KR100274231B1 - Field emission display device with hole for getter placement and manufacturing method thereof - Google Patents

Field emission display device with hole for getter placement and manufacturing method thereof Download PDF

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Publication number
KR100274231B1
KR100274231B1 KR1019960040392A KR19960040392A KR100274231B1 KR 100274231 B1 KR100274231 B1 KR 100274231B1 KR 1019960040392 A KR1019960040392 A KR 1019960040392A KR 19960040392 A KR19960040392 A KR 19960040392A KR 100274231 B1 KR100274231 B1 KR 100274231B1
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South Korea
Prior art keywords
getter
mounting hole
lower substrate
cover
field emission
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KR1019960040392A
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Korean (ko)
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KR19980021521A (en
Inventor
오재열
정효수
조영래
문제도
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김덕중
사단법인고등기술연구원연구조합
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Priority to KR1019960040392A priority Critical patent/KR100274231B1/en
Publication of KR19980021521A publication Critical patent/KR19980021521A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/38—Control of maintenance of pressure in the vessel
    • H01J2209/385—Gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/94—Means for exhausting the vessel or maintaining vacuum within the vessel
    • H01J2329/941—Means for exhausting the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/94—Means for exhausting the vessel or maintaining vacuum within the vessel
    • H01J2329/943—Means for maintaining vacuum within the vessel
    • H01J2329/945—Means for maintaining vacuum within the vessel by gettering
    • H01J2329/946—Means for maintaining vacuum within the vessel by gettering characterised by the position or form of the getter

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)

Abstract

PURPOSE: A field emission display having getter installation hole and a manufacturing method thereof are provided to secure a space to install getter easily by forming getter installation hole at one side of a lower substrate. CONSTITUTION: An upper substrate(19) is formed with an anode electrode and a phosphor apart from the lower substrate(10) by media of a spacer(18). A side wall for sealing is formed by applying, aligning and then firing a sealing material on surround of the lower substrate(10) and the upper substrate(19). A getter installation hole(11) has a designated width and length at one side and is formed parallel with the side wall for sealing of the lower substrate(10). A vent tube(16) is in a rear surface of the getter installation hole(11), a cover(14) is adhered to cover the getter hole by a sealant(17). A getter(12) is supported and installed to a getter support die(13) which is formed as a long axis bridge shape at the getter installation hole(11) inside the cover(14). The getter installation hole(11) installs the getter(12) which includes a getter electrode(15) that is formed at outside from the getter installation hole(11) in order to activate the getter(12).

Description

게터설치홀을 갖는 전계방출 표시소자 및 그 제조방법Field emission display device having getter mounting hole and manufacturing method thereof

본 발명은 전계방출 표시소자에 있어서 전계방출 표시소자 내부공간의 기체를 배기시키기 위해 진공펌핑공정을 실시한 후 내부공간에 잔존하는 잔류기체를 제거하기 위해 설치되는 게터의 설치공간이 하부기판에 확보되어 있는 전계방출 표시소자에 관한 것이다.According to the present invention, after the vacuum pumping process is performed to exhaust the gas in the internal space of the field emission display device, a getter installation space is installed on the lower substrate to remove residual gas remaining in the internal space. The present invention relates to a field emission display device.

전계방출 표시소자는 게이트 전극과 절연체 그리고 캐소드 전극으로 이루어진 필드 에미터가 형성되어 있는 하부기판과, 애노드 전극과 형광체가 화소단위로 형성되어 있는 상부기판을 스페이서를 매개로 하여 일정한 공간을 갖도록 정렬 접합한 후, 상하부 기판을 밀봉제인 실런트를 발라 소성시키고, 하부기판에 형성되어 있는 배기관을 연결하고, 상기 배기관을 진공펌프에 연결하여 진공펌핑을 실시한 다음, 배기용 세관을 용융접합하여 전계방출 표시소자를 완성하였다.The field emission display device includes a lower substrate on which a field emitter consisting of a gate electrode, an insulator, and a cathode electrode is formed, and an upper substrate on which the anode electrode and the phosphor are formed pixel by pixel, with a spacer to align a predetermined space. Then, the upper and lower substrates are coated with a sealant, which is a sealant, and fired, the exhaust pipes formed on the lower substrate are connected, the exhaust pipes are connected to a vacuum pump, and vacuum pumping is performed. To complete.

