CN111623759B - Method for accelerating zero-offset stabilization time of micro-electromechanical gyroscope - Google Patents
Method for accelerating zero-offset stabilization time of micro-electromechanical gyroscope Download PDFInfo
- Publication number
- CN111623759B CN111623759B CN201910140750.1A CN201910140750A CN111623759B CN 111623759 B CN111623759 B CN 111623759B CN 201910140750 A CN201910140750 A CN 201910140750A CN 111623759 B CN111623759 B CN 111623759B
- Authority
- CN
- China
- Prior art keywords
- gyroscope
- zero
- signal
- amplitude
- quadrature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Abstract
The invention aims to provide a method for accelerating zero offset stabilization time of a micro-electromechanical gyroscope.
Description
Technical Field
The invention relates to a method for accelerating zero offset stabilization time of a micro-electromechanical gyroscope, which adopts gyroscope quadrature error active inhibition and resonance frequency compensation and belongs to the technical field of micro-electromechanical inertial sensors.
Background
The micro-electro-mechanical gyroscope is a device with the characteristic dimension in the micron order processed by a micro-electronic process, is used for measuring the angular velocity of a carrier, has small volume and low cost, is suitable for batch processing, is easy to integrate with an ASIC (application specific integrated Circuit), has wide application prospect and urgent market demand, and is successfully applied to the industries of automobiles, consumer electronics and the like, the civil field, the military field of guided weapons and the like.
Microelectromechanical vibrating gyros operate on the principle of coriolis forces and typically have two modes: a drive mode and a sensitivity mode. When the gyroscope normally works, the gyroscope is enabled to do constant amplitude vibration in the driving modal direction through the automatic gain control loop, when angular velocity is input along the sensitive axis of the gyroscope, Coriolis force (Coriolis force for short) which is in direct proportion to external angular velocity input is generated in the sensitive modal direction, the vibrating mass block of the gyroscope vibrates along the detection axial direction under the action of the Coriolis force, displacement change of the vibrating mass block can be changed into capacitance change through the capacitance pickup structure, then the capacitance change is converted into voltage change through the micro capacitance reading circuit, and finally angular velocity information is obtained through synchronous demodulation.
The zero offset stability refers to the condition of zero fluctuation of the gyroscope within a period of time under the condition of no external angular rate input, and is usually measured by the standard deviation of a zero value within the period of time, and is an important parameter for reflecting the precision level of the gyroscope. Another important indicator for evaluating gyroscopic zero bias stability is the settling time. According to the definition of IEEE Standard for Inertial Sensor technology, IEEE Std 528 and 2001, the stable time refers to when the zero-bias stability index calibrated by the gyroscope can be reached after the gyroscope is powered on. The stability time of the micro-electro-mechanical gyroscope consists of two parts, namely the loop stability time of the gyroscope measurement and control circuit, and the time for the gyroscope to reach thermal equilibrium. The former is mainly determined by the settling time of the control loop, usually in the order of hundreds of milliseconds, which is negligible; the latter is that the micro-electromechanical gyroscope is very sensitive to temperature and environmental stress, after being electrified, the measurement and control circuit heats and transmits to the gyroscope sensitive structure to cause the gradual change of gyroscope parameters, so that the zero output generates thermal drift, and the micro-electromechanical gyroscope is a main factor influencing the zero stability time of the gyroscope.
In order to accelerate the zero position stabilization time of the micro-electromechanical gyroscope, a temperature compensation method is generally adopted, namely a temperature sensor is arranged near a gyroscope head to measure environmental temperature information in real time. The method has the advantages of simplicity and feasibility, and has the defect that due to the existence of the temperature gradient, the temperature acquired by the temperature sensor cannot truly reflect the actual temperature value of the gyro meter, so that the compensation effect is poor. For this problem, the document: cheng, zhangrong, bin, shixiong,. micromechanical gyroscope temperature characteristics and compensation algorithm studies [ J ]. sensor technology, 2004, (10); study of the modal frequency temperature characteristics of silicon micro-gyroscopes [ J ] study of sensing technology, 2009, (8); the relation between the phase and the frequency of a driving shaft of the gyroscope and the temperature is analyzed by the intrinsic frequency temperature characteristic research [ J ]. the university of Nanjing Physician, 2013, (1) and the like of the dual-mass silicon micromechanical gyroscope, and the fact that the resonance frequency of the driving shaft and the temperature are approximately in a linear relation is indicated, so that temperature compensation can be carried out by using frequency information, and the defect that the temperature of an external temperature sensor is not completely consistent with the temperature of a gyroscope head is overcome. However, since the zero position of the powered gyroscope is affected by quadrature error, resonant frequency, demodulation phase error and the like, the thermal drift characteristic of the powered gyroscope cannot be completely solved by single resonant frequency or temperature sensor output, the compensation effect is limited, and the stabilization time cannot be remarkably shortened.
