KR102617955B1 - Organic material depositing apparatus with position calibration and automatic oil injection - Google Patents

Abstract

A deposition device capable of position correction and automatic lubricant injection is disclosed. The present invention relates to an evaporation source provided with a moving plate on which an evaporation unit for evaporating an evaporation material is mounted and a moving block to travel along a curved rail, wherein the evaporation source includes an upper position correction unit that rotates the upper side of the moving plate; , a lower position correction unit that rotates the lower side of the moving plate is provided to eliminate errors in the transfer position of the evaporation source that may occur while moving along curved rails with different curvature radii, and automatically applies lubricants such as grease to the transfer unit. We provide a deposition device that allows position correction and automatic injection of lubricant to prevent safety accidents caused by manual lubricant refilling.

Description

Deposition device capable of position correction and automatic lubricant injection {ORGANIC MATERIAL DEPOSITING APPARATUS WITH POSITION CALIBRATION AND AUTOMATIC OIL INJECTION}

The present invention relates to an organic matter deposition device, and more specifically, to a device that rotates the moving plate of the evaporation source running on a curved rail to eliminate positional errors and automatically inject lubricant into the evaporation source transfer unit to prevent safety accidents. This relates to a deposition device capable of position correction and automatic lubricant injection.

An Organic Luminescence Emitting Device (OLED) is a self-luminous device that emits light by itself using the electroluminescence phenomenon that emits light when a current flows through a fluorescent organic compound. A thin flat panel display using such a device has a low response speed. It is fast, has a wide viewing angle, and is emerging as a next-generation display device.

In an organic electroluminescent device, except for the anode and cathode electrodes, the remaining constituent layers, such as a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer, are made of organic thin films, and these organic thin films are deposited on a substrate using a vacuum thermal evaporation method. It is deposited on.

The vacuum thermal evaporation method transfers a substrate into a vacuum chamber, aligns a shadow mask with a certain pattern on the transferred substrate, and then heats the crucible containing the organic material to transfer the organic material sublimated in the crucible onto the substrate. This is done by depositing on.

As shown in FIG. 1, the deposition device using the vacuum thermal deposition method according to the prior art includes a deposition chamber 12, a first substrate 32, a second substrate 34, and a first substrate loading unit 28. , a second substrate loading unit 30, a lower rail 36, an upper rail 38, and an evaporation source 40.

In detail, the deposition chamber 12 is divided into a first deposition area 14 and a second deposition area 16 in which a vacuum is maintained, and the first and second substrates 32 and 34 are separated from one central point 18. The substrate is drawn in and out of the first and second deposition regions 14 and 16 in the first and second radial directions 20 and 22, respectively, and is placed on the first and second substrate loading units 28 and 30.

Afterwards, the evaporation source 40, which sprays the evaporation material by an evaporation source transfer unit such as LM Guide, is guided by the upper rail 38 and the lower rail 36 and faces the first or second substrate 32, 34. transported to location.

In addition, the first deposition area 14 and the second deposition area 16 form a predetermined angle, and the first curved rail 52 connecting the upper rails 38 of the first and second deposition areas 14 is formed by forming the first and second deposition areas 14 and 16 at a predetermined angle. 2 It has a larger radius of curvature than the second curved rail 46 connecting the lower rail 36 of the deposition area 14, and accordingly, the first curved rail 52 is longer than the second curved rail 46. is formed

In this case, in order to smoothly deposit the evaporation material on the substrates 32 and 34, the evaporation source 40 must be transferred to the correct position on the first or second substrates 32 and 34 by an evaporation source transfer unit. The evaporation source 40 is not transported the same distance due to the first and second curved rails 52 and 46 having a length, so an error may occur in the transport position of the evaporation source 40, and as a result, the evaporation material is not accurately transported. There was a problem of shadow effect occurring due to lack of deposition.

In addition, as shown in FIG. 2, the evaporation source 40 is provided with a slider 56 to be guided by the rails 36 and 38, and grease is injected into the slider 56 to reduce friction. It is done.

However, when a certain period of time elapses after the grease is injected into the slider 56, the grease hardens or is naturally consumed, which reduces the running movement of the evaporation source 40 due to wear of the slider 56.

In this case, manual refilling of grease requires releasing the vacuum of the deposition chamber 12, which significantly delays work time, and can cause fatal damage to workers due to substances hazardous to the human body inside the deposition chamber 12. There was a safety problem.

