CN108253952A - A kind of zero bias self calibration MEMS gyroscope and its zero bias method for self-calibrating - Google Patents
A kind of zero bias self calibration MEMS gyroscope and its zero bias method for self-calibrating Download PDFInfo
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- CN108253952A CN108253952A CN201711251192.3A CN201711251192A CN108253952A CN 108253952 A CN108253952 A CN 108253952A CN 201711251192 A CN201711251192 A CN 201711251192A CN 108253952 A CN108253952 A CN 108253952A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
Abstract
There is drift for holohedral symmetry MEMS ring gyros zero bias and repeatedly power on the problem of zero bias are inconsistent in the present invention, it is proposed that a kind of MEMS gyro zero bias method for self-calibrating based on driving/sensed-mode reversion, feature are：According to the working characteristics of ring gyro, based on the kinetic model of gyro, the changing rule of zero bias under driven-mode and sensed-mode reversion both front and back operating mode is provided, is switched between two kinds of operating modes by signal processing circuit control ring gyro；Detection signal under adjacent two kinds of operating modes is made the difference, the final online self calibration of zero bias for realizing MEMS ring gyros.In this way, zero bias signal can be efficiently extracted out, inhibit bias drift phenomenon, improve the precision of MEMS ring gyroscopes.
Description
Technical field
The present invention relates to a kind of MEMS gyroscope zero bias method for self-calibrating, particularly a kind of anti-based on driving/sensed-mode
The MEMS gyroscope zero bias method for self-calibrating turned realizes the online self-correcting of zero bias suitable for the MEMS annulars gyroscope of symmetrical configuration
It is accurate.
Background technology
MEMS gyroscope has small, small power consumption, at low cost, anti-overload ability as a kind of important inertia device
The advantages that strong, has a wide range of applications field.However the performance of MEMS gyroscope is by many factors such as fabrication error and environment
It influences, its output is led to problems such as easily to occur there are zero bias, zero bias, and drift, repeatedly to power on zero bias inconsistent, it is difficult to pass through signal
The mode of processing extracts zero bias signal from useful angular velocity signal, limits its application.
Temperature is the dimensional structure of gyro gauge outfit, the elasticity modulus of material an important factor for influencing MEMS gyroscope precision
And the performance of electronic device can all change with the change of temperature in gyro detection circuit, it is therefore necessary to take steps to disappear
Except this error.The method of raising gyroscope precision reported at present mainly has temperature control and a temperature-compensating, however both
Method is respectively provided with certain limitation in terms of designing with compensation effect.Wherein temperature control needs additional designs temperature-controlled member,
The volume and power consumption of gyro system can be increased, in addition the dynamic properties such as thermostatically controlled rapidity, stability, hysteresis quality can influence
The performance of gyroscope, there are design difficulties.Temperature-compensating needs to establish model of temperature compensation by thermocycling, it is desirable that temperature
The working environment of sensor energy exact representation gyroscope resonant ring, in addition to the repetition of the precision of temperature sensor and gyroscope
Property is more demanding, and zero bias-temperature model of gyroscope easily changes, and needs periodically to be corrected, and adds additional work
Make the time.In addition to this, gyroscope is repeatedly powered on there are the relatively poor inherent defect of bias repeatability in order to eliminate gyroscope
The problem of zero bias are inconsistent improves bias repeatability, reduces accumulated error, it is necessary to study the online method for self-calibrating of zero bias.
Invention content
The technology of the present invention solves the problems, such as：Overcome the shortcoming of existing method, provide a kind of based on driving/detection
The MEMS gyroscope zero bias method for self-calibrating of mode reversion, and provide zero bias self-calibration system.This method is based on gyroscope itself
Working characteristics,, will be under two kinds of operating modes by controlling the reversion of two mode based on driven-mode and sensed-mode
Detection signal makes the difference, and inhibits the bias drift of gyroscope, eliminates and repeatedly powers on the inconsistent inherent defect of zero bias, improves gyroscope
Precision.
The present invention technical solution be：
There is provided a kind of zero bias self-alignment MEMS gyroscope, including resonant ring, signal processing module and compensating module；
It is circumferentially uniformly distributed first electrode clockwise to the 8th electrode on the outside of the resonant ring；In first mode, first
Electrode and the driving electrodes that the 5th electrode is driven-mode, third electrode and the detecting electrode that the 7th electrode is driven-mode, the
Two electrodes and the driving electrodes that the 6th electrode is sensed-mode, the 4th electrode and the detecting electrode that the 8th electrode is sensed-mode；
In second mode, second electrode and the driving electrodes that the 6th electrode is driven-mode, the 4th electrode and the 8th electrode are driving moulds
The detecting electrode of state, first electrode and the 5th electrode are the driving electrodes of sensed-mode, third electrode and the 7th electrode to detect
The detecting electrode of mode；
The signal processing module controls the resonant ring to work alternatively in first mode and second mode, in first mode
The angular speed of output is A1, it is A in the angular speed of second mode output2；
The angular speed difference A of the compensating module output both of which1-A2Angular velocity signal as gyroscope detection.