Disclosure of Invention
The invention aims to provide a method for accelerating zero offset stabilization time of a micro-electro-mechanical gyroscope.
Specifically, the scale factor of the high vacuum packaged micro-electromechanical gyroscope in the open-loop working mode can be expressed as formula (1),
where δ is a constant related to the structure and the front-end circuit, k sd For orthogonal stiffness, R is the gyro-driven closed-loop control amplitude, omega nd To drive the frequency, ω ns For driving the modal resonance frequency, Δ ω is the difference between the two modal resonance frequencies, θ is the demodulation phase error, K d To demodulate the gain. The formula (1) is derived on the temperature, and the temperature sensitivity of the scale factor can be obtained by considering that the resonant frequency temperature change of the two modes has better consistency, as shown in the formula (2)
Formula (2) shows that the main parameters influencing the zero output thermal drift of the gyroscope include quadrature error, driving vibration amplitude, modal frequency difference, resonant frequency, demodulation gain and demodulation phase error theta. Because closed-loop driving is adopted, the stability of driving amplitude is high, and the demodulation gain in a digital circuit is constant, so that the formula (2) is simplified into the formula (3).
Because of the adoption of high vacuum package, the gyroscope has a higher Q value, and therefore phase errors caused by the sensitive mode of the gyroscope can be ignored. In addition, after the power is supplied at normal temperature, the temperature rise is generally within 5 ℃, the temperature change range is small, and therefore the frequency difference is not changed greatly. It can be assumed that the main factors affecting the electrical zero-bias settling time on the gyroscope are the quadrature stiffness and the resonant frequency of the drive mode.
Therefore, in order to accelerate the zero offset stability of the micro-electromechanical gyroscope, the invention adopts the following technical scheme. The method for orthogonal stiffness suppression and gyro resonant frequency compensation based on closed-loop electrostatic negative stiffness adjustment is characterized by comprising the following steps of: obtaining quadrature error amplitude of the micro electro mechanical gyroscope, generating quadrature stiffness suppression voltage through negative feedback closed loop control circuit design, applying the quadrature stiffness suppression voltage to a coupling stiffness suppression electrode of the micro electro mechanical gyroscope, and completely offsetting quadrature stiffness; and then the zero position output is compensated through a fitting coefficient between the driving frequency of the micro-electromechanical gyroscope and the zero position output, so that the zero offset stabilization time of the micro-electromechanical gyroscope is accelerated.
The driving frequency of the micro-electromechanical gyroscope is the vibration frequency of the gyroscope in the direction of the driving mode under the closed-loop control of the driving mode.
The quadrature error amplitude of the micro-electro-mechanical gyroscope is the amplitude of alternating voltage output by a front-end circuit of the gyroscope in the sensitive mode direction under the condition of closed-loop control of a driving mode and no input of angular rate.
The micro-electromechanical gyroscope coupling rigidity suppression electrode is an electrode of a designed coupling rigidity suppression structure.
The fitting coefficient between the drive frequency and the zero position output of the micro-electromechanical gyroscope is a coefficient obtained by acquiring the zero position output and the drive frequency information for a period of time after the gyroscope is powered on and performing least square polynomial fitting on the zero position output and the drive frequency information.
By adopting the technical scheme, the defects of temperature hysteresis, inaccurate fitting and the like caused by adopting a single parameter to perform gyroscope power-on zero compensation are overcome, zero thermal drift of the gyroscope after power-on is inhibited, the gyroscope zero offset stabilization time is shortened, and the gyroscope zero offset stability is improved.
