CN108844531B - Quick oscillation starting control method and device for high-Q-value micro-electromechanical gyroscope - Google Patents
Quick oscillation starting control method and device for high-Q-value micro-electromechanical gyroscope Download PDFInfo
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Abstract
The invention discloses a quick oscillation starting control method and a quick oscillation starting control device for a high-Q-value micro-electromechanical gyroscope, wherein the method comprises the following steps of: driving a high-Q-value micro-electromechanical gyroscope by using a driving signal with a preset amplitude value in a self-oscillation mode, so that the vibration frequency of the micro-electromechanical gyroscope approaches to a natural frequency and the amplitude value of the micro-electromechanical gyroscope approaches to a set value, and acquiring a natural frequency estimation value; when the vibration state of the gyroscope reaches a preset condition, the natural frequency estimation value is used as an initial frequency, and the micro-electromechanical gyroscope is driven in a phase-locked loop mode, so that the vibration frequency of the micro-electromechanical gyroscope is locked to the natural frequency and the amplitude of the micro-electromechanical gyroscope is stabilized at a set value. The method can enable the high-Q-value micro-electromechanical gyroscope to start oscillation rapidly and accurately lock to the natural frequency for amplitude stabilization under the condition of only knowing the approximate dispersion range of the natural frequency of the high-Q-value micro-electromechanical gyroscope, and effectively improves the driving control robustness of the high-Q-value micro-electromechanical gyroscope.
Description
Technical Field
The invention relates to the technical field of inertia, in particular to a quick oscillation starting control method and device of a high-Q-value micro-electromechanical gyroscope.
Background
With the rapid development of inertial technology, MEMS (Micro-Electro-Mechanical systems) gyroscopes have been widely used in consumer, industrial and military fields. At present, micro-electromechanical gyros based on the Coriolis vibration principle have become hot spots of domestic and foreign research. The micro-electro-mechanical gyroscope has the advantages of small volume, light weight, low cost, impact resistance and the like, and gradually replaces the traditional optical fiber and rotor gyroscope in a plurality of application fields, so that the research on a micro-electro-mechanical (MEMS) gyroscope system has important significance.
Most micro-electromechanical gyroscopes are currently based on the principle of coriolis vibration. In some applications the full operating time of the gyroscope may be only a few seconds, requiring it to have a relatively high degree of accuracy. This requires the gyroscope to start oscillating and achieve a stable operating condition after a very short period of time after power is applied. In order to improve the accuracy of the gyroscope, it is necessary to use a vacuum package to reduce the influence of temperature and mechanical conditions on the gyroscope. The drive shaft vibration of a vacuum packed gyroscope typically has a high quality factor (Q), such as several thousand or more.
Under a commonly adopted phase-locked loop driving control scheme, if the deviation ratio of the initial driving frequency setting value to the natural frequency of the resonator is large, the starting time is long. In fact, even if the initial driving frequency is set near the natural frequency of the gyro driving shaft, the time for driving the high-Q-value micro-electromechanical gyro to reach the normal working state from static starting is usually 1-2 s or even longer, and the requirement of quick starting cannot be met.
Factors that affect the start-up time of high Q resonators are also the machining errors of sensitive structures and the temperature characteristics of the structural materials. Due to the existence of processing errors, the natural frequency of an actual driving shaft of the micro-electromechanical gyroscope has a distribution range; if the distribution range is large, the arrangement of the same initial driving frequency for the gyro cannot guarantee that most of the gyros can start vibrating normally. Testing the natural frequency of the gyros one by one and setting the initial driving frequency in the driving control loop can ensure the normal oscillation starting of each gyro, but the production efficiency is reduced and the cost is increased. Moreover, as the environmental temperature changes, the elastic modulus of the sensitive structural material (mainly silicon) changes, and the natural frequency of the gyroscope also deviates from the set initial driving frequency, so that the starting time of the gyroscope becomes longer.
In addition to the control of the vibration frequency of the micro-electromechanical gyroscope, in order to achieve a certain precision level of the gyroscope, the vibration amplitude of the driving shaft of the gyroscope needs to be controlled so as to avoid the instability of the scale factor and the zero position of the gyroscope caused by the amplitude change. A dual loop control scheme consisting of a phase (frequency) control loop and an amplitude control loop is therefore typically employed for the drive axes of microelectromechanical gyros. The document micromechanical gyroscope closed-loop driving circuit based on the phase-locking technology designs and simulates the micromechanical gyroscope closed-loop driving circuit based on the phase-locking technology, and the result shows that the frequency jitter is only 38% of that of the traditional closed-loop driving circuit; the literature, silicon micromechanical gyroscope drive control technology based on phase control, performs experimental analysis of micromechanical gyroscope drive control technology based on phase control, and experiments show that the natural frequency of a gyroscope drive shaft can be stable within 5s at normal temperature, and the relative error of frequency tracking can reach 10-6 orders of magnitude.
In addition, another way to enable frequency tracking is a self-oscillating loop. The driving loop meets the condition of stable amplitude self-oscillation by setting phase shift and loop gain adjustment links. The document silicon micromechanical gyroscope self-excitation driving digital technology realizes the start of vibration of a gyroscope driving shaft based on the self-excitation oscillation principle, and the experimental result shows that the driving amplitude control precision reaches 1.5 multiplied by 10 < -5 > at normal temperature; the micromechanical vibration gyroscope closed-loop self-excitation driving theory analysis and verification adopts self-excitation to drive the gyroscope to start vibration, and the time from power-on to stable start vibration is about 3.3 s.