이때, 상기 전계방출 표시소자 내부공간에 존재하는 잔류가스를 제거하기 위하여 게터를 설치하게 되는데, 그 방법은 상하부 기판중 어느 한 기판에 일정한 길이와 깊이를 갖는 홈을 설치하여 그 홈에 게터를 설치하는 제1방법과, 또다른 방법으로 별도로 제조된 보조용기를 제작한 후, 그 보조용기를 배기구가 형성된 하부기판 배면에 부착하고 그 보조용기 내부에 게터를 설치하는 제2방법, 그리고 또 다른 방법으로는 하부기판의 배면에 게터를 장착할 수 있는 튜브로 만든 작은 캡슐을 덧붙이는 제3방법 등이 사용되었다.In this case, a getter is installed to remove residual gas present in the internal space of the field emission display device. In this method, a getter is installed in one of the upper and lower substrates, and a getter is installed in the groove. A second method of manufacturing the auxiliary container separately manufactured by the first method and another method, and then attaching the auxiliary container to the bottom of the lower substrate on which the exhaust port is formed and installing a getter inside the auxiliary container, and another method. For example, a third method of adding a small capsule made of a tube into which a getter can be mounted on the bottom of the lower substrate is used.

전계방출 표시소자 주공간에 상술한 것과 같은 세 가지의 게터설치 방법들중 제1방법으로 게터를 설치하게 되면 전계방출 표시소자의 진공펌핑공정이 어렵고, 게터 자체를 설치하기도 어렵다는 문제점이 있다.When the getter is installed as the first method among the three getter installation methods in the main space of the field emission display device, the vacuum pumping process of the field emission display device is difficult and the getter itself is difficult to be installed.

다음에 제2방법은 보조용기를 별도로 제조하여 부착하므로 전계방출 표시소자의 두께가 커져 박막화하는데 여려움이 따르고, 보조용기를 제조하기 위한 별도의 비용이 소요된다는 문제점이 있다.Next, since the second method separately manufactures and attaches the auxiliary container, the thickness of the field emission display device increases, which causes difficulty in thinning the film, and requires a separate cost for manufacturing the auxiliary container.

다음에 제3방법은 게터가 설치된 갭슐을 하부기판에 추가 설치하므로 제1방법과 바찬가지로 전계방출 표시소자의 진공펌핑공정시 배기가 어렵다는 문제점이 있다.Next, since the third method additionally installs a gap capsule provided with a getter on the lower substrate, there is a problem that it is difficult to evacuate during the vacuum pumping process of the field emission display device as in the first method.

따라서, 본 발명은 상술한 문제점을 해결하기 위하여 하부기판의 일측면에 소정의 길이와 폭을 갖는 게터설치홀을 형성하고, 상기 케터설치홀의 중앙에 게터지지대를 제작하고, 이어서 게터를 설치한 다음, 상기 게터설치홀이 설치된 하부기판의 배면에 배기용 세관이 설치되어 있는 덮개를 실런트로 접착시키고, 스페이서를 매개로 하여 상기 하부기판에 상부기판을 정렬접합시켜 전계방출 소자를 완성함으로서, 게터의 설치가 용이하고 배기공정이 용이한 전계방출 표시소자 및 그 제조방법을 제공하는 것을 목적으로 한다.Therefore, the present invention forms a getter mounting hole having a predetermined length and width on one side of the lower substrate in order to solve the above problems, to produce a getter support in the center of the keter mounting hole, and then install the getter By attaching a cover in which the exhaust tubing is installed on the rear surface of the lower substrate on which the getter mounting hole is installed with a sealant, and aligning and joining the upper substrate to the lower substrate through a spacer to complete the field emission device. It is an object of the present invention to provide a field emission display device and a method of manufacturing the same, which are easy to install and easy to exhaust.

도1은 본 발명에 따른 하부기판에 형성되어 있는 게터설치홀에 설치되어 있는 게터와 게터설치홀 하부에 게터설치홀 덮개가 부착되어 있는 것을 나타낸 하부기판의 평면EH.Figure 1 is a planar EH of the lower substrate showing that the getter is installed in the getter mounting hole formed in the lower substrate according to the present invention and the lower getter mounting hole cover is attached.