Drawings
FIG. 1 is a schematic diagram of a micro-electromechanical gyroscope structure suitable for use in the present invention.
Fig. 2 is a schematic diagram of a coupling stiffness suppression structure.
FIG. 3 is a schematic diagram of a closed loop driving control loop of a micro-electromechanical gyroscope.
Fig. 4 is a schematic diagram of a quadrature stiffness suppression control loop.
Detailed Description
As shown in fig. 1, a micro-electromechanical gyroscope structure 1 applicable to the present invention generally includes a driving structure 3, a composite resonant structure 5, a driving and sensing structure 6, a sensitive structure 4, and a coupling suppression structure 11. The vibration pickup structures 4 and 6 generally adopt a differential capacitive structure, mainly including a comb-tooth type capacitance structure and a parallel plate type capacitance structure. 2. 7, 8 and 10 are respectively metal extraction electrodes of the driving structure 3, the sensitive pickup structure 7, the drive pickup structure 6 and the coupling suppression structure 11. The composite resonance structure 5 generates vibration, displacement variation of the composite resonance structure is acquired by the drive pickup structure 6 and the sensitive pickup structure 4, and the drive pickup structure 6 and the sensitive pickup structure 4 convert the acquired displacement variation into capacitance variation and output the capacitance variation through the electrode 8 and the electrode 7.
Fig. 2 is a schematic diagram of a coupling stiffness suppression structure, the coupling stiffness suppression structure adopts a squeeze-film comb capacitor structure, moving tooth ends 5A and 5B of the comb capacitor are located on two sides of the composite resonance structure 5, and a fixed tooth end is composed of structures 11A and 11B, and 11A and 11B are connected to the same electrode 10 through metal wires. The overlapping length of the fixed tooth end and the movable tooth end is L, the movable tooth end 5A and the fixed tooth end 11A form two comb capacitors, the electrode plate distances of the two comb capacitors are y1 and y2 respectively, the movable tooth end 5B and the fixed tooth end 11B form two comb capacitors, and the electrode plate distances of the two comb capacitors are y1 and y2 respectively. In practical design, a plurality of comb capacitors are usually designed to form a capacitor array so as to increase the electrostatic negative stiffness adjustment range.
The present invention will be described in more detail with reference to the following examples.
As shown in fig. 3 and 4, the method of the present embodiment includes the steps of:
1) a preposed readout circuit 11 is arranged, the output electrode 8 of the drive and pickup structure 6 is connected with the preposed readout circuit 11 to obtain a drive vibration voltage 12, the output end of the preposed readout circuit 11 is connected with an analog-to-digital converter 301, the analog-to-digital converter 301 is connected with a digital signal processor 400, and a digital quantization signal of the drive vibration voltage 12 is obtained and is provided for the digital signal processor 400 to carry out data processing.
2) In the digital signal processor, an in-phase demodulator 303, a quadrature demodulator 304, two filters 305, 306, adders 309 and 310, two PID controllers 311, 312, a sine wave generator 315, and a multiplier 317 are provided. First, the output of the a/D converter 301 is connected to the in-phase demodulator 303 and the quadrature demodulator 304 at the same time. Then, the output end of the in-phase demodulator 303 is connected in series with the filter 305 to obtain a demodulated phase error signal 307, the demodulated phase error signal 307 is connected with the adder 322 and compared with the phase control signal 309 to obtain a phase error signal, the phase error signal is sent to the PID controller 311 to obtain a phase control signal 313, and the phase control signal 313 is connected with a sine wave generator 315 to obtain a driving phase signal 316. Meanwhile, the output of the quadrature demodulator 304 is connected in series with the filter 306 to obtain the amplitude 308 of the driving vibration signal, the amplitude 308 of the vibration signal is connected with the adder 323 and compared with the reference signal 310 of the vibration amplitude to obtain an amplitude error signal, and the amplitude error signal is sent to the PID controller 312 to obtain the amplitude control signal 314. The driving phase signal 316 and the amplitude control signal 314 are simultaneously connected to the multiplier 317, the output terminal of the multiplier 317 is connected to the input terminal of the D/a converter 318, and finally the output terminal of the D/a converter 318 is connected to the driving electrode 2, thereby forming a digital closed loop driving. By means of this closed-loop control, the microelectromechanical gyroscope 1 can be driven in the direction of the mode with its natural resonant frequency ω nd And carrying out constant amplitude vibration.
