CN105874096B - Evaporation source transfer unit, evaporation coating device and evaporation coating method - Google Patents
Evaporation source transfer unit, evaporation coating device and evaporation coating method Download PDFInfo
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- CN105874096B CN105874096B CN201380081651.1A CN201380081651A CN105874096B CN 105874096 B CN105874096 B CN 105874096B CN 201380081651 A CN201380081651 A CN 201380081651A CN 105874096 B CN105874096 B CN 105874096B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The present invention discloses evaporation source transfer unit, evaporation coating device and evaporation coating method.The evaporation source transfer unit of the present invention includes：Lower side rail, include the 3rd track of the first linear track, the second linear track and curve, the first linear track is perpendicular to the first virtual radiation direction that evaporation chamber is crossed from a central point, the second linear track is perpendicular perpendicular to the second virtual radiation direction that evaporation chamber is crossed from central point, and the 3rd track of curve connects the first track and the second track；Upper siding track, include the 6th track of the 4th linear track, the 5th linear track and curve, the 4th linear track is spaced the 5th parallel to be formed, linear track with the first track and, sixth track connection fourth track of curve and fiveth track parallel to be formed is spaced with the second track；Transferred unit, linear evaporation source by formed relative to lower side rail and upper siding track it is vertical in a manner of combine, transferred unit is moved back and forth along lower side rail and upper siding track.
Description
Technical field
The present invention relates to a kind of evaporation source transfer unit, evaporation coating device and evaporation coating method.In more detail, it is related to a kind of organic
Thing evaporation coating device and utilize its evaporation coating method, above-mentioned organic matter vaporization plating device can in a chamber to multiple substrates carry out
Process is deposited, and in the evaporation process of a substrate, other substrates are carried out to transfer process or alignment process, so as to
Pitch time (tact time) is enough reduced, and can reduce and be sent out during carrying out transferring process or alignment process to substrate
The loss of raw organic material.
Background technology
Organic luminescent device (Organic Luminescence Emitting Device：OLED) utilized as long as being used as
Self the luminous selfluminous element being powered in fluorescence organic compound with regard to irradiative electro optical phenomenon, due to not needing
For to the backlight of non-luminescent device irradiation light, it is thus possible to make light weight and slim panel display apparatus.
This panel display apparatus using organic luminescent device is just turning into new one because reaction speed is fast, viewing angle is wide
For display device.
Especially, because production process is simple and the excellent of production cost can more be saved than conventional liquid crystal display device by having
Point.
In organic electroluminescence device, as remaining hole injection layer, the sky for forming layer except positive electrode and negative electrode
Cave transfer layer, luminescent layer, electron supplying layer and electron injecting layer etc. are formed by organic film, and this organic film passes through Vacuum Heat
Evaporation coating method is deposited on substrate.
Vacuum thermal evaporation method is realized in the following way：Substrate is transferred into the chamber of vacuum, and in the base transferred
After plate arrangement form has the shadow mask (shadow mask) of predetermined pattern, apply heat to the crucible equipped with organic matter, and in substrate
On be vaporized on the organic matter being elevated in crucible.
There are the following problems for the vacuum thermal evaporation method of prior art：Due to implementing to steam to a substrate in a chamber
Process is plated, therefore, in the transfer process of substrate and the alignment process of shadow mask, is increased because interrupting the evaporation process for substrate
Pitch time (tack time).
Also, in the transfer process of substrate and the alignment process of shadow mask, also because organic matter persistently distils in crucible
And the problem of organic matter damage of material be present.
The content of the invention
The technical problem to be solved in the present invention
The present invention, which provides, to carry out evaporation process to multiple substrates in a chamber, and in the evaporation work of a substrate
In program process, other substrates are carried out to transfer process or alignment process, so as to reduce pitch time (tact time), and
The evaporation source of the loss of the organic material occurred during carrying out transferring process or alignment process to substrate can be reduced
Transfer unit, evaporation coating device and utilize its evaporation coating method.
Technical scheme
According to an embodiment of the present invention, the present invention provides following evaporation source transfer unit：Above-mentioned evaporation source transfer
Unit is configured at the inside of evaporation chamber, and for transferring linear evaporation source, above-mentioned evaporation source transfer unit includes：Lower siding track
Road, include the 3rd track of the first linear track, the second linear track and curve, above-mentioned first track is perpendicular to from one
Central point crosses the first virtual radiation direction of above-mentioned evaporation chamber, and above-mentioned second track crosses perpendicular to from above-mentioned central point
The second virtual radiation direction of above-mentioned evaporation chamber, above-mentioned 3rd track are used to connect above-mentioned first track and above-mentioned second rail
Road；Upper siding track, includes the 6th track of the 4th linear track, the 5th linear track and curve, above-mentioned 4th track with
Above-mentioned first track be spaced it is parallel to be formed, above-mentioned 5th track be spaced with above-mentioned second track it is parallel to be formed, it is above-mentioned
6th track is used to connect above-mentioned 4th track and above-mentioned 5th track；And transferred unit, above-mentioned linear evaporation source is with relative
In above-mentioned lower side rail and above-mentioned upper siding track vertical mode is formed to be combined, above-mentioned transferred unit along above-mentioned lower side rail and
Above-mentioned upper siding track is moved back and forth.
Above-mentioned transferred unit can include：A pair of first sliding parts, respectively with along above-mentioned lower side rail and above-mentioned upper siding track
The mode of road movement is opposite with above-mentioned lower side rail and above-mentioned upper siding track and is combined；And a pair of second sliding parts, respectively
Be spaced with above-mentioned a pair of first sliding parts, and in a manner of being moved along above-mentioned lower side rail and above-mentioned upper siding track with it is above-mentioned
Lower side rail and above-mentioned upper siding track are opposite and are combined, and above-mentioned first sliding part can include：Movable block, along above-mentioned downside
Track or above-mentioned upper siding track movement；And spill spin block, in a manner of it can be rotated to horizontal direction with above-mentioned movable block
Upside be combined, above-mentioned second sliding part can include：Movable block, moved along above-mentioned lower side rail or above-mentioned upper siding track
It is dynamic；Spill spin block, it is combined in a manner of it can be rotated to horizontal direction on the upside of above-mentioned movable block；And sliding bar,
It is combined in a manner of entering line slip relative to above-mentioned spill spin block with above-mentioned spill spin block.
