CN105651733B - Material scattering characteristic measuring device and method - Google Patents
Material scattering characteristic measuring device and method Download PDFInfo
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- CN105651733B CN105651733B CN201410742943.1A CN201410742943A CN105651733B CN 105651733 B CN105651733 B CN 105651733B CN 201410742943 A CN201410742943 A CN 201410742943A CN 105651733 B CN105651733 B CN 105651733B
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Abstract
The present invention provides a kind of material scattering characteristic measuring device and methods, and material scattering characteristic measuring device includes: radiating light source, for issuing radiant light；Optical splitter is set in the subsequent optical path of the radiating light source；Angular spectrum information collects object lens, is set on the reflected light path of the optical splitter；Probe unit is set on the transmitted light path of the optical splitter.Measuring device and measuring method of the invention can make measuring principle simpler and direct, systematic error item greatly reduces, without carrying out complicated calibration process, it can accelerate material scattering feature measurement speed, it realizes the measurement of higher precision, gamut measurement can be carried out to the material scattering characteristic within the scope of 180 degree.
Description
Technical field
The present invention relates to a kind of material scattering characteristic measuring devices.
Background technique
The scattering properties of material directly reflects the optical characteristics of material itself and the Roughness Information on its surface, industrially
Scattering properties measuring device, which has to compare, to be widely applied, such as:
1., can when producing or developing scattering film, brightness enhancement film (Brightness Enhancing Film) or diffusion sheet
It is monitored and measures by performance of the scattering properties measuring device to such product；
2. being also required to work as by scattering properties measuring device to monitor sometimes when carrying out optical coating (such as anti-reflection film)
The process condition of preceding plated film；
3. being also required to monitor the production matter of product by scattering properties measuring device when carrying out plastics, paper production
Amount；
4. when carrying out the design of spuious photaesthesia optical-mechanical system, it usually needs meticulously assess the stray light water of optical-mechanical system
It is flat, and the scattering properties for obtaining selected ray machine material will be the important input condition for emulating reliability；
5. needing to judge by polishing of the scattering properties measuring device to silicon wafer in semicon industry.
In SEMI ME1392-0305 and ASTM Standard E1392-96 measurement standard, to current typical scattering
Characteristic measuring device is described, and adjusts the position of pick-up probe by six degree of freedom and passes through to measure illumination light wait measure and monitor the growth of standing timber
Scattering properties after material scattering, the scattering properties measurement efficiency for carrying out material by the principle is very low, and the higher cost of equipment.
It is described in the patent US6577397B1 of Philips a kind of by hemispherical scatterer and approximate fish eye lens
Detection optical path come the method for realizing material scattering feature measurement, can be by along track groove as shown in Figure 1,14 be wherein light source
The incident angle of 13 motor adjustment illumination lights 15,12 be detected materials, and 16 be hemispherical mirror, and 10 be hemispherical scatterer,
17 be optical path position, and the detection optical path at 17 positions cooperates hemispherical mirror 16, can measure and obtains detected materials
Scattering properties in 12 polarizers of big angle scope is imitated by the scattering properties that the type device measures material than the former prior art
Rate is much higher, but due to the limitation in itself measuring principle (off-axis optical system) and structure, is in the presence of be difficult correction
The defects of system error and the scattered light intensity information of Partial angle are unable to measure.
Summary of the invention
The purpose of the present invention is to provide a kind of material scattering characteristic measuring device, can precise measurement obtain dissipating for material
Penetrate characteristic.
To solve the above problems, the present invention provides a kind of material scattering characteristic measuring device, comprising:
Radiating light source, for issuing radiant light；
Optical splitter is set in the subsequent optical path of the radiating light source, for reflecting the radiant light into angular spectrum information
Collect object lens；
Angular spectrum information collects object lens, is set on the reflected light path of the optical splitter, for collecting the anti-of the optical splitter
Light is penetrated to detected materials surface, and collects the scattering angular light distribution information on detected materials surface and to be imaged onto detection single
Member；
Probe unit is set on the transmitted light path of the optical splitter, is collected collected by object lens for acquisition angle spectrum information
Scattering angular light distribution information, to obtain the scattering properties of detected materials.
Further, in above-mentioned apparatus, the incident angle of detected materials surface incident light is adjustable, to obtain arbitrarily to enter
Scattering angular light distribution information under firing angle degree.
