CN105692545B - A kind of getter electrical heating activates device - Google Patents
A kind of getter electrical heating activates device Download PDFInfo
- Publication number
- CN105692545B CN105692545B CN201610207890.2A CN201610207890A CN105692545B CN 105692545 B CN105692545 B CN 105692545B CN 201610207890 A CN201610207890 A CN 201610207890A CN 105692545 B CN105692545 B CN 105692545B
- Authority
- CN
- China
- Prior art keywords
- electrical heating
- bridge floor
- getter
- support bridge
- activation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
- B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
Abstract
The present invention provides a kind of getter electrical heating activation device, including the support bridge floor made using high-temperature insulation material, it is described support bridge floor by conductive bridge pier erect come, layers of getter material is provided with support bridge floor, the layers of getter material carries out heat activation by electrical heating wire, the electrical heating wire is electrically connected with conductive bridge pier, forms supply access.When the present invention is used, by electrical heating wire electrified regulation under high vacuum environment, utilize its " thermoelectricity inhibition effect " intermittent detection resistance value, realize closed loop detection temperature, ensure its accurate temperature control, fully activation gettering material, improves gettering efficiency, ensures performance and the life-span of associated vacuum device.
Description
Technical field
The present invention relates to a kind of getter heat activation device, and in particular to a kind of getter electrical heating activates device.
Background technology
The intelligence sensor manufactured using MEMS technology, such as：Acceleration, gyroscope, resonant pressure, photoelectric image etc., this
A little intelligence sensors need to be operated in the environment of high vacuum, high-cleanness, could ensure its index Q values and life-span.In order to meet
Intelligence sensor, is generally packaged in airtight cavity and impurity is set in airtight cavity by intelligence sensor working environment demand
Absorbing elements, such as getter, for absorbing the pollutants such as gas, moisture that encapsulation inside cavity slowly discharges, remain internal
High vacuum environment.
At present, getter is generally using the form such as film, column, sheet, using preceding needing getter being heated to 300
~900 DEG C, fully can normally it be used after activation.Such as our company disclosed in Application No. 2015107877841,
Wherein, column and sheet getter are generally electrically heated activation using built-in metal silk, and film-form getter is then generally adopted
Use metallic plate heat activation.Using above-mentioned getter heat activation device, its temperature can not be controlled accurately, it is impossible to ensure fully to swash
Getter living, it is impossible to meet the demand that device is activated in market to high-performance getter.
The content of the invention
It is right it is an object of the invention to provide a kind of new getter electrical heating activation device in order to solve the above problems
Traditional getters heat activation device has carried out breakthrough improvement, significantly improves activation effect.
The technical solution adopted by the present invention is：A kind of getter electrical heating activates device, including uses high-temperature insulation material
Expect the support bridge floor made, the support bridge floor erects to be provided with gettering material on support bridge floor by conductive bridge pier
Layer, the layers of getter material is electrically connected by electrical heating wire heat activation, the electrical heating wire with conductive bridge pier, shape
Into supply access.
Preferably, the getter electrical heating activation device is single layer structure, and the number of the support bridge floor is 1, described
Layers of getter material and electrical heating wire are separately positioned in the upper and lower surface of support bridge floor, or lower surface and upper table
On face.
Preferably, the getter electrical heating activation device is single layer structure, and the number of the support bridge floor is 2, wherein,
First support bridge floor is erected come the second support bridge floor is arranged on the first support bridge by electrical heating wire by conductive bridge pier
On face, the layers of getter material is separately positioned on the upper surface of the lower surface of the first support bridge floor and the second support bridge floor.
Preferably, the getter electrical heating activation device is that the number of support bridge floor in sandwich construction, each layer is 1,
The layers of getter material and electrical heating wire be separately positioned on support bridge floor upper and lower surface on, or lower surface and
On upper surface.
Preferably, the getter electrical heating activates device for sandwich construction, and support bridge floor number is 2 in each layer, its
In, the first support bridge floor is erected come the second support bridge floor is arranged on first by electrical heating wire by conductive bridge pier
Support on bridge floor, the layers of getter material is separately positioned on the lower surface of the first support bridge floor and the upper surface of the second support bridge floor
On.
Preferably, the electrical heating wire is bending or annular shape.
Preferably, the conductive bridge pier is made of metal or alloy.
Preferably, the layers of getter material is alloy or graphene.
Preferably, the support bridge floor is shaped as square, polygon or circle.
Preferably, the support bridge floor is made using silicon nitride or silica.