The present invention can also include source support, and above-mentioned source support is by above-mentioned first sliding part and above-mentioned second sliding part branch
Support, above-mentioned evaporation source can be combined with above-mentioned source support.
The present invention can also include：Rack rails, respectively to separating predetermined distance on the outside of above-mentioned lower side rail and upper siding track,
And configured along above-mentioned upper siding track and above-mentioned lower side rail；Little gear, it is meshed with above-mentioned rack rails；And motor part, it is and upper
The source support of stating is combined, for providing revolving force to above-mentioned little gear.
According to a further embodiment of the present invention, there is provided evaporation coating device, above-mentioned evaporation coating device include：Chamber is deposited, is drawn
It is divided into the first evaporation region and the second evaporation region, first substrate is in a central point along the first radiation direction above-mentioned first
Evaporation region carries out extraction introducing, and second substrate enters in above-mentioned central point along the second radiation direction in the above-mentioned second evaporation region
Row, which is drawn, to be introduced；First substrate loading part, loaded to above-mentioned first radiation direction and place above-mentioned first substrate；Second substrate fills
Load portion, loaded to above-mentioned second radiation direction and place above-mentioned second substrate；Evaporation source, with above-mentioned first substrate or above-mentioned second
Substrate is opposite, and sprays evaporated material；And evaporation source transfer unit, for transferring above-mentioned evaporation source, above-mentioned evaporation source transfer
Unit includes：Lower side rail, includes the 3rd track of the first linear track, the second linear track and curve, and above-mentioned first
Track formed with above-mentioned first radiation direction it is vertical, above-mentioned second track formed with above-mentioned second radiation direction it is vertical, above-mentioned
Three tracks are used to connect above-mentioned first track and above-mentioned second track；Upper siding track, including the 4th linear track, linear
6th track of five tracks and curve, above-mentioned 4th track are spaced, above-mentioned fiveth rail parallel to be formed with above-mentioned first track
Road be spaced with above-mentioned second track it is parallel to be formed, above-mentioned 6th track be used for connect above-mentioned 4th track and above-mentioned 5th rail
Road；And transferred unit, above-mentioned linear evaporation source relative to above-mentioned lower side rail and above-mentioned upper siding track to form vertical side
Formula is combined, and above-mentioned transferred unit is moved back and forth along above-mentioned lower side rail and above-mentioned upper siding track.
Above-mentioned transferred unit can include：A pair of first sliding parts, respectively with along above-mentioned lower side rail and above-mentioned upper siding track
The mode of road movement is opposite with above-mentioned lower side rail and above-mentioned upper siding track and is combined；And a pair of second sliding parts, respectively
Be spaced with above-mentioned a pair of first sliding parts, and in a manner of being moved along above-mentioned lower side rail and above-mentioned upper siding track with it is above-mentioned
Lower side rail and above-mentioned upper siding track are opposite and are combined, and above-mentioned first sliding part can include：Movable block, along above-mentioned downside
Track or above-mentioned upper siding track movement；And spill spin block, in a manner of it can be rotated to horizontal direction with above-mentioned movable block
Upside be combined, above-mentioned second sliding part can include：Movable block, moved along above-mentioned lower side rail or above-mentioned upper siding track
It is dynamic；Spill spin block, it is combined in a manner of it can be rotated to horizontal direction on the upside of above-mentioned movable block；And sliding bar,
It is combined in a manner of being slided relative to above-mentioned first radiation direction to vertical direction with above-mentioned spill spin block.
Above-mentioned evaporation coating device can also include source support, and above-mentioned source support is slided by above-mentioned first sliding part and above-mentioned second
Portion is supported, and above-mentioned evaporation source can be combined with above-mentioned source support.
Above-mentioned evaporation coating device can also include：Rack rails, respectively to separating predetermined distance, and edge on the outside of above-mentioned upside track
Above-mentioned upside track configurations；Little gear, it is meshed with above-mentioned rack rails；And motor part, it is combined, is used for above-mentioned source support
Revolving force is provided to above-mentioned little gear.
According to another embodiment of the present invention, there is provided following evaporation coating method：As using above-mentioned evaporation coating device come pair
The method that evaporated material is deposited, above-mentioned evaporation coating method include：To above-mentioned first evaporation region above-mentioned upper siding track and on
The step of stating the end transfer above-mentioned transferred unit of lower side rail；To the above-mentioned first substrate of above-mentioned first radiation direction loading, and
Above-mentioned first substrate loading part places the step of above-mentioned first substrate；Make above-mentioned transferred unit along above-mentioned first track and above-mentioned
Three tracks move, and above-mentioned first substrate be deposited above-mentioned evaporated material the step of；With evaporation grain is deposited in above-mentioned first substrate
The step of son together loads above-mentioned second substrate to above-mentioned second radiation direction, and above-mentioned in the placement of above-mentioned second substrate loading part
The step of second substrate；And make above-mentioned threeth track and above-mentioned fiveth track of the above-mentioned transferred unit by curve, and along upper
State the second track and above-mentioned 4th track movement, and above-mentioned second substrate be deposited evaporation particle the step of.
The present invention can also include after the step of evaporated material is deposited in above-mentioned first substrate：From above-mentioned evaporation chamber
The above-mentioned first substrate for having completed evaporation is drawn, and new first substrate is loaded to above-mentioned first radiation direction, above-mentioned first
Substrate loading part places the step of new first substrate.
Beneficial effect
According to an embodiment of the invention, evaporation process can be carried out to multiple substrates in a chamber, and in a base
In the evaporation process of plate, other substrates are carried out to transfer process or alignment process, so as to reduce pitch time (tact
Time), and can reduce substrate is carried out transfer process or process of aliging during the loss of organic material that occurs.
Brief description of the drawings
Fig. 1 is the transverse sectional view of the structure of the evaporation coating device for illustrating one embodiment of the invention.
Fig. 2 is the longitudinal sectional view of the structure of the evaporation coating device for illustrating one embodiment of the invention.
Fig. 3 is the top view for the evaporation source transfer unit for schematically illustrating one embodiment of the invention.
Fig. 4 is the figure being amplified to Fig. 2 part A.
Fig. 5 is the side view for the evaporation source transfer unit for schematically illustrating one embodiment of the invention.
