示,例如为印刷电路板的基材200的材料可包括聚丙烯。应注意的是,基材200可为单层或多层结构。多个导电垫(未绘示)及/或导电线路(conductive trace)(未绘示)设于基材200的芯片接合面202上。在本发明一些实施例中,导电线路可包括电源线路部分、信号线路部分、或接地线路部分,此导电线路用作半导体封装体300a的输入/输出连接。此外,半导体封装体300a可直接设于导电线路上。在本发明其它一些实施例中,导电垫设于芯片接合面202上,并连接至导电线不同的末端。半导体封装体300a可直接设于此导电垫上。
如图1所示,半导体封装体300a藉由接合步骤设于基材200的芯片接合面202上。此半导体封装体300a藉由导电结构320设于基材200上。此半导体封装体300a包括半导体芯片302及重分布层结构308。在本发明一些实施例中,半导体芯片302可包括逻辑芯片。此逻辑芯片包括中央处理单元(CPU)、图形处理单元(GPU)、动态随机存取存储器(DRAM)控制器、或上述的组合。
如图1所示,在本发明一些实施例中,半导体芯片302由覆晶技术制得。半导体芯片302的导电垫304设于前表面302b以电性连接至半导体芯片302的电路(未绘示)。在本发明一些实施例中,导电垫304属于半导体芯片302的内连线结构(未绘示)的最上层金属层。此半导体芯片302的导电垫304接触对应的导电结构306。此导电结构306例如为导电凸块。应注意的是,整合于半导体封装组合结构500a中的半导体芯片302的数量并不限于本发明的实施例。
如图1所示,半导体封装体300a更包括设于半导体芯片302的前表面302b上的重分布层结构308。此重分布层结构308具有芯片接合面310以及凸块接合面312,且此芯片接合面310与凸块接合面312互为相反面。上述半导体封装体300a的半导体芯片302透过例如为导电凸块或锡膏的导电结构306设于重分布层结构308的芯片接合面310上,且连接至此芯片接合面310。在本发明一些实施例中,重分布层结构308可包括设于一或多层金属间介电层318中的一或多个导电线路314。此外,重分布层结构308可包括邻近芯片接合面310设置的导电垫330a及331,以及邻近凸块接合面312设置的导电垫332。然而,应注意的是,图1的导电线路314的数量、金属间介电层318的数量、导电垫330a、331及332的数量仅为说明之用,而并非用以限定本发明。
如图1所示,在本发明一些实施例中,导电垫330a用以使一额外的存储封装体,例如动态随机存取存储封装体(未绘示),接合于其上。因此,此导电垫330a设于芯片接合面310的周边区,此周边区围绕半导体芯片302。此外,此导电垫330a不直接接触设于芯片接合面310的中央区的导电结构306。此导电结构306用以使半导体芯片302接合于其上。在本发明一些实施例中,导电垫330a可作为动态随机存取存储封装体接合垫。导电垫331用以使半导体芯片302接合于其上。因此,导电垫331设于芯片接合面310的中央区。在本发明一些实施例中,导电垫331可作为半导体芯片接合垫。此外,导电垫332设于凸块接合面312的周边区与中央区。在本发明一些实施例中,导电垫330a的宽度(或直径)R1小于导电垫332的宽度(或直径)R2。
如图1所示,半导体封装体300a更包括设于重分布层结构308的芯片接合面310上的第一焊接掩模层322及设于重分布层结构308的凸块接合面312上的第二焊接掩模层316。在本发明一些实施例中,第一焊接掩模层322接触芯片接合面310的周边区,此周边区围绕半导体芯片302。易言之,第一焊接掩模层322围绕半导体芯片302且与此半导体芯片302间隔一距离S1。第二焊接掩模层316设于凸块接合面312的周边区与中央区。此第一焊接掩模层322具有对应至导电垫330a的开口(未绘示),此导电垫330a邻近芯片接合面310设置。此第二焊接掩模层316具有对应至导电垫332的开口(未绘示),此导电垫332邻近凸块接合面312设置。因此,导电垫330a及导电垫332分别从第一焊接掩模层322及第二焊接掩模层316的开口中露出。在本发明一些实施例中,第一焊接掩模层322及第二焊接掩模层316由焊接掩模(solder mask)材料形成。