Compared with prior art, the beneficial effects of the present invention are：
The present invention has carried out breakthrough improvement to traditional getters heat activation device, will use high-temperature insulation material
The support bridge floor of making erects to be provided with layers of getter material on support bridge floor, the layers of getter material leads to by bridge pier
Cross electrical heating wire and carry out heat activation.In use, electrical heating wire electrified regulation is utilized into it under high vacuum environment
" thermoelectricity inhibition effect " intermittence detection resistance value, realizes closed loop detection temperature, accurately controls temperature, fully activate gettering material,
Improve gettering efficiency, the performance of full-scope safeguards associated vacuum device and life-span；In addition, the present invention is designed into sandwich construction can
More accommodation spaces are provided for gettering material, gettering material contact area is significantly increased in limited space, air-breathing effect is improved
Really, associated vacuum device service life is extended.
Brief description of the drawings
Fig. 1 is the getter electrical heating activation apparatus structure schematic diagram 1 provided in embodiment 1；
Fig. 2 is the getter electrical heating activation apparatus structure schematic diagram 2 provided in embodiment 1；
Fig. 3 is the getter electrical heating activation apparatus structure schematic diagram 3 provided in embodiment 1；
Fig. 4 is getter electrical heating activation device top view 1 of the present invention；
Fig. 5 is getter electrical heating activation device top view 2 of the present invention；
Fig. 6 is the getter electrical heating activation apparatus structure schematic diagram 4 that embodiment 2 is provided；
Fig. 7 is the getter electrical heating activation apparatus structure schematic diagram 5 that embodiment 2 is provided；
Fig. 8 is the getter electrical heating activation apparatus structure schematic diagram 6 that embodiment 2 is provided.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
Embodiment 1：Referring to Fig. 1 to 3, a kind of getter electrical heating activates device, including uses high-temperature insulation material system
The support bridge floor 10 of work, the support bridge floor 10 erects to be provided with air-breathing on support bridge floor 10 by conductive bridge pier 20
Material layer 30, the layers of getter material 30 be by electrical heating wire 40 carry out heat activation, the electrical heating wire with
Conductive bridge pier electrical connection, forms supply access.In the present invention, the electrical connection can be directly connected to or by conductive gold
True existing electrical connection.
Specifically, the support bridge floor can be, but not limited to from high-temperature insulation material systems such as silicon nitride or silica
Into；The conductive bridge pier can be, but not limited to be made of metal or alloy；The layers of getter material can select in the market to lead to
The alloy of two or more element formation in gettering material, such as zirconium, vanadium and iron, aluminium, rhenium or titanium, using chemistry
Deposition CVD or vapour deposition method are deposited on support bridge floor；Or grapheme material, it is made using nanometer technology.
In the present embodiment, the getter electrical heating activation device is single layer structure, the layers of getter material 30 and electricity
The key for heating the set-up mode of wire 40 is：Electrical heating wire 40 needs to be arranged on relative air-breathing material on support bridge floor
On the another side of the bed of material 30, interval support bridge floor 10 realizes insulation.
Example, the number of the support bridge floor 10 is 1, and the layers of getter material 30 and electrical heating wire 40 can divide
It is not arranged on the upper surface of support bridge floor 10 or lower surface, the electrical heating wire 40 can be directly connected to conductive bridge pier, it is real
Now power, as shown in Figure 1；
Or, the number of the support bridge floor 10 is 1, and the layers of getter material 30 is distinguished with the electrical heating wire 40
On the lower surface and upper surface for being arranged on support bridge floor, it is real that the electrical heating wire 40 connects conductive bridge pier by conducting metal
Now power, as shown in Figure 2；
Or, the number of the support bridge floor is 2, wherein, the first support bridge floor 11 is erected by conductive bridge pier 20
Come, the second support bridge floor 12 is arranged on the first support bridge floor 11 by electrical heating wire 40,30 points of the layers of getter material
On the upper surface for not being arranged on the lower surface of the first support bridge floor 11 and the second support bridge floor 12, as shown in Figure 3., it is clear that
Gettering material contact area can be increased using such a mode, inspiratory effects are improved, while reducing activation energy consumption.It should be noted
It is to support the number of bridge floor to be not limited to 1 or 2 in the getter heat activation device of single layer structure, can also be 3,4,5 etc.
Other situations, the present invention can not be exhaustive.
Here, the shape of electrical heating wire 40 can have multiple choices.
