CN105624620B - 一种带气路且结构精简的小型圆形平面靶 - Google Patents
一种带气路且结构精简的小型圆形平面靶 Download PDFInfo
- Publication number
- CN105624620B CN105624620B CN201610160460.XA CN201610160460A CN105624620B CN 105624620 B CN105624620 B CN 105624620B CN 201610160460 A CN201610160460 A CN 201610160460A CN 105624620 B CN105624620 B CN 105624620B
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- mounting flange
- flange
- bellows
- inlet pipe
- air inlet
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- 230000007704 transition Effects 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- 241000233855 Orchidaceae Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Prevention Of Electric Corrosion (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610160460.XA CN105624620B (zh) | 2016-03-21 | 2016-03-21 | 一种带气路且结构精简的小型圆形平面靶 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610160460.XA CN105624620B (zh) | 2016-03-21 | 2016-03-21 | 一种带气路且结构精简的小型圆形平面靶 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105624620A CN105624620A (zh) | 2016-06-01 |
CN105624620B true CN105624620B (zh) | 2018-04-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610160460.XA Active CN105624620B (zh) | 2016-03-21 | 2016-03-21 | 一种带气路且结构精简的小型圆形平面靶 |
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CN (1) | CN105624620B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108085646B (zh) * | 2017-10-31 | 2023-06-23 | 东莞市汇成真空科技有限公司 | 一种大型罐体内壁镀膜用真空阴极电弧镀膜机 |
CN113493902A (zh) * | 2020-03-19 | 2021-10-12 | 中微半导体设备(上海)股份有限公司 | 磁控溅射镀膜装置及其工作方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101148752A (zh) * | 2006-09-19 | 2008-03-26 | 中国科学院合肥物质科学研究院 | 用于10-8Pa超高真空圆形平面磁控溅射靶的密封装置 |
CN101280420A (zh) * | 2008-05-28 | 2008-10-08 | 东北大学 | 一种具有磁场增强和调节功能的磁控溅射靶 |
CN103469166A (zh) * | 2013-10-12 | 2013-12-25 | 武汉大学 | 一种集成式阴极电弧靶 |
KR20140129677A (ko) * | 2013-04-30 | 2014-11-07 | 한순석 | 스퍼터링용 로터리 타겟 어셈블리의 접합방법 |
CN104404463A (zh) * | 2014-11-14 | 2015-03-11 | 河海大学 | 一种平面磁控溅射靶 |
CN205556768U (zh) * | 2016-03-21 | 2016-09-07 | 上海福宜真空设备有限公司 | 一种带气路且结构精简的小型圆形平面靶 |
-
2016
- 2016-03-21 CN CN201610160460.XA patent/CN105624620B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101148752A (zh) * | 2006-09-19 | 2008-03-26 | 中国科学院合肥物质科学研究院 | 用于10-8Pa超高真空圆形平面磁控溅射靶的密封装置 |
CN101280420A (zh) * | 2008-05-28 | 2008-10-08 | 东北大学 | 一种具有磁场增强和调节功能的磁控溅射靶 |
KR20140129677A (ko) * | 2013-04-30 | 2014-11-07 | 한순석 | 스퍼터링용 로터리 타겟 어셈블리의 접합방법 |
CN103469166A (zh) * | 2013-10-12 | 2013-12-25 | 武汉大学 | 一种集成式阴极电弧靶 |
CN104404463A (zh) * | 2014-11-14 | 2015-03-11 | 河海大学 | 一种平面磁控溅射靶 |
CN205556768U (zh) * | 2016-03-21 | 2016-09-07 | 上海福宜真空设备有限公司 | 一种带气路且结构精简的小型圆形平面靶 |
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Denomination of invention: A Small Circular Planar Target with Gas Path and Simplified Structure Effective date of registration: 20220801 Granted publication date: 20180403 Pledgee: Industrial Bank Co.,Ltd. Shanghai Nanxiang sub branch Pledgor: SHANGHAI FUYI VACUUM EQUIPMENT Co.,Ltd. Registration number: Y2022310000153 |
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Date of cancellation: 20231123 Granted publication date: 20180403 Pledgee: Industrial Bank Co.,Ltd. Shanghai Nanxiang sub branch Pledgor: SHANGHAI FUYI VACUUM EQUIPMENT Co.,Ltd. Registration number: Y2022310000153 |
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