3) And arranging another prepositive readout circuit 13, connecting the output electrode 7 of the sensitive pickup structure 4 with the prepositive readout circuit 13 to obtain a sensitive modal vibration voltage 17, connecting the output end of the prepositive readout circuit 13 with another analog-to-digital converter 401, connecting the analog-to-digital converter 401 with a digital signal processor 400, and obtaining a digital quantized signal of the sensitive modal vibration voltage 17 for data processing of the digital signal processor 400.
4) An in-phase demodulator 402, a quadrature demodulator 404, two filters 403, 405, an adder 409, a PID controller 410, and a compensation unit 413 are provided in the digital signal processor. First, the output of the a/D converter 401 is connected to both the quadrature demodulator 402 and the in-phase demodulator 404. Then, the output of the quadrature demodulator 402 is connected in series with the filter 403 to obtain a quadrature error amplitude 406, the quadrature error amplitude 406 is connected to the adder 409 and is set to be zero, the quadrature error amplitude 406 is compared with the control amplitude reference signal 409 to obtain an amplitude error signal, the amplitude error signal is sent to the PID controller 410 to obtain a quadrature stiffness suppression signal 412, the output end of the controller 410 is connected to the input end of the D/a converter 414, and finally the output end of the D/a converter 414 is connected to the coupling suppression structure electrode 10 to form a quadrature error closed-loop suppression loop. Through the loop control, the coupling rigidity can be counteracted, the orthogonal movement of a sensitive structure is inhibited, and further the zero thermal drift caused by the leakage of the orthogonal error is obviously reduced.
5) The output end of the in-phase demodulator 404 is connected with the filter 405 in series to obtain a gyro zero output signal 408, and the zero output signal 408 and the phase control signal 313 in the driving closed-loop control loop are simultaneously sent to the compensation unit 411 for polynomial compensation. Since the phase control signal 313 can reflect the gyro drive resonance frequency omega nd So that the compensation unit can compensate the resonance frequency omega in the zero thermal drift of the gyroscope nd The influence caused by the change of the zero-position thermal drift is eliminated, and the zero-position thermal drift is further reduced.
By the method, the quadrature rigidity is completely counteracted by utilizing a quadrature error closed loop suppression circuit; zero position output is compensated through a fitting coefficient between the driving frequency of the micro-electromechanical gyroscope and the zero position output, so that the leakage of orthogonal error and the resonance frequency omega can be obviously reduced nd The zero offset stabilization time of the micro-electro-mechanical gyroscope is accelerated due to zero thermal drift caused by temperature change.
The above embodiments are only preferred embodiments of the present invention, and any changes and modifications based on the technical solutions of the present invention in the technical field should not be excluded from the protection scope of the present invention.