However, in the related art, the most urgent needs to be solved in the oscillation start control of the high-Q resonator are: 1. frequency and amplitude control; 2. and (5) starting vibration rapidly. In the conventional method, the mode of the phase-locked loop can accurately control the frequency, but cannot meet the requirement of quick start; the self-excited oscillation mode can start oscillation quickly, but lacks required frequency information. Therefore, a quick oscillation starting control method of the high-Q-value micro-electromechanical gyroscope which meets the requirements of two points at the same time is urgently needed.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the technical problems in the related art.
Therefore, one objective of the present invention is to provide a method for controlling the fast start-up of a high-Q-value micro-electromechanical gyroscope, which can reduce the dependence of the start-up speed of the high-Q-value micro-electromechanical gyroscope on the accuracy of the natural frequency of the gyroscope, thereby improving the robustness of the drive control of the high-Q-value micro-electromechanical gyroscope.
The invention also aims to provide a quick starting vibration control device of the high-Q-value micro-electromechanical gyroscope.
In order to achieve the above object, an embodiment of the invention provides a method for controlling fast oscillation starting of a high-Q micro-electromechanical gyroscope, which includes the following steps: driving a high-Q-value micro-electromechanical gyroscope by using a driving signal with a preset amplitude value in a self-oscillation mode, so that the vibration frequency of the micro-electromechanical gyroscope approaches to a natural frequency and the amplitude value of the micro-electromechanical gyroscope approaches to a set value, and acquiring a natural frequency estimation value; and when the vibration state of the gyroscope reaches a preset condition, taking the natural frequency estimation value as an initial frequency, and driving the micro-electromechanical gyroscope in a phase-locked loop mode to enable the vibration frequency of the micro-electromechanical gyroscope to be locked to the natural frequency and the amplitude of the micro-electromechanical gyroscope to be stable at a set value.
The quick oscillation starting control method of the high-Q-value micro-electromechanical gyroscope can quickly start oscillation and accurately lock the oscillation to natural frequency amplitude stabilization work under the condition that only the natural frequency of the high-Q-value micro-electromechanical gyroscope is approximately within the dispersion range, and effectively improves the driving control robustness of the high-Q-value micro-electromechanical gyroscope.
In addition, the method for controlling the rapid start-up of the high-Q micro-electromechanical gyroscope according to the above embodiment of the present invention may further have the following additional technical features:
further, in an embodiment of the present invention, the driving signal is any one of a square wave, a sine wave, and a trapezoidal wave.
Further, in an embodiment of the present invention, the obtaining the estimated natural frequency further includes: and calculating the approximate natural frequency of the gyroscope according to the vibration period in the self-oscillation starting process to obtain the natural frequency estimation value.
Further, in an embodiment of the present invention, the preset condition is that the amplitude of the micro-electromechanical gyro reaches 70% of a set value during self-oscillation, or a relative change of an estimated value of a natural frequency of the micro-electromechanical gyro is less than 1%.
Further, in an embodiment of the present invention, when the vibration state of the gyroscope reaches a preset condition, taking the natural frequency estimation value as an initial frequency, further includes: and referring to the natural frequency estimated value to determine the initial driving frequency of the phase-locked loop.
In order to achieve the above object, an embodiment of the present invention provides a fast oscillation control apparatus for a high-Q micro electromechanical gyroscope, including: the acquisition module is used for driving the high-Q-value micro-electromechanical gyroscope by using a driving signal with a preset amplitude value in a self-oscillation mode, so that the vibration frequency of the micro-electromechanical gyroscope approaches to a natural frequency and the amplitude value of the micro-electromechanical gyroscope approaches to a set value, and acquiring a natural frequency estimation value; and the oscillation starting control module is used for taking the natural frequency estimation value as an initial frequency when the oscillation state of the gyroscope reaches a preset condition, and driving the micro-electromechanical gyroscope in a phase-locked loop mode so as to lock the oscillation frequency of the micro-electromechanical gyroscope to the natural frequency and stabilize the amplitude of the micro-electromechanical gyroscope to a set value.
The quick oscillation starting control device of the high-Q-value micro-electromechanical gyroscope can quickly start oscillation and accurately lock the oscillation to natural frequency amplitude stabilization work under the condition of only knowing the approximate dispersion range of the natural frequency of the high-Q-value micro-electromechanical gyroscope, and effectively improves the driving control robustness of the high-Q-value micro-electromechanical gyroscope.
In addition, the fast oscillation starting control device of the high-Q micro-electromechanical gyroscope according to the above embodiment of the present invention may further have the following additional technical features:
further, in an embodiment of the present invention, the driving signal is any one of a square wave, a sine wave, and a trapezoidal wave.
Further, in an embodiment of the present invention, the obtaining module is further configured to calculate an approximate natural frequency of the gyroscope according to a vibration period during the self-oscillation start-up process, so as to obtain the natural frequency estimated value.
Further, in an embodiment of the present invention, the preset condition is that the amplitude of the micro-electromechanical gyro reaches 70% of a set value during self-oscillation, or a relative change of an estimated value of a natural frequency of the micro-electromechanical gyro is less than 1%.