도2는 본 발명에 따른 게터가 설치된 게터설치홀을 갖는 전계방출 표시소자를 나타낸 단면도.2 is a cross-sectional view showing a field emission display device having a getter mounting hole provided with a getter according to the present invention;

〈도면의주요부분에대한부호의설명〉〈Description of the symbols for the main parts of the drawings〉

10 : 하부기판 11 : 게터설치홀10: lower substrate 11: getter mounting hole

12 : 게터 13 : 게터지지대12: getter 13: getter support

14 : 덮개 15 : 게터전극14 cover 15 getter electrode

16 : 배기관 17 : 실런트16 exhaust pipe 17 sealant

18 : 스페이서 19 : 상부기판18: spacer 19: upper substrate

20 : 전자방출부20: electron emission unit

본 발명은 전계방출 표시소자 내부에 게터설치 공간을 충분히 확보할 수 있으며, 확보된 공간에 게터 설치가 용이한 전계방출 표시소자 및 그 제조방법을 제공한다.The present invention provides a field emission display device and a method of manufacturing the field emission display device that can secure a getter installation space inside the field emission display device, and is easy to install a getter in the secured space.

도1은 본 발명에 따른 게터가 설치된 게터설치홀이 형성되어 있는 하부기판을 나타낸 것으로, 일반적으로 사용되는 하부기판(10)의 일측면에 폭이 약 2∼10mm 정도이고, 길이는 폭의 3배 이상인 게터설치홀(11)을 형성한 다음, 상기 게터설치홀(11)이 형성된 하부기판(10)의 전면에는 필드 에미터(도시되지 않음)를 형성하여 전자방출부(9)를 제조하고, 배면에는 상기 게터설치홀(11)을 충분히 덮을 수 있는 덮개(14)를 부착시키는데, 이때 덮개(14)의 중앙에는 전계방출 표시소자 내부공간의 배기공정을 실시할 수 있도록 배기관(16)이 설치된다. 또한 상기 덮개(14)는 실런트(17)로 하부기판(10)에 부착된다. 다음에 상기 덮개(14)의 안쪽에 설치되는 게터(12)가 후공정 실시중 과열로 인하여 파손되는 것을 방지하기 위하여 게터지지대(13)를 설치하고, 상기 설치되는 게터지지대(13) 상부에 게터(12)를 설치한 다음, 상기 게터(12)를 활성화시키기 위하여 게터전극(15)을 형성한 것을 나타낸 것이다.1 shows a lower substrate having a getter mounting hole provided with a getter according to the present invention, the width of which is about 2 to 10 mm on one side of the lower substrate 10 which is generally used, and the length is 3 of width. After forming a getter mounting hole 11 which is more than twice, a field emitter (not shown) is formed on the front surface of the lower substrate 10 on which the getter mounting hole 11 is formed, thereby manufacturing the electron emission unit 9. On the back side, a cover 14 is provided to cover the getter mounting hole 11 sufficiently, and in the center of the cover 14, an exhaust pipe 16 is provided to exhaust the space inside the field emission display device. Is installed. In addition, the cover 14 is attached to the lower substrate 10 with a sealant 17. Next, a getter support 13 is installed in order to prevent the getter 12 installed inside the cover 14 from being damaged due to overheating during the post-processing operation, and the getter support 13 is provided above the getter support 13. After the 12 is installed, the getter electrode 15 is formed to activate the getter 12.

상기에서 게터(12)의 설치시기는 덮개(14)에 게터지지대(13)와 게터(12)를 설치한 다음 덮개(14)를 부착시키거나, 하부기판(10)의 게터설치홀(11) 배면에 게터를 설치한 후 덮개(14)를 부착하여도 된다.When the getter 12 is installed, the getter support 13 and the getter 12 are installed on the cover 14, and then the cover 14 is attached or the getter mounting hole 11 of the lower substrate 10. The cover 14 may be attached after the getter is installed on the rear surface.

