CN108535218A - A kind of high dynamic range precision scattering properties measuring system - Google Patents
A kind of high dynamic range precision scattering properties measuring system Download PDFInfo
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- CN108535218A CN108535218A CN201810329934.8A CN201810329934A CN108535218A CN 108535218 A CN108535218 A CN 108535218A CN 201810329934 A CN201810329934 A CN 201810329934A CN 108535218 A CN108535218 A CN 108535218A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
Abstract
The present invention provides a kind of high dynamic range precision scattering properties measuring system, the accurate distribution for obtaining sample surface scattering characteristic and size.The detecting system includes mainly light source module, signal modulation module, energy attenuation module, collimator and extender module, polarization module, assembles microscope group, pin hole, focuses microscope group, sample to be tested, iris diaphgram, coupling microscope group, field stop, photodetector, delustring trap, data processing system, signal demodulation module, delustring darkroom, light-source angle sweep mechanism, sample adjustment mechanism and probe angle sweep mechanism.The scattering properties measuring system has many advantages, such as that high dynamic range, high-precision, wave-length coverage are wide, can carry out Polarization Modulation.
Description
Technical field
The invention belongs to technical field of high-precision measurement, and in particular to a kind of high dynamic range precision scattering properties measurement system
System, can accurately measure scattering properties.
Background technology
Before nineteen seventies, scholars never find and effectively study various target materials in space
The method that distribution character is reflected in illumination.Until 1970, U.S. Nicodemus by bidirectional reflectance distribution function (BRDF) concept just
Formula is introduced into target scattering characteristics research, and the reflection of material surface and scattering properties are organically unified in without exception by it well
In thought.At abroad, target scattering characteristics research carries out under confidential state always, the research of the U.S. in this respect is in the world
It is upper to be in highest level.It not only establishes large quantities of advanced test equipments and Experimental Base, is provided for the development of weapon
Scattering and transmission characteristic data under a large amount of target and backgrounds, and main target scattering properties is also completed in terms of theoretical research
It calculates, establishes database, form large quantities of application achievements.
1980, State of Arizona, US found university F.O.Bartell et al. and describes bidirectional reflectance in detail in paper
The concept of distribution function (BRDF) discusses bidirectional reflectance distribution function from two angles of definition method and reference coupon method and quantitatively surveys
Principle is measured, measurement mathematic(al) representation is given, it is indicated that the size of actual sample, the size for surveying light beam, reception detection in measurement
The problem of visual field of device etc. should be noted that.But due to radiation detection, corner accuracy, signal measurement level, interference of light degree etc.
The influence of factors, it is all highly difficult that measurement accuracy will reach ± 20%.
The development and emulation of detection, identification, tracking and the guidance of weapon system all be unable to do without target and the scattering of environment is special
Property, therefore target scattering characteristics data precision is particularly significant and crucial.1993, U.S. Goddard state aviation space travels
Office and the states Montana TMA technology companies SCHIFF et al. stress to discuss BTDF errors source and various are used to calibrate BRDF's
Method.Here light source uses high brightness arc ammonia lamp and programmable monochromator, wavelength to cover 0.23~0.9 μm, and BREATHABLE BANDWIDTH is less than
4nm, they design from ultraviolet to near-infrared BRDF scatterometry devices, under the premise of considering above-mentioned error, measure scatter
Precision is higher when angle is more than 80 °.This is the most accurate BRDF measuring devices of adjustable wide spectrum wave band developed at that time, but at that time he
Do not recognize that BRDF is measured and the relationship of system geometric dimension and angular instrument mechanical precision.
With the development of the subjects such as modern space optics, opto-electronic device, requirement of the optical system to component surface is got over
Carry out higher, the especially scattering properties of component surface.Target surface scattering properties is the section of detectable and recognizable physical quantity
Description is learned, the self attributes of target and background are disclosed, relates generally to the bidirectional reflectance distribution function (BRDF) of target and two-way
Distribution function (BTDF) is penetrated, target scattering characteristics database is established, for laser radar system increasingly improvement, photoelectric guidance is military
Design, scouting, the image analysis of remote sensing satellite, cruise missile of device, the control of target signature, target is returned in target selection technology
The identification of wave provides technical basis.