Further, in an embodiment of the present invention, the oscillation starting control module is further configured to refer to the natural frequency estimation value to determine an initial driving frequency of the phase-locked loop.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a flow chart of a method for controlling fast start-up of a high Q micro-electromechanical gyroscope according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a digital phase-locked control loop according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an experimental system according to one embodiment of the present invention;
FIG. 4 is a pictorial representation of an experimental system according to one embodiment of the present invention;
FIG. 5 is a schematic diagram of a driving frequency variation process under a phase-locked loop scheme according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a driving amplitude variation process under a phase-locked loop scheme according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a digital self-oscillation control loop according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a driving frequency variation process under a self-oscillation scheme in accordance with one embodiment of the present invention;
FIG. 9 is a schematic diagram of the vibration amplitude variation process under a self-oscillation scheme in accordance with one embodiment of the present invention;
FIG. 10 is a schematic diagram of a self-excited-phase-locked control system according to one embodiment of the present invention;
fig. 11 is a schematic diagram of the variation process of the oscillation frequency in the self-excited-phase-locked scheme according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of the vibration amplitude variation process under a self-excited-phase-locked scheme according to one embodiment of the present invention;
fig. 13 is a schematic structural diagram of a fast oscillation-starting control device of a high-Q micro-electromechanical gyroscope according to an embodiment of the invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The following describes a fast start-up control method and device for a high-Q-value micro-electromechanical gyroscope according to an embodiment of the present invention with reference to the accompanying drawings, and first, a fast start-up control method for a high-Q-value micro-electromechanical gyroscope according to an embodiment of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a flow chart of a method for controlling fast start-up of a high Q micro-electromechanical gyroscope according to an embodiment of the invention.
As shown in fig. 1, the method for controlling the fast oscillation starting of the high-Q micro-electromechanical gyroscope includes the following steps:
in step S101, a high-Q micro-electromechanical gyro is driven by a driving signal with a preset amplitude in a self-oscillation manner, so that the vibration frequency of the micro-electromechanical gyro approaches to the natural frequency and the amplitude of the micro-electromechanical gyro approaches to a set value, and a natural frequency estimation value is obtained.
It can be understood that, in the embodiment of the invention, the self-oscillation mode is firstly adopted to drive the high-Q value micro-electromechanical gyroscope by the driving signal with the preset amplitude value, so that the vibration frequency of the gyroscope approaches to the natural frequency and the amplitude value approaches to the set value, and the natural frequency of the gyroscope is estimated in the process.
In one embodiment of the present invention, the driving signal is any one of a square wave, a sine wave and a trapezoidal wave.
It can be understood that the driving waveform in the self-oscillation stage may be a square wave, a sine wave, a trapezoidal wave, or the like, and any of the 3 waveforms is adopted, which has little influence on the oscillation starting speed, but the square wave is the fastest theoretically, and a person skilled in the art may select the driving waveform according to actual situations, and is not limited specifically herein.
In an embodiment of the present invention, obtaining the natural frequency estimation value further includes: and calculating the approximate natural frequency of the gyroscope according to the vibration period in the self-oscillation starting process to obtain a natural frequency estimation value.
It can be understood that, in the embodiment of the present invention, the gyro is first driven by the fixed-amplitude square wave in the self-oscillation mode, so that the vibration frequency of the gyro rapidly approaches to the natural frequency and the vibration amplitude rapidly approaches to the set value. And a driving mode of self-oscillation is adopted in the initial stage. The advantage of this approach is that the amplitude of the gyro can be increased rapidly and the vibration frequency approaches the natural frequency of the gyro rapidly.
Specifically, the present invention implements derivation of the frequency response characteristic of the resonator by the following procedure. The method comprises the following steps:
the simplified dynamic model of the micro-electromechanical gyroscope driving shaft is as follows:
wherein m is mass, c is damping coefficient, k is stiffness, x (t) is displacement of the mass in the driving direction, and f (t) is driving force received by the mass in the driving direction. When a sinusoidal excitation is applied by the electrostatic drive, the steady state response of the drive shaft is:
wherein, the amplitude-frequency characteristic is as follows:
wherein the content of the first and second substances,
natural angular frequency for the drive mode; q ═ m ωnAnd/c is the drive shaft vibration quality factor.
The phase frequency characteristics are:
wherein, at the natural frequency of the gyroscope
For the sake of simplicity of expression, the range of the arctangent function is specified as (- π, 0).
Further, in an embodiment of the present invention, obtaining the estimated natural frequency further includes: acquiring the frequency response characteristic of the resonator to obtain the phase frequency characteristic of the frequency response of the high-Q-value micro-electromechanical gyroscope; and obtaining the change rate of the phase along with the frequency according to the phase-frequency characteristic.
Specifically, according to the phase-frequency characteristic of the frequency response of the micro-electromechanical gyroscope, the rate of change of the phase with the frequency is obtained as follows:
from the above equation it can be deduced:
when omega is less than or equal to omegan，
When omega is more than or equal to omegan，
When ω is ω ═ ωn，
It can be seen that the rate of change of the resonator phase with frequency is proportional to Q at natural frequencies and approximately inversely proportional to Q away from natural frequencies. Thus for a high Q resonator, the gain from frequency to phase is high at the natural frequency and low at frequencies away from the natural frequency.
