CN104633492A - Integrated lamp device and method used for producing integrated lamp device - Google Patents

Integrated lamp device and method used for producing integrated lamp device Download PDF

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Publication number
CN104633492A
CN104633492A CN201410618225.3A CN201410618225A CN104633492A CN 104633492 A CN104633492 A CN 104633492A CN 201410618225 A CN201410618225 A CN 201410618225A CN 104633492 A CN104633492 A CN 104633492A
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CN
China
Prior art keywords
conductor wire
fixed part
protective casing
heat
filament
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Granted
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CN201410618225.3A
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Chinese (zh)
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CN104633492B (en
Inventor
李成龙
蒋盛旭
池尙炫
尹斗永
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AP Systems Inc
AP Cells Inc
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AP Cells Inc
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00—Fastening of light sources or lamp holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
    • F21V21/002—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips making direct electrical contact, e.g. by piercing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V23/00—Arrangement of electric circuit elements in or on lighting devices
    • F21V23/06—Arrangement of electric circuit elements in or on lighting devices the elements being coupling devices, e.g. connectors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Resistance Heating (AREA)

Abstract

The invention relates to an integrated lamp device and a method used for producing the integrated lamp device. The integrated lamp device comprises a lamp filament assembly used for producing lamp filaments producing heat; a heat-resistant reinforcing part, one end of which is fixedly coupled with the lamp filament assembly; a lead protection sleeve pipe, one end of which is fixedly coupled with the other end of the heat-resistant reinforcing part; a fixing part, which is fixedly coupled with the other end of the lead protection sleeve pipe; and a lead. One end of the lead is electrically connected with the lamp filament assembly, and can pass through the heat-resistant reinforcing part, the lead protection sleeve pipe, and the reinforcing part sequentially, and the other end of the lead is extended out of the fixing part. By adopting the integrated lamp device, the inconvenience of the workers of installing the lamp on the jack can be removed, and the service lifetime of the lamp can be prolonged.

Description

Integrated lamp equipment and the method for the manufacture of described integrated lamp equipment
Technical field
The present invention relates to for the integrated lamp equipment of heat target object and the method for the manufacture of described integrated lamp equipment.
Background technology
Heat treatment is for the manufacture of the basic technology in the various techniques of semiconductor, display or its analog.Ohmic contact blending, implanted ions damage anneal, dopant activation and to form the film such as such as TiN, TiSi2, CoSi2 or its analog be needs process of thermal treatment.
The example performing this heat treated equipment is electric furnace and rapid thermal treatment (rapid thermal process, RTP) equipment.Because fast heat treatment device has following difficulty: the temperature maintaining the whole region of substrate equably, replace whenever substrate (wafer) and also maintain identical temperature-time response about other substrate, or measure exactly and control substrate temperature, so fast heat treatment device is not yet in the center of public attention, but substituted for electric furnace according to the latest developments in temperature measurement technology and temperature control technology.
Heat is transferred to substrate by using the radius of halogen tungsten lamp by fast heat treatment device.Therefore, fast heat treatment device is equipped with heat block (heating block), and the side surface being placed in heat block is central towards the multiple lamps on the side surface of substrate.
Fig. 1 is for illustrating the view of the shape that wherein lamp is separated with the socket of separable filament assembly (separable filament assembly), and Fig. 2 illustrates the view wherein separable filament assembly in fast heat treatment device being inserted into the shape in the socket be installed on heater housing.
Separable filament assembly comprises the socket 10 be installed on heater housing 1, and the lamp 20 that can be separated with socket 10.Socket 10 is installed in the mounting surface of the upper end of heater housing 1, thus performs the sealing function for the external isolation by the inside of heater housing 1 and heater housing 1.And socket 10 performs the function being used for fixedly being inserted in lamp 20 wherein.Socket 10 is supplied power to, to supply power to the attaching plug of the lamp 20 be inserted in socket 10 via external conductive line (outside conductive wire).Lamp 20 comprises: filament protective casing 23, and it maintains inner space and is in halogen gas state; Tungsten filament 22, it produces heat in filament protective casing 23 inside; And conductor wire protective casing 21, its protection connects the conductor wire of attaching plug and filament 22.
But, be configured to make socket 10 and lamp 20 separable filament assembly separated from one another to have following problem as described above.
First, socket 10 and lamp 20 coupled to each other time, exist coupling difficulty problem.That is, operator, lamp 20 is inserted in socket 10 and when being fixed to socket 10, there will be the phenomenon that wherein lamp 20 is out of shape, and the phenomenon that the past lamp 20 along with the time is separated with socket 10 gradually because of the loading of lamp 20.In addition, when lamp 20 is fixed, have difficulties when installing lamp 20 owing to machining tolerance (machining tolerance).
Secondly, socket 10 and lamp 20 is coupled to each other or each other decoupling zero time, there is the problem that filament protective casing 23 is easily broken.That is; when operator is by lamp 20 and socket 10 decoupling zero; because operator is by using fixture and pulling filament protective casing 23 to hold the filament protective casing 23 with "T"-shaped shape downwards, can be destroyed by the chuck force applied by operator so there is the filament protective casing 23 be made up of quartz material.In addition, when lamp 20 is installed in socket 10, because hold filament protective casing 23, and be inserted in socket 10, so filament protective casing 23 also can be destroyed by applied force by the power applied upwards.
