CN105571576B - A kind of MEMS gyro mode vectors correlation voltage automatic test approach - Google Patents
A kind of MEMS gyro mode vectors correlation voltage automatic test approach Download PDFInfo
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Abstract
The present invention is a kind of MEMS gyro mode vectors correlation voltage automatic test approach.Include the following steps：Driving close loop control circuit is added between the driving electrodes and driving detecting electrode of MEMS gyro driven-mode in step 1, so that the MEMS gyro driven-mode vibrates at its resonant frequency, and specified constant amplitude is kept, obtain drive displacement voltage signal V at this timeDP；MEMS gyro sense mode detecting electrode is connected preposition reading circuit by step 2, quadrature error displacement variable caused by gyro sense mode is converted into voltage variety through the preposition reading circuit, obtains the quadrature error voltage signal V of gyro sense modesp；Step 3, the controlled quentity controlled variable V that gyro sense mode is input to by adjustingTSo that the drive displacement voltage signal VDPWith the quadrature error voltage signal VspPhase difference be 0, obtain controlled quentity controlled variable V at this timeTFor mode vectors correlation voltage.The mode vectors correlation voltage at a temperature of varying environment can be tested automatically in real time.
Description
Technical field
The present invention relates to a kind of automatic test approach, especially with regard to a kind of micromechanics (MEMS) gyro mode vectors correlation voltage
Automatic test approach.
Technical background
MEMS gyro is the inertia device of the characteristic size processed with microelectronic technique in micron dimension, for measuring carrier
Angular movement information in inertial space, is widely used in the industry such as automobile, consumer electronics, civil field and tactical missile
The military domains such as guidance.
MEMS gyro is made of supporting beam and mass block, mostly use electrostatic drive, capacitance detecting form.MEMS gyro packet
Include two mode：Driven-mode and sense mode.Mass block does simple harmonic oscillation under the action of driving force along driving axis direction, claims
For driven-mode；When along angular speed input direction (Z axis), there are when angular velocity signal, the coriolis force generated by Coriolis effect makes
Mass block generates vibration, referred to as sense mode in sensitive axis direction.
In general, driven-mode resonant frequency is less than sense mode resonant frequency.When driven-mode resonant frequency and sensitive mould
State it is equal when, that is, when reaching mode vectors correlation, the mechanical sensitivity of gyro reaches maximum, if carry out again Vacuum Package reach compared with
High quality factor can make resolution ratio, noiseproof feature and zero drift of gyro etc. be significantly improved.
Currently, there are two methods for MEMS gyro mode vectors correlation：The first be trimmed using physics, such as laser trimming or
Person's Polycrystalline Silicon Precipitation adjusts modal frequency in turn to adjust the quality of modal mass block；Second is quiet using electricity adjusting generation
Electric negative stiffness adjusts modal stiffness and then adjusts modal frequency.First method needs precision to trim equipment, and cost is higher, to repairing
Mediator person to trim level requirement higher, trim that process time is longer, and inefficient, cost is also excessively high.Second method due to
It is adjusted using electricity, mode vectors correlation can be completed using suitable control circuit, influence of the environmental change to test can be removed, letter
It is single practical.In electricity adjusting method, mode vectors correlation voltage is very crucial, it is necessary to which testing out mode vectors correlation voltage first could be into
Row mode vectors correlation operates.
Invention content
Goal of the invention
The object of the present invention is to provide one kind being used for MEMS gyro mode vectors correlation voltage automatic test approach, can in real time certainly
Mode voltage under dynamic test condition of different temperatures, shortens the testing time, significantly improves testing efficiency.
