CN105793586B - 包括金刚石内涂层的轴承部件 - Google Patents

包括金刚石内涂层的轴承部件 Download PDF

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CN105793586B
CN105793586B CN201480065306.3A CN201480065306A CN105793586B CN 105793586 B CN105793586 B CN 105793586B CN 201480065306 A CN201480065306 A CN 201480065306A CN 105793586 B CN105793586 B CN 105793586B
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parts
elongate pocket
bearings
opening
diamond
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CN105793586A (zh
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J·奥茨切克
W·伯杰
M·里格尔
A·佩尔
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EagleBurgmann Germany GmbH and Co KG
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/043Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • F16C17/028Sliding-contact bearings for exclusively rotary movement for radial load only with fixed wedges to generate hydrodynamic pressure, e.g. multi-lobe bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • F16C33/1025Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F16C33/103Construction relative to lubrication with liquid, e.g. oil, as lubricant retained in or near the bearing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/12Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • F16C33/122Multilayer structures of sleeves, washers or liners
    • F16C33/124Details of overlays
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02Carbon based material
    • F16C2206/04Diamond like carbon [DLC]
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40Linear dimensions, e.g. length, radius, thickness, gap
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/42Groove sizes

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Sliding-Contact Bearings (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

公开了一种轴承部件,其包括:基体(2)和开口(3),开口(3)在基体(2)中并且在开口(3)形成有内轴承面。内轴承面设置有金刚石涂层(4),金刚石涂层(4)具有长形凹部(42),长形凹部(42)大致沿开口的长度方向(X‑X)延伸。