Example, the electrical heating wire 40 can be that for bending, its two end interface connects two conducting bridges respectively
Pier, forms supply access, as shown in Figure 4；Or, the electrical heating wire 40 is annular shape, and its two end interface connects two
Conductive bridge pier, forms supply access, as shown in Figure 5.Wherein, electrical heating wire 40 is preferred to use the general metal material of in the market
One kind in material, such as tungsten, molybdenum, nickel, is manufactured using the MEMS technology of standard, patterned metal material is passed through into PVD, chemistry
The deposition method such as CVD or vapour deposition method is deposited on support bridge floor.Certainly, the shape and manufacturing process of the electrical heating wire be also
There can be other selections, be not limited to this.
In use, the electrified regulation of electrical heating wire 40 is utilized into its " thermoelectricity inhibition effect " interval under high vacuum environment
Property detection resistance value, realize closed loop detection temperature, ensure its accurate temperature control, fully activate gettering material, improve air-breathing
Efficiency, the performance of full-scope safeguards intelligence sensor and life-span.
Embodiment 2：In embodiment 1, the getter electrical heating activation device is single layer structure.However, in the present invention
In, described device can be sandwich construction, and its number of plies can be set as needed.Therefore, in the present embodiment, it is described to inhale
The specific number of plies of gas agent electrical heating activation device is to be attached between 3, each layer of bridge pier by conducting metal, realizes multilayer
Power supply.
Specifically, the number that bridge floor 10 is supported in each layer is 1, is successively erected come described to inhale by conductive bridge pier 20
Gas material layer 30 and electrical heating wire 40 are separately positioned in the upper and lower surface of support bridge floor, as shown in Figure 6；Or
Person, the layers of getter material 30 and electrical heating wire 40 are separately positioned on the lower surface and upper surface of support bridge floor, such as Fig. 7
It is shown.
Or, the getter electrical heating activation device is sandwich construction, and the specific number of plies is support bridge in 3, each layer
Face number is 2, wherein, the first support bridge floor 11 is erected come the second support bridge floor 12 passes through electrical heating by conductive bridge pier 20
Wire 40 is arranged on the first support bridge floor 11, and the layers of getter material 30 is separately positioned on the lower surface of the first support bridge floor
On the upper surface of the second support bridge floor, as shown in Figure 8.
, it is clear that sandwich construction can provide more accommodation spaces for gettering material, significantly increase in limited space
Big gettering material contact area, improves inspiratory effects, extends associated vacuum device service life.
It should be noted that in the above-described embodiments, the support bridge floor and bridge pier be it is square, but the support bridge floor and
The shape of bridge pier can also be triangle, square, polygon or circle etc., and the present invention is not specifically limited.
In a word, preferred embodiments of the present invention are these are only, are not intended to limit the scope of the present invention, in the present invention
Scope within, the equivalents made of the present invention or modification should be included in the scope of the protection.
Claims (8)
1. a kind of getter electrical heating activates device, it is characterised in that：Including the support bridge made using high-temperature insulation material
Face, the support bridge floor erects to be provided with layers of getter material, the gettering material on support bridge floor by conductive bridge pier
Layer is by patterned electrical heating wire heat activation, and the patterned electrical heating wire is electrically connected with conductive bridge pier,
Form supply access, wherein, getter electrical heating activation device is single layer structure or sandwich construction, the support bridge floor or
The number that bridge floor is supported in each layer is multiple.
2. a kind of getter electrical heating activation device according to claim 1, it is characterised in that：The getter electrical heating
Activation device is single layer structure, and the number of the support bridge floor is 2, wherein, the first support bridge floor is erected by conductive bridge pier
Come, the second support bridge floor is arranged on the first support bridge floor by electrical heating wire, and the layers of getter material is separately positioned on
On the upper surface of the lower surface of first support bridge floor and the second support bridge floor.
3. a kind of getter electrical heating activation device according to claim 1, it is characterised in that：The getter electrical heating
Activation device is sandwich construction, and support bridge floor number is 2 in each layer, wherein, the first support bridge floor is built by conductive bridge pier
Get up, the second support bridge floor is arranged on the first support bridge floor by electrical heating wire, and the layers of getter material is set respectively
On the lower surface of the first support bridge floor and the upper surface of the second support bridge floor.
4. a kind of getter electrical heating activation device as claimed in any of claims 1 to 3, it is characterised in that：Institute
Electrical heating wire is stated for bending or annular shape.
5. a kind of getter electrical heating activation device as claimed in any of claims 1 to 3, it is characterised in that：Institute
Conductive bridge pier is stated to be made of metal or alloy.
6. a kind of getter electrical heating activation device as claimed in any of claims 1 to 3, it is characterised in that：Institute
It is alloy or graphene to state layers of getter material.
7. a kind of getter electrical heating activation device as claimed in any of claims 1 to 3, it is characterised in that：Institute
That states support bridge floor is shaped as polygon or circle.
8. a kind of getter electrical heating activation device as claimed in any of claims 1 to 3, it is characterised in that：Institute
Support bridge floor is stated to be made using silicon nitride or silica.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610207890.2A CN105692545B (en) | 2016-04-06 | 2016-04-06 | A kind of getter electrical heating activates device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610207890.2A CN105692545B (en) | 2016-04-06 | 2016-04-06 | A kind of getter electrical heating activates device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105692545A CN105692545A (en) | 2016-06-22 |
| CN105692545B true CN105692545B (en) | 2017-08-25 |
Family
ID=56219133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610207890.2A Active CN105692545B (en) | 2016-04-06 | 2016-04-06 | A kind of getter electrical heating activates device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105692545B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112169528B (en) * | 2020-09-24 | 2022-07-12 | 有研工程技术研究院有限公司 | Internal heating type getter sheet and preparation method thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100285505B1 (en) * | 1997-11-29 | 2001-04-02 | 김영남 | Method for activating non-evaporable getter of field emission device |
| CN100544950C (en) * | 2004-11-10 | 2009-09-30 | 北京有色金属研究总院 | Film gas absorber element of multi-layer film structure and production and preparation method thereof |
| CN201681784U (en) * | 2010-04-13 | 2010-12-22 | 北京有色金属研究总院 | Shaped microporous gas absorbing element with self heating and excitation |
| CN104728076A (en) * | 2013-12-23 | 2015-06-24 | 北京有色金属研究总院 | Getter pump novel in structure and high in pumping speed |
| CN104576860A (en) * | 2014-12-16 | 2015-04-29 | 太仓微芯电子科技有限公司 | Infrared light source and manufacturing method thereof |
| CN204816557U (en) * | 2015-06-12 | 2015-12-02 | 洛阳兰迪玻璃机器股份有限公司 | Actuating device of vacuum glass getter |
| CN105271101B (en) * | 2015-11-17 | 2017-03-15 | 合肥芯福传感器技术有限公司 | MEMS fine vacuum encapsulating structures based on getter |
| CN205527728U (en) * | 2016-04-06 | 2016-08-31 | 合肥芯福传感器技术有限公司 | Getter electrical heating actuating device |
-
2016
- 2016-04-06 CN CN201610207890.2A patent/CN105692545B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105692545A (en) | 2016-06-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI408372B (en) | Radio frequency identification based thermal bubble type accelerometer | |
| TWI497698B (en) | Infrared light emitting device | |
| CN101329291B (en) | Gas-sensitive sensor | |
| US9260291B2 (en) | Suspended getter material-based structure | |
| CN107430053A (en) | For detecting sensor, sensing system, the method for operating sensor, the manufacture method of this type sensor and this type sensor applications of conductive and/or polarizable particle | |
| Vincenzi et al. | Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate | |
| US10562759B2 (en) | Support pillar | |
| CN104297303A (en) | Acetone gas sensitive sensor and preparation method thereof | |
| TW201114678A (en) | Radio frequency identification based thermal bubble type accelerometer | |
| US11440793B2 (en) | Hydrogen sensor on medium or low temperature solid micro heating platform | |
| CN105692545B (en) | A kind of getter electrical heating activates device | |
| JP2017106857A (en) | Semiconductor gas sensor, manufacturing method therefor, and sensor network system | |
| CN110071050A (en) | A kind of chip interconnection structure and preparation method thereof | |
| CN107078202A (en) | The 3D integrated thermal electric generators operated outside the plane with internal voids and heat conduction path regulation through hole in heat flux construction | |
| CN205527728U (en) | Getter electrical heating actuating device | |
| CN108275649B (en) | MEMS combustible gas sensor and processing method thereof | |
| CN112551479A (en) | High-performance MEMS infrared sensor and preparation method thereof | |
| CN102012437A (en) | Hot-bubble type accelerometer using RFID (Radio Frequency Identification) and production method thereof | |
| CN106449133A (en) | Single-layer graphene thin film-based composite structure, preparation method and semiconductor device | |
| TWI684565B (en) | Semiconductor sensor and method of manufacturing the same | |
| CN206250069U (en) | Single-layer graphene film matrix composite, ultracapacitor, LED component, solar cell, photocatalytic device and sensor | |
| CN104316577A (en) | Methane sensor based on flip-chip packaging, as well as preparation method and application thereof | |
| CN104241417B (en) | Solar cell | |
| KR101738632B1 (en) | Micro hot plate having a heat sink structure | |
| TWI477434B (en) | Multifunction mens system element and integrated method for making multifunction mens system and mos |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |