CN105917253B - 用于形成抗反射结构的叠层转印膜 - Google Patents

用于形成抗反射结构的叠层转印膜 Download PDF

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Publication number
CN105917253B
CN105917253B CN201580004713.8A CN201580004713A CN105917253B CN 105917253 B CN105917253 B CN 105917253B CN 201580004713 A CN201580004713 A CN 201580004713A CN 105917253 B CN105917253 B CN 105917253B
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layer
template
thermally stable
antireflective
features
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Chinese (zh)
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CN105917253A (zh
Inventor
迈克尔·本顿·弗里
贾斯廷·P·迈尔
奥勒斯特尔·小本森
特里·O·科利尔
米奇斯瓦夫·H·马祖雷克
埃文·L·施瓦茨
马丁·B·沃尔克
摩西·M·大卫
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • B32B37/025—Transfer laminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • B32B2037/243—Coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2551/00—Optical elements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Laminated Bodies (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
CN201580004713.8A 2014-01-20 2015-01-09 用于形成抗反射结构的叠层转印膜 Active CN105917253B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/159,253 2014-01-20
US14/159,253 US20150202834A1 (en) 2014-01-20 2014-01-20 Lamination transfer films for forming antireflective structures
PCT/US2015/010730 WO2015122975A2 (en) 2014-01-20 2015-01-09 Lamination transfer films for forming antireflective structures

Publications (2)

Publication Number Publication Date
CN105917253A CN105917253A (zh) 2016-08-31
CN105917253B true CN105917253B (zh) 2018-01-16

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Country Status (6)

Country Link
US (3) US20150202834A1 (enExample)
EP (1) EP3097441B1 (enExample)
JP (1) JP2017508640A (enExample)
KR (1) KR102352466B1 (enExample)
CN (1) CN105917253B (enExample)
WO (1) WO2015122975A2 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9708713B2 (en) * 2013-05-24 2017-07-18 Applied Materials, Inc. Aerosol deposition coating for semiconductor chamber components
EP3096945B1 (en) * 2014-01-20 2019-08-14 3M Innovative Properties Company Lamination transfer films for forming reentrant structures
JP2017508641A (ja) 2014-01-22 2017-03-30 スリーエム イノベイティブ プロパティズ カンパニー グレイジング用微小光学体
TW201539736A (zh) 2014-03-19 2015-10-16 3M Innovative Properties Co 用於藉白光成色之 oled 裝置的奈米結構
KR102279239B1 (ko) * 2014-07-25 2021-07-19 삼성전자주식회사 임프린트 공정을 이용한 역상 패턴 전사방법
US9472788B2 (en) 2014-08-27 2016-10-18 3M Innovative Properties Company Thermally-assisted self-assembly method of nanoparticles and nanowires within engineered periodic structures
EP3209841B1 (en) 2014-10-20 2021-04-07 3M Innovative Properties Company Insulated glazing units and microoptical layer comprising microstructured diffuser and methods
US10106643B2 (en) 2015-03-31 2018-10-23 3M Innovative Properties Company Dual-cure nanostructure transfer film
US10518512B2 (en) 2015-03-31 2019-12-31 3M Innovative Properties Company Method of forming dual-cure nanostructure transfer film
US9844906B2 (en) * 2015-12-10 2017-12-19 S.D. Warren Company Release webs and textured products
US10756306B2 (en) 2016-10-28 2020-08-25 3M Innovative Properties Company Nanostructured article
CN113089323B (zh) 2017-02-14 2024-03-22 耐克创新有限合伙公司 防味组合物、具有防味特性的结构、及其制备方法
US11609359B2 (en) 2017-09-29 2023-03-21 Nike, Inc. Structurally-colored articles and methods for making and using structurally-colored articles
EP3732733A1 (en) * 2017-12-29 2020-11-04 3M Innovative Properties Company Anti-reflective surface structures
US12038592B2 (en) * 2018-01-05 2024-07-16 3M Innovative Properties Company Stray light absorbing film
CN108710164B (zh) * 2018-05-25 2019-08-13 中国科学院上海光学精密机械研究所 红外宽带减反射微结构及其制备方法
US12429763B2 (en) * 2019-06-03 2025-09-30 Rutgers, The State University Of New Jersey Sacrificial nanotransfer lithography for the metalization of plastics
CN110194436A (zh) * 2019-06-12 2019-09-03 中国工程物理研究院激光聚变研究中心 一种在有机材料表面制备抗反射微纳结构的方法
CN114008493A (zh) 2019-06-26 2022-02-01 耐克创新有限合伙公司 结构着色的物品以及用于制造和使用结构着色的物品的方法
EP3963376A1 (en) 2019-07-26 2022-03-09 Nike Innovate C.V. Structurally-colored articles and methods for making and using structurally-colored articles
WO2021080913A1 (en) 2019-10-21 2021-04-29 Nike, Inc. Structurally-colored articles
WO2021152479A1 (en) * 2020-01-29 2021-08-05 3M Innovative Properties Company Nanostructured article
WO2021236657A1 (en) * 2020-05-18 2021-11-25 Sds Nano, Inc. High precision nanoscale thin film fabrication processes
WO2021243217A1 (en) 2020-05-29 2021-12-02 Nike, Inc. Structurally-colored articles and methods for making and using structurally-colored articles
WO2022019264A1 (ja) * 2020-07-22 2022-01-27 キヤノン株式会社 吸光遮熱膜、吸光遮熱部材、および物品、並びにそれらの製造方法
US11889894B2 (en) 2020-08-07 2024-02-06 Nike, Inc. Footwear article having concealing layer
US11129444B1 (en) 2020-08-07 2021-09-28 Nike, Inc. Footwear article having repurposed material with concealing layer
US11241062B1 (en) 2020-08-07 2022-02-08 Nike, Inc. Footwear article having repurposed material with structural-color concealing layer
WO2022130255A1 (en) * 2020-12-18 2022-06-23 3M Innovative Properties Company Structured film and method of using same to form a pattern on a substrate
WO2025238460A1 (en) * 2024-05-15 2025-11-20 Solventum Intellectual Properties Company Patterned article and method of manufacturing thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6521324B1 (en) * 1999-11-30 2003-02-18 3M Innovative Properties Company Thermal transfer of microstructured layers