Description

包括金刚石内涂层的轴承部件
技术领域
本发明涉及包括具有金刚石涂层的内轴承面的轴承部件。
背景技术
原理上,现有技术已知提供了外部具有金刚石涂层的滑环等。传统上这是通过CVD方法来实现的。然而,例如在轴承的内表面上涂覆金刚石是有问题的。DE 108 09 675 C1公开了一种将金刚石层涂布于有限长度的管状中空体的装置和方法。在该文中,丝穿过中空体,并用于使金刚石颗粒沉积在要涂覆的内表面上。通过该方法执行的金刚石涂层致使在中空体的内表面上产生均质的金刚石层。
发明内容
本发明的目的是提供一种轴承部件,其具有最优的流体动力学以及简单的构造,并且制造简单且成本效益好。特别地,根据本发明的轴承部件即使在滚动期间也应当具有尽可能低的摩擦和非常长的使用寿命。
该目的通过具有如下特征的轴承部件来实现:该轴承部件包括:基体和开口,该开口形成在基体中并且在该开口形成有内轴承面,其中内轴承面具有金刚石涂层,金刚石涂层具有长形凹部,长形凹部设置在金刚石涂层内并且大致沿开口的长度方向延伸,并且长形凹部的宽度小于金刚石涂层的金刚石晶粒的平均宽度。除上述轴承部件之外,本发明还公开了优选的实施方式。
根据本发明的具有上述特征的轴承部件具有以下优点:能够使设置在内轴承面上的金刚石涂层的流体动力学最优。特别地,根据本发明的轴承部件使得能够在金刚石涂层不发生高磨耗的情况下执行大量的启动/停止过程。结果,根据本发明的轴承部件具有长的使用寿命。根据本发明这通过以下实现:轴承部件具有开口,该开口设置在基体中,该开口具有涂覆有金刚石的内轴承面。内轴承面的金刚石涂层具有长形凹部,该长形凹部大致沿基体中的开口的长度方向延伸。长形凹部设置在金刚石涂层自身内。因而长形凹部与内轴承面的周向大致垂直地延伸,换言之,沿轴承部件的轴线方向延伸。长形凹部通过大致直线状的晶体结构实现。结果,非常有效地且出乎意料地实现了:能够在轴承上滚动期间有压力梯度,并大大降低了直到完全流体动力学操作的提升转动速度。换言之,从轴承的静止状态的原始静摩擦经由临界摩擦到完全流体摩擦的摩擦过渡的转动速度比现有技术低得多。较早地从轴承面提升转动部件还使得大大地减小了磨耗,这意味着能够显著地增长轴承部件的使用寿命。
优选地,基体中的开口为贯通开口。
还优选地,金刚石涂层中的长形凹部从开口的第一侧向第二侧连续地延伸。这有助于在轴承部件的启动过程期间以如下方式建立压力:能够特别快速地在轴承部件中建立低摩擦的流体摩擦。
还优选地,金刚石涂层中的长形凹部彼此不交叉。特别优选地,长形凹部形成为大致平行。由于长形凹部是通过金刚石涂层的晶体结构形成的,因此长形凹部不具有直的壁等,意味着根据本发明使用术语大致平行地延伸。
还优选地,金刚石涂层中的相邻的长形凹部在开口的周向上具有大约相等的距离。这使得当配置在轴承部件内的转动部件滚动时,在所有位置均能够快速地建立压力。
还优选地,沿开口的周向确定的长形凹部的宽度小于金刚石涂层的表面的金刚石晶粒的平均宽度。结果,提供了通过金刚石涂层的长形凹部的窄的长形槽。
还优选地,长形凹部的深度与宽度之比大约为2。特别优选地,长形凹部的深度大约为2μm。还优选地,长形凹部的宽度大约为1μm。还优选地,金刚石涂层的厚度大约为8μm-20μm。
根据本发明的进一步优选的实施方式,金刚石涂层中的长形凹部的宽度和金刚石涂层中的长形凹部的深度大致恒定。对此还应当注意,术语“大致”取决于金刚石表面涂层的晶体形式,这是因为在本文中无法在μm范围内指明精确的尺寸。
当转动部件在轴承部件内滚动时,优选地,长形凹部以如下方式填充有润滑介质(例如流体):在滚动过程期间,转动部件的转动使得存在于长形凹部内的润滑流体形成润滑流体壁,从而由滚动过程夹带的流体分子积聚在润滑流体壁上,因而轴承快速地过渡到流体摩擦状态。
优选地,轴承部件由SiC或WC制成。
还优选地,基体的整个开口涂覆有金刚石。
在本发明的特别优选的实施方式中,轴承部件形成为径向滑动轴承。
附图说明
以下参照附图详细地说明本发明,在附图中:
图1是根据本发明的轴承部件的示意截面图,以及
图2是轴承部件的开口的内轴承面的金刚石涂层的表面的示意平面图。
具体实施方式
如能够从根据本发明的轴承部件1的截面图看到的,轴承部件1包括基体部件2,基体部件2包括开口3。本实施方式的开口3形成为贯通开口。
开口3被设置成筒状并且在基体2的内轴承面20上具有金刚石涂层4。金刚石涂层4形成在开口3的整个内轴承面20上。
开口3形成内轴承面并且用于容纳例如以能够沿正反周向转动的方式安装在开口3内的轴。
此外,第一斜面(bevel)5形成于开口3的第一侧31,第二斜面6形成于开口3的第二侧32。本实施方式的轴承部件1形成为径向滑动轴承。
图2是金刚石涂层4的表面的放大细节图。如能够从图2看到的,大量的金刚石晶粒(diamond crystals)41形成于金刚石涂层4的表面。此外,长形凹部42形成于金刚石涂层4的表面并从第一侧31向第二侧32连续地延伸。如此长形凹部42被设置成在金刚石涂层4的表面沿轴线方向X-X连续。
长形凹部42的沿周向测量的宽度为B,宽度B沿着长形凹部42的长度大致恒定。如从图2清楚地,长形凹部42以如下方式形成在金刚石晶粒41之间:长形凹部42没有直的壁和底部,而是代替地根据晶粒生长而形成。然而,可以基本上认为宽度B在长形凹部42的整个长度上是大致恒定的。
长形凹部42与周向U大致垂直地形成。此外,长形凹部42具有以下深度:使得深度与宽度之比在长形凹部42的整个长度上保持大致恒定并大约为2。长形凹部42的宽度B大约为1μm,长形凹部42的深度大约为2μm。
本实施方式所示的轴承为径向滑动轴承,润滑剂(例如润滑油)存在于金刚石表面。由于金刚石涂层4中的长形凹部42,因此现在设置成润滑剂也存在于长形凹部42中。在转动部件的滚动期间(在此期间静摩擦在静止状态开始作用),现在转动部件的转动导致润滑剂的分子沿着周向U移动。位于各长形凹部42中的润滑剂起到润滑剂壁的作用,意味着分子积聚在如此形成的润滑剂壁上,从而能够快速地形成润滑膜。结果,非常有效地且出乎意料地实现了以如下方式建立的压力梯度:能够显著地降低转动部件不再与金刚石涂层直接接触的提升转动速度(lift rotational speed)。因而,根据本发明,能够在转动部件的转动速度较低时发生从静摩擦到流体摩擦的过渡。
因而,本发明特别适合于涉及更为频繁启动/停止操作的应用。由于金刚石涂层4中设置有长形凹部42,因此能够得到出乎意料的结果,因而使得能够相当大地改善包括金刚石内涂层的轴承部件。
附图标记列表
1 轴承部件
2 基体
3 开口
4 金刚石涂层
5 斜面
6 斜面
20 内轴承面
31 第一侧
32 第二侧
41 金刚石晶粒
42 长形凹部
B 宽度
U 周向
X-X 轴线方向

Claims (11)

