CN105651733A - Material scattering characteristic measuring device and method - Google Patents
Material scattering characteristic measuring device and method Download PDFInfo
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Abstract
The invention provides a material scattering characteristic measuring device and method. The device comprises a radiation light source for emitting radiation light; a light splitter, which is arranged on the subsequent optical path of the radiation light source; an angular spectrum information collecting object lens, which is arranged on the reflected light path of the light splitter; and a detector unit, which is arranged on the transmission light path of the light splitter. The provided measuring device and measuring method make measurement become simpler and more direct. System error terms are largely reduced. The measurement does not need complicated calibration. The scattering characteristic of a material can be measured quickly. The measurement precision is improved. The scattering characteristic of a material can be measured in a range of 180 degrees.
Description
Technical field
The present invention relates to a kind of material scattering characteristic measuring device.
Background technology
The scattering properties of material directly reflects the optical characteristics of material itself and the Roughness Information on its surface, and industrially scattering properties measurement apparatus has to compare and is widely applied, such as:
1. when producing or develop scattering film, brightness enhancement film (BrightnessEnhancingFilm) or diffusion sheet, can by the scattering properties measurement apparatus monitoring performance to this series products and measurement;
2., when carrying out optical coating (such as anti-reflection film), sometimes it is also required to by scattering properties measurement apparatus to monitor the process condition of current plated film;
3. it is also required to when carrying out plastics, paper production by scattering properties measurement apparatus to monitor the quality of production of product;
4. when carrying out the design of veiling glare sensitivity optical mechanical system, it usually needs assess the stray light level of optical mechanical system meticulously, and the scattering properties obtaining selected ray machine material will be emulate the important initial conditions of reliability;
5. at semicon industry, it is necessary to by scattering properties measurement apparatus, the polishing of silicon chip is judged.
In SEMIME1392-0305 and ASTMStandardE1392-96 measurement standard, current typical scattering properties measurement apparatus is described, illumination light scattering properties after detected materials scattering is measured in its position regulating pick-up probe by six degree of freedom, carrying out the scattering properties of material by this principle, to measure efficiency very low, and equipment is relatively costly.
The patent US6577397B1 of Philips describes a kind of method realizing material scattering feature measurement by hemispherical scattering object and approximate fish-eye detection light path, as shown in Figure 1, wherein 14 is light source, the incident angle along rail groove 13 motor adjustment illumination light 15 can be passed through, 12 is detected materials, 16 is hemispherical mirror, 10 is hemispherical scattering object, 17 is optical path position, the detection light path of 17 positions coordinates hemispherical mirror 16, the scattering properties obtained in detected materials 12 polarizers of big angle scope can be measured, much higher by the scattering properties comparable former prior art efficiency of the type measurement device material, but due to the limitation in itself measuring principle (off-axis optical system) and structure, there is the systematic error being difficult to correction in it and scattered light intensity information of Partial angle such as cannot measure at the defect.
Summary of the invention
It is an object of the invention to provide a kind of material scattering characteristic measuring device, it is possible to accurately measure the scattering properties obtaining material.
For solving the problems referred to above, the present invention provides a kind of material scattering characteristic measuring device, including:
Radiating light source, is used for sending radiant light;
Beam splitter, is arranged in the subsequent optical path of described radiating light source, for reflecting into angular spectrum information object lens by described radiant light;
Angular spectrum information object lens, are arranged on the reflected light path of described beam splitter, are used for the reflection light collecting described beam splitter to detected materials surface, and collect the scattering angular light distribution information on detected materials surface and be imaged onto probe unit;
Probe unit, is arranged on the transmitted light path of described beam splitter, collects the scattering angular light distribution information collected by object lens for acquisition angle spectrum information, thus obtaining the scattering properties of detected materials.
Further, in said apparatus, the incident angle of detected materials surface incident illumination is adjustable, thus the scattering angular light distribution information obtained under any incident angle degree.