在本发明一些实施例中,如图1所示,半导体封装体300a更包括设于第一焊接掩模层322的一部分上的额外电路结构335。在本发明一些实施例中,此额外电路结构335用以使一额外的存储封装体,例如动态随机存取存储封装体(未绘示),接合于其上。因此,此额外电路结构335设于芯片接合面310的周边区,且对应导电垫330a(亦即动态随机存取存储封装体接合垫)。在本发明一些实施例中,此额外电路结构335包括至少一个T型导电结构334及设于此T型导电结构334上的绝缘层324。此T型导电结构334包括导电垫部分328及接触此导电垫部分328的导孔部分326。此导电垫部分328具有宽度W1,且设于绝缘层324及第一焊接掩模层322之间。导孔部分326具有宽度W2,且此宽度W2小于宽度W1,导孔部分326设于导电垫部分328及重分布层结构308的导电垫330a之间。此外,导孔部分326穿过第一焊接掩模层322且接触一或多个对应的重分布层结构308的导电垫330a。在本发明一些实施例中,导电垫330a的宽度(或直径)R1小于导电垫部分328的宽度W1且大于导孔部分326的宽度W2。此额外电路结构335具有简单的结构,故可维持半导体封装体300a的封装高度。
在本发明一些实施例中,如图1所示,T型导电结构334的导电垫330a及导孔部分326以旋转轴C作为其共同中心的方式设置。T型导电结构334的导孔部分326及导电垫部分328以旋转轴C作为其共同中心的方式设置。因此,导孔部分326的中心与半导体芯片302的侧壁302c之间的距离S2等于导电垫部分328的中心与半导体芯片302的侧壁302c之间的距离S3,且此半导体芯片302的侧壁302c邻近导孔部分326。相似地,导电垫330a的中心与半导体芯片302的侧壁302c之间的距离(等于距离S2)等于导电垫部分328的中心与半导体芯片302的侧壁302c之间的距离S3,其中此半导体芯片302的侧壁302c邻近导电垫330a。
如图1所示,T型导电结构334的绝缘层324接触导电垫部分328。此外,绝缘层324围绕半导体芯片302且与此半导体芯片302间隔一大于距离S1的距离。此外,此绝缘层324具有至少一个第一开口344露出T型导电结构334的导电垫部分328的一部分。在本发明一些实施例中,绝缘层324的材料包括焊接掩模材料或聚丙烯。
如图1所示,半导体封装体300a更包括模塑料(molding compound)350,此模塑料350覆盖半导体芯片302,且围绕半导体芯片302。此模塑料350接触半导体芯片302。此模塑料350具有相反面352及354,此相反面352及354分别邻近半导体芯片302的前表面302b及背表面302a。此模塑料350的表面352可接触重分布层结构308的表面310。此模塑料350亦可覆盖半导体芯片302的背表面302a。在本发明一些实施例中,模塑料350具有至少一个第二开口346穿过此模塑料350。此第二开口346对齐且连接对应的绝缘层324的第一开口344。在本发明一些实施例中,此模塑料350的材料可为非导电材料,例如为树脂、可塑模的聚合物,或其它类似的材料。此模塑料350可在大抵为液态时涂布,接着可藉由例如反应于环氧化合物或树脂中的化学反应固化。在本发明其它一些实施例中,此模塑料350可为紫外光硬化型聚合物或热硬化型聚合物,且可为可涂布并围绕半导体芯片302的凝胶或可融熔的固体。接着,可藉由紫外光或加热硬化步骤硬化。此模塑料350可设于一模具(未绘示)中并硬化。
如图1所示,半导体封装体300a更包括设于重分布层结构308的芯片接合面310上的至少一个第一导电凸块342,此重分布层结构308的芯片接合面310邻近半导体芯片302。此第一导电凸块342设于绝缘层324的第一开口344与模塑料350的第二开口346中。此外,此第一导电凸块342接触对应的T型导电结构334的导电垫部分328。此外,此第一导电凸块342接触绝缘层324及模塑料350。在本发明一些实施例中,第一导电凸块342用以使一额外的存储封装体,例如动态随机存取存储封装体(未绘示),接合于其上。此第一导电凸块342可作为动态随机存取存储封装体凸块。
在本发明一些实施例中,如图1所示,导电垫330a、T型导电结构334的导电垫部分328、及对应的第一导电凸块342以旋转轴C作为其共同中心的方式设置。因此,导电垫330a的中心与半导体芯片302的侧壁302c之间的距离(等于距离S2)等于第一导电凸块342的中心与半导体芯片302的侧壁302c之间的距离(等于距离S3),其中此半导体芯片302的侧壁302c邻近导电垫330a。此外,在本发明一些实施例中,如图1所示,导电垫330a及导孔部分326与第一导电凸块342完全重叠。
