KR20010039299A - Exhaust structure of field emission display - Google Patents

Exhaust structure of field emission display Download PDF

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Publication number
KR20010039299A
KR20010039299A KR1019990047626A KR19990047626A KR20010039299A KR 20010039299 A KR20010039299 A KR 20010039299A KR 1019990047626 A KR1019990047626 A KR 1019990047626A KR 19990047626 A KR19990047626 A KR 19990047626A KR 20010039299 A KR20010039299 A KR 20010039299A
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South Korea
Prior art keywords
panel
exhaust
getter
vent
exhaust structure
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KR1019990047626A
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Korean (ko)
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우광제
김민수
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김영남
오리온전기 주식회사
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Priority to KR1019990047626A priority Critical patent/KR20010039299A/en
Publication of KR20010039299A publication Critical patent/KR20010039299A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385Exhausting vessels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26Sealing together parts of vessels
    • H01J9/261Sealing together parts of vessels the vessel being for a flat panel display

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)

Abstract

PURPOSE: A vent structure of field emission display is provided to prevent thickness increase with vent tube by parallelly connecting vent tube to panel, to increase vent efficiency by forming vent tube with variable shape and as much as the number, to prevent pollution inside panel by venting directly gas with vent tube not through panel. CONSTITUTION: An upper substrate(10) and lower substrate is adhered by sealing paste. Vent holes are formed at one side of lower substrate. A contact of body(12) is opened and adhered to lower substrate to cover above vent hole. Vent tube(14) is expanded in a parallel direction to panel at one end side of body(12). Getter insert hole(16) is expanded in a parallel direction to panel at the other end side of body(12). Vent structure of FED has getter that is formed and expanded up to body through getter insert hole(16).

Description

전계방출 표시소자의 배기구조체{Exhaust structure of field emission display}Exhaust structure of field emission display

본 발명은 전계방출 표시소자(Field Emission Display; 이하 FED라 칭함)의 배기구조체에 관한 것으로, 특히 반원통형 몸체의 양측에 패널과 평행한 방향으로 연장되어있는 배기관 및 게터삽입관을 구비하여 몸체를 하부기판의 배기구를 덮도록 설치하고, 게터를 게터삽입관을 통하여 몸체에 삽입하며, 배기구로 패널 내부의 공기를 배기시키도록 하여, 배기관에 의한 패널의 두께 증가를 방지하고, 배기효율을 증가시킬 수 있는 FED의 배기구조체에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust structure of a field emission display (hereinafter referred to as a FED), and in particular, a body having an exhaust pipe and a getter insertion tube extending in a direction parallel to the panel on both sides of a semi-cylindrical body. It is installed to cover the exhaust port of the lower substrate, the getter is inserted into the body through the getter insertion tube, and the exhaust port allows the air inside the panel to be exhausted, thereby preventing the thickness increase of the panel by the exhaust pipe and increasing the exhaust efficiency. The present invention relates to an exhaust structure of a FED.

최근에는 초고집적 반도체 제조기술과 초고진공 기술이 급속히 발달함에 따라 새로운 형태인 마이크론 크기의 삼극진공관 소자의 연구가 활기를 띠고 있으며, 이러한 소자를 디스플레이에 응용하여 CRT의 고화질성과 액정표시장치(LCD)의 경박화 및 저전압 구동등과 같은 장점만을 가진 새로운 평판표시장치를 개발하는 데 주목하고 있다.Recently, with the rapid development of ultra-high-density semiconductor manufacturing technology and ultra-high vacuum technology, research on new micron-sized tripolar vacuum tube devices has been invigorating, and these devices have been applied to displays to improve the quality of CRTs and liquid crystal displays (LCDs). Attention is drawn to the development of new flat panel displays that have advantages such as thinning and low voltage driving.