Korean Patent No. 10-1239906 (announced on March 6, 2013) Korean Patent No. 10-1481096 (announced on January 14, 2015) Korean Patent Publication No. 10-2015-0081951 (published on July 15, 2015)

Therefore, the purpose of the present invention to solve this problem is to provide an evaporation source provided with a moving plate on which an evaporation unit for evaporating the evaporation material is seated and a moving block to travel along a curved rail, wherein the evaporation source includes the moving plate of the evaporation source. An upper position correction unit that rotates the upper side and a lower position correction unit that rotates the lower side of the moving plate are provided to eliminate errors in the transfer position of the evaporation source that may occur when moving along curved rails with different curvature radii, and to remove errors in the transfer position of the evaporation source. It provides a deposition device that can automatically inject lubricants such as grease into the unit, thereby preventing safety accidents due to manual refilling of lubricants, position correction, and automatic injection of lubricants.

In order to achieve the above object, the present invention maintains a vacuum inside, is divided into first and second deposition areas, and is drawn into and out of the first and second deposition areas in the first and second radial directions, respectively, from one central point. 1, 2 A deposition chamber equipped with first and second substrates mounted on the substrate loading unit; A linear first upper rail perpendicular to the first radial direction, a linear second upper rail perpendicular to the second radial direction, and a first bend of a curve connecting the first upper rail and the second upper rail. Upper rail provided with rails; A linear first lower rail spaced apart from and parallel to the first upper rail, a linear second lower rail spaced apart from the second upper rail and parallel to the first upper rail, and the first lower rail and the second lower rail. A lower rail provided with a curved second curved rail connecting it; A moving plate on which an evaporation unit that evaporates the evaporating material is seated, an upper position correction part that rotates the upper side of the moving plate, and a lower position correction part that rotates the lower side of the moving plate, the upper rail and the lower rail are provided. Provides a deposition device capable of position correction and automatic injection of lubricant, including an evaporation source that travels along.

Additionally, the upper position correction unit includes a support plate; A first moving block coupled to the lower side of the support plate and coupled to travel on the second upper rail; a third curved rail provided on the upper side of the support plate; A second moving block coupled to the lower side of the moving plate and coupled to travel on the third curved rail, wherein the lower position correction unit includes: a support plate; a third moving block coupled to the lower side of the support plate and coupled to travel on the second lower rail; a fourth curved rail provided on the upper side of the support plate; It may include a fourth moving block coupled to the lower side of the moving plate and coupled to travel on the fourth curved rail.

In addition, any one of the upper rail, the lower rail, the third curved rail, and the fourth curved rail, and any one of the first moving block, the second moving block, the third moving block, and the fourth moving block A plurality of rolling balls are arranged in a contact area, wherein the moving block includes an insertion hole penetrated in the longitudinal direction of the rail; A circulation pipe is inserted into the insertion hole, the plurality of rolling balls are inserted and circulated, and a circulation pipe is provided on one side with a penetration hole through which the lubricant is introduced into the inside. It may include an injection hole penetrated at a position corresponding to the injection hole so as to communicate with the injection hole.

According to the deposition device capable of position correction and automatic lubricant injection of the present invention described above, equipment costs such as the upper rail and lower rail that were used to transport the moving plate of the evaporation source can be used as is, thereby reducing equipment costs, In addition, the configuration of the conventional slider used to align the moving plate is replaced with an upper position correction unit and a lower position correction unit, which has the effect of enabling more precise position control of the moving plate.

In addition, a plurality of rolling balls are formed on a moving block running on a rail, a circulation pipe into which the rolling balls are inserted, and an injection hole for automatically injecting lubricant into the circulation pipe are formed to prevent wear of the rolling balls and prevent damage caused by manual labor. It has the effect of preventing safety accidents caused by refilling the lubricant.

Figures 1 and 2 are perspective views schematically showing a vacuum thermal evaporation apparatus according to the prior art.
Figure 3 is a perspective view schematically showing the deposition apparatus according to the present invention.
Figure 4 is a perspective view showing the evaporation source shown in Figure 3.
Figure 5 is an exploded perspective view of the evaporation source shown in Figure 4.
Figure 6 is a perspective view showing the moving block and rail shown in Figure 5 combined.
Figure 7 is a cross-sectional view of the moving block and lane of Figure 6.
Figure 8 is a cross-sectional view of a moving block and a lane according to another embodiment of the present invention.

In order to fully understand the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. This example is provided to more completely explain the present invention to those with average knowledge in the art. Therefore, the shapes of elements in the drawings may be exaggerated to emphasize a clearer description. It should be noted that identical members in each drawing may be indicated by the same reference numerals. Additionally, detailed descriptions of known functions and configurations that are judged to unnecessarily obscure the gist of the present invention are omitted.