如图1所示,半导体封装体300a更包括设于重分布层结构308的凸块接合面312上的第二导电结构320。此重分布层结构308的凸块接合面312远离半导体芯片302。此第二导电结构320透过第二焊接掩模层316的开口耦接至导电垫332,且与导电垫332接触。此导电垫332邻近凸块接合面312设置。此外,第二导电结构320藉由重分布层结构308与模塑料350隔开。易言之,第二导电结构320并未接触模塑料350。在本发明一些实施例中,第二导电结构320可包括导电凸块结构,例如铜凸块、焊料凸块结构、导电柱结构、导线结构、或导电膏(导电胶)结构。
图2为本发明一些实施例的包括半导体封装体的半导体封装组合结构的横截面图。应注意的是,后文中与前文相同或相似的组件或膜层将以相同或相似的标号表示,其材料、制造方法与功能皆与前文所述相同或相似,故此部分在后文中将不再赘述。由于T型导电结构334的导电垫部分328设于重分布层结构308的芯片接合面310上,且此导电垫部分328用以使对应的第一导电凸块342直接接合于其上,故此导电垫部分328具有将第一导电垫330b重分布(重新导向)的功能。因此,可提升重分布层结构308的第一导电垫330b的设计灵活度。
如图2所示,图1所示的半导体封装组合结构500a与图2所示的半导体封装组合结构500b的其中一个差异为重分布层结构308的第一导电垫330b与T型导电结构334的导孔部分326皆较靠近半导体封装体300b的边缘319设置,而导电垫部分328与对应的第一导电凸块342皆与半导体芯片302的侧壁302c间隔一固定距离(亦即距离S3)。图2所示的半导体封装体300b的第一导电凸块342之间可维持一固定间距P1,此间距P1与图1的半导体封装体300a的第一导电凸块342的间距P1相同。此外,T型导电结构334的导电垫部分328可维持宽度W1,此宽度W1与图1的半导体封装体300a的导电垫部分328的宽度W1相同。
在此实施例中,T型导电结构334的导孔部分326与导电垫部分328并非以旋转轴C作为其共同中心的方式设置。然而,半导体封装组合结构500b的半导体封装体300b的第一导电垫330b及T型导电结构334的导孔部分326以旋转轴C作为其共同中心的方式设置。因此,导孔部分326的中心与半导体芯片302的侧壁302c之间的距离S2大于导电垫部分328的中心与半导体芯片302的侧壁302c之间的距离S3,且此半导体芯片302的侧壁302c邻近导孔部分326。相似地,第一导电垫330b的中心与半导体芯片302的侧壁302c之间的距离(等于距离S2)大于导电垫部分328的中心与半导体芯片302的侧壁302c之间的距离S3,其中此半导体芯片302的侧壁302c邻近第一导电垫330b。
在本发明一些实施例中,如图2所示,T型导电结构334的导电垫部分328与对应的第一导电凸块342并非以旋转轴C作为其共同中心的方式设置。因此,第一导电垫330b的中心与半导体芯片302的侧壁302c之间的距离(等于距离S2)大于对应的第一导电凸块342的中心与半导体芯片302的侧壁302c之间的距离(等于距离S3),其中此半导体芯片302的侧壁302c邻近第一导电垫330b。此外,在本发明一些实施例中,如图2所示,第一导电垫330b及导孔部分326与第一导电凸块342并非完全重叠。
图3为本发明一些实施例的包括半导体封装体的半导体封装组合结构的横截面图。应注意的是,后文中与前文相同或相似的组件或膜层将以相同或相似的标号表示,其材料、制造方法与功能皆与前文所述相同或相似,故此部分在后文中将不再赘述。在此实施例中,重分布层结构308的第一导电垫330c与T型导电结构334的导孔部分326皆较靠近半导体封装体300c的边缘319设置,而导电垫部分328与对应的第一导电凸块342皆与半导体芯片302的侧壁302c间隔一固定距离(亦即距离S3)。图3所示的半导体封装体300c的第一导电凸块342可维持一固定间距P1,此间距P1与第1-2图的半导体封装体300a及300b的第一导电凸块342的间距P1相同。
