CN105684307B - 用于杂散模式抑制的非对称不平衡声耦合谐振器 - Google Patents

用于杂散模式抑制的非对称不平衡声耦合谐振器 Download PDF

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Publication number
CN105684307B
CN105684307B CN201480059449.3A CN201480059449A CN105684307B CN 105684307 B CN105684307 B CN 105684307B CN 201480059449 A CN201480059449 A CN 201480059449A CN 105684307 B CN105684307 B CN 105684307B
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CN
China
Prior art keywords
resonator
electrode
outer rim
piezoelectricity core
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201480059449.3A
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English (en)
Chinese (zh)
Other versions
CN105684307A (zh
Inventor
C·H·尹
C·左
M·F·维纶茨
D·D·金
J·金
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Qualcomm Inc
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Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of CN105684307A publication Critical patent/CN105684307A/zh
Application granted granted Critical
Publication of CN105684307B publication Critical patent/CN105684307B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201480059449.3A 2013-10-30 2014-09-04 用于杂散模式抑制的非对称不平衡声耦合谐振器 Expired - Fee Related CN105684307B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/067,908 2013-10-30
US14/067,908 US9461614B2 (en) 2013-10-30 2013-10-30 Asymmetric unbalanced acoustically coupled resonators for spurious mode suppression
PCT/US2014/054034 WO2015065585A1 (en) 2013-10-30 2014-09-04 Asymmetric unbalanced acoustically coupled resonators for spurious mode suppression

Publications (2)

Publication Number Publication Date
CN105684307A CN105684307A (zh) 2016-06-15
CN105684307B true CN105684307B (zh) 2018-10-09

Family

ID=51541372

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480059449.3A Expired - Fee Related CN105684307B (zh) 2013-10-30 2014-09-04 用于杂散模式抑制的非对称不平衡声耦合谐振器

Country Status (5)

Country Link
US (1) US9461614B2 (https=)
EP (1) EP3063869A1 (https=)
JP (1) JP2016539553A (https=)
CN (1) CN105684307B (https=)
WO (1) WO2015065585A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9379686B2 (en) * 2014-03-04 2016-06-28 Qualcomm Incorporated Resonator with a staggered electrode configuration
US10476476B2 (en) * 2016-12-15 2019-11-12 Murata Manufacturing Co., Ltd. MEMS resonator with suppressed spurious modes
WO2019211755A1 (en) * 2018-04-30 2019-11-07 Vermon S.A. Ultrasound transducer
US12483224B1 (en) * 2021-07-16 2025-11-25 Hrl Laboratories, Llc Acoustically coupled dual resonators for phononic frequency comb generation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1188344A (zh) * 1997-01-14 1998-07-22 株式会社村田制作所 压电元件及其制造方法
CN1943104A (zh) * 2004-04-06 2007-04-04 精工爱普生株式会社 振荡电路和电子设备
CN1957528A (zh) * 2005-03-28 2007-05-02 株式会社村田制作所 厚度纵向压电谐振器
US20120050236A1 (en) * 2010-09-01 2012-03-01 Qualcomm Mems Technologies, Inc. Electromechanical systems piezoelectric contour mode differential resonators and filters

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US3660699A (en) * 1969-08-06 1972-05-02 Denki Onkyo Co Ltd Supporting means for piezoelectric transformers
JPS5327739U (https=) * 1976-08-18 1978-03-09
US4329666A (en) 1980-08-11 1982-05-11 Motorola, Inc. Two-pole monolithic crystal filter
JPS5873627U (ja) * 1981-11-14 1983-05-18 日本特殊陶業株式会社 圧電濾波器
DE69222546T2 (de) * 1991-02-12 1998-02-12 Fujitsu Ltd Piezoelektrischer Transformator mit verminderter Eintrittsimpedanz und Aufwärts-/ Abwärtstransformation in einem grossen Lastwiderstandsbereich
JPH05327401A (ja) * 1992-05-21 1993-12-10 Murata Mfg Co Ltd セラミックフィルタ
TW420883B (en) * 1996-02-08 2001-02-01 Tokin Corp A piezoelectric transformer
JP3803207B2 (ja) * 1998-06-19 2006-08-02 松下電器産業株式会社 圧電磁器組成物及び圧電トランス
JP2000151354A (ja) * 1998-11-13 2000-05-30 Daishinku Corp 圧電フィルタ
US6758199B2 (en) * 2001-04-05 2004-07-06 Mide Technology Corporation Tuned power ignition system
KR100439400B1 (ko) * 2001-11-22 2004-07-09 삼성전기주식회사 노드점 인식패턴을 구비한 압전트랜스포머
JP2004304704A (ja) 2003-04-01 2004-10-28 Matsushita Electric Ind Co Ltd 薄膜音響共振子、及び、薄膜音響共振子回路
EP1892832B1 (en) 2005-06-17 2011-09-21 Panasonic Corporation Multi-mode thin film elastic wave resonator filter
US8816567B2 (en) 2011-07-19 2014-08-26 Qualcomm Mems Technologies, Inc. Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
US20130134838A1 (en) 2011-11-28 2013-05-30 Qualcomm Mems Technologies, Inc. Piezoelectric mems transformer
US9379686B2 (en) * 2014-03-04 2016-06-28 Qualcomm Incorporated Resonator with a staggered electrode configuration

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1188344A (zh) * 1997-01-14 1998-07-22 株式会社村田制作所 压电元件及其制造方法
CN1943104A (zh) * 2004-04-06 2007-04-04 精工爱普生株式会社 振荡电路和电子设备
CN1957528A (zh) * 2005-03-28 2007-05-02 株式会社村田制作所 厚度纵向压电谐振器
US20120050236A1 (en) * 2010-09-01 2012-03-01 Qualcomm Mems Technologies, Inc. Electromechanical systems piezoelectric contour mode differential resonators and filters

Also Published As

Publication number Publication date
CN105684307A (zh) 2016-06-15
US20150115777A1 (en) 2015-04-30
JP2016539553A (ja) 2016-12-15
US9461614B2 (en) 2016-10-04
WO2015065585A1 (en) 2015-05-07
EP3063869A1 (en) 2016-09-07

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