CN105671552A - 一种汽轮机转子轮槽量规表面耐磨涂层的制备方法 - Google Patents
一种汽轮机转子轮槽量规表面耐磨涂层的制备方法 Download PDFInfo
- Publication number
- CN105671552A CN105671552A CN201610239273.0A CN201610239273A CN105671552A CN 105671552 A CN105671552 A CN 105671552A CN 201610239273 A CN201610239273 A CN 201610239273A CN 105671552 A CN105671552 A CN 105671552A
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- CN
- China
- Prior art keywords
- groove gauge
- rotor groove
- turbo rotor
- uncoated
- drying oven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610239273.0A CN105671552B (zh) | 2016-04-18 | 2016-04-18 | 一种汽轮机转子轮槽量规表面耐磨涂层的制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610239273.0A CN105671552B (zh) | 2016-04-18 | 2016-04-18 | 一种汽轮机转子轮槽量规表面耐磨涂层的制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105671552A true CN105671552A (zh) | 2016-06-15 |
CN105671552B CN105671552B (zh) | 2018-04-10 |
Family
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Family Applications (1)
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CN201610239273.0A Active CN105671552B (zh) | 2016-04-18 | 2016-04-18 | 一种汽轮机转子轮槽量规表面耐磨涂层的制备方法 |
Country Status (1)
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CN (1) | CN105671552B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106123721A (zh) * | 2016-08-24 | 2016-11-16 | 上海应用技术学院 | 一种汽轮机转子轮槽量规及其加工方法 |
CN109234676A (zh) * | 2018-09-25 | 2019-01-18 | 安庆帝伯格茨活塞环有限公司 | 一种含有过渡层的类金刚石涂层活塞环及制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101831627A (zh) * | 2010-06-13 | 2010-09-15 | 西南交通大学 | 一种改善超高分子量聚乙烯耐磨性能的方法 |
US20130034747A1 (en) * | 2011-08-04 | 2013-02-07 | Fuji Electric Co., Ltd. | Perpendicular magnetic recording medium and method for manufacturing same |
CN103397314A (zh) * | 2013-08-15 | 2013-11-20 | 王涛 | 一种金刚石涂层刀具的制备方法及该方法所得金刚石涂层刀具在印刷线路板制备中的应用 |
-
2016
- 2016-04-18 CN CN201610239273.0A patent/CN105671552B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101831627A (zh) * | 2010-06-13 | 2010-09-15 | 西南交通大学 | 一种改善超高分子量聚乙烯耐磨性能的方法 |
US20130034747A1 (en) * | 2011-08-04 | 2013-02-07 | Fuji Electric Co., Ltd. | Perpendicular magnetic recording medium and method for manufacturing same |
CN103397314A (zh) * | 2013-08-15 | 2013-11-20 | 王涛 | 一种金刚石涂层刀具的制备方法及该方法所得金刚石涂层刀具在印刷线路板制备中的应用 |
Non-Patent Citations (2)
Title |
---|
B. SEGURA-GIRALDO ET AL: "On the influence of a TiN interlayer on DLC coatings produced by pulsed vacuum arc discharge: Compositional and morphological study", 《APPLIED SURFACE SCIENCE》 * |
楚信谱: "等离子体增强化学气相沉积DLC膜的研究", 《中国优秀硕士学位论文全文数据库 基础科学辑》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106123721A (zh) * | 2016-08-24 | 2016-11-16 | 上海应用技术学院 | 一种汽轮机转子轮槽量规及其加工方法 |
CN106123721B (zh) * | 2016-08-24 | 2019-05-14 | 上海应用技术学院 | 一种汽轮机转子轮槽量规及其加工方法 |
CN109234676A (zh) * | 2018-09-25 | 2019-01-18 | 安庆帝伯格茨活塞环有限公司 | 一种含有过渡层的类金刚石涂层活塞环及制备方法 |
Also Published As
Publication number | Publication date |
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CN105671552B (zh) | 2018-04-10 |
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C06 | Publication | ||
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 200235 Caobao Road, Xuhui District, Shanghai, No. 120-121 Co-patentee after: SHANGHAI YINGSHU POWER STATION ACCESSORIES Co.,Ltd. Patentee after: SHANGHAI INSTITUTE OF TECHNOLOGY Address before: 200235 No. 120, Xuhui District, Shanghai, Caobao Road Co-patentee before: SHANGHAI YINGSHU POWER STATION ACCESSORIES Co.,Ltd. Patentee before: Shanghai Institute of Technology |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180523 Address after: 200235 Caobao Road, Xuhui District, Shanghai, No. 120-121 Co-patentee after: Shanghai Ying Mu Motor Technology Co.,Ltd. Patentee after: SHANGHAI INSTITUTE OF TECHNOLOGY Address before: 200235 Caobao Road, Xuhui District, Shanghai, No. 120-121 Co-patentee before: SHANGHAI YINGSHU POWER STATION ACCESSORIES Co.,Ltd. Patentee before: Shanghai Institute of Technology |
|
CI03 | Correction of invention patent | ||
CI03 | Correction of invention patent |
Correction item: Patentee|Address|Patentee Correct: Shanghai Institute of Technology|200235 Caobao Road, Xuhui District, Shanghai, No. 120-121|Shanghai Yishu Motor Technology Co., Ltd. False: Shanghai Institute of Technology|200235 Caobao Road, Xuhui District, Shanghai, No. 120-121|Shanghai Ying Mu Motor Technology Co., Ltd. Number: 24-01 Volume: 34 |