3rd, existence protects the exterior section of the conductor wire protective casing 21 of conductor wire because of the heat produced in filament 22 and the problem of carbonization.That is, exist borderline external peripheral surface between filament protective casing 23 and conductor wire protective casing 21 can because of heat the problem of carbonization.
[prior art document]
[patent document]
(patent document 1) the 1st, 031, No. 226 Korean Patent
Summary of the invention
The invention provides a kind of integrated lamp assembly and a kind of method for the manufacture of described integrated lamp assembly, its phenomenon that can solve wherein lamp distortion and the difficulty of installing when being installed on socket by lamp in operation.The present invention also provides a kind of integrated lamp assembly and a kind of method for the manufacture of described integrated lamp assembly, and it substantially can solve filament protective casing and be installed at lamp the problem be damaged on socket or when being separated with socket.The present invention also provides a kind of integrated lamp assembly and a kind of method for the manufacture of described integrated lamp assembly, its can improve wherein conductor wire protective casing because of heat and the phenomenon of carbonization.
According to one exemplary embodiment, integrated lamp equipment comprises: filament assembly, and it possesses the filament producing heat; Heat-resisting reinforcement feature, its one end is coupled to described filament assembly regularly; Conductor wire protective casing, its one end is coupled to the other end of described heat-resisting reinforcement feature regularly; Fixed part, it is coupled to the other end of described conductor wire protective casing regularly; And conductor wire, its one end is electrically connected to described filament assembly, and sequentially through described heat-resisting reinforcement feature, described conductor wire protective casing and described fixed part, and its other end stretches out from described fixed part.
Filament assembly can comprise: filament, and the electric current wherein flowed in first input end passes heater strip, and flows through the second input terminal to produce heat; Filament protective casing, it is included in described filament wherein; First conductive plate, it is electrically coupled described first input end, and the first conductor wire is connected to described first conductive plate; Second conductive plate, it is electrically coupled described second input terminal, and the second conductor wire is connected to described second conductive plate; And conductive support, it allows described first conductive plate and the second conductive plate to be placed in it on the surface, and its one end is coupled to described filament protective casing regularly, and the other end is coupled to described heat-resisting reinforcement feature regularly.
Described filament protective casing can have the longitudinal direction in the coupling direction equaling described heat-resisting reinforcement feature, described conductor wire protective casing and described fixed part.
Described filament protective casing can be formed with the diameter making its diameter be equal to or less than described heat-resisting reinforcement feature.
Described heat-resisting reinforcement feature can be formed by ceramic material.
Described conductor wire protective casing can be formed by metal material.
The inside useful ceramics of described conductor wire protective casing is filled.
Described fixed part can comprise: the main column that described conductor wire passes; And projection flange, it circumferentially stretches out from the sidewall of described main column.
Seal inserts groove and can be formed on the surface of the described projection flange pointing to the direction of settling described filament assembly.
Described fixed part can comprise: top fixed part, and it has the upper flange of stretching out from an end face along its circumference; Bottom fixed part, it has the lower flange stretching out to contact described upper flange along its circumference from an end face; And coupling unit, its be coupled described upper flange and described lower flange.
Described top fixed part can comprise: top cylinder; Upper flange, it stretches out along its circumference from an end face of described top cylinder; Coupling projection body, it stretches out from the surface of described top cylinder thus contacts described bottom fixed part, and on protrusion surface, have conductive lead wire plug insertion groove; And external power connecting line, it is connected to described terminal pin and inserts groove and stretch out outside.
Described bottom fixed part can comprise: bottom cylinder; Lower flange, it stretches out along its circumference from an end face of described bottom cylinder, relative with described upper flange; And coupling recesses, it has recessed from the surface of described bottom cylinder thus contacts the stepped surface of described top fixed part, and is formed by inserting the terminal pin that groove stretches out from stepped surface towards described terminal pin.
Described integrated lamp can comprise further: main body coupling seal inserts groove, and it is formed on the surface of the described lower flange pointing to the direction of settling described filament assembly, and it settles seal; And flange coupling seal inserts groove, its surface being formed at described lower flange contacts described upper flange, and it settles seal.
According to another one exemplary embodiment, a kind of method for the manufacture of integrated lamp, described method comprises: preparation possesses the filament assembly of the filament producing heat; Conductor wire is connected to described filament assembly; Allow described conductor wire through the inside of heat-resisting reinforcement feature, and one end of described heat-resisting reinforcement feature is coupled to described filament assembly regularly so as can not with described filament assembly decoupling zero; Allow to stretch out through the described conductor wire of described heat-resisting reinforcement feature, through conductor wire protective casing and other end one end of described conductor wire protective casing being coupled to regularly described heat-resisting reinforcement feature in case can not with described heat-resisting reinforcement feature decoupling zero; And allow the described conductor wire through described conductor wire protective casing to stretch out, through the fixed part that can be coupled to heater housing, and described fixed part is coupled to described conductor wire protective casing regularly.