In summary, it is necessary to explore a kind of surface scattering characteristic quantity method, establishing a set of can carry out surface scattering characteristic
The system accurately measured, i.e. high dynamic range precision scattering properties measuring system scatter target surface in research and production special
Property accurately measured, to preferably solve industrial production in practical problem.
In addition, the measuring system can be also used for gemstone surface, cosmetic effect displaying, Automobile paint and vehicle film surface with
And medicine aspect etc., in short, advancing with laser technology and modern industrial technology, to sample surfaces scattering properties
Research is more and more deep, establishes the detecting system of lossless, the accurate measurement scattering properties of a set of energy and becomes very urgent.
Invention content
The technical problem to be solved in the present invention is：A kind of high dynamic range precision scattering properties measuring system is provided, in section
It grinds in production and target surface scattering properties is accurately measured, to preferably solve the practical problem in industrial production.
The technical solution adopted by the present invention is：A kind of high dynamic range precision scattering properties measuring system, accurately obtains quilt
The distribution of sample surface scattering characteristic and size.The detecting system mainly declines including light source module, signal modulation module, energy
Subtract module, collimator and extender module, polarization module, assembles microscope group, pin hole, focuses microscope group, sample to be tested, iris diaphgram, coupling mirror
Group, field stop, photodetector, delustring trap, data processing system, signal demodulation module, delustring darkroom, light-source angle are swept
Retouch mechanism, sample adjustment mechanism and probe angle sweep mechanism.The light wave that light source module is sent out is through signal modulation module and letter
Number demodulation module carries out signal processing, ensures that system has high dynamic range by energy attenuation module, then collimated expands mould
Block makes light beam become collimated light beam, and polarization module is directed at collimated optical beam and carries out polarization conversion operation, to provide different polarization pattern
Illumination, meets different application demand.It assembles microscope group and the light beam modulated through polarization module is converted into light pencil, then filtered through pin hole
Wave will be convergent beam by the optical beam transformation of pinhole filter by focusing microscope group, be irradiated to sample to be tested surface, focus microscope group
Focal plane is fallen in the plane of iris aperture, and the light beam that hemispherical space is scattered to through sample to be tested controls incidence by iris diaphgram
To the size of coupling microscope group surface hot spot, coupling microscope group by sample to be tested scatter to the segment beam collection of energy of hemispherical space in
Photodetector, field stop adjust the visual field size of photodetector photosurface, and delustring trap is for collecting because of sample to be tested
The specular reflectance beam that surface generates, the light energy that photodetector is entered by sample to be tested surface modulation contain and wait for test sample
The scattering properties information on product surface obtains distribution and the size of sample to be tested scattering properties through data processing system.Except signal solution
Outside mode transfer block and data processing system, whole system is placed in delustring darkroom.Light-source angle sweep mechanism uses motorized adjustment side
Formula, which controls, is incident on the incident angle on sample to be tested surface, and sample adjustment mechanism is manually adjustable or motorized adjustment, to be measured
Alignment is adjusted in six dimension directions in sample, and probe angle sweep mechanism is collected by preset track in hemispherical space and waited for
Sample scatters to the energy of hemispherical space.The scattering properties measuring system have wide wavelength, high dynamic range, high-precision, can
The advantages that carrying out Polarization Modulation.
Wherein, light source module can measure need including but not limited to laser light source, LED light source, halogen light source etc. according to practical
Ask selection, laser light source that can select a kind to 4 kinds wavelength light source in wavelength 370nm~980nm, 1.0 μm~100.0 μm light sources；
Halogen light source selectable range 400nm~1700nm.
Wherein, the modes such as machinery modulation, electricity modulation and optical modulation can be used in signal modulation module, with signal solution mode transfer
Block coordinates, to improve the measurement sensitivity of system.
Wherein, multilevel energy attenuator can be used in energy attenuation module, and every grade of energy attenuation piece makes energy be reduced at least two
A order of magnitude, according to the energy size of photodetector response to select suitable energy attenuation magnitude when measurement, to improve
The measurement dynamic range of system.
Wherein, polarization module includes the polarizer, half wave plate, quarter-wave plate etc., to provide different polarization mould
Formula illuminating bundle meets different measurement demands.
Wherein, light-source angle sweep mechanism controls the incidence angle for being incident on sample to be tested surface using motorized adjustment mode
Degree, sample to be tested include the samples to be tested such as optical element, mechanical organ surface and its sextuple adjustment mechanism, which can be with
It adjusts, is also electrically adjusted manually, probe angle sweep mechanism is collected sample to be tested by preset track in hemispherical space and dissipated
It is mapped to the energy of hemispherical space.
Wherein, delustring trap is designed in measuring system, to eliminate sample to be tested caused by mirror-reflection, effectively inhibit mirror
Interference of the face reflecting background light to measurement result.
Wherein, in addition to signal demodulation module and data processing system, whole system is located in delustring darkroom, to reduce background
The influence of light improves measurement accuracy.
Compared with the prior art, the present invention has the following advantages：
1, the wave-length coverage of measuring system covering is wide, and light source module is including but not limited to laser light source, LED light source, halogen
Plain light source etc., can select that (laser light source can be in wavelength 370nm~980nm, 1.0 μm~100.0 μm light according to practical measurement demand
1 kind to 4 kinds wavelength light source is selected in source；Halogen light source selectable range 400nm~1700nm).
2, the measuring system has measurement sensitivity high, passes through signal modulation module, signal demodulation module and precise light
System designs, and the measurement sensitivity of system can reach 10-8sr-1。
3, the measuring system has high dynamic range, and by multilevel energy attenuation module, every grade of energy attenuation piece makes energy
Two orders of magnitude are reduced at least, the dynamic range of system can be increased to 1013Or more.
4, the measuring system high certainty of measurement, system uses advanced optical design and emulation technology, and is provided with and disappears
It light trapping and is measured in delustring darkroom, the measurement accuracy to improving system plays a crucial role.
5, the measuring system can carry out Polarization Modulation, add polarization module during system development, it can be achieved that different inclined
It shakes the demand of illumination.
Description of the drawings
Fig. 1 is high dynamic range precision scattering properties measuring system schematic diagram；
Fig. 2 is light source module schematic diagram；
Fig. 3 is energy attenuation module diagram；
Fig. 4 is polarization module schematic diagram；
Fig. 5 is scattering and spatial position relationship geometric representation；
Label declaration：1 is light source module, and 2 be signal modulation module, and 3 be energy attenuation module, and 4 be collimator and extender module,
5 be polarization module, and 6 is assemble microscope group, and 7 be pin hole, and 8 is focus microscope group, and 9 be sample to be tested, and 10 be iris diaphgram, and 11 be coupling
Microscope group, 12 be field stop, and 13 be photodetector, and 14 be delustring trap, and 15 be data processing system, and 16 be signal solution mode transfer
Block, 17 be delustring darkroom, and 18 be light-source angle sweep mechanism, and 19 be sample adjustment mechanism, and 20 be probe angle sweep mechanism,
1-1 is first light source, and 1-2 is second light source, and 1-3 is third light source, and 1-4 is the 4th light source, and 1-5 is the first speculum, and 1-6 is
Second speculum, 1-7 are third speculum, and 1-8 is the 4th speculum, and 3-1 is the first attenuator, and 3-2 is the second attenuator, 3-
3 be third attenuator, and 5-1 is the polarizer, and 5-2 is half wave plate, and 5-3 is quarter-wave plate.
Specific implementation mode
Objects and advantages in order to better illustrate the present invention, the invention will be further described below in conjunction with the accompanying drawings.
Fig. 1 is high dynamic range precision scattering properties measuring system schematic diagram, which includes mainly light source module
1, signal modulation module 2, energy attenuation module 3, collimator and extender module 4, polarization module 5, convergence microscope group 6, pin hole 7, focus lamp
Group 8, sample to be tested 9, iris diaphgram 10, coupling microscope group 11, field stop 12, photodetector 13, delustring trap 14, at data
Reason system 15, signal demodulation module 16, delustring darkroom 17, light-source angle sweep mechanism 18, sample adjustment mechanism 19, detector angle
Spend sweep mechanism 20.The light wave that light source module 1 is sent out carries out signal processing through signal modulation module 2 and signal demodulation module 16,
Ensure that system has high dynamic range by energy attenuation module 3, then the collimated module 4 that expands makes light beam become collimated light beam,
Polarization module 5 is directed at collimated optical beam progress polarization conversion operation and meets different application need to provide different polarization mode illumination
It asks.It assembles microscope group 6 and the light beam modulated through polarization module 5 is converted into light pencil, then filtered through pin hole 7, it will by focusing microscope group 8
The optical beam transformation filtered through needle passing hole 7 is convergent beam, is irradiated to 9 surface of sample to be tested, focuses 8 focal plane of microscope group and falls can darkening
In late 10 aperture planes, the light beam that hemispherical space is scattered to through sample to be tested 9 is incident on coupling mirror by the control of iris diaphgram 10
Sample to be tested 9 is scattered to the segment beam collection of energy of hemispherical space in light by the size of 11 surface hot spots of group, coupling microscope group 11
Electric explorer 13, field stop 12 adjust the visual field size of 13 photosurface of photodetector, and delustring trap 14 is for collecting because waiting for
The specular reflectance beam that 9 surface of sample generates, the light energy packet of photodetector 13 is entered by 9 surface modulation of sample to be tested
The scattering properties information for having contained 9 surface of sample to be tested obtains point of 9 surface scattering characteristic of sample to be tested through data processing system 15
Cloth and size.In addition to signal demodulation module 16 and data processing system 15, whole system is placed in delustring darkroom 17.Light-source angle
Sweep mechanism 18 is to light source module 1, signal modulation module 2, energy attenuation module 3, collimator and extender module 4, polarization module 5, meeting
Poly- microscope group 6, pin hole 7, focusing microscope group 8 carry out whole angle scanning control, control to be incident on using motorized adjustment mode and wait for test sample
The incident angle on 9 surface of product.Sample adjustment mechanism 19 is manually adjustable or motorized adjustment, to sample to be tested 9 in six dimensions
Alignment is adjusted in direction.Probe angle sweep mechanism 20 is to iris diaphgram 10, coupling microscope group 11, field stop 12, photoelectricity
Detector 13 carries out whole angle scanning control, and collecting sample to be tested 9 by preset track in hemispherical space scatters to hemisphere sky
Between energy.
Fig. 2 is light source module schematic diagram, light source module 1 including but not limited to laser light source, LED light source, halogen light source etc.,
The module mainly include first light source 1-1, second light source 1-2, third light source 1-3, the 4th light source 1-4, the first speculum 1-5,
Second speculum 1-6, third speculum 1-7, the 4th speculum 1-8, can select that (laser light source can be according to practical measurement demand
1 kind to 4 kinds wavelength light source is selected in wavelength 370nm~980nm, 1.0 μm~100.0 μm light sources；Halogen light source selectable range
400nm~1700nm).Wavelength is actually used according to sample to be tested 9, suitable wavelength is selected to be scattered spy to sample to be tested 9
Property measure.When selecting first light source 1-1, second light source 1-2, third light source 1-3, the 4th light source 1-4 are closed, while removing the
Two-mirror 1-6, third speculum 1-7, the 4th speculum 1-8.When selecting second light source 1-2, closing first light source 1-1,
Third light source 1-3, the 4th light source 1-4 remove third speculum 1-7, the 4th speculum 1-8.When selecting third light source 1-3,
Remove the 4th speculum 1-8.When selecting the 4th light source 1-4, without removing any speculum.
