CN105928961A - 一种原位测试样品台和原位测试方法 - Google Patents
一种原位测试样品台和原位测试方法 Download PDFInfo
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- CN105928961A CN105928961A CN201610411154.9A CN201610411154A CN105928961A CN 105928961 A CN105928961 A CN 105928961A CN 201610411154 A CN201610411154 A CN 201610411154A CN 105928961 A CN105928961 A CN 105928961A
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- 238000012360 testing method Methods 0.000 title claims abstract description 47
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 36
- 239000000523 sample Substances 0.000 claims abstract description 165
- 239000000463 material Substances 0.000 claims abstract description 24
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000010894 electron beam technology Methods 0.000 claims abstract description 18
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 17
- 238000004458 analytical method Methods 0.000 claims abstract description 12
- 238000007789 sealing Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 15
- 230000006835 compression Effects 0.000 claims description 8
- 238000007906 compression Methods 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 5
- 238000012512 characterization method Methods 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000010249 in-situ analysis Methods 0.000 claims 1
- 238000004627 transmission electron microscopy Methods 0.000 claims 1
- 238000007431 microscopic evaluation Methods 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000001887 electron backscatter diffraction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002389 environmental scanning electron microscopy Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000233855 Orchidaceae Species 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
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- General Physics & Mathematics (AREA)
- Immunology (AREA)
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Abstract
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Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105223215A (zh) * | 2015-11-16 | 2016-01-06 | 南京大学 | 一种在环境透射电子显微镜中安装的气体电子衍射装置 |
CN106248703A (zh) * | 2016-10-19 | 2016-12-21 | 中国科学院上海应用物理研究所 | 一种同步辐射原位测试装置 |
CN107525846A (zh) * | 2017-10-11 | 2017-12-29 | 北京大学 | 一种超高真空兼容的低温强磁场原位输运装置 |
CN107677694A (zh) * | 2017-08-03 | 2018-02-09 | 浙江大学 | 一种原位观察低塑性高强度金属马氏体相变的方法 |
CN109425627A (zh) * | 2017-09-05 | 2019-03-05 | 浙江大学 | 多自由度样品杆 |
CN109461640A (zh) * | 2018-11-30 | 2019-03-12 | 中国科学院金属研究所 | 透射、扫描和聚焦离子束电镜通用样品杆及转接装置 |
CN109752401A (zh) * | 2019-01-16 | 2019-05-14 | 清华大学 | 具有实时原位检测功能的增材制造装置及方法 |
CN109839517A (zh) * | 2017-11-28 | 2019-06-04 | 中国科学院金属研究所 | 扫描或聚焦离子束电镜连接透射电镜样品杆的转换装置 |
CN110109001A (zh) * | 2019-04-30 | 2019-08-09 | 北京大学 | 一种原位气氛热电两场测试用样品台及芯片电极自密封结构 |
CN112697818A (zh) * | 2020-12-14 | 2021-04-23 | 兰州大学 | 适用于fib技术制样的透射电子显微镜磁电原位样品杆 |
CN113155878A (zh) * | 2021-04-06 | 2021-07-23 | 北京化工大学 | 一种透射电镜样品丝载台及其制备方法和应用 |
CN114428093A (zh) * | 2020-09-29 | 2022-05-03 | 中国石油化工股份有限公司 | 一种基于能谱仪的测点定位装置、能谱测试系统及测试方法 |
Citations (6)
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JP2000146781A (ja) * | 1998-11-18 | 2000-05-26 | Hitachi Ltd | 試料解析方法、試料作成方法およびそのための装置 |
US6642519B2 (en) * | 2001-09-27 | 2003-11-04 | Kabushiki Kaisha Toshiba | Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device |
JP2005005108A (ja) * | 2003-06-11 | 2005-01-06 | Hitachi High-Technologies Corp | 集束イオンビーム装置 |