Technical solution
The present invention is a kind of MEMS gyro mode vectors correlation voltage automatic test approach, and the MEMS gyro includes two moulds
State, i.e. driven-mode and sense mode, and sense mode resonant frequency is higher than driven-mode resonant frequency；The driven-mode packet
Include driving electrodes and driving detecting electrode；The sense mode includes sensitive detecting electrode and tuning electrode；The mode vectors correlation
Voltage is the voltage being added in when gyro driven-mode and equal sense mode resonant frequency on tuning electrode；
Wherein, include the following steps：
Driving closed-loop control time is added between the driving electrodes and driving detecting electrode of MEMS gyro driven-mode in step 1
Road so that the MEMS gyro driven-mode vibrates at its resonant frequency, and keeps specified constant amplitude, obtains at this time
Drive displacement voltage signal VDP；
MEMS gyro sense mode detecting electrode is connected preposition reading circuit by step 2, produced by gyro sense mode
Quadrature error displacement variable be converted to voltage variety through the preposition reading circuit, obtain the orthogonal of gyro sense mode
Error voltage signal Vsp；
Step 3, the controlled quentity controlled variable V that gyro sense mode is input to by adjustingTSo that the drive displacement voltage signal VDP
With the quadrature error voltage signal VspPhase difference be 0, obtain controlled quentity controlled variable V at this timeTFor mode vectors correlation voltage.
A kind of MEMS gyro mode vectors correlation voltage automatic test approach as described above, wherein in step 3, the drive
Dynamic displacement voltage signal VDPWith the quadrature error voltage signal VspIt is input to phase discriminator simultaneously, obtains and indicates the straight of phase difference
Flow voltage signal VQ_DC；The phase difference is input to controller as controlled volume and obtains control errors amount VT, then by the error
Controlled quentity controlled variable VTFeed back input to sense mode tunes electrode, forms closed feedback loop；When the phase difference passes through above-mentioned closed loop
When backfeed loop reaches 0, driven-mode resonant frequency and sense mode resonant frequency are equal, reach mode vectors correlation state, described
Control errors amount VTAs mode vectors correlation voltage；The control algolithm of the controller uses PID control.
Advantageous effect
Due to using the technology described above, tool has the advantage that the present invention：Varying environment temperature can be tested automatically in real time
Mode vectors correlation voltage under degree；Test loop uses closed loop feedback control, without operations such as frequent debugging, thread-changings, significantly shortens
Testing time of method of manual adjustment improves efficiency, simple and practical.The present invention is suitable for MEMS gyro mode vectors correlation voltage certainly
It is dynamic to measure.
Description of the drawings
Fig. 1 is frequency response curve of the MEMS gyro under the non-matching condition of mode；
Fig. 2 is frequency response curve of MEMS gyro under the conditions of mode vectors correlation；
Fig. 3 is MEMS gyro driven-mode close loop control circuit schematic diagram；
Fig. 4 is MEMS gyro mode vectors correlation voltage tester schematic diagram.
Specific implementation mode
Hereinafter, in conjunction with the drawings and specific embodiments, the present invention is described further.
The present invention is described in detail below with reference to the accompanying drawings and embodiments.
MEMS gyro of the present invention includes two mode, i.e. driven-mode and sense mode (also known as sensed-mode), and
Sense mode resonant frequency is higher than driven-mode resonant frequency；The driven-mode includes driving electrodes and driving detecting electrode；
The sense mode includes sensitive detecting electrode and tuning electrode；The mode vectors correlation voltage is when gyro driven-mode and sensitivity
The voltage being added in when modal resonance frequencies are equal on tuning electrode.
As Fig. 1 and Fig. 2 be MEMS gyro mode do not match with frequency response curve under the conditions of mode vectors correlation, work as MEMS
When gyro mode is under non-matching condition, since sense mode resonant frequency is higher than driven-mode resonant frequency, with MEMS gyro
Mode is compared under matching condition, when sense mode gain will be matched far smaller than when not matching.