There is provided another zero bias self-alignment MEMS gyroscope, including resonant ring, signal processing module and compensating module；
It is circumferentially uniformly distributed first electrode clockwise to the 8th electrode on the outside of the resonant ring；In first mode, first
Electrode and the driving electrodes that the 5th electrode is driven-mode, third electrode and the detecting electrode that the 7th electrode is driven-mode, the
Two electrodes and the driving electrodes that the 6th electrode is sensed-mode, the 4th electrode and the detecting electrode that the 8th electrode is sensed-mode；
In second mode, second electrode and the driving electrodes that the 6th electrode is driven-mode, the 4th electrode and the 8th electrode are driving moulds
The detecting electrode of state, first electrode and the 5th electrode are the driving electrodes of sensed-mode, third electrode and the 7th electrode to detect
The detecting electrode of mode；
The signal processing module controls the resonant ring to work alternatively in first mode and second mode in the starting stage,
First mode is operated in, the angular speed of output is A1, the angular speed for being operated in second mode output is A2；In normal work stage,
Control resonant ring is only operated in first mode or second mode；
The compensating module receives the angular speed of the signal processing module output, and the starting stage obtains zero bias signal and isRemove conduct after zero bias signal in normal work stage, the angular velocity signal exported from signal processing module
The angular velocity signal output of gyroscope detection.
Preferably, A1=SF1×Ω+Bias1, A2=SF2×Ω+Bias2；Wherein SF1It is MEMS gyroscope in the first mould
Constant multiplier under formula, Bias1For the zero bias signal of MEMS gyroscope in the flrst mode, SF2It is MEMS gyroscope in the second mould
Constant multiplier under formula, Bias2For the zero bias signal of MEMS gyroscope under the second mode, wherein SF1=-SF2, Bias1=
Bias2。
Preferably, first electrode and the 5th is controlled based on the detection signal of third electrode and the 7th electrode in the flrst mode
The driving voltage of electrode vibrates resonant ring perseverance width at resonant frequency；Detection signal based on the 4th electrode and the 8th electrode
The driving voltage of second electrode and the 6th electrode is controlled, driven-mode is offset and sensed-mode is vibrated caused by coupling and Coriolis
It is vibrated caused by power, and Output speed is A1。
Detection signal control second electrode based on the 4th electrode and the 8th electrode and the 6th electrode under the second mode
Driving voltage vibrates resonant ring perseverance width at resonant frequency；Based on the detection signal of third electrode and the 7th electrode control the
The driving voltage of one electrode and the 5th electrode, sensed-mode is vibrated counteracting driven-mode caused by coupling and coriolis force causes
Vibration, and Output speed be A2。
Preferably, the signal processing module include self calibration control module, amplitude demodulation module, phase demodulation modules,
Demodulation module, quadrature demodulation unit, automatic gain control loop, phase-locked loop, voltage controlled oscillator, uncoupling loop, angle in the same direction
Velocity measuring loop, driven-mode modulator, sensed-mode modulator and wave filter；
The detection signal that self calibration control module control third electrode and the 7th electrode export in the flrst mode is after testing
Signal S1 is obtained after amplifier summationD, signal S1DThrough amplitude demodulation module detected amplitude signal, amplitude signal is exported to automatic
Gain control loop, automatic gain control loop export the first drive signal so that the amplitude signal to be controlled to reach the constant of setting
Amplitude；Signal S1DVibration frequency is detected through phase demodulation modules, and is exported to phase-locked loop, phase-locked loop adjustment voltage controlled oscillation
The output signal of device is as the second drive signal, to control the signal S1DPhase difference with drive signal on resonant ring is
90 °, the first drive signal and the second drive signal are after driven-mode modulators modulate, as first electrode and the 5th electrode
Driving voltage；
Self calibration control module controls the 4th electrode and the detection signal of the 8th electrode output after testing in the flrst mode
Summation obtains signal S1 after amplifierS, signal S1SThrough quadrature demodulation unit carry out quadrature demodulation after, through uncoupling loop obtain with
The big reversed signal such as coupling is exported as third drive signal；Signal S1SAfter demodulation module in the same direction demodulate in the same direction, warp
Angular velocity detection loop obtains and causes signal S1SThe big reversed signal such as coriolis force vibrated in the same direction is as the 4th driving letter
Number, wave filter obtains angular speed as A after being filtered with the big reversed signal such as coriolis force1；Third drive signal and the 4th driving
Signal is after testing after mode modulators modulate, as second electrode and the driving voltage of the 6th electrode；
Self calibration control module controls the 4th electrode and the detection signal of the 8th electrode output after testing under the second mode
Signal S2 is obtained after amplifier summationD, signal S2DThrough amplitude demodulation module detected amplitude signal, amplitude signal is exported to automatic
Gain control loop, automatic gain control loop export the 5th drive signal so that the signal amplitude to be controlled to reach the constant of setting
Amplitude；Signal S2DVibration frequency is detected through phase demodulation modules, and is exported to phase-locked loop, phase-locked loop adjustment voltage controlled oscillation
The output signal of device is as the 6th drive signal, to control the signal S2DPhase difference with drive signal on resonant ring is
90 °, the 5th drive signal and the 6th drive signal are after driven-mode modulators modulate, as second electrode and the 6th electrode
Driving voltage；
The detection signal that self calibration control module control third electrode and the 7th electrode export under the second mode is after testing
Summation obtains signal S2 after amplifierS, signal S2SThrough quadrature demodulation unit carry out quadrature demodulation after, through uncoupling loop obtain with
The big reversed signal such as coupling is exported as the 7th drive signal；Signal S2SAfter demodulation module in the same direction demodulate in the same direction, warp
Angular velocity detection loop obtains and causes signal S2SThe big reversed signal such as coriolis force vibrated in the same direction is as the 8th driving letter
Number, wave filter obtains angular speed as A after being filtered with the big reversed signal such as coriolis force2；7th drive signal and the 8th driving
Signal is after testing after mode modulators modulate, as first electrode and the driving voltage of the 5th electrode.
A kind of MEMS gyroscope zero bias method for self-calibrating is provided, MEMS gyroscope includes resonant ring, the resonant ring outside
It is circumferentially uniformly distributed first electrode clockwise to the 8th electrode；In first mode, first electrode and the 5th electrode are driving mould
The driving electrodes of state, third electrode and the 7th electrode are the detecting electrode of driven-mode, second electrode and the 6th electrode to detect
The driving electrodes of mode, the 4th electrode and the 8th electrode are the detecting electrode of sensed-mode；In second mode, second electrode and
Six electrodes are the driving electrodes of driven-mode, and the 4th electrode and the 8th electrode are the detecting electrode of driven-mode, first electrode and
5th electrode is the driving electrodes of sensed-mode, third electrode and the detecting electrode that the 7th electrode is sensed-mode；
Zero bias method for self-calibrating is as follows：The resonant ring is controlled to work alternatively in first mode and second mode, first
The angular speed of mode detection is A1, it is A in the angular speed of second mode detection2；Calculate the angular speed difference A of both of which1-A2
Angular velocity signal as gyroscope detection.
There is provided another MEMS gyroscope zero bias method for self-calibrating, MEMS gyroscope includes resonant ring, outside the resonant ring
Side is circumferentially uniformly distributed first electrode to the 8th electrode clockwise；In first mode, first electrode and the 5th electrode are driving
The driving electrodes of mode, third electrode and the 7th electrode are the detecting electrode of driven-mode, second electrode and the 6th electrode to examine
Survey the driving electrodes of mode, the 4th electrode and the detecting electrode that the 8th electrode is sensed-mode；In second mode, second electrode and
6th electrode is the driving electrodes of driven-mode, and the 4th electrode and the 8th electrode are the detecting electrodes of driven-mode, first electrode
With the driving electrodes that the 5th electrode is sensed-mode, third electrode and the detecting electrode that the 7th electrode is sensed-mode；
Zero bias method for self-calibrating is as follows：
(1) resonant ring is controlled to work alternatively in first mode and second mode in the starting stage, is examined in first mode
The angular speed of survey is A1, the angular speed of second mode detection is A2；Obtaining zero bias signal isIn order to overcome noise
Influence, using the average value of zero bias signal that the electrifying startup stage extracts as normal work when gyroscope zero bias signal.
(2) in normal work stage, control resonant ring is only operated in first mode or second mode；From the angular speed of detection
A1Or A2In remove the angular velocity signal output detected as gyroscope after zero bias.
Preferably, first electrode and the 5th is controlled based on the detection signal of third electrode and the 7th electrode in the flrst mode
The driving voltage of electrode vibrates resonant ring perseverance width at resonant frequency；Detection signal based on the 4th electrode and the 8th electrode
The driving voltage of second electrode and the 6th electrode is controlled, driven-mode is offset and sensed-mode is vibrated caused by coupling and Coriolis
It is vibrated caused by power, and Output speed is A1。
Detection signal control second electrode based on the 4th electrode and the 8th electrode and the 6th electrode under the second mode
Driving voltage vibrates resonant ring perseverance width at resonant frequency；Based on the detection signal of third electrode and the 7th electrode control the
The driving voltage of one electrode and the 5th electrode, sensed-mode is vibrated counteracting driven-mode caused by coupling and coriolis force causes
Vibration, and Output speed be A2。
Preferably, A1=SF1×Ω+Bias1, A2=SF2×Ω+Bias2；Wherein SF1It is MEMS gyroscope in the first mould
Constant multiplier under formula, Bias1For the zero bias signal of MEMS gyroscope in the flrst mode, SF2It is MEMS gyroscope in the second mould
Constant multiplier under formula, Bias2For the zero bias signal of MEMS gyroscope under the second mode, wherein SF1=-SF2, Bias1=
Bias2。
Preferably, the starting stage selected as electrifying startup 10s.
Compared with the prior art, the invention has the advantages that：
(1) zero bias method for self-calibrating of the present invention can eliminate gyro and repeatedly power on the problem of zero bias are inconsistent, improve
Bias repeatability reduces accumulated error.
(2) zero bias method for self-calibrating of the present invention does not need to additionally increase hardware.
(3) zero bias method for self-calibrating of the present invention, based on gyro own operating characteristics, without establishing gyro in advance
Zero bias model, you can it realizes the online self calibration of zero bias, inhibition is played to zero deviation change caused by temperature or other factors,
Improve the precision of gyroscope.
(4) zero bias method for self-calibrating of the present invention is realized simply, without a large amount of test period of ancillary cost.
Description of the drawings
Fig. 1 is the resonant ring structure diagram of MEMS gyroscope of the present invention.
Fig. 2 is the MEMS ring gyroscope zero bias self-calibration system schematic diagrames based on driving/sensed-mode reversion in the present invention.
Fig. 3 is operated in first mode system schematic for gyroscope in the present invention.
Fig. 4 is operated in second mode system schematic for gyroscope in the present invention.
Fig. 5 is work schedule schematic diagram of the present invention.
Specific embodiment
With reference to the drawings and specific embodiments to the MEMS gyroscope zero bias based on driving/sensed-mode reversion of the present invention certainly
Calibration method does the elaboration of specific embodiment.
Fig. 1 is the resonant ring structure chart of MEMS gyroscope in the present invention.Resonant ring 25 by be configured in circumferencial direction eight etc.
Sub-support beam 26 is fixed.25 outside of resonant ring is uniformly distributed 8 electrodes, is followed successively by 1~electrode of electrode 8, wherein electrode 1 clockwise
It is the driving electrodes of driven-mode with electrode 5, electrode 3 and electrode 7 are the detecting electrodes of driven-mode, and electrode 2 and electrode 6 are inspections
The driving electrodes of mode are surveyed, electrode 4 and electrode 8 are the detecting electrodes of sensed-mode, when gyroscope inverts work in both of which
When, the effect of electrode accordingly changes.25 inner ring of resonant ring is uniformly distributed 16 electrodes and realizes electrostatic equilibrium adjustment, clockwise
9~electrode of electrode 24 is followed successively by, 16 electrodes are divided into 4 groups, and first group includes electrode 9, electrode 13, electrode 17 and electrode
21, second group includes electrode 10, electrode 14, electrode 18 and electrode 22, and third group includes electrode 11, electrode 15, electrode 19 and electricity
Pole 23, the 4th group includes electrode 12, electrode 16, electrode 20 and electrode 24, and the voltage applied on every group of electrode passes through electrostatic equilibrium
Adjustment algorithm determines, does not elaborate here.
Fig. 2 is the MEMS ring gyroscope zero bias self-calibration system schematic diagrames based on driving/sensed-mode reversion of the present invention.
Zero bias self-calibration system include detection amplifier 27, driving amplifier 28, detection switching switch 29, driving switching switch 30, from
Calibrate control module 31, amplitude demodulation 32, in the same direction phase demodulating 33, demodulation 34, quadrature demodulation 35, AGC loop 36, phaselocked loop
37th, voltage controlled oscillator 38, uncoupling loop 39, angular velocity detection loop 40, driven-mode modulator 41, sensed-mode modulator
42nd, wave filter 43, compensating module 44.When MEMS gyroscope works normally, there are two mode of driving and detection, signal processing module
By controlling AGC loop 36, phaselocked loop 37, voltage controlled oscillator 38 that driven-mode is made to realize that perseverance width vibrates at resonant frequency；Letter
Number processing module by control uncoupling loop 39, angular velocity detection loop 40 offset driven-mode to the coupling of sensed-mode,
The closed loop detection of angular speed is vibrated and realized caused by offsetting coriolis force；Self calibration control module 31 is by controlling detection switching
Switch 29 and driving switching switch 30 realize the reversion of two mode.It is specific as follows：
Totally four, amplifier 27 is detected, electrode 3, electrode 7, electrode 4 and the electrode 8 being respectively connected on the outside of resonant ring drive
Dynamic totally four, amplifier 28, electrode 1, electrode 5, electrode 2 and the electrode 6 being respectively connected on the outside of resonant ring.
Detection switching switch 29 and driving switching switch 30 are controlled by self calibration control module 31, realize driving/detection
The reversion of mode, co-exists in two kinds of operating modes, and first mode is as shown in Figure 3：The signal of electrode 3 and electrode 7 amplifies after testing
Summation obtains signal S1 after device 27D, S1DIt exports to amplitude demodulation 32 and phase demodulating 33, it is defeated after AGC loop and phase-locked loop
Go out driving voltage, and be applied to electrode 1 and electrode 5；Summation obtains letter to the signal of electrode 4 and electrode 8 after amplifier 27 after testing
Number S1S, S1SIt exports to demodulation 34 in the same direction and quadrature demodulation 35, the output offset electricity after uncoupling loop and angular speed detection loop
Pressure, and it is applied to electrode 2 and electrode 6.Second mode is as shown in Figure 4：The signal of electrode 4 and electrode 8 is after testing after amplifier 27
Summation obtains signal S2D, S2DIt exports to amplitude demodulation 32 and phase demodulating 33, the output driving after AGC loop and phase-locked loop
Voltage, and it is applied to electrode 2 and electrode 6；Summation obtains signal S2 to the signal of electrode 3 and electrode 7 after amplifier 27 after testingS,
S2SIt exports to demodulation 34 in the same direction and quadrature demodulation 35, the output offset voltage after uncoupling loop and angular speed detection loop, and
It is applied to electrode 1 and electrode 5.
Amplitude demodulation module 32 is to the signal S1 after carrying out the summation of self-test amplifierDOr S2DAmplitude discrimination processing is carried out, it is defeated later
Go out to AGC loop 36, AGC loop 36 compares the signal with given constant-amplitude signals, by closed loop control algorithm not
The disconnected amplitude for adjusting the drive signal for being applied to driven-mode makes resonant ring realize permanent width vibration；Phase demodulation modules 33 are to coming
Signal S1 after the summation of self-test amplifierDOr S2DCarry out phase demodulation processing, the later drive signal of output driving mode and detection
Signal S1DOr S2DPhase difference to phaselocked loop 37, phaselocked loop 37 compares the phase difference with 90 degree, passes through closed loop control algorithm
The constantly frequency of adjustment voltage controlled oscillator 38 so that phase difference is between the drive signal and detection signal that are applied on resonant ring
90 °, so as to which resonant ring be made to be vibrated in its resonant frequency；The output signal of AGC loop 36 is believed with the output of voltage controlled oscillator 38
Number through driven-mode modulator 41 modulation after, by the way that switching switch 30 is driven to act in the driving electrodes of driven-mode, make humorous
The ring permanent width in resonant frequency that shakes vibrates.Quadrature demodulation unit 35 sums afterwards to amplifier after testing (27) and obtains signal S1SOr
S2SOrthogonal signalling demodulation is carried out, is exported later to uncoupling loop 39, which with 0 value is compared, passed through by uncoupling loop
Closed loop control algorithm constantly adjustment is applied to the amplitude of the drive signal of sensed-mode, suppresses or eliminates by resonant ring minor deviations
Caused driven-mode is to the coupling influence of sensed-mode；Demodulation module 34 in the same direction, which sums afterwards to amplifier after testing (27), to be obtained
Signal S1SOr S2SSignal demodulation in the same direction is carried out, is exported later to angular velocity detection loop 40, angular velocity detection loop 40 passes through inspection
Displacement obtains the coriolis force F for causing vibration, drive signal sensed-mode caused by offset coriolis force of output generation-F
Vibration, wave filter 43 are filtered Coriolis force signal, obtain angular velocity vector Ω and export, wherein F=2m Ω × v, v represent resonance
The vibration velocity of ring, m represent the effective mass of resonant ring；The output signal of uncoupling loop 39 and angular velocity detection loop 40
Output signal after mode modulator 42, by the way that switching switch 30 is driven to act on the driving electrodes of sensed-mode, makes inspection after testing
The amplitude for surveying mode is 0.
Vibration (useful signal), coupling stiffness draw caused by the displacement of the detecting electrode detection of sensed-mode includes coriolis force
The vibration that rises is vibrated caused by Coupling Damping, vibrated caused by vibration and coriolis force wherein caused by coupling stiffness it is mutually orthogonal,
Its phase difference is pi/2, and vibration signal caused by coupling stiffness is extracted by quadrature demodulation unit, is carried out through uncoupling loop
Inhibit.Vibration caused by Coupling Damping and the same phase of vibration caused by coriolis force, will directly have an impact output, can not use letter
Number processing mode is detached, and can be detached by mode reversion.
Fig. 5 is work schedule schematic diagram of the present invention.Signal processing module is controlled by self calibration control module 31
Switching switch 29 and driving switching switch 30 are detected, gyroscope is made constantly to invert between the first mode and the second mode, and will
Output signal under adjacent two kinds of operating modes makes the difference, and realizes the online self calibration of zero bias of MEMS gyroscope, is as follows：
(1) signal processing module controls detection switching switch 29 and driving switching switch by self calibration control module 31
30, MEMS gyroscope is made to be operated in first mode, the detection signal of electrode 3 and electrode 7 passes through phase-locked loop and automatic gain control
Loop (AGC loop) processed, generates the driving voltage of driven-mode, acts on electrode 1 and electrode 5, and driven-mode is made to realize humorous
Vibration frequency perseverance width vibrates；The detection signal of electrode 4 and electrode 8 detects ring after Orthogonal Decomposition by uncoupling loop and angular speed
Road generates the driving voltage of sensed-mode, acts on electrode 2 and electrode 6, uncoupling loop cancellation driven-mode is to sensed-mode
Stiffness coupling, angular speed detection loop offset coriolis force caused by vibrate simultaneously realize angular speed closed loop detection, detection angle speed
Degree signal is denoted as A1=SF1×Ω+Bias1。
(2) Self-correc ting control module 31 realizes the reversion of drive module and detection module, and gyroscope is made to be operated in the second mould
Formula.The detection signal of electrode 4 and electrode 8 generates driven-mode after inverting by phase-locked loop and automatic gain control loop
Drive signal, and electrode 2 and electrode 6 are acted on, it realizes the driven-mode after reversion and is vibrated in resonant frequency perseverance width；Electrode 3
Detection signal with electrode 7, by uncoupling loop and angular speed detection loop, mould is detected after generating reversion after Orthogonal Decomposition
The driving voltage of state, and electrode 1 and electrode 5 are acted on, driven-mode is to the firm of sensed-mode after the reversion of uncoupling loop cancellation
Degree coupling, angular speed detection loop are vibrated caused by offsetting coriolis force and realize the closed loop detection of angular speed, detection angular speed letter
Number it is denoted as A2=SF2×Ω+Bias2。
(3) detection signal corresponding under two kinds of operation modes is made the difference, obtains the output letter of gyroscope after zero bias self compensation
Number be A=A1-A2=(SF1-SF2)×Ω+(Bias1-Bias2)。
Constant multiplier and zero bias are respectively after self compensation
SF=SF1-SF2=2SF1；Bias=Bias1-Bias2=0.
(4) it is inverted by the constantly control driving/sensed-mode of Self-correc ting control module 31, under adjacent two kinds of operating modes
The output signal of gyroscope after compensation is calculated by step 3 for output signal.
Known by the operation principle of ring gyroscope, before and after two mode reversions, zero bias value is equal, and constant multiplier is opposite.The party
Method be equally applicable to gyroscope be operated in that environment temperature is constant or gyroscope temperature-compensating after situation, in the electrifying startup stage
Based on driving/sensed-mode reversion, zero bias signal is extracted, zero bias signal when being worked normally as gyroscope, follow-up work
When stablizing, mode reversion is no longer carried out, after which is detached from the detection signal of sensed-mode, as effective angle is fast
Spend signal.The step (3) (4) could alternatively be, and zero bias signal is extracted in initial stage of operationIn normal work
Make in the stage, no longer to work alternatively in both modes, but be operated in first mode or second mode, from the angular speed of acquisition
The angular velocity signal output detected after zero bias as gyroscope is removed in signal.The starting stage can be according to actual application environment
Selection, electrifying startup selected as 10s, to overcome the influence of noise, the average value of zero bias signal that the electrifying startup stage is extracted
The zero bias signal of gyroscope during as normal work.
The content not being described in detail in description of the invention belongs to the known technology of those skilled in the art.
Claims (10)
1. a kind of self-alignment MEMS gyroscope of zero bias, which is characterized in that including resonant ring, signal processing module and compensation mould
Block；
It is circumferentially uniformly distributed first electrode clockwise to the 8th electrode on the outside of the resonant ring；In first mode, first electrode
(1) and driving electrodes that the 5th electrode (5) is driven-mode, the detection of third electrode (3) and the 7th electrode (7) for driven-mode
Electrode, second electrode (2) and the 6th electrode (6) are the driving electrodes of sensed-mode, and the 4th electrode (4) and the 8th electrode (8) are
The detecting electrode of sensed-mode；In second mode, second electrode (2) and the driving electrodes that the 6th electrode (6) is driven-mode, the
Four electrodes (4) and the 8th electrode (8) are the detecting electrodes of driven-mode, and first electrode (1) and the 5th electrode (5) are sensed-mode
Driving electrodes, third electrode (3) and the 7th electrode (7) are the detecting electrode of sensed-mode；
The signal processing module controls the resonant ring to work alternatively in first mode and second mode, is exported in first mode
Angular speed be A1, it is A in the angular speed of second mode output2；
The angular speed difference A of compensating module (44) the output both of which1-A2Angular velocity signal as gyroscope detection.
2. a kind of self-alignment MEMS gyroscope of zero bias, which is characterized in that including resonant ring, signal processing module and compensation mould
Block；
It is circumferentially uniformly distributed first electrode clockwise to the 8th electrode on the outside of the resonant ring；In first mode, first electrode
(1) and driving electrodes that the 5th electrode (5) is driven-mode, the detection of third electrode (3) and the 7th electrode (7) for driven-mode
Electrode, second electrode (2) and the 6th electrode (6) are the driving electrodes of sensed-mode, and the 4th electrode (4) and the 8th electrode (8) are
The detecting electrode of sensed-mode；In second mode, second electrode (2) and the driving electrodes that the 6th electrode (6) is driven-mode, the
Four electrodes (4) and the 8th electrode (8) are the detecting electrodes of driven-mode, and first electrode (1) and the 5th electrode (5) are sensed-mode
Driving electrodes, third electrode (3) and the 7th electrode (7) are the detecting electrode of sensed-mode；
The signal processing module controls the resonant ring to work alternatively in first mode and second mode, work in the starting stage
In first mode, the angular speed of output is A1, second mode is operated in, the angular speed of output is A2；In normal work stage, control
Resonant ring processed is only operated in first mode or second mode；
The compensating module (44) receives the angular speed of the signal processing module output, and the starting stage obtains zero bias signal and isRemove conduct after zero bias signal in normal work stage, the angular velocity signal exported from signal processing module
The angular velocity signal output of gyroscope detection.
3. the self-alignment MEMS gyroscope of zero bias as claimed in claim 1 or 2, which is characterized in that A1=SF1×Ω+Bias1,
A2=SF2×Ω+Bias2；Wherein SF1For the constant multiplier of MEMS gyroscope in the flrst mode, Bias1Exist for MEMS gyroscope
Zero bias signal under first mode, SF2For the constant multiplier of MEMS gyroscope under the second mode, Bias2Exist for MEMS gyroscope
Zero bias signal under second mode, wherein SF1=-SF2, Bias1=Bias2。
4. the self-alignment MEMS gyroscope of zero bias as claimed in claim 1 or 2, which is characterized in that
Detection signal control first electrode (1) and the 5th electricity in the flrst mode based on third electrode (3) and the 7th electrode (7)
The driving voltage of pole (5) vibrates resonant ring perseverance width at resonant frequency；Inspection based on the 4th electrode (4) and the 8th electrode (8)
The driving voltage of signal control second electrode (2) and the 6th electrode (6) is surveyed, offsets driven-mode to sensed-mode because coupling causes
Vibration and coriolis force caused by vibrate, and Output speed be A1。
Detection signal control second electrode (2) and the 6th electricity under the second mode based on the 4th electrode (4) and the 8th electrode (8)
The driving voltage of pole (6) vibrates resonant ring perseverance width at resonant frequency；Inspection based on third electrode (3) and the 7th electrode (7)
The driving voltage of signal control first electrode (1) and the 5th electrode (5) is surveyed, offsets driven-mode to sensed-mode because coupling causes
Vibration and coriolis force caused by vibrate, and Output speed be A2。
5. the self-alignment MEMS gyroscope of zero bias as claimed in claim 1 or 2, which is characterized in that the signal processing module
Including self calibration control module (31), amplitude demodulation module (32), phase demodulation modules (33), demodulation module in the same direction (34), just
Hand over demodulation module (35), automatic gain control loop (36), phase-locked loop (37), voltage controlled oscillator (38), uncoupling loop
(39), angular velocity detection loop (40), driven-mode modulator (41), sensed-mode modulator (42), wave filter (43) and benefit
Repay module (44)；
Self calibration control module (31) control third electrode (3) and the detection signal of the 7th electrode (7) output in the flrst mode
After testing signal S1 is obtained after amplifier (27) summationD, signal S1DThrough amplitude demodulation module (32) detected amplitude signal, by amplitude
Signal is exported to automatic gain control loop, and automatic gain control loop exports the first drive signal to control the amplitude signal
Reach the constant amplitude of setting；Signal S1DVibration frequency is detected, and export to phase-locked loop through phase demodulation modules (33)
(37), the output signal of phase-locked loop (37) adjustment voltage controlled oscillator (38) is as the second drive signal, to control the signal
S1DPhase difference with drive signal on resonant ring is 90 °, and the first drive signal and the second drive signal are through driven-mode modulator
(41) after modulating, as first electrode (1) and the driving voltage of the 5th electrode (5)；
Self calibration control module (31) controls the 4th electrode (4) and the detection signal of the 8th electrode (8) output in the flrst mode
Amplifier (27) sums obtain signal S1 afterwards after testingS, signal S1SAfter quadrature demodulation unit (35) carries out quadrature demodulation, through going
Coupling loop (39) is obtained with the signal reversed greatly such as couple as the output of third drive signal；Signal S1SThrough solving mode transfer in the same direction
Block (34) is carried out after demodulating in the same direction, is obtained through angular velocity detection loop (40) and is caused signal S1SCoriolis force vibrated in the same direction etc.
Big reversed signal obtains angle speed as fourth drive signal, wave filter (43) after being filtered with the big reversed signal such as coriolis force
It spends for A1；Third drive signal and fourth drive signal be after testing after mode modulator (42) modulation, as second electrode (2) and
The driving voltage of 6th electrode (6)；
Self calibration control module (31) controls the 4th electrode (4) and the detection signal of the 8th electrode (8) output under the second mode
After testing signal S2 is obtained after amplifier (27) summationD, signal S2DThrough amplitude demodulation module (32) detected amplitude signal, by amplitude
Signal is exported to automatic gain control loop, and automatic gain control loop exports the 5th drive signal to control the signal amplitude
Reach the constant amplitude of setting；Signal S2DVibration frequency is detected, and export to phase-locked loop through phase demodulation modules (33)
(37), the output signal of phase-locked loop (37) adjustment voltage controlled oscillator (38) is as the 6th drive signal, to control the signal
S2DPhase difference with drive signal on resonant ring is 90 °, and the 5th drive signal and the 6th drive signal are through driven-mode modulator
(41) after modulating, as second electrode (2) and the driving voltage of the 6th electrode (6)；
Self calibration control module (31) control third electrode (3) and the detection signal of the 7th electrode (7) output under the second mode
Amplifier (27) sums obtain signal S2 afterwards after testingS, signal S2SAfter quadrature demodulation unit (35) carries out quadrature demodulation, through going
Coupling loop (39) is obtained to be exported with the signal reversed greatly such as coupling as the 7th drive signal；Signal S2SThrough solving mode transfer in the same direction
Block (34) is carried out after demodulating in the same direction, is obtained through angular velocity detection loop (40) and is caused signal S2SCoriolis force vibrated in the same direction etc.
Big reversed signal obtains angle speed as the 8th drive signal, wave filter (43) after being filtered with the big reversed signal such as coriolis force
It spends for A2；7th drive signal and the 8th drive signal be after testing after mode modulator (42) modulation, as first electrode (1) and
The driving voltage of 5th electrode (5).
6. a kind of MEMS gyroscope zero bias method for self-calibrating, MEMS gyroscope includes resonant ring, and the resonant ring outside is circumferentially
First electrode is uniformly distributed to the 8th electrode clockwise；In first mode, first electrode (1) and the 5th electrode (5) are driving mould
The driving electrodes of state, third electrode (3) and the 7th electrode (7) are the detecting electrode of driven-mode, second electrode (2) and the 6th electricity
Pole (6) is the driving electrodes of sensed-mode, the 4th electrode (4) and the detecting electrode that the 8th electrode (8) is sensed-mode；Second
Pattern, second electrode (2) and the 6th electrode (6) are the driving electrodes of driven-mode, and the 4th electrode (4) and the 8th electrode (8) are
The detecting electrode of driven-mode, first electrode (1) and the 5th electrode (5) be sensed-mode driving electrodes, third electrode (3) and
7th electrode (7) is the detecting electrode of sensed-mode；
It is characterized in that, zero bias method for self-calibrating is as follows：The resonant ring is controlled to work alternatively in first mode and second mode,
It is A in the angular speed of first mode detection1, it is A in the angular speed of second mode detection2；Calculate the angular speed difference of both of which
A1-A2Angular velocity signal as gyroscope detection.
7. a kind of MEMS gyroscope zero bias method for self-calibrating, MEMS gyroscope includes resonant ring, and the resonant ring outside is circumferentially
First electrode is uniformly distributed to the 8th electrode clockwise；In first mode, first electrode (1) and the 5th electrode (5) are driving mould
The driving electrodes of state, third electrode (3) and the 7th electrode (7) are the detecting electrode of driven-mode, second electrode (2) and the 6th electricity
Pole (6) is the driving electrodes of sensed-mode, the 4th electrode (4) and the detecting electrode that the 8th electrode (8) is sensed-mode；Second
Pattern, second electrode (2) and the 6th electrode (6) are the driving electrodes of driven-mode, and the 4th electrode (4) and the 8th electrode (8) are
The detecting electrode of driven-mode, first electrode (1) and the 5th electrode (5) be sensed-mode driving electrodes, third electrode (3) and
7th electrode (7) is the detecting electrode of sensed-mode；
It is characterized in that, zero bias method for self-calibrating is as follows：
(1) resonant ring is controlled to work alternatively in first mode and second mode in the starting stage, in first mode detection
Angular speed is A1, the angular speed of second mode detection is A2；Obtaining zero bias signal isIn order to overcome the shadow of noise
It rings, using the average value of zero bias signal that the electrifying startup stage extracts as the zero bias signal of gyroscope during normal work.
(2) in normal work stage, control resonant ring is only operated in first mode or second mode；From the angular speed A of detection1Or
A2In remove the angular velocity signal output detected as gyroscope after zero bias.
8. MEMS gyroscope zero bias method for self-calibrating as claimed in claims 6 or 7, which is characterized in that
Detection signal control first electrode (1) and the 5th electricity in the flrst mode based on third electrode (3) and the 7th electrode (7)
The driving voltage of pole (5) vibrates resonant ring perseverance width at resonant frequency；Inspection based on the 4th electrode (4) and the 8th electrode (8)
The driving voltage of signal control second electrode (2) and the 6th electrode (6) is surveyed, offsets driven-mode to sensed-mode because coupling causes
Vibration and coriolis force caused by vibrate, and Output speed be A1。
Detection signal control second electrode (2) and the 6th electricity under the second mode based on the 4th electrode (4) and the 8th electrode (8)
The driving voltage of pole (6) vibrates resonant ring perseverance width at resonant frequency；Inspection based on third electrode (3) and the 7th electrode (7)
The driving voltage of signal control first electrode (1) and the 5th electrode (5) is surveyed, offsets driven-mode to sensed-mode because coupling causes
Vibration and coriolis force caused by vibrate, and Output speed be A2。
9. MEMS gyroscope zero bias method for self-calibrating as claimed in claims 6 or 7, which is characterized in that A1=SF1×Ω+
Bias1, A2=SF2×Ω+Bias2；Wherein SF1For the constant multiplier of MEMS gyroscope in the flrst mode, Bias1For MEMS tops
The zero bias signal of spiral shell instrument in the flrst mode, SF2For the constant multiplier of MEMS gyroscope under the second mode, Bias2For MEMS tops
The zero bias signal of spiral shell instrument under the second mode, wherein SF1=-SF2, Bias1=Bias2。
10. MEMS gyroscope zero bias method for self-calibrating as claimed in claim 7, which is characterized in that the starting stage selection
For electrifying startup 10s.
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