Fig. 6 to Fig. 8 is the figure of the course of work of the evaporation source transfer unit for illustrating one embodiment of the invention.
Embodiment
The present invention can implement a variety of conversion, and can have various embodiments, illustrate specific embodiment in the accompanying drawings,
And it is described in detail in the detailed description.But this is not used to limit the invention to specific embodiment, but
It should be read to include the thought of the present invention and all converter technique schemes that technical scope is included, equivalent technical solutions be to replacing
Generation technique scheme.During the present invention will be described, judge can need not to the illustrating for known technology of correlation
In the case that idea of the invention is obscured in strategic point, the detailed description to this is omitted.
Hereinafter, the embodiment of the evaporation source transfer unit to the present invention and evaporation coating device is described in detail referring to the drawings,
During being described with reference to the accompanying drawings.Identical reference is assigned to identical or corresponding structural element, and is omitted
Repeat specification to this.
Fig. 1 is the transverse sectional view of the structure of the evaporation coating device for illustrating one embodiment of the invention, and Fig. 2 is for illustrating
The longitudinal sectional view of the structure of the evaporation coating device of one embodiment of the invention.Moreover, Fig. 3 is to schematically illustrate one embodiment of the invention
The top view of evaporation source transfer unit.
Show that evaporation source transfer unit 10, evaporation chamber 12, first are deposited region 14, second and be deposited into Fig. 3 in Fig. 1
Region 16, central point 18, the first radiation direction 20, the second radiation direction 22, transfer chamber 24, mechanical arm 26, first substrate load
Portion 28, second substrate loading part 30, first substrate 32, mask 33, second substrate 34, lower side rail 36, upper siding track 38, evaporation
Source 40, the first track 42, the second track 44, the 3rd track 46, the 4th track 48, the 5th track 50, the 6th track 52, transferred unit
54th, the first sliding part 56, the second sliding part 58 and source support 60.
The evaporation coating device of the present embodiment includes：Chamber 12 is deposited, is divided into the first evaporation region 14 and the second evaporation area
Domain 16, in a central point 18, first substrate 32 is drawn along the first radiation direction 20 in the above-mentioned first evaporation region 14
Go out to introduce, in above-mentioned central point 18, second substrate 34 is carried out along the second radiation direction 22 in the above-mentioned second evaporation region 16
Draw and introduce；First substrate loading part 28, loaded to above-mentioned first radiation direction 20 and place above-mentioned first substrate 32；Second base
Plate loading part 30, loaded to above-mentioned second radiation direction 22 and place above-mentioned second substrate 34；Evaporation source 40, with above-mentioned first base
Plate 32 or above-mentioned second substrate 34 are opposite, and spray evaporated material；And evaporation source transfer unit 10, for transferring above-mentioned evaporation
Source 40.Moreover, above-mentioned evaporation source transfer unit 10 includes：Lower side rail 36, including the first linear track 42, linear second
3rd track 46 of track 44 and curve, above-mentioned first track 42 formed with above-mentioned first radiation direction 20 it is vertical, above-mentioned second
Track 44 forms vertical with above-mentioned second radiation direction 22, and above-mentioned 3rd track 46 is used to connect above-mentioned first track 42 and above-mentioned
Second track 44；Upper siding track 38, include the 6th track of the 4th linear track 48, the 5th linear track 50 and curve
52, above-mentioned 4th track 48 is spaced, above-mentioned fiveth track 50 and above-mentioned second rail parallel to be formed with above-mentioned first track 42
Road 44 be spaced it is parallel to be formed, above-mentioned 6th track 52 be used for connect above-mentioned 4th track 48 and above-mentioned 5th track 50；With
And transferred unit 54, above-mentioned linear evaporation source 40 are vertical to be formed relative to above-mentioned lower side rail 36 and above-mentioned upper siding track 38
Mode is combined, and above-mentioned transferred unit 54 is moved back and forth along above-mentioned lower side rail 36 and above-mentioned upper siding track 38.
Evaporation chamber 12 can be divided into the first evaporation region 14 and the second evaporation region 16, and in a central point 18
In, first substrate 32 carries out extraction introducing along the first radiation direction 20 in the first evaporation region 14, in above-mentioned central point 18,
Second substrate 34 carries out extraction introducing along the second radiation direction 22 in the second evaporation region 16.
Place of the chamber 12 as the evaporation for being evaporated material to substrate inside it is deposited, above-mentioned evaporation chamber 12
Inside can maintain vacuum state by vavuum pump.Under atmospheric pressure state, in the case where forming evaporated material, above-mentioned steaming
The inside of plating chamber 12 can also maintain atmospheric pressure state.Evaporation chamber 12 can be divided into multiple evaporation regions, so as to energy
Multiple substrates are deposited enough be deposited at one in chamber 12.Here, evaporated material means to heat to source material
The material of caused vaporous after Shi Fasheng is vaporized or distilled, can include the organic of the vaporous for being heated to obtain to organic matter
Thing.
Evaporation region is meant to perform a substrate evaporation of evaporated material according to the movement of evaporation source 40
Virtual Space, reference picture 1, by the center line represented by Fig. 1 some locking wires, evaporation chamber 12 can be divided into the first steaming
Plate region 14 and second and region 16 is deposited.In the first evaporation region 14, the evaporation of material is evaporated to first substrate 32, and
In the second evaporation region 16 adjacent with the first evaporation region 14, the evaporation of material is evaporated to second substrate 34.
First substrate 32 is in a central point 18 along the first radiation direction 20 in the first evaporation region of evaporation chamber 12
14 are introduced or are drawn, and second substrate 34 is in above-mentioned central point 18 along the second radiation direction 22 the second of evaporation chamber 12
Evaporation region 16 is introduced or drawn.That is, first substrate 32 and second substrate 34 are provided with having relative to evaporation chamber 12
The mode of gradient introduced or drawn.