FED는 평판디스플레이의 일종으로서, 전자를 방출하는 팁형 또는 웨지(Wedge)형의 캐소드판과 형광체가 도포된 애노드판이 일정간격을 가지고 진공 패키징되어 있어, 다수의 마이크로 팁으로부터 전자방출을 유도하여, 발생된 전자를 투명전도막이 형성된 애노드의 형광체에 층돌시켜, 형광체가 자극을 받아 형광체의 최외각 전자들이 여기 되고, 천이 되는 과정에서 발생된 빛을 이용하여 원하는 화상표시를 나타내도록 구성되어 있다.FED is a type of flat panel display, in which tip- or wedge-type cathode plates emitting electrons and anode plates coated with phosphors are vacuum-packed at regular intervals to induce electron emission from a plurality of micro tips. The formed electrons are stratified onto the phosphor of the anode on which the transparent conductive film is formed, the phosphor is stimulated to excite the outermost electrons of the phosphor, and is configured to display a desired image display using light generated in the process of transition.

여기서 상기의 진공패키징 기술은 패널의 상면기판인 에노드판(anode plate)과 하면기판인 캐소드판(cathode plate)을 서로 마주보게 부착한 후, 배기세관을 통해 진공배기하여 FED소자를 동작시킬 수 있도록 하는 기술이다.In the vacuum packaging technology, the FED device can be operated by attaching an anode plate, which is the upper substrate of the panel, and a cathode plate, which is the lower substrate, to face each other, and then evacuating through the exhaust tubing. Technology

그리고, 상기 진공패키징 기술은 우선, 패널 내부의 진공도를 가능하면 저진공으로 낮추는 진공배기 공정과, 상기 진공배기된 패널의 진공도를 패널의 동작시간동안 유지하는 게터링공정과, 그리고 상·하면기판의 간격을 대기압으로부터 일정한 간격으로 유지하도록 하는 스페이서 기술이 있다.The vacuum packaging technology first includes a vacuum exhaust process that lowers the degree of vacuum inside the panel to a low vacuum if possible, a gettering process of maintaining the vacuum degree of the vacuum exhausted panel during operation of the panel, and a top and bottom substrate. There is a spacer technique that allows the spacing of to be maintained at a constant spacing from atmospheric pressure.

이때, 게터(getter)의 기능은 배기를 통해 확보된 진공도를 FED가 원하는 진공도까지 확보할 뿐만 아니라, 확보된 진공도를 패널의 생존기간(lifetime) 동안 유지하는 것이다. 게터 기술에 있어서, 가장 중요한 것은 게터가 패널의 제작공정 중 손상이 되지 않도록 하는 것이다.At this time, the function of the getter (getter) is to not only ensure the vacuum degree secured through the exhaust up to the desired vacuum degree, but also to maintain the vacuum degree secured for the lifetime of the panel. In getter technology, the most important thing is to ensure that the getter is not damaged during the manufacturing process of the panel.

박형 디스플레이 소자의 가치를 높이는 요소중 하나가 패널의 두께를 감소시키는 것이나, 패널의 두께를 결정하는 중요한 요인이 진공배기공정에 달려 있어 이에 대한 연구가 많이 진행되고 있다.One of the factors that increases the value of the thin display device is to reduce the thickness of the panel, but the important factor for determining the thickness of the panel depends on the vacuum exhaust process, and much research is being conducted on this.

일반적으로 FED의 진공배기는 CRT와 같이, 배면 기판에 형성된 배기구와 연결된 배기관을 이용하여 배기한 후 이를 봉합시키는 공정을 사용하게 되는데, 이 방법은 공정이 쉽고 비용이 저렴한 이저미 있으나, 봉합 후 남아 있는 배기관의 길이 때문에 패널의 실제 두께가 1㎝ 이상 두꺼워지는 문제점이 있다.In general, the vacuum exhaust of the FED uses a process of exhausting the exhaust by using an exhaust pipe connected to the exhaust port formed on the rear substrate, such as a CRT, and then sealing the same, which is easy and inexpensive, but remains after sealing. Due to the length of the exhaust pipe, there is a problem that the actual thickness of the panel becomes thicker than 1 cm.