Fig. 3 be energy attenuation module diagram, energy attenuation module 3 include the first attenuator 3-1, the second attenuator 3-2,
Third attenuator 3-3, the energy attenuation module 3 are passive attenuator, using three block energy attenuators, are made per block energy attenuator
Energy is reduced at least two orders of magnitude, other than the function of adjustment optical signal size, to quilt in acceptable directly optical path
The reading for surveying signal pad value, the energy size responded according to photodetector 13 when measurement is to select suitable energy attenuation
Magnitude, to improve the measurement dynamic range of system.
Fig. 4 be polarization module schematic diagram, polarization module 5 include-polarizer 5-1, half wave plate 5-2, a quarter
Wave plate 5-3.Polarizer 5-1 makes to become linearly polarized light by the light beam after polarizing film, and the direction of vibration of light is inclined with polarizer 5-1's
The direction that shakes is consistent.Wave plate is the optical device that additional optical path difference (position difference) is generated between capable of making mutually perpendicular two light vibration,
It is usually made of birefringences chips such as quartz, calcite or micas with precise thickness, optical axis is parallel with wafer surface.
When linearly polarized light impinges perpendicularly on wave plate, optical axis direction is the angles θ with wave plate optical axis included angle.Linearly polarized light passes through half
It is still linearly polarized light after wave plate 5-2, only direction of vibration will turn over an angle under normal circumstances, can make input using this function
Light wave mutually switches between s light, p light.When being incident on quarter-wave plate 5-3 with linearly polarized light, and θ=45 °, then it passes through
Light beam after quarter-wave plate 5-3 becomes circularly polarized light.Half wave plate 5-2 and quarter-wave plate 5-3 is by waiting for test sample
The testing requirement of product 9 selects different polarization modes, to adapt to different measurement demands.
Fig. 5 is scattering coordinate system schematic diagram, and scattering face element is located in XOY plane, θi、φiIndicate incident light incidence angle and
Azimuth, θs、φsIndicate angle of scattering and the azimuth of scattering light, LsIndicate that the radiance of scattering face element, E indicate scattering face element
Radiant illumination, two-way dispersion distribution function (BSDF) be defined as it is a certain scattering face element at scattering radiance and incident radiation
The ratio of illumination, surface scattering characteristic determined by the ratio is only related with the characteristic of material surface itself, and three-dimensional with receiving
The measurement factor such as angle is unrelated, has at this time：
For body surface in the scattering properties of arbitrary view angle, unit is surface of sphere under the conditions of it indicates different incidence angles
Inverse (sr-1)。
Full integral scattering (TIS) is double integrals of the BSDF in hemispherical space, and expression formula is as follows：
What the present invention was not disclosed in detail partly belongs to techniques known.
Those of ordinary skill in the art it should be appreciated that more than embodiment be intended merely to illustrate the present invention,
And be not used as changing embodiment described above as long as in the spirit of the present invention for limitation of the invention,
Modification will all be fallen in the range of claims of the present invention.