Before the other end described fixed part being coupled to regularly described conductor wire protective casing, the inside useful ceramics of described conductor wire protective casing is filled.
Accompanying drawing explanation
The following description carried out in conjunction with the drawings can understand one exemplary embodiment in more detail, wherein:
Fig. 1 is the view that the shape that wherein lamp is separated with the socket of separable filament assembly is described;
Fig. 2 illustrates the view wherein separable filament assembly in fast heat treatment device being inserted into the shape in the socket be installed on heater housing;
The cross-sectional view of the fast heat treatment device that Fig. 3 is applied to according to the heat block of one exemplary embodiment for explanation;
Fig. 4 A, 4B illustrate the view wherein multiple lamp being installed on the shape in the mounting surface of heater housing according to one exemplary embodiment;
Fig. 5 illustrates the perspective view according to the integrated lamp of one exemplary embodiment;
Fig. 6 illustrates the cross-sectional view according to the integrated lamp of one exemplary embodiment;
Fig. 7 illustrates the cross-sectional view inserting integrated lamp according to one exemplary embodiment from the upside above heater housing;
Fig. 8 illustrates the cross-sectional view being installed to the integrated lamp in heater housing according to one exemplary embodiment;
Fig. 9 is the perspective view illustrated according to the top fixed part of one exemplary embodiment and bottom fixed part integrated lamp coupled to each other;
Figure 10 illustrates the perspective view according to the top fixed part of one exemplary embodiment and the bottom fixed part integrated lamp of decoupling zero each other;
Figure 11 illustrates the cross-sectional view with the integrated lamp of top fixed part and bottom fixed part according to one exemplary embodiment;
Figure 12 A-12G illustrates the view according to the technique for the manufacture of integrated lamp of one exemplary embodiment; And
Figure 13 A, 13B are the cross-sectional view of the technique for be sequentially coupled top fixed part and bottom fixed part illustrated according to one exemplary embodiment.
Detailed description of the invention
Hereinafter be described in more detail embodiments of the invention with reference to accompanying drawing.But the present invention can use multi-form enforcement, and should not be construed as limited to embodiment described in this paper.In fact, provide these embodiments will to be thorough and complete to make the present invention, and these embodiments intactly will convey to those skilled in the art scope of the present invention.In the drawings, similar reference number represents like.
The cross-sectional view of the fast heat treatment device that Fig. 3 is applied to according to the heat block of one exemplary embodiment for explanation.
Treatment chamber 200 has inner space, and described inner space is wherein to the heat treatment space that substrate is heat-treated, and described substrate orientation is in heat treatment space.Treatment chamber 200 is manufactured sky and the rectangular vessel shape of sealing, but be not limited to described shape, and various container shapes can be manufactured.That is, circular and polygonal container shape is possible.And each in the side for the treatment of chamber 200 and opposite side is through being formed with the entrance for loading and unload substrate S, and any one in entrance is connected to shift module (not shown).
Treatment chamber 200 possesses substrate support 400, and described substrate support is for supporting substrate S wherein.Herein, multiple stripper pins 410 that substrate support 400 Vertical Square that can possess wherein moves up, and can be configured in edge ring, substrate is installed in described edge ring in process.Edge ring (not shown) is for being installed on the installation component oppositely on the position of heat block 100 in heat treatment space by substrate.Substrate support 400 can be connected to the component for providing lifting force, such as cylinder (not shown).Although one exemplary embodiment describes the stripper pin 410 of lifting substrate S in vertical direction above, but the present invention is not limited to this, and various component (such as, using the component of electrostatic force (electrostatic chuck) or vacuum adsorption force) can be used for substrate S to be supported on substrate support 400.
Quartz window 300 can be positioned between heat block 100 and treatment chamber 200.Quartz window 300 is formed by the material that heat is transferred to via it substrate S be placed under it.Quartz window 300 maintains the sealing between heat block 100 and treatment chamber 200; the space between heat block 100 and treatment chamber 200 is closed by use containment member 310; vacuum is maintained to allow heat block 100; and conservation treatment chamber 200 is not by external environment condition (such as, pressure, gas or pollutant) interference.And, quartz window 300 guard lamp 600, and prevent the accessory substance caused by the heat produced in lamp 600 from dropping in the substrate S in the heat treatment space being placed in treatment chamber 200 inside.
Heat block 100 has heater housing 500, and described heater housing possesses the integrated lamp producing heat energy.The lower surface (it is lamp mounting surface 510) of heater housing 500 towards object (such as, substrate S) to be heated, and possesses multiple integrated lamp 600.As the integrated lamp 600 be arranged in lamp mounting surface 510 illustrated by Fig. 4 A, 4B is placed in towards on the position of substrate S, and light is radiated at rotate or in fixing substrate S.It is round-shaped that lamp mounting surface 510 can be formed as illustrated in fig. 4 a, maybe can be formed as polygonal shape illustrated in Fig. 4 B, and have various shape.