In step S102, when the vibration state of the gyroscope reaches a preset condition, the natural frequency estimation value is used as an initial frequency, and the micro-electromechanical gyroscope is driven in a phase-locked loop manner, so that the vibration frequency of the micro-electromechanical gyroscope is locked to the natural frequency and the amplitude of the micro-electromechanical gyroscope is stabilized at a set value.
It can be understood that, when the vibration state of the gyroscope reaches a preset condition, the estimated value of the natural frequency is used as the initial frequency, and the gyroscope is driven in a phase-locked loop mode, so that the vibration frequency is locked to the natural frequency, and the amplitude is stable at a set value.
Further, in an embodiment of the present invention, the preset condition is that the amplitude of the micro-electromechanical gyro reaches 70% of the set value during the self-oscillation, or the relative change of the estimated value of the natural frequency of the micro-electromechanical gyro is less than 1%.
It can be understood that the vibration state detection and judgment device is used for judging whether the vibration state of the high-Q value micro-electromechanical gyroscope reaches the preset condition required for switching from the self-oscillation driving mode to the phase-locked loop mode in the starting vibration process of the high-Q value micro-electromechanical gyroscope and executing the switching of the driving mode. It should be noted that when the change rate of the vibration frequency of the micro-electromechanical gyroscope is significantly reduced, the driving method is switched.
Specifically, when the amplitude is close to 70 to 90% of a desired value (a set value), the driving method is switched to a phase-locked loop. Since the estimated value of the natural frequency is obtained in the self-oscillation stage, the initial frequency of the phase-locked loop is used as the initial frequency of the phase-locked loop, so that the vibration frequency can be quickly locked to the real natural frequency of the gyroscope. The embodiment of the invention aims to enable the high-Q-value micro-electromechanical gyroscope to start vibration rapidly, namely the vibration frequency reaches the natural frequency of the gyroscope, and the vibration amplitude reaches a set value.
Further, in an embodiment of the present invention, when the vibration state of the gyro reaches a preset condition, taking the natural frequency estimation value as the initial frequency, further includes: the natural frequency estimate is referenced to determine an initial driving frequency of the phase locked loop.
That is, when the gyro is driven in the phase-locked loop mode, the initial driving frequency of the phase-locked loop is determined by using the estimated value of the natural frequency of the gyro obtained in the self-oscillation process as the initial driving frequency or referring to the estimated value of the natural frequency.
In particular, the driving of the high-Q micro-electromechanical gyroscope is generally controlled by using a phase-locked loop, and the phase-locked loop control method is very slow in oscillation starting without knowing the natural frequency of the gyroscope. If the initial vibration frequency can be set near the natural frequency, the vibration frequency can be locked at the natural frequency quickly using the phase-locked loop method.
Further, in an embodiment of the present invention, the method for controlling a high-Q value micro-electromechanical gyroscope by oscillation starting includes the steps of obtaining a target value of a natural frequency by using the estimated value of the natural frequency as an initial frequency of a phase-locked loop, and further including: acquiring phase resolving and loop characteristics of a digital phase-locked loop starting scheme to perform a digital phase-locked loop starting experiment and a digital self-oscillation loop starting experiment; a loop starting experiment of a gyroscope driving shaft self-excitation-phase-locking digital closed-loop control scheme is carried out by a self-excitation oscillation-phase-locked loop method.
Specifically, the process of deriving the phase solution and the loop characteristic of the digital phase-locked loop starting scheme in the embodiment of the present invention is as follows:
as shown in FIG. 2, ω is the driving frequency, AiAnd AoThe magnitudes of the drive voltage and the response signal, respectively. Phase sensitive demodulation at 0 ° and 90 ° for the displacement response, respectively, has:
setting the amplitude value of the driving shaft to ArThe phase-locked loop has A near the steady-state operating pointo≈Ar，
For the above formula, the high frequency component in the demodulation result is filtered by a low-pass filter
By LPF () representing the low pass filtering process, the approximate solution of the phase around the natural frequency of the drive axis can be expressed as:
based on the derivation and the analysis of the phase change rate, for the phase-locked loop of the high-Q resonator, when the oscillation frequency deviates from the natural frequency of the resonator, the open-loop gain of the phase-locked loop is low, so that the bandwidth of a closed-loop system is small, and the oscillation frequency changes slowly; when the frequency is close to the natural frequency, the loop open-loop gain is increased, the closed-loop bandwidth is increased, and the oscillation frequency can quickly approach the natural frequency of the resonator. The sensitivity of the phase change rate to frequency is the root cause of the sensitivity of the time required for phase lock to the initial frequency of the phase-locked loop.
An explanation of an example of the set-up experiment system is made below.
The experimental device of the high-Q resonator drive control system is composed of a digital control module, an FPGA module, an A/D and D/A board, a drive and detection circuit, an upper computer and the like, as shown in figures 3 and 4, the embodiment of the invention adopts a digital signal processor to operate a control algorithm, and adopts an FPGA (Field-Programmable Gate Array) chip to control and transmit data of an analog/digital converter and a digital/analog converter. A driving signal generated by the D/A board card is amplified and DC biased to drive the gyroscope to vibrate, and a mechanical vibration signal of the gyroscope is accessed to the A/D board card through capacitance detection and amplification to be converted into a digital signal.
Further, the embodiment of the present invention provides a digital phase-locked loop start-up experiment, which specifically includes:
according to the measurement of a frequency sweep experiment, the natural frequency of the micro-electromechanical gyroscope used in the embodiment of the invention is 5735.5Hz at normal temperature, the Q value is about 2700, and the change rate of the natural frequency along with the temperature is about 0.18 Hz/DEG C. The design parameters of the gyroscope and a frequency sweep experiment determine that the driving shaft has a better working state that the amplitude of the vibration signal is in a range of 1.6-2.2V.
Before an experiment for investigating the relation between the initial frequency deviation of the phase-locked loop and the starting time of the gyroscope is carried out, parameters of a controller and a filter of the phase-locked loop are optimized, so that the starting process is free from overshoot and the starting time is shortest under the condition that the initial frequency is equal to the natural frequency of the gyroscope.
The method for the resonator starting process experiment comprises the following steps: setting the initial driving frequency of the phase-locked loop, electrifying and recording the change of the driving frequency and the amplitude of the phase-locked loop along with time in the starting process. Initial driving frequency f0The experiment was chosen between 5705Hz and 5775Hz, every 10 Hz. The variation of frequency and amplitude with time under different initial driving frequencies is obtained by storing and operating the output sampling data. The results of the experiment are shown in fig. 5 and 6, and the results are as follows:
(1) when the difference between the initial frequency and the natural frequency is within +/-10 Hz, the starting time is almost irrelevant to the initial frequency, the oscillation frequency is locked to the natural frequency within 0.25s, and the amplitude is required to reach a steady state within about 2 s;
(2) when the initial frequency deviation is +/-20 Hz, the amplitude is stable after the frequency locking of about 2.4 s;
(3) when the initial frequency deviation is +/-30 Hz, the frequency locking needs 7.5s, and the amplitude stability needs about 9 s;
(4) when the initial frequency is 5700Hz, namely the frequency deviation is 35Hz, the control loop can not complete the phase locking within 10 s.
According to the above experimental results, the starting time of the resonator and the initial frequency setting deviation of the phase-locked loop have a nonlinear relationship, and the starting time is rapidly increased as the initial frequency deviation increases. In order to shorten the starting time, the deviation between the initial driving frequency of the phase-locked loop and the natural frequency of the resonator is less than 10 Hz.
The derivation of the phase solution and loop characteristics of the digital phase-locked loop start-up scheme will be described below. The method specifically comprises the following steps:
as shown in fig. 7, the response signal lags behind the driving signal by 90 ° at the natural frequency of the gyroscope, and the response signal is subjected to a +90 ° phase shift by an approximate integration method so that the loop phase shift is 0 ° to satisfy the phase condition that the self-oscillation occurs at the natural frequency of the gyroscope. In the initial stage of starting oscillation, the driving signal can adopt a square wave with a fixed amplitude to provide the maximum driving force, so that the amplitude of the gyroscope is increased as soon as possible. And carrying out root mean square operation on the gyro response signal to obtain the amplitude. When the amplitude of the gyroscope is increased to be close to a desired value, the amplitude stabilizing loop is enabled to work, the amplitude of the driving voltage is automatically adjusted through the PI controller, and the amplitude is accurately controlled.
The change rule of the displacement of the driving shaft in the vibration starting process of the gyroscope is as follows:
where A (t) is the instantaneous amplitude of the vibration,
the instantaneous phase of the vibration. Can be with
Considered as the instantaneous vibration angular frequency.
The speed of change of phase with respect to angular frequency during oscillation
Small and therefore the vibrational response approximates a steady state in a short time. In the initial stage of starting oscillation, the driving signal is a square wave (or a sine wave with fixed amplitude) with fixed amplitude and phase lead displacement of 90 degrees, and the gyroscope mainly responds to the fundamental frequency component in the driving square wave, so that the following components are approximately:
From the foregoing it can be derived
Speed of change due to vibration phase
Much less than the instantaneous vibration angular frequency
Rate of change of amplitude
Much less than the peak of the vibration velocity
Therefore, the above formula is simplified as follows:
the method comprises the following steps:
combining the above formulas to obtain:
and (3) solving:
a (t) and
the change with time is relatively slow and can be considered to be substantially constant during one period of the gyro vibration. The integral average of the above formula in a period of time of the gyro vibration is obtained:
wherein
Representing the average amplitude over one period of oscillation. Obtaining by solution:
the above formula shows that, with the self-oscillation loop driven by a fixed amplitude, the law of the change of the amplitude with time is similar to the response of a first-order system to step excitation, and the time constant of the response process is:
T＝2Q/ωn，
in the range of 0 to T, the amplitude increases almost linearly.
The introduction of the digital self-oscillation loop starting experiment specifically includes:
the digital self-oscillation loop experiment is carried out on the driving shaft of the micro-electromechanical gyro by using the experiment system. And adjusting parameters of links such as a constant amplitude loop PI controller and the like under the condition that the initial forced driving frequency is equal to the natural frequency of the gyroscope, so that the transition process is smooth and stable.
There is no direct frequency information in the self-oscillating loop. In order to acquire data of the change of the oscillation frequency along with the time in the starting process, zero-crossing judgment is carried out on a vibration signal acquired by analog-to-digital conversion in a DSP, and the time difference between each zero-crossing point and the last zero-crossing point is used as a rough oscillation period.