다른 방법으로는 진공챔버내에서 패널을 배기하고 실링시켜 배기관이 불필요하도록 하는 방법이 있으나, 이 방법은 공정시간이 많이 걸리고, 비용이 증가되어 생산 공정에 적용하기는 어려운 문제점이 있다.Another method is to exhaust and seal the panel in the vacuum chamber so that the exhaust pipe is unnecessary, but this method takes a lot of processing time, increases costs, and is difficult to apply to the production process.

본 발명은 상기와 같은 문제점들을 해결하기 위한 것으로서, 본 발명의 목적은 게터의 백첨버에 배기관의 역할을 하도록하고, 배기관을 패널에 평행하게 배치시켜 배기관에 의한 패널의 두께 증가를 방지하고, 배기 효율을 증가시킬 수 있는 FED의 배기구조체를 제공함에 있다.The present invention is to solve the above problems, an object of the present invention is to act as an exhaust pipe in the backbone of the getter, to arrange the exhaust pipe parallel to the panel to prevent the increase in the thickness of the panel by the exhaust pipe, exhaust It is to provide an exhaust structure of the FED that can increase the efficiency.

도 1a는 본 발명에 따른 전계방출 표시소자의 배기구조체 평면도.1A is a plan view of an exhaust structure of a field emission display device according to the present invention;

도 1b는 본 발명에 따른 전계방출 표시소자의 배기구조체 측면도.Figure 1b is a side view of the exhaust structure of the field emission display device according to the present invention.

도 2는 본 발명에 따른 배기구조체가 설치되어 있는 패널의 평면도.2 is a plan view of a panel on which an exhaust structure according to the present invention is installed;

< 도면의 주요부분에 대한 부호의 설명 ><Explanation of symbols for the main parts of the drawings>

10 : 상면기판 12 : 몸체10: top substrate 12: body

14 : 배기관 16 : 게터삽입관14: exhaust pipe 16: getter insertion pipe

18 : 게터 19 : 듀멧와이어18: getter 19: Dumet wire

20 : 패널 22 : 하부기판20: panel 22: lower substrate

24 : 상부기판 26 : 실링 페이스트24: upper substrate 26: sealing paste

28 : 배기구 30 : 디스플레이영역28: exhaust port 30: display area

상기 목적을 달성하기 위한 본발명에 따른 FED 배기구조체의 특징은,Features of the FED exhaust structure according to the present invention for achieving the above object,

상면기판과 하면기판이 실링 페이스트에 의해 접합되고, 하면기판의 일측면에 형성된 북수개의 배기구를 구비하는 전계방출 표시소자의 배기구조체에 있어서,In the exhaust structure of the field emission display device having the upper substrate and the lower substrate bonded to each other by a sealing paste and having a plurality of exhaust ports formed on one side of the lower substrate,

상기 배기구를 덮도록 하면기판에 접합되며, 접합면이 개방되어있는 몸체와,A body which is bonded to the substrate when the exhaust port is covered, and whose bonding surface is open;

상기 몸체의 일측단부에서 패널과 평행한 방향으로 연장되어있는 배기관과,An exhaust pipe extending in a direction parallel to the panel at one end of the body,

상기 몸체의 타측단부에서 패널과 평행한 방향으로 연장되어있는 게터삽입구와,A getter insertion hole extending in a direction parallel to the panel at the other end of the body,

상기 게터삽입구를 통하여 상기 몸체까지 연장형상된 게터를 구비함에 있다.The getter extends to the body through the getter insertion opening.

이하, 첨부된 도면을 참조하여 본 발명에 따른 FED의 배기구조체에 관하여 상세히 설명한다.Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the exhaust structure of the FED according to the present invention.