Figure 3 is a perspective view schematically showing the deposition apparatus according to the present invention.

As shown in Figure 3, the deposition device capable of position correction and automatic lubricant injection according to the present invention includes a deposition chamber 100 with a substrate maintained inside and a vacuum, an upper position correction unit 220, and a lower position information. An evaporation source 200 equipped with a top 230 to deposit the sublimated organic evaporation material on a substrate at a precise location, and an upper rail that guides the evaporation source 200 to travel along a designated path within the deposition chamber 100. Includes (300) and lower rail (400).

The deposition chamber 100 is divided into a first deposition area 110 and a second deposition area 120 in which a vacuum is maintained, and the first and second substrates 131 and 141 are positioned at one center point 18. , 2 are withdrawn and inserted into the deposition areas 110 and 120 in the first and second radial directions 111 and 121, respectively, and are placed on the first and second substrate loading units 130 and 140.

In this case, the evaporation source 200 is aligned with the upper and lower rails 300, 400).

Figure 3 shows two deposition areas within the deposition chamber 100, but multiple deposition areas, substrate loading units, and substrates may be provided, and the evaporation source 200 travels along the upper and lower rails 300 and 400. A plurality of substrate loading units may be aligned to face each other.

In this case, the upper rail 300 includes a linear first upper rail 310 perpendicular to the first radial direction 111 and a linear second upper rail 320 perpendicular to the second radial direction 121. ) and a curved first curved rail 330 connecting the first upper rail 310 and the second upper rail 320.

In addition, the lower rail 400 includes a linear first lower rail 410 that is spaced apart and parallel to the first upper rail 310, and a linear first lower rail 410 that is spaced apart and parallel to the second upper rail 320. It includes two lower rails 420 and a curved second curved rail 430 connecting the first lower rail 410 and the second lower rail 420. In this case, the curved rails 330 and 430 may be completely curved, or may be arranged in a curved shape by sequentially connecting several straight rails.

In this case, when explaining the process in which the evaporation source 200 is moved from the first substrate loading unit 130 to a position opposite to the second substrate loading unit 140, the evaporation source 200 is located in the first deposition area 110. After moving in a straight line along the first upper rail 310 and the first lower rail 410 and passing through the curved section of the first curved rail 330 and the second curved rail 430, the second deposition area It can be moved to a position opposite to the second substrate loading unit 140 by traveling along the second upper rail 320 and the second lower rail 420 of 120 .

Meanwhile, the process of depositing the evaporation material on the substrates 131 and 141 after the evaporation source 200 is moved to the substrate loading units 130 and 140 is disclosed in prior art literature, and thus the related technical description will be omitted.

Since the first curved rail 330 has a larger radius of curvature than the second curved rail 430, the evaporation source 200 moves from the first substrate loading unit 130 to the second substrate loading unit 140. 2 There are cases where it is not aligned horizontally in the radial direction 121. That is, an error may occur in the position where the evaporation source 200 faces the second substrate loading unit 140. In this case, the evaporation material is not precisely deposited on the second substrate 141, resulting in a shadow effect. There is a problem that arises.

Figures 4 to 5 are perspective views showing an evaporation source according to the present invention.

As shown in Figures 4 and 5, the evaporation source 200 moves in the longitudinal direction and includes a moving plate 210 on which an evaporation unit (not shown) that evaporates the evaporation material is seated, and an upper side of the moving plate 210. It includes an upper position correction unit 220 that rotates and a lower position correction unit 230 that rotates the lower side of the moving plate 210.

The upper position correction unit 220 includes a support plate 222 and a first moving block 221 that is coupled to the lower side of the support plate 222 and is coupled to the second upper rail 320 to enable sliding movement, and the A second pair of third curved rails 223 provided on the upper side of the support plate 222 and the lower side of the moving plate 210 are coupled to the third curved rail 223 to enable slide movement. Includes a moving block 224.

Likewise, the lower position correction unit 230 includes a support plate 232, a third moving block 231 coupled to the lower side of the support plate 232 and slidably coupled to the second lower rail 420, A fourth curved rail 233 provided on the upper side of the support plate 232 and a fourth moving block ( 234).

In detail, the pair of third curved rails 223 located on the support plate 222 are provided symmetrically in left and right pairs about the longitudinal direction of the moving plate 210, and the center points of the curved shapes are inside each other. It is heading towards.

In addition, the second moving block 224 of the third curved rail 223 travels on the third curved rail 223 through a transfer unit (not shown), and thus the moving plate coupled to the second moving block 224 The upper part of (210) rotates.

Likewise, the fourth curved rail 233 located on the support plate 232 has a semicircular shape and its center point is directed downward. In addition, the fourth moving block 234 of the fourth curved rail 233 travels on the fourth curved rail 233 through a transfer unit not shown, and thus the fourth moving block 234 is coupled to the fourth moving block 234. The lower part of the plate 210 rotates.

Therefore, with the above-described configuration, the longitudinal direction in which the evaporation unit is moved to the moving plate 210 through precise position control of the second moving block 224 and the fourth moving block 234 by the transfer unit, and the first radial direction (111) or the second radial direction 121 can be formed in parallel.

Accordingly, equipment such as the upper rail 300 and lower rail 400, which were used to transport the mobile plate 210, can be used as is, thereby reducing equipment costs, and also for alignment of the mobile plate 210. By replacing the configuration of the conventional slider used with the upper position correction unit 220 and the lower position correction unit 230, more precise position control of the moving plate 210 is possible.

Figure 6 is a perspective view showing a movable block and rail combined according to another embodiment of the present invention, and Figure 7 is a cross-sectional view of the movable block and rail of Figure 6.

The rail 500 mentioned in the embodiments of FIGS. 6 and 7 can be applied to the upper rail 300, lower rail 400, third curved rail 223, and fourth curved rail 233, and can also be moved. Block 600 may be applied to the first moving block 221, the second moving block 224, the third moving block 231, and the fourth moving block 234.

Meanwhile, since the moving block runs on rails, smooth running can be expected through grease injection. However, if a certain period of time elapses after grease injection, the grease hardens or is naturally consumed, which causes a decrease in the running movement of the evaporation source due to wear of the moving block.

Therefore, in this embodiment, rather than entering the inside of the deposition chamber 12 and manually injecting grease into the moving block 600, the grease is injected into the deposition chamber through an automatic grease injection device (not shown) provided outside the deposition chamber 12. It is characterized by controlling the automatic injection of grease into the moving block 600 located inside (12).

Accordingly, the work of releasing the vacuum of the deposition chamber 12 by manually refilling the grease can be omitted, and there is a safety problem that can cause fatal damage to workers due to substances hazardous to the human body inside the deposition chamber 12. can be solved. Meanwhile, the automatic grease injection device is a device that injects grease into the moving block 600 at a preset time and injection amount, and detailed description will be omitted.

Hereinafter, in order to explain the process of automatically injecting grease, the configuration of the moving block 600 and the rail 500 according to an embodiment of the present invention will be described.

As shown in Figures 6 and 7, in this embodiment, the rail 500 and the moving block 600 are moved using a typical LM (Linear Motor) guide, and the moving block 600 includes the rail 500. A plurality of rolling balls 610 are arranged without gaps in the area in contact with the rail 500 to improve mobility due to rolling motion.

In addition, an insertion hole 620 is formed through the inside of the moving block 600 in the longitudinal direction of the rail 500, and a circulation pipe in which a plurality of rolling balls 610 are inserted and circulated in the insertion hole 620 ( 640) is inserted.

The circulation pipe 640 has input holes 641 through which lubricants such as grease can be introduced at regular intervals, and the moving block 600 has input holes 641 so as to communicate with the input holes 641. ) An injection hole 630 is formed through the corresponding position.

Grease is injected into the initial circulation pipe 640 to prevent wear of the rolling ball 610, which occurs when premature hardening of the grease occurs or the function of the grease is lost due to chemical action by evaporated substances. To this end, the automatic grease injection device provided outside the deposition chamber 12 additionally and repeatedly injects grease into the injection hole 630 at a preset time and injection amount.

Accordingly, the grease injected into the injection hole 630 flows into the injection hole 641 of the circulation pipe 640 and fills the inside of the circulation pipe 640 to prevent premature wear of the rolling ball 610, It has the effect of maintaining the function of the LM guide for a certain period of time.

In addition, even if grease injection is stopped or the function of the grease is lost due to a malfunction of the automatic grease injection device, wear of the rolling ball 610 can be prevented for a certain period of time by the circulation pipe 640, which functions as a circulation hole. This makes it possible to further maintain the functionality of the LM guide.

In this case, the circulation pipe 640 is preferably made of a thermoplastic material that is mechanically, thermally, and chemically durable.

Figure 8 is a cross-sectional view of a moving block and a lane according to another embodiment of the present invention. In particular, the rail 500 shown in FIG. 8 can be applied to a curved rail, that is, the third curved rail 223 and the fourth curved rail 233.

As shown in FIG. 8, among the rolling balls 610 provided inside both sides of the moving block 600, the diameter of the rolling balls 610 in contact with the outer peripheral surface of the rail 500 is on the inner peripheral surface of the rail 500. It is formed to be larger than the diameter of the cloud ball 610 that is in contact.