1.一种轴承部件,其包括:
-基体(2)和
-开口(3),所述开口(3)形成在所述基体(2)中并且在所述开口(3)形成有内轴承面,
-其中所述内轴承面具有金刚石涂层(4),
-所述金刚石涂层(4)具有长形凹部(42),所述长形凹部(42)设置在所述金刚石涂层(4)内并且大致沿所述开口的长度方向(X-X)延伸,并且
所述长形凹部(42)的宽度(B)小于所述金刚石涂层(4)的金刚石晶粒(41)的平均宽度。
2.根据权利要求1所述的轴承部件,其特征在于,所述开口(3)为贯通开口。
3.根据前述权利要求中的任一项所述的轴承部件,其特征在于,所述长形凹部(42)从所述开口的第一侧(31)向第二侧(32)连续地延伸。
4.根据权利要求1或2所述的轴承部件,其特征在于,所述长形凹部(42)以不交叉的方式设置在所述金刚石涂层(4)内。
5.根据权利要求1或2所述的轴承部件,其特征在于,所述长形凹部(42)大致相互平行地延伸。
6.根据权利要求1或2所述的轴承部件,其特征在于,所述长形凹部(42)以大致相等的间距沿着所述开口(3)的内周设置。
7.根据权利要求1或2所述的轴承部件,其特征在于,所述长形凹部(42)的深度与所述长形凹部的宽度之比大约为2。
8.根据权利要求1或2所述的轴承部件,其特征在于,所述长形凹部(42)填充有润滑介质。
9.根据权利要求8所述的轴承部件,其特征在于,所述长形凹部(42)填充有液体润滑剂。
10.根据权利要求1或2所述的轴承部件,其特征在于,所述基体(2)的所述内轴承面(20)完全地覆盖有所述金刚石涂层(4)。
11.根据权利要求1或2所述的轴承部件,其特征在于,所述轴承部件为径向滑动轴承。
CN201480065306.3A 2013-12-10 2014-12-01 包括金刚石内涂层的轴承部件 Expired - Fee Related CN105793586B (zh)

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DE102013225398.2A DE102013225398B4 (de) 2013-12-10 2013-12-10 Lagerbauteil mit Diamantinnenbeschichtung
DE102013225398.2 2013-12-10
PCT/EP2014/076057 WO2015086356A1 (de) 2013-12-10 2014-12-01 Lagerbauteil mit diamantinnenbeschichtung

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CN105793586B true CN105793586B (zh) 2017-12-26

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DE (1) DE102013225398B4 (zh)
MX (1) MX2016006093A (zh)
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3049602C (en) * 2017-03-17 2021-10-12 Halliburton Energy Services, Inc. Radial bearing with wear resistant inserts and a wear resistant coating
DE102017208026A1 (de) * 2017-05-12 2018-11-15 Ford Global Technologies, Llc Signalanlage zum Befestigen auf einem Dach eines Kraftfahrzeuges und Kraftfahrzeug
DE102019114250A1 (de) * 2019-05-28 2020-12-03 Schaeffler Technologies AG & Co. KG Gleitlagerung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE339649C (de) * 1917-05-30 1921-07-30 Josef Desenberg Gleitflaeche mit zahlreichen, quer zur Gleitrichtung verlaufenden Aussparungen
US4756631A (en) * 1987-07-24 1988-07-12 Smith International, Inc. Diamond bearing for high-speed drag bits
DE19809675C1 (de) * 1998-03-06 1999-11-25 Fraunhofer Ges Forschung Vorrichtung und Verfahren zum Diamantbeschichten von rohrförmigen Hohlkörpern begrenzter Länge sowie danach hergestellte Hohlkörper und dessen Verwendung
JP2002070870A (ja) * 2000-08-28 2002-03-08 Koyo Mach Ind Co Ltd 軸受装置
CN100572833C (zh) * 2005-08-01 2009-12-23 Skf股份公司 用于滚柱轴承的保持架及其制造方法
US20070047857A1 (en) * 2005-08-26 2007-03-01 Tsutomu Hamada Sleeve for hydrodynamic bearing device, hydrodynamic bearing device and spindle motor using the same, and method for manufacturing sleeve
RU52956U1 (ru) * 2005-10-05 2006-04-27 Илья Александрович Буяновский Алмазоподобное антифрикционное покрытие
EP2131049A1 (de) * 2008-06-04 2009-12-09 Carl Freudenberg KG Lageranordnung
DE102009060924B4 (de) * 2009-12-18 2017-01-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Herstellungsverfahren für eine Festschmierstoffstruktur eine mit dem Herstellungsverfahren hergestellte Festschmierstoffstruktur sowie Verwendungen
JP2012215289A (ja) * 2011-03-25 2012-11-08 Jtekt Corp ころ軸受
CN202040210U (zh) * 2011-05-20 2011-11-16 重庆德蚨乐机械制造有限公司 船用增压器主轴用轴套
US8657498B2 (en) * 2011-08-19 2014-02-25 Us Synthetic Corporation Bearing assemblies, apparatuses, and motor assemblies using the same
US20150137486A1 (en) * 2013-10-15 2015-05-21 Roller Bearing Company Of America, Inc. Spherical plain bearing for an articulated joint

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WO2015086356A1 (de) 2015-06-18
DE102013225398B4 (de) 2017-05-11
US20170023058A1 (en) 2017-01-26
DE102013225398A1 (de) 2015-07-02
US9657775B2 (en) 2017-05-23
EP3080466B1 (de) 2018-05-30
SG11201604246YA (en) 2016-07-28
EP3080466A1 (de) 2016-10-19
CN105793586A (zh) 2016-07-20
RU2641557C2 (ru) 2018-01-18

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