There is according to the integrated lamp 600 of one exemplary embodiment the structure being different from the existing lamp that wherein socket is separated, and integrated lamp 600 do not have independent socket and has the modulated structure formed with integrated type.Hereinafter, the structure of integrated lamp will be described in detail.
Fig. 5 illustrates the perspective view according to the integrated lamp of one exemplary embodiment, Fig. 6 illustrates the cross-sectional view according to the integrated lamp of one exemplary embodiment, Fig. 7 illustrates the cross-sectional view wherein inserting the shape of integrated lamp from the upside above heater housing according to one exemplary embodiment, and Fig. 8 illustrates the cross-sectional view being installed on the integrated lamp on heater housing according to one exemplary embodiment.
Integrated lamp 600 comprises filament assembly 640, heat-resisting reinforcement feature 630, conductor wire protective casing 620, fixed part 610 and conductor wire 650.
Filament assembly 640 for having the calandria of the filament 644 of generation heat, and comprises the conductive plate supports body 642 of filament 644, the filament protective casing 645 of protection filament 644, the conductive plate 641 supplying power to filament 644 and the support conductive plate 641 producing heat.And filament assembly can comprise filament supporter 643 further.
Filament 644 possesses the sub-644a of first input end, the second input terminal 644b and heater strip 644c, and the electric current therefore flowed in the sub-644a of first input end is through heater strip 644c (it is main body), and flow through the second input terminal 644b to produce heat.The material of filament 644 should have high-melting-point, and has proper resistor value, because material should be luminous continuously, or even at high temperature.Therefore, tungsten, nickel or its analog can be used.If filament 644 is formed by tungsten, because tungsten has the fusing point (its temperature (about 2000 DEG C) starting luminescence than filament 644 is much higher) of about 3390 DEG C, so tungsten can stand this high temperature.
Filament supporter 643 is the support bar of the heater strip 644c of filament supports 644, and non-conductor can be waited to be formed by such as quartz.
Filament protective casing 645 makes filament 644 be contained in its inner space to protect filament 644.Filament protective casing 645 can be formed by the such as material such as suprasil or its analog.Filament protective casing 645 has cylindrical shroud tube shape, and described cylindrical shroud tube shape has the longitudinal direction in the coupling direction equaling heat-resisting reinforcement feature 630, conductor wire protective casing 620 and fixed part 610.Filament protective casing 645 has closed side and is coupled to the opposite side of heat-resisting reinforcement feature 630 regularly, thus closes completely and therefore define inner space, and inner space can be full of halogen gas to improve heat production efficiency.Filament protective casing 645 has the diameter of the diameter being equal to or less than heat-resisting reinforcement feature 630.Reason be integrated lamp to be installed in heater housing 500 or with allow integrated lamp through the decoupling zero hole be formed in shell 500 during heater housing 500 decoupling zero.Herein, be appreciated that the diameter of heat-resisting reinforcement feature 630 equals the diameter in decoupling zero hole.
First conductive plate 641a is electrically attached to the sub-644a of first input end of filament 644, thus is connected to the first conductor wire 650a.Second conductive plate 641b is also electrically attached to the second input terminal 644b of filament 644, thus is connected to the second conductor wire 650b.Therefore, the current flowing of the first conductor wire 650a is flowed through through the first conductive plate 641a to the sub-644a of first input end from external power source, and pass the heater strip 644c of filament 644, thus flow through the second conductive plate 641b and the second conductor wire 650b in external power source.As an example, the first conductive plate 641a and the second conductive plate 641b can in the form of molybdenum (Mo) metallic plate with satisfactory electrical conductivity.
First conductive plate 641a and the second conductive plate 641b is positioned it on the surface by conductive plate supports body 642, and its one end is coupled to filament protective casing 645 regularly, and its other end is coupled to heat-resisting reinforcement feature 630 regularly.One end fusing of filament protective casing 645 is to be coupled to one end of conductive plate supports body 642 regularly can not be separated with filament protective casing 645.And, the other end of conductive plate supports body 642 is inserted in heat-resisting reinforcement feature 630, and through Ceramic bond can not be separated with heat-resisting reinforcement feature 630.As an example, conductive plate supports body 642 waits non-conductor to be formed by such as quartz.
Simultaneously; one end of heat-resisting reinforcement feature 630 is coupled to conductive plate supports body 642 regularly; and the other end of heat-resisting reinforcement feature 630 is coupled to conductor wire protective casing 620 regularly, and therefore heat-resisting reinforcement feature 630 is placed between the conductive plate 641 of filament assembly 640 and conductor wire protective casing 620.Heat-resisting reinforcement feature 630 is by such as pottery (Al 2o 3) etc. have high-fire resistance material formed.Therefore, wherein parts can be prevented owing to the heat produced by contiguous filament 644 and the phenomenon of carbonization.Be configured to make conductor wire protective casing 620 be directly connected to filament assembly 640 and do not use the structure of heat-resisting reinforcement feature 630 because prior art adopts, thus its have coupling part between filament assembly 640 and conductor wire protective casing 620 because of the heat of filament 644 problem of carbonization.But; one exemplary embodiment of the present invention is configured to heat-resisting reinforcement feature 630 is arranged between filament assembly 640 and conductor wire protective casing 620, and therefore carbonization phenomenon even can result from the bound fraction of filament assembly 640 because of the heat of filament 644.