도 1a 및 도 1b는 본 발명에 따른 FED 배기구조체의 정면도 및 측면도로서, 상기 배기구조체(10)는 전체적으로 유리재질로 형성되어있으며, 몸체(12)는 일면이 절단된 반원통형 관의 형상이고, 그 양측에는 배기관(14)과 게터삽입관(16)이 패널과 평행한 방향으로 연결되어있다.1A and 1B are front and side views of the FED exhaust structure according to the present invention, wherein the exhaust structure 10 is entirely formed of a glass material, and the body 12 is in the shape of a semi-cylindrical tube cut at one surface thereof. On both sides thereof, the exhaust pipe 14 and the getter insertion tube 16 are connected in a direction parallel to the panel.

도 2는 본발명에 따른 배기구조체(10)가 패널(20)에 부착되어있는 상태의 평면도이다.2 is a plan view of a state in which the exhaust structure 10 according to the present invention is attached to the panel 20.

먼저, 캐소드등이 형성되어있는 하부기판(22)과 애노드등이 형성되어있는 상부기판(24)을 실링 페이스트(26)를 사용하여 접합시킨 후, 하부기판(22)의 일측 상하에 형성되어있는 배기구(28)가 덮히도록 도1a의 배기구조체(10)를 프릿 글라스등을 사용하여 하부기판(22)에 부착시킨다. 여기서 상기 배기구(28)는 두 개를 형성하였으나, 기판의 강도에 영향을 미치지 않는 범위내에서 다수개를 형성하거나, 커다랗게 형성할 수도 있으며, 상기 배기구(28)는 패널 중심의 디스플레이영역(30) 외부 형성한다.First, the lower substrate 22, on which the cathode and the like are formed, and the upper substrate 24, on which the anode and the like are formed, are bonded using the sealing paste 26, and then formed on one side of the lower substrate 22 above and below. The exhaust structure 10 of FIG. 1A is attached to the lower substrate 22 using frit glass or the like so that the exhaust port 28 is covered. Here, two exhaust ports 28 may be formed, but a plurality of exhaust ports 28 may be formed or large within a range that does not affect the strength of the substrate. The exhaust ports 28 may include a display area 30 at the center of the panel. A) Forms outside.

그후, 상기 배기구조체(10) 일측의 게터삽입관(16)을 통하여 전류인가 및 게터 고정을 위한 듀멧와이어(19)와 연결된 전기가열형 게터(18)를 몸체(12)내에 위치하도록 삽입하고, 상기 게터삽입관(16)을 밀봉한 후, 백 챔버(10) 타측의 배기관(14)을 통하여 패널(20) 내부의 공기를 제거하고, 배기관(14)을 밀봉한다. 이때 상기 배기구(28)가 두곳에 형성되어 있어 배기 효율이 향상되며, 배기관(14)과 게터삽입관(16)이 패널(20)에 평행한 방향으로 연장되어있어 전체 패널의 두께를 증가시키는 정도가 작다.Subsequently, an electric heating getter 18 connected to the dummet wire 19 for applying current and fixing the getter is inserted into the body 12 through the getter insertion tube 16 on one side of the exhaust structure 10, After sealing the getter insertion tube 16, the air in the panel 20 is removed through the exhaust pipe 14 on the other side of the back chamber 10, and the exhaust pipe 14 is sealed. At this time, since the exhaust port 28 is formed in two places, the exhaust efficiency is improved, and the exhaust pipe 14 and the getter insertion tube 16 extend in a direction parallel to the panel 20 to increase the thickness of the entire panel. Is small.