Claims (7)
1. A method for accelerating zero offset stabilization time of a micro-electromechanical gyroscope is characterized by comprising the following steps: obtaining quadrature error amplitude (406) of the micro-electromechanical gyroscope, generating quadrature stiffness suppression voltage through negative feedback closed-loop control loop design, and applying the quadrature stiffness suppression voltage to a micro-electromechanical gyroscope coupling stiffness suppression electrode to completely counteract the quadrature stiffness; compensating the zero position output through a fitting coefficient between the driving frequency of the micro-electromechanical gyroscope and the zero position output, and accelerating the zero offset stabilization time of the micro-electromechanical gyroscope;
the design of the closed-loop control loop specifically comprises the following steps:
1) arranging a first preposed readout circuit (11), connecting a first output electrode (8) of the drive and pickup structure (6) with the first preposed readout circuit (11) to obtain a drive vibration voltage, connecting the output end of the first preposed readout circuit (11) with a first A/D converter (301), connecting the first A/D converter (301) with a digital signal processor (400), and obtaining a digital quantization signal of the drive vibration voltage for the digital signal processor (400) to perform data processing;
2) a first in-phase demodulator (303), a first quadrature demodulator (304), a first filter (305), a second filter (306), a first adder (322) and a second adder (323), a first PID controller (311), a second PID controller (312), a sine wave generator (315) and a multiplier (317) are arranged in a digital signal processor (400);
simultaneously connecting the output end of the first A/D converter (301) to a first in-phase demodulator (303) and a first quadrature demodulator (304); then, the output end of the first in-phase demodulator (303) is connected with a first filter (305) in series to obtain a demodulation phase error signal (307), the demodulation phase error signal (307) is connected with a first adder (322), the demodulation phase error signal (307) is compared with a first phase control signal (309) to obtain a phase error signal, the phase error signal is sent to a first PID controller (311) to obtain a second phase control signal (313), and the second phase control signal (313) is connected with a sine wave generator (315) to obtain a driving phase signal (316); meanwhile, the output of the first quadrature demodulator (304) is connected with a second filter (306) in series to obtain a driving vibration signal amplitude (308), the driving vibration signal amplitude (308) is connected with a second adder (323), the driving vibration signal amplitude (308) is compared with a vibration amplitude reference signal to obtain an amplitude error signal, and the amplitude error signal is sent to a second PID controller (312) to obtain an amplitude control signal (314); simultaneously connecting the driving phase signal (316) and the amplitude control signal (314) into a multiplier (317), connecting the output end of the multiplier (317) with the input end of a first D/A converter (318), and finally connecting the output end of the first D/A converter (318) with a driving electrode (2) to form digital closed-loop driving; through the closed-loop control of the digital closed-loop drive, the micro-electromechanical gyroscope can carry out constant amplitude vibration at the inherent resonant frequency in the direction of a drive mode;
3) arranging a second prepositive readout circuit (13), connecting a second output electrode (7) of the sensitive pickup structure (4) with the second prepositive readout circuit (13) to obtain a sensitive modal vibration voltage (17), connecting the output end of the second prepositive readout circuit (13) with a second A/D converter (401), connecting the second A/D converter (401) with a digital signal processor (400), and obtaining a digital quantization signal of the sensitive modal vibration voltage (17) for the digital signal processor (400) to perform data processing;
4) a second in-phase demodulator (404), a second quadrature demodulator (402), a third filter (403), a fourth filter (405), a third adder (407), a third PID controller (410) and a compensation unit (411) are arranged in a digital signal processor (400);
simultaneously connecting the output end of the second A/D converter (401) to a second quadrature demodulator (402) and a second in-phase demodulator (404); then, the output of the second quadrature demodulator (402) is connected with a third filter (403) in series to obtain a quadrature error amplitude (406), the quadrature error amplitude (406) is connected with a third adder (407), the quadrature error amplitude (406) is compared with a control amplitude reference signal to obtain an amplitude error signal, the amplitude error signal is sent to a third PID controller (410) to obtain a quadrature stiffness suppression signal (412), the output end of the third PID controller (410) is connected with the input end of a second D/A converter (414), and finally the output end of the second D/A converter (414) is connected to a coupling suppression structure electrode (10) to form a quadrature error closed-loop suppression loop; through the loop control of the quadrature error closed loop suppression loop, the coupling rigidity can be counteracted, the quadrature motion of the sensitive pickup structure (4) is suppressed, and the zero thermal drift caused by the leakage of the quadrature error is reduced;
5) the output end of the second in-phase demodulator (404) is connected with a fourth filter (405) in series to obtain a gyro zero-position output signal (408), and the gyro zero-position output signal (408) and a second phase control signal (313) in a driving closed-loop control loop are simultaneously sent to a compensation unit (411) for polynomial compensation; because the second phase control signal (313) can reflect the magnitude of the gyro drive resonant frequency, the compensation unit (411) can eliminate the influence caused by the change of the resonant frequency in the gyro zero-position thermal drift and reduce the zero-position thermal drift.
2. The method for accelerating the zero-offset settling time of a microelectromechanical gyroscope of claim 1, further comprising: the driving frequency is the vibration frequency of the gyroscope in the direction of the driving mode under the closed-loop control of the driving mode.
3. The method for accelerating the zero-bias settling time of a microelectromechanical gyroscope of claim 2, further comprising: the drive mode closed-loop control is analog closed-loop control or digital closed-loop control, and controls the gyroscope to perform constant amplitude vibration at the resonant frequency of the gyroscope along the drive mode direction.