Claims (8)
1. a kind of high dynamic range precision scattering properties measuring system, it is characterised in that：Including light source module, signal modulation mould
Block, energy attenuation module, collimator and extender module, polarization module, assemble microscope group, pin hole, focus microscope group, sample to be tested, can darkening
Door screen, coupling microscope group, field stop, photodetector, delustring trap, data processing system, signal demodulation module, delustring darkroom,
Light-source angle sweep mechanism, sample adjustment mechanism and probe angle sweep mechanism；The light wave that light source module is sent out is through signal tune
Molding block and signal demodulation module carry out signal processing, ensure that system has high dynamic range by energy attenuation module, then pass through
Collimator and extender module makes light beam become collimated light beam, and polarization module is directed at collimated optical beam and carries out polarization conversion operation, to provide not
It is illuminated with polarization mode, meets different application demand；It assembles microscope group and the light beam modulated through polarization module is converted into light pencil, then
Through pinhole filter, it will be convergent beam by the optical beam transformation of pinhole filter by focusing microscope group, be irradiated to sample to be tested surface,
It focuses microscope group focal plane to fall in the plane of iris aperture, the light beam that hemispherical space is scattered to through sample to be tested passes through iris diaphgram
The size of coupling microscope group surface hot spot is incident in control, and sample to be tested is scattered to the segment beam energy of hemispherical space by coupling microscope group
Amount is collected in photodetector, and field stop adjusts the visual field size of photodetector photosurface, delustring trap for collect because
The specular reflectance beam that sample to be tested surface generates, the light energy that photodetector is entered by sample to be tested surface modulation include
The scattering properties information on sample to be tested surface obtains distribution and the size of sample to be tested scattering properties through data processing system；
In addition to signal demodulation module and data processing system, whole system is placed in delustring darkroom；Light-source angle sweep mechanism is using electricity
The incident angle on sample to be tested surface is incident in dynamic regulative mode control, and sample adjustment mechanism is manually adjustable or electric adjustable
Alignment is adjusted in six dimension directions to sample to be tested in section, and probe angle sweep mechanism is in hemispherical space by preset
Collect the energy that sample to be tested scatters to hemispherical space in track.
2. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：Light source module packet
Contain but be not limited to laser light source, LED light source, halogen light source, can be selected according to practical measurement demand, laser light source can be in wavelength
1 kind to 4 kinds wavelength light source is selected in 370nm~980nm, 1.0 μm~100.0 μm light sources；Halogen light source selectable range 400nm
~1700nm.
3. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：Signal modulation mould
Machinery modulation, electricity modulation and optical modulation mode can be used in block, coordinates with signal demodulation module, to improve the measurement spirit of system
Sensitivity.
4. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：Energy attenuation mould
Block can be used multilevel energy attenuator, and every grade of energy attenuation piece makes energy be reduced at least two orders of magnitude, according to photoelectricity when measurement
The energy size of detector response is to select suitable energy attenuation magnitude, to improve the measurement dynamic range of system.
5. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：Polarization module packet
The polarizer, half wave plate, quarter-wave plate are included, to provide different polarization mode illumination light beam, meets different measurement need
It asks.
6. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：Light-source angle is swept
Retouch mechanism and the incident angle for being incident on sample to be tested surface controlled using motorized adjustment mode, sample to be tested include optical element,
Mechanical organ sample to be tested surface and its sextuple adjustment mechanism, the adjustment mechanism can be adjusted, are also electrically adjusted, detect manually
Device angle scanning mechanism is collected the energy that sample to be tested scatters to hemispherical space by preset track in hemispherical space.
7. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：In measuring system
Be designed with delustring trap, to eliminate sample to be tested caused by mirror-reflection, effectively inhibit mirror-reflection bias light to measurement result
Interference.
8. high dynamic range precision scattering properties measuring system according to claim 1, it is characterised in that：Except signal demodulates
Outside module and data processing system, whole system is located in delustring darkroom, to reduce the influence of bias light, improves measurement accuracy.
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| CN109490253A (en) * | 2018-12-26 | 2019-03-19 | 北京工业大学 | A kind of novel analog natural light bidirectional reflectance distribution function test device |
| CN111641787A (en) * | 2020-05-21 | 2020-09-08 | 北京集光通达科技股份有限公司 | Snapshot method and device for enhancing imaging effect in vehicle |
| CN112539697A (en) * | 2020-07-14 | 2021-03-23 | 深圳中科飞测科技股份有限公司 | Light-emitting device and light spot adjusting method and detection equipment thereof |
| CN113155781A (en) * | 2021-04-23 | 2021-07-23 | 杭州海康威视数字技术股份有限公司 | Non-contact detection system |
| CN113393579A (en) * | 2021-08-17 | 2021-09-14 | 天津云圣智能科技有限责任公司 | Multi-machine cooperative scanning method and device and electronic equipment |
| CN113607694A (en) * | 2021-08-02 | 2021-11-05 | 上海无线电设备研究所 | High-precision measuring device for bidirectional reflection distribution function of low-scattering coating |
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