如图3所示,图2所示的半导体封装组合结构500b与图3所示的半导体封装组合结构500c的其中一个差异为半导体封装组合结构500c的半导体封装体300c可更包括额外电路结构335a。此额外电路结构335a包括至少一个T型导电结构334a及设于T型导电结构334a上的单一绝缘层324。此T型导电结构334a包括导电垫部分328a及接触此导电垫部分328a的导孔部分326。此导电垫部分328a的宽度W3大于第1-2图的导电垫部分328的宽度W1。此具有较大宽度的导电垫部分328a具有重分布(重新导向)的功能,因此,可提升一或多个第一导电垫330c的位置设计的灵活度。因此,第一导电垫330c与导孔部分326皆可设计为非常靠近半导体封装体300c的边缘319而设置。
如图3所示,T型导电结构334的导孔部分326与导电垫部分328并非以旋转轴C作为其共同中心的方式设置。然而,半导体封装组合结构500c的半导体封装体300c的第一导电垫330c及T型导电结构334的导孔部分326以旋转轴C作为其共同中心的方式设置。此外,T型导电结构334的导电垫部分328与对应的第一导电凸块342的中心线重合。在此实施例中,第一导电垫330c与对应的第一导电凸块342并未重叠。
在此实施例中,如图3所示,导孔部分326的中心与半导体芯片302的侧壁302c之间的距离S2远大于导电垫部分328的中心与半导体芯片302的侧壁302c之间的距离S3,且此半导体芯片302的侧壁302c邻近导孔部分326。相似地,第一导电垫330c的中心与半导体芯片302的侧壁302c之间的距离(等于距离S2)大于导电垫部分328的中心与半导体芯片302的侧壁302c之间的距离S3,其中此半导体芯片302的侧壁302c邻近第一导电垫330c。
在此实施例中,如图3所示,第一导电垫330c的中心与半导体芯片302的侧壁302c之间的距离(等于距离S2)大于对应的第一导电凸块342的中心与半导体芯片302的侧壁302c之间的距离(等于距离S3),其中此半导体芯片302的侧壁302c邻近第一导电垫330c。此外,在本发明一些实施例中,如图3所示,第一导电垫330c与导孔部分326皆可设计为非常靠近半导体封装体300c的边缘319设置,且可不与对应的第一导电凸块342重叠。此外,两个或多个第一导电垫330c与导孔部分326可设计为耦接至对应的单一导电垫部分328以及对应的单一第一导电凸块342。
本发明一些实施例的半导体封装组合结构具有下述优点。此半导体封装组合结构包括设于焊接掩模层的一部分上的额外电路结构,此焊接掩模层设于重分布层结构的芯片接合面上,而此重分布层结构的芯片接合面用以让半导体芯片设于其上。此额外电路结构用以使一额外的存储封装体,例如动态随机存取存储封装体(未绘示),接合于其上。在本发明一些实施例中,此额外电路结构围绕半导体芯片,但并未设于半导体芯片与重分布层结构之间。此额外电路结构包括穿过上述焊接掩模层的至少一T型导电结构以及设于此T型导电结构上的单一绝缘层。此额外电路结构具有薄的高度,故可维持半导体封装体的封装高度。此T型导电结构的导电垫部分用以使对应的导电凸块直接接合于其上,且由于此T型导电结构的导电垫部分设于重分布层结构的芯片接合面上,此导电垫部分具有将重分布层结构的动态随机存取存储封装体接合垫重分布(重新导向)的功能,故可提升此重分布层结构的动态随机存取存储封装体接合垫的设计灵活度。在本发明一些实施例中,动态随机存取存储封装体接合垫、T型导电结构的导孔部分及导电垫部分、及对应的导电凸块以一旋转轴作为其共同中心的方式设置。动态随机存取存储封装体接合垫的中心与半导体芯片的侧壁之间的距离等于导电垫部分的中心与半导体芯片的侧壁之间的距离,且此半导体芯片的侧壁邻近动态随机存取存储封装体接合垫。
或者,在其它实施例中,重分布层结构的第一导电垫与T型导电结构的导孔部分皆较靠近半导体封装体的外缘设置,而导电垫部分与对应的第一导电凸块皆与半导体芯片的侧壁间隔一固定距离。例如,动态随机存取存储封装体接合垫与T型导电结构的导电垫部分并非以相同旋转轴作为其共同中心的方式设置。或者,在其它实施例中,导电垫部分被设计具有较大的宽度,以提供重分布(重新导向)的功能。因此,可提升一或多个动态随机存取存储封装体接合垫的位置设计的灵活度。因此,动态随机存取存储封装体接合垫与导孔部分皆可设计为非常靠近半导体封装体的边缘设置。动态随机存取存储封装体接合垫的中心与半导体芯片的侧壁之间的距离大于导电垫部分的中心与半导体芯片的侧壁之间的距离,且此半导体芯片的侧壁邻近动态随机存取存储封装体接合垫。因此,此重分布层结构的芯片接合面的接合面积可增加。因此,半导体芯片的尺寸(宽度或长度)可更进一步加大,而对应的第一导电凸块可维持固定的凸块间间距,使动态随机存取存储封装体芯片可接合于其上。由于动态随机存取存储封装体接合垫的重新分布可增加重分布层结构的线路空间,额外的非主动组件,例如去耦电容,可被埋设于此重分布层结构中。
