CN105692545A - Electric heating activating device of getter - Google Patents
Electric heating activating device of getter Download PDFInfo
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- CN105692545A CN105692545A CN201610207890.2A CN201610207890A CN105692545A CN 105692545 A CN105692545 A CN 105692545A CN 201610207890 A CN201610207890 A CN 201610207890A CN 105692545 A CN105692545 A CN 105692545A
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- electrical heating
- getter
- bridge floor
- activates device
- tinsel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
- B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
The invention provides an electric heating activating device of a getter. The electric heating activating device comprises a supporting bridge deck prepared from a high-temperature-resisting insulating material; the supporting bridge deck is established through conductive bridge piers; a gettering material layer is arranged on the supporting bridge deck and is heated and activated through an electric heating metal wire; and the electric heating metal wire is electrically connected with the conductive bridge piers to form a power supply circuit. When the electric heating activating device of the getter is used, the electric heating metal wire is electrified and heated under a high vacuum condition; a resistance value is detected intermittently by utilizing a thermal resistance effect, so that closed-loop temperature detection is realized and accurate temperature control is guaranteed; and a gettering material is sufficiently activated so that the gettering efficiency is improved, and the performance and service life of related vacuum devices are guaranteed.
Description
Technical field
The present invention relates to a kind of getter heat activation device, be specifically related to a kind of getter electrical heating and activate device。
Background technology
Adopting the intelligence sensor that MEMS technology manufactures, such as acceleration, gyroscope, resonant pressure, photoelectric image etc., these intelligence sensors need to be operated under the environment of fine vacuum, high-cleanness, could ensure its index Q-value and life-span。In order to meet intelligence sensor working environment demand, generally intelligence sensor is packaged in airtight cavity and impurity absorption device is set in airtight cavity, such as getter, is used for absorbing the pollutant such as the encapsulation gas of inside cavity slow releasing, moisture, maintains internal high vacuum environment。
At present, the form such as the commonly used thin film of getter, column, lamellar, need to be heated to getter 300～900 DEG C before use, can normally use after fully activating。Such as our company application number be in 2015107877841 disclosed, wherein, column and lamellar getter generally adopt built-in metal silk to be electrically heated activation, and film like getter then generally adopts metallic plate heat activation。Adopting above-mentioned getter heat activation device, its temperature cannot accurately control, it is impossible to guarantees abundant activated degasser, it is impossible to meet market and high-performance getter activates the demand of device。
Summary of the invention
In order to solve the problems referred to above, it is an object of the invention to provide a kind of novel getter electrical heating and activate device, traditional getters heat activation device has been carried out breakthrough improvement, has significantly improved activation effect。
The technical solution used in the present invention is: a kind of getter electrical heating activates device, including the support bridge floor adopting high-temperature insulation material to make, described support bridge floor is erected by conduction bridge pier, supporting, bridge floor is provided with layers of getter material, described layers of getter material passes through electrical heating tinsel heat activation, described electrical heating tinsel electrically connects with conduction bridge pier, forms supply access。
Preferably, it is single layer structure that described getter electrical heating activates device, and the number of described support bridge floor is 1, and described layers of getter material and electrical heating tinsel are separately positioned in the upper and lower surface supporting bridge floor, or on lower surface and upper surface。
Preferably, it is single layer structure that described getter electrical heating activates device, the number of described support bridge floor is 2, wherein, first supports bridge floor is erected by conduction bridge pier, second supports bridge floor is arranged on the first support bridge floor by electrical heating tinsel, and described layers of getter material is separately positioned on the lower surface and second of the first support bridge floor and supports on the upper surface of bridge floor。
Preferably, it is multiple structure that described getter electrical heating activates device, and the number supporting bridge floor in each layer is 1, and described layers of getter material and electrical heating tinsel are separately positioned in the upper and lower surface supporting bridge floor, or on lower surface and upper surface。
Preferably, it is multiple structure that described getter electrical heating activates device, supporting bridge floor number in each layer is 2, wherein, first supports bridge floor is erected by conduction bridge pier, second supports bridge floor is arranged on the first support bridge floor by electrical heating tinsel, and described layers of getter material is separately positioned on the lower surface and second of the first support bridge floor and supports on the upper surface of bridge floor。
Preferably, described electrical heating tinsel is bending or circular。
Preferably, described conduction bridge pier adopts metal or alloy to make。
Preferably, described layers of getter material is alloy or Graphene。
Preferably, described support bridge floor be shaped as square, polygon or circle。
Preferably, described support bridge floor adopts silicon nitride or silicon oxide to be made。
Compared with prior art, the beneficial effects of the present invention is:
Traditional getters heat activation device has been carried out breakthrough improvement by the present invention, the support bridge floor adopting high-temperature insulation material to make is built by bridge pier, being provided with layers of getter material supporting on bridge floor, described layers of getter material is heated activating by electrical heating tinsel。During use, by electrical heating tinsel electrified regulation under high vacuum environment, utilize the intermittent detection resistance value of its " thermal resistance effect ", realize closed loop detection temperature, accurately control temperature, fully activate gettering material, improve gettering efficiency, the performance of full-scope safeguards associated vacuum device and life-span；It addition, the present invention is designed to multiple structure can provide more accommodation space for gettering material, in limited space, enlarge markedly gettering material contact area, improve inspiratory effects, extend associated vacuum device service life。
Accompanying drawing explanation
Fig. 1 is that the getter electrical heating provided in embodiment 1 activates apparatus structure schematic diagram 1；
Fig. 2 is that the getter electrical heating provided in embodiment 1 activates apparatus structure schematic diagram 2；
Fig. 3 is that the getter electrical heating provided in embodiment 1 activates apparatus structure schematic diagram 3；
Fig. 4 is that getter electrical heating of the present invention activates device top view 1；
Fig. 5 is that getter electrical heating of the present invention activates device top view 2；
Fig. 6 is that the getter electrical heating that embodiment 2 provides activates apparatus structure schematic diagram 4；
Fig. 7 is that the getter electrical heating that embodiment 2 provides activates apparatus structure schematic diagram 5；
Fig. 8 is that the getter electrical heating that embodiment 2 provides activates apparatus structure schematic diagram 6。
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described。
Embodiment 1: referring to Fig. 1 to 3, a kind of getter electrical heating activates device, including the support bridge floor 10 adopting high-temperature insulation material to make, described support bridge floor 10 is built by conduction bridge pier 20, supporting, bridge floor 10 is provided with layers of getter material 30, described layers of getter material 30 is to be heated activating by electrical heating tinsel 40, and described electrical heating tinsel electrically connects with conduction bridge pier, forms supply access。In the present invention, described electrical connection can be directly connected to or realize electrical connection by conducting metal。
Specifically, described support bridge floor can be, but not limited to select the high-temperature insulation material such as silicon nitride or silicon oxide to make；Described conduction bridge pier can be, but not limited to adopt metal or alloy to make；Described layers of getter material can select gettering material general on market, for instance the alloy that two or more element in zirconium, vanadium and iron, aluminum, rhenium or titanium is formed, and adopts chemical deposition CVD or vapour deposition method to be deposited on support bridge floor；Or grapheme material, adopts nanometer technology to be made。
In the present embodiment, it is single layer structure that described getter electrical heating activates device, described layers of getter material 30 it is critical only that with the set-up mode of electrical heating tinsel 40: electrical heating tinsel 40 needs to be arranged on and supports on bridge floor on the another side of relative layers of getter material 30, and interval supports bridge floor 10 and realizes insulation。
Example, the number of described support bridge floor 10 is 1, and described layers of getter material 30 and electrical heating tinsel 40 can be separately positioned on the upper surface or lower surface that support bridge floor 10, and described electrical heating tinsel 40 can be directly connected to conduction bridge pier, realize power supply, as shown in Figure 1；
Or, the number of described support bridge floor 10 is 1, described layers of getter material 30 and described electrical heating tinsel 40 are separately positioned on the lower surface and upper surface that support bridge floor, and described electrical heating tinsel 40 connects conduction bridge pier by conducting metal and realizes power supply, as shown in Figure 2；
Or, the number of described support bridge floor is 2, wherein, first supports bridge floor 11 is built by conduction bridge pier 20, second supports bridge floor 12 is arranged on the first support bridge floor 11 by electrical heating tinsel 40, described layers of getter material 30 is separately positioned on the lower surface and second of the first support bridge floor 11 and supports on the upper surface of bridge floor 12, as shown in Figure 3。It is clear that adopt this kind of mode can increase gettering material contact area, improve inspiratory effects, reduce simultaneously and activate energy consumption。It should be noted that the number supporting bridge floor in the getter heat activation device of single layer structure is not limited to 1 or 2, it is also possible to being other situations such as 3,4,5, the present invention can not be exhaustive。
Here, the shape of electrical heating tinsel 40 can have multiple choices。
Example, described electrical heating tinsel 40 can be for bending, and its two end interface connects two conduction bridge piers respectively, forms supply access, as shown in Figure 4；Or, described electrical heating tinsel 40 is circular, and its two end interface connects two conduction bridge piers, forms supply access, as shown in Figure 5。Wherein, electrical heating tinsel 40 preferably employs metal material general on market, such as, one in tungsten, molybdenum, nickel, adopts the MEMS technology manufacture of standard, is deposited on support bridge floor by methods such as PVD, chemical deposition CVD or vapour deposition methods by patterned metal material。Certainly, described electrical heating shape wiry and manufacturing process can also have other to select, and are not limited to this。
During use, by electrical heating tinsel 40 electrified regulation under high vacuum environment, utilize the intermittent detection resistance value of its " thermal resistance effect ", realize closed loop detection temperature, ensure its temperature control accurately, fully activate gettering material, improve gettering efficiency, the performance of full-scope safeguards intelligence sensor and life-span。
Embodiment 2: in embodiment 1, it is single layer structure that described getter electrical heating activates device。But, in the present invention, described device can be multiple structure, and its number of plies can be set as required。Therefore, in the present embodiment, it is 3 that described getter electrical heating activates the concrete number of plies of device, is attached by conducting metal, it is achieved multilamellar is powered between the bridge pier of each layer。