Conductor wire protective casing 620 is coupled to the other end of heat-resisting reinforcement feature 630 regularly.Conductor wire protective casing 620 is the shell that protection is connected respectively to first and second conductor wire 650a and 650b (650) of first and second conductive plate 641a and 641b (641) of filament assembly 640.One end of conductor wire protective casing 620 is coupled to heat-resisting reinforcement feature 630 regularly, and the other end is coupled to fixed part 610 regularly, described fixed part can be coupled to heater housing 500 and with heater housing 500 decoupling zero.The surface comprises metal material of conductor wire protective casing 620 is formed, and the inside ceramic filler of conductor wire protective casing 620.Therefore, the first conductor wire 650a and the second conductor wire 650b that are placed in conductor wire protective casing 620 inside are fixed on conductor wire protective casing 620 inside by using pottery.
One end of conductor wire 650 is electrically connected to filament assembly 640, and through settling sequentially pass heat-resisting reinforcement feature 630, conductor wire protective casing 620 and fixed part 610, and the other end stretches out from fixed part 610.Conductor wire 650 is through being embodied as the thin conductor wires such as the wire such as with sheath.Conductor wire 650 comprises the first conductor wire 650a and the second conductor wire 650b.First conductor wire 650a is the wire being connected to the first conductive plate 641a, and the second conductor wire 650b is the wire being connected to the second conductive plate 641b.
Fixed part 610 is coupled to the other end of conductor wire protective casing 620 regularly, and has the ledge surface that can be attached to such as heater housing 500 erection unit such as grade and can be separated with described erection unit.That is, conductor wire protective casing 620, heat-resisting reinforcement feature 630, filament assembly 640 and fixed part 610 are coupled regularly by mentioned order, to form the integrated lamp that wherein these assemblies can not be separated from one another.Existing lamp device has the structure wherein providing the socket serving as fixed part 610; and therefore lamp to be inserted in socket or with socket decoupling zero; but integrated lamp of the present invention be configured to make conductor wire protective casing 620, heat-resisting reinforcement feature 630, filament assembly 640 and fixed part 610 in integral structure regularly coupling so that can not be separated from one another, thus can solve the setup error of existing lamp and filament protective casing 645 with socket decoupling zero or be installed to socket time splintering problem.
Fixed part 610 comprises main column that conductor wire 650 passes and circumferentially from the projection flange 613 that the sidewall of main column stretches out.Fixed part 610 is being attached to heater housing 500 and is playing a role in being separated with heater housing 500 by fixed part 610 by projection flange 613.In order on shell 500, installation kit contains the integrated lamp (as illustrated in figure 7) of conductor wire protective casing 620, heat-resisting reinforcement feature 630, filament assembly 640 and fixed part 610; filament assembly 640 and heat-resisting reinforcement feature 630 order are inserted in decoupling zero hole; and after insertion completes (as illustrated in figure 8); the projection flange 613 of fixed part 610 and heater housing 500 via screw 612 or its analog coupled to each other, thus complete the installation of integrated lamp.
Therefore; because fixed part 610 be can via screw 612 or its analog be coupled to heater housing 500 and can with the parts of heater housing 500 decoupling zero, so the integrated lamp comprising filament assembly 640, heat-resisting reinforcement feature 630, conductor wire protective casing 620 and fixed part 610 can be coupled to heater housing 500 by means of only fixed part 610 is coupled to heater housing 500.On the contrary, fixed part 610 with comprise during heater housing 500 decoupling zero filament assembly 640, heat-resisting reinforcement feature 630, conductor wire protective casing 620 and fixed part 610 integrated lamp can with heater housing 500 decoupling zero.
Meanwhile, seal insertion groove 611 is formed on the surface of the projection flange 613 pointing to the direction of settling filament assembly 640.In order to strengthen the sealing force in shell 500 when fixed part 610 being coupled to heater housing 500, the seal inserting the such as seal such as O shape ring or its analog inserts groove 611 and can be formed in the lower surface of projection flange 613.And fixed part 610 can be formed by materials such as such as pottery, metal synthetic resin or its analogs.
Meanwhile, fixed part 610 can through being embodied as a main body as described above, but fixed part 610 can be implemented in the structure that can be separated with top fixed part 6100 and bottom fixed part 6200, as in other embodiments of the invention.When terminating or break down the service life of filament assembly 640, fixed part 620 is split into top fixed part 6100 and bottom fixed part 6200 to reduce costs by only replacing the part comprising filament assembly 640.
Fig. 9 is the perspective view illustrated according to its middle and upper part fixed part of one exemplary embodiment of the present invention and bottom fixed part integrated lamp coupled to each other, Figure 10 illustrates the integrated lamp according to the decoupling zero each other of its middle and upper part fixed part of one exemplary embodiment of the present invention and bottom fixed part, and Figure 11 is the cross-sectional view with the integrated lamp of top fixed part and bottom fixed part of explanation according to one exemplary embodiment of the present invention.
The fixed part 610 with the structure that is divided into two (two-split structure) comprises the top fixed part 6100 with the upper flange 6102 of circumferentially stretching out from an end face, the bottom fixed part 6200 with the lower flange 6202 circumferentially stretching out to contact upper flange 6102 from an end face, and by coupling unit 6300 that upper flange 6102 is coupled with lower flange 6201.Therefore top fixed part 6100 and bottom fixed part 6200 via such as the coupling unit 6300 such as screw or its analog is coupled to each other, and can easily perform decoupling zero and coupling.
Top fixed part 6100 comprises top cylinder 6101, the upper flange 6102 of circumferentially stretching out from an end face of top cylinder 6101, to stretch out thus contact bottom fixed part 6200 and have at its protrusion surface the coupling projection body 6103 that conductive lead wire plug inserts groove 6104 from the surface of top cylinder 6101, and is connected to terminal pin and inserts groove 6104 to reach outside external power connecting line 6105.Form terminal pin inwardly from the lower surface of coupling projection body 6103 and insert groove 6104, and the surface that terminal pin inserts groove 6104 is formed by conducting film.Therefore, external power connecting line 6105 is electrically connected to the conducting film that terminal pin inserts groove 6104, and therefore external power can be transferred to the conducting film that terminal pin inserts groove 6104.
Bottom fixed part 6200 comprises bottom cylinder 6201, an end face along its circumference from bottom cylinder 6201 stretches out with the lower flange 6202 towards upper flange 6102, and has thus the stepped surface of contact top fixed part 6100 recessed from the surface of bottom cylinder 6201 and by the coupling recesses 6204 inserting groove 6104 towards terminal pin and formed from the terminal pin 6203 that stepped surface stretches out.Terminal pin 6203 is through being embodied as first and second terminal pin, and the first terminal pin and the second terminal pin are connected respectively to the first conductor wire 650a and the second conductor wire 650b.
When upper flange 6102 and lower flange 6202 are coupled to each other, the terminal pin terminal pin 6203 be formed in lower flange 6202 being inserted into upper flange 6102 inserts in groove 6014, and therefore contact lead-wire plug insertion groove 6014 has electric conductivity to make terminal pin 6203.Therefore, external power inserts groove 6104, terminal pin 6203 and conductor wire 650 through terminal pin, and is then supplied to filament 644.
Simultaneously, although not shown, but wherein insert the coupling recesses (not shown) bottom fixed part 6200 being coupled to the screw of heater housing 500 to be formed on bottom fixed part 6200, therefore, it is possible to bottom fixed part 6200 is coupled to heater housing 500 or by bottom fixed part 6200 and heater housing 500 decoupling zero.
In addition, can arrange further to be formed to point to and settle on the surface of the lower flange 6202 in the direction of filament assembly and it can be settled the main body coupling seal of seal insert groove 6400, and on the surface being formed at lower flange 6202 thus contact upper flange 6102 and it can be settled the flange of seal to be coupled seal insertion groove 6401.Form main body coupling seal and insert groove 6400 to strengthen sealing when bottom fixed part 6299 is coupled to heater housing 500 via the such as seal such as O shape ring or its analog, and formation flange coupling seal inserts groove 6401 to strengthen sealing when upper flange 6102 and lower flange 6202 are coupled to each other via the such as seal such as O shape ring or its analog.
Figure 12 A-12G illustrates the view according to the technique for the manufacture of integrated lamp of one exemplary embodiment.
In the following description, term " one end " indicates the end portion of associated components in a longitudinal direction, and term " other end " indicates the end portion be positioned in a longitudinal direction on the opposite side of described one end.
First, the technique manufacturing filament assembly is performed.Illustrated by Figure 12 A, the manufacturing process of filament assembly comprises: prepare the filament 644 formed by tungsten material, and wherein current flowing is in the sub-644a of first input end, through heater strip 644c, and flow in the second input terminal 644b, thus produces heat; And the conductive plate supports body 642 of preparation through being provided with the first conductive plate 641a and the second conductive plate 641b, each in described conductive plate is formed by Mo.Only for reference, the sub-644a of first input end and the second input terminal 644b is supported by filament supporter 643, and described filament supporter is formed by quartz material.
Illustrated by Figure 12 B, the sub-644a of first input end and the second input terminal 644b is attached to the first conductive plate 641a and the second conductive plate 641b respectively to be electrically connected.Next, illustrated by Figure 12 C, filament 644 is positioned in the filament protective casing 645 formed by quartz material, and the one end of then melting filament protective casing 645 is to be coupled to conductive plate supports body 642 regularly, thus sealing filament protective casing 645.After this; the inner space of filament protective casing 645 produces vacuum via the sprue bushing be formed on filament protective casing 645; via sprue bushing halogen gas is fed to so that halogen environment is changed in the inner space of filament protective casing 645 in the inner space of filament protective casing 645, and then seals sprue bushing.
And, illustrated by Figure 12 D, respectively the first conductor wire 650a and the second conductor wire 650b separately with electric conductivity are attached to the first conductive plate 641a and the second conductive plate 641b.Only for reference, first and second conductor wire 650a and 650b has predetermined length, and therefore its end eventually passes through fixed part 610 and stretches out.