值得注意的是,以上所述的组件尺寸、组件参数、以及组件形状皆非为本发明的限制条件。本领域技术人员可以根据不同需要调整这些设定值。另外,本发明的半导体封装组合结构并不仅限于图1~3所图示的状态。本发明可以仅包括图1~3的任何一或多个实施例的任何一或多个特征。换言之,并非所有图标的特征均须同时实施于本发明的半导体封装组合结构中。
虽然本发明的实施例及其优点已公开如上,但应该了解的是,任何所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作更动、替代与润饰。此外,本发明的保护范围并未局限于说明书内所述特定实施例中的工艺、机器、制造、物质组成、装置、方法及步骤,任何本领域技术人员可从本发明公开的内容中理解现行或未来所发展出的工艺、机器、制造、物质组成、装置、方法及步骤,只要可以在此处所述实施例中实施大抵相同功能或获得大抵相同结果皆可根据本发明使用。因此,本发明的保护范围包括上述工艺、机器、制造、物质组成、装置、方法及步骤。另外,每一权利要求构成个别的实施例,且本发明的保护范围也包括各个权利要求及实施例的组合。
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。
Claims (13)
1.一种半导体封装组合结构,其特征在于,包括:
重分布层结构,具有芯片接合面和凸块接合面,其中该芯片接合面与该凸块接合面互为相反面;
半导体芯片,接合于该重分布层结构的该芯片接合面上;
第一焊接掩模层,设于该芯片接合面上,且围绕该半导体芯片;以及
额外电路结构,设于该第一焊接掩模层之一部分上,且围绕该半导体芯片,其中该额外电路结构包括:
导电垫部分,具有第一宽度;以及
导孔部分,具有第二宽度,其中该第二宽度小于该第一宽度,其中该导孔部分穿过该第一焊接掩模层以耦接至该重分布层结构。
2.如权利要求1所述的半导体封装组合结构,其特征在于,该导孔部分的中心与该半导体芯片之一侧壁之间的第一距离等于或大于该导电垫部分的中心与该半导体芯片的该侧壁之间的第二距离,其中该半导体芯片的该侧壁邻近该导孔部分。
3.如权利要求1所述的半导体封装组合结构,其特征在于,该导孔部分接触该重分布层结构的第一导电垫,其中该第一导电垫邻近该芯片接合面。
4.如权利要求3所述的半导体封装组合结构,其特征在于,该第一导电垫具有第三宽度,其中该第三宽度小于该第一宽度且大于该第二宽度。
5.如权利要求3所述的半导体封装组合结构,其特征在于,该额外电路结构更包括:
绝缘层,设于该导电垫部分上,其中该绝缘层具有第一开口露出该导电垫部分。
6.如权利要求5所述的半导体封装组合结构,其特征在于,该绝缘层包括焊接掩模材料或聚丙烯。
7.如权利要求5所述的半导体封装组合结构,其特征在于,更包括:
模塑料,覆盖该半导体芯片,其中该模塑料具有第二开口对齐该绝缘层的该第一开口;及
第一导电凸块,设于该第一开口与该第二开口中,且接触该导电垫部分。
8.如权利要求7所述的半导体封装组合结构,其特征在于,所述第一导电凸块通过所述导电垫部分和所述导孔部分耦接至所述重分布层的所述第一导电垫。
9.如权利要求7所述的半导体封装组合结构,其特征在于,该第一导电垫的中心与该半导体芯片的一侧壁之间的第三距离等于或大于该第一导电凸块的中心与该半导体芯片的该侧壁之间的第四距离,其中该半导体芯片的该侧壁邻近该第一导电垫。
10.如权利要求4所述的半导体封装组合结构,其特征在于,所述第一导电垫设置在所述芯片接合面中的周边区中。
11.如权利要求1所述的半导体封装组合结构,其特征在于,更包括:
第二焊接掩模层,设于该凸块接合面上;
第二导电凸块,设于该第二焊接掩模层上,且穿过该第二焊接掩模层,其中该第二导电凸块接触该重分布层结构的第二导电垫,其中该第二导电垫邻近该凸块接合面。
12.如权利要求11所述的半导体封装组合结构,其特征在于,其中该第二导电垫具有第四宽度,其中该第四宽度大于该第三宽度。
13.如权利要求1所述的半导体封装组合结构,其特征在于,所述导电垫部分和所述导孔部分形成穿过所述第一焊接掩模层的T型导电结构。
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