CN105694748A - Belt for processing wafer - Google Patents

Belt for processing wafer Download PDF

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Publication number
CN105694748A
CN105694748A CN201510870713.8A CN201510870713A CN105694748A CN 105694748 A CN105694748 A CN 105694748A CN 201510870713 A CN201510870713 A CN 201510870713A CN 105694748 A CN105694748 A CN 105694748A
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CN
China
Prior art keywords
film
mold release
tape
bond layer
release film
Prior art date
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Granted
Application number
CN201510870713.8A
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Chinese (zh)
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CN105694748B (en
Inventor
青山真沙美
大田乡史
木村和宽
佐久间登
杉山二朗
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Furukawa Electric Co Ltd
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Furukawa Electric Co Ltd
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Publication of CN105694748A publication Critical patent/CN105694748A/en
Application granted granted Critical
Publication of CN105694748B publication Critical patent/CN105694748B/en
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00—Presence of (meth)acrylic polymer
    • C09J2433/006—Presence of (meth)acrylic polymer in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2461/00—Presence of condensation polymers of aldehydes or ketones
    • C09J2461/006—Presence of condensation polymers of aldehydes or ketones in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2463/00—Presence of epoxy resin
    • C09J2463/006—Presence of epoxy resin in the substrate

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Adhesive Tapes (AREA)

Abstract

The invention provides a belt for processing a wafer, which can reduces the production of the label trace and reduces the air involvement between the adhesion agent layer and the adhesion film. The belt for processing the wafer comprises a long blanking film (11), an adhesion agent layer (12) which is arranged on the first surface of the blanking film (11) and is of a regulated plane shape; the adhesion film (13) has a label part (13) and an outer layer circumference part (13b) surrounding the label part (13a); the label part (13a) covers the adhesion agent layer (12) which is in contact with the blanking film (11) and has a regulated plane shape; the support members (14) are arranged on the second surface of the blanking film (11) which is opposite to the adhesion layer (12), and are the two ends of the short edge of the blanking film and are arranged along the direction of the area corresponding to the end of the adhesion agent layer.

Description

Tape for processing wafer
Technical field
The present invention relates to tape for processing wafer, particularly relate to the tape for processing wafer with dicing tape and these 2 functions of chip junction film。
Background technology
Recently, develop the cutting-chip having dicing tape and chip junction film (also referred to as chip attachment film) these 2 functions concurrently and engage band, described dicing tape is used for fixing semiconductor wafer when being cut off and separate (cutting) for each chip by semiconductor wafer, described chip junction film is for by bonding with lead frame or base plate for packaging etc. for the semiconductor chip after cutting off, or is used for stacking between semiconductor chip, bonding in stacked package。
Band is engaged, it is contemplated that to workability such as the installations on paster ring frame when stickup with wafer, cutting, what have implements precut processing as such cutting-chip。
Cutting-chip after precut processing engages the example of band and is shown in Fig. 4 and Fig. 5。Fig. 4 is the figure, Fig. 5 (a) illustrating and cutting-chip engaging the state after the roll coil of strip is taken as roller shape is the top view that cutting-chip engages band, the sectional view of the line B-B that Fig. 5 (b) is Fig. 5 (a)。Cutting-chip engages band 50 and comprises mold release film 51, bond layer 52 and bonding film 53。Bond layer 52 is processed into the circle corresponding with the shape of wafer, has circular tag shape。Bonding film 53 is the film after the neighboring area of the circular portion corresponding with the shape of incisory paster ring frame is removed, as it can be seen, have circular tag portion 53a and surround the periphery 53b outside it。The center alignment stacking of the circular tag portion 53a of bond layer 52 and bonding film 53, and the circular tag portion 53a covering bond layer 52 of bonding film 53, and contacting with mold release film 51 about。
When cut crystal, mold release film 51 is peeled off from the bond layer 52 of laminated arrangement and bonding film 53, as shown in Figure 6, pasting the back side of semiconductor wafer W on bond layer 52, the peripheral part at the circular tag portion 53a of bonding film 53 is adhesively fixed cutting paster ring frame R。Cutting semiconductor chip W in this condition, afterwards, implements the cured such as ultraviolet radiation, picks up semiconductor chip bonding film 53。Now, due to cured, bonding force declines bonding film 53, is thus susceptible to peel off from bond layer 52, and semiconductor chip is picked with the state being attached with bond layer 52 overleaf。By time bonding with lead frame, base plate for packaging or other semiconductor chips for semiconductor chip after the bond layer 52 that the back side of semiconductor chip is adhered to, play a role as chip junction film。
It addition, cutting-chip as above engages in band 50, bond layer 52 is thick with the periphery 53b of the circular tag portion 53a of the bonding film 53 part specific adhesion film 53 being laminated。Therefore, when being roller shape as Product Volume, the discrepancy in elevation of the laminated portions of the circular tag portion 53a of bond layer 52 and bonding film 53 and the periphery 53a of bonding film 53 overlaps, and produces in the phenomenon of the soft bond layer 52 surface transfer discrepancy in elevation, i.e. transfer vestige (also referred to as label vestige, gauffer or volume print) shown in Fig. 7。The generation of such transfer vestige particularly when bond layer 52 is by soft resin formation or when there is thickness and cutting-chip joint with 50 volume number many time comparatively notable。And, if producing transfer vestige, then due to the poor attachment of bond layer Yu semiconductor wafer, likely come into question in the man-hour that adds of wafer。
In order to solve such problem, develop following tape for processing wafer: prop up a bearing member (referring for example to patent documentation 1) arranging with on the 1st contrary the 2nd being provided with bond layer and bonding film and the both ends of the short side direction of mold release film of mold release film。Such tape for processing wafer is owing to being provided with a bearing member, therefore when tape for processing wafer being batched into roller shape, can will put on batching pressure dispersion or making this pressure concentrate on a bearing member of adhesive tape, therefore, it is possible to the suppression transfer also formation on bond layer。
Prior art literature
Patent documentation
Patent documentation 1: No. 4360653 publications of Japanese Patent No.
Summary of the invention
The problem that invention to solve
But, it is said that in general, bonding film 53 covers bond layer 52 and is contacting with mold release film 51 about, due to the thickness of bond layer 52, sometimes between mold release film 51 and bonding film 53, atomic space is produced at the circumference of bond layer 52, thus residual air (air)。Air between such mold release film 51 and bonding film 53 is also sometimes moved and escapes to the outside of circular tag portion 53a, now physical property will not be caused appreciable impact。
But, when the propping up bearing member of thickness arranging more than the thickness with bond layer as the tape for processing wafer of patent documentation 1 in order to prevent transfer vestige, the outside of bond layer becomes have greater thicknesses, therefore there is the risk becoming that the air of bond layer circumference is easily lured the inner side to bond layer。
Therefore, the problem of the present invention is in that to provide a kind of tape for processing wafer, and described tape for processing wafer can reduce the generation of label vestige, and can reduce being involved in of air (air) between bond layer and bonding film。
The method solving problem
In order to solve above problem, tape for processing wafer involved in the present invention is characterised by having: long mold release film；Bond layer, it is arranged on the 1st of above-mentioned mold release film and has the flat shape of regulation；Bonding film, it has the periphery of label portion and the outside surrounding above-mentioned label portion, and above-mentioned label portion is arranged in the way of covering above-mentioned bond layer and contacting with above-mentioned mold release film around above-mentioned bond layer, and has the flat shape of regulation；And a bearing member, that it is arranged on above-mentioned mold release film upper with the 1st contrary the 2nd that be that be provided with above-mentioned bond layer and bonding film and be arranged on the both ends of short side direction of above-mentioned mold release film, and arrange in the way of region corresponding to the end with above-mentioned bond layer in the short side direction reaching above-mentioned mold release film。
It addition, above-mentioned semiconductor machining band is preferably: the total of the width of above-mentioned bearing member in the short side direction of above-mentioned mold release film is set to sD, the diameter of above-mentioned bond layer is set toWhen the length of the short side direction of above-mentioned mold release film is set to L,
It addition, above-mentioned semiconductor machining band is preferably: the linear expansion coefficient of above-mentioned bearing member is less than 300ppm/ DEG C。
It addition, above-mentioned semiconductor machining band is preferably: the difference of the linear expansion coefficient of the linear expansion coefficient of above-mentioned bearing member and above-mentioned mold release film is less than 250ppm/ DEG C。
It addition, the above-mentioned bonding film of above-mentioned semiconductor machining band is preferred: having adhesive phase and base material film, the confficient of static friction between above-mentioned base material film and above-mentioned bearing member is 0.2～2.0。
It addition, above-mentioned semiconductor machining band is preferably: above-mentioned bearing member is continuously provided along the long side direction of above-mentioned mold release film。
It addition, above-mentioned semiconductor machining band is preferably: above-mentioned bearing member has the thickness of more than the thickness of above-mentioned bond layer。
It addition, in above-mentioned semiconductor machining band, above-mentioned bearing member can be colored。Now, prop up bearing member preferably kind according to tape for processing wafer to be colored。Furthermore it is possible to the thickness according to tape for processing wafer is colored。
It addition, above-mentioned semiconductor machining band: preferably above-mentioned bearing member has 2 layers of layer above stack structure。
It addition, above-mentioned semiconductor machining band is preferably: above-mentioned bearing member is be coated with the bonding crossed belt of bonding mixture on the resin molding base material in polyethylene terephthalate, polypropylene and high density polyethylene (HDPE)。
It addition, above-mentioned semiconductor machining band is preferably: the ratio Eb/Ea of the stretching storage elastic modulus Ea of the above-mentioned mold release film stretched under the condition of storage elastic modulus Eb and 23 DEG C of the above-mentioned bonding film under 23 DEG C of conditions is 0.001～100。
It addition, above-mentioned semiconductor machining band is preferably: the ratio Ta/Tb of the thickness Ta of above-mentioned mold release film and the thickness Tb of above-mentioned bonding film is 0.07～2.5。
Additionally, above-mentioned semiconductor machining band is preferred: in the T-shaped disbonded test when temperature 23 ± 2 DEG C, peeling rate 300mm/min, peeling force F1 between above-mentioned bond layer and above-mentioned mold release film is 0.025～0.075N/100mm, peeling force F2 between above-mentioned bond layer and above-mentioned bonding film is 0.08～10N/100mm, F1 < F2。
Invention effect
In accordance with the invention it is possible to reduce the generation of label vestige, and being involved in of air (air) between bond layer and bonding film can be reduced。
Accompanying drawing explanation
The top view of the Fig. 1 (a) tape for processing wafer involved by embodiments of the present invention, (b) is the sectional view of the line A-A of (a)。
Fig. 2 is the sectional view of the tape for processing wafer involved by another embodiment of the present invention。
Fig. 3 is the sectional view of the tape for processing wafer involved by the yet another embodiment of the present invention。
Fig. 4 is the axonometric chart of existing tape for processing wafer。
Fig. 5 (a) is the top view of existing tape for processing wafer, and (b) is the sectional view of the line B-B of (a)。
Fig. 6 is the sectional view of the state after illustrating tape for processing wafer and cutting paster ring frame patch。
Fig. 7 is the schematic diagram of the problem for existing tape for processing wafer is described。
Detailed description of the invention
Embodiments of the present invention are explained below based on accompanying drawing。The top view of the Fig. 1 (a) tape for processing wafer (cutting-chip engages band) involved by embodiments of the present invention, the sectional view of the line A-A that Fig. 1 (b) is Fig. 1 (a)。
As shown in Fig. 1 (a) and Fig. 1 (b), tape for processing wafer 10 has long mold release film 11, bond layer 12, bonding film 13 and props up bearing member 14。
Bond layer 12 is arranged on the 1st of mold release film, has the circular tag shape corresponding with the shape of wafer。Bonding film 13 has the periphery 13b in the outside of circular tag portion 13a and encirclement this circular tag portion 13a, and described circular tag portion 13a is arranged in the way of covering bond layer 12 and contacting with mold release film around bond layer 12。Periphery 13b includes the form surrounded completely in the outside of circular tag portion 13a and the form do not surrounded completely as depicted。Circular tag portion 13a has the shape corresponding with incisory paster ring frame。And, bearing member 14 be arranged on mold release film 11 with on the 1st contrary for 11a the 2nd 11b being provided with bonding agent 12 and bonding film 13 and be arranged on the both ends of short side direction of mold release film 11, and arrange in the way of region corresponding to the end with bond layer 12 in the short side direction reaching mold release film 11。
Hereinafter each element of the tape for processing wafer 10 of present embodiment is described in detail。
(mold release film)
As the mold release film 11 used in the tape for processing wafer 10 of the present invention, it is possible to use polyester (PET, PBT, PEN, PBN, PTT) is, polyolefin (PP, PE) is, copolymer (EVA, EEA, EBA) is and the replacement of these material parts further increases the film of cementability, mechanical strength。Alternatively, it is also possible to be the duplexer of these films。
The thickness of mold release film is not particularly limited, it is possible to set aptly, it is preferable that 25～50 μm。
(bond layer)
The bond layer 12 of the present invention is formed as discussed above on the 1st 11a of mold release film 11, has the circular tag shape corresponding with the shape of wafer。
Bond layer 12 is rear in laminating cutting semiconductor chip etc., when picking up chip, be attached to chip back, use as bonding agent when chip is fixed on substrate, lead frame。As bond layer 12, it may be preferred to use the bonding mixture etc. containing at least one in epoxy system resin, acrylic resin, phenolic aldehyde system resin。Alternatively, it is also possible to use polyimides system resin, silicone-based resin。Its thickness can be suitable for setting, but preferably about 5～100 μm。
(bonding film)
The bonding film 13 of the present invention has the circular tag portion 13a corresponding with the shape of incisory paster ring frame as mentioned above and surrounds the periphery 13b outside it。Such bonding film can be formed by the neighboring area that precut processing removes circular tag portion 13a from film adhesive。
As bonding film 13, it is not particularly limited, as long as there is sufficient bonding force when cut crystal and not making wafer peel off, after dicing during pickup chip, demonstrate low bonding force to allow to easily peel off from bond layer, it is possible to be suitably used the film being such as provided with adhesive phase on base material film。
As the base material film of bonding film 13, as long as known film, it is possible to use without particular limitation, but use radiation curing material as adhesive phase described later time, it is preferred to use there is the radioparent film of radiation。
Such as, as its material, it is possible to enumerate: the homopolymer of the alpha-olefins such as polyethylene, polypropylene, ethylene-propylene copolymer, PB Polybutene-1, poly-4-methylpentene-1, vinyl-vinyl acetate copolymer, ethylene-ethyl acrylate copolymer, ethylene-methyl acrylate copolymer, ethylene-acrylic copolymers, ionomer or copolymer or their mixture, polyurethane, styrene-ethylene-butadiene or thermoplastic elastomer (TPE) and their mixture such as amylene based copolymer, polyamide-polyol copolymer。It addition, base material film can be the film of two or more material mixing in these, it is also possible to for the film of they single or multiple lifts。
The thickness of base material film is not particularly limited, it is possible to set aptly, but preferably 50～200 μm。
As the resin used in the adhesive phase of bonding film 13, it does not have limit especially, it is possible to use the known chlorinated polypropylene resin of use, acrylic resin, polyester resin, polyurethane resin, epoxy resin etc. in binding agent。
Binding agent is prepared preferably in the resin of adhesive phase 13 coordinates acrylic adhesive, radiation polymerizable compound, Photoepolymerizationinitiater initiater, firming agent etc. aptly。The thickness of adhesive phase 13 can be not particularly limited and set aptly, but preferably 5～30 μm。
After coordinating radiation polymerizable compound within the adhesive layer, pass through radiation curing, it is possible to easily peel off from bond layer。This radiation polymerizable compound, for instance can use and can irradiate, by light, the low molecular weight compound in molecule with more than at least 2 optical polymerism carbon-to-carbon double bonds that three-dimensional nettedization can occur。
Specifically, can apply: trimethylolpropane trimethacrylate, pentaerythritol triacrylate, tetramethylol methane tetraacrylate, dipentaerythritol monohydroxypentaacryande, dipentaerythritol acrylate, 1,4-butanediol diacrylate, 1,6-hexanediyl ester, polyethyleneglycol diacrylate, oligoester acrylate etc.。
It addition, except acrylate based compound as above, it is possible to use urethane acrylate system oligomer。Urethane acrylate system oligomer can pass through to make the polyol compound such as polyester-type or polyether-type with polyhydric isocyanate compound (such as, 2, 4-toluene di-isocyanate(TDI), 2, 6-toluene di-isocyanate(TDI), 1, 3-eylylene diisocyanate, 1, 4-eylylene diisocyanate, diphenyl methane 4, 4-diisocyanate etc.) reaction obtain terminal isocyanate carbamate prepolymer, make this terminal isocyanate carbamate prepolymer again and there is the acrylate of hydroxyl or methacrylate (such as, acrylic acid 2-hydroxy methacrylate, 2-hydroxyethyl methacrylate, acrylic acid 2-hydroxy propyl ester, methacrylic acid 2-hydroxy propyl ester, polyethylene glycol acrylate, polyethylene glycol methacrylate-styrene polymer etc.) reaction obtain。
Adhesive phase can be mixed with two or more in above-mentioned resin。
When using Photoepolymerizationinitiater initiater, for instance can use: isopropyl benzoin ether, isobutyl benzoin ether, benzophenone, Michler's keton, clopenthixal ketone, dodecyl thiaxanthone, dimethyl thioxanthone, diethyl thioxanthone, benzil dimethyl ketal, Alpha-hydroxy cyclohexyl-phenyl ketone, 2-hyd roxymethyl phenyl propane etc.。The use level of these Photoepolymerizationinitiater initiaters is relative to acrylic acid series copolymer 100 mass parts preferably 0.01～5 mass parts。
(bearing member)
The both ends with the 1st contrary for 11a the 2nd 11b being provided with bonding agent 12 and bonding film 13 and the short side direction for mold release film 11 that bearing member 14 is arranged on mold release film 11, and arrange in the way of region corresponding to the end with bond layer 12 in the short side direction reaching mold release film 11。Visible, by arranging a bearing member 14, thus when tape for processing wafer 10 is batched as roller shape, it is possible to make to put on batching pressure dispersion or making it concentrate on a bearing member 14 of adhesive tape, therefore, it is possible to suppress the formation being transferred on bond layer 12。
Additionally, arrange due in the way of the region that the bearing member 14 end with bond layer 12 in the short side direction reaching mold release film 11 is corresponding, therefore, it is possible to air (air's) that reduce between the circular tag portion 13a of bond layer 12 and bonding film 13 is involved in。Namely owing to tape for processing wafer 10 is curled as roller shape, therefore air is prone to concentrate in the short side direction of mold release film 11 between mold release film 11 and the circular tag portion 13a of the end portions of bond layer 12。In the present application, when tape for processing wafer 10 is taken up as roller shape, prop up bearing member 14 and reach the end of bond layer 12 in the short side direction of mold release film 11 across label portion 13a, the thickness of therefore corresponding with the end of bond layer 12 in the short side direction of mold release film 11 tape for processing wafer 10 entirety, with and the thickness of tape for processing wafer 10 entirety corresponding to the part in outside of bond layer 12 compared with, only the thickness of bond layer 12 thickens。Therefore, it is possible to prevent air invade inner side into bond layer 12 region, between bond layer 12 and the circular tag portion 13a of bonding film 13。
It addition, when the 1st 11a being provided with bonding agent 12 and bonding film 13 is formed and prop up bearing member, be there is restriction in the width of supporting course, on the other hand, in the composition of present embodiment, it is possible to widely guarantee the width of a bearing member 14, it is possible to more effectively suppress the generation of transfer vestige。
It addition, arrange a bearing member 14 by the 2nd 11b in mold release film 11, the effect making the permissibility of the position skew to a bearing member 14 increase thus can be obtained。
In addition, by arranging a bearing member 14 in the way of region corresponding with the end of bond layer 12 in the short side direction to reach mold release film 11, although thus likely producing the transfer vestige caused by a bearing member 14 in the end of bond layer 12, but generally speaking, consider that the laminating with wafer W is left white, bond layer 12 is bigger than wafer W, and wafer W is not fitted with the end of bond layer 12, and therefore there is no problem。Additionally, when producing the transfer vestige caused by a bearing member 14, it is produce along the long side direction of mold release film 11, but due to the direct of travel when long side direction of mold release film 11 is fit with wafer W, even therefore when the end bonded wafer W of bond layer 12, the air caused by vestige that transfers propping up bearing member 14 is also easy to scatter and disappear when laminating, and not easily remains in the interface with wafer W as hole。
In the short side direction of mold release film 11, a width of bearing member 14, radical are not particularly limited, but the total of the width of a bearing member 14 is set to sD, is set to by the diameter of bond layer 12When the length of the short side direction of mold release film 11 is set to L, it is preferred toMore preferably higher limit is within 15mm, and more preferably higher limit is within 10mm further。By being set asThus when tape for processing wafer 10 is batched as roller shape, it is however generally that, in bond layer 12, a bearing member 14 occurs the region of volume patch not fit with wafer W across label portion 13a。Width d1, d2, d3 of adding up to sD to be each bearing member of the width of bearing member 14 ... aggregate value。It addition, within the width D of each bearing member is preferably more than 5mm and 45mm。
Thickness as a bearing member 14, it is preferably the thickness suitable with the discrepancy in elevation of the laminated portions of the circular tag portion 13a of in mold release film 11, bond layer 12 and bonding film 13 Yu the periphery 13b of bonding film 13, namely identical with bond layer 12, or it is bond layer more than 12, more preferably more than 1.0 times of bond layer 12 and less than 4.0 times。By making to prop up the thickness of more than 1.0 times that bearing member 14 has bond layer 12, thus when batching adhesive tape 10, bonding film 13 contacts with the 2nd 11b of the mold release film 11 overlapping its surface or forms space non-contiguously between which, and therefore the 2nd 11b of mold release film 11 will not press on the bond layer 12 of softness strongly across bonding film 13。Therefore, it is possible to effectively suppress the generation of transfer vestige。On the other hand, by making to prop up the thickness of less than 4.0 times that bearing member 14 has bond layer, from there through the size controlling above-mentioned space, make space become excessive, it is possible to the state preventing becoming to be easily caused each interlayer that air invades bond layer 12, bonding film 13, mold release film 11。Fig. 2 is the sectional view of the example illustrating the bearing member 14 ' thicker than bonding agent oxidant layer 12。
Prop up bearing member 14 discontinuously or to be continuously provided along the long side direction of mold release film 11, but from the view point of more effectively suppress the generation of transfer vestige, it is preferable that the long side direction along base material film 11 is continuously provided。
A bearing member 14 of the present invention preferably has the linear expansion coefficient of less than 300ppm/ DEG C。Tape for processing wafer is placed under the environment that variations in temperature is big, such as tape for processing wafer when stored, transport time with-20 DEG C～about 5 DEG C maintenance low temperature states, additionally when by the bond layer of tape for processing wafer with wafer bonding, in order to make bonding agent thermoplastic thus improving cementability, with hot plate carry out about 70～80 DEG C add thermal-adhering etc.。When the size of bearing member 14 changes according to variations in temperature, likely immerse air between mold release film 11 and bonding film 13 and between bond layer 12 and bonding film 13 and produce hole, produce the laminating of wafer is bad, thus the decline of yield rate in the expansion process of the cutting action of the wafer after causing, adhesive tape and the pickup process of chip, installation procedure。In the present invention, by the bearing member that the linear expansion coefficient using less than 300ppm/ DEG C is low, it is possible to the generation of the transfer vestige being adequately suppressed on bond layer 12, even if simultaneously under the use environment that variations in temperature is big, the change in size propping up bearing member 13 is also few, it is possible to suppress the generation of hole。
The generation of generation and hole in order to more effectively suppress transfer vestige, the linear expansion coefficient of a bearing member 14 is preferably less than 150ppm/ DEG C, more preferably less than 70ppm/ DEG C。The lower limit of linear expansion coefficient is not particularly limited, and is generally 0.1ppm/ DEG C。
It addition, the difference of the linear expansion coefficient of the linear expansion coefficient of a bearing member 14 and mold release film 11 is preferably less than 250ppm/ DEG C。When the difference of linear expansion coefficient is more than 250ppm/ DEG C, produces the difference in size of a bearing member 14 and mold release film 11 due to the variations in temperature of room temperature state time when preserving with low temperature state when transporting and use, therefore there are following various problems。
(1), when producing difference in size due to variations in temperature, hole likely between mold release film 11 and bonding film 13 and between bond layer 12 and bonding film 13, is produced as mentioned above。
(2), when user operates with roller shape, the probability of volume collapse increases。In more detail, for instance even if being normally wound when manufacture, shipment, customer-side also produces difference in size when using from stored refrigerated to room temperature and when using stored refrigerated from room temperature, the probability of volume collapse increases。
(3) being wound as between the sheet of roller shape produce gap due to difference in size, the probability that foreign body is mixed into from roller side increases。
(4) when the volume number of tape for processing wafer is many, goods width width time, when proceeding by stored refrigerated from room temperature, roller core side is different from the rate of cooling of roller outer circumferential side。Therefore, at roller core side and roller outer circumferential side, the bearing member 14 caused by line differential expansion is different from the difference in size of mold release film 11, and the probability that the shape of whole roller changes is high。
In the present invention, linear expansion coefficient refers to the ratio that when changing temperature under a constant, the spatial expansion of object increases。Temperature is set to T, when the length of this solid is set to L, its linear expansion coefficient α is provided by below equation。
&alpha; = ( 1 / L ) &CenterDot; ( &part; L / &part; T )
Additionally, the mensuration of the linear expansion coefficient in the present invention such as can according to the linear expansivity test method of JISK7197, the thermo-mechanical analysis of plastics, use thermo-mechanical analysis device (TMA), the sample being cut to length 15mm, width 5mm, chuck spacing 10mm is installed, at tensile load 10g, programming rate 5 DEG C/min, N2Under gas atmosphere, measure temperature range-20 DEG C～50 DEG C when be measured。
It addition, from the view point of prevent the winding skew of tape for processing wafer 10, bearing member 14 has the material of coefficient of friction to a certain degree preferably with respect to bonding film 13。Thus, following effect can be obtained: be prevented from the winding skew of tape for processing wafer 10, carry out high-speed wind-up, it is possible to increase and batch number。
The confficient of static friction propped up between bearing member 14 and the base material film of bonding film 13 is preferably 0.2～2.0, more preferably 0.6～1.6。When tape for processing wafer being batched into roller shape, the bearing member 14 that the periphery 13a of the bonding film 13 arranged in the 1st 11a side of mold release film 11 is arranged with the 2nd the 11b side in mold release film 11 contacts, therefore, when propping up the confficient of static friction between bearing member 14 and the base material film of bonding film 13 less than 0.2, during fabrication, become easily to produce winding skew when using, thus operability worsens。On the other hand, during more than 2.0, the resistance between the base material film of bonding film 13 and a bearing member 14 is excessive, and the operability in manufacturing process worsens, or causes that bending is advanced when high-speed wind-up etc.。Therefore, by confficient of static friction between the two is set as above-mentioned scope, following effect thus can be obtained: be prevented from the winding skew of tape for processing wafer 10, it is possible to carry out high-speed wind-up, it is possible to increase and batch number。
In the present invention, the confficient of static friction propped up between bearing member 14 and the base material film of bonding film 13 based on JISK7125, can be obtained by following assay method。
Two membrane samples of the base material film with a bearing member 14 that are cut to the bonding film 13 of 25mm (width) × 100mm (length) respectively are overlapped, the film of fixing downside。Then, above the film being laminated, load the weight of weight 200g, as load W, with the film on the upside of the speed tensile of 200mm/min, measure the power Fd (g) when skidding off, obtain confficient of static friction (μ d) from below equation。
μ d=Fd/W
As a bearing member 14, for instance the bonding crossed belt being coated with bonding mixture at resin molding base material can be suitably used。By such bonding crossed belt being pasted on the assigned position of the two end portions of the 2nd 11b of mold release film 11, it is possible to be formed the tape for processing wafer 10 of present embodiment。
Substrate resin as bonding crossed belt, as long as meeting the scope of above-mentioned linear expansion coefficient and being capable of withstanding by crimped, it is not particularly limited, but from the view point of thermostability, flatness and easness of starting with, it is preferable that selected from polyethylene terephthalate (PET), polypropylene and high density polyethylene (HDPE)。
The composition of binding agent and physical property about bonding crossed belt, it does not have be particularly limited to, as long as the coiling process and preserving in operation at tape for processing wafer 10 is not peeled off from mold release film 11。
It addition, as a bearing member 14, the bearing member being colored can be used。By using such painted bearing member, when tape for processing wafer being batched into roller shape, it is possible to positively identify the kind of band。Such as, change the color of painted bearing member 14 according to the kind of tape for processing wafer, thickness, it is possible to easily identify the kind of band, thickness, it is possible to suppress, prevent artificial mistake。
It addition, about the ratio stretching storage elastic modulus Ea of the mold release film 11 stretched under storage elastic modulus Eb and 23 DEG C conditions of the bonding film 13 under 10,23 DEG C of conditions of tape for processing wafer preferably in the scope of Eb/Ea0.001～100。
The value of above-mentioned Eb/Ea is more big, then relatively bonding film 13 is more hard, mold release film 11 is more soft。On the other hand, the value of above-mentioned Eb/Ea is more little, then relatively bonding film 13 is more soft, mold release film 11 is more hard。According to above-mentioned composition, Eb/Ea is more than 0.001, and therefore the hardness (stretching storage elastic modulus Eb) of bonding film reaches more than necessarily。Therefore, it is possible to suppress to produce transfer vestige on the bond layer 12 constituting tape for processing wafer 10。Additionally, above-mentioned Eb/Ea is more than 0.001, the hardness (stretching storage elastic modulus Eb) of bonding film 13 reaches more than necessarily, therefore when being fitted in semiconductor wafer W, it is possible to suitably bonding film 13 and mold release film 11 are peeled off (loll (ベ mouth goes out ))。
It addition, above-mentioned Eb/Ea is less than 100, therefore the hardness (stretch storage elastic modulus Ea) of mold release film 11 reach certain more than, on the other hand, the hardness (stretching storage elastic modulus Eb) of bonding film 13 be necessarily below。Therefore, when bond layer 12 is fitted to mold release film 11, it is possible to suppress mold release film 11 to produce to fracture, it is possible to prevent the surface of scuffing bond layer 12 or bubble to be mixed into intermembranous。As a result, it is possible to suppress the film of mold release film 11 to tilt, produce hole when the installation of semiconductor wafer W between bond layer 12 and semiconductor wafer W。
Visible, according to above-mentioned composition, can suppress when batching as roller shape to produce transfer vestige at bond layer 12。It addition, the film of mold release film 11 can be suppressed to tilt, produce hole when the installation of semiconductor wafer W between bond layer 12 and semiconductor wafer W。
In above-mentioned composition, the thickness of mold release film 11 is preferably 10～100 μm, and the thickness of bonding film 13 is preferably 25～180 μm。
It addition, in above-mentioned composition, the stretching storage elastic modulus Eb of the bonding film 13 under 23 DEG C of conditions is preferably 1～500MPa, the stretching storage elastic modulus Ea of the mold release film 11 under 23 DEG C of conditions is preferably 1～5000MPa。
It addition, in above-mentioned composition preferably: the glass transition temperature of bond layer 12 is in the scope of 0～100 DEG C, and the storage elastic modulus that stretches solidified under front 23 DEG C of conditions is the scope of 50MPa～5000MPa。It is more than 0 DEG C by making the glass transition temperature of bond layer 12, it is possible to suppress the viscosity of the bond layer 12 under B-stage state to increase, it is possible to maintain good operability。It addition, when cutting, it is possible to prevent a part of bond layer 12 from occurring melted and making adhesive attachment in semiconductor chip。As a result, it is possible to maintain the good pick of semiconductor chip。On the other hand, by making glass transition temperature be less than 100 DEG C, it is possible to prevent the decline of the mobility of bond layer 12。It addition, also be able to maintain the good cementability with semiconductor wafer W。Additionally, when bond layer 12 is thermohardening type, the glass transition temperature of bond layer 12 refers to the glass transition temperature before heat cure。It addition, be more than 50MPa by making the stretching storage elastic modulus solidified under front 23 DEG C of conditions of bond layer 12, thus when cutting, it is possible to prevent a part of bond layer 12 from occurring melted and making adhesive attachment in semiconductor chip。On the other hand, by making stretching storage elastic modulus be below 5000MPa, thus it also is able to maintain and the good cementability of semiconductor wafer W, substrate。
It addition, when the thickness of mold release film 11 being set to Ta, the thickness of bonding film 13 is set to Tb, the Ta/Tb of tape for processing wafer 10 is preferably in the scope of 0.07～2.5。
About above-mentioned Ta/Tb, for instance, make thickness Ta mono-timing of mold release film 11, its value is more little, then bonding film 13 is more thick。According to above-mentioned composition, Ta/Tb is more than 0.07, is therefore laminated with the discrepancy in elevation of the part of bonding film 13 and the part of non-laminate adhesive film 13 for below certain。Therefore, it is possible to suppress the generation of transfer vestige。It addition, above-mentioned Ta/Tb be more than 0.07, the thickness of bonding film 13 be thicker than the thickness of mold release film 11, therefore can absorb stress by the thickness of mold release film 11, it is possible to suppress the generation of transfer vestige。It addition, above-mentioned Ta/Tb be more than 0.07, the thickness of bonding film 13 be thicker than the thickness of mold release film 11, therefore when being fitted in semiconductor wafer W, it is possible to suitably bonding film 13 and mold release film 11 are peeled off (lolling)。It addition, about above-mentioned Ta/Tb, for instance making thickness Tb mono-timing of bonding film 13, its value is more little, then the thickness of mold release film 11 is more thin。Above-mentioned Ta/Tb is less than 2.5, therefore the thickness of mold release film 11 be certain below。Therefore, the part being laminated with bonding film 13 is good with the tracing ability of the discrepancy in elevation of the part of non-laminate adhesive film 13。It addition, above-mentioned Ta/Tb be less than 2.5, the thickness of mold release film 11 for below certain, therefore, it is possible to make pressure when bonding film 13 is laminated to mold release film become uniform, it is possible to prevent being mixed into of bubble。Visible, according to above-mentioned composition, when the tape for processing wafer 10 stacking gradually bond layer 12 and mold release film 11 on bonding film 13 is batched as roller shape, it is possible to suppress to produce transfer vestige at bond layer 12。
In above-mentioned composition, in T-shaped disbonded test when temperature 23 ± 2 DEG C, peeling rate 300mm/min, preferred: the peeling force F1 between bond layer 12 and mold release film 11 is in the scope of 0.025～0.075N/100mm, peeling force F2 between bond layer 12 and bonding film 13 is in the scope of 0.08～10N/100mm, and above-mentioned F1 and above-mentioned F2 meets the relation of F1 < F2。
From the view point of prevent to relax, batch skew, position skew, hole (bubble) etc., bonding film 13, bond layer 12, mold release film 11 are being manufactured tape for processing wafer 10 while applying tensile stress。As a result, tape for processing wafer 10 is manufactured when there is stretching overstrain in the either film constituting it。When this stretching overstrain is such as transported or preserved for a long time under the low temperature state of-30～10 DEG C, in each film, cause contraction。It addition, the physical property of each film is different, the degree therefore shunk is also different。Such as, in each film, the shrinkage degree of bonding film 13 is maximum, and the shrinkage degree of mold release film 11 is minimum。As a result, between bonding film 13 and bond layer 12, produce interface peel, or cause the film of mold release film 11 to tilt phenomenon。
The above-mentioned basis being configured in the scope making the peeling force F1 between bond layer 12 and mold release film 11 be 0.025～0.075N/100mm and the scope making the peeling force F2 between bond layer 12 and bonding film 13 be 0.08～10N/100mm meets the composition of the relation of F1 < F2。As mentioned above, in contraction in each film, bonding film is maximum, therefore by making the peeling force F2 between bond layer 12 and bonding film 13 more than the peeling force F1 between bond layer 12 and mold release film 11, it is possible to the contraction of the bonding film 13 suppressing shrinkage factor maximum, it is prevented that interface peel, the film of mold release film 11 between bonding film 13 and bond layer 12 tilt phenomenon。It addition, also be able to prevent part or all of bond layer 12 to be transferred to mold release film 11。
Embodiment
Then, embodiments of the invention are described, but the present invention is not limited to these embodiments。
(1) mold release film
Prepare mold release film shown below。
Mold release film A1: thickness 25 μm, width 390mm the silicone demoulding process after polyethylene terephthalate film (stretching storage elastic modulus is 4070MPa, and linear expansion coefficient is 60ppm)
Mold release film A2: thickness 100 μm, width 390mm the silicone demoulding process after polyethylene terephthalate film (stretching storage elastic modulus is 3910MPa, and linear expansion coefficient is 60ppm)
Mold release film A3: thickness 12 μm, width 390mm the silicone demoulding process after polyethylene terephthalate film (stretching storage elastic modulus is 4020MPa, and linear expansion coefficient is 60ppm)
Mold release film A4: thickness 38 μm, width 390mm the silicone demoulding process after polyethylene terephthalate film (stretching storage elastic modulus is 4020MPa, and linear expansion coefficient is 60ppm)
Mold release film A5: thickness 25 μm, width 390mm the silicone demoulding process after Low Density Polyethylene (LDPE) film (stretching storage elastic modulus is 105MPa, and linear expansion coefficient is 230ppm)
(2) making of bonding film
<bonding film B1>
As the acrylic acid series copolymer with functional group, preparation comprises the copolymer that ratio is 60 moles of %, matter average molecular weight 700,000 of 2-EHA, acrylic acid 2-hydroxy methacrylate and methacrylic acid, 2-EHA。Then, add methacrylic acid 2-isocyanato ethyl and make iodine number reach 20, prepare the acrylic acid series copolymer (b-1) of glass transition temperature-50 DEG C, hydroxyl value 10mgKOH/g, acid number 5mgKOH/g。
Relative to acrylic acid series copolymer (b-1) 100 mass parts, add CoronateL (Japanese polyurethane system) 5 mass parts as polyisocyanate, add EsacureKIP150 (Lamberti company system) 3 mass parts as Photoepolymerizationinitiater initiater, gained mixture is dissolved in ethyl acetate, stirring, prepares adhesive composition。
Then, the release liner comprising polyethylene terephthalate film after the demoulding processes applies this adhesive composition, making dried thickness is 10 μm, after drying 3 minutes at 110 DEG C, with comprise vinyl-vinyl acetate copolymer (east Cao's system, ウ Le ト ラ セ Application 636) base material film (thickness 50 μm) laminating, make thickness 60 μm bonding film B1。Stretching storage elastic modulus is 40MPa。
<bonding film B2>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 5 μm, after drying 3 minutes at 110 DEG C, with comprise Low Density Polyethylene (LDPE, without the demoulding process) base material film (thickness 40 μm) laminating, make thickness 45 μm bonding film B2。Stretching storage elastic modulus is 105MPa。
<bonding film B3>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 10 μm, after drying 3 minutes at 110 DEG C, with ionomer (the three well Du Pont polymerization lengths of schooling comprising ethylene-methyl methacrylate analog copolymer, Ha イ ミ ラ Application 1554) base material film (thickness 150 μm) laminating, make thickness 160 μm bonding film B3。Stretching storage elastic modulus is 301MPa。
<bonding film B4>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 10 μm, after drying 3 minutes at 110 DEG C, with ionomer (the three well Du Pont polymerization lengths of schooling comprising ethylene-methyl methacrylate analog copolymer, Ha イ ミ ラ Application 1554) base material film (thickness 110 μm) laminating, make thickness 120 μm bonding film B4。Stretching storage elastic modulus is 289MPa。
<bonding film B5>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 10 μm, after drying 3 minutes at 110 DEG C, with comprise Ethylene-Propylene Block Copolymer (PrimePolymer system, PrimePolyproF707W) base material film (thickness 110 μm) laminating, makes the bonding film B5 of thickness 120 μm。Stretching storage elastic modulus is 980MPa。
(3) formation of bond layer
<bond layer C1>
Comprising epoxy resin " YX4000 " (Mitsubishi Chemical's system, biphenyl novolac type epoxy resin, epoxide equivalent 185) 15.0 mass parts, phenolic resin " LF-6161 " (DIC system, novolac type phenolic resin, hydroxyl equivalent 118) 40.0 mass parts, epoxy resin " Epicoat828 " (Mitsubishi Chemical's system, bisphenol A type epoxy resin, epoxide equivalent 190) 45.0 weight portions, " AerosilR972 " (Japan's Aerosil system as silica filler, the mean diameter of primary particle size 0.016 μm) 5 mass parts compositions in add MEK, stirring mixing, obtain uniform compositions。
Be added thereto to as the polymer containing functional group, containing from the acrylic copolymer (weight average molecular weight 850,000 of glycidyl acrylate or the monomeric unit of methyl propenoic acid glycidyl base ester, Tg20 DEG C) 66.7 mass parts, " KBM-802 " (SHIN-ETSU HANTOTAI's silicone system as coupling agent, mercaptopropyi trimethoxy silane) 0.6 mass parts and as curing accelerator " Curezol2PHZ-PW " (four countries chemical conversion system, 2-phenyl-4,5-bishydroxymethyl imidazoles, decomposition temperature 230 DEG C) 0.1 mass parts, stirring mixing is until uniformly。Then filter gains with 100 order filters, and carry out vacuum defoamation, thus obtain the varnish (c-1) of adhesive composite。
With spreader, this varnish (c-1) is coated on mold release film A1 so that dry film thickness is 30 μm, dries 5 minutes at 120 DEG C, make the bond layer C1 of thickness 30 μm。
<bond layer C2>
With spreader, varnish (c-1) is coated on mold release film A2 so that dry film thickness is 30 μm, dries 5 minutes at 120 DEG C, make the bond layer C2 of thickness 30 μm。
<bond layer C3>
With spreader, varnish (c-1) is coated on mold release film A1 so that dry film thickness is 60 μm, dries 8 minutes at 120 DEG C, make the bond layer C3 of thickness 60 μm。Afterwards, bond layer C3 is transferred to mold release film A3 from mold release film A1。
<bond layer C4>
With spreader, varnish (c-1) is coated on mold release film A4 so that dry film thickness is 60 μm, dries 8 minutes at 120 DEG C, prepare 2 films so obtained, they are carried out stacking at 70 DEG C, thus makes the bond layer C4 of thickness 120 μm, peel off a mold release film A4。
<bond layer C5>
With spreader, varnish (c-1) is coated on mold release film A4 so that dry film thickness is 60 μm, dries 8 minutes at 120 DEG C, make the bond layer C5 of thickness 60 μm。
<bond layer C6>
With spreader, varnish (c-1) is coated on mold release film A4 so that dry film thickness is 60 μm, dries 8 minutes at 120 DEG C, make the bond layer C6 of thickness 60 μm。Afterwards, transfer from mold release film A4, obtain the combination of mold release film A5 and bond layer C6。
<bond layer C7>
With spreader, varnish (c-1) is coated on demoulding base material A1 so that dry film thickness is 30 μm, dries 5 minutes at 120 DEG C, make the bond layer C7 of thickness 20 μm。
<bond layer C8>
Comprising epoxy resin " 1002 " (Mitsubishi Chemical's system, solid bisphenol A type epoxy resin, epoxide equivalent 600) 40 mass parts, epoxy resin " 806 " (Mitsubishi Chemical's system, bisphenol f type epoxy resin, epoxide equivalent 160, proportion 1.20) 100 mass parts, firming agent " Dyhard100SF " (DEGUSSA system, dicyandiamide) 5 mass parts, (ADMAFINE (ア De マ Off ア イ Application) makes silica filler " SO-C2 ", mean diameter 0.5 μm) 200 mass parts, with " AerosilR972 " (the Japan's Aerosil system as silica filler, the mean diameter of primary particle size 0.016 μm) 3 mass parts compositions in add MEK, stirring mixing, obtain uniform compositions。
Add phenoxy resin " PKHC " (INCHEM system wherein, matter average molecular weight 43,000, glass transition temperature 89 DEG C) 100 mass parts, " KBM-802 " (SHIN-ETSU HANTOTAI's silicone system as coupling agent, mercaptopropyi trimethoxy silane) 0.6 mass parts and as curing accelerator " Curezol2PHZ-PW " (four countries chemical conversion system, 2-phenyl-4,5-bishydroxymethyl imidazoles, decomposition temperature 230 DEG C) 0.5 mass parts, stirring mixing is until uniformly。Then filter gains with 100 order filters, and carry out vacuum defoamation, thus obtain the varnish (c-2) of adhesive composite。
With spreader, this varnish (c-2) is coated on mold release film A4 so that dry film thickness is 60 μm, dries 8 minutes at 120 DEG C, make the bond layer C8 of thickness 60 μm。
(4) making of bearing member is propped up
<a bearing member D1>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 5 μm, after drying 3 minutes at 110 DEG C, fit with the resin molding base material (thickness 25 μm) comprising polyethylene terephthalate (processing without the demoulding) and transfer, making a bearing member D1 of thickness 30 μm, width 36mm。Linear expansion coefficient is 60ppm。
<a bearing member D2>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 25 μm, after drying 3 minutes at 110 DEG C, with comprise polypropylene (OPP, process without the demoulding) resin molding base material (thickness 50 μm) fit and transfer, make a bearing member D2 of thickness 75 μm, width 36mm。Linear expansion coefficient is 120ppm。
<a bearing member D3>
Being cut by the TW-PLT (TANIMURA system) of the commercially available dustless production line adhesive tape as used in dustless room is width 36mm, uses as a bearing member D3。The resin molding base material that the polyethylene terephthalate layer of the polyvinyl chloride layer and thickness 12 μm with thickness 75 μm is folded, total thickness 142 μm, linear expansion coefficient is 80ppm。
<a bearing member D4>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 25 μm, after drying 3 minutes at 110 DEG C, with comprise Low Density Polyethylene (LDPE, process without the demoulding) resin molding base material (thickness 50 μm) fit and transfer, make a bearing member D4 of thickness 75 μm, width 36mm。Linear expansion coefficient is 230ppm。
<a bearing member D5>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 25 μm, after drying 3 minutes at 110 DEG C, fit with the resin molding base material (thickness 50 μm) comprising polyethylene terephthalate (processing without the demoulding) and transfer, making a bearing member D5 of thickness 75 μm, width 44mm。Linear expansion coefficient is 60ppm。
<a bearing member D6>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 25 μm, after drying 3 minutes at 110 DEG C, fit with the base material film (thickness 50 μm) comprising polyethylene terephthalate (processing without the demoulding) and transfer, making a bearing member D6 of thickness 75 μm, width 40mm。Linear expansion coefficient is 60ppm。
<a bearing member D7>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 25 μm, after drying 3 minutes at 110 DEG C, fit with the resin molding base material (thickness 75 μm) comprising polyethylene terephthalate (processing without the demoulding) and transfer, making a bearing member D7 of thickness 100 μm, width 40mm。Linear expansion coefficient is 60ppm。
<a bearing member D8>
The release liner comprising polyethylene terephthalate film after the demoulding processes applies above-mentioned adhesive composition, making dried thickness is 25 μm, after drying 3 minutes at 110 DEG C, fit with the resin molding base material (thickness 75 μm) comprising polyethylene terephthalate (processing without the demoulding) and transfer, making a bearing member D8 of thickness 100 μm, width 35mm。Linear expansion coefficient is 60ppm。
(embodiment 1)
Cryopreserved formation bond layer C1 on mold release film A1 is recovered room temperature, to bond layer C1 after being adjusted in the way of reaching the penetraction depth of less than 1/2 of the thickness of mold release film A1, carries out the circular precut processing of diameter 320mm。Afterwards, remove bond layer C1 do not need part, by bonding film B1 in the way of making its adhesive phase contact with bond layer at room temperature with mold release film A1 lamination。Then, to bonding film B1 after being adjusted in the way of reaching the penetraction depth of less than 1/2 of the thickness of mold release film A1, to be the circular precut processing that concentric circles carries out diameter 370mm with bond layer C1, with the tension coiling 300 of 15N。Then, both ends laminating the bearing member D1 of the face contrary with the face being provided with bond layer C1 and bonding film B1 on mold release film A1 and the short side direction at mold release film A1, make the tape for processing wafer of embodiment 1。It is configured as follows: the total of the width of in the short side direction of mold release film bearing member is set to sD, is set to by the diameter of bond layerWhen the length of the short side direction of mold release film is set to L, forProp up bearing member and reach region 2mm corresponding with the end of bond layer in the short side direction of mold release film。
(embodiment 2～8, comparative example 1)
According to method similarly to Example 1, make the tape for processing wafer of embodiment 2～8 and comparative example 1 with the combination of table 1。Additionally, the amount that a bearing member arrives region corresponding with the end of bond layer in the short side direction of mold release film is recorded in table 2 as coincidence A (mm)。
[table 1]
[evaluating with presence or absence of the intrusion of air and transfer vestige]
The tape for processing wafer of embodiment and comparative example is accommodated in the bag of polyethylene, carries out heat seal after degassed, the side plate of polypropylene is installed on both ends。Then, in the way of becoming cross, bind 2 PP be with and carry out melted joint。Afterwards, after (5 DEG C) preserve 1 month in refrigerator by each package body, take out from refrigerator, be accommodated in packing crates together with the dry ice of tabular, be placed in transport truck, come and go between flat～autumn fields (about 1000km)。Now, the minimum temperature of packing crates is-43 DEG C, and maximum temperature is 7 DEG C。Afterwards, opening each package body, recover to open the package to room temperature by reel, untie roller, visualization air is to the presence or absence of the intrusion between bond layer and mold release film, and transfers the presence or absence of vestige in MD, TD all directions。Its result is as shown in table 2。
[the inhibition evaluation of the hole after installation]
The adhesive sheet of embodiment and comparative example is accommodated in the bag of polyethylene, carries out heat seal after degassed, the side plate of polypropylene is installed on both ends。Then, in the way of becoming cross, bind 2 PP be with and carry out melted joint。Afterwards, after (5 DEG C) preserve 1 month in refrigerator by each package body, take out from refrigerator, be accommodated in packing crates together with the dry ice of tabular, be placed in transport truck, come and go between flat～autumn fields (about 1000km)。Now, the minimum temperature of packing crates is-43 DEG C, and maximum temperature is 7 DEG C。Afterwards, open each package body, recover to open the package to room temperature by reel, be mounted to semiconductor wafer。As semiconductor wafer, use and be sized to 12 inches, the wafer of thickness 50 μm。The mounting condition of semiconductor wafer is as described below。
<laminating condition>
Sticker: wafer placement equipment DAM-812M (Takatori system)
Labeling rates meter: 50mm/sec
Application pressing force: 0.1MPa
Sticking temperature: 60 DEG C, 90 DEG C
Afterwards, confirm that the binding face of tape for processing wafer and semiconductor wafer has imporosity (bubble) by microscope。Its result is as shown in table 2。
[table 2]
As shown in table 2, in tape for processing wafer involved by embodiment, prop up bearing member to arrange in the way of the both ends of the short side direction of mold release film and region corresponding with the end of bond layer in the short side direction reach mold release film, therefore do not see the intrusion of the air inner side to bond layer。Though it addition, see the transfer vestige caused by bearing member on TD direction, in MD side, TD direction do not see the label vestige randomly generated。Although it addition, create the transfer vestige propped up caused by bearing member on TD direction, but due to the outside for wafer fit area, therefore not producing hole when wafer is fitted。
On the other hand, in tape for processing wafer involved by comparative example, bearing member to arrange in the way of the both ends of the short side direction of mold release film and region corresponding with the end of bond layer in not up to the short side direction of mold release film, thus while in MD direction, TD direction all do not see transfer vestige, but air invades the inner side of bond layer, when wafer is fitted, a part creates hole。
Symbol description
10: tape for processing wafer
11: mold release film
12: bond layer
13: bonding film
13a: circular tag portion
13b: periphery
14,14 ', 14 ": a bearing member

Claims (15)

1. a tape for processing wafer, it is characterised in that
Have:
Long mold release film,
Bond layer, it is arranged on the 1st of described mold release film and has the flat shape of regulation,
Bonding film, it has the periphery of label portion and the outside surrounding described label portion, and described label portion is arranged in the way of covering described bond layer and contacting with described mold release film around described bond layer, and has the flat shape of regulation, and
Prop up bearing member, that it is arranged on described mold release film upper with the 1st contrary the 2nd that be that be provided with described bond layer and bonding film and be arranged on the both ends of short side direction of described mold release film, and arrange in the way of region corresponding to the end with described bond layer in the short side direction reaching described mold release film。
2. tape for processing wafer as claimed in claim 1, it is characterised in that
The total of the width of described in the short side direction of described mold release film bearing member is set to sD, the diameter of described bond layer is set toWhen the length of the short side direction of described mold release film is set to L,
3. tape for processing wafer as claimed in claim 1 or 2, it is characterised in that
The linear expansion coefficient of described bearing member is less than 300ppm/ DEG C。
4. tape for processing wafer as claimed any one in claims 1 to 3, it is characterised in that
The difference of the linear expansion coefficient of the linear expansion coefficient of described bearing member and described mold release film is less than 250ppm/ DEG C。
5. the tape for processing wafer as according to any one of Claims 1-4, it is characterised in that
Described bonding film has adhesive phase and base material film,
Confficient of static friction between described base material film and described bearing member is 0.2～2.0。
6. the tape for processing wafer as according to any one of claim 1 to 5, it is characterised in that
Described bearing member is continuously provided along the long side direction of described mold release film。
7. the tape for processing wafer as according to any one of claim 1 to 6, it is characterised in that
Described bearing member has the thickness of more than the thickness of described bond layer。
8. the tape for processing wafer as according to any one of claim 1 to 7, it is characterised in that
Described bearing member is colored。
9. tape for processing wafer as claimed in claim 8, it is characterised in that
Described bearing member is colored according to the kind of tape for processing wafer。
10. tape for processing wafer as claimed in claim 8, it is characterised in that
Described bearing member is colored according to the thickness of tape for processing wafer。
11. the tape for processing wafer as according to any one of claim 1 to 10, it is characterised in that
Described bearing member has 2 layers of layer above stack structure。
12. the tape for processing wafer as according to any one of claim 1 to 11, it is characterised in that
Described bearing member is be coated with the bonding crossed belt of bonding mixture on the resin molding base material in polyethylene terephthalate, polypropylene and high density polyethylene (HDPE)。
13. the tape for processing wafer as according to any one of claim 1 to 12, it is characterised in that
The ratio Eb/Ea of the stretching storage elastic modulus Ea of the described mold release film stretched under the condition of storage elastic modulus Eb and 23 DEG C of the described bonding film under 23 DEG C of conditions is 0.001～100。
14. the tape for processing wafer as according to any one of claim 1 to 13, it is characterised in that
The ratio Ta/Tb of the thickness Ta of described mold release film and the thickness Tb of described bonding film is 0.07～2.5。
15. the tape for processing wafer as according to any one of claim 1 to 14, it is characterised in that
Temperature 23+2 DEG C, peeling rate 300mm/min when T-shaped disbonded test in,
Peeling force F1 between described bond layer and described mold release film is 0.025～0.075N/100mm,
Peeling force F2 between described bond layer and described bonding film is 0.08～10N/100mm,
F1 < F2。
CN201510870713.8A 2014-12-04 2015-12-02 Tape for processing wafer Active CN105694748B (en)

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JP5276063B2 (en) 2010-07-16 2013-08-28 古河電気工業株式会社 Sheet for semiconductor wafer dicing and die bonding
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KR101828135B1 (en) 2018-02-09
TWI613716B (en) 2018-02-01
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JP2016111157A (en) 2016-06-20
KR20160067754A (en) 2016-06-14
TW201633387A (en) 2016-09-16

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