그다음 상기 듀멧와이어(19)에 전류를 인가하여 게터(18)를 활성화시켜 잔류 가스를 제거한 후, 배기관(14)과 게터삽입관(16)의 외측을 절단한다. 이러한 배기구조체는 셀갭이 작은 저전압 FED에서의 게터 실장에 더욱 유리한 효과를 가지며, 몸체는 원통형이 아니라도 다면체형으로 형성할 수 있음은 물론이다.Then, a current is applied to the dummet wire 19 to activate the getter 18 to remove residual gas, and then the outside of the exhaust pipe 14 and the getter insertion tube 16 is cut off. Such an exhaust structure has a more advantageous effect on getter mounting in a low voltage FED having a small cell gap, and the body can be formed in a polyhedral shape as well as a cylindrical shape.

이상에서 설명한 바와 같이 본 발명에 따른 FED의 배기구조체는 반원통형 몸체와 그 양측에 패널과 평행하게 연결되어있는 배기관 및 게터삽입관을 구비하는 배기구조체를 패널 하부기판의 배기구를 덮도록 설치하고, 듀멧와이어와 연결된 게터를 게터삽입관을 통하여 몸체에 삽입한 후, 게터삽입관을 밀봉하고, 배기구로 패널 내부의 공기를 배기한 후 배기관도 밀봉시키고, 게터를 활성화시켜 잔류가스를 제거하도록하였으므로, 배기관이 패널에 평행하게 연결되어있어 배기관에 의한 패널의 두께 증가가 방지되고, 배기구를 다양한 형태 및 개수만큼 형성할 수 있어 배기효율이 증가되며, 게터 활성시에 발생된 가스를 패널을 통하지 않고 직접 배기관을 배기 시킬 수 있어 패널 내부의 오염을 방지할 수 있는 이점이 있다.As described above, the exhaust structure of the FED according to the present invention is provided with a semi-cylindrical body and an exhaust structure having an exhaust pipe and a getter insertion pipe connected to the panel on both sides in parallel with the panel, so as to cover the exhaust port of the lower panel of the panel, Since the getter connected to the Dumet wire was inserted into the body through the getter insertion tube, the getter insertion tube was sealed, the air inside the panel was exhausted through the exhaust port, the exhaust pipe was also sealed, and the getter was activated to remove residual gas. The exhaust pipe is connected to the panel in parallel to prevent the increase of the thickness of the panel by the exhaust pipe, and the exhaust port can be formed in various shapes and numbers to increase the exhaust efficiency. Exhaust pipe can be exhausted to prevent contamination inside the panel.

Claims (3)

상면기판과 하면기판이 실링 페이스트에 의해 접합되고, 하면기판의 일측면에 형성된 북수개의 배기구를 구비하는 전계방출 표시소자의 배기구조체에 있어서,In the exhaust structure of the field emission display device having the upper substrate and the lower substrate bonded to each other by a sealing paste and having a plurality of exhaust ports formed on one side of the lower substrate, 상기 배기구를 덮도록 하면기판에 접합되며, 접합면이 개방되어있는 몸체와,A body which is bonded to the substrate when the exhaust port is covered, and whose bonding surface is open; 상기 몸체의 일측단부에서 패널과 평행한 방향으로 연장되어있는 배기관과,An exhaust pipe extending in a direction parallel to the panel at one end of the body, 상기 몸체의 타측단부에서 패널과 평행한 방향으로 연장되어있는 게터삽입구와,A getter insertion hole extending in a direction parallel to the panel at the other end of the body, 상기 게터삽입구를 통하여 상기 몸체까지 연장형상된 게터를 구비하는 FED의 배기구조체.An exhaust structure of a FED having a getter extending through the getter insertion opening to the body. 제 1 항에 있어서,The method of claim 1, 상기 몸체가 반원통형상인 것을 특징으로하는 FED의 배기구조체.The exhaust structure of the FED, characterized in that the body is semi-cylindrical. 제 1 항에 있어서,The method of claim 1, 상기 몸체가 다면체인 것을 특징으로하는 FED의 배기구조체.The exhaust structure of the FED, characterized in that the body is a polyhedron.
KR1019990047626A 1999-10-29 1999-10-29 Exhaust structure of field emission display KR20010039299A (en)

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