It further, further include Angular spectrum of scattering intensity light distribution calibration component, for measuring wait measure and monitor the growth of standing timber in above-mentioned apparatus
Light distribution is demarcated before or after material scattering angular light distribution information.
Further, in above-mentioned apparatus, the light intensity calibration component is mark Quasi-Lambert's body or master grating
Further, in above-mentioned apparatus, the position of the radiating light source is adjustable, so as to adjust the incidence of the incident light
Angle
Further, in above-mentioned apparatus, it is provided with offset flat-panel in the optical path of the radiating light source to optical splitter, is used for
Adjust the incident angle of the incident light.
Further, in above-mentioned apparatus, be disposed in the optical path of the radiating light source to optical splitter conduction optical fiber,
The offset flat-panel, aperture diaphragm and the second relay unit.
Further, it in above-mentioned apparatus, is additionally provided in first in the optical path between the optical splitter and probe unit
After unit, it to be used for relay imaging.
Further, in above-mentioned apparatus, it is submergence microcobjective that the angular spectrum information, which collects object lens,.
Another side according to the present invention provides a kind of material scattering characteristic measurement method, special using above-mentioned material scattering
Property measuring device, comprising:
Step 1: being under specific illumination angle and wavelength case in Angular spectrum of scattering intensity light distribution calibration parts surface
Under conditions of angular spectrum information collects object lens optimal focal plane, with probe unit measurement Angular spectrum of scattering intensity light distribution calibration component for this
First group of scattering angular light distribution information A (r, φ) of lighting condition situation, wherein r is that scattering optic angle composes radius surface, φ
To scatter light azimuth；
It is collected in the optimal focal plane of object lens Step 2: detected materials are put into angular spectrum information, phase is measured by probe unit
With second group of scattering angular light distribution information B (r, φ) under lighting condition, wherein r is that scattering optic angle composes radius surface, φ
To scatter light azimuth, step 1 and step 2 can in no particular order sequentially；
Step 3: being obtained according to first group of angle light intensity distributed intelligence and second group of angle light intensity distributed intelligence described to be measured
The scattered light intensity function of material in the current lighting condition: C (r, φ)=B (r, φ)/A (r, φ), according to the scattered light intensity
Function determines the scattering properties of the detected materials.
Further, in the above-mentioned methods, further includes:
Step 4: changing the incident angle of detected materials surface incident light, detected materials under incidence angles degree are measured
Angular light distribution information is scattered, the scattered light intensity function under incidence angles degree is obtained.
Compared with prior art, material scattering characteristic measuring device of the invention includes: radiating light source, for issuing radiation
Light；Optical splitter is set in the subsequent optical path of the radiating light source, for reflecting the radiant light into angular spectrum information gleanings
Mirror；Angular spectrum information collects object lens, is set on the reflected light path of the optical splitter, for collecting the reflected light of the optical splitter extremely
Detected materials surface, and collect the scattering angular light distribution information on detected materials surface and be imaged onto probe unit；It visits
Unit is surveyed, is set on the transmitted light path of the optical splitter, collects the collected scattering optic angle of object lens for acquisition angle spectrum information
Light distribution information is spent, to obtain the scattering properties of detected materials, can make to measure using the present apparatus and corresponding measurement method
Principle is simpler and direct, and systematic error item greatly reduces, and without carrying out complicated calibration process, can accelerate material scattering
Feature measurement speed realizes the measurement of higher precision, can carry out gamut measurement to the material scattering characteristic within the scope of 180 degree.