Due to the nature of the curved rail, more wear may occur on the rolling ball 610 in contact with the outer peripheral surface of the curved rail, which has a longer moving distance, which may cause a decrease in the running motion of the evaporation source. The outer peripheral surface of the rail 500 By increasing the size of the rolling ball 610 in contact, it is possible to eliminate the factors causing uneven wear to some extent.

The embodiments of the deposition device capable of position correction and automatic lubricant injection of the present invention described above are merely exemplary, and those skilled in the art will be able to make various modifications and other equivalent implementations thereof. You can see that an example is possible. Therefore, it will be understood that the present invention is not limited to the forms mentioned in the detailed description above. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims. In addition, the present invention should be understood to include all modifications, equivalents and substitutes within the spirit and scope of the present invention as defined by the appended claims.

100: deposition chamber 110: first deposition area
111: first radiation direction 120: second deposition area
121: second radial direction 130: first substrate loading unit
131: first substrate 140: second substrate loading unit
141: second substrate 200: evaporation source
210: moving plate 220: upper position correction unit
221: first moving block 222: support plate
223: Third curved rail 224: Second moving block
230: Lower position correction unit 230: Lower position correction unit
231: Third moving block 232: Support plate
233: Fourth curved rail 234: Fourth moving block
300: upper rail 310: first upper rail
320: second upper rail 330: first curved rail
400: lower rail 410: first lower rail
420: second lower rail 430: second curved rail
500: Rail 600: Moving block
610: cloud ball 620: insertion hole
630: injection hole 640: circulation pipe
641: Insertion hole

Claims (5)

A vacuum is maintained inside, and it is divided into first and second deposition areas, and is drawn in and out of the first and second deposition areas in the first and second radial directions from a central point, respectively, and is seated on the first and second substrate loading units. A deposition chamber equipped with first and second substrates;
A linear first upper rail perpendicular to the first radial direction, a linear second upper rail perpendicular to the second radial direction, and a first bend of a curve connecting the first upper rail and the second upper rail. Upper rail provided with rails;
A linear first lower rail spaced apart from and parallel to the first upper rail, a linear second lower rail spaced apart from the second upper rail and parallel to the first upper rail, and the first lower rail and the second lower rail. A lower rail provided with a curved second curved rail connecting it; and
A moving plate on which the evaporation unit for evaporating the evaporating material is seated, an upper position correction unit located on the upper rail to rotate the upper side of the moving plate, and a lower rail located in the lower rail to rotate the lower side of the moving plate. It is provided with a lower position correction unit and includes an evaporation source running along the upper rail and lower rail,
The upper position correction unit,
A support plate, a first moving block coupled to the lower side of the support plate and coupled to run on the second upper rail, a curved third curved rail provided on the upper side of the support plate, and a lower side of the moving plate It is coupled to and includes a second moving block coupled to travel on the third curved rail,
The lower position correction unit,
A support plate, a third moving block coupled to the lower side of the support plate and coupled to run on the second lower rail, a curved fourth curved rail provided on the upper side of the support plate, and a third moving block coupled to the lower side of the moving plate and the second lower rail. 4 A deposition device capable of position correction and automatic lubricant injection including a fourth moving block coupled to run on a curved rail. delete In claim 1,
The third curved rail,
The moving plate is symmetrical about the longitudinal axis and is provided in pairs on the left and right, and the curved center point is directed inward,
The fourth curved rail is a deposition device capable of position correction and automatic lubricant injection, characterized in that the fourth curved rail has a curved shape and its center point points downward. In claim 3,
On any one of the upper rail, the lower rail, the third curved rail, and the fourth curved rail, and on any one of the first moving block, the second moving block, the third moving block, and the fourth moving block. Multiple cloud balls are arranged in the contact area,
The moving block is,
an insertion hole penetrating inside the longitudinal direction of the rail;
A circulation pipe is inserted into the insertion hole, the plurality of rolling balls are inserted and circulated, and a circulation pipe is provided on one side with a penetration hole through which the lubricant is introduced into the inside.
an injection hole penetrated at a position corresponding to the injection hole so as to communicate with the injection hole;
A deposition device capable of position correction and automatic lubricant injection. In claim 4,
The second moving block and the fourth moving block are,
A deposition device capable of position correction and automatic lubricant injection, characterized in that the size of the rolling balls in contact with the outer peripheral surfaces of the third and fourth curved rails is larger than the size of the rolling balls in contact with the inner surfaces.

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