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT610737A (enExample) 1955-11-18 1900-01-01
CA1254238A (en) 1985-04-30 1989-05-16 Alvin P. Gerk Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products
US5039561A (en) 1986-08-25 1991-08-13 Minnesota Mining And Manufacturing Company Method for preparing an article having surface layer of uniformly oriented, crystalline, organic microstructures
US5234740A (en) 1991-08-28 1993-08-10 Minnesota Mining And Manufacturing Company Slip control sheeting and articles covered with same
JP3444053B2 (ja) 1995-10-13 2003-09-08 ソニー株式会社 薄膜半導体装置
US6329058B1 (en) 1998-07-30 2001-12-11 3M Innovative Properties Company Nanosize metal oxide particles for producing transparent metal oxide colloids and ceramers
US6376590B2 (en) 1999-10-28 2002-04-23 3M Innovative Properties Company Zirconia sol, process of making and composite material
US6858253B2 (en) 2001-05-31 2005-02-22 3M Innovative Properties Company Method of making dimensionally stable composite article
US6849558B2 (en) 2002-05-22 2005-02-01 The Board Of Trustees Of The Leland Stanford Junior University Replication and transfer of microstructures and nanostructures
US20050126766A1 (en) * 2003-09-16 2005-06-16 Koila,Inc. Nanostructure augmentation of surfaces for enhanced thermal transfer with improved contact
US7419912B2 (en) * 2004-04-01 2008-09-02 Cree, Inc. Laser patterning of light emitting devices
US7241437B2 (en) 2004-12-30 2007-07-10 3M Innovative Properties Company Zirconia particles
DE102005017170B4 (de) 2005-04-13 2010-07-01 Ovd Kinegram Ag Transferfolie, Verfahren zu deren Herstellung sowie Mehrschichtkörper und dessen Verwendung
US20060270806A1 (en) 2005-05-26 2006-11-30 Hale Wesley R Miscible high Tg polyester/polymer blend compositions and films formed therefrom
AU2006282042B2 (en) 2005-06-17 2011-12-22 The University Of North Carolina At Chapel Hill Nanoparticle fabrication methods, systems, and materials
US7569254B2 (en) 2005-08-22 2009-08-04 Eastman Kodak Company Nanocomposite materials comprising high loadings of filler materials and an in-situ method of making such materials
US20070116934A1 (en) * 2005-11-22 2007-05-24 Miller Scott M Antireflective surfaces, methods of manufacture thereof and articles comprising the same
JP5041732B2 (ja) * 2006-05-16 2012-10-03 アルプス電気株式会社 発光体及びその製造方法
US7604916B2 (en) 2006-11-06 2009-10-20 3M Innovative Properties Company Donor films with pattern-directing layers
US20080233404A1 (en) 2007-03-22 2008-09-25 3M Innovative Properties Company Microreplication tools and patterns using laser induced thermal embossing
US20090015142A1 (en) 2007-07-13 2009-01-15 3M Innovative Properties Company Light extraction film for organic light emitting diode display devices
KR101531053B1 (ko) * 2007-08-10 2015-06-25 한국전자통신연구원 다중 안테나 선택 기법을 이용한 적응 변조 장치 및 방법
EP2197645B1 (en) 2007-09-06 2014-10-22 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
US8236668B2 (en) 2007-10-10 2012-08-07 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
US20090263668A1 (en) 2008-04-21 2009-10-22 3M Innovative Properties Company Durable coating of an oligomer and methods of applying
TWI365812B (en) * 2008-10-23 2012-06-11 Compal Electronics Inc Transfer film, method of manufacturing the same, transfer method and object surface structure