Detailed description of the invention
Fig. 1 is the schematic diagram of existing typical speckle characteristic measuring device；
Fig. 2 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention one；
Fig. 3 is the scattered light intensity collection angle schematic diagram of the embodiment of the present invention one；
Fig. 4 is the scattering properties measuring principle based on angular spectrum of the embodiment of the present invention one；
Fig. 5 is the scattered light intensity angular distribution measurement example of the embodiment of the present invention one；
Fig. 6 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention two；
Fig. 7 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention three；
Fig. 8 is the structure chart of the material scattering characteristic measuring device of the embodiment of the present invention four.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
Embodiment one
As shown in Fig. 2, the present invention provides a kind of material scattering characteristic measuring device, comprising:
Radiating light source 101, for issuing radiant light；
Optical splitter 103 is set in the subsequent optical path of the radiating light source 101, is used for the anti-incident angle of the radiant light
Spectrum information collects object lens 104；
Angular spectrum information collects object lens 104, is set on the reflected light path of the optical splitter 103, for collecting the light splitting
Component or 105 surface of detected materials are demarcated in the reflected light of device 103 to Angular spectrum of scattering intensity light distribution, collect Angular spectrum of scattering intensity light distribution
The angle light intensity distributed intelligence of calibration component or the scattering light on 105 surface of detected materials is simultaneously imaged onto probe unit 106, wherein
The Angular spectrum of scattering intensity light distribution calibration component or detected materials 105 are placed in the optimal focal plane that angular spectrum information collects object lens 104
On；
Angular spectrum of scattering intensity light distribution calibration component is used to demarcate the relative luminance of each angle direction, and its all directions
Known to relative luminance distribution, it is preferred to use mark Quasi-Lambert's body or master grating；
Probe unit 106 is set on the transmitted light path of the optical splitter 103, collects object lens for acquisition angle spectrum information
The scattering angular light distribution letter on angular spectrum light distribution calibration component or 105 surface of detected materials is scattered collected by 104
Breath, to obtain the scattering properties of detected materials, wherein the test surface and angular spectrum information of probe unit 106 collect object lens 104
Second back focal plane 102-2 is overlapped.102-1 and 102-2 as shown in Figure 2 is respectively first and that angular spectrum information collects object lens 104
Two back focal planes, back focal plane are also generally referred to as frequency plane.Preferably, the incident angle of detected materials surface incident light is adjustable, from
And obtain the scattering angular light distribution information under any incident angle degree.
Preferably, the first back focal plane 102-1 that the angular spectrum information collects object lens 104 is located at radiating light source 101 and light splitting
In optical path between device 103.Specifically, radiating light source 101 acquires 103 back focal plane of object lens for providing illumination light, in angular spectrum
Upper formation small range illumination, to realize the illumination for carrying out quasi-parallel angle to sample face.101 preferred narrow of radiating light source
Light beam laser, the illumination of zonule needed for can realizing on the first back focal plane 102-1, which can be semiconductor
The laser light sources such as laser, optical fiber laser, gas laser, solid state laser, radiating light source 101 are enterprising in the first back focal plane
Row zonule, which illuminates, can be achieved directional light subject to the collection illumination reflected light outgoing of object lens 104 of angular spectrum information.Radiating light source 101 can also
Select other types light source, such as light emitting diodes (LEDs, LED light source), halogen lamp, the broadband lights such as xenon lamp
Source can form zonule illumination by suitably modulating on frequency plane 102-1, specifically can be by above and below perpendicular to optical axis direction
(left and right) translates the realization of (Z-direction or X-direction in Fig. 2) radiating light source 101 to the photograph of the first back focal plane 102-1 different location
It is bright, in this way after angular spectrum information collects object lens 104, it can get the lighting radiation light of different angle.
Radiating light source 101 can be also in-line illumination device, and a reflecting mirror, the coaxial photograph are included at least in illumination path
Bright device may include that devices, the in-line illumination devices such as Polarization Modulation, wavelength modulation can be by the first lens and the second lens group
At importing light conjugation will be illuminated by realizing collects on object lens back focal plane (frequency plane) to angular spectrum information, and the in-line illumination device can
Comprising deflectable offset flat-panel, by continuous deflection offset flat-panel, it can be achieved that light angle continuously adjusts.
Optical splitter 103 preferably unpolarized Amici prism, unpolarized plate or film, the radiant light that radiating light source 101 issues
Enter angular spectrum after 103 dichroic reflection of optical splitter and detect object lens 104, demand region and angle are realized to detected materials 105
Illumination.