Implementation steps of the present example for MEMS gyro mode vectors correlation voltage automatic test approach are as follows：
1) driving close loop control circuit, institute are added between the driving electrodes of MEMS gyro driven-mode and driving detecting electrode
It states MEMS gyro driven-mode to vibrate at its resonant frequency, and keeps constant amplitude, obtain drive displacement voltage signal VDP；
As shown in figure 3, MEMS gyro driven-mode 1 includes driving electrodes 12, resonance structure 11 and driven-mode detection electricity
The part of pole 13 3.Resonance structure is in driving force FdUnder effect, through driven-mode detecting electrode output driving displacement X, the drive
Dynamic displacement X obtains drive displacement voltage signal V after preposition reading circuit 14DP.The drive displacement voltage signal VDPBy moving
Phase device 15 moves 90 degree of phases, obtains and drive displacement voltage signal VDPOrthogonal drive displacement phase-shifting voltages signal VDPQ.Meanwhile
The drive displacement voltage signal VDPThrough full-wave rectification block 16, rectified signal V is obtainedDP_rec, then low-pass filtered device 17,
Obtain the direct current signal V of reflection drive displacement voltage signal amplitudeDP_DC.The direct current signal VDP_DCWith reference voltage signal VrTogether
When be input to comparator 18, obtain error signal Ve.The error signal VeVia controller 19 obtains d. c. voltage signal Vc.Institute
State d. c. voltage signal VcWith the drive displacement phase-shifting voltages signal VDPQIt is input to modulator 20 simultaneously, obtains sinusoidal drive
Signal Vd, it is added in MEMS gyro driving electrodes, and then generate driving force Fd, gyro driven-mode is made to shake at its resonant frequency
It is dynamic, and specified constant amplitude is kept, amplitude size passes through voltage signal VrIt is specified.
2) MEMS gyro sense mode detecting electrode is connected into preposition reading circuit, generated quadrature error displacement is become
Change amount is converted to voltage variety through the preposition reading circuit, obtains quadrature error voltage signal Vsp；
3) quadrature error voltage signal described in drive displacement voltage signal described in step 1) and step 2) is defeated simultaneously
Enter to phase discriminator, obtains the d. c. voltage signal V for indicating phase differenceQ_DC, phase discriminator is by demodulator 25 and low-pass filter herein
26 compositions；The phase difference is input to controller as controlled volume and obtains control errors amount VT, then by the control errors amount VT
Feed back input to sense mode tunes electrode, forms closed feedback loop；The control errors amount VTAct on sense mode tune
Electrostatic negative stiffness is generated on humorous electrode, to reduce sense mode resonant frequency.When the phase difference is returned by above-mentioned closed loop feedback
When road reaches 0, driven-mode resonant frequency and sense mode resonant frequency are equal, that is, reach mode vectors correlation state, the error
Controlled quentity controlled variable VTAs mode vectors correlation voltage；The various methods such as PID control may be used in specific control algolithm, are known technology.
It 4), can be with temperature in use sensor measurement environment temperature according to test needs；
5) measuring temperature and at this temperature mode vectors correlation voltage are acquired and is automatically stored in test file.
As shown in figure 4, MEMS gyro sense mode 2 includes tuning electrode 22, resonance structure 21 and sense mode detection electricity
The part of pole 23 3.Sense mode detecting electrode generates quadrature error displacement variable Y, through preposition reading circuit 24, obtains just
Hand over error voltage signal VSP.The quadrature error voltage signal VSPWith the drive displacement voltage signal VDPThrough phase discriminator 3, obtain
Obtain phase voltage signal VQ_DC.The phase discriminator 3 includes 26 two parts of demodulator 25 and low-pass filter.The phase difference electricity
Press signal VQ_DCAs controlled volume, control errors amount V is obtained after via controller 27T.The control errors amount VTFeed back to sensitive mould
State tunes on electrode 22, forms closed feedback loop；The control errors amount VTIt acts on sense mode tuning electrode 22 and produces
Raw electrostatic negative stiffness, to reduce sense mode resonant frequency.As the phase difference VQ_DCReach 0 by above-mentioned closed feedback loop
When, driven-mode resonant frequency and sense mode resonant frequency are equal, that is, reach mode vectors correlation state, the control errors amount VT
As mode vectors correlation voltage.