US8222352B2 (en) * 2008-12-24 2012-07-17 Nitto Denko Corporation Silicone resin composition
KR101615787B1 (ko) 2008-12-30 2016-04-26 쓰리엠 이노베이티브 프로퍼티즈 컴파니 나노구조화 표면의 제조 방법
EP2379443B1 (en) * 2008-12-30 2018-07-11 3M Innovative Properties Company Nanostructured articles and methods of making nanostructured articles
SG172204A1 (en) * 2008-12-30 2011-07-28 3M Innovative Properties Co Antireflective articles and methods of making the same
US8933526B2 (en) * 2009-07-15 2015-01-13 First Solar, Inc. Nanostructured functional coatings and devices
US8499810B2 (en) 2009-08-27 2013-08-06 Transfer Devices Inc. Molecular transfer lithography apparatus and method for transferring patterned materials to a substrate
JP5573069B2 (ja) * 2009-09-25 2014-08-20 大日本印刷株式会社 保護層転写シート
WO2011088161A1 (en) * 2010-01-13 2011-07-21 3M Innovative Properties Company Optical films with microstructured low refractive index nanovoided layers and methods therefor
EP2542616A1 (en) 2010-03-03 2013-01-09 3M Innovative Properties Company Composite multilayered structure with nanostructured surface
JP2011221470A (ja) * 2010-04-14 2011-11-04 Sony Corp 光学素子、およびその製造方法、表示装置、ならびに太陽電池
EP2566681B1 (en) 2010-05-03 2018-09-26 3M Innovative Properties Company Method of making a nanostructure
WO2011155582A1 (ja) 2010-06-11 2011-12-15 株式会社日立ハイテクノロジーズ 微細構造転写用スタンパ及び微細構造転写装置
KR101140051B1 (ko) * 2010-07-01 2012-05-02 에스케이하이닉스 주식회사 반도체 소자 및 그 형성 방법
US8469551B2 (en) 2010-10-20 2013-06-25 3M Innovative Properties Company Light extraction films for increasing pixelated OLED output with reduced blur
KR101846605B1 (ko) 2011-03-14 2018-05-18 쓰리엠 이노베이티브 프로퍼티즈 캄파니 다층 나노구조화된 물품
JP6110319B2 (ja) 2011-03-14 2017-04-05 スリーエム イノベイティブ プロパティズ カンパニー ナノ構造化物品
KR101918335B1 (ko) 2011-08-17 2018-11-13 쓰리엠 이노베이티브 프로퍼티즈 캄파니 나노구조화된 물품 및 이의 제조 방법
CN104335078B (zh) 2012-03-26 2017-08-08 3M创新有限公司 纳米结构化材料及其制造方法
KR20140147857A (ko) * 2012-03-26 2014-12-30 쓰리엠 이노베이티브 프로퍼티즈 캄파니 물품 및 그의 제조 방법
WO2013171284A1 (en) * 2012-05-15 2013-11-21 Danmarks Tekniske Universitet Nanostructured antireflection layer, and application of same to leds
EP2862707A4 (en) * 2012-06-13 2015-07-15 Asahi Kasei E Materials Corp FUNCTION TRANSMISSION OBJECT, METHOD FOR TRANSFERRING FUNCTIONAL LAYERS, PACKAGE AND FUNCTIONAL TRANSMISSION
US9780335B2 (en) 2012-07-20 2017-10-03 3M Innovative Properties Company Structured lamination transfer films and methods
US20140175707A1 (en) 2012-12-21 2014-06-26 3M Innovative Properties Company Methods of using nanostructured transfer tape and articles made therefrom
US9711744B2 (en) 2012-12-21 2017-07-18 3M Innovative Properties Company Patterned structured transfer tape
US20140242343A1 (en) 2013-02-27 2014-08-28 3M Innovative Properties Company Lamination transfer films for forming embedded nanostructures
EP3096945B1 (en) 2014-01-20 2019-08-14 3M Innovative Properties Company Lamination transfer films for forming reentrant structures
US9472788B2 (en) * 2014-08-27 2016-10-18 3M Innovative Properties Company Thermally-assisted self-assembly method of nanoparticles and nanowires within engineered periodic structures

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6521324B1 (en) * 1999-11-30 2003-02-18 3M Innovative Properties Company Thermal transfer of microstructured layers

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