It may include the Light Modulations device such as attenuator, polarizing film or filter plate that the angular spectrum information, which is collected in object lens 104,.Institute
It states angular spectrum information and collects the preferred optical numerical aperture of object lens 104 more than or equal to 1, and the micro- object of submergence for meeting Abbe sine condition
Mirror generally meets the microcobjective of Abbe sine condition, and spot radius ρ and the measured object light intensity in microcobjective pupil face go out
Strictly meet relationship ρ=f × sin θ between firing angle θ, deviation is smaller than 0.1%, and wherein f is the focal length of microcobjective, and ρ is pupil face
The diameter of hot spot, θ are the light emitting angles of detected materials emergent light.The angle information capture range of scattered light intensity is received by angular spectrum information
The optical numerical aperture for collecting object lens 104 determines, when optical numerical aperture is greater than 1, collects detected materials in specific illumination item
The light intensity angular distribution information within the scope of 180 degree under part (angle, area, wavelength, polarization etc.).Angular spectrum information collects object lens
104 can also be used object lens of the numerical aperture less than 1, scattered light intensity collection angle as shown in Figure 3 at this timeIt is limited by following formula
System:
WhereinFor scattered light intensity capture range, and NA is the numerical aperture that angular spectrum information collects object lens 104.
It is detailed, as shown in figure 4, the scattering properties measuring principle of the present embodiment material scattering characteristic measuring device is as follows:
According to angular spectrum image-forming principle, angular spectrum information collects the light of the equal angular issued within the scope of 104 true field of object lens
Line will converge at angular spectrum information and collect at the same position in 104 pupil face (back focal plane) of object lens, i.e., angular spectrum information collects 104 pupil of object lens
Face receive each position light intensity it is corresponding be different angle emergent ray in detected materials 105 light distribution, and angular spectrum believe
There is following relationship between the spot radius ρ and measured object light intensity output angle θ in breath collection 104 pupil face of object lens:
ρ=f × sin θ,
Wherein f is the focal length that angular spectrum information collects object lens, and ρ is the diameter of pupil face hot spot, and θ is the light emitting anger of sample emergent light
Degree.
It, can be by measuring and analyzing the light distribution on angular spectrum information collection 104 pupil face of object lens according to principles above
Analysis obtains the light distribution of all angles of sample surface outgoing, can be obtained the scattering properties of material；To obtain 0~180
The scattered light intensity distribution in range is spent, the submergence microcobjective of >=1 NA need to be selected.
Probe unit 106 include at least a detector, the optional CCD of detector, cmos sensor or photodiode etc.,
Angle light intensity distributed intelligence collected by probe unit 106 directly reflects illumination light scattered light intensity angle after detected materials 105
Distribution character, as shown in Figure 5.Probe unit 106 can collect angular spectrum by the method for scanning or direct imaging and acquire object lens 104
Scattering properties on back focal plane or its conjugate planes, the scattering properties are the scattered light intensity angle distributed intelligence of detected materials 105
Angular spectrum information collection object lens 104 are widely different for the transmitance of the scattering light of wide-angle and low-angle, usually make
It is directly measured obtained Angular spectrum of scattering intensity light distribution with mark Quasi-Lambert's body and demarcated to being collected object lens 104 with angular spectrum information.This
The measurement method of the material scattering characteristic measuring device of embodiment is as follows:
Step 1 prepares one piece of mark Quasi-Lambert's body, usually using the standardized product of Labsphere, in specific illumination angle
Under wavelength case, angular spectrum information is in Angular spectrum of scattering intensity light distribution calibration parts surface and collects 104 optimal focal plane of object lens
Under the conditions of, first group with the measurement Angular spectrum of scattering intensity light distribution calibration component of probe unit 106 for the lighting condition situation dissipates
Shooting angle light distribution information A (r, φ), wherein r is that scattering optic angle composes radius surface, and φ is scattering light azimuth；
Detected materials are put into angular spectrum information and collected in the optimal focal plane of object lens 104, led to by step 2 using detected materials
Crossing second group of scattering angular light distribution information B (r, φ) that probe unit 106 is measured under the conditions of equal illumination, wherein r is scattered
Optic angle spectrum radius surface is penetrated, φ is scattering light azimuth, and step 1 and step 2 can in no particular order sequentially；
Step 3 obtains described to be measured according to first group of angle light intensity distributed intelligence and second group of angle light intensity distributed intelligence
The scattered light intensity function of material in the current lighting condition is (BRDF): C (r, φ)=B (r, φ)/A (r, φ), according to described
Scattered light intensity function determines the scattering properties of the detected materials；
Step 4 changes the incident angle of detected materials surface incident light, measures detected materials under incidence angles degree
Angular light distribution information is scattered, the scattered light intensity function under incidence angles degree is obtained.
Using the material scattering characteristic measuring device of this implementation, measuring principle is simpler and direct, and systematic error item is big
It is big to reduce, without carrying out complicated calibration process, material scattering feature measurement speed can be accelerated, realize the survey of higher precision
Amount can carry out gamut measurement to the material scattering characteristic within the scope of 180 degree.
Embodiment two
As shown in fig. 6, the present invention provides another material scattering characteristic measuring device, the radiant light including such as embodiment one
Source 101, for issuing radiant light；Optical splitter 103 is set in the subsequent optical path of the radiating light source 101, is used for the spoke
Light is penetrated to reflect into angular spectrum information collection object lens 104；Angular spectrum information collects object lens, is set to the reflected light path of the optical splitter 103
On, the reflected light for transmiting the optical splitter 103 collects mark Quasi-Lambert's body to mark Quasi-Lambert's body or 105 surface of detected materials
Or the scattering light on 105 surface of detected materials the distributed intelligence of angle light intensity and be imaged onto probe unit 106, wherein the standard
Lambert's body or detected materials are placed in angular spectrum information and collect in the optimal focal plane of object lens 104；Probe unit 106 is set to described
On the transmitted light path of optical splitter, for acquisition angle spectrum information collect object lens 104 collected by illumination light through mark Quasi-Lambert's body or to
It measures and monitor the growth of standing timber the angle light intensity distributed intelligence after expecting surface scattering, wherein the test surface and angular spectrum information of probe unit 106 collect object lens
104 the second back focal plane 102-2 is overlapped.
The difference between this embodiment and the first embodiment lies in the angular spectrum information collects the first back focal plane 102-1 of object lens 104
It is collected in the optical path between object lens 104 positioned at the optical splitter 103 and angular spectrum information, the optical splitter 103 and probe unit 106
Between optical path on be additionally provided with the first relay unit 201, for by angular spectrum information collect object lens 104 the first back focal plane 102-
On 1 relay imaging to the second back focal plane 102-2, finally detected by probe unit 106.Specifically, the sending of radiating light source 101 is narrow
Light beam be irradiated to angular spectrum information collect object lens 104 the first back focal plane 102-1 on, after by angular spectrum information collect object lens 104 after
With on required angle illumination to detected materials 105, illumination light is after the scattering of detected materials 105, and angle light intensity distributed intelligence is by angle
Spectrum information is collected object lens 104 and is collected, and after the relaying of relay unit 201, detected unit 106 is detected.The relaying list
First 201 preferred image doubly telecentric optical paths.First relay unit 201 can be made of the first lens and the second lens, be realized angular spectrum
Information is collected object lens back focal plane (frequency plane) and is relayed on probe unit 106.
The measurement method of the material scattering characteristic measuring device of the present embodiment referring to embodiment one corresponding part, herein not
It is repeating.
Using the material scattering characteristic measuring device of this implementation, measuring principle is simpler and direct, and systematic error item is big
It is big to reduce, without carrying out complicated calibration process, material scattering feature measurement speed can be accelerated, realize the survey of higher precision
Amount can carry out gamut measurement to the material scattering characteristic within the scope of 180 degree.
Embodiment three
As shown in fig. 7, the present invention provides another material scattering characteristic measuring device, the radiant light including such as embodiment one
Source 101, for issuing radiant light；Optical splitter 103 is set in the subsequent optical path of the radiating light source 101, is used for the spoke
Light is penetrated to reflect into angular spectrum information collection object lens 104；Angular spectrum information collects object lens, is set to the reflected light path of the optical splitter 103
On, the reflected light for transmiting the optical splitter 103 collects mark Quasi-Lambert's body to mark Quasi-Lambert's body or 105 surface of detected materials
Or the scattering light on 105 surface of detected materials the distributed intelligence of angle light intensity and be imaged onto probe unit 106, wherein the standard
Lambert's body or detected materials are placed in angular spectrum information and collect in the optimal focal plane of object lens 104；Probe unit 106 is set to described
On the transmitted light path of optical splitter, for acquisition angle spectrum information collect object lens 104 collected by illumination light through mark Quasi-Lambert's body or to
It measures and monitor the growth of standing timber the angle light intensity distributed intelligence after expecting surface scattering, wherein the test surface and angular spectrum information of probe unit 106 collect object lens
104 the second back focal plane 102-2 is overlapped.
The difference between this embodiment and the first embodiment lies in the angular spectrum information collects the first back focal plane 102-1 of object lens 104
It is collected in the optical path between object lens 104 positioned at the optical splitter 103 and angular spectrum information；The optical splitter 103 and probe unit 106
Between optical path on be additionally provided with the first relay unit 201, for by angular spectrum information collect object lens 104 the first back focal plane 102-
On 1 relay imaging to the second back focal plane 102-2, finally detected by probe unit 106；The radiating light source 101 is to optical splitter 103
Optical path on be also disposed with conduction optical fiber 205, offset flat-panel 204, aperture diaphragm 203 and the second relay unit 202, it is described
Radiating light source 101 is connect by conducting optical fiber 205 with the offset flat-panel 204, and the conduction optical fiber 205 is for coupling radiant light
The energy in source 101 is, it is preferable to use multimode quartz conducts optical fiber, after the polarization plate 204 will be for that will be conducted the outgoing of optical fiber 205
Beams of narrow-band light position vertical offset occurs, it is described to realize the function being continuously adjusted to 105 illumination incident angle of detected materials
Polarization plate 204 can carry out a certain range deflection around X-direction, to realize the function at continuous adjustment illumination incident angle, the hole
The first back focal plane 102-1 that diameter diaphragm 203 and angular spectrum information collect object lens 104 is conjugated, and second relay unit 202 is by aperture
The conjugation of diaphragm 203 is collected to angular spectrum information on the first back focal plane 102-1 of object lens 104, and radiating light source 101, which issues radiant light, to be passed through
It after conducting optical fiber 205, is modulated through offset flat-panel 204, beam propagation is to 203 position of aperture diaphragm, then by the second relay unit 202
Light beam on aperture diaphragm 203 is imaged onto angular spectrum information to collect on the first back focal plane 102-1 of object lens 104, is believed by angular spectrum
Breath illuminates detected materials 105 with special angle and illumination region after collecting object lens 104, and illumination light is through detected materials 105
After scattering, the distributed intelligence of angle light intensity is collected object lens 104 by angular spectrum information and is collected, after the first relay unit 201, by detecting
Unit 106 is detected.
The measurement method of the material scattering characteristic measuring device of the present embodiment referring to embodiment one corresponding part, herein not
It is repeating.
Using the material scattering characteristic measuring device of this implementation, measuring principle is simpler and direct, and systematic error item is big
It is big to reduce, without carrying out complicated calibration process, material scattering feature measurement speed can be accelerated, realize the survey of higher precision
Amount can carry out gamut measurement to the material scattering characteristic within the scope of 180 degree.
Example IV
As shown in figure 8, it includes the identical structure for implementing three that the present invention, which provides another material scattering characteristic measuring device, this
The difference of embodiment and embodiment three is that is filled between angular spectrum information collection object lens 104 and detected materials 105 is refraction
Rate is greater than 1 liquid 206, and the object lens submerged in this way can be realized greater than the scattering properties measurement within the scope of 180 degree.
The measurement method of the material scattering characteristic measuring device of the present embodiment referring to embodiment one corresponding part, herein not
It is repeating.
Using the material scattering characteristic measuring device of this implementation, measuring principle is simpler and direct, and systematic error item is big
It is big to reduce, without carrying out complicated calibration process, material scattering feature measurement speed can be accelerated, realize the survey of higher precision
Amount can carry out gamut measurement to the material scattering characteristic within the scope of 180 degree.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For system disclosed in embodiment
For, due to corresponding to the methods disclosed in the examples, so being described relatively simple, related place is referring to method part illustration
?.
Obviously, those skilled in the art can carry out various modification and variations without departing from spirit of the invention to invention
And range.If in this way, these modifications and changes of the present invention belong to the claims in the present invention and its equivalent technologies range it
Interior, then the invention is also intended to include including these modification and variations.
Claims (11)
1. a kind of material scattering characteristic measuring device, which is characterized in that by being formed with lower component:
Radiating light source, for issuing radiant light；
Optical splitter is set in the subsequent optical path of the radiating light source, is collected for reflecting the radiant light into angular spectrum information
Object lens；
Angular spectrum information collects object lens, is set on the reflected light path of the optical splitter, for collecting the reflected light of the optical splitter
To detected materials surface, and collects the scattering angular light distribution information on detected materials surface and be imaged onto probe unit；
Probe unit is set on the transmitted light path of the optical splitter, is collected for acquisition angle spectrum information and is dissipated collected by object lens
Shooting angle light distribution information, to obtain the scattering properties of detected materials；
The first back focal plane that the angular spectrum information collects object lens is located at the optical splitter and the angular spectrum information is collected between object lens
Optical path on, or in optical path between the radiating light source and the optical splitter.