4. The method for accelerating the zero-offset settling time of a microelectromechanical gyroscope of claim 1, further comprising: and the quadrature error amplitude (406) is the amplitude of alternating voltage output by a front-end circuit of the gyroscope in the sensitive mode direction under the closed-loop control of a driving mode without input of angular rate.
5. The method for accelerating the zero-bias settling time of a microelectromechanical gyroscope of claim 1, further comprising: the coupling rigidity suppression electrode is an electrode of a coupling rigidity suppression structure.
6. The method for accelerating the zero-offset settling time of a microelectromechanical gyroscope of claim 5, further comprising: the coupling rigidity restraining structure adopts a film pressing comb tooth structure and is positioned on the gyroscope composite resonance structure.
7. The method for accelerating the zero-offset settling time of a microelectromechanical gyroscope of claim 1, further comprising: the fitting coefficient between the drive frequency and the zero output of the micro-electromechanical gyroscope is a coefficient obtained by acquiring the zero output and the drive frequency information for a period of time and performing least square polynomial fitting on the zero output and the drive frequency information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910140750.1A CN111623759B (en) | 2019-02-26 | 2019-02-26 | Method for accelerating zero-offset stabilization time of micro-electromechanical gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910140750.1A CN111623759B (en) | 2019-02-26 | 2019-02-26 | Method for accelerating zero-offset stabilization time of micro-electromechanical gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111623759A CN111623759A (en) | 2020-09-04 |
| CN111623759B true CN111623759B (en) | 2022-09-13 |
Family
ID=72258730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910140750.1A Active CN111623759B (en) | 2019-02-26 | 2019-02-26 | Method for accelerating zero-offset stabilization time of micro-electromechanical gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111623759B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116046026B (en) * | 2023-03-31 | 2023-06-16 | 中国船舶集团有限公司第七〇七研究所 | Fiber-optic gyroscope performance measurement method and system based on stress factors |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759365A (en) * | 2012-07-12 | 2012-10-31 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
| CN103822623A (en) * | 2014-03-03 | 2014-05-28 | 中国兵器工业集团第二一四研究所苏州研发中心 | Quadrature error closed-loop compensating circuit for vibrating type silicon micromechanical gyroscope |
| CN105841685A (en) * | 2016-05-09 | 2016-08-10 | 西北工业大学 | Rapid warm start implementation method for silicon micromechanical gyroscope |
| CN107389090A (en) * | 2017-06-12 | 2017-11-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of mechanical non-orthogonal closed-loop policy for improving MEMS gyro anti-vibration characteristic |
| CN108253952A (en) * | 2017-12-01 | 2018-07-06 | 北京时代民芯科技有限公司 | A kind of zero bias self calibration MEMS gyroscope and its zero bias method for self-calibrating |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030033850A1 (en) * | 2001-08-09 | 2003-02-20 | Challoner A. Dorian | Cloverleaf microgyroscope with electrostatic alignment and tuning |
| ATE452326T1 (en) * | 2004-02-04 | 2010-01-15 | Atlantic Inertial Systems Ltd | METHOD FOR REDUCING PRELOAD ERROR IN A VIBRATING STRUCTURE GYRO |
| CN102620726B (en) * | 2012-04-04 | 2014-10-29 | 西北工业大学 | Double-closed-loop control circuit of micromechanical gyroscope |
| US9605964B2 (en) * | 2014-01-03 | 2017-03-28 | The Boeing Company | Gyro quadrature stabalization with demodulation phase error nulling |
| US10036652B2 (en) * | 2014-02-24 | 2018-07-31 | The Regents Of The University Of California | Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability |
| EP3234503B1 (en) * | 2014-12-18 | 2020-12-02 | RISE Research Institutes of Sweden AB | A quadrature compensation method for mems gyroscopes and a gyroscope sensor |
| US20160231119A1 (en) * | 2015-02-09 | 2016-08-11 | Freescale Semiconductor, Inc. | System comprising a mechanical resonator and method therefor |