In cluster-type (cluster type) deposition system, substrate can be by turning with what evaporation chamber 12 was connected
The mechanical arm 26 moved in room 24 in evaporation chamber 12 is introduced or drawn, and in this case, substrate is in mechanical arm
26 pivot carries out extraction introducing along radiation direction in evaporation chamber 12, and therefore, substrate can be relative to evaporation chamber
12 there is defined gradient to carry out extraction introducing.Therefore, first substrate 32 and second substrate 34 by mechanical arm 26 come
In the case where evaporation chamber 12 is introduced or drawn, relative to the pivot for the mechanical arm 26 for forming central point 18, the
One substrate 32 carries out extraction introducing along the first radiation direction 20 in evaporation chamber 12, and second substrate 34 is relative to composition central point
The pivot of 18 mechanical arm 26, enter along the second radiation direction 22 different from the first radiation direction 20 in evaporation chamber 12
Row, which is drawn, to be introduced.Therefore, the first radiation direction 20 and the second radiation direction 22 form predetermined angular centered on central point 18.
Only, it is not limited to which first substrate 32 and second substrate 34 are carried out by mechanical arm 26 in evaporation chamber 12
Draw and introduce, in first substrate 32 and second substrate 34 mutually there is gradient to carry out drawing introducing in chamber 12 is deposited
In the case of, the evaporation coating device of the present embodiment can be applicable.For example, pass through two mechanical arms in first substrate 32 and second substrate 34
26 come in the case where chamber 12 is deposited and carries out extraction introducing, the pivot of mechanical arm 26 does not form above-mentioned central point
18, but the point that the two virtual parallaxs formed by the incline direction of first substrate 32 and second substrate 34 meet is formed
Central point 18.
Loaded respectively in first substrate loading part 28 and second substrate loading part 30 and be placed with first substrate 32 and second
Substrate 34.In the present embodiment, first is attached with respectively in the bottom of first substrate loading part 28 and second substrate loading part 30
Substrate 32 and second substrate 34, to spray evaporated material upwards from evaporation source 40, so as to be evaporated material in substrate
Evaporation.
If loaded respectively in first substrate loading part 28 and second substrate loading part 30 and be placed with first substrate 32 and
Two substrates 34, then in each substrate loading part, can there are mask 33, also, substrate and mask 33 in the surface configuration of substrate
It can be mutually aligned.
Evaporation source transfer unit 10 is combined with linear evaporation source 40, and evaporation source 40 is by evaporation source transfer unit 10
Moved between region 16 is deposited in the first evaporation region 14 and second, and the evaporation of material is evaporated to substrate.
Evaporation source transfer unit 10 includes lower side rail 36 and upper siding track 38, and above-mentioned lower side rail 36 includes：Linear
First track 42, formed with the first radiation direction 20 vertical；The second linear track 44, formed and hung down with the second radiation direction 22
Directly；And the 3rd track 46 of curve, include for connecting the first track 42 and the second track 44, above-mentioned upper siding track 38：Line
4th track 48 of shape, it is spaced with the first track 42 parallel to be formed；The 5th linear track 50, it is separated by with the second track 44
Coming, it is parallel to be formed；And the 6th track 52 of curve, for connecting the 4th track 48 and the 5th track 50.
Lower side rail 36 and upper siding track 38 are spaced from each other predetermined distance, and lower side rail 36 and upper siding track 38 can be stablized
Ground supports linear evaporation source 40.As the glass substrate being deposited realizes maximization, linear evaporation source 40 is also realized greatly
Type, thus, the weight of evaporation source 40 are increased.Therefore, both in order to stably support the evaporation source 40 of change weight, and in order to suitable
Movement freely is guided, lower side rail 36 and upper siding track 38 is turned into a pair.
First track 42 of lower side rail 36 and the 4th track 48 of upper siding track 38 are formed directly in the first evaporation region 14
Line section, the second track 44 of lower side rail 36 and the 5th track 50 of upper siding track 38 form straight line in the second evaporation region 16
Section.The line interval in the first evaporation region 14 is formed vertically relative to the first radiation direction 20, and second is deposited the straight of region 16
Line section is formed vertically relative to the second radiation direction 22.Thus, the line interval in the first evaporation region 14 and the second evaporation area
The line interval distortion in domain 16 is corresponding with the angle that the first radiation direction 20, central point 18, the second radiation direction 22 are formed
Angle.Therefore, it is necessary to curve section for connecting line interval.That is, the first track 42 and the second rail of lower side rail 36
Road 44 is connected with the 3rd track 46 of curve, the 6th rail of the 4th track 48 of upper siding track 38 and the 5th track 50 and curve
Road 52 is connected.Now, due to lower side rail 36 and upper siding track 38 separated by a distance, the 6th track 52 is with more than the 3rd track
46 radius of curvature connects the 4th track 48 and the 5th track 50.
Here, vertical implication is not meant to vertical in geometry or mathematics, but mean to consider that processing misses
Difference transfers the vertical of error.
Transferred unit 54 is moved back and forth along lower side rail 36 and upper siding track 38, linear evaporation source 40 with downside
Track 36 and upper siding track 38 form vertical mode and are combined with transferred unit 54.Therefore, if linear evaporation source 40 with
Line interval forms vertical mode and moved in the state of transferred unit 54 is combined along line interval, then substrate is from unilateral side
Moved to towards opposite another edge direction, and whole substrate is deposited.
Transferred unit 54 moves in the lower side rail 36 in the first evaporation region 14 and the line interval of upper siding track 38, and
Behind the curve section of lower side rail 36 and upper siding track 38, lower side rail 36 and upper siding track in the second evaporation region 16
The line interval in road 38 moves.Also, lower side rail 36 and upper siding track 38 to opposite direction in the second evaporation region 16
Line interval move, and behind the curve section of lower side rail 36 and upper siding track 38, region is deposited first
14 lower side rail 36 and the line interval of upper siding track 38 move.Like this, transferred unit 54 is along the He of lower side rail 36
Back and forth movement is repeated in upper siding track 38.
Hereinafter, each structure of evaporation source transfer unit 10 is examined.
To using evaporation coating device as described above come to substrate be deposited evaporated material process it is as follows：First, to first
The upper siding track 38 in region 14 and the end movement transferred unit 54 of lower side rail 36 is deposited.With transferred unit 54 from first evaporation area
Domain 14 is moved to the second evaporation region 16, forms the evaporation for substrate, therefore, to the upper siding track 38 in the first evaporation region 14
And end (reference picture 3, the right-hand end in the first evaporation region 14) mobile transferred unit 54 of lower side rail 36.