2. material scattering characteristic measuring device as described in claim 1, which is characterized in that detected materials surface incident light enters
Adjustable angle is penetrated, to obtain the scattering angular light distribution information under any incident angle degree.
3. material scattering characteristic measuring device as described in claim 1, which is characterized in that further include Angular spectrum of scattering intensity light distribution
Component is demarcated, for demarcating light distribution before or after measuring detected materials scattering angular light distribution information.
4. material scattering characteristic measuring device as claimed in claim 3, which is characterized in that the Angular spectrum of scattering intensity light distribution mark
Component is determined for mark Quasi-Lambert's body or master grating.
5. material scattering characteristic measuring device as claimed in claim 2, which is characterized in that the position of the radiating light source can
It adjusts, so as to adjust the incident angle of the incident light.
6. material scattering characteristic measuring device as claimed in claim 2, which is characterized in that the radiating light source to optical splitter
Offset flat-panel is provided in optical path, for adjusting the incident angle of the incident light.
7. material scattering characteristic measuring device as claimed in claim 6, which is characterized in that the radiating light source to optical splitter
Conduction optical fiber, the offset flat-panel, aperture diaphragm and the second relay unit are disposed in optical path.
8. material scattering characteristic measuring device as described in claim 1, which is characterized in that the optical splitter and probe unit it
Between optical path on be additionally provided with the first relay unit, be used for relay imaging.
9. material scattering characteristic measuring device as described in claim 1, which is characterized in that the angular spectrum information collects object lens and is
Submerge microcobjective.
10. a kind of material scattering characteristic measurement method is surveyed using material scattering characteristic as described in any one of claims 1 to 9
Measure device characterized by comprising
Step 1: being in angular spectrum in Angular spectrum of scattering intensity light distribution calibration parts surface under specific illumination angle and wavelength case
Under conditions of information collects object lens optimal focal plane, with probe unit measurement Angular spectrum of scattering intensity light distribution calibration component for the illumination
First group of scattering angular light distribution information A (r, φ) of condition situation, wherein r is that scattering optic angle composes radius surface, and φ is scattered
Penetrate light azimuth；
It is collected in the optimal focal plane of object lens Step 2: detected materials are put into angular spectrum information, identical photograph is measured by probe unit
Second group of scattering angular light distribution information B (r, φ) under the conditions of bright, wherein r is that scattering optic angle composes radius surface, and φ is scattered
Light azimuth is penetrated, step 1 and step 2 can in no particular order sequentially；
Step 3: obtaining the detected materials according to first group of angle light intensity distributed intelligence and second group of angle light intensity distributed intelligence
Scattered light intensity function in the current lighting condition: C (r, φ)=B (r, φ)/A (r, φ), according to the scattered light intensity function
Determine the scattering properties of the detected materials.
11. material scattering characteristic measurement method as claimed in claim 10, which is characterized in that further include:
Step 4: changing the incident angle of detected materials surface incident light, the scattering of detected materials under incidence angles degree is measured
Angular light distribution information obtains the scattered light intensity function under incidence angles degree.
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| CN106770288B (en) * | 2016-12-09 | 2019-08-02 | 江苏大学 | A kind of micro- Polaroid system and method for interference with common path phase |
| CN108535218A (en) * | 2018-04-13 | 2018-09-14 | 黄智强 | A kind of high dynamic range precision scattering properties measuring system |
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| CN102608076A (en) * | 2012-03-16 | 2012-07-25 | 国家黄金钻石制品质量监督检验中心 | Device and method for carrying out detection and gloss classification on pearls |
| CN104122228A (en) * | 2014-07-14 | 2014-10-29 | 江苏大学 | A microscopic imaging system for analysis of integrated light interference and scattering information and a method |
| CN104121857A (en) * | 2014-07-25 | 2014-10-29 | 南京信息工程大学 | Observation method and device for influence of magnetic head in flight on disk surface lubrication film |
| CN104122209A (en) * | 2014-07-25 | 2014-10-29 | 南京信息工程大学 | Visual observing system for growth process of microcrystalline silicon film and measurement method |
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