다음에 도2는 도1의 게터가 설치된 하부기판을 이용하여 제조된 전계방출 표시소자를 나타낸 것으로, 도1의 도시된 바와 같이 제조된 하부기판(10) 상부에 일정한 높이를 갖는 다수개의 스페이서(18)를 일정한 간격으로 형성 또는 부착시키고, 상기 스페이서(18) 상부에 애노드 전극과 형광체(도시되지 않음)가 형성되어 있는 상부기판(19)을 정렬접합 시킨 다음, 상기 정렬접합된 상하부 기판(19,10)의 테두리를 밀봉제인 실런트(17)를 바른 후 소성시켜 측벽을 형성한다. 다음에 상술한 바와 같이 형성된 덮개(14)의 배기관(16)에 진공펌프를 연결하여 진공펌핑을 실시한 다음, 배기관(16)을 용융접합 시켜 전계방출 표시소자를 완성하게 된다.Next, FIG. 2 illustrates a field emission display device manufactured using the lower substrate on which the getter of FIG. 1 is installed, and a plurality of spacers having a predetermined height on the lower substrate 10 manufactured as shown in FIG. 18) are formed or attached at regular intervals, and the upper substrate 19 having the anode electrode and the phosphor (not shown) formed on the spacer 18 is aligned and bonded, and then the aligned upper and lower substrates 19 , 10 is applied to the sealant 17 as a sealant and then fired to form sidewalls. Next, vacuum pumping is performed by connecting a vacuum pump to the exhaust pipe 16 of the cover 14 formed as described above, and then the exhaust pipe 16 is melt-bonded to complete the field emission display device.

상술한 바와 같이 제조된 전계방출 표시소자의 게터 설치방법은 도1에 도시되어 있는 게터전극(15)에 전원을 인가하여 게터(12)를 활성화시킴으로써 전계방출 표시소자 내부에 존재하는 잔류가스를 제거하게 된다. 경우에 따라서는 열원으로 고주파를 이용하여 게터(12)를 활성화 시키기도 하는데, 이때는 게터 전극이 필요 없게 된다.The getter installation method of the field emission display device manufactured as described above removes residual gas present in the field emission display device by activating the getter 12 by applying power to the getter electrode 15 shown in FIG. Done. In some cases, the getter 12 may be activated using a high frequency as a heat source, in which case the getter electrode is not required.

본 발명은 상술한 바와 같이 하부기판의 일측면에 게터설치홀을 형성하여 그 게터설치홀에 게터를 설치하며, 상기 게터설치홀을 덮는 덮개에 배기관을 설치하여 배기공정을 실시함으로서, 게터를 설치하기 위한 공간의 확보가 용이하고, 게터설치홀의 길이가 폭에 비해 3배 이상 크게 형성되기 때문에 배기관과 내부공간 사이에 컨덕턴스가 커서 배기가 용이하다.The present invention forms a getter mounting hole on one side of the lower substrate as described above, and installs a getter in the getter installation hole, and installs a getter by installing an exhaust pipe in a cover covering the getter installation hole, thereby providing a getter. It is easy to secure a space for the purpose, and because the length of the getter installation hole is formed three times larger than the width, the conductance is large between the exhaust pipe and the internal space, thereby facilitating the exhaust.

또한 종래의 기술처럼 게터를 설치하기 위한 공간을 확보하기 위해 별도의 보조공간을 갖는 보조용기가 필요없으므로 부피를 크게 늘릴 필요가 없고, 제조비용이 저렴하다는 장점이 있다.In addition, since there is no need for an auxiliary container having a separate auxiliary space in order to secure a space for installing the getter as in the prior art, there is no need to greatly increase the volume, and there is an advantage that the manufacturing cost is low.

Claims (6)

하부기판; 상기 하부기판과 스페이서를 매개로하여 이격되어 있는 애노드 전극과 형광체가 형성되어 있는 상부기판; 상기 하부기판과 상부기판의 테두리에 밀봉제를 발라 정렬시킨 후 소성시켜 형성되는 실링용 측벽; 일측면에는 소정의 폭과 길이를 갖고, 상기 하부기판의 실링용 측벽과 나란하게 형성되는 게터설치홀; 상기 게터 설치홀의 배면에는 배기관을 갖고, 상기 게터 설치홀을 덮을 수 있도록 실런트에 의해 부착된 덮개; 상기 덮개의 안쪽 게터 설치홀에 장축의 다리 형상으로 형성된 게터지지대에 지지되어 설치되어 있는 게터; 및 상기 게터를 활성화시키기 위해 게터설치홀에서 외부로 형성되어 있는 게터 전극을 포함하는 게터가 설치된 게터설치홀을 갖는 전계방출 표시소자.Lower substrate; An upper substrate on which an anode electrode and a phosphor are spaced apart from each other via the lower substrate and a spacer; A sealing side wall formed by aligning and applying a sealant to the edges of the lower substrate and the upper substrate and then firing the sealing; A getter installation hole having a predetermined width and length on one side and formed in parallel with the sealing sidewall of the lower substrate; A cover having an exhaust pipe on a rear surface of the getter mounting hole and attached by a sealant to cover the getter mounting hole; A getter supported by a getter support formed in a leg shape of a long axis in an inner getter installation hole of the cover; And a getter mounting hole including a getter electrode formed outwardly from the getter mounting hole for activating the getter. 제1항에 있어서, 상기 게터설치홀의 폭은 약 2 내지 10mm인 것을 특징으로 하는 게터가 설치된 게터설치홀을 갖는 전계방출 표시소자.The field emission display device of claim 1, wherein the getter mounting hole has a width of about 2 to 10 mm. 제1항에 있어서, 상기 게터설치홀의 길이는 폭이 3배 이상인 것을 특징으로 하는 게터가 설치된 게터설치홀을 갖는 전계방출 표시소자.2. The field emission display device according to claim 1, wherein the getter mounting hole has a length of three times or more in width. 제1항에 있어서, 상기 게터설치홀에 설치되어 있는 게터를 활성화시키기 위한 게터 전극이 필요없이 고주파로 활성화시키는 것을 특징으로 하는 게터가 설치된 게터설치홀을 갖는 전계방출 표시소자.The field emission display device according to claim 1, wherein the getter is provided with a getter mounting hole, characterized in that the getter electrode for activating the getter provided in the getter mounting hole is activated at a high frequency. 하부기판에 소정의 폭과 길이를 갖는 게터설치홀을 형성하는 단계와, 상기 게터설치홀이 설치된 하부기판의 전면에 필드 에미터를 형성하는 단계와, 상기 게터설치홀과 필드 에미터가 형성된 하부기판의 배면에 배기관이 설되어 있는 게터설치홀 덮게를 제작하는 단계와, 상기 게터설치홀을 덮은 덮개의 게터지지대에 게터를 설치하는 단계와, 상기 하부기판에 스페이서를 형성 또는 설치하는 단계와, 상기 스페이서를 매개로 하부기판에 대향하는 상부기판을 제조하는 단계와, 상기 게터설치홀 덮개 및 상하부 기판의 테두리에 밀봉제를 발라 정렬시킨 후 소성시켜 측벽을 형성하는 단계와, 상기 측벽이 형성된 상하부기판 내부공간을 진공실링하는 단계를 포함하는 게터설치홀을 갖는 전계방출 표시소자의 제조방법.Forming a getter mounting hole having a predetermined width and length in the lower substrate, forming a field emitter on a front surface of the lower substrate on which the getter mounting hole is installed, and a lower portion in which the getter mounting hole and the field emitter are formed; Manufacturing a getter installation hole cover having an exhaust pipe installed on a rear surface of the substrate, installing a getter on a getter support of a cover covering the getter installation hole, forming or installing a spacer on the lower substrate; Manufacturing an upper substrate facing the lower substrate via the spacer; forming a sidewall by applying a sealant to the edges of the getter installation hole cover and the upper and lower substrates, and then firing to form sidewalls; A method of manufacturing a field emission display device having a getter mounting hole, the method comprising vacuum sealing an internal space of a substrate. 제5항에 있어서, 상기 덮게에 게터지지대에 지지된 게터는 덮개를 하부기판에 부착시키기 전에 설치하는 것을 특징으로 하는 게터설치홀을 갖는 전계방출 표시소자의 제조방법.6. The method of claim 5, wherein the getter supported by the getter support on the cover is installed before the cover is attached to the lower substrate.
KR1019960040392A 1996-09-17 1996-09-17 Field emission display device with hole for getter placement and manufacturing method thereof KR100274231B1 (en)

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JPS6243044A (en) * 1985-08-20 1987-02-25 Futaba Corp Fluorescent character display tube

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JPS6243044A (en) * 1985-08-20 1987-02-25 Futaba Corp Fluorescent character display tube

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