Subsequently, illustrated by Figure 12 E, the conductive plate supports body 642 one end of heat-resisting reinforcement feature 630 being coupled to regularly filament assembly 640 is to make heat-resisting reinforcement feature 630 can not be separated from one another with the conductive plate supports body 642 of filament assembly 640, and coupled to each other regularly.Now, the first conductor wire 650a and the second conductor wire 650b is through heat-resisting reinforcement feature 630.And in this fixed coupling, one end of the conductive plate supports body 642 of filament assembly 640 can be solidified by heat-resisting reinforcement feature 630, thus is coupled regularly.Heat-resisting reinforcement feature 630 can by the ceramic material (Al with high-fire resistance 2o 3) formed.
After the heat-resisting reinforcement feature 630 of formation, illustrated by Figure 12 F, the other end of heat-resisting reinforcement feature 630 and one end of conductor wire protective casing 620 are coupled regularly so that can not decoupling zero each other.Heat-resisting reinforcement feature 630 and conductor wire protective casing 620 are coupled with being fixed to one another by Ceramic bond.Conductor wire protective casing 620 is the hollow posts formed by metal material, and the inside ceramic filler of conductor wire protective casing 620.Now, the first conductor wire 650a stretched out from heat-resisting reinforcement feature 630 and the second conductor wire 650b through the pottery of filling conductor wire protective casing 620, and then stretches out from conductor wire protective casing 620.
After formation conductor wire protective casing 620, illustrated by Figure 12 G, the other end of fixed part 610 and conductor wire protective casing 620 is coupled regularly so that can not decoupling zero each other.Now, the first conductor wire 650a and the second conductor wire 650b, through the inside of fixed part 610, stretches out and is connected to external power source unit.Filament assembly 640, heat-resisting reinforcement feature 630 and conductor wire protective casing 620 can be coupled along by the longitudinal direction of the integrated lamp by integrated type manufacture regularly by mentioned order.Because fixed part 610 can via screw or its analog be coupled to heater housing 500 and can with heater housing 500 decoupling zero, so comprise filament assembly 640, the integrated lamp of heat-resisting reinforcement feature 630 and conductor wire protective casing 620 and fixed part 610 is coupled to heater housing 500 by means of only fixed part 610 is coupled to heater housing 500.On the contrary, by fixed part 610 with heater housing 500 decoupling zero time, comprise filament assembly 640, the integrated lamp of heat-resisting reinforcement feature 630 and conductor wire protective casing 620 and fixed part 610 and heater housing 500 decoupling zero.
Only for reference, such as, to improve sealing when fixed part 610 is coupled to heater housing 500 in the lower surface that the seal 611a such as O shape ring or its analog can be placed in the edge of fixed part 610.
Although the manufacture of decoupling type lamp has the technique identical with previous process, it comprises respectively by the technique that top fixed part 6100 is coupled with bottom fixed part 6200 order further, illustrated by Figure 13 A, 13B.Only for reference, can arrange further to be formed to point to and settle on the surface of the lower flange 6202 in the direction of filament assembly and it can be settled the main body coupling seal of seal insert groove 6400, and on the surface being formed at lower flange 6202 thus contact upper flange 6102 and it can be settled the flange of seal to be coupled seal insertion groove 6401.Form main body coupling seal and insert groove 6400 to strengthen sealing when bottom fixed part 6200 is coupled to heater housing 500 via the such as seal such as O shape ring or its analog, and formation flange coupling seal inserts groove 6401 to strengthen sealing when upper flange 6102 and lower flange 6202 are coupled to each other via the such as seal such as O shape ring or its analog.
According to embodiment, realize integrated lamp to remove the inconvenience of staff lamp being installed to socket.And, according to embodiment, might not install or be separated, and therefore filament protective casing can not be destroyed, thus proterctive equipment.Therefore, the equipment that lamp can be installed to strengthen productive rate, and improves the service life of lamp.And, according to embodiment, adopt the conductor wire protective casing being adjacent to filament as heat-resisting reinforcement feature, thus improve the phenomenon making the carbonization of conductor wire protective casing.
Although describe integrated lamp equipment with reference to specific embodiment, it is not limited thereto.Therefore, those skilled in the art will readily appreciate that, when not departing from the spirit and scope of the present invention limited by appended claims, can carry out various modifications and variations to it.

Claims (15)

1. an integrated lamp equipment, is characterized in that comprising:
Filament assembly, it possesses the filament producing heat;
Heat-resisting reinforcement feature, its one end is coupled to described filament assembly regularly;
Conductor wire protective casing, its one end is coupled to the other end of described heat-resisting reinforcement feature regularly;
Fixed part, it is coupled to the other end of described conductor wire protective casing regularly; And
Conductor wire, its one end is electrically connected to described filament assembly, and sequentially through described heat-resisting reinforcement feature, described conductor wire protective casing and described fixed part, and its other end stretches out from described fixed part.
