CN105758178B - 整体式水冷铜坩埚 - Google Patents

整体式水冷铜坩埚 Download PDF

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CN105758178B
CN105758178B CN201610310153.5A CN201610310153A CN105758178B CN 105758178 B CN105758178 B CN 105758178B CN 201610310153 A CN201610310153 A CN 201610310153A CN 105758178 B CN105758178 B CN 105758178B
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CN105758178A (zh
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高学林
王洪强
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B14/14—Arrangements of heating devices
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B14/10—Crucibles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B14/10—Crucibles
    • F27B2014/108—Cold crucibles (transparent to electromagnetic radiations)

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)

Abstract

本发明公开了一种整体式水冷铜坩埚，包括由侧壁、底壁组成的坩埚体，所述底壁中的Ⅰ号进水孔与Ⅰ号进水接头连通，Ⅰ号出水孔与Ⅰ号出水接头连通，Ⅱ号进水孔与Ⅱ号进水接头连通，Ⅱ号出水孔与Ⅱ号出水接头连通，所述Ⅰ号进水孔与Ⅰ号散热管路连通，所述Ⅱ号进水孔与Ⅱ号散热管路连通，所述Ⅰ号散热管路通过Ⅰ号连接管与侧壁中L形的Ⅰ号出水管路连通，所述Ⅱ号散热管路通过Ⅱ号连接管与侧壁中L形的Ⅱ号出水管路连通，所述Ⅰ号出水管路与Ⅰ号出水孔连通，所述Ⅱ号出水管路与Ⅱ号出水孔连通。本发明中散热管路、出水管路有利于整体式水冷铜坩埚的加工制做，双路或多路循环水路结构，可满足更大功率电子枪的运行需求，避免其高温损坏。

Description

整体式水冷铜坩埚
技术领域
本发明属于一种加热容器，具体涉及一种整体式水冷铜坩埚。
背景技术
电子枪是产生、加速及会聚高能量密度电子束流的装置，在真空条件下，利用电子束可以进行高纯金属冶炼、难熔金属熔化、蒸发镀膜、金属合金化等多项工业应用。而这些应用往往都是在坩埚中进行的，坩埚是金属或合金冶炼的物理化学反应熔池，既要装常温下的固态块料，也装高温下的熔融液体。电子枪轰击坩埚内金属的温度可达3000℃以上。因此对坩埚具有非常高的要求，坩埚要具有高的机械强度，特别是高温强度要好；坩埚要具有较小的线膨胀系数，在高温下不要出现裂纹等损坏，坩埚要具有良好的物理化学稳定性，不能与高温熔融金属发生反应或互熔，同时电子枪运行需要坩埚具有良好的导电性。
坩埚主要分为热坩埚和冷坩埚，热坩埚的材料主要为一些陶瓷材料、耐火材料以及石墨等。热坩埚往往不适用于电子枪的应用需求，陶瓷材料在高温高真空下化学性质不稳定，容易发生分解。耐火材料与石墨又会与熔融高温金属发生粘连，其抗热震性也不是很好，容易发生断裂。所以电子枪的工业应用都采用冷坩埚，冷坩埚要用导热性好导电性也好的且不易被熔融金属粘结的材料制造，一般为紫铜或无氧铜。冷坩埚的水冷结构的设计非常重要，如果水路结构不合理，就会在坩埚内部表面形成高的温度，严重时会对坩埚内壁造成腐蚀损坏，使金属铜混进熔融金属中，坩埚也会损坏。
发明内容
本发明为解决现有技术存在的问题而提出，其目的是提供一种整体式水冷铜坩埚。
本发明的技术方案是：一种整体式水冷铜坩埚，包括由侧壁、底壁组成的坩埚体，所述底壁中的Ⅰ号进水孔与Ⅰ号进水接头连通，Ⅰ号出水孔与Ⅰ号出水接头连通，Ⅱ号进水孔与Ⅱ号进水接头连通，Ⅱ号出水孔与Ⅱ号出水接头连通，所述Ⅰ号进水孔与底壁中回字形的Ⅰ号散热管路连通，所述Ⅱ号进水孔与底壁中回字形的Ⅱ号散热管路连通，所述Ⅰ号散热管路通过Ⅰ号连接管与侧壁中L形的Ⅰ号出水管路连通，所述Ⅱ号散热管路通过Ⅱ号连接管与侧壁中L形的Ⅱ号出水管路连通，所述Ⅰ号出水管路与Ⅰ号出水孔连通，所述Ⅱ号出水管路与Ⅱ号出水孔连通。
所述Ⅰ号散热管路、Ⅰ号出水管路孔径均大于Ⅰ号连接管孔径。
所述Ⅱ号散热管路、Ⅱ号出水管路孔径均大于Ⅱ号连接管孔径。
所述的Ⅰ号散热管路、Ⅰ号连接管、Ⅰ号出水管路、Ⅱ号散热管路、Ⅱ号连接管、Ⅱ号出水管路均通过钻孔加工并通过钎焊堵头进行封堵而成。
本发明采用整体式水冷铜坩埚，满足电子枪工业应用的使用要求；散热管路、出水管路有利于整体式水冷铜坩埚的加工制做，双路或多路循环水路结构，可满足更大功率电子枪的运行需求，避免其高温损坏。
附图说明
图1是本发明的立体图；
图2是本发明的内部水路连接图；
其中：
1坩埚体 2侧壁
3底壁 4Ⅰ号进水接头
5Ⅰ号出水接头 6Ⅱ号进水接头
7Ⅱ号出水接头 8Ⅰ号进水孔
9Ⅰ号散热管路 10Ⅰ号连接管
11Ⅰ号出水管路 12Ⅰ号出水孔
13Ⅱ号进水孔 14Ⅱ号散热管路
15Ⅱ号连接管 16Ⅱ号出水管路
17Ⅱ号出水孔。
具体实施方式
以下，参照附图和实施例对本发明进行详细说明：
如图1、2所示，一种整体式水冷铜坩埚，包括由侧壁2、底壁3组成的坩埚体1，所述底壁3中的Ⅰ号进水孔8与Ⅰ号进水接头连通，Ⅰ号出水孔12与Ⅰ号出水接头5连通，Ⅱ号进水孔13与Ⅱ号进水接头6连通，Ⅱ号出水孔17与Ⅱ号出水接头7连通，所述Ⅰ号进水孔8与底壁3中回字形的Ⅰ号散热管路9连通，所述Ⅱ号进水孔13与底壁3中回字形的Ⅱ号散热管路14连通，所述Ⅰ号散热管路9通过Ⅰ号连接管10与侧壁2中L形的Ⅰ号出水管路11连通，所述Ⅱ号散热管路14通过Ⅱ号连接管15与侧壁2中L形的Ⅱ号出水管路16连通，所述Ⅰ号出水管路11与Ⅰ号出水孔12连通，所述Ⅱ号出水管路16与Ⅱ号出水孔17连通。
所述Ⅰ号散热管路9、Ⅰ号出水管路11孔径均大于Ⅰ号连接管10孔径。
所述Ⅱ号散热管路14、Ⅱ号出水管路16孔径均大于Ⅱ号连接管15孔径。
所述的Ⅰ号散热管路9、Ⅰ号连接管10、Ⅰ号出水管路11、Ⅱ号散热管路14、Ⅱ号连接管15、Ⅱ号出水管路16均通过钻孔加工并通过钎焊堵头进行封堵而成。
本发明中回字形的Ⅰ号散热管路9、Ⅱ号散热管路14均匀的设置在底壁3中。
本发明中Ⅰ号连接管10、Ⅱ号连接管15均为平行多个连接管。本发明采用整体式水冷铜坩埚，满足电子枪工业应用的使用要求；散热管路、出水管路有利于整体式水冷铜坩埚的加工制做，双路或多路循环水路结构，可满足更大功率电子枪的运行需求，避免其高温损坏。

Claims (4)

1.一种整体式水冷铜坩埚，包括由侧壁（2）、底壁（3）组成的坩埚体（1），其特征在于：所述底壁（3）中的Ⅰ号进水孔（8）与Ⅰ号进水接头连通，Ⅰ号出水孔（12）与Ⅰ号出水接头（5）连通，Ⅱ号进水孔（13）与Ⅱ号进水接头（6）连通，Ⅱ号出水孔（17）与Ⅱ号出水接头（7）连通，所述Ⅰ号进水孔（8）与底壁（3）中回字形的Ⅰ号散热管路（9）连通，所述Ⅱ号进水孔（13）与底壁（3）中回字形的Ⅱ号散热管路（14）连通，所述Ⅰ号散热管路（9）通过Ⅰ号连接管（10）与侧壁（2）中L形的Ⅰ号出水管路（11）连通，所述Ⅱ号散热管路（14）通过Ⅱ号连接管（15）与侧壁（2）中L形的Ⅱ号出水管路（16）连通，所述Ⅰ号出水管路（11）与Ⅰ号出水孔（12）连通，所述Ⅱ号出水管路（16）与Ⅱ号出水孔（17）连通。
2.根据权利要求1所述的整体式水冷铜坩埚，其特征在于：所述Ⅰ号散热管路（9）、Ⅰ号出水管路（11）孔径均大于Ⅰ号连接管（10）孔径。
3.根据权利要求1所述的整体式水冷铜坩埚，其特征在于：所述Ⅱ号散热管路（14）、Ⅱ号出水管路（16）孔径均大于Ⅱ号连接管（15）孔径。
4.根据权利要求1所述的整体式水冷铜坩埚，其特征在于：所述的Ⅰ号散热管路（9）、Ⅰ号连接管（10）、Ⅰ号出水管路（11）、Ⅱ号散热管路（14）、Ⅱ号连接管（15）、Ⅱ号出水管路（16）均通过钻孔加工并通过钎焊堵头进行封堵而成。
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0248727A1 (fr) * 1986-06-03 1987-12-09 Commissariat A L'energie Atomique Four de fusion à induction haute fréquence
JPH03229862A (ja) * 1990-02-02 1991-10-11 Toshiba Corp 電子ビーム蒸発装置
CN101603776A (zh) * 2009-05-08 2009-12-16 北京航空航天大学 一种感应熔化冷坩埚
CN203258985U (zh) * 2012-12-15 2013-10-30 合肥迅达电器有限公司 一种感应熔炼炉的冷却水管道
CN105091584A (zh) * 2015-09-21 2015-11-25 核工业理化工程研究院 电子束熔炼炉用水冷坩埚
CN205048973U (zh) * 2015-08-21 2016-02-24 中国核电工程有限公司 一种冷坩埚装置
CN205747963U (zh) * 2016-05-12 2016-11-30 核工业理化工程研究院 一种整体式水冷铜坩埚

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160091249A1 (en) * 2014-09-25 2016-03-31 Battelle Energy Alliance, Llc. Crucibles for melting material and methods of transferring material therefrom

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0248727A1 (fr) * 1986-06-03 1987-12-09 Commissariat A L'energie Atomique Four de fusion à induction haute fréquence
JPH03229862A (ja) * 1990-02-02 1991-10-11 Toshiba Corp 電子ビーム蒸発装置
CN101603776A (zh) * 2009-05-08 2009-12-16 北京航空航天大学 一种感应熔化冷坩埚
CN203258985U (zh) * 2012-12-15 2013-10-30 合肥迅达电器有限公司 一种感应熔炼炉的冷却水管道
CN205048973U (zh) * 2015-08-21 2016-02-24 中国核电工程有限公司 一种冷坩埚装置
CN105091584A (zh) * 2015-09-21 2015-11-25 核工业理化工程研究院 电子束熔炼炉用水冷坩埚
CN205747963U (zh) * 2016-05-12 2016-11-30 核工业理化工程研究院 一种整体式水冷铜坩埚

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