CN105921839B - A kind of kovar alloy and ceramic material ultrasonic brazing method - Google Patents
A kind of kovar alloy and ceramic material ultrasonic brazing method Download PDFInfo
- Publication number
- CN105921839B CN105921839B CN201610393351.2A CN201610393351A CN105921839B CN 105921839 B CN105921839 B CN 105921839B CN 201610393351 A CN201610393351 A CN 201610393351A CN 105921839 B CN105921839 B CN 105921839B
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- CN
- China
- Prior art keywords
- kovar alloy
- ceramic material
- ultrasonic
- brazing
- alloy
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/06—Soldering, e.g. brazing, or unsoldering making use of vibrations, e.g. supersonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
- B23K1/206—Cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
Abstract
The present invention relates to a kind of kovar alloys and ceramic material ultrasonic brazing method comprising following steps：Kovar alloy to be welded and ceramic material are put into 5 ~ 10min of ultrasonic cleaning in acetone；Kovar alloy, ceramic material and solder are assembled into ceramics/solder/kovar alloy three-decker；It is placed on warm table, carries out heating pressurization, wherein heating temperature is 830 ~ 980 DEG C, and pressure is 0.2 ~ 1MPa, starts ultrasonic vibration after brazing filler metal melts, and wherein vibration frequency is 10 ~ 110kHz, and amplitude is 1 ~ 10 μm；Heating time stops heating after continuing 20 ~ 90s, stops pressurization and ultrasonic vibration after connector brazed seam layer completely solidification, obtains cutting down alloy/ceramic soldered joint.The present invention it is antivacuum do not use brazing flux under conditions of, realize the soldering connection of kovar alloy and ceramic material, while joint microstructure being made to be refined, connector residual stress level is low, and has preferable sealing performance.
Description
Technical field
The invention belongs to welding technology fields, and in particular to a kind of kovar alloy and ceramic material ultrasonic brazing method.
Background technology
Kovar alloy, also referred to as teleoseal have higher curie point and good cryo tissue stability, alloy
Oxidation film it is fine and close, be easy welding and welding, there is good plasticity, machinable.However, the intrinsic hardness of ceramic material and
Brittleness makes it be difficult to manufacture, and needs to connect with metal, and realization and the complementation on metallicity have both pottery to obtain
The ceramic-metal composite component of the respective excellent properties of porcelain and metal.So kovar alloy is attached with ceramic material to be had
Wide application prospect, also, the sealing-in component of kovar alloy and ceramic material is chiefly used in vacuum electronic, the industries such as power electronics
Device in.
In interconnection technique of the ceramics with metal, soldering connection most study is most widely used.And it was connected in conventional brazing
Problem of both being primarily present in journey, is on the one hand that conventional brazing operations need to carry out under vacuum, and take compared with
Length, complex process, production cost are higher；On the other hand it is the weld metal zone brittle intermetallic thing generated in conventional brazing connector to make to connect
Residual stress in head increases, and joint performance reduces.
Invention content
It is a kind of simple for process, reasonable the technical problem to be solved by the present invention is to for overcome the deficiencies in the prior art, provide,
The compound generated in connector can be effectively refined, the kovar alloy and ceramic material ultrasound pricker of the residual stress in structure are reduced
Soldering method.
The present invention solve the above problems the technical solution adopted is that：A kind of kovar alloy and ceramic material ultrasonic brazing side
Method, it is characterised in that：It includes following steps：
（One）Material clean：Kovar alloy to be welded and ceramic material are put into 5 ~ 10min of ultrasonic cleaning in acetone；
（Two）Assembling：Kovar alloy, ceramic material and solder are assembled into ceramics/solder/kovar alloy three-decker；
（Three）Ultrasonic brazing：Ceramics/solder/kovar alloy three-decker in step 2 is placed on warm table, into
Row heating pressurization, wherein heating temperature are 830 ~ 980 DEG C, and pressure is 0.2 ~ 1MPa, starts ultrasonic vibration after brazing filler metal melts,
Middle vibration frequency is 10 ~ 110kHz, and amplitude is 1 ~ 10 μm；Heating time stops heating after continuing 20 ~ 90s, waits for connector brazed seam layer
Stop pressurization and ultrasonic vibration after solidification completely, obtain cutting down alloy/ceramic soldered joint, realizes kovar alloy and ceramic material
Ultrasonic brazing.
The ultrasonic vibration is continued for carrying out during entire ultrasonic brazing, has effectively refined in soldered fitting
The compound of generation reduces connector residual stress.
The present invention obtains heterogeneous microstructure and all good kovar alloy/ceramic joining of mechanical property under atmospheric environment
Connector.