And setting different frequencies of the initial forced driving square waves to perform a starting oscillation process test. The initial frequency was set between 4735Hz to 6735Hz, and one experimental point was taken every 500 Hz. The experimental results are shown in FIGS. 8 and 9, where FIG. 8 shows the initial driving frequency f0The driving frequency was varied in 3 cases of 6735Hz, 5735Hz and 4735Hz, and fig. 9 is a variation of the amplitude during the start-up under 5 experimental conditions. As can be seen from fig. 9, in the initial stage of oscillation start, the amplitude increases almost linearly, according to the following equation:
the given change rule of the amplitude is consistent when the time t is smaller; and then, switching to a stable amplitude self-oscillation control stage.
From the experimental data of fig. 8 and 9, as long as the deviation between the initial forced driving frequency and the natural frequency of the gyro driving shaft is within ± 1000Hz, the driving frequency can enter the error range of the natural frequency within ± 10Hz after about 180ms, and the amplitude reaches about 90% of the set amplitude at the moment; the error between the amplitude and the set amplitude is less than 0.1% at 300ms, and the stable amplitude oscillation state is achieved. It can be seen that, in the self-oscillation scheme, even if the set value of the initial driving frequency is changed over a wide range, the variation of the start-up time is small.
Further, in an embodiment of the present invention, a loop start experiment of a gyro-driven shaft self-excited-phase-locked digital closed-loop control scheme is performed by a self-excited oscillation-phase-locked loop method, further comprising: enabling a high-Q-value micro-electromechanical gyroscope driving shaft to start oscillation through digital self-oscillation, wherein square waves with preset fixed amplitudes are adopted for excitation, the natural frequency of a resonator is estimated in real time by using a rough period of a response waveform, when the amplitude reaches 70% -90% of a set value, the oscillation frequency is close to the natural frequency of the resonator, and a phase-frequency characteristic curve enters the steepest part; and switching to phase-locked loop control, wherein the estimated value of the natural frequency obtained in the self-oscillation stage is used as the initial frequency of the phase-locked loop so as to enable the phase-locked loop to carry out frequency locking.
Specifically, a driving scheme combining self-oscillation and phase-locked loop is designed: the self-oscillation-phase-locked loop scheme specifically comprises the following steps:
the analysis and experiments of the starting process of the two driving control modes of phase locking and self-oscillation show that:
the natural frequency of the resonator can be accurately locked by adopting the phase-locked loop scheme, but when the deviation of the initial driving frequency and the natural frequency is large, long time is needed for realizing phase locking on the high-Q-value resonator; the resonator can start vibration rapidly within a large initial driving frequency deviation range by adopting a self-oscillation scheme, but accurate frequency information is lacked in a control loop, so that effective vibration parameters are difficult to provide for subsequent angular velocity signal processing, and the gyro precision is improved.
The embodiment of the invention combines the advantages of two driving modes of phase locking and self-excited oscillation, and provides a novel self-excited-phase locking driving control scheme:
step 1, a driving shaft of the micro-electromechanical gyroscope is vibrated by adopting a digital self-oscillation mode. In this process, a fixed amplitude square wave excitation is used and the natural frequency of the resonator is estimated in real time using a coarse period of the response waveform. When the amplitude reaches 70% -90% of the set value, the oscillation frequency approaches the natural frequency of the resonator, and the phase-frequency characteristic curve enters the steepest part.
And step 2, switching to phase-locked loop control. And using the natural frequency estimation value obtained in the self-excited oscillation stage as the initial frequency of the phase-locked loop. Since the frequency is already close to the natural frequency, the phase-locked loop can quickly achieve frequency locking.
A micro-electromechanical gyroscope driving shaft self-excitation-phase-locking control system is built on an experimental system, and a schematic diagram is shown in FIG. 10.
Then, the embodiment of the invention carries out a loop starting experiment of a gyro driving shaft self-excitation-phase-locking digital closed-loop control scheme. The following were used:
and setting the frequency of different initial forced driving square waves, and carrying out a vibration starting process experiment. An experimental point is taken every 500Hz between 4735Hz and 6735Hz, and the experimental results under 5 experimental conditions are shown in fig. 11 and 12, wherein fig. 11 is the variation process of the driving frequency when the initial driving frequency f0 is 6735Hz, and fig. 12 is the variation curve of the amplitude during the starting process under 5 experimental conditions.
Experiments show that even if the initial forced driving frequency deviates 1000Hz from the natural frequency of the driving shaft of the gyroscope, the relative error of the vibration frequency of the gyroscope can reach within plus or minus 0.01 percent at 300ms, and the error of the amplitude and the set amplitude can be less than 0.1 percent within 400 ms.
Furthermore, the embodiment of the invention combines a self-excited oscillation and a gyro driving shaft self-excited-phase-locked digital closed-loop control scheme of a phase-locked loop to solve the problem of quick start of the high-Q-value micro-electromechanical gyro. The experimental test is carried out according to the method of the invention, and the result shows that the starting time is shortened to 400ms by adopting a pure phase-locked loop driving scheme, the starting time of the gyroscope is 2s and a self-excitation-phase-locked driving scheme. In addition, the starting time of the self-excitation-phase-locking driving scheme of the embodiment of the invention is not sensitive to the initial frequency setting value, so that the embodiment of the invention is suitable for the condition of gyroscope batch production and can also adapt to the gyroscope natural frequency offset caused by the change of the environmental temperature. For example, when the micro-electromechanical gyroscope is processed in batch, the natural frequency dispersion range caused by processing process errors is about +/-150 Hz, the self-excitation-phase-locking driving scheme of the embodiment of the invention is adopted, the natural frequency of the driving shaft of each gyroscope is not required to be accurately measured, and the gyroscope can be quickly started and locked to the natural frequency by only setting the initial driving frequency as the central value of the dispersion range, so that the method of the embodiment of the invention has wide and effective practicability.
It should be noted that experimental verification in the embodiment of the present invention is only verification of the method in the embodiment of the present invention during the process of the embodiment of the present invention, and is not necessary to the embodiment of the present invention, so that a person skilled in the art may also implement the method in the embodiment of the present invention in other ways, and the manner of the specific embodiment is not specifically limited herein.
In summary, the embodiments of the present invention have the following advantages:
(1) even if the initial forced driving frequency deviates 1000Hz from the natural frequency of the gyro driving shaft, the relative error of the gyro vibration frequency can reach within plus or minus 0.01% in 300ms, and the error of the amplitude and the set amplitude can be less than 0.1% in 400 ms.
(2) The gyroscope is not sensitive to the initial frequency setting value, is suitable for the condition of gyroscope batch production, and is suitable for the condition of large natural frequency dispersion range caused by processing process errors. And can also adapt to the gyro natural frequency offset caused by the change of the environmental temperature.
(3) The natural frequency of the driving shaft of each gyro does not need to be accurately measured, and the gyro can quickly start vibrating and be locked to the natural frequency by only setting the initial driving frequency as the central value of the dispersion range.
(4) The gyro can adapt to the gyro natural frequency deviation caused by the change of the environmental temperature, and can be locked to the natural frequency for amplitude stabilization after the change.
(5) Compared with the traditional analog signal gyro control scheme, the digital control scheme has stronger transportability and larger adjustability, and can be flexibly applied to various control system platforms.
According to the quick oscillation starting control method of the high-Q-value micro-electromechanical gyroscope, provided by the embodiment of the invention, under the condition that only the natural frequency of the high-Q-value micro-electromechanical gyroscope is approximately within the dispersion range, the high-Q-value micro-electromechanical gyroscope can be quickly oscillated and accurately locked to the natural frequency for stable amplitude work, and the driving control robustness of the high-Q-value micro-electromechanical gyroscope is effectively improved.
Next, a description is given of a fast oscillation start control device of a high-Q micro-electromechanical gyro according to an embodiment of the present invention with reference to the drawings.
Fig. 13 is a schematic structural diagram of a fast oscillation-starting control device of a high-Q micro-electromechanical gyroscope according to an embodiment of the present invention.
As shown in fig. 13, the fast oscillation start control device 10 of the high-Q micro electromechanical gyro includes: an acquisition module 100 and a start-oscillation control module 200.
The obtaining module 100 is configured to drive the high-Q micro-electromechanical gyroscope by using a driving signal with a preset amplitude in a self-oscillation manner, so that the vibration frequency of the micro-electromechanical gyroscope approaches to a natural frequency and the amplitude of the micro-electromechanical gyroscope approaches to a set value, and obtain an estimated value of the natural frequency. The oscillation starting control module 200 is configured to use the estimated value of the natural frequency as an initial frequency when the oscillation state of the gyroscope reaches a preset condition, and drive the micro-electromechanical gyroscope in a phase-locked loop manner, so that the oscillation frequency of the micro-electromechanical gyroscope is locked to the natural frequency and the amplitude of the micro-electromechanical gyroscope is stabilized at a set value. The device 10 of the embodiment of the invention can rapidly start oscillation and accurately lock the oscillation to the natural frequency for stable amplitude work under the condition of only knowing the natural frequency dispersion range of the high-Q-value micro-electromechanical gyroscope, thereby effectively improving the applicability and reliability of the control of the high-Q-value micro-electromechanical gyroscope.
Further, in an embodiment of the present invention, the obtaining module 100 includes: a self-oscillation loop and a vibration frequency estimator.
The self-excited oscillation loop is used for driving the high-Q-value micro-electromechanical gyroscope by using a driving signal with a preset amplitude value, so that the vibration frequency of the high-Q-value micro-electromechanical gyroscope quickly approaches to the natural frequency of the gyroscope, and the vibration amplitude value quickly approaches to a set value. And the vibration frequency estimator is used for estimating the natural frequency of the high-Q-value micro-electromechanical gyroscope in the self-oscillation process.
Further, in one embodiment of the present invention, the oscillation start control module 200 includes a phase-locked loop, an amplitude control loop, and a vibration status detection and determination device.
The phase-locked loop is used for locking the vibration frequency of the high-Q-value micro-electromechanical gyroscope to the natural frequency of the high-Q-value micro-electromechanical gyroscope. And the amplitude control loop is used for stabilizing the vibration amplitude of the gyroscope at a set value. And the vibration state detection and judgment device is used for judging whether the vibration state of the high-Q-value micro-electromechanical gyroscope reaches a preset condition required for switching from a self-oscillation driving mode to a phase-locked loop mode.
Further, in one embodiment of the present invention, the driving signal is any one of a square wave, a sine wave, and a trapezoidal wave.
Further, in an embodiment of the present invention, the obtaining module is further configured to calculate an approximate natural frequency of the gyroscope according to the vibration period during the self-oscillation start-up process, so as to obtain the natural frequency estimation value.
Further, in an embodiment of the present invention, the preset condition is that the amplitude of the micro-electromechanical gyro reaches 70% of the set value during the self-oscillation, or the relative change of the estimated value of the natural frequency of the micro-electromechanical gyro is less than 1%.
Further, in an embodiment of the present invention, the oscillation starting control module is further configured to refer to the natural frequency estimation value to determine an initial driving frequency of the phase-locked loop.
It should be noted that the above explanation of the embodiment of the method for controlling the fast start-up of the high-Q micro-electromechanical gyroscope is also applicable to the device for controlling the fast start-up of the high-Q micro-electromechanical gyroscope of this embodiment, and is not repeated here.
According to the quick oscillation starting control method of the high-Q-value micro-electromechanical gyroscope, provided by the embodiment of the invention, under the condition that only the natural frequency of the high-Q-value micro-electromechanical gyroscope is approximately within the dispersion range, the high-Q-value micro-electromechanical gyroscope can be quickly oscillated and accurately locked to the natural frequency for stable amplitude work, and the driving control robustness of the high-Q-value micro-electromechanical gyroscope is effectively improved.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (8)
1. A quick oscillation starting control method of a high Q value micro-electromechanical gyroscope is characterized by comprising the following steps:
driving a high-Q-value micro-electromechanical gyroscope by using a driving signal with a preset amplitude value in a self-oscillation mode, so that the vibration frequency of the micro-electromechanical gyroscope approaches to a natural frequency and the amplitude value of the micro-electromechanical gyroscope approaches to a set value, and acquiring a natural frequency estimation value; the acquiring of the natural frequency estimation value further includes: calculating the approximate natural frequency of the gyroscope according to the vibration period in the self-oscillation starting process to obtain the natural frequency estimation value;
and when the vibration state of the gyroscope reaches a preset condition, taking the natural frequency estimation value as an initial frequency, and driving the micro-electromechanical gyroscope in a phase-locked loop mode to enable the vibration frequency of the micro-electromechanical gyroscope to be locked to the natural frequency and the amplitude of the micro-electromechanical gyroscope to be stable at a set value.
2. The method for controlling the rapid start-up of a high-Q micro-electromechanical gyroscope according to claim 1, wherein the driving signal is any one of a square wave, a sine wave and a trapezoidal wave.
3. The method for controlling rapid start-up of a high-Q microelectromechanical gyroscope of claim 1, characterized in that the preset condition is that the amplitude of the microelectromechanical gyroscope reaches 70% of a set value during self-oscillation, or that the estimated value of the natural frequency of the microelectromechanical gyroscope changes relatively by less than 1%.
4. The method for controlling the rapid start-up of a high-Q microelectromechanical gyroscope of claim 3, wherein the method for estimating the natural frequency as the initial frequency when the vibration state of the gyroscope reaches a preset condition further comprises:
and referring to the natural frequency estimated value to determine the initial driving frequency of the phase-locked loop.
5. A kind of high Q value micro-electromechanical gyro rapid start-up controlling device, characterized by that, including:
the acquisition module is used for driving the high-Q-value micro-electromechanical gyroscope by using a driving signal with a preset amplitude value in a self-oscillation mode, so that the vibration frequency of the micro-electromechanical gyroscope approaches to a natural frequency and the amplitude value of the micro-electromechanical gyroscope approaches to a set value, and acquiring a natural frequency estimation value; the acquisition module is further used for calculating the approximate natural frequency of the gyroscope according to the vibration period in the self-excited oscillation starting process so as to acquire the natural frequency estimation value;
and the oscillation starting control module is used for taking the natural frequency estimation value as an initial frequency when the oscillation state of the gyroscope reaches a preset condition, and driving the micro-electromechanical gyroscope in a phase-locked loop mode so as to lock the oscillation frequency of the micro-electromechanical gyroscope to the natural frequency and stabilize the amplitude of the micro-electromechanical gyroscope to a set value.
6. The apparatus of claim 5, wherein the driving signal is any one of a square wave, a sine wave and a trapezoidal wave.
7. The apparatus for controlling rapid start-up of a high-Q microelectromechanical gyroscope of claim 5, wherein the predetermined condition is that the amplitude of the microelectromechanical gyroscope reaches 70% of a set value during self-oscillation, or that the estimated value of the natural frequency of the microelectromechanical gyroscope varies by less than 1% relatively.
8. The apparatus of claim 7, wherein the oscillation-starting control module is further configured to refer to the estimated natural frequency to determine an initial driving frequency of the phase-locked loop.
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| CN111928836B (en) * | 2020-07-16 | 2022-07-05 | 北京控制工程研究所 | System suitable for wide Q value change of MEMS gyroscope and frequency locking starting method |
| CN112857353B (en) * | 2021-01-08 | 2022-07-26 | 中国船舶重工集团公司第七0七研究所 | Rapid oscillation starting system and method for metal resonant gyroscope |
| CN113296397B (en) * | 2021-07-27 | 2021-10-29 | 中国人民解放军国防科技大学 | Method and device for quickly starting vibration of gyroscope based on parameter excitation |
| CN116839561B (en) * | 2023-09-01 | 2023-10-31 | 四川图林科技有限责任公司 | High-voltage driving vibration starting method for driving electrode of hemispherical resonator gyroscope vertical base |
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