Then, first substrate 32 is loaded to the first radiation direction 20, and is positioned over first substrate loading part 28.In the first base
In the case that plate 32 is positioned over the first substrate loading part 28 of evaporation chamber 12 by mechanical arm 26, first substrate 32 is directed to structure
Pivot into the mechanical arm 26 of central point 18 is positioned over first substrate loading part 28 along the first radiation direction 20.In this step
In rapid, if first substrate 32 is positioned over first substrate loading part 28, in the surface configuration mask 33 of first substrate 32, so that in fact
The alignment of existing first substrate 32 and mask 33., can also be to the first evaporation region 14 in the loading process of first substrate 32
The end movement transferred unit 54 of upper siding track 38 and lower side rail 36.
Then, transferred unit 54 is moved along the first track 42 and the 3rd track 46, steamed so as to be deposited in first substrate 32
Stimulating food matter.With lower side rail of the linear evaporation source 40 for making to be vertically arranged at line interval along the first evaporation region 14
36 and the line interval movement of upper siding track 38, while being moved to the opposite another edge direction in the unilateral direction with first substrate 32
It is dynamic, while whole substrate is deposited.
If terminating that the process of evaporated material is deposited in first substrate 32, drawn from evaporation chamber 12 and complete the first of evaporation
Substrate 32, and new first substrate 32 is loaded to be positioned over first substrate loading part 28 to the first radiation direction 20.
Then, with evaporation particle is deposited in first substrate 32 the step of one second radiation direction 22 in the same direction load second substrate
34 are positioned over second substrate loading part 30.During evaporation process is carried out to first substrate 32, put second substrate 34
Second substrate loading part 30 is placed in, so as to reduce pitch time, and in the process for first substrate 32 be deposited process
In, the loading of second substrate 34 is realized, so as to reduce the loss of evaporated material material.In this step, if second substrate
34 are positioned over second substrate loading part 30, then mask 33 is configured to the surface of second substrate 34, and realize the He of second substrate 34
The alignment of mask 33.
In the present embodiment, do not mean only that " together " identical in time, and also mean to be directed to first substrate 32
Evaporation process and the loading process of second substrate 34 realize in an overlapping manner.
Then, threeth track 46 and fiveth track 50 of the transferred unit 54 by curve are made, and along the second track 44 and the
Four tracks 48 move, so that evaporation particle is deposited in second substrate 34.The one side of transferred unit 54 is by the first evaporation region 14
Line interval, while by curve section, and enter the line interval in the second evaporation region 16 so that into second straight line section
Lower side rail 36 and the line interval of upper siding track 38 of the transferred unit 54 along the second evaporation region 16 move, thus, from the
The unilateral direction of two substrates 34 is moved to opposite another edge direction, and realizes the evaporation to whole substrate.
If terminating the evaporation process to second substrate 34, drawn from evaporation chamber 12 to the second radiation direction 22 and terminate to steam
The second substrate 34 of the evaporation of stimulating food matter, and loaded in second substrate loading part 30 and place new second substrate 34.If
Two substrate loading parts 30 place new second substrate 34, then are aligned with mask 33, and are waited for evaporation process afterwards
It is standby.
According to above-mentioned method, evaporation process is carried out to multiple substrates in a chamber, steamed to a substrate
During plating process, other substrates are carried out to transfer process or alignment process, so as to reduce pitch time (tact
Time), and can reduce substrate is carried out transferring process or process of aliging during the loss of evaporated material material that occurs.
Hereinafter, each structure of evaporation source transfer unit 10 is examined.Fig. 4 is that Fig. 2 part A is amplified
Figure, Fig. 5 is the side view for the evaporation source transfer unit 10 for schematically illustrating one embodiment of the invention, and Fig. 6 to Fig. 8 is for illustrating
The figure of the course of work of the evaporation source transfer unit 10 of one embodiment of the invention.
Fig. 4 shown into Fig. 8 lower side rail 36, on siding track 38, the first track 42, the second track 44, the 3rd rail
Road 46, the 4th track 48, the 5th track 50, the 6th track 52, transferred unit 54, the first sliding part 56, the second sliding part 58, source branch
Frame 60, movable block 62,68, spill spin block 64,70, sliding bar 66, rack rails 72, little gear 74 and motor part 76.
Lower side rail 36 includes：The first linear track 42, it crosses evaporation chamber 12 perpendicular to from a central point 18
The first virtual radiation direction 20；The second linear track 44, it is perpendicular to the void that evaporation chamber 12 is crossed from central point 18
The second radiation direction 22 intended；And the 3rd track 46 of curve, for connecting the first track 42 and the second track 44.
Upper siding track 38 includes：The 4th linear track 48, it is spaced with the first track 42 parallel to be formed；Linear
Five tracks 50, it is spaced with the second track 44 parallel to be formed；And the 6th track 52 of curve, for connecting the 4th track 48
With the 5th track 50.
First track 42 of lower side rail 36 and the 4th track 48 of upper siding track 38 form line interval, lower side rail 36
The second track 44 and upper siding track 38 the 5th track 50 second evaporation region 16 formed line interval.
Formed by the line interval that the first track 42 and the 4th track 48 are formed with the first virtual radiation direction 20 it is vertical,
Formed by the line interval that the second track 44 and the 5th track 50 are formed with the second virtual radiation direction 22 vertical.Thus, with
The perpendicular line interval of first radiation direction 20 and the line interval perpendicular with the second radiation direction 22 distortion are put with first
Penetrate direction 20, the angle that angle that central point 18, the second radiation direction 22 are formed is corresponding.Therefore it is, it is necessary to straight for connecting
The curve section in line section.That is, the first track 42 of lower side rail 36 and the second track 44 are connected with the 3rd track 46 of curve
Connect, the 4th track 48 and the 5th track 50 of upper siding track 38 are connected with the 6th track 52 of curve.Now, due to lower siding track
Separated by a distance, the 6th track 52 is with more than the radius of curvature of the 3rd track 46 the 4th track 48 of connection for road 36 and upper siding track 38
With the 5th track 50.
3rd track 46 of curve and the 6th track 52 can form complete curve track or be sequentially connected multiple straight lines
Track is configured to tracing pattern.
Transferred unit 54 along the line interval perpendicular with the first radiation direction 20 of lower side rail 36 and upper siding track 38,
Curve section, the line interval perpendicular with the second radiation direction 22 are moved back and forth.