| CN105136166B (en) * | 2015-08-17 | 2018-02-02 | 南京航空航天大学 | A kind of SINS error model emulation mode of specified inertial navigation positional precision |
| US10330474B2 (en) * | 2016-05-10 | 2019-06-25 | Nxp Usa, Inc. | Quadrature error compensation circuit for a MEMS gyroscope |
-
2019
- 2019-02-26 CN CN201910140750.1A patent/CN111623759B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759365A (en) * | 2012-07-12 | 2012-10-31 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
| CN103822623A (en) * | 2014-03-03 | 2014-05-28 | 中国兵器工业集团第二一四研究所苏州研发中心 | Quadrature error closed-loop compensating circuit for vibrating type silicon micromechanical gyroscope |
| CN105841685A (en) * | 2016-05-09 | 2016-08-10 | 西北工业大学 | Rapid warm start implementation method for silicon micromechanical gyroscope |
| CN107389090A (en) * | 2017-06-12 | 2017-11-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of mechanical non-orthogonal closed-loop policy for improving MEMS gyro anti-vibration characteristic |
| CN108253952A (en) * | 2017-12-01 | 2018-07-06 | 北京时代民芯科技有限公司 | A kind of zero bias self calibration MEMS gyroscope and its zero bias method for self-calibrating |
Non-Patent Citations (2)
| Title |
|---|
| Quadrature control principle of hemispherical resonator gyro;Zhao Hongbo 等;《Proceedings 2013 International Conference on Mechatronic Sciences, Electric Engineering and Computer (MEC)》;20140828;第1-4页 * |
| 基于正交误差对准的MEMS陀螺测控电路设计;陈华 等;《湖南大学学报(自然科学版)》;20171031;第44卷(第10期);第109-116页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111623759A (en) | 2020-09-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111578923B (en) | Closed-loop control method and system for resonant gyroscope | |
| TW468035B (en) | Micro inertial measurement unit | |
| CN109061226B (en) | Design method of electrostatic negative stiffness type accelerometer | |
| KR101297654B1 (en) | Temperature compensation method and temperature and oscillation control loop system of parallel plate electrode type resonance sensor | |
| US6494093B2 (en) | Method of measuring motion | |
| CN104395695B (en) | Improved vibratory gyroscope | |
| CN108535511B (en) | FM accelerometer force balance detection method based on static negative stiffness frequency calculation | |
| CN102507050B (en) | Stimulation and vibration pick integrated pressure sensor of electric heating stimulation-piezoresistance vibration pick resonance beam | |
| EP2746780B1 (en) | Bias reduction in force rebalanced accelerometers | |
| CN108008152B (en) | Method and device for acquiring parasitic mismatch capacitance of MEMS accelerometer | |
| CN105571576B (en) | A kind of MEMS gyro mode vectors correlation voltage automatic test approach | |
| JP6278604B2 (en) | Vibration gyro with bias correction function | |
| CN108844531B (en) | Quick oscillation starting control method and device for high-Q-value micro-electromechanical gyroscope | |
| CN110631570A (en) | System and method for improving temperature stability of silicon micro gyroscope scale factor | |
| CN110018330B (en) | Silicon micro-resonance type accelerometer temperature compensation algorithm based on adjustment structure compensation parameters | |
| CN112485469B (en) | Resonant micro-mechanical accelerometer and control method thereof | |
| KR101658473B1 (en) | Compensation method of acceleration sensitivity of mems gyroscope | |
| CN111623759B (en) | Method for accelerating zero-offset stabilization time of micro-electromechanical gyroscope | |
| Jia et al. | In-run scale factor compensation for MEMS gyroscope without calibration and fitting | |
| CN113514666A (en) | Micromechanical accelerometer based on PT symmetrical resonator and detection method thereof | |
| RU2301970C1 (en) | Micro-mechanical vibration gyroscope | |
| JP5684374B2 (en) | Angular velocity sensor with improved aging characteristics | |
| JPH1164005A (en) | Piezoelectric rotation sensor for biaxial simultaneous measurement and its measuring circuit | |
| CN111380561B (en) | Micro-electromechanical gyro scale factor compensation method based on multi-parameter fusion | |
| Hou et al. | Structural improvement in resonant silicon sensors to sub-ppm/° C temperature coefficient of resonance frequency |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |