KR100285505B1 - Method for activating non-evaporable getter of field emission device - Google Patents

Method for activating non-evaporable getter of field emission device Download PDF

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KR100285505B1
KR100285505B1 KR1019970064917A KR19970064917A KR100285505B1 KR 100285505 B1 KR100285505 B1 KR 100285505B1 KR 1019970064917 A KR1019970064917 A KR 1019970064917A KR 19970064917 A KR19970064917 A KR 19970064917A KR 100285505 B1 KR100285505 B1 KR 100285505B1
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panel
getter
fed
back chamber
evaporable getter
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KR1019970064917A
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Korean (ko)
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KR19990043870A (en
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문권진
우광제
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김영남
오리온전기주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/94—Means for exhausting the vessel or maintaining vacuum within the vessel
    • H01J2329/943—Means for maintaining vacuum within the vessel
    • H01J2329/945—Means for maintaining vacuum within the vessel by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PURPOSE: A method for activating non-evaporable getter for a FED(field emission device) is provided to improve inner vacuum degree of a FED by activating non-evaporable getter in a back chamber of a FED panel effectively and readily. CONSTITUTION: Non-evaporable getter for a FED is activated by heating a back chamber(3) of a FED panel(1) by a heating unit(5) at over a getter activation temperature 550°C during panel exhaustion. The FED panel(1) includes a top plate(6), a bottom plate(7), and a sealing line(9). The back chamber(3) accepts getter for enhancing vacuum degree of the inner space inside the panel(1). The back chamber(3) is attached to the bottom plate(7) of the FED panel(1) at the bottom of the exhausting hole inside a sealing line(9). The heating unit(5) is arranged on the exhausting part. The inner diameter of the heating unit(5) is large enough to accept the back chamber(3). The heating unit(5) may be an electric heater.

Description

전계방출소자의 비증발형 게터의 활성화 방법Activation method of non-evaporable getter of field emission device

본 발명은 전계방출소자(Field Emission Display; 이하 FED라 칭함)의 비증발형 게터(getter)의 활성화 방법에 관한 것으로, 특히 게터의 실장을 위한 백챔버(back chamber)의 외측에 가열수단을 구비시켜 패널의 배기공정중 또는 배기공정 후에 게터를 가열시킴으로써 FED 소자의 내부 진공도를 향상시킬 수 있는 FED 소자의 비증발형 게터의 활성화 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of activating a non-evaporable getter of a field emission display (hereinafter referred to as FED), in particular having a heating means on the outside of a back chamber for mounting the getter. The present invention relates to a method for activating a non-evaporable getter of an FED element by heating the getter during or after the panel exhaust process.

게터의 활성화를 도모하기 위한 종래의 방법에 있어서는, 특히 비증발형 게터를 백챔버에 실장하였을 경우, 실장된 게터를 충분한 조건으로 가열하여 주는 것이 상당히 어려웠다. 이는 게터가 원하는 소정온도까지 가열할 경우 FED 패널의 다른 부위가 손상을 입게 될 우려가 있기 때문이다. 이와 같은 문제점을 해결하기 위하여 종래에는 게터에 전극을 부착하여 외부로 인출한 뒤, 전류를 인가하여 가열하는 방법을 사용하였다.In the conventional method for promoting the getter, it is very difficult to heat the mounted getter under sufficient conditions, particularly when the non-evaporable getter is mounted in the back chamber. This is because when the getter is heated to a desired predetermined temperature, other parts of the FED panel may be damaged. In order to solve such a problem, conventionally, a method of attaching an electrode to a getter, drawing it to the outside, and then applying a current to heat the same has been used.

그러나 상기한 방법은 상기 전극을 백챔버의 외부로 인출하는 공정이 복잡할 뿐만 아니라, 기술상의 어려움이 따르는 문제점이 있다.However, the above method is complicated in the process of drawing out the electrode to the outside of the back chamber, and there is a problem in that a technical difficulty occurs.

따라서 본 발명은 상기의 문제점을 해결하기 위한 것으로서, 본 발명의 목적은 FED 패널의 백챔버에 실장되어 있는 비증발형 게터들을 효과적이고 용이하게 가열함에 의해 활성화시킴으로써 게터의 역할을 증대시켜 FED 소자의 내부 진공도를 향상시킬 수 있는 FED 소자의 비증발형 게터의 활성화 방법을 제공함에 있다.Accordingly, an object of the present invention is to solve the above problems, and an object of the present invention is to increase the role of the getter by effectively and easily heating the non-evaporable getters mounted in the back chamber of the FED panel, thereby increasing the role of the getter. The present invention provides a method of activating a non-evaporable getter of an FED device capable of improving an internal vacuum degree.

도 1 은 본 발명의 방법에 따라 게터를 활성화시키기 위한 장치의 개략도1 is a schematic diagram of an apparatus for activating a getter according to the method of the present invention;

〈도면의 주요 부분에 대한 부호의 설명〉<Explanation of symbols for main parts of drawing>

1 : FED 패널 상판 2 : 배기구1: FED panel top plate 2: exhaust vent

3 : 백챔버 4 : 게터(getter)3: back chamber 4: getter

5 : 전열히터5: electric heater

상기와 같은 목적을 달성하기 위한 본발명의 전계방출소자 비증발형 게터의 활성화 방법은,The method of activating the field emission device non-evaporation type getter of the present invention for achieving the above object,

FED 소자의 내부 진공도 향상을 위한 비증발형 게터의 활성화방법에 있어서,In the activation method of the non-evaporable getter for improving the internal vacuum of the FED device,

FED 패널 하부기판 배기구상에 위치하며, 내부에 게터가 실장되어 있는 백챔버 외측 소정위치에 가열수단을 설치하는 단계와,Located on the exhaust substrate of the lower panel of the FED panel, the step of installing the heating means in a predetermined position outside the back chamber in which the getter is mounted;

상기 패널의 배기공정중 상기 가열수단으로 백챔버를 비증발형 게터의 활성화 온도인 550 ℃ 이상으로 가열하여 게터를 활성화시키는 단계를 포함하는 것을 특징으로 한다.And heating the back chamber to at least 550 ° C., which is an activation temperature of the non-evaporable getter, by the heating means during the exhausting of the panel.

이하, 본 발명에 따른 FED 소자의 비증발형 게터의 활성화 방법의 일실시예에 대해 첨부 도면을 참조하여 상세히 설명한다.Hereinafter, an embodiment of a method of activating a non-evaporable getter of an FED device according to the present invention will be described in detail with reference to the accompanying drawings.

도 1 은 본 발명의 방법에 따라 게터를 활성화시키기 위한 장치의 개략도이다.1 is a schematic diagram of an apparatus for activating a getter according to the method of the present invention.

상기 도면에 도시된 바와 같이, FED 패널(1)은 패널 상부기판(6)과 하부기판(7) 그리고 상기 상판61)과 하판(7)의 사이 공간을 봉합하는 실링라인(9)으로 구성되어, 소정 크기의 내부 공간을 형성하고 있다.As shown in the figure, the FED panel 1 is composed of a sealing line 9 for sealing the space between the upper panel 6 and the lower substrate 7 and the upper plate 61 and the lower plate 7 of the panel. The inner space of the predetermined size is formed.

게터는 패널(1) 공간내의 진공도 향상을 위해 사용되는 것으로, 패널 하부기판(7)의 소정위치에 게터(4)가 손상되지 않도록 백챔버(3)내에 장착된다.The getter is used to improve the degree of vacuum in the panel 1 space, and is mounted in the back chamber 3 so that the getter 4 is not damaged at a predetermined position of the panel lower substrate 7.

한편, 본 실시예에서는 상기 백챔버(3)를 패널 하부기판(7)에 부착시키되, 특히 실링라인(9) 내측에 형성되어 있는 배기구(3) 하부에 부착시킨다. 그리고 상기 백챔버(3)를 내부에 삽입시킬 수 있을 정도의 내경을 가진 가열수단(5)을 패널의 배기부에 장착한다. 이때 상기 가열수단(5)으로는 내부에 열선이 구비된 전열히터로 할 수 있으며, 백챔버(3)와 인접한 외측벽에 위치하여 비증발형 게터의 활성화 온도인 550 ℃ 이상으로 가열한다.On the other hand, in the present embodiment, the back chamber 3 is attached to the lower panel 7 of the panel, in particular, below the exhaust port 3 formed inside the sealing line 9. And the heating means 5 which has an inner diameter enough to insert the said back chamber 3 inside is attached to the exhaust part of a panel. At this time, the heating means (5) may be a heat transfer heater having a heating wire therein, and is located on the outer wall adjacent to the back chamber (3) is heated to 550 ℃ or more, which is the activation temperature of the non-evaporable getter.

상기 가열수단(5)으로 백챔버(3)에 열을 가하는 시기는 패널의 배기공정 중이나 또는 배기공정 후에 가열하도록 한다. 이때 가열수단에 의해 백챔버(3)로 전달된 열은 백챔버(3) 유리관을 통해 내부로 전달되고, 백챔버(3)내에서의 전도열 또는 진공상태를 통과한 복사열등으로 백챔버(3)내에 수용된 게터(4)를 용이하게 가열하게 된다.The timing of applying heat to the back chamber 3 by the heating means 5 allows heating during or after the exhaust of the panel. At this time, the heat transferred to the bag chamber 3 by the heating means is transferred to the inside through the glass tube of the bag chamber 3, the radiant heat passing through the conductive heat or vacuum state in the bag chamber 3, etc. The getter 4 accommodated in the inside is easily heated.

따라서 상기 가열수단(5)을 패널의 배기부에 장착할 때, 게터(4)가 가열수단(5)의 내측 중심부에 위치하도록 장착할 필요가 있으며, 가열수단(5)의 설계시에도 상기한 점을 고려하여 제작함으로써 가열수단(5)에 의한 백챔버(3)의 가열시 백챔버용 유리관이 균형적으로 가열되도록 하여 패널과의 온도차이로 인한 유리의 파손을 방지하도록 한다.Therefore, when the heating means 5 is mounted on the exhaust part of the panel, it is necessary to mount the getter 4 so as to be located at the inner center of the heating means 5, and the design of the heating means 5 is also necessary. In consideration of the point, the glass tube for the back chamber is heated in a balanced manner when the back chamber 3 is heated by the heating means 5 to prevent breakage of the glass due to the temperature difference with the panel.

이상에서 설명한 바와 같이, 본 발명의 기술에 따라 FED 패널의 배기부에 설치된 백챔버의 외측에 가열수단을 장착하여 패널의 배기공정 중이나 배기공정 후에 가열시킴으로써 패널과의 온도차이로 인한 백챔버의 유리가 파손되는 것을 방지하고, FED 패널의 백챔버에 실장되어 있는 비증발형 게터들을 효과적이고 용이하게 가열하여 게터를 활성화시킬 수 있어 FED 소자의 내부 진공도를 향상시킬 수 있다.As described above, according to the technique of the present invention, the heating means is mounted on the outside of the back chamber installed in the exhaust part of the FED panel, and is heated during or after the exhaust process of the panel. Can be prevented from being damaged and the non-evaporable getters mounted in the back chamber of the FED panel can be effectively and easily heated to activate the getters, thereby improving the internal vacuum degree of the FED element.

Claims (4)

FED 소자의 내부 진공도 향상을 위한 비증발형 게터의 활성화방법에 있어서,In the activation method of the non-evaporable getter for improving the internal vacuum of the FED device, FED 패널 하부기판 배기구상에 위치하며, 내부에 게터가 실장되어 있는 백챔버 외측 소정위치에 가열수단을 설치하는 단계와,Located on the exhaust substrate of the lower panel of the FED panel, the step of installing the heating means in a predetermined position outside the back chamber in which the getter is mounted; 상기 패널의 배기공정중 상기 가열수단으로 백챔버를 비증발형 게터의 활성화 온도인 550 ℃ 이상으로 가열하여 게터를 활성화시키는 단계를 포함하는 것을 특징으로 하는 전계방출소자의 비증발형 게터의 활성화 방법.Activating a non-evaporable getter of a field emission device comprising heating the back chamber to at least 550 ° C., which is an activation temperature of the non-evaporable getter, by the heating means during the exhausting of the panel. . 제 1 항에 있어서,The method of claim 1, 상기 가열수단은 내부에 열선이 구비된 전열히터인 것을 특징으로 하는 전계방출소자의 비증발형 게터의 활성화방법The heating means is a method of activating the non-evaporable getter of the field emission device, characterized in that the electric heater having a heating wire therein. 제 1 항에 있어서,The method of claim 1, 상기 백챔버의 위치가 가열수단의 내부 열선이 위치한 중심부에 위치하도록 가열수단을 장착하는 것을 특징으로 하는 전계방출소자의 비증발형 게터의 활성화 방법.And a heating means is mounted such that the position of the back chamber is located at the center of the inner heating wire of the heating means. 제 1 항에 있어서,The method of claim 1, 상기 전열히터를 이용한 백챔버의 가열은 패널의 배기공정후에 실시하는 것을 특징으로 하는 전계방출소자의 비증발형 게터의 활성화 방법.The method of activating the non-evaporation type getter of the field emission device, characterized in that the heating of the back chamber using the electric heater is performed after the exhaust process of the panel.
KR1019970064917A 1997-11-29 1997-11-29 Method for activating non-evaporable getter of field emission device KR100285505B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105692545A (en) * 2016-04-06 2016-06-22 合肥芯福传感器技术有限公司 Electric heating activating device of getter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105692545A (en) * 2016-04-06 2016-06-22 合肥芯福传感器技术有限公司 Electric heating activating device of getter

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