Transferred unit 54 includes：A pair of first sliding parts 56, respectively to be moved along lower side rail 36 and upper siding track 38
Dynamic mode is opposite with lower side rail 36 and upper siding track 38 and is combined；And a pair of second sliding parts 58, respectively with a pair
First sliding part 56 is spaced, and in a manner of being moved along lower side rail 36 and upper siding track 38 with lower side rail 36 and upside
Track 38 is opposite and is combined.
First sliding part 56 includes：Movable block 68, moved along lower side rail 36 or upper siding track 38；And spill spin block,
It is combined in a manner of it can be rotated to horizontal direction with the upside of movable block 68, the second sliding part 58 includes：Movable block
62, moved along lower side rail 36 or upper siding track 38；Spill spin block 64, in a manner of it can be rotated to horizontal direction and shifting
The upside of motion block 62 is combined；And sliding bar 66, in a manner of entering line slip relative to above-mentioned spill spin block 64 with above-mentioned rotation
Block 64 is combined.
As shown in figure 3, propose in the present embodiment in each track centered on the first sliding part 56 by two
Two sliding parts 58 are configured at the form of both sides.
The movable block 62,68 of first sliding part 56 and the second sliding part 58 and lower side rail 36 and the phase knot of upper siding track 38
Close, and moved along each track.Can be in movable block 62,68 formed with the groove corresponding with the shape of track, and can be
The groove of movable block 62,68 inserts track to prevent the disengaging of movable block 62,68.
The spill spin block 70 of first sliding part 56 is combined with the upside of the movable block 68 of the first sliding part 56, and to level side
To rotation.The bearing of circle is combined between movable block 68 and spill spin block 70, so as to make spill spin block 70 relative to movement
Block 68 is swimmingly rotated.
The spill spin block 64 of second sliding part 58 is also combined to level with the upside of the movable block 62 of the second sliding part 58
Direction is rotated.
The sliding bar 66 of second sliding part 58 can be combined with the spill spin block 64 of the second sliding part 58, and can be relative to
Spill spin block 64 carries out coming and going slip to horizontal direction.Enter in spill spin block 64 and relative to above-mentioned spill spin block 64 sliding bar of line slip
The bearing for swimmingly guiding rectilinear movement to horizontal direction is provided between 66, thus allows for stable slip.
In the first sliding part 56 and the second sliding part 58 of lower side rail 36 and upper siding track 38 is configured at, linear steaming
Rise 40 by formed relative to lower side rail 36 and upper siding track 38 it is vertical in a manner of be combined.The present embodiment proposes to be provided with volume
Outer source support 60, and combine the form of evaporation source 40 in source support 60.That is, belong to and be configured at lower side rail 36 and upper siding track
First sliding part 56 in road 38 and the second sliding part 58 combine source support 60, and combine linear evaporation source 40 in source support 60
Form.
On the other hand, in order that the drive division that transferred unit 54 moves and is used to provide driving force can include：Rack rails 72, point
Predetermined distance is not separated to the outside of lower side rail 36 and upper siding track 38, and along upper siding track 38 and above-mentioned lower side rail 36
Configuration；Little gear 74, it is meshed with rack rails 72；And motor part 76, it is combined with source support 60, for being provided to little gear 74
Revolving force.
Rack rails 72 is in the outside of lower side rail 36 and upper siding track 38 respectively along upper siding track 38 and above-mentioned lower side rail
36 configurations, also, each rack rails 72 is meshed with little gear 74.The motor parts 76 such as the motor for providing revolving force to little gear 74
It is combined respectively with the top and bottom of source support 60, and revolving force is provided to little gear 74.
Movement of the drive division in the outside of lower side rail 36 for the lower end of voltage input support 60 is configured at, is configured at upside
The drive division in the outside of track 38 is used for the movement of the upper end of voltage input support 60.
The course of work of evaporation source transfer unit 10 is described as follows to Fig. 8 for reference picture 6：In evaporation source sheet
In the line interval on the right side of member 10, transferred unit 54 is moved with same speed in the lower end of source support 60 and upper end.Moreover, such as
Shown in Fig. 6, by arrival curve section, and with positioned at the arrival curve section of the second sliding part 58 of the front end of transferred unit 54, most
The spill spin block 64 of second sliding part 58 of front end is rotated, and enters line slip upwards relative to spill spin block 64 by sliding bar 66.
Now, the curve section of lower side rail 36 forms shorter with small radius of curvature, and the curve section of upper siding track 38 is with big
Radius of curvature forms longer, and therefore, compared with the lower end of source support 60, the upper end of source support 60 is moved with fast speed.So
Afterwards, by the lasting movement of transferred unit 54, positioned at the rotation of the first sliding part 56 of the rear end of the second sliding part 58 of front end
Switch block 70 is rotated, and by the arrival curve section of the first sliding part 56.Fig. 7 is as showing that transferred unit 54 is located at curve section
The figure of the state in center, by the lasting movement of transferred unit 54, the arrival curve section of the second sliding part 58 of rearmost end, finally
The spill spin block 64 of second sliding part 58 at end is rotated, and enters line slip upwards relative to spill spin block 64 by sliding bar 66.
Then, as shown in figure 8, lasting movement with transferred unit 54 so that the second sliding part 58 of front end enters the straight of left side
Line section, the spill spin block 64 of the second sliding part 58 of front end are rotated, and downward relative to spill spin block 64 by sliding bar 66
Slide, and return-to-home position.Moreover, by the lasting movement of transferred unit 54, after the second sliding part 58 of front end
The spill spin block 70 of first sliding part 56 at end is rotated, and enters line interval by the first sliding part 56.Moreover, pass through transfer
The lasting movement in portion 54, the second sliding part 58 of rearmost end enter line interval, and by the second sliding part 58 of rearmost end
Spill spin block 64 is rotated, by sliding bar 66 relative to the slide downward of spill spin block 64, and return-to-home position.If completely into left side
Line interval, then each spill spin block 64,70 and the return-to-home position of sliding bar 66, also, straight line of the transferred unit 54 along left side
Move in section.As described above, when transferred unit 54 is by curve section, it is necessary to make the lower end of transferred unit 54 and the mobile speed of upper end
Degree and displacement become different, therefore, can adjust shifting with the drive division that the lower end of transferred unit 54 and upper end are combined respectively
Send the lower end in portion 54 and the translational speed of upper end and displacement.