Although by above-described embodiment to a kind of MEMS gyro mode vectors correlation voltage automatic test approach of the present invention
It is described in detail, but above description is not limitation of the invention, in the range for the purport for not departing from the present invention
It is interior, various modifications and change can be carried out, for example, the method optimized can select in the various methods of the prior art.
Claims (1)
1. a kind of MEMS gyro mode vectors correlation voltage automatic test approach, the MEMS gyro includes two mode, that is, drives mould
State and sense mode, and sense mode resonant frequency is higher than driven-mode resonant frequency；The driven-mode includes driving electrodes
With driving detecting electrode；The sense mode includes sensitive detecting electrode and tuning electrode；The mode vectors correlation voltage is to work as top
The voltage being added in when spiral shell driven-mode and equal sense mode resonant frequency on tuning electrode；
It is characterised in that it includes following steps：
Driving close loop control circuit is added between the driving electrodes and driving detecting electrode of MEMS gyro driven-mode in step 1, makes
It obtains the MEMS gyro driven-mode to vibrate at its resonant frequency, and keeps specified constant amplitude, obtain driving at this time
Displacement voltage signal VDP；
MEMS gyro sense mode detecting electrode is connected preposition reading circuit by step 2, by caused by gyro sense mode just
It hands over error displacement variable to be converted to voltage variety through the preposition reading circuit, obtains the quadrature error of gyro sense mode
Voltage signal Vsp；
Step 3, the controlled quentity controlled variable V that gyro sense mode is input to by adjustingTSo that the drive displacement voltage signal VDPAnd institute
State quadrature error voltage signal VspPhase difference be 0, obtain controlled quentity controlled variable V at this timeTFor mode vectors correlation voltage；
In step 3, the drive displacement voltage signal VDPWith the quadrature error voltage signal VspIt is input to phase discriminator simultaneously,
Obtain the d. c. voltage signal V for indicating phase differenceQ_DC；The phase difference is input to controller as controlled volume and obtains error control
Amount V processedT, then by the control errors amount VTFeed back input to sense mode tunes electrode, forms closed feedback loop；When described
When phase difference reaches 0 by above-mentioned closed feedback loop, driven-mode resonant frequency and sense mode resonant frequency are equal, reach
Mode vectors correlation state, the control errors amount VTAs mode vectors correlation voltage；The control algolithm of the controller is controlled using PID
System.
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| CN106441359B (en) * | 2016-09-19 | 2019-02-19 | 浙江大学 | A kind of high-precision micromechanical gyro scene mode matching method |
| CN107966141B (en) * | 2016-10-20 | 2021-10-19 | 北京自动化控制设备研究所 | Quick oscillation starting device and oscillation starting method for silicon micro-resonator |
| CN109781086A (en) * | 2017-11-15 | 2019-05-21 | 北京自动化控制设备研究所 | A kind of annular microelectromechanicgyroscope gyroscope sensitive structure |
| CN109931959B (en) * | 2019-03-27 | 2023-03-31 | 河海大学常州校区 | Silicon micro gyroscope quadrature error correction method |
| CN110134005B (en) * | 2019-05-28 | 2022-04-19 | 重庆大学 | Composite control system of electromagnetic type scanning grating micro-mirror |
| CN110567450B (en) * | 2019-08-26 | 2021-02-05 | 北京自动化控制设备研究所 | Parameter matching method of MEMS Coriolis vibration gyroscope and ASIC circuit |
| CN110426025B (en) * | 2019-08-27 | 2021-03-05 | 浙江大学 | Real-time automatic mode matching method for micromechanical gyroscope |
| CN112444240A (en) * | 2019-08-30 | 2021-03-05 | 北京大学 | Rigid spindle positioning and laser balance matching algorithm of silicon micro-ring resonator gyroscope |
| CN111536994B (en) * | 2020-04-29 | 2021-09-24 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| CN112066968B (en) * | 2020-08-24 | 2024-04-12 | 南京理工大学 | Real-time mode automatic matching system of micro-electromechanical multi-ring gyroscope |
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