2. integrated lamp equipment according to claim 1, is characterized in that described filament assembly comprises:
Filament, the electric current wherein flowed in first input end passes heater strip, and flows through the second input terminal to produce heat;
Filament protective casing, it has described filament wherein;
First conductive plate, it is electrically coupled described first input end, and the first conductor wire is connected to described first conductive plate;
Second conductive plate, it is electrically coupled described second input terminal, and the second conductor wire is connected to described second conductive plate; And
Conductive support, it allows described first conductive plate and the second conductive plate to be placed in it on the surface, and its one end is coupled to described filament protective casing regularly, and the other end is coupled to described heat-resisting reinforcement feature regularly.
3. integrated lamp equipment according to claim 1, is characterized in that described filament protective casing has the longitudinal direction in the coupling direction equaling described heat-resisting reinforcement feature, described conductor wire protective casing and described fixed part.
4. integrated lamp equipment according to claim 3, is characterized in that forming described filament protective casing with the diameter making its diameter be equal to or less than described heat-resisting reinforcement feature.
5. integrated lamp equipment according to claim 1, is characterized in that described heat-resisting reinforcement feature is formed by ceramic material.
6. integrated lamp equipment according to claim 1, is characterized in that described conductor wire protective casing is formed by metal material.
7. integrated lamp equipment according to claim 1, is characterized in that the inside ceramic filler of described conductor wire protective casing.
8. integrated lamp equipment according to claim 1, is characterized in that described fixed part comprises:
The main column that described conductor wire passes; And
Projection flange, it circumferentially stretches out from the sidewall of described main column.
9. integrated lamp equipment according to claim 8, is characterized in that seal inserts groove type and is formed on the surface of the described projection flange pointing to the direction of settling described filament assembly.
10. integrated lamp equipment according to claim 1, is characterized in that described fixed part comprises:
Top fixed part, it has the upper flange of stretching out from an end face along its circumference;
Bottom fixed part, it has the lower flange stretching out to contact described upper flange along its circumference from an end face; And
Coupling unit, its be coupled described upper flange and described lower flange.
11. integrated lamp equipment according to claim 10, is characterized in that described top fixed part comprises:
Top cylinder;
Upper flange, it stretches out along its circumference from an end face of described top cylinder;
Coupling projection body, it stretches out from the surface of described top cylinder thus contacts described bottom fixed part, and on protrusion surface, have conductive lead wire plug insertion groove; And
External power connecting line, it is connected to described terminal pin and inserts groove and stretch out outside.
12. integrated lamp equipment according to claim 11, is characterized in that described bottom fixed part comprises:
Bottom cylinder;
Lower flange, it stretches out along its circumference from an end face of described bottom cylinder, relative with described upper flange; And
Coupling recesses, it has recessed from the surface of described bottom cylinder thus contacts the stepped surface of described top fixed part, and is formed by inserting the terminal pin that groove stretches out from stepped surface towards described terminal pin.
13. integrated lamp equipment according to claim 12, it comprises further:
Main body coupling seal inserts groove, and it is formed on the surface of the described lower flange pointing to the direction of settling described filament assembly, and it settles seal; And
Flange coupling seal inserts groove, its surface being formed at described lower flange contacts described upper flange, and it settles seal.
14. 1 kinds of methods for the manufacture of integrated lamp, is characterized in that described method comprises:
Preparation possesses the filament assembly of the filament producing heat;
Conductor wire is connected to described filament assembly;
Allow described conductor wire through the inside of heat-resisting reinforcement feature, and described filament assembly is coupled to regularly can not be separated with described filament assembly in one end of described heat-resisting reinforcement feature;
The described conductor wire through described heat-resisting reinforcement feature is allowed to stretch out, through conductor wire protective casing and other end one end of described conductor wire protective casing being coupled to regularly described heat-resisting reinforcement feature can not be separated with described heat-resisting reinforcement feature; And
Allow the described conductor wire through described conductor wire protective casing to stretch out, through the fixed part that can be coupled to heater housing, and described fixed part is coupled to described conductor wire protective casing regularly.
15. methods according to claim 14, is characterized in that before the other end described fixed part being coupled to regularly described conductor wire protective casing, the inside ceramic filler of described conductor wire protective casing.
CN201410618225.3A 2013-11-06 2014-11-05 Integrated lamp equipment and the method for manufacturing the integrated lamp equipment Active CN104633492B (en)

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CN110854044A (en) * 2019-11-20 2020-02-28 北京北方华创微电子装备有限公司 Semiconductor device and heating device thereof

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CN107305835A (en) * 2016-04-20 2017-10-31 Ap系统股份有限公司 Lamp and the method for manufacturing the lamp
CN107305835B (en) * 2016-04-20 2019-05-28 Ap系统股份有限公司 Lamp and method for manufacturing the lamp
CN110854044A (en) * 2019-11-20 2020-02-28 北京北方华创微电子装备有限公司 Semiconductor device and heating device thereof
CN110854044B (en) * 2019-11-20 2022-05-27 北京北方华创微电子装备有限公司 Semiconductor device and heating device thereof

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KR101501668B1 (en) 2015-03-12

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