More than, although being illustrated with reference to specific embodiment, but as long as being technology belonging to the present invention
The those of ordinary skill in field is not it can be understood that departing from the thought and skill of the invention described in the claimed scope of invention
A variety of modifications and changes are carried out to the present invention in the range of art field.
Multiple embodiments in addition to the embodiment in the claimed scope of invention of the present invention be present.
Claims (8)
1. a kind of evaporation source transfer unit, the inside of evaporation chamber is configured at, for transferring linear evaporation source, above-mentioned evaporation source
Transfer unit is characterised by, including：
Lower side rail, includes the 3rd track of the first linear track, the second linear track and curve, and above-mentioned first track hangs down
Directly in the first virtual radiation direction that above-mentioned evaporation chamber is crossed from a central point, above-mentioned second track is perpendicular to from above-mentioned
Central point crosses the second virtual radiation direction of above-mentioned evaporation chamber, above-mentioned 3rd track be used to connecting above-mentioned first track and
Above-mentioned second track；
Upper siding track, includes the 6th track of the 4th linear track, the 5th linear track and curve, above-mentioned 4th track with
Above-mentioned first track be spaced it is parallel to be formed, above-mentioned 5th track be spaced with above-mentioned second track it is parallel to be formed, it is above-mentioned
6th track is used to connect above-mentioned 4th track and above-mentioned 5th track；And
Transferred unit, above-mentioned linear evaporation source by formed relative to above-mentioned lower side rail and above-mentioned upper siding track it is vertical in a manner of phase
With reference to, above-mentioned transferred unit is moved back and forth along above-mentioned lower side rail and above-mentioned upper siding track,
Above-mentioned transferred unit includes：
A pair of first sliding parts, respectively in a manner of being moved along above-mentioned lower side rail and above-mentioned upper siding track with above-mentioned lower siding track
Road and above-mentioned upper siding track are opposite and are combined；And
A pair of second sliding parts, it is spaced respectively with above-mentioned a pair of first sliding parts, and with along above-mentioned lower side rail and above-mentioned
The mode of upper siding track movement is opposite with above-mentioned lower side rail and above-mentioned upper siding track and is combined,
Above-mentioned first sliding part includes：
Movable block, moved along above-mentioned lower side rail or above-mentioned upper siding track；And
Spill spin block, it is combined in a manner of it can be rotated to horizontal direction on the upside of above-mentioned movable block,
Above-mentioned second sliding part includes：
Movable block, moved along above-mentioned lower side rail or above-mentioned upper siding track；
Spill spin block, it is combined in a manner of it can be rotated to horizontal direction on the upside of above-mentioned movable block；And
Sliding bar, it is combined in a manner of entering line slip relative to above-mentioned spill spin block with above-mentioned spill spin block.
2. evaporation source transfer unit according to claim 1, it is characterised in that
Also including source support, above-mentioned source support is supported by above-mentioned first sliding part and above-mentioned second sliding part,
Above-mentioned evaporation source is combined with above-mentioned source support.
3. evaporation source transfer unit according to claim 2, it is characterised in that also include：
Rack rails, respectively to separating predetermined distance on the outside of above-mentioned lower side rail and upper siding track, and along above-mentioned upper siding track and
Above-mentioned lower side rail configuration；
Little gear, it is meshed with above-mentioned rack rails；And
Motor part, it is combined with above-mentioned source support, for providing revolving force to above-mentioned little gear.
A kind of 4. evaporation coating device, it is characterised in that including：
Chamber is deposited, is divided into the first evaporation region and the second evaporation region, first substrate is in a central point along first
Radiation direction carries out extraction introducing in the above-mentioned first evaporation region, and second substrate exists in above-mentioned central point along the second radiation direction
Above-mentioned second evaporation region carries out extraction introducing；
First substrate loading part, loaded to above-mentioned first radiation direction and place above-mentioned first substrate；
Second substrate loading part, loaded to above-mentioned second radiation direction and place above-mentioned second substrate；
Evaporation source, it is opposite with above-mentioned first substrate or above-mentioned second substrate, and spray evaporated material；And
Evaporation source transfer unit, for transferring above-mentioned evaporation source,
Above-mentioned evaporation source transfer unit includes：
Lower side rail, includes the 3rd track of the first linear track, the second linear track and curve, above-mentioned first track with
Above-mentioned first radiation direction is formed vertically, and above-mentioned second track forms vertical, above-mentioned 3rd track with above-mentioned second radiation direction
For connecting above-mentioned first track and above-mentioned second track；
Upper siding track, includes the 6th track of the 4th linear track, the 5th linear track and curve, above-mentioned 4th track with
Above-mentioned first track be spaced it is parallel to be formed, above-mentioned 5th track be spaced with above-mentioned second track it is parallel to be formed, it is above-mentioned
6th track is used to connect above-mentioned 4th track and above-mentioned 5th track；And
Transferred unit, above-mentioned linear evaporation source by formed relative to above-mentioned lower side rail and above-mentioned upper siding track it is vertical in a manner of phase
With reference to, above-mentioned transferred unit is moved back and forth along above-mentioned lower side rail and above-mentioned upper siding track,
Above-mentioned transferred unit includes：
A pair of first sliding parts, respectively in a manner of being moved along above-mentioned lower side rail and above-mentioned upper siding track with above-mentioned lower siding track
Road and above-mentioned upper siding track are opposite and are combined；And
A pair of second sliding parts, it is spaced respectively with above-mentioned a pair of first sliding parts, and with along above-mentioned lower side rail and above-mentioned
The mode of upper siding track movement is opposite with above-mentioned lower side rail and above-mentioned upper siding track and is combined,
Above-mentioned first sliding part includes：
Movable block, moved along above-mentioned lower side rail or above-mentioned upper siding track；And
Spill spin block, it is combined in a manner of it can be rotated to horizontal direction on the upside of above-mentioned movable block,
Above-mentioned second sliding part includes：
Movable block, moved along above-mentioned lower side rail or above-mentioned upper siding track；
Spill spin block, it is combined in a manner of it can be rotated to horizontal direction on the upside of above-mentioned movable block；And
Sliding bar, it is combined in a manner of being slided relative to above-mentioned first radiation direction to vertical direction with above-mentioned spill spin block.
5. evaporation coating device according to claim 4, it is characterised in that
Also including source support, above-mentioned source support is supported by above-mentioned first sliding part and above-mentioned second sliding part,
Above-mentioned evaporation source is combined with above-mentioned source support.
6. evaporation coating device according to claim 5, it is characterised in that also include：
Rack rails, respectively to separating predetermined distance on the outside of above-mentioned upside track, and along above-mentioned upside track configurations；
Little gear, it is meshed with above-mentioned rack rails；And
Motor part, it is combined with above-mentioned source support, for providing revolving force to above-mentioned little gear.
7. a kind of evaporation coating method, evaporated material is deposited using evaporation coating device according to claim 4, above-mentioned steaming
Electroplating method is characterised by, including：
The step of above-mentioned transferred unit is transferred in the end of above-mentioned upper siding track and above-mentioned lower side rail to the above-mentioned first evaporation region；
Above-mentioned first substrate is loaded to above-mentioned first radiation direction, and above-mentioned first substrate is placed in above-mentioned first substrate loading part
The step of；
Above-mentioned transferred unit is moved along above-mentioned first track and above-mentioned 4th track, and above-mentioned steaming is deposited in above-mentioned first substrate
The step of stimulating food matter；
With together loading above-mentioned second substrate to above-mentioned second radiation direction the step of evaporation particle is deposited in above-mentioned first substrate,
And above-mentioned second substrate loading part place above-mentioned second substrate the step of；And
Make above-mentioned threeth track and above-mentioned sixth track of the above-mentioned transferred unit by curve, and along above-mentioned second track and above-mentioned
5th track move, and above-mentioned second substrate be deposited evaporation particle the step of.
8. evaporation coating method according to claim 7, it is characterised in that
After the step of evaporated material is deposited in above-mentioned first substrate, in addition to：
Draw the above-mentioned first substrate for having completed evaporation from above-mentioned evaporation chamber, and new the is loaded to above-mentioned first radiation direction
One substrate, above-mentioned first substrate loading part places new first substrate the step of.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0155406 | 2013-12-13 | ||
| KR1020130155406A KR101609185B1 (en) | 2013-12-13 | 2013-12-13 | Unit for transferring deposition source, apparatus of deposition having the same and method of deposition |
| PCT/KR2013/011662 WO2015088083A1 (en) | 2013-12-13 | 2013-12-16 | Evaporation source conveying unit, evaporation device, and evaporation method |
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| CN105874096A CN105874096A (en) | 2016-08-17 |
| CN105874096B true CN105874096B (en) | 2018-03-30 |
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| Country | Link |
|---|---|
| JP (1) | JP6208360B2 (en) |
| KR (1) | KR101609185B1 (en) |
| CN (1) | CN105874096B (en) |
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| KR102617955B1 (en) * | 2016-07-15 | 2023-12-26 | 주식회사 선익시스템 | Organic material depositing apparatus with position calibration and automatic oil injection |
| CN108330438B (en) * | 2018-03-12 | 2019-11-29 | 昆山国显光电有限公司 | OLED evaporation coating device and system |
| CN109112488B (en) * | 2018-10-22 | 2023-08-01 | 合肥鑫晟光电科技有限公司 | Vapor deposition source and vapor deposition device |
| KR20200046463A (en) * | 2018-10-24 | 2020-05-07 | 어플라이드 머티어리얼스, 인코포레이티드 | Evaporation Deposition System for Replacing Crucible |
| CN111945116A (en) * | 2020-08-14 | 2020-11-17 | 云谷（固安）科技有限公司 | Evaporation device and evaporation method |
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| CN101294271A (en) * | 2007-04-26 | 2008-10-29 | 索尼株式会社 | Deposition apparatus |
| CN101743617A (en) * | 2007-06-27 | 2010-06-16 | 斗山麦卡泰克株式会社 | Evaporation apparatus |
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| US4763602A (en) * | 1987-02-25 | 1988-08-16 | Glasstech Solar, Inc. | Thin film deposition apparatus including a vacuum transport mechanism |
| US6244212B1 (en) * | 1999-12-30 | 2001-06-12 | Genvac Aerospace Corporation | Electron beam evaporation assembly for high uniform thin film |
| JP4538650B2 (en) * | 2004-06-18 | 2010-09-08 | 京セラ株式会社 | Vapor deposition equipment |
| JP2006186161A (en) * | 2004-12-28 | 2006-07-13 | Nsk Ltd | Driving device |
| KR100727470B1 (en) * | 2005-11-07 | 2007-06-13 | 세메스 주식회사 | Apparatus and method for deposition organic compounds |
| KR20090108497A (en) * | 2008-04-11 | 2009-10-15 | 두산메카텍 주식회사 | Evaporation equipment |
| KR101027509B1 (en) * | 2008-08-21 | 2011-04-06 | 주식회사 선익시스템 | Apparatus for depositing film |
| JP5694679B2 (en) * | 2009-05-04 | 2015-04-01 | 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． | Organic matter vapor deposition apparatus and vapor deposition method |
| US20100279021A1 (en) * | 2009-05-04 | 2010-11-04 | Samsung Mobile Display Co., Ltd. | Apparatus for depositing organic material and depositing method thereof |
| KR101204855B1 (en) * | 2011-03-16 | 2012-11-26 | 엘아이지에이디피 주식회사 | Evaporation device for manufacturing of OLED |
| JP2013206820A (en) * | 2012-03-29 | 2013-10-07 | Samsung Display Co Ltd | Organic el device manufacturing apparatus and organic el device manufacturing method |
| JP2013211137A (en) * | 2012-03-30 | 2013-10-10 | Samsung Display Co Ltd | Vacuum evaporation method and apparatus of the same |
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- 2013-12-13 KR KR1020130155406A patent/KR101609185B1/en active IP Right Grant
- 2013-12-16 JP JP2016536953A patent/JP6208360B2/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101294271A (en) * | 2007-04-26 | 2008-10-29 | 索尼株式会社 | Deposition apparatus |
| CN101743617A (en) * | 2007-06-27 | 2010-06-16 | 斗山麦卡泰克株式会社 | Evaporation apparatus |
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| KR20150069225A (en) | 2015-06-23 |
| CN105874096A (en) | 2016-08-17 |
| WO2015088083A1 (en) | 2015-06-18 |
| KR101609185B1 (en) | 2016-04-05 |
| JP2017500445A (en) | 2017-01-05 |
| JP6208360B2 (en) | 2017-10-04 |
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