Further, in said apparatus, also include Angular spectrum of scattering intensity light distribution and demarcate parts, for demarcating light distribution before or after measuring detected materials scattering angular light distribution information.
Further, in said apparatus, it is standard lambert's body or master grating that described light intensity demarcates parts
Further, in said apparatus, the position of described radiating light source is adjustable, thus adjusting the incident angle of described incident illumination
Further, in said apparatus, described radiating light source is provided with offset flat-panel to the light path of beam splitter, for adjusting the incident angle of described incident illumination.
Further, in said apparatus, described radiating light source is disposed with conduction optical fiber, described offset flat-panel, aperture diaphragm and the second TU Trunk Unit to the light path of beam splitter.
Further, in said apparatus, the light path between described beam splitter and probe unit is additionally provided with the first TU Trunk Unit, for relay imaging.
Further, in said apparatus, described angular spectrum information object lens are submergence microcobjective.
Another side according to the present invention, it is provided that a kind of material scattering characteristic measurement method, adopts above-mentioned material scattering characteristic measuring device, including:
Step one, under specific illumination angle and wavelength case, when Angular spectrum of scattering intensity light distribution demarcation parts surface is in angular spectrum information object lens optimal focal plane, measure Angular spectrum of scattering intensity light distribution with probe unit and demarcate the parts first group of scattering angular light distribution information A (r for this lighting condition situation, ��), wherein r is scattering light angular spectrum radius surface, and �� is scattering light azimuth;
Step 2, detected materials is put in the optimal focal plane of angular spectrum information object lens, second group of scattering angular light distribution information B (r when equal illumination is measured by probe unit, ��), wherein r is scattering light angular spectrum radius surface, �� is that scattering light azimuth, step one and step 2 can in no particular order sequentially;
Step 3, obtain described detected materials scattered light intensity function in the current lighting condition according to first group of angle light intensity distributed intelligence and second group of angle light intensity distributed intelligence: C (r, ��)=B (r, ��)/A (r, ��), the scattering properties of described detected materials is determined according to described scattered light intensity function.
Further, in the above-mentioned methods, also include:
Step 4, change the incident angle of detected materials surface incident illumination, measure the scattering angular light distribution information of detected materials under different incidence angles degree, it is thus achieved that the scattered light intensity function under different incidence angles degree.
Compared with prior art, the material scattering characteristic measuring device of the present invention includes: radiating light source, is used for sending radiant light;Beam splitter, is arranged in the subsequent optical path of described radiating light source, for reflecting into angular spectrum information object lens by described radiant light; Angular spectrum information object lens, are arranged on the reflected light path of described beam splitter, are used for the reflection light collecting described beam splitter to detected materials surface, and collect the scattering angular light distribution information on detected materials surface and be imaged onto probe unit; Probe unit, it is arranged on the transmitted light path of described beam splitter, the scattering angular light distribution information collected by object lens is collected for acquisition angle spectrum information, thus obtaining the scattering properties of detected materials, use this device and corresponding measuring method that measuring principle can be made simpler and direct, systematic error item greatly reduces, without carrying out the calibration flow process of complexity, material scattering feature measurement speed can be accelerated, realize the measurement of higher precision, the material scattering characteristic within the scope of 180 degree can be carried out gamut measurement.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing typical speckle characteristic measuring device;
Fig. 2 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention one;
Fig. 3 is the scattered light intensity collection angle schematic diagram of the embodiment of the present invention one;
Fig. 4 is the scattering properties measuring principle based on angular spectrum of the embodiment of the present invention one;
The scattered light intensity angular distribution that Fig. 5 is the embodiment of the present invention one measures example;
Fig. 6 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention two;
Fig. 7 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention three;
Fig. 8 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention four.
Detailed description of the invention
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
Embodiment one
As in figure 2 it is shown, the present invention provides a kind of material scattering characteristic measuring device, including:
Radiating light source 101, is used for sending radiant light;
Beam splitter 103, is arranged in the subsequent optical path of described radiating light source 101, for reflecting into angular spectrum information object lens 104 by described radiant light;
Angular spectrum information object lens 104, it is arranged on the reflected light path of described beam splitter 103, parts or detected materials 105 surface is demarcated to Angular spectrum of scattering intensity light distribution for collecting the reflection light of described beam splitter 103, collect the angle light intensity distributed intelligence of the scattering light on Angular spectrum of scattering intensity light distribution demarcation parts or detected materials 105 surface and be imaged onto probe unit 106, wherein, described Angular spectrum of scattering intensity light distribution demarcation parts or detected materials 105 are positioned in the optimal focal plane of angular spectrum information object lens 104;
Angular spectrum of scattering intensity light distribution demarcates parts for demarcating the relative luminance of each angle direction, and the relative luminance of its all directions is distributed it is known that preferably employ standard lambert's body or master grating;
Probe unit 106, it is arranged on the transmitted light path of described beam splitter 103, the scattering angular light distribution information being scattered angular spectrum light distribution demarcation parts or detected materials 105 surface collected by object lens 104 is collected for acquisition angle spectrum information, thus obtaining the scattering properties of detected materials, wherein, the test surface of probe unit 106 overlaps with the second back focal plane 102-2 of angular spectrum information object lens 104. First and second back focal planes of 102-1 and 102-2 respectively angular spectrum information object lens 104 as shown in Figure 2, back focal plane is also generally referred to as frequency plane. Preferably, the incident angle of detected materials surface incident illumination is adjustable, thus the scattering angular light distribution information obtained under any incident angle degree.
Preferably, in the first back focal plane 102-1 of described angular spectrum information object lens 104 light path between radiating light source 101 and beam splitter 103.Concrete, radiating light source 101 is used for providing illumination light, and it gathers at angular spectrum and forms little range lighting on object lens 103 back focal plane, to realize sample face is carried out the illumination of quasi-parallel angle. Described radiating light source 101 preferred narrow light beam laser, it can realize the illumination of required zonule on the first back focal plane 102-1, this radiating light source 101 can be the LASER Light Sources such as semiconductor laser, optical fiber laser, gas laser, solid state laser, and radiating light source 101 carries out zonule illumination on the first back focal plane and can realize the illumination reflection light outgoing of angular spectrum information object lens 104 and be as the criterion directional light. Radiating light source 101 is optional other types light source also, such as lightemittingdiodes (LEDs, LED light source), Halogen light, the wideband light sources such as xenon lamp, zonule illumination can be formed on frequency plane 102-1 through suitably modulation, specifically can pass through to be perpendicular to optical axis direction (left and right) translation (in Fig. 2 Z-direction or X-direction) radiating light source 101 up and down and realize the illumination to the first back focal plane 102-1 diverse location, so after angular spectrum information object lens 104, the lighting radiation light of different angles can be obtained.
Radiating light source 101 can be also in-line illumination device, including at least a reflecting mirror in illumination path, described in-line illumination device can comprise the device such as Polarization Modulation, wavelength-modulated, described in-line illumination device can be made up of the first lens and the second lens, realize illumination is imported light conjugation to angular spectrum information object lens back focal plane (frequency plane), described in-line illumination device can comprise deflectable offset flat-panel, by deflecting offset flat-panel continuously, it may be achieved light angle adjusts continuously.
The preferred unpolarized Amici prism of beam splitter 103, unpolarized flat board or thin film, the radiant light that radiating light source 101 sends enters angular spectrum detection object lens 104 after beam splitter 103 dichroic reflection, and detected materials 105 realizes the illumination of demand region and angle.
The Light Modulation devices such as attenuator, polaroid or filter plate can be comprised in described angular spectrum information object lens 104. The described preferred optical numerical aperture of angular spectrum information object lens 104 is be more than or equal to 1, and meet the submergence microcobjective of Abbe's sine condition, usually, meet the microcobjective of Abbe's sine condition, strictly meeting relation ��=f �� sin �� between spot radius �� and the measured object light intensity output angle �� in its microcobjective pupil face, deviation is smaller than 0.1%, and wherein f is the focal length of microcobjective, �� is the diameter of pupil face hot spot, and �� is the lighting angle of detected materials emergent light. The angle information capture range of scattered light intensity is determined by the optical numerical aperture of angular spectrum information object lens 104, when optical numerical aperture is more than 1, the light intensity angular distribution information within the scope of 180 degree under specific illumination condition (angle, area, wavelength, polarization etc.) of detected materials can be collected. Angular spectrum information object lens 104 are used as the numerical aperture object lens less than 1, now scattered light intensity collection angle as shown in Figure 3Limited by formula below:
WhereinFor scattered light intensity capture range, and the numerical aperture that NA is angular spectrum information object lens 104.
Detailed, as shown in Figure 4, the scattering properties measuring principle of the present embodiment material scattering characteristic measuring device is as follows:
According to angular spectrum image-forming principle, the light of the equal angular sent within the scope of angular spectrum information object lens 104 true field will converge at the same position place of angular spectrum information object lens 104 pupil face (back focal plane), namely angular spectrum information object lens 104 pupil face receive each position light intensity corresponding be the light distribution of different angles emergent ray in detected materials 105, and have following relation between the spot radius �� in angular spectrum information object lens 104 pupil face and measured object light intensity output angle ��:
��=f �� sin ��,
Wherein f is the focal length of angular spectrum information object lens, and �� is the diameter of pupil face hot spot, and �� is the lighting angle of sample emergent light.
According to principles above, the light distribution measured and analyze on angular spectrum information object lens 104 pupil face can be passed through and can analyze the light distribution of all angles obtaining sample surface outgoing, the scattering properties of material can be obtained; To the scattered light intensity distribution within the scope of obtaining 0��180 degree, the submergence microcobjective of NA >=1 need to be selected.
Probe unit 106 is including at least a detector, the optional CCD of detector, cmos sensor or photodiode etc., angle light intensity distributed intelligence collected by probe unit 106 directly reflects illumination light scattered light intensity angular distribution characteristic after detected materials 105, as shown in Figure 5. Probe unit 106 can pass through the method for scanning or direct imaging and collect the scattering properties in angular spectrum collection object lens 104 back focal plane or its conjugate planes, and described scattering properties is the angular distribution information of scattered light intensity of detected materials 105
Angular spectrum information object lens 104 are widely different for the transmitance of wide-angle and low-angle scattering light, it is common to use standard lambert's body is demarcated directly measuring, with angular spectrum information object lens 104, the Angular spectrum of scattering intensity light distribution obtained. The measuring method of the material scattering characteristic measuring device of the present embodiment is as follows:
Step one, prepare one piece of standard lambert's body, generally use the standardized product of Labsphere, under specific illumination angle and wavelength case, when Angular spectrum of scattering intensity light distribution demarcation parts surface is in angular spectrum information object lens 104 optimal focal plane, measures Angular spectrum of scattering intensity light distribution with probe unit 106 and demarcate the parts first group of scattering angular light distribution information A (r, ��) for this lighting condition situation, wherein r is scattering light angular spectrum radius surface, and �� is scattering light azimuth;
Step 2, use detected materials, detected materials is put in the optimal focal plane of angular spectrum information object lens 104, second group of scattering angular light distribution information B (r when equal illumination is measured by probe unit 106, ��) wherein r is scattering light angular spectrum radius surface, �� is that scattering light azimuth, step one and step 2 can in no particular order sequentially;
Step 3, obtaining described detected materials scattered light intensity function in the current lighting condition according to first group of angle light intensity distributed intelligence and second group of angle light intensity distributed intelligence is (BRDF): C (r, ��)=B (r, ��)/A (r, ��), the scattering properties of described detected materials is determined according to described scattered light intensity function;
Step 4, changes the incident angle of detected materials surface incident illumination, measures the scattering angular light distribution information of detected materials under different incidence angles degree, it is thus achieved that the scattered light intensity function under different incidence angles degree. .
Use the material scattering characteristic measuring device of this enforcement, measuring principle is simpler and direct, systematic error item greatly reduces, without carrying out the calibration flow process of complexity, material scattering feature measurement speed can be accelerated, realize the measurement of higher precision, the material scattering characteristic within the scope of 180 degree can be carried out gamut measurement.
Embodiment two
As shown in Figure 6, the present invention provides another kind of material scattering characteristic measuring device, including the radiating light source 101 of such as embodiment one, is used for sending radiant light; Beam splitter 103, is arranged in the subsequent optical path of described radiating light source 101, for reflecting into angular spectrum information object lens 104 by described radiant light; Angular spectrum information object lens, it is arranged on the reflected light path of described beam splitter 103, described in transmission, the reflection light of beam splitter 103 is to standard lambert's body or detected materials 105 surface, the angle light intensity distributed intelligence of the scattering light on collection standard lambert's body or detected materials 105 surface is also imaged onto probe unit 106, wherein, described standard lambert's body or detected materials are positioned in the optimal focal plane of angular spectrum information object lens 104;Probe unit 106, it is arranged on the transmitted light path of described beam splitter, the angle light intensity distributed intelligence after standard lambert's body or detected materials surface scattering of the illumination light collected by object lens 104 is collected for acquisition angle spectrum information, wherein, the test surface of probe unit 106 overlaps with the second back focal plane 102-2 of angular spectrum information object lens 104.
The present embodiment and embodiment one are distinctive in that, in the first back focal plane 102-1 of described angular spectrum information object lens 104 light path between described beam splitter 103 and angular spectrum information object lens 104, light path between described beam splitter 103 and probe unit 106 is additionally provided with the first TU Trunk Unit 201, for by the first back focal plane 102-1 relay imaging of angular spectrum information object lens 104 to the second back focal plane 102-2, finally detected by probe unit 106. Concrete, the arrow beam of light that radiating light source 101 sends is irradiated on the first back focal plane 102-1 of angular spectrum information object lens 104, after after angular spectrum information object lens 104 with on required angle illumination to detected materials 105, illumination light is after detected materials 105 scattering, angle light intensity distributed intelligence is collected by angular spectrum information object lens 104, after TU Trunk Unit 201 relays, detected unit 106 is detected. The described preferred image doubly telecentric light path of TU Trunk Unit 201. First TU Trunk Unit 201 can be made up of the first lens and the second lens, it is achieved is relayed on probe unit 106 by angular spectrum information object lens back focal plane (frequency plane).
The measuring method of the material scattering characteristic measuring device of the present embodiment, referring to the corresponding part of embodiment one, is not repeating at this.
Use the material scattering characteristic measuring device of this enforcement, measuring principle is simpler and direct, systematic error item greatly reduces, without carrying out the calibration flow process of complexity, material scattering feature measurement speed can be accelerated, realize the measurement of higher precision, the material scattering characteristic within the scope of 180 degree can be carried out gamut measurement.
Embodiment three
As it is shown in fig. 7, the present invention provides another kind of material scattering characteristic measuring device, including the radiating light source 101 of such as embodiment one, it is used for sending radiant light; Beam splitter 103, is arranged in the subsequent optical path of described radiating light source 101, for reflecting into angular spectrum information object lens 104 by described radiant light; Angular spectrum information object lens, it is arranged on the reflected light path of described beam splitter 103, described in transmission, the reflection light of beam splitter 103 is to standard lambert's body or detected materials 105 surface, the angle light intensity distributed intelligence of the scattering light on collection standard lambert's body or detected materials 105 surface is also imaged onto probe unit 106, wherein, described standard lambert's body or detected materials are positioned in the optimal focal plane of angular spectrum information object lens 104; Probe unit 106, it is arranged on the transmitted light path of described beam splitter, the angle light intensity distributed intelligence after standard lambert's body or detected materials surface scattering of the illumination light collected by object lens 104 is collected for acquisition angle spectrum information, wherein, the test surface of probe unit 106 overlaps with the second back focal plane 102-2 of angular spectrum information object lens 104.
The present embodiment and embodiment one are distinctive in that, in the first back focal plane 102-1 of described angular spectrum information object lens 104 light path between described beam splitter 103 and angular spectrum information object lens 104; Light path between described beam splitter 103 and probe unit 106 is additionally provided with the first TU Trunk Unit 201, for by the first back focal plane 102-1 relay imaging of angular spectrum information object lens 104 to the second back focal plane 102-2, finally detected by probe unit 106;The light path of described radiating light source 101 to beam splitter 103 is also disposed with conduction optical fiber 205, offset flat-panel 204, aperture diaphragm 203 and the second TU Trunk Unit 202, described radiating light source 101 is connected with described offset flat-panel 204 by conducting optical fiber 205, described conduction optical fiber 205 is for coupling the energy of radiating light source 101, multimode quartz conduction optical fiber is preferably used, for there is vertical skew by the beams of narrow-band light position after conduction optical fiber 205 outgoing in described polarization flat board 204, thus realizing the continuously adjustable function in detected materials 105 illumination incident angle, described polarization flat board 204 can carry out certain limit deflection around X-direction, to realize adjusting continuously the function at illumination incident angle, first back focal plane 102-1 conjugation of described aperture diaphragm 203 and angular spectrum information object lens 104, described second TU Trunk Unit 202 is by aperture diaphragm 203 conjugation to the first back focal plane 102-1 of angular spectrum information object lens 104, radiating light source 101 sends radiant light after conduction optical fiber 205, modulate through offset flat-panel 204, beam propagation is to aperture diaphragm 203 position, by the second TU Trunk Unit 202, the light beam on aperture diaphragm 203 is imaged onto on the first back focal plane 102-1 of angular spectrum information object lens 104 again, with special angle and illumination region, detected materials 105 is illuminated after angular spectrum information object lens 104, illumination light is after detected materials 105 scattering, angle light intensity distributed intelligence is collected by angular spectrum information object lens 104, after the first TU Trunk Unit 201, detected by probe unit 106.
The measuring method of the material scattering characteristic measuring device of the present embodiment, referring to the corresponding part of embodiment one, is not repeating at this.
Use the material scattering characteristic measuring device of this enforcement, measuring principle is simpler and direct, systematic error item greatly reduces, without carrying out the calibration flow process of complexity, material scattering feature measurement speed can be accelerated, realize the measurement of higher precision, the material scattering characteristic within the scope of 180 degree can be carried out gamut measurement.
Embodiment four
As shown in Figure 8, the present invention provides another kind of material scattering characteristic measuring device to include implementing the identical structure of three, the present embodiment and embodiment three are distinctive in that, what fill between angular spectrum information object lens 104 and detected materials 105 is the refractive index liquid 206 more than 1, and the object lens of such submergence can realize measuring more than the scattering properties within the scope of 180 degree.
The measuring method of the material scattering characteristic measuring device of the present embodiment, referring to the corresponding part of embodiment one, is not repeating at this.
Use the material scattering characteristic measuring device of this enforcement, measuring principle is simpler and direct, systematic error item greatly reduces, without carrying out the calibration flow process of complexity, material scattering feature measurement speed can be accelerated, realize the measurement of higher precision, the material scattering characteristic within the scope of 180 degree can be carried out gamut measurement.