Ultrasonic brazing of the present invention, in brazing process, ultrasound can generate cavitation when being propagated in liquid solder
Effect and acoustic streaming effect, this will instantaneously generate localized hyperthermia, high pressure inside liquid solder, and generate shock wave, and then destroy
The oxidation film on base material surface promotes atoms permeating, so as to improve the wetability of base material and solder, and accelerates solder and base material
Between metallurgical reaction, the final connection for realizing kovar alloy and ceramic material.Against existing technologies, beneficial effects of the present invention
It is：On the one hand ultrasonic brazing of the present invention overcomes conventional brazing and needs to connect the harsh conditions of two kinds of base materials under vacuum.
Ultrasonic brazing process time is short, can be carried out in atmospheric environment, simple process, and production cost is low.On the other hand entire ultrasound
It is continuously added into ultrasonication in brazing process, can effectively refine the compound generated in connector, solves conventional brazing mistake
Residual stress is affected to kovar alloy and ceramic structure in journey, or even cannot achieve the problem of structure is effectively tightly connected.
There is great application prospect in kovar alloy and ceramic material sealed welding field.
Specific implementation mode
Technical solution of the present invention is not limited to the specific implementation mode of act set forth below, further include each specific implementation mode it
Between arbitrary combination.
Embodiment 1：
A kind of kovar alloy and ceramic material ultrasonic brazing method comprising following steps：
（One）Material clean：By kovar alloy and Al to be welded2O3Ceramics, which are put into acetone, is cleaned by ultrasonic 5min；
（Two）Assembling：Kovar alloy, ceramics and Cu-Sn-Ti-Ni solders are assembled into Al2O3Ceramics/Cu-Sn-Ti-Ni/
" " sandwich " " three-decker of kovar alloy；
（Three）Ultrasonic brazing：Ceramics/solder/kovar alloy three-decker in step 2 is placed on warm table, into
Row heating pressurization makes brazing filler metal melts, and wherein heating temperature is 830 DEG C, and pressure 1MPa starts ultrasonic vibration after brazing filler metal melts,
Wherein vibration frequency is 30kHz, and amplitude is 6 μm；Heating time stops heating after continuing 30s, waits for that connector brazed seam layer solidifies completely
Stop pressurization and ultrasonic vibration afterwards, obtains cutting down alloy/ceramic soldered joint, realize the ultrasonic pricker of kovar alloy and ceramic material
Weldering.
The defects of connector obtained using the present embodiment mode is completely fine and close, flawless, realizes kovar alloy and Al2O3
The reliable sealing-in of ceramics.After tested, kovar alloy and Al2O3The ultrasonic brazing sealing-in connector of ceramics has reached application requirement.
Embodiment 2：
A kind of kovar alloy and ceramic material ultrasonic brazing method comprising following steps：
（One）Material clean：By kovar alloy and ZrO to be welded2Ceramics, which are put into acetone, is cleaned by ultrasonic 8min；
（Two）Assembling：Kovar alloy, ceramics and AgCuTi solders are assembled into ZrO2Ceramics/AgCuTi/ kovar alloys
" sandwich " structure, and be placed on warm table；
（Three）Ultrasonic brazing：Ceramics/solder/kovar alloy three-decker in step 2 is placed on warm table, into
Row heating pressurization makes brazing filler metal melts, and wherein heating temperature is 980 DEG C, pressure 0.2MPa, pressurizes and is continued in ultrasonic brazing
Terminate to soldering；Start ultrasonic vibration after brazing filler metal melts, wherein vibration frequency is 20kHz, and amplitude is 10 μm；Ultrasonic vibration one
Directly continue to solidify completely to solder.Heating time stops heating after continuing 90s, stops pressurization after connector brazed seam layer completely solidification
With ultrasonic vibration, obtains cutting down alloy/ceramic soldered joint, realize the ultrasonic brazing of kovar alloy and ceramic material.
The defects of connector obtained using the present embodiment mode is completely fine and close, flawless, realizes kovar alloy and ZrO2
The reliable sealing-in of ceramics.After tested, kovar alloy and ZrO2The ultrasonic brazing sealing-in connector of ceramics has reached application requirement.
Embodiment 3：
A kind of kovar alloy and ceramic material ultrasonic brazing method comprising following steps：
（One）Material clean：Kovar alloy to be welded and AlN ceramic are put into acetone and are cleaned by ultrasonic 10min；
（Two）Assembling：Kovar alloy, AlN ceramic and Ag-Ti solders are assembled into " the three of ceramics/Ag-Ti/ kovar alloys
Mingzhi " structure, and be placed on warm table；
（Three）Ultrasonic brazing：Ceramics/solder/kovar alloy three-decker in step 2 is placed on warm table, into
Row heating pressurization makes brazing filler metal melts, and wherein heating temperature is 940 DEG C, pressure 0.8MPa, starts ultrasound after brazing filler metal melts and shakes
Dynamic, wherein vibration frequency is 50kHz, and amplitude is 1 μm；Heating time stops heating after continuing 60s, waits for that connector brazed seam layer is completely solidifying
Stop pressurization and ultrasonic vibration after Gu, obtains cutting down alloy/ceramic soldered joint, realize the ultrasonic pricker of kovar alloy and ceramic material
Weldering.
The defects of connector obtained using the present embodiment mode is completely fine and close, flawless realizes kovar alloy and makes pottery with AlN
The reliable sealing-in of porcelain.After tested, kovar alloy and the ultrasonic brazing sealing-in connector of AlN ceramic have reached application requirement.
Claims (2)
1. a kind of kovar alloy and ceramic material ultrasonic brazing method, it is characterised in that：It includes following steps：
（One）Material clean：Kovar alloy to be welded and ceramic material are put into 5 ~ 10min of ultrasonic cleaning in acetone；
（Two）Assembling：Kovar alloy, ceramic material and solder are assembled into ceramics/solder/kovar alloy three-decker；
（Three）Ultrasonic brazing：Ceramics/solder/kovar alloy three-decker in step 2 is placed on warm table, is added
Heat pressurization, wherein heating temperature are 830 ~ 980 DEG C, and pressure is 0.2 ~ 1MPa, starts ultrasonic vibration after brazing filler metal melts, wherein shaking
Dynamic frequency is 10 ~ 110kHz, and amplitude is 1 ~ 10 μm；Heating time stops heating after continuing 20 ~ 90s, waits for that connector brazed seam layer is complete
Stop pressurization and ultrasonic vibration after solidification, obtains cutting down alloy/ceramic soldered joint, realize the ultrasound of kovar alloy and ceramic material
Soldering.
2. kovar alloy according to claim 1 and ceramic material ultrasonic brazing method, it is characterised in that：The step
（Three）Heating temperature is 980 DEG C in middle ultrasonic brazing, and application pressure is 0.2MPa, pressurizes and is continued for soldering in ultrasonic brazing
Terminate；Heating time continues 90s, starts ultrasonic vibration after brazing filler metal melts, and wherein vibration frequency is 20kHz, and amplitude is 10 μm,
Ultrasonic vibration is continued for solidifying completely to solder.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610393351.2A CN105921839B (en) | 2016-06-06 | 2016-06-06 | A kind of kovar alloy and ceramic material ultrasonic brazing method |
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| CN201610393351.2A CN105921839B (en) | 2016-06-06 | 2016-06-06 | A kind of kovar alloy and ceramic material ultrasonic brazing method |
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| CN105921839A CN105921839A (en) | 2016-09-07 |
| CN105921839B true CN105921839B (en) | 2018-08-14 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106563861A (en) * | 2016-10-19 | 2017-04-19 | 哈尔滨工业大学（威海） | Ultrasonic soldering method for fast forming ceramic-metal interconnection |
| CN109759662B (en) * | 2019-01-16 | 2020-07-07 | 哈尔滨工业大学 | Ultrasonic-assisted porous ceramic brazing method |
| CN111151836B (en) * | 2020-01-13 | 2021-12-24 | 中国船舶重工集团公司第七二五研究所 | Connection method and application of high-temperature superconducting tape |
| CN112059470A (en) * | 2020-09-08 | 2020-12-11 | 中物院成都科学技术发展中心 | Active brazing filler metal for brazing titanate microwave dielectric ceramic and metal and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5758816A (en) * | 1996-08-19 | 1998-06-02 | Honeywell Inc. | Method for attaching small components to each other |
| JP2006191124A (en) * | 2006-01-24 | 2006-07-20 | Sumitomo Electric Ind Ltd | Holder for treated object, treatment apparatus and ceramic susceptor for semiconductor manufacturing apparatus |
| CN102513636B (en) * | 2011-12-23 | 2013-07-31 | 哈尔滨工业大学 | Brazing method capable of reducing residual stress on ceramic and metal joints |
| CN102658411B (en) * | 2012-05-24 | 2013-12-25 | 哈尔滨工业大学 | Ultrasonic brazing method for high-volume-fraction silicon carbide particle enhanced aluminum-base composite and low-expansion alloy |
| CN105522244B (en) * | 2015-12-29 | 2018-01-30 | 哈尔滨工业大学 | A kind of low temperature glass method for welding of ultrasonic assistant |
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