CN203800007U (zh) * | 2014-03-28 | 2014-08-27 | 中芯国际集成电路制造(北京)有限公司 | Tem样品承载装置以及tem样品放置系统 |
CN104897699A (zh) * | 2015-06-08 | 2015-09-09 | 北京工业大学 | 一种可以对块体材料进行加工并实现原子尺度原位变形的方法和装置 |
CN205844224U (zh) * | 2016-06-13 | 2016-12-28 | 北京工业大学 | 一种原位测试样品台 |
-
2016
- 2016-06-13 CN CN201610411154.9A patent/CN105928961B/zh active Active
Patent Citations (6)
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JP2000146781A (ja) * | 1998-11-18 | 2000-05-26 | Hitachi Ltd | 試料解析方法、試料作成方法およびそのための装置 |
US6642519B2 (en) * | 2001-09-27 | 2003-11-04 | Kabushiki Kaisha Toshiba | Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device |
JP2005005108A (ja) * | 2003-06-11 | 2005-01-06 | Hitachi High-Technologies Corp | 集束イオンビーム装置 |
CN203800007U (zh) * | 2014-03-28 | 2014-08-27 | 中芯国际集成电路制造(北京)有限公司 | Tem样品承载装置以及tem样品放置系统 |
CN104897699A (zh) * | 2015-06-08 | 2015-09-09 | 北京工业大学 | 一种可以对块体材料进行加工并实现原子尺度原位变形的方法和装置 |
CN205844224U (zh) * | 2016-06-13 | 2016-12-28 | 北京工业大学 | 一种原位测试样品台 |
Non-Patent Citations (2)
Title |
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P. GHODS ET AL.: "Nano-scale study of passive films and chloride-induced depassivation of carbon steel rebar in simulated concrete pore solutions using FIB/TEM", 《CEMENT AND CONCRETE RESEARCH》 * |
张跃飞等: "一维纳米材料原位三点弯曲力学性能实验研究", 《电子显微学报》 * |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105223215A (zh) * | 2015-11-16 | 2016-01-06 | 南京大学 | 一种在环境透射电子显微镜中安装的气体电子衍射装置 |
CN106248703A (zh) * | 2016-10-19 | 2016-12-21 | 中国科学院上海应用物理研究所 | 一种同步辐射原位测试装置 |
CN107677694A (zh) * | 2017-08-03 | 2018-02-09 | 浙江大学 | 一种原位观察低塑性高强度金属马氏体相变的方法 |
CN107677694B (zh) * | 2017-08-03 | 2020-05-19 | 浙江大学 | 一种原位观察金属马氏体相变的方法 |
CN109425627A (zh) * | 2017-09-05 | 2019-03-05 | 浙江大学 | 多自由度样品杆 |
CN107525846A (zh) * | 2017-10-11 | 2017-12-29 | 北京大学 | 一种超高真空兼容的低温强磁场原位输运装置 |
CN109839517B (zh) * | 2017-11-28 | 2023-10-10 | 中国科学院金属研究所 | 扫描或聚焦离子束电镜连接透射电镜样品杆的转换装置 |
CN109839517A (zh) * | 2017-11-28 | 2019-06-04 | 中国科学院金属研究所 | 扫描或聚焦离子束电镜连接透射电镜样品杆的转换装置 |
CN109461640A (zh) * | 2018-11-30 | 2019-03-12 | 中国科学院金属研究所 | 透射、扫描和聚焦离子束电镜通用样品杆及转接装置 |
CN109461640B (zh) * | 2018-11-30 | 2024-03-22 | 中国科学院金属研究所 | 透射、扫描和聚焦离子束电镜通用样品杆及转接装置 |
CN109752401A (zh) * | 2019-01-16 | 2019-05-14 | 清华大学 | 具有实时原位检测功能的增材制造装置及方法 |
CN110109001A (zh) * | 2019-04-30 | 2019-08-09 | 北京大学 | 一种原位气氛热电两场测试用样品台及芯片电极自密封结构 |
CN110109001B (zh) * | 2019-04-30 | 2024-03-15 | 北京大学 | 一种原位气氛热电两场测试用样品台及芯片电极自密封结构 |
CN114428093A (zh) * | 2020-09-29 | 2022-05-03 | 中国石油化工股份有限公司 | 一种基于能谱仪的测点定位装置、能谱测试系统及测试方法 |
CN114428093B (zh) * | 2020-09-29 | 2024-05-28 | 中国石油化工股份有限公司 | 一种基于能谱仪的测点定位装置、能谱测试系统及测试方法 |
CN112697818B (zh) * | 2020-12-14 | 2023-07-25 | 兰州大学 | 适用于fib技术制样的透射电子显微镜磁电原位样品杆 |
CN112697818A (zh) * | 2020-12-14 | 2021-04-23 | 兰州大学 | 适用于fib技术制样的透射电子显微镜磁电原位样品杆 |
CN113155878A (zh) * | 2021-04-06 | 2021-07-23 | 北京化工大学 | 一种透射电镜样品丝载台及其制备方法和应用 |
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Inventor after: Wang Jin Inventor after: Zhang Yuefei Inventor before: Zhang Yuefei Inventor before: Wang Jin |
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Effective date of registration: 20231109 Address after: Factory Building No. 4, 487 Chengdongxing Road, Tonglu County, Hangzhou City, Zhejiang Province, 311599 Patentee after: Zhejiang Qiyue Technology Co.,Ltd. Address before: 100 000 Pingle Garden Village, Chaoyang District, Beijing Patentee before: Beijing University of Technology |