In this specification, each embodiment adopts the mode gone forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually referring to. For system disclosed in embodiment, owing to corresponding to the method disclosed in Example, so what describe is fairly simple, relevant part illustrates referring to method part.
Obviously, invention can be carried out various change and modification without deviating from the spirit and scope of the present invention by those skilled in the art. So, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to include these change and modification.
Claims (11)
1. a material scattering characteristic measuring device, it is characterised in that including:
Radiating light source, is used for sending radiant light;
Beam splitter, is arranged in the subsequent optical path of described radiating light source, for reflecting into angular spectrum information object lens by described radiant light;
Angular spectrum information object lens, are arranged on the reflected light path of described beam splitter, are used for the reflection light collecting described beam splitter to detected materials surface, and collect the scattering angular light distribution information on detected materials surface and be imaged onto probe unit;
Probe unit, is arranged on the transmitted light path of described beam splitter, collects the scattering angular light distribution information collected by object lens for acquisition angle spectrum information, thus obtaining the scattering properties of detected materials.
2. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that the incident angle of detected materials surface incident illumination is adjustable, thus the scattering angular light distribution information obtained under any incident angle degree.
3. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that also include Angular spectrum of scattering intensity light distribution and demarcate parts, for demarcating light distribution before or after measuring detected materials scattering angular light distribution information.
4. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that it is standard lambert's body or master grating that described light intensity demarcates parts.
5. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that the position of described radiating light source is adjustable, thus adjusting the incident angle of described incident illumination.
6. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that described radiating light source is provided with offset flat-panel to the light path of beam splitter, for adjusting the incident angle of described incident illumination.
7. material scattering characteristic measuring device as claimed in claim 6, it is characterised in that described radiating light source is disposed with conduction optical fiber, described offset flat-panel, aperture diaphragm and the second TU Trunk Unit to the light path of beam splitter.
8. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that be additionally provided with the first TU Trunk Unit in the light path between described beam splitter and probe unit, for relay imaging.
9. material scattering characteristic measuring device as claimed in claim 1, it is characterised in that described angular spectrum information object lens are submergence microcobjective.
10. a material scattering characteristic measurement method, adopts the material scattering characteristic measuring device as described in any one of claim 1��9, it is characterised in that including:
Step one, under specific illumination angle and wavelength case, when Angular spectrum of scattering intensity light distribution demarcation parts surface is in angular spectrum information object lens optimal focal plane, measure Angular spectrum of scattering intensity light distribution with probe unit and demarcate the parts first group of scattering angular light distribution information A (r for this lighting condition situation, ��), wherein r is scattering light angular spectrum radius surface, and �� is scattering light azimuth;
Step 2, detected materials is put in the optimal focal plane of angular spectrum information object lens, second group of scattering angular light distribution information B (r when equal illumination is measured by probe unit, ��), wherein r is scattering light angular spectrum radius surface, �� is that scattering light azimuth, step one and step 2 can in no particular order sequentially;
Step 3, obtain described detected materials scattered light intensity function in the current lighting condition according to first group of angle light intensity distributed intelligence and second group of angle light intensity distributed intelligence: C (r, ��)=B (r, ��)/A (r, ��), the scattering properties of described detected materials is determined according to described scattered light intensity function.
11. material scattering characteristic measurement method as claimed in claim 10, it is characterised in that also include:
Step 4, change the incident angle of detected materials surface incident illumination, measure the scattering angular light distribution information of detected materials under different incidence angles degree, it is thus achieved that the scattered light intensity function under different incidence angles degree.
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| CN107664647A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | A kind of luminescent panel detection means and its detection method |
| CN106770288A (en) * | 2016-12-09 | 2017-05-31 | 江苏大学 | A kind of micro- Polaroid system and method for interference with common path phase |
| CN108535218A (en) * | 2018-04-13 | 2018-09-14 | 黄智强 | A kind of high dynamic range precision scattering properties measuring system |
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