Specifically, the number supporting bridge floor 10 in each layer is 1, is successively built by conduction bridge pier 20, and described layers of getter material 30 and electrical heating tinsel 40 are separately positioned in the upper and lower surface supporting bridge floor, as shown in Figure 6；Or, described layers of getter material 30 and electrical heating tinsel 40 are separately positioned on the lower surface and upper surface that support bridge floor, as shown in Figure 7。
Or, it is multiple structure that described getter electrical heating activates device, the concrete number of plies is 3, supporting bridge floor number in each layer is 2, wherein, first supports bridge floor 11 is built by conduction bridge pier 20, and second supports bridge floor 12 is arranged on the first support bridge floor 11 by electrical heating tinsel 40, described layers of getter material 30 is separately positioned on the lower surface and second of the first support bridge floor and supports on the upper surface of bridge floor, as shown in Figure 8。
It is clear that multiple structure can provide more accommodation space for gettering material, in limited space, enlarge markedly gettering material contact area, improve inspiratory effects, extend associated vacuum device service life。
It should be noted that in the above-described embodiments, described support bridge floor and bridge pier are square, but the shape of described support bridge floor and bridge pier can also is that triangle, square, polygon or circle etc., and the present invention is not specifically limited。
In a word, these are only preferred embodiment of the present invention, be not intended to limit protection scope of the present invention, within the scope of the present invention, equivalents or amendment that the present invention is made should be included within protection scope of the present invention。
Claims (10)
1. a getter electrical heating activates device, it is characterized in that: include the support bridge floor adopting high-temperature insulation material to make, described support bridge floor is erected by conduction bridge pier, supporting, bridge floor is provided with layers of getter material, described layers of getter material passes through electrical heating tinsel heat activation, described electrical heating tinsel electrically connects with conduction bridge pier, forms supply access。
2. a kind of getter electrical heating according to claim 1 activates device, it is characterised in that: it is single layer structure that described getter electrical heating activates device, and the number of described support bridge floor is 1,
Described layers of getter material and electrical heating tinsel are separately positioned in the upper and lower surface supporting bridge floor, or on lower surface and upper surface。
3. a kind of getter electrical heating according to claim 1 activates device, it is characterized in that: it is single layer structure that described getter electrical heating activates device, the number of described support bridge floor is 2, wherein, first supports bridge floor is erected by conduction bridge pier, second supports bridge floor is arranged on the first support bridge floor by electrical heating tinsel, and described layers of getter material is separately positioned on the lower surface and second of the first support bridge floor and supports on the upper surface of bridge floor。
4. a kind of getter electrical heating according to claim 1 activates device, it is characterized in that: it is multiple structure that described getter electrical heating activates device, the number supporting bridge floor in each layer is 1, described layers of getter material and electrical heating tinsel are separately positioned in the upper and lower surface supporting bridge floor, or on lower surface and upper surface。
5. a kind of getter electrical heating according to claim 1 activates device, it is characterized in that: it is multiple structure that described getter electrical heating activates device, supporting bridge floor number in each layer is 2, wherein, first supports bridge floor is erected by conduction bridge pier, second supports bridge floor is arranged on the first support bridge floor by electrical heating tinsel, and described layers of getter material is separately positioned on the lower surface and second of the first support bridge floor and supports on the upper surface of bridge floor。
6. a kind of getter electrical heating as claimed in any of claims 1 to 5 activates device, it is characterised in that: described electrical heating tinsel is bending or circular。
7. a kind of getter electrical heating as claimed in any of claims 1 to 5 activates device, it is characterised in that: described conduction bridge pier adopts metal or alloy to make。
8. a kind of getter electrical heating as claimed in any of claims 1 to 5 activates device, it is characterised in that: described layers of getter material is alloy or Graphene。
9. a kind of getter electrical heating as claimed in any of claims 1 to 5 activates device, it is characterised in that: described support bridge floor be shaped as square, polygon or circle。
10. a kind of getter electrical heating as claimed in any of claims 1 to 5 activates device, it is characterised in that: described support bridge floor adopts silicon nitride or silicon oxide to be made。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610207890.2A CN105692545B (en) | 2016-04-06 | 2016-04-06 | A kind of getter electrical heating activates device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610207890.2A CN105692545B (en) | 2016-04-06 | 2016-04-06 | A kind of getter electrical heating activates device |
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| CN105692545A true CN105692545A (en) | 2016-06-22 |
| CN105692545B CN105692545B (en) | 2017-08-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112169528A (en) * | 2020-09-24 | 2021-01-05 | 有研工程技术研究院有限公司 | Internal heating type getter sheet and preparation method thereof |
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| CN112169528A (en) * | 2020-09-24 | 2021-01-05 | 有研工程技术研究院有限公司 | Internal heating type getter sheet and preparation method thereof |
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| CN105692545B (en) | 2017-08-25 |
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