WO2021193597A1 - Azimuth/attitude angle measuring device - Google Patents

Azimuth/attitude angle measuring device Download PDF

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Publication number
WO2021193597A1
WO2021193597A1 PCT/JP2021/011897 JP2021011897W WO2021193597A1 WO 2021193597 A1 WO2021193597 A1 WO 2021193597A1 JP 2021011897 W JP2021011897 W JP 2021011897W WO 2021193597 A1 WO2021193597 A1 WO 2021193597A1
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WO
WIPO (PCT)
Prior art keywords
angular velocity
velocity sensor
control circuit
side control
vibration
Prior art date
Application number
PCT/JP2021/011897
Other languages
French (fr)
Japanese (ja)
Inventor
孝文 森口
Original Assignee
住友精密工業株式会社
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Filing date
Publication date
Application filed by 住友精密工業株式会社 filed Critical 住友精密工業株式会社
Priority to US17/913,251 priority Critical patent/US20230140455A1/en
Priority to AU2021243388A priority patent/AU2021243388B2/en
Priority to CA3175876A priority patent/CA3175876A1/en
Priority to EP21776668.2A priority patent/EP4130662A1/en
Publication of WO2021193597A1 publication Critical patent/WO2021193597A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
    • G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C17/00—Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
    • G01C17/02—Magnetic compasses
    • G01C17/28—Electromagnetic compasses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices

Definitions

  • the present invention relates to an azimuth / attitude angle measuring device, and more particularly to an azimuth / attitude angle measuring device including a plurality of angular velocity sensors.
  • an azimuth / attitude angle measuring device equipped with a plurality of angular velocity sensors is known.
  • the above-mentioned Japanese Patent Application Laid-Open No. 2009-115559 discloses an electronic device (azimuth angle / attitude angle measuring device) including a plurality of angular velocity sensors.
  • a ring-shaped element portion and a plurality of electrodes are arranged radially outside the ring-shaped element portion and in a circumferential shape.
  • the plurality of electrodes include a primary electrode and a secondary electrode.
  • An AC power source that generates primary vibration is connected to the ring-shaped element portion by applying an AC voltage to one of the primary electrode and the secondary electrode to one of the primary electrode and the secondary electrode. ing.
  • a detecting means for detecting the magnitude of an electric signal generated in the other of the primary electrode and the secondary electrode is connected to the other of the primary electrode and the secondary electrode. Then, when the primary vibration is generated in the ring-shaped element portion and the rotational motion is generated in the normal direction of the element portion, the secondary vibration corresponding to the angular velocity of the rotational motion is generated in the element portion. Then, the magnitude of the electric signal generated on the other of the primary electrode and the secondary electrode due to the secondary vibration is detected by the detection means connected to the other of the primary electrode and the secondary electrode. Will be done. Further, based on the magnitude of the detected electric signal, an AC voltage for canceling the secondary vibration is applied to one of the primary electrode and the secondary electrode. Then, the magnitude of the angular velocity is calculated based on the magnitude of the AC voltage for canceling the secondary vibration.
  • the angular velocity detected by the angular velocity sensor contains a bias component.
  • the bias component is caused by the asymmetry of the gyro element included in the angular velocity sensor. Therefore, in a conventional angular velocity sensor such as Japanese Patent Application Laid-Open No. 2009-115559, an electrode to which an AC power supply is connected (one of a primary electrode and a secondary electrode) and an electrode to which a detection means is connected are connected. It is configured to cancel the bias component by switching (the other of the primary electrode and the secondary electrode) and differentizing the outputs of the angular velocity sensors before and after the switching.
  • an electrode to which an AC power supply is connected one of a primary electrode and a secondary electrode
  • an electrode to which a detection means is connected are connected.
  • the bias component is canceled by switching (the other of the primary electrode and the secondary electrode) and differentizing the outputs of the angular velocity sensors before and after the switching. Therefore, in the azimuth angle attitude angle measuring device provided with a plurality of angular velocity sensors, in order to cancel the bias component of one angular velocity sensor, one of the electrodes (one of the primary electrode and the secondary electrode) to which the AC power supply is connected is connected.
  • the electrode to which the detection means is connected (the other of the primary electrode and the secondary electrode)
  • the power fluctuation of the AC power supply occurs.
  • the present invention has been made to solve the above-mentioned problems, and one object of the present invention is to accurately detect an angular velocity in each of a plurality of angular velocity sensors connected to a common power supply unit. It is to provide a vibrating angular velocity sensor capable of.
  • the azimuth angle attitude angle measuring device includes a first angular velocity sensor that detects an angular velocity around the first axis and a second axis in a direction different from the first axis.
  • the first angle speed sensor and the second angle speed sensor include a second angle speed sensor that detects the ambient angular speed, a power supply unit that supplies power to the first angle speed sensor and the second angle speed sensor, and a control unit.
  • a primary control circuit that has a closed control loop and the output of the closed control loop induces primary vibration in the transducer, and an angular velocity applied to the transducer that causes the transducer to generate 2
  • the function as a circuit can be exchanged, and the control unit is configured before and after exchanging the functions of the primary side control circuit and the secondary side control circuit in one of the first angle speed sensor and the second angle speed sensor.
  • the angular velocity for use in the calculation is detected in, the other of the first angular velocity sensor and the second angular velocity sensor does not perform control to switch the functions of the primary side control circuit and the secondary side control circuit. It is configured as follows.
  • the azimuth angle / attitude angle measuring device has the functions of the primary side control circuit and the secondary side control circuit in one of the first angular velocity sensor and the second angular velocity sensor. Control to switch the functions of the primary side control circuit and the secondary side control circuit in the other of the first angular velocity sensor and the second angular velocity sensor when the angular velocity to be used for the calculation is detected before and after the replacement of.
  • a control unit is provided so as not to perform the above.
  • the other of the first angular velocity sensor and the second angular velocity sensor detects the angular velocity to be used for the calculation
  • the other of the first angular velocity sensor and the second angular velocity sensor has the primary side control circuit and the secondary side. Since the functions of the control circuit are not exchanged, the power of the power supply unit provided in common does not change due to the exchange of the functions of the primary side control circuit and the secondary side control circuit. As a result, power is stably supplied from the power supply unit to one of the first angular velocity sensor and the second angular velocity sensor, so that the angular velocity for use in the calculation can be detected accurately. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors connected to the common power supply unit.
  • the control unit has the detection result of the angular velocity in which the secondary vibration of the vibrator is detected by the secondary side control circuit, and the primary side control circuit and the secondary side.
  • the angular velocity bias detected by the first angular velocity sensor and the second angular velocity sensor based on the detection result of the angular velocity in which the secondary vibration of the vibrator is detected by the primary side control circuit by exchanging the functions with the side control circuit. It is configured to perform an operation that cancels a component. With this configuration, the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor can be accurately calculated based on the angular velocity detected while the power is stably supplied from the power supply unit. can.
  • the control unit is configured to suspend the detection of the angular velocity for canceling the bias component of the angular velocity for a predetermined period before and after switching the functions of the primary side control circuit and the secondary side control circuit.
  • the angular velocity is detected to cancel the angular velocity bias component during the period when the power of the power supply unit fluctuates due to the replacement of the functions of the primary side control circuit and the secondary side control circuit. Is interrupted, so that it is possible to effectively suppress a decrease in the detection accuracy of the angular velocity for use in the calculation for canceling the bias component.
  • the control unit functions as a primary side control circuit and a secondary side control circuit in one of the first angular velocity sensor and the second angular velocity sensor.
  • Is configured to perform control for switching the functions of the primary side control circuit and the secondary side control circuit in the other of the first angular velocity sensor and the second angular velocity sensor in a predetermined period before and after the replacement.
  • control unit is configured so that the timing of switching the functions of the primary side control circuit and the secondary side control circuit in the first angular velocity sensor and the second angular velocity sensor is substantially the same.
  • a third angular velocity sensor including an oscillator and detecting an angular velocity around the first axis
  • the power supply unit includes a first angular velocity sensor and a second angular velocity sensor.
  • the control unit detects the angular velocity to be used for calculation in the third angular velocity sensor, the first angular velocity sensor.
  • the control is configured so that the functions of the primary side control circuit and the secondary side control circuit are not exchanged.
  • the third angular velocity sensor can also accurately detect the angular velocity to be used for calculation. Can be done.
  • the azimuth angle attitude angle measuring device has a first angular velocity sensor that detects an angular velocity around the first axis and a second angular velocity that detects an angular velocity around the second axis in a direction different from the first axis. It includes an angular velocity sensor, a power supply unit that supplies power to the first angular velocity sensor and the second angular velocity sensor, and a control unit.
  • the first angular velocity sensor and the second angular velocity sensor have an oscillator and a closed control loop. Then, the output of the closed control loop induces the primary vibration in the vibrator, and the closed control that detects the secondary vibration generated in the vibrator due to the angular velocity applied to the vibrator.
  • Each of the secondary control circuits having a loop is included, and the function of inducing the primary vibration and the function of detecting the secondary vibration are interchangeably configured, and the control unit includes the first angular velocity sensor and the second angular velocity sensor.
  • the first angular velocity sensor and the second angular velocity detects the angular velocity to be used for calculation before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration
  • the first angular velocity sensor and the second angular velocity The other of the sensors is configured not to perform control to switch between the function of inducing the primary vibration and the function of detecting the secondary vibration.
  • the azimuth angle / attitude angle measuring device detects the function of inducing the primary vibration and the secondary vibration in one of the first angular velocity sensor and the second angular velocity sensor.
  • the function of inducing the primary vibration and the function of detecting the secondary vibration in the other of the first angular velocity sensor and the second angular velocity sensor is replaced.
  • a control unit is provided so as not to perform control for exchanging and.
  • the control unit detects the detection result of the angular velocity at which the secondary vibration of the vibrator is detected, the function of inducing the primary vibration, and the secondary vibration. Based on the detection result of the angular velocity that detects the secondary vibration of the vibrator by exchanging the functions, the calculation is configured to cancel the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor. ing. With this configuration, the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor can be accurately calculated based on the angular velocity detected while the power is stably supplied from the power supply unit. can.
  • the control unit interrupts the detection of the angular velocity for canceling the bias component of the angular velocity for a predetermined period before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration. It is configured in. With this configuration, the angular velocity for canceling the bias component of the angular velocity during the period when the power fluctuation of the power supply unit occurs due to the replacement of the function of inducing the primary vibration and the function of detecting the secondary vibration. Since the detection of the angular velocity is interrupted, it is possible to effectively suppress a decrease in the detection accuracy of the angular velocity for use in the calculation for canceling the bias component.
  • the control unit detects the function of inducing the primary vibration and the secondary vibration in one of the first angular velocity sensor and the second angular velocity sensor. It is configured to control the switching between the function of inducing the primary vibration and the function of detecting the secondary vibration in the other of the first angular velocity sensor and the second angular velocity sensor in a predetermined period before and after the replacement of the functions. ing. With this configuration, the timing to switch the function of inducing the primary vibration of the first angular velocity sensor and the function of detecting the secondary vibration, the function of inducing the primary vibration of the second angular velocity sensor, and the secondary vibration can be obtained.
  • the timing for replacing the detection function can be performed during a predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted.
  • control unit is configured so that the timing of switching the function of inducing the primary vibration and the function of detecting the secondary vibration in the first angular velocity sensor and the second angular velocity sensor is substantially the same. ..
  • a third angular velocity sensor including a vibrator and detecting an angular velocity around the first axis
  • the power supply unit includes a first angular velocity sensor and a second angular velocity sensor.
  • the control unit detects the angular velocity to be used for calculation in the third angular velocity sensor, the first angular velocity sensor.
  • the third angular velocity sensor can also accurately detect the angular velocity to be used for calculation. Can be done.
  • the angular velocity can be accurately detected in each of the plurality of angular velocity sensors connected to the common power supply unit.
  • the azimuth angle attitude measuring device 100 is configured to detect the azimuth angle and the attitude angle. Specifically, the azimuth / attitude angle measuring device 100 detects angular velocities around the X-axis, Y-axis, and Z-axis that are orthogonal to each other, and based on the detected angular velocities, the three-dimensional azimuth and attitude angles. Is configured to detect.
  • the azimuth / attitude angle measuring device 100 includes a control unit 101, a power supply unit 102, an angular velocity sensor 103, an angular velocity sensor 104, and an angular velocity sensor 105.
  • the angular velocity sensor 103, the angular velocity sensor 104, and the angular velocity sensor 105 are configured to detect angular velocities around axes that intersect each other.
  • the angular velocity sensor 103 is configured to detect the angular velocity around the X-axis.
  • the angular velocity sensor 104 is configured to detect the angular velocity around the Y-axis.
  • the angular velocity sensor 105 is configured to detect the angular velocity around the Z axis. That is, the angular velocity sensor 103, the angular velocity sensor 104, and the angular velocity sensor 105 are configured to detect the angular velocities around the axes orthogonal to each other.
  • the angular velocity sensor 103 is an example of the "first angular velocity sensor” in the claims.
  • the angular velocity sensor 104 is an example of the "second angular velocity sensor” in the claims.
  • the angular velocity sensor 105 is an example of the "second angular velocity sensor” in the claims.
  • the control unit 101 is configured to control each unit of the azimuth / posture angle measuring device 100.
  • the control unit 101 includes a CPU (CENTRAL PROCESSING UNIT) and a memory.
  • the power supply unit 102 is configured to supply electric power to each unit of the azimuth angle attitude measuring device 100. Specifically, the power supply unit 102 is configured to supply electric power to the angular velocity sensors 103, 104, and 105. Further, the power supply unit 102 is configured to supply AC power to the angular velocity sensors 103, 104 and 105. The power supply unit 102 is configured to be supplied with electric power from an external power source or a battery provided in the azimuth / attitude angle measuring device 100. For example, the power supply unit 102 is a power conversion circuit that converts the supplied power. The power supply unit 102 includes a switching element, a capacitor, a diode, and the like.
  • each of the angular velocity sensors 103, 104, and 105 has a vibrator 11 and a closed control loop, and the output of the closed control loop induces a primary vibration in the vibrator 11. It includes a side control circuit 12 and a secondary side control circuit 13 having a closed control loop that detects secondary vibrations generated in the vibrator 11 due to the angular velocity applied to the vibrator 11.
  • the vibrator 11 includes a ring-shaped vibrator.
  • the primary side control circuit 12 of the angular velocity sensor 103 includes an amplifier circuit 21, a synchronous detection circuit 22, a loop filter 23, a modulation circuit 24, and a drive circuit 25. It includes a PLL (Phase Locked Loop) circuit (phase-locked loop) 26 and a reference signal generation circuit 27.
  • the oscillator 11, the amplifier circuit 21, the synchronous detection circuit 22, the loop filter 23, the modulation circuit 24, and the drive circuit 25 are connected in this order to form a closed control loop.
  • the loop filter 23 includes, for example, an integral filter.
  • FIG. 3 shows the configuration of the angular velocity sensor 103, the angular velocity sensors 104 and 105 also have the same configuration.
  • the secondary side control circuit 13 of the angular velocity sensor 103 includes an amplifier circuit 31, a synchronous detection circuit 32, an addition circuit 33, a loop filter 34, a modulation circuit 35, a drive circuit 36, and an amplifier circuit. 37 and is included.
  • the oscillator 11, the amplifier circuit 31, the synchronous detection circuit 32, the adder circuit 33, the loop filter 34, the modulation circuit 35, and the drive circuit 36 are connected in this order to form a closed control loop.
  • the adder circuit 33 is composed of a general addition / subtraction circuit using an operational amplifier.
  • the loop filter 34 includes, for example, an integral filter. Further, the output of the loop filter 34 is input to the amplifier circuit 37. Then, the signal output from the amplifier circuit 37 is output as the sensor output of the angular velocity sensors 103 (104, 105).
  • the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 have a function as the primary side control circuit 12 and the secondary side control circuit 13. It is configured so that the functions as can be exchanged.
  • a switch 41 is provided on the input side of the signal to the vibrator 11 and a switch 42 is provided on the output side of the signal to the vibrator 11 (output side of the amplifier circuit 21).
  • a switch 43 is provided on the input side of the signal to the vibrator 11, and a switch 44 is provided on the output side of the signal to the vibrator 11 (the output side of the amplifier circuit 31).
  • the switch 41, the switch 42, the switch 43, and the switch 44 are each configured to be able to switch between a state of being connected to the primary side control circuit 12 and a state of being connected to the secondary side control circuit 13. .
  • the angular velocity sensors 103 (104, 105) are configured so that the function of inducing the primary vibration and the function of detecting the secondary vibration can be interchanged.
  • the switch 41 and the switch 42 show the state of being connected to the primary side control circuit 12
  • the switch 43 and the switch 44 show the state of being connected to the secondary side control circuit 13.
  • the switch 41 and the switch 42 are switched so as to be connected to the secondary side control circuit 13
  • the switch 43 and the switch 44 are switched so as to be connected to the primary side control circuit 12, so that the primary side control circuit 12 is connected.
  • the function as the side control circuit 12 and the function as the secondary side control circuit 13 are interchanged with each other.
  • the angular velocity sensors 103 are provided with an addition / subtraction amount adjusting circuit 14 to which an output from the primary side control circuit 12 (output from the loop filter 23) is input.
  • the addition / subtraction amount adjusting circuit 14 adjusts the magnitude of the output of the loop filter 23 of the primary side control circuit 12 depending on the temperature, and adds the adjusted output (first offset value) to the secondary side control circuit 13. It is configured to be input to the circuit 33.
  • the addition amount of the first offset value is adjusted by dividing the voltage using a potentiometer (volume resistor) or the like.
  • the angular velocity sensors 103 (104, 105) are provided with an addition / subtraction amount adjusting circuit 15 to which a constant signal S1 independent of temperature is input.
  • the addition / subtraction amount adjusting circuit 15 is configured to adjust the magnitude of the constant signal S1 and input the adjusted constant signal S1 (second offset value) to the addition circuit 33 of the secondary side control circuit 13. ing.
  • the addition amount of a constant signal S1 is adjusted by dividing the voltage using a potentiometer (volume resistor) or the like.
  • the control unit 101 is used for calculation before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in any one of the angular velocity sensors 103 to 105.
  • the other angular velocity sensors of the angular velocity sensors 103 to 105 are configured not to perform control for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13. ing.
  • the angular velocity sensors 103 (104, 105) always detect the angular velocity when the power is supplied from the power supply unit 102 and are driven, and output a signal based on the detected angular velocity.
  • the control unit 101 is configured to calculate the attitude angle and the azimuth angle based on the signals output from the angular velocity sensors 103 (104, 105). Further, the control unit 101 is configured to perform an operation to calculate the bias component of the angular velocity sensor 103 (104, 105) based on the signal output from the angular velocity sensor 103 (104, 105).
  • the control unit 101 uses the angular velocity detected by the other angular velocity sensors 103 to 105 for calculation when the functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged in the angular velocity sensors 103 to 105. not present.
  • control unit 101 detects the angular velocity detection result in which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 103 (104, 105), and the primary of the angular velocity sensor 103 (104, 105).
  • the angular velocity sensor 103 (104) is based on the detection result of the angular velocity in which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 by exchanging the functions of the side control circuit 12 and the secondary side control circuit 13. , 105) is configured to perform an operation to cancel the bias component of the angular velocity detected. Twice
  • the control unit 101 detects the angular velocity at which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 103 during the period from time t1 to time t2 in FIG. 4A (A). get. Further, the control unit 101 detects (acquires) the angular velocity at which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 of the angular velocity sensor 103 during the period from time t4 to time t5 in FIG. 4 (A). .. Then, the control unit 101 calculates the bias component of the angular velocity sensor 103 based on the angular velocity acquired in the period from time t1 to time t2 and the angular velocity acquired in the period from time t4 to time t5.
  • control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 104 during the period from time t11 to time t12 in FIG. 4B for calculation. do. Further, the control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 of the angular velocity sensor 104 for calculation in the period from the time t14 to the time t15 in FIG. 4 (B). do.
  • control unit 101 calculates (calculates) the bias component of the angular velocity sensor 104 based on the angular velocity acquired in the period from time t11 to time t12 and the angular velocity acquired in the period from time t14 to time t15.
  • control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 105 during the period from time t21 to time t22 in FIG. 4C for calculation. do. Further, the control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 of the angular velocity sensor 105 for calculation in the period from the time t24 to the time t25 in FIG. 4C. do.
  • control unit 101 calculates (calculates) the bias component of the angular velocity sensor 105 based on the angular velocity acquired in the period from time t21 to time t22 and the angular velocity acquired in the period from time t24 to time t25.
  • control unit 101 receives the angular velocity of the angular velocity sensor 103 (104, 105) for a predetermined period before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 103 (104, 105). It is configured to interrupt the detection of the angular velocity to cancel the bias component of. Specifically, a predetermined period (time t2 to time t4) before and after the timing (time t3) for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 103 of FIG. 4 (A).
  • the control unit 101 interrupts the detection (acquisition for calculation) of the angular velocity for canceling the bias component of the angular velocity of the angular velocity sensors 104 and 105. Further, in a predetermined period (period from time t12 to time t14) before and after the timing (time t13) in which the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 104 of FIG. 4B are exchanged. , The control unit 101 interrupts the detection (acquisition for calculation) of the angular velocity for canceling the bias component of the angular velocity of the angular velocity sensors 103 and 105.
  • the control unit 101 interrupts the detection (acquisition for calculation) of the angular velocity for canceling the bias component of the angular velocity of the angular velocity sensors 103 and 104.
  • control unit 101 is used in the other angular velocity sensors 103 to 105 during a predetermined period before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in any of the angular velocity sensors 103 to 105. It is configured to perform control for exchanging the functions of the primary side control circuit 12 and the secondary side control circuit 13. Specifically, the control unit 101 has a predetermined period (time) before and after the timing (time t3) of switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 103 of FIG. 4 (A).
  • the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 104 and 105 are exchanged.
  • the control unit 101 has a predetermined period (time t12 to time) before and after the timing (time t13) for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 104 of FIG. 4 (B).
  • the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 and 105 are exchanged.
  • control unit 101 has a predetermined period (time t22 to time) before and after the timing (time t23) for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 105 of FIG. 4 (C). In the period of t24), the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 and 104 are exchanged.
  • control unit 101 is configured so that the timing of switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the angular velocity sensors 103, 104 and 105 is substantially simultaneous. That is, the control unit 101 sets the time t3 in FIG. 4 (A), the time t13 in FIG. 4 (B), and the time t23 in FIG. 4 (C) at the same timing, and sets the angular velocity sensors 103, 104, and 105. The functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged.
  • the angular velocity to be used for the calculation before and after the functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged is determined.
  • a control unit configured not to perform control for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the other angular velocity sensors among the angular velocity sensors 103 to 105 when detecting. Is provided.
  • the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the other angular velocity sensors 103 to 105 when any of the angular velocity sensors 103 to 105 detects the angular velocity to be used for the calculation, the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the other angular velocity sensors 103 to 105.
  • the power of the power supply unit 102 provided in common does not change due to the replacement of the functions of the primary side control circuit 12 and the secondary side control circuit 13.
  • the power supply unit 102 stably supplies electric power to the angular velocity sensors 103 to 105, so that the angular velocity for use in the calculation can be detected with high accuracy.
  • the angular velocity can be accurately detected in each of the plurality of angular velocity sensors 103 to 105 connected to the common power supply unit 102.
  • the control unit 101 has the detection result of the angular velocity in which the secondary vibration of the vibrator 11 is detected by the secondary side control circuit 13, and the primary side control circuits 12 and secondary.
  • the bias component of the angular velocity detected by the angular velocity sensors 103 to 105 based on the detection result of the angular velocity in which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 by exchanging the functions with the side control circuit 13. Is configured to perform an operation that cancels.
  • the bias component of the angular velocity detected by the angular velocity sensors 103 to 105 can be accurately calculated based on the angular velocity detected while the power is stably supplied from the power supply unit 102.
  • the control unit 101 cancels the bias component of the angular velocity for a predetermined period before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13. It is configured to interrupt the detection of the angular velocity of.
  • the angular velocity for canceling the angular velocity bias component can be detected during the period in which the power of the power supply unit 102 fluctuates due to the replacement of the functions of the primary side control circuit 12 and the secondary side control circuit 13. Since it is interrupted, it is possible to effectively suppress a decrease in the detection accuracy of the angular velocity for use in the calculation for canceling the bias component.
  • the control unit 101 is predetermined before and after the functions of the primary side control circuit 12 and the secondary side control circuit 13 in any of the angular velocity sensors 103 to 105 are exchanged.
  • the other angular velocity sensors 103 to 105 are configured to perform control in which the functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged.
  • the timing of switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 to 105 is performed during a predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted. be able to.
  • the angular velocity for canceling the bias component of the angular velocity is detected in parallel in a plurality of the angular velocity sensors 103 to 105, the angular velocity for use in the calculation can be detected with high accuracy.
  • control unit 101 is configured to switch the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the angular velocity sensors 103 to 105 substantially at the same time. Constitute. As a result, it is possible to minimize the predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted, so that the time for detecting the angular velocity for canceling the bias component becomes longer. It can be suppressed.
  • the vibrator 11 includes a ring type vibrator.
  • the ring-shaped vibrator has a symmetrical shape, the vibration mode by the primary side control circuit 12 and the vibration mode by the secondary side control circuit 13 are similar. As a result, it is not necessary to consider the influence of the difference in the vibration modes of the angular velocity sensors 103 to 105 including the ring type vibrator 11.
  • the function for inducing the primary vibration and the function for detecting the secondary vibration are used for calculation before and after switching.
  • the other angular velocity sensors among the angular velocity sensors 103 to 105 are configured not to perform control to switch the function of inducing the primary vibration and the function of detecting the secondary vibration.
  • a control unit is provided.
  • the power supply unit 102 stably supplies electric power to the angular velocity sensors 103 to 105, so that the angular velocity for use in the calculation can be detected with high accuracy. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors 103 to 105 connected to the common power supply unit 102.
  • the azimuth angle attitude angle measuring device 200 includes a control unit 101, a power supply unit 102, an angular velocity sensor 103a, an angular velocity sensor 103b, an angular velocity sensor 104a, an angular velocity sensor 104b, and an angular velocity sensor 105a. It includes an angular velocity sensor 105b.
  • the angular velocity sensors 103a and 103b, the angular velocity sensors 104a and 104b, and the angular velocity sensors 105a and 105b are configured to detect angular velocities around axes that intersect each other.
  • the angular velocity sensors 103a and 103b are configured to detect the angular velocity around the axis parallel to or coaxial with each other. Further, the angular velocity sensors 104a and 104b are configured to detect angular velocities around axes parallel to or coaxial with each other. Further, the angular velocity sensors 105a and 105b are configured to detect the angular velocity around the axis parallel to or coaxial with each other.
  • the angular velocity sensors 103a and 103b are configured to detect the angular velocity around the X-axis. Further, the angular velocity sensors 104a and 104b are configured to detect the angular velocity around the Y-axis. Further, the angular velocity sensors 105a and 105b are configured to detect the angular velocity around the Z axis. The angular velocity sensors 103a and 103b are arranged adjacent to each other. Further, the angular velocity sensors 104a and 104b are arranged adjacent to each other. Further, the angular velocity sensors 105a and 105b are arranged adjacent to each other.
  • the angular velocity sensor 103a is an example of the "first angular velocity sensor” in the claims. Further, the angular velocity sensor 103b is an example of the “third angular velocity sensor” in the claims. Further, the angular velocity sensor 104a is an example of the “second angular velocity sensor” in the claims. Further, the angular velocity sensor 105a is an example of the “second angular velocity sensor” in the claims.
  • the power supply unit 102 is configured to supply electric power to the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b. Further, the power supply unit 102 is configured to supply AC power to the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b.
  • the control unit 101 functions as the primary side control circuit 12 and the secondary side control circuit 13 in any one of the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b.
  • the primary side control circuit 12 and the secondary side It is configured so as not to perform control for exchanging the function with the control circuit 13.
  • the control unit 101 controls the angular velocity sensor 103a to switch the functions of the primary side control circuit 12 and the secondary side control circuit 13. Is configured not to do.
  • the control unit 101 detects the angular velocity based on the secondary vibration of the vibrator 11 by the secondary side control circuit 13 in a predetermined period by the angular velocity sensor 103a, and the primary side control circuit.
  • the functions of the 12 and the secondary side control circuit 13 are exchanged, and the primary side control circuit 12 is configured to perform a process of detecting an angular velocity based on the secondary vibration of the vibrator 11.
  • the oscillator 11 is operated by the secondary control circuit 13 of the angular velocity sensor 103a during a predetermined period from time t31 to time t32 and from time t34 to time t35.
  • a process of detecting the angular velocity based on the secondary vibration and a process of detecting the angular velocity based on the secondary vibration of the vibrator 11 by the primary side control circuit 12 of the angular velocity sensor 103a are performed.
  • control unit 101 is configured to control the angular velocity sensor 103b to perform a process of detecting the angular velocity in a predetermined period. Specifically, as shown in FIG. 7B, during a predetermined period from time t31 to time t32 and from time t34 to time t35, the oscillator 11 is operated by the secondary control circuit 13 of the angular velocity sensor 103b. A process for detecting the angular velocity based on the secondary vibration is performed.
  • control unit 101 has a bias component (B1 (t)) of the angular velocity sensor 103b based on the first detection result detected by the angular velocity sensor 103b in the predetermined period and the second detection result detected by the angular velocity sensor 103a in the predetermined period. )) Is configured to be calculated.
  • control unit 101 subtracts the value of the second detection result detected by the angular velocity sensor 103a in the predetermined period from the value of the first detection result detected by the angular velocity sensor 103b in the predetermined period, thereby causing the bias component of the angular velocity sensor 103b. Is configured to calculate.
  • the predetermined period includes a first period (a period from time t31 to time t32) in which the secondary side control circuit 13 detects the angular velocity based on the secondary vibration of the vibrator 11, and the primary side control circuit 12
  • the first period and the second period are the same length of time. As shown in FIG. 7, each of the first period and the second period has a length of time T.
  • the first detection result is an integral value of the angular velocity detected by the angular velocity sensor 103b in a predetermined period.
  • the second detection result is an integral value of the angular velocity detected by the angular velocity sensor 103a in a predetermined period.
  • the predetermined period is a period in which the bias component of the angular velocity sensor 103a is substantially constant.
  • the predetermined period has a length of about several seconds to several tens of seconds.
  • the predetermined period is a period in which the influence of the temperature change can be ignored and it can be assumed that the bias component of the angular velocity sensor 103a does not change substantially.
  • the integral value I1 of the first detection result in the predetermined period (first period from time t31 to time t32 and second period from time t34 to time t35) shown in FIG. 7B is given by the equation (1). It is expressed as.
  • the angular velocity ⁇ 1 (t) detected by the secondary control circuit 13 of the angular velocity sensor 103b is the angular velocity (true angular velocity) ⁇ 0 (t) generated by the motion (movement) shown in FIG. 7A and the angular velocity sensor 103b. It is expressed as in Eq. (2) using the bias B1 (t).
  • the integrated value I2 of the second detection result in the predetermined period (the first period from the time t31 to the time t32 and the second period from the time t34 to the time t35) shown in FIG. 7C is expressed by the formula (C). It is expressed as 4).
  • the integrated value is subtracted in consideration of the fact that ⁇ 2 (t) is inverted with respect to the bias component.
  • the angular velocity ⁇ 2 (t) detected by the secondary side control circuit 13 of the angular velocity sensor 103a and the angular velocity ⁇ 2 (t) detected by the primary side control circuit 12 are the angular velocities generated by the motion (movement) shown in FIG. 7 (A).
  • the true angular velocity) ⁇ 0 (t) and the bias B2 (t) of the angular velocity sensor 103a they are expressed as equations (5) and (6), respectively.
  • equation (6) of the second period from the time t34 to the time t35 ⁇ 0 (t) is inverted with respect to the bias component, so that a minus is applied.
  • the bias B1 (t) of the angular velocity sensor 103b and the bias B2 (t) of the angular velocity sensor 103a are Since the amount of change over time is negligible (because it is constant), it can be assumed that Eqs. (9) and (10) hold.
  • B1 is the bias value of the angular velocity sensor 103b in the first period and the second period
  • B2 is the bias value of the angular velocity sensor 103a in the first period and the second period.
  • the bias value B1 of the angular velocity sensor 103b is calculated by dividing (I1-I2) by 2T.
  • the calculated bias value B1 is used for detecting the angular velocity by the angular velocity sensor 103b. For example, it is used as an observation update of the Kalman filter.
  • the equation is performed during the period in which the function of the angular velocity sensor 103a as the primary side control circuit 12 and the function of the secondary side control circuit 13 are exchanged and the angular velocity is measured to calculate the bias value B1. It suffices if the relationship between (9) and equation (10) is established. Therefore, for example, even if the time interval (t36-t35) up to the time t36, which is the start point of the next processing, is large and B1 changes, it can be similarly corrected by the processing from the next time t36. However, it is always preferable that the time interval (t36-t35) is sufficiently small in order to reduce the change in B1.
  • the control unit 101 uses the angular velocity sensor 103b based on the first detection result detected by the angular velocity sensor 103b in the first predetermined period and the second detection result detected by the angular velocity sensor 103a in the first predetermined period. Calculate the bias component. Further, the control unit 101 calculates the bias component of the angular velocity sensor 103a by using the angular velocity detected by the angular velocity sensor 103a in the second predetermined period and the bias component of the angular velocity sensor 103b. Then, the control unit 101 alternately repeats these controls. That is, the bias component B1 of the angular velocity sensor 103b is corrected by calculating the first bias component.
  • the corrected B1 is used to calculate ⁇ of B2, which is a bias component of the angular velocity sensor 103a. Then, in the next cycle, the corrected ⁇ is used to correct B1 which is a bias component of the angular velocity sensor 103b. After that, these processes are repeated alternately.
  • the process of calculating and canceling the bias components of the angular velocity sensors 104a and 104b is the same as the process of calculating and canceling the bias components of the angular velocity sensors 103a and 103b. Further, the process of calculating and canceling the bias components of the angular velocity sensors 105a and 105b is the same as the process of calculating and canceling the bias components of the angular velocity sensors 103a and 103b.
  • the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b are stably supplied with electric power from the power supply unit 102, so that the angular velocity is used for calculation. Can be detected accurately. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b connected to the common power supply unit 102.
  • the angular velocity sensor 103a when the angular velocity sensor 103b detects the angular velocity to be used for the calculation, the angular velocity sensor 103a has the primary side control circuits 12 and 2. It is configured so that the control for exchanging the function with the next control circuit 13 is not performed. Thereby, in the configuration provided with the angular velocity sensor 103a and the angular velocity sensor 103b for detecting the angular velocity around the same axis, the angular velocity for use in the calculation can be accurately detected by the angular velocity sensor 103b as well.
  • the vibrator may have a symmetrical shape, and a disc type, a cup type (wine glass type), an octagonal type, or the like may be used.
  • a closed control loop is configured by an oscillator, an amplifier circuit, a synchronous detection circuit, a loop filter, a modulation circuit and a drive circuit.
  • the control loop may be configured by a configuration other than the configuration including an amplifier circuit, a synchronous detection circuit, a loop filter, a modulation circuit, and a drive circuit.
  • an integral filter is used as the loop filter
  • a loop filter other than the integral filter may be used.
  • the angular velocity sensors 103b (104b, 105b) (third angular velocity sensor) that detect the angular velocity around the axis parallel to the angular velocity sensors 103a (104a, 105a) (first angular velocity sensor) are also angular velocities. Similar to the sensors 103a (104a, 105a) (first angular velocity sensor), an example is shown in which the function of the primary side control circuit and the function of the secondary side control circuit can be interchanged. Not limited. In the present invention, the function of the primary side control circuit of the third angular velocity sensor and the function of the secondary side control circuit may be fixed (may not be replaced).
  • a plurality of angular velocity sensors for detecting angular velocities around the three axes of the X-axis, the Y-axis, and the Z-axis that are orthogonal to each other are provided. Is not limited to this.
  • a plurality of angular velocity sensors that detect angular velocities around two axes in different directions may be provided.
  • a plurality of angular velocity sensors may be provided to detect the angular velocities around the four axes in different directions.
  • the axes of the angular velocities detected by the plurality of angular velocity sensors may be in different directions that are not orthogonal to each other.
  • the present invention is not limited to this.
  • three or more angular velocity sensors for detecting angular velocities around parallel axes may be provided, a plurality of angular velocity sensors are provided for some of the axial velocities, and one angular velocity sensor is provided for other axial velocities. You may.
  • Oscillator 11 Oscillator 12 Primary side control circuit 13 Secondary side control circuit 100 Azimuth angle attitude angle measuring device 101 Control unit 102 Power supply unit 103, 103a Angular velocity sensor (1st angular velocity sensor) 103b Angular velocity sensor (3rd angular velocity sensor) 104, 104a Angular velocity sensor (second angular velocity sensor) 105, 105a Angular velocity sensor (second angular velocity sensor)

Abstract

An azimuth/attitude angle measuring device (100) is provided with a first angular velocity sensor (103), a second angular velocity sensor (104), a power supply unit (102), and a control unit (101). The control unit is configured such that when an angular velocity, to be used in calculations before and after switching between the functions of a primary-side control circuit (12) and a secondary-side control circuit (13), is detected by one of the first angular velocity sensor and the second angular velocity sensor, the control unit does not perform control for switching between the functions of a primary-side control circuit and a secondary-side control circuit for the other of the first angular velocity sensor and the second angular velocity sensor.

Description

方位角姿勢角計測装置Azimuth attitude angle measuring device
　この発明は、方位角姿勢角計測装置に関し、特に、複数の角速度センサを備える方位角姿勢角計測装置に関する。 The present invention relates to an azimuth / attitude angle measuring device, and more particularly to an azimuth / attitude angle measuring device including a plurality of angular velocity sensors.
　従来、複数の角速度センサを備える方位角姿勢角計測装置が知られている。たとえば、特開２００９－１１５５５９号公報に開示されている。 Conventionally, an azimuth / attitude angle measuring device equipped with a plurality of angular velocity sensors is known. For example, it is disclosed in Japanese Patent Application Laid-Open No. 2009-115559.
　上記特開２００９－１１５５５９号公報には、複数の角速度センサを備える電子機器（方位角姿勢角計測装置）が開示されている。この電子機器の角速度センサは、リング状のエレメント部と、リング状のエレメント部の径方向外側でかつ周状に複数の電極とが配置されている。複数の電極は、一次電極と二次電極とを含む。一次電極と二次電極とのうちの一方には、一次電極と二次電極とのうちの一方に交流電圧を印加することにより、リング状のエレメント部に一次振動を発生させる交流電源が接続されている。また、一次電極と二次電極とのうちの他方には、一次電極と二次電極とのうちの他方に発生する電気信号の大きさを検出する検出手段が接続されている。そして、リング状のエレメント部に一次振動が発生している状態で、エレメント部の法線方向回りに回転運動が発生すると、回転運動の角速度に応じた二次振動がエレメント部に発生する。そして、一次電極と二次電極とのうちの他方に接続されている検出手段によって、二次振動に起因して一次電極と二次電極とのうちの他方に発生する電気信号の大きさが検出される。また、検出された電気信号の大きさに基づいて、二次振動を打ち消すための交流電圧が一次電極と二次電極とのうちの一方に印加される。そして、二次振動を打ち消すための交流電圧の大きさに基づいて角速度の大きさが演算される。 The above-mentioned Japanese Patent Application Laid-Open No. 2009-115559 discloses an electronic device (azimuth angle / attitude angle measuring device) including a plurality of angular velocity sensors. In the angular velocity sensor of this electronic device, a ring-shaped element portion and a plurality of electrodes are arranged radially outside the ring-shaped element portion and in a circumferential shape. The plurality of electrodes include a primary electrode and a secondary electrode. An AC power source that generates primary vibration is connected to the ring-shaped element portion by applying an AC voltage to one of the primary electrode and the secondary electrode to one of the primary electrode and the secondary electrode. ing. Further, a detecting means for detecting the magnitude of an electric signal generated in the other of the primary electrode and the secondary electrode is connected to the other of the primary electrode and the secondary electrode. Then, when the primary vibration is generated in the ring-shaped element portion and the rotational motion is generated in the normal direction of the element portion, the secondary vibration corresponding to the angular velocity of the rotational motion is generated in the element portion. Then, the magnitude of the electric signal generated on the other of the primary electrode and the secondary electrode due to the secondary vibration is detected by the detection means connected to the other of the primary electrode and the secondary electrode. Will be done. Further, based on the magnitude of the detected electric signal, an AC voltage for canceling the secondary vibration is applied to one of the primary electrode and the secondary electrode. Then, the magnitude of the angular velocity is calculated based on the magnitude of the AC voltage for canceling the secondary vibration.
　また、上記特開２００９－１１５５５９号公報に記載のような従来の角速度センサでは、角速度センサが検出する角速度にはバイアス成分が含まれている。バイアス成分は、角速度センサに含まれるジャイロ素子の非対称性などに起因して生じる。そこで、上記特開２００９－１１５５５９号公報のような従来の角速度センサは、交流電源が接続されている電極（一次電極と二次電極とのうちの一方）と、検出手段が接続されている電極（一次電極と二次電極とのうちの他方）とを切り替え、切り替えられた前後の角速度センサの出力を差分することにより、バイアス成分をキャンセルするように構成されている。 Further, in the conventional angular velocity sensor as described in Japanese Patent Application Laid-Open No. 2009-115559, the angular velocity detected by the angular velocity sensor contains a bias component. The bias component is caused by the asymmetry of the gyro element included in the angular velocity sensor. Therefore, in a conventional angular velocity sensor such as Japanese Patent Application Laid-Open No. 2009-115559, an electrode to which an AC power supply is connected (one of a primary electrode and a secondary electrode) and an electrode to which a detection means is connected are connected. It is configured to cancel the bias component by switching (the other of the primary electrode and the secondary electrode) and differentizing the outputs of the angular velocity sensors before and after the switching.
特開２００９－１１５５５９号公報JP-A-2009-115559
　上記特開２００９－１１５５５９号公報に記載のような従来の角速度センサでは、交流電源が接続されている電極（一次電極と二次電極とのうちの一方）と、検出手段が接続されている電極（一次電極と二次電極とのうちの他方）とを切り替え、切り替えられた前後の角速度センサの出力を差分することにより、バイアス成分をキャンセルする。このため、複数の角速度センサを備える方位角姿勢角計測装置では、１つの角速度センサのバイアス成分をキャンセルするために、交流電源が接続されている電極（一次電極と二次電極とのうちの一方）と、検出手段が接続されている電極（一次電極と二次電極とのうちの他方）とを切り替えた場合に、交流電源の電力変動が生じる。この場合、共通の交流電源に接続された他の角速度センサは、交流電源の電力変動に起因して、角速度を精度よく検出することが困難である。そこで、複数の角速度センサの各々において、角速度を精度よく検出することが可能な振動型角速度センサが望まれている。 In a conventional angular velocity sensor as described in Japanese Patent Application Laid-Open No. 2009-115559, an electrode to which an AC power supply is connected (one of a primary electrode and a secondary electrode) and an electrode to which a detection means is connected are connected. The bias component is canceled by switching (the other of the primary electrode and the secondary electrode) and differentizing the outputs of the angular velocity sensors before and after the switching. Therefore, in the azimuth angle attitude angle measuring device provided with a plurality of angular velocity sensors, in order to cancel the bias component of one angular velocity sensor, one of the electrodes (one of the primary electrode and the secondary electrode) to which the AC power supply is connected is connected. ) And the electrode to which the detection means is connected (the other of the primary electrode and the secondary electrode), the power fluctuation of the AC power supply occurs. In this case, it is difficult for other angular velocity sensors connected to the common AC power supply to accurately detect the angular velocity due to the power fluctuation of the AC power supply. Therefore, there is a demand for a vibration type angular velocity sensor capable of accurately detecting the angular velocity in each of the plurality of angular velocity sensors.
　この発明は、上記のような課題を解決するためになされたものであり、この発明の１つの目的は、共通の電源部に接続された複数の角速度センサの各々において、角速度を精度よく検出することが可能な振動型角速度センサを提供することである。 The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to accurately detect an angular velocity in each of a plurality of angular velocity sensors connected to a common power supply unit. It is to provide a vibrating angular velocity sensor capable of.
　上記目的を達成するために、この発明の第１の局面による方位角姿勢角計測装置は、第１軸線回りの角速度を検出する第１角速度センサと、第１軸線とは異なる方向の第２軸線回りの角速度を検出する第２角速度センサと、第１角速度センサおよび第２角速度センサに電力を供給する電源部と、制御部と、を備え、第１角速度センサおよび第２角速度センサは、振動子と、閉じた制御ループを有し、閉じた制御ループの出力が振動子に１次振動を誘起させる１次側制御回路と、振動子に印加される角速度に起因して振動子に発生する２次振動を検出する閉じた制御ループを有する２次側制御回路と、を各々含み、１次側制御回路と２次側制御回路とは、１次側制御回路としての機能と、２次側制御回路としての機能とを入れ替え可能に構成されており、制御部は、第１角速度センサおよび第２角速度センサのうちの一方において、１次側制御回路と２次側制御回路との機能を入れ替える前後で演算に用いるための角速度を検出している場合に、第１角速度センサおよび第２角速度センサのうちの他方において、１次側制御回路と２次側制御回路との機能を入れ替える制御を行わないように構成されている。 In order to achieve the above object, the azimuth angle attitude angle measuring device according to the first aspect of the present invention includes a first angular velocity sensor that detects an angular velocity around the first axis and a second axis in a direction different from the first axis. The first angle speed sensor and the second angle speed sensor include a second angle speed sensor that detects the ambient angular speed, a power supply unit that supplies power to the first angle speed sensor and the second angle speed sensor, and a control unit. A primary control circuit that has a closed control loop and the output of the closed control loop induces primary vibration in the transducer, and an angular velocity applied to the transducer that causes the transducer to generate 2 Each includes a secondary side control circuit having a closed control loop for detecting the next vibration, and the primary side control circuit and the secondary side control circuit have a function as a primary side control circuit and a secondary side control. The function as a circuit can be exchanged, and the control unit is configured before and after exchanging the functions of the primary side control circuit and the secondary side control circuit in one of the first angle speed sensor and the second angle speed sensor. When the angular velocity for use in the calculation is detected in, the other of the first angular velocity sensor and the second angular velocity sensor does not perform control to switch the functions of the primary side control circuit and the secondary side control circuit. It is configured as follows.
　この発明の第１の局面による方位角姿勢角計測装置は、上記のように、第１角速度センサおよび第２角速度センサのうちの一方において、１次側制御回路と２次側制御回路との機能を入れ替える前後で演算に用いるための角速度を検出している場合に、第１角速度センサおよび第２角速度センサのうちの他方において、１次側制御回路と２次側制御回路との機能を入れ替える制御を行わないように構成された制御部を設ける。これにより、第１角速度センサおよび第２角速度センサの一方において演算に用いるための角速度を検出している場合に、第１角速度センサおよび第２角速度センサの他方において１次側制御回路と２次側制御回路との機能が入れ替わることがないので、共通に設けられた電源部の電力が、１次側制御回路と２次側制御回路との機能が入れ替えにより変動することがない。その結果、第１角速度センサおよび第２角速度センサの一方に、電源部から安定して電力が供給されるので、演算に用いるための角速度を精度よく検出することができる。これにより、共通の電源部に接続された複数の角速度センサの各々において、角速度を精度よく検出することができる。 As described above, the azimuth angle / attitude angle measuring device according to the first aspect of the present invention has the functions of the primary side control circuit and the secondary side control circuit in one of the first angular velocity sensor and the second angular velocity sensor. Control to switch the functions of the primary side control circuit and the secondary side control circuit in the other of the first angular velocity sensor and the second angular velocity sensor when the angular velocity to be used for the calculation is detected before and after the replacement of. A control unit is provided so as not to perform the above. As a result, when one of the first angular velocity sensor and the second angular velocity sensor detects the angular velocity to be used for the calculation, the other of the first angular velocity sensor and the second angular velocity sensor has the primary side control circuit and the secondary side. Since the functions of the control circuit are not exchanged, the power of the power supply unit provided in common does not change due to the exchange of the functions of the primary side control circuit and the secondary side control circuit. As a result, power is stably supplied from the power supply unit to one of the first angular velocity sensor and the second angular velocity sensor, so that the angular velocity for use in the calculation can be detected accurately. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors connected to the common power supply unit.
　上記第１の局面による方位角姿勢角計測装置において、好ましくは、制御部は、２次側制御回路により振動子の２次振動を検出した角速度の検出結果と、１次側制御回路と２次側制御回路との機能を入れ替えて、１次側制御回路により振動子の２次振動を検出した角速度の検出結果と、に基づいて、第１角速度センサおよび第２角速度センサにより検出する角速度のバイアス成分をキャンセルする演算を行うように構成されている。このように構成すれば、電源部から安定して電力が供給された状態で検出した角速度に基づいて、第１角速度センサおよび第２角速度センサにより検出する角速度のバイアス成分を精度よく算出することができる。 In the azimuth angle / attitude angle measuring device according to the first aspect, preferably, the control unit has the detection result of the angular velocity in which the secondary vibration of the vibrator is detected by the secondary side control circuit, and the primary side control circuit and the secondary side. The angular velocity bias detected by the first angular velocity sensor and the second angular velocity sensor based on the detection result of the angular velocity in which the secondary vibration of the vibrator is detected by the primary side control circuit by exchanging the functions with the side control circuit. It is configured to perform an operation that cancels a component. With this configuration, the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor can be accurately calculated based on the angular velocity detected while the power is stably supplied from the power supply unit. can.
　この場合、好ましくは、制御部は、１次側制御回路と２次側制御回路との機能を入れ替える前後の所定期間は、角速度のバイアス成分をキャンセルするための角速度の検出を中断するように構成されている。このように構成すれば、１次側制御回路と２次側制御回路との機能の入れ替えに起因する電源部の電力の変動が発生する期間において、角速度のバイアス成分をキャンセルするための角速度の検出が中断されるので、バイアス成分をキャンセルする演算に用いるための角速度の検出精度が低下するのを効果的に抑制することができる。 In this case, preferably, the control unit is configured to suspend the detection of the angular velocity for canceling the bias component of the angular velocity for a predetermined period before and after switching the functions of the primary side control circuit and the secondary side control circuit. Has been done. With this configuration, the angular velocity is detected to cancel the angular velocity bias component during the period when the power of the power supply unit fluctuates due to the replacement of the functions of the primary side control circuit and the secondary side control circuit. Is interrupted, so that it is possible to effectively suppress a decrease in the detection accuracy of the angular velocity for use in the calculation for canceling the bias component.
　上記第１の局面による方位角姿勢角計測装置において、好ましくは、制御部は、第１角速度センサおよび第２角速度センサのうちの一方における、１次側制御回路と２次側制御回路との機能を入れ替える前後の所定期間において、第１角速度センサおよび第２角速度センサのうちの他方における、１次側制御回路と２次側制御回路との機能を入れ替える制御を行うように構成されている。このように構成すれば、第１角速度センサの１次側制御回路と２次側制御回路との機能を入れ替えるタイミングと、第２角速度センサの１次側制御回路と２次側制御回路との機能を入れ替えるタイミングとを、角速度のバイアス成分をキャンセルするための角速度の検出が中断される所定期間に行うことができる。これにより、第１角速度センサおよび第２角速度センサの両方において並行して角速度のバイアス成分をキャンセルするための角速度の検出をする場合に、演算に用いるための角速度を各々精度よく検出することができる。 In the azimuth angle attitude angle measuring device according to the first aspect, preferably, the control unit functions as a primary side control circuit and a secondary side control circuit in one of the first angular velocity sensor and the second angular velocity sensor. Is configured to perform control for switching the functions of the primary side control circuit and the secondary side control circuit in the other of the first angular velocity sensor and the second angular velocity sensor in a predetermined period before and after the replacement. With this configuration, the timing of switching the functions of the primary side control circuit and the secondary side control circuit of the first angular velocity sensor, and the functions of the primary side control circuit and the secondary side control circuit of the second angular velocity sensor. Can be replaced with a predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted. As a result, when both the first angular velocity sensor and the second angular velocity sensor detect the angular velocity for canceling the bias component of the angular velocity in parallel, the angular velocity to be used for the calculation can be detected with high accuracy. ..
　この場合、好ましくは、制御部は、第１角速度センサおよび第２角速度センサにおける、１次側制御回路と２次側制御回路との機能を入れ替えるタイミングを略同時にするように構成されている。このように構成すれば、角速度のバイアス成分をキャンセルするための角速度の検出が中断される所定期間を最小限にすることができるので、バイアス成分をキャンセルするための角速度の検出のための時間が長くなるのを抑制することができる。 In this case, preferably, the control unit is configured so that the timing of switching the functions of the primary side control circuit and the secondary side control circuit in the first angular velocity sensor and the second angular velocity sensor is substantially the same. With this configuration, it is possible to minimize the predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted, so that the time for detecting the angular velocity for canceling the bias component can be minimized. It is possible to suppress the lengthening.
　上記第１の局面による方位角姿勢角計測装置において、好ましくは、振動子を含み、第１軸線回りの角速度を検出する第３角速度センサをさらに備え、電源部は、第１角速度センサおよび第２角速度センサに加えて、第３角速度センサに電力を供給するように構成されており、制御部は、第３角速度センサにおいて、演算に用いるための角速度を検出している場合に、第１角速度センサにおいて、１次側制御回路と２次側制御回路との機能を入れ替える制御を行わないように構成されている。このように構成すれば、同じ第１軸線回りの角速度を検出する第１角速度センサおよび第３角速度センサを設けた構成において、演算に用いるための角速度を第３角速度センサにおいても精度よく検出することができる。 In the azimuth angle attitude angle measuring device according to the first aspect, preferably, a third angular velocity sensor including an oscillator and detecting an angular velocity around the first axis is further provided, and the power supply unit includes a first angular velocity sensor and a second angular velocity sensor. In addition to the angular velocity sensor, it is configured to supply power to the third angular velocity sensor, and the control unit detects the angular velocity to be used for calculation in the third angular velocity sensor, the first angular velocity sensor. In, the control is configured so that the functions of the primary side control circuit and the secondary side control circuit are not exchanged. With this configuration, in a configuration provided with a first angular velocity sensor and a third angular velocity sensor that detect the angular velocity around the same first axis, the third angular velocity sensor can also accurately detect the angular velocity to be used for calculation. Can be done.
　この発明の第２の局面による方位角姿勢角計測装置は、第１軸線回りの角速度を検出する第１角速度センサと、第１軸線とは異なる方向の第２軸線回りの角速度を検出する第２角速度センサと、第１角速度センサおよび第２角速度センサに電力を供給する電源部と、制御部と、を備え、第１角速度センサおよび第２角速度センサは、振動子と、閉じた制御ループを有し、閉じた制御ループの出力が振動子に１次振動を誘起させる１次側制御回路と、振動子に印加される角速度に起因して振動子に発生する２次振動を検出する閉じた制御ループを有する２次側制御回路と、を各々含み、１次振動を誘起する機能と２次振動を検出する機能とを入れ替え可能に構成されており、制御部は、第１角速度センサおよび第２角速度センサのうちの一方において、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える前後で演算に用いるための角速度を検出している場合に、第１角速度センサおよび第２角速度センサのうちの他方において、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える制御を行わないように構成されている。 The azimuth angle attitude angle measuring device according to the second aspect of the present invention has a first angular velocity sensor that detects an angular velocity around the first axis and a second angular velocity that detects an angular velocity around the second axis in a direction different from the first axis. It includes an angular velocity sensor, a power supply unit that supplies power to the first angular velocity sensor and the second angular velocity sensor, and a control unit. The first angular velocity sensor and the second angular velocity sensor have an oscillator and a closed control loop. Then, the output of the closed control loop induces the primary vibration in the vibrator, and the closed control that detects the secondary vibration generated in the vibrator due to the angular velocity applied to the vibrator. Each of the secondary control circuits having a loop is included, and the function of inducing the primary vibration and the function of detecting the secondary vibration are interchangeably configured, and the control unit includes the first angular velocity sensor and the second angular velocity sensor. When one of the angular velocity sensors detects the angular velocity to be used for calculation before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration, the first angular velocity sensor and the second angular velocity The other of the sensors is configured not to perform control to switch between the function of inducing the primary vibration and the function of detecting the secondary vibration.
　この発明の第２の局面による方位角姿勢角計測装置は、上記のように、第１角速度センサおよび第２角速度センサのうちの一方において、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える前後で演算に用いるための角速度を検出している場合に、第１角速度センサおよび第２角速度センサのうちの他方において、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える制御を行わないように構成された制御部を設ける。これにより、第１角速度センサおよび第２角速度センサの一方において演算に用いるための角速度を検出している場合に、第１角速度センサおよび第２角速度センサの他方において１次振動を誘起する機能と２次振動を検出する機能とが入れ替わることがないので、共通に設けられた電源部の電力が、１次振動を誘起する機能と２次振動を検出する機能との入れ替えにより変動することがない。その結果、第１角速度センサおよび第２角速度センサの一方に、電源部から安定して電力が供給されるので、演算に用いるための角速度を精度よく検出することができる。これにより、共通の電源部に接続された複数の角速度センサの各々において、角速度を精度よく検出することができる。 As described above, the azimuth angle / attitude angle measuring device according to the second aspect of the present invention detects the function of inducing the primary vibration and the secondary vibration in one of the first angular velocity sensor and the second angular velocity sensor. When the angular velocity to be used for calculation is detected before and after the function is replaced, the function of inducing the primary vibration and the function of detecting the secondary vibration in the other of the first angular velocity sensor and the second angular velocity sensor. A control unit is provided so as not to perform control for exchanging and. As a result, when one of the first angular velocity sensor and the second angular velocity sensor detects the angular velocity to be used for the calculation, the function of inducing the primary vibration in the other of the first angular velocity sensor and the second angular velocity sensor and 2 Since the function of detecting the secondary vibration is not replaced, the power of the power supply unit provided in common does not fluctuate due to the replacement of the function of inducing the primary vibration and the function of detecting the secondary vibration. As a result, power is stably supplied from the power supply unit to one of the first angular velocity sensor and the second angular velocity sensor, so that the angular velocity for use in the calculation can be detected accurately. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors connected to the common power supply unit.
　上記第２の局面による方位角姿勢角計測装置において、好ましくは、制御部は、振動子の２次振動を検出した角速度の検出結果と、１次振動を誘起する機能と２次振動を検出する機能とを入れ替えて振動子の２次振動を検出した角速度の検出結果と、に基づいて、第１角速度センサおよび第２角速度センサにより検出する角速度のバイアス成分をキャンセルする演算を行うように構成されている。このように構成すれば、電源部から安定して電力が供給された状態で検出した角速度に基づいて、第１角速度センサおよび第２角速度センサにより検出する角速度のバイアス成分を精度よく算出することができる。 In the azimuth angle attitude angle measuring device according to the second aspect, preferably, the control unit detects the detection result of the angular velocity at which the secondary vibration of the vibrator is detected, the function of inducing the primary vibration, and the secondary vibration. Based on the detection result of the angular velocity that detects the secondary vibration of the vibrator by exchanging the functions, the calculation is configured to cancel the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor. ing. With this configuration, the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor can be accurately calculated based on the angular velocity detected while the power is stably supplied from the power supply unit. can.
　この場合、好ましくは、制御部は、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える前後の所定期間は、角速度のバイアス成分をキャンセルするための角速度の検出を中断するように構成されている。このように構成すれば、１次振動を誘起する機能と２次振動を検出する機能との入れ替えに起因する電源部の電力の変動が発生する期間において、角速度のバイアス成分をキャンセルするための角速度の検出が中断されるので、バイアス成分をキャンセルする演算に用いるための角速度の検出精度が低下するのを効果的に抑制することができる。 In this case, preferably, the control unit interrupts the detection of the angular velocity for canceling the bias component of the angular velocity for a predetermined period before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration. It is configured in. With this configuration, the angular velocity for canceling the bias component of the angular velocity during the period when the power fluctuation of the power supply unit occurs due to the replacement of the function of inducing the primary vibration and the function of detecting the secondary vibration. Since the detection of the angular velocity is interrupted, it is possible to effectively suppress a decrease in the detection accuracy of the angular velocity for use in the calculation for canceling the bias component.
　上記第２の局面による方位角姿勢角計測装置において、好ましくは、制御部は、第１角速度センサおよび第２角速度センサのうちの一方における、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える前後の所定期間において、第１角速度センサおよび第２角速度センサのうちの他方における、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える制御を行うように構成されている。このように構成すれば、第１角速度センサの１次振動を誘起する機能と２次振動を検出する機能とを入れ替えるタイミングと、第２角速度センサの１次振動を誘起する機能と２次振動を検出する機能とを入れ替えるタイミングとを、角速度のバイアス成分をキャンセルするための角速度の検出が中断される所定期間に行うことができる。これにより、第１角速度センサおよび第２角速度センサの両方において並行して角速度のバイアス成分をキャンセルするための角速度の検出をする場合に、演算に用いるための角速度を各々精度よく検出することができる。 In the azimuth angle attitude angle measuring device according to the second aspect, preferably, the control unit detects the function of inducing the primary vibration and the secondary vibration in one of the first angular velocity sensor and the second angular velocity sensor. It is configured to control the switching between the function of inducing the primary vibration and the function of detecting the secondary vibration in the other of the first angular velocity sensor and the second angular velocity sensor in a predetermined period before and after the replacement of the functions. ing. With this configuration, the timing to switch the function of inducing the primary vibration of the first angular velocity sensor and the function of detecting the secondary vibration, the function of inducing the primary vibration of the second angular velocity sensor, and the secondary vibration can be obtained. The timing for replacing the detection function can be performed during a predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted. As a result, when both the first angular velocity sensor and the second angular velocity sensor detect the angular velocity for canceling the bias component of the angular velocity in parallel, the angular velocity to be used for the calculation can be detected with high accuracy. ..
　この場合、好ましくは、制御部は、第１角速度センサおよび第２角速度センサにおける、１次振動を誘起する機能と２次振動を検出する機能とを入れ替えるタイミングを略同時にするように構成されている。このように構成すれば、角速度のバイアス成分をキャンセルするための角速度の検出が中断される所定期間を最小限にすることができるので、バイアス成分をキャンセルするための角速度の検出のための時間が長くなるのを抑制することができる。 In this case, preferably, the control unit is configured so that the timing of switching the function of inducing the primary vibration and the function of detecting the secondary vibration in the first angular velocity sensor and the second angular velocity sensor is substantially the same. .. With this configuration, it is possible to minimize the predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted, so that the time for detecting the angular velocity for canceling the bias component can be minimized. It is possible to suppress the lengthening.
　上記第２の局面による方位角姿勢角計測装置において、好ましくは、振動子を含み、第１軸線回りの角速度を検出する第３角速度センサをさらに備え、電源部は、第１角速度センサおよび第２角速度センサに加えて、第３角速度センサに電力を供給するように構成されており、制御部は、第３角速度センサにおいて、演算に用いるための角速度を検出している場合に、第１角速度センサにおいて、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える制御を行わないように構成されている。このように構成すれば、同じ第１軸線回りの角速度を検出する第１角速度センサおよび第３角速度センサを設けた構成において、演算に用いるための角速度を第３角速度センサにおいても精度よく検出することができる。 In the azimuth angle attitude angle measuring device according to the second aspect, preferably, a third angular velocity sensor including a vibrator and detecting an angular velocity around the first axis is further provided, and the power supply unit includes a first angular velocity sensor and a second angular velocity sensor. In addition to the angular velocity sensor, it is configured to supply power to the third angular velocity sensor, and the control unit detects the angular velocity to be used for calculation in the third angular velocity sensor, the first angular velocity sensor. In the above, the function of inducing the primary vibration and the function of detecting the secondary vibration are not controlled to be exchanged. With this configuration, in a configuration provided with a first angular velocity sensor and a third angular velocity sensor that detect the angular velocity around the same first axis, the third angular velocity sensor can also accurately detect the angular velocity to be used for calculation. Can be done.
　本発明によれば、上記のように、共通の電源部に接続された複数の角速度センサの各々において、角速度を精度よく検出することができる。 According to the present invention, as described above, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors connected to the common power supply unit.
第１実施形態による方位角姿勢角計測装置の構成を示したブロック図である。It is a block diagram which showed the structure of the azimuth angle attitude angle measuring apparatus by 1st Embodiment. 第１実施形態による方位角姿勢角計測装置の複数の角速度センサを示した斜視図である。It is a perspective view which showed the plurality of angular velocity sensors of the azimuth angle attitude angle measuring apparatus by 1st Embodiment. 第１実施形態による角速度センサの回路構成を示したブロック図である。It is a block diagram which showed the circuit structure of the angular velocity sensor by 1st Embodiment. 第１実施形態による複数の角速度センサの１次側制御回路の機能と２次側制御回路の機能との入れ替えタイミングを説明するための図である。It is a figure for demonstrating the exchange timing of the function of the primary side control circuit of a plurality of angular velocity sensors and the function of a secondary side control circuit by 1st Embodiment. 第２実施形態による方位角姿勢角計測装置の構成を示したブロック図である。It is a block diagram which showed the structure of the azimuth angle attitude angle measuring apparatus by 2nd Embodiment. 第２実施形態による方位角姿勢角計測装置の複数の角速度センサを示した斜視図である。It is a perspective view which showed the plurality of angular velocity sensors of the azimuth angle attitude angle measuring apparatus by 2nd Embodiment. 第２実施形態による角速度センサのバイアスの算出を説明するための図である。It is a figure for demonstrating the calculation of the bias of the angular velocity sensor by 2nd Embodiment.
　以下、本発明の実施形態を図面に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
（第１実施形態）
　図１～図４を参照して、第１実施形態による方位角姿勢角計測装置１００の構成について説明する。 (First Embodiment)
The configuration of the azimuth angle attitude angle measuring device 100 according to the first embodiment will be described with reference to FIGS. 1 to 4.
　方位角姿勢角計測装置１００は、方位角および姿勢角を検出するように構成されている。具体的には、方位角姿勢角計測装置１００は、互いに直交するＸ軸、Ｙ軸およびＺ軸周りの角速度をそれぞれ検出して、検出した角速度に基づいて、３次元的な方位角および姿勢角を検出するように構成されている。 The azimuth angle attitude measuring device 100 is configured to detect the azimuth angle and the attitude angle. Specifically, the azimuth / attitude angle measuring device 100 detects angular velocities around the X-axis, Y-axis, and Z-axis that are orthogonal to each other, and based on the detected angular velocities, the three-dimensional azimuth and attitude angles. Is configured to detect.
　方位角姿勢角計測装置１００は、図１に示すように、制御部１０１と、電源部１０２と、角速度センサ１０３と、角速度センサ１０４と、角速度センサ１０５と、を備えている。角速度センサ１０３、角速度センサ１０４および角速度センサ１０５は、互いに交差する軸線回りの角速度を検出するように構成されている。具体的には、図２に示すように、角速度センサ１０３は、Ｘ軸周りの角速度を検出するように構成されている。また、角速度センサ１０４は、Ｙ軸周りの角速度を検出するように構成されている。また、角速度センサ１０５は、Ｚ軸周りの角速度を検出するように構成されている。つまり、角速度センサ１０３、角速度センサ１０４および角速度センサ１０５は、互いに直交する軸線回りの角速度を検出するように構成されている。なお、角速度センサ１０３は、請求の範囲の「第１角速度センサ」の一例である。また、角速度センサ１０４は、請求の範囲の「第２角速度センサ」の一例である。また、角速度センサ１０５は、請求の範囲の「第２角速度センサ」の一例である。 As shown in FIG. 1, the azimuth / attitude angle measuring device 100 includes a control unit 101, a power supply unit 102, an angular velocity sensor 103, an angular velocity sensor 104, and an angular velocity sensor 105. The angular velocity sensor 103, the angular velocity sensor 104, and the angular velocity sensor 105 are configured to detect angular velocities around axes that intersect each other. Specifically, as shown in FIG. 2, the angular velocity sensor 103 is configured to detect the angular velocity around the X-axis. Further, the angular velocity sensor 104 is configured to detect the angular velocity around the Y-axis. Further, the angular velocity sensor 105 is configured to detect the angular velocity around the Z axis. That is, the angular velocity sensor 103, the angular velocity sensor 104, and the angular velocity sensor 105 are configured to detect the angular velocities around the axes orthogonal to each other. The angular velocity sensor 103 is an example of the "first angular velocity sensor" in the claims. Further, the angular velocity sensor 104 is an example of the "second angular velocity sensor" in the claims. Further, the angular velocity sensor 105 is an example of the "second angular velocity sensor" in the claims.
　制御部１０１は、方位角姿勢角計測装置１００の各部を制御するように構成されている。制御部１０１は、ＣＰＵ（ＣＥＮＴＲＡＬ　ＰＲＯＣＥＳＳＩＮＧ　ＵＮＩＴ）と、メモリとを含んでいる。 The control unit 101 is configured to control each unit of the azimuth / posture angle measuring device 100. The control unit 101 includes a CPU (CENTRAL PROCESSING UNIT) and a memory.
　電源部１０２は、方位角姿勢角計測装置１００の各部に電力を供給するように構成されている。具体的には、電源部１０２は、角速度センサ１０３、１０４および１０５に電力を供給するように構成されている。また、電源部１０２は、角速度センサ１０３、１０４および１０５に交流電力を供給するように構成されている。電源部１０２は、外部の電力源または方位角姿勢角計測装置１００に設けられたバッテリから電力が供給されるように構成されている。たとえば、電源部１０２は、供給された電力を変換する電力変換回路である。電源部１０２は、スイッチング素子、コンデンサ、ダイオードなどを有している。 The power supply unit 102 is configured to supply electric power to each unit of the azimuth angle attitude measuring device 100. Specifically, the power supply unit 102 is configured to supply electric power to the angular velocity sensors 103, 104, and 105. Further, the power supply unit 102 is configured to supply AC power to the angular velocity sensors 103, 104 and 105. The power supply unit 102 is configured to be supplied with electric power from an external power source or a battery provided in the azimuth / attitude angle measuring device 100. For example, the power supply unit 102 is a power conversion circuit that converts the supplied power. The power supply unit 102 includes a switching element, a capacitor, a diode, and the like.
　図１に示すように、角速度センサ１０３、１０４および１０５の各々は、振動子１１と、閉じた制御ループを有し、閉じた制御ループの出力が振動子１１に１次振動を誘起させる１次側制御回路１２と、振動子１１に印加される角速度に起因して振動子１１に発生する２次振動を検出する閉じた制御ループを有する２次側制御回路１３と、を含んでいる。振動子１１は、リング型の振動子を含んでいる。 As shown in FIG. 1, each of the angular velocity sensors 103, 104, and 105 has a vibrator 11 and a closed control loop, and the output of the closed control loop induces a primary vibration in the vibrator 11. It includes a side control circuit 12 and a secondary side control circuit 13 having a closed control loop that detects secondary vibrations generated in the vibrator 11 due to the angular velocity applied to the vibrator 11. The vibrator 11 includes a ring-shaped vibrator.
　図３に示すように、角速度センサ１０３（１０４、１０５）の１次側制御回路１２は、増幅回路２１と、同期検波回路２２と、ループフィルタ２３と、変調回路２４と、駆動回路２５と、ＰＬＬ（Ｐｈａｓｅ　Ｌｏｃｋｅｄ　Ｌｏｏｐ）回路（位相同期回路）２６と、基準信号生成回路２７とを含んでいる。そして、振動子１１、増幅回路２１、同期検波回路２２、ループフィルタ２３、変調回路２４および駆動回路２５が、この順で接続されており、閉じた制御ループを構成している。ループフィルタ２３は、たとえば積分フィルタを含んでいる。なお、図３では、角速度センサ１０３の構成について示しているが、角速度センサ１０４および１０５も同様の構成である。 As shown in FIG. 3, the primary side control circuit 12 of the angular velocity sensor 103 (104, 105) includes an amplifier circuit 21, a synchronous detection circuit 22, a loop filter 23, a modulation circuit 24, and a drive circuit 25. It includes a PLL (Phase Locked Loop) circuit (phase-locked loop) 26 and a reference signal generation circuit 27. The oscillator 11, the amplifier circuit 21, the synchronous detection circuit 22, the loop filter 23, the modulation circuit 24, and the drive circuit 25 are connected in this order to form a closed control loop. The loop filter 23 includes, for example, an integral filter. Although FIG. 3 shows the configuration of the angular velocity sensor 103, the angular velocity sensors 104 and 105 also have the same configuration.
　角速度センサ１０３（１０４、１０５）の２次側制御回路１３は、増幅回路３１と、同期検波回路３２と、加算回路３３と、ループフィルタ３４と、変調回路３５と、駆動回路３６と、増幅回路３７とを含んでいる。そして、振動子１１、増幅回路３１、同期検波回路３２、加算回路３３、ループフィルタ３４、変調回路３５および駆動回路３６が、この順で接続されており、閉じた制御ループを構成している。加算回路３３は、オペアンプを用いた一般的な加減算回路により構成されている。また、ループフィルタ３４は、たとえば積分フィルタを含んでいる。また、ループフィルタ３４の出力が、増幅回路３７に入力される。そして、増幅回路３７から出力された信号が、角速度センサ１０３（１０４、１０５）のセンサ出力として、出力される。 The secondary side control circuit 13 of the angular velocity sensor 103 (104, 105) includes an amplifier circuit 31, a synchronous detection circuit 32, an addition circuit 33, a loop filter 34, a modulation circuit 35, a drive circuit 36, and an amplifier circuit. 37 and is included. The oscillator 11, the amplifier circuit 31, the synchronous detection circuit 32, the adder circuit 33, the loop filter 34, the modulation circuit 35, and the drive circuit 36 are connected in this order to form a closed control loop. The adder circuit 33 is composed of a general addition / subtraction circuit using an operational amplifier. Further, the loop filter 34 includes, for example, an integral filter. Further, the output of the loop filter 34 is input to the amplifier circuit 37. Then, the signal output from the amplifier circuit 37 is output as the sensor output of the angular velocity sensors 103 (104, 105).
　ここで、本実施形態では、角速度センサ１０３（１０４、１０５）の１次側制御回路１２と２次側制御回路１３とは、１次側制御回路１２としての機能と、２次側制御回路１３としての機能を入れ替え可能に構成されている。具体的には、１次側制御回路１２において、振動子１１に対する信号の入力側にスイッチ４１、および、振動子１１に対する信号の出力側（増幅回路２１の出力側）にスイッチ４２が設けられている。また、２次側制御回路１３において、振動子１１に対する信号の入力側にスイッチ４３、および、振動子１１に対する信号の出力側（増幅回路３１の出力側）にスイッチ４４が設けられている。スイッチ４１、スイッチ４２、スイッチ４３、および、スイッチ４４は、各々、１次側制御回路１２に接続される状態と、２次側制御回路１３に接続される状態とを切り替え可能に構成されている。つまり、角速度センサ１０３（１０４、１０５）は、１次振動を誘起する機能と２次振動を検出する機能とを入れ替え可能に構成されている。 Here, in the present embodiment, the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 (104, 105) have a function as the primary side control circuit 12 and the secondary side control circuit 13. It is configured so that the functions as can be exchanged. Specifically, in the primary side control circuit 12, a switch 41 is provided on the input side of the signal to the vibrator 11 and a switch 42 is provided on the output side of the signal to the vibrator 11 (output side of the amplifier circuit 21). There is. Further, in the secondary side control circuit 13, a switch 43 is provided on the input side of the signal to the vibrator 11, and a switch 44 is provided on the output side of the signal to the vibrator 11 (the output side of the amplifier circuit 31). The switch 41, the switch 42, the switch 43, and the switch 44 are each configured to be able to switch between a state of being connected to the primary side control circuit 12 and a state of being connected to the secondary side control circuit 13. .. That is, the angular velocity sensors 103 (104, 105) are configured so that the function of inducing the primary vibration and the function of detecting the secondary vibration can be interchanged.
　図３では、スイッチ４１およびスイッチ４２は、１次側制御回路１２に接続された状態を示しており、スイッチ４３およびスイッチ４４は、２次側制御回路１３に接続された状態を示している。また、スイッチ４１およびスイッチ４２が、２次側制御回路１３に接続されるように切り替えられ、スイッチ４３およびスイッチ４４が、１次側制御回路１２に接続されるように切り替えられることにより、１次側制御回路１２としての機能と、２次側制御回路１３としての機能とが互いに入れ替えられる。 In FIG. 3, the switch 41 and the switch 42 show the state of being connected to the primary side control circuit 12, and the switch 43 and the switch 44 show the state of being connected to the secondary side control circuit 13. Further, the switch 41 and the switch 42 are switched so as to be connected to the secondary side control circuit 13, and the switch 43 and the switch 44 are switched so as to be connected to the primary side control circuit 12, so that the primary side control circuit 12 is connected. The function as the side control circuit 12 and the function as the secondary side control circuit 13 are interchanged with each other.
　また、角速度センサ１０３（１０４、１０５）には、１次側制御回路１２からの出力（ループフィルタ２３からの出力）が入力される加減算量調整回路１４が設けられている。加減算量調整回路１４は、温度に依存する１次側制御回路１２のループフィルタ２３の出力の大きさを調整して、調整した出力（第１オフセット値）を、２次側制御回路１３の加算回路３３に入力するように構成されている。たとえば、加減算量調整回路１４において、ポテンショメータ（ボリューム抵抗）などを用いて分圧することにより、第１オフセット値の加算量の調整が行われる。 Further, the angular velocity sensors 103 (104, 105) are provided with an addition / subtraction amount adjusting circuit 14 to which an output from the primary side control circuit 12 (output from the loop filter 23) is input. The addition / subtraction amount adjusting circuit 14 adjusts the magnitude of the output of the loop filter 23 of the primary side control circuit 12 depending on the temperature, and adds the adjusted output (first offset value) to the secondary side control circuit 13. It is configured to be input to the circuit 33. For example, in the addition / subtraction amount adjustment circuit 14, the addition amount of the first offset value is adjusted by dividing the voltage using a potentiometer (volume resistor) or the like.
　また、角速度センサ１０３（１０４、１０５）には、温度に依存しない一定の信号Ｓ１が入力される加減算量調整回路１５が設けられている。加減算量調整回路１５は、一定の信号Ｓ１の大きさを調整して、調整した一定の信号Ｓ１（第２オフセット値）を、２次側制御回路１３の加算回路３３に入力するように構成されている。たとえば、加減算量調整回路１５において、ポテンショメータ（ボリューム抵抗）などを用いて分圧することにより、一定の信号Ｓ１の加算量の調整が行われる。 Further, the angular velocity sensors 103 (104, 105) are provided with an addition / subtraction amount adjusting circuit 15 to which a constant signal S1 independent of temperature is input. The addition / subtraction amount adjusting circuit 15 is configured to adjust the magnitude of the constant signal S1 and input the adjusted constant signal S1 (second offset value) to the addition circuit 33 of the secondary side control circuit 13. ing. For example, in the addition / subtraction amount adjustment circuit 15, the addition amount of a constant signal S1 is adjusted by dividing the voltage using a potentiometer (volume resistor) or the like.
　ここで、第１実施形態では、制御部１０１は、角速度センサ１０３～１０５のうちのいずれかにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後で演算に用いるための角速度を検出している場合に、角速度センサ１０３～１０５のうちの他の角速度センサにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行わないように構成されている。 Here, in the first embodiment, the control unit 101 is used for calculation before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in any one of the angular velocity sensors 103 to 105. When the angular velocity of the above is detected, the other angular velocity sensors of the angular velocity sensors 103 to 105 are configured not to perform control for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13. ing.
　ここで、角速度センサ１０３（１０４、１０５）は、電源部１０２から電力が供給されて駆動されている場合には、常に角速度を検出し、検出した角速度に基づく信号を出力している。制御部１０１は、角速度センサ１０３（１０４、１０５）から出力される信号に基づいて、姿勢角、方位角を演算するように構成されている。また、制御部１０１は、角速度センサ１０３（１０４、１０５）から出力される信号に基づいて、角速度センサ１０３（１０４、１０５）のバイアス成分を算出する演算を行うように構成されている。制御部１０１は、角速度センサ１０３～１０５において、１次側制御回路１２と２次側制御回路１３との機能を入れ替えている場合に、他の角速度センサ１０３～１０５において検出した角速度を演算に用いない。 Here, the angular velocity sensors 103 (104, 105) always detect the angular velocity when the power is supplied from the power supply unit 102 and are driven, and output a signal based on the detected angular velocity. The control unit 101 is configured to calculate the attitude angle and the azimuth angle based on the signals output from the angular velocity sensors 103 (104, 105). Further, the control unit 101 is configured to perform an operation to calculate the bias component of the angular velocity sensor 103 (104, 105) based on the signal output from the angular velocity sensor 103 (104, 105). The control unit 101 uses the angular velocity detected by the other angular velocity sensors 103 to 105 for calculation when the functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged in the angular velocity sensors 103 to 105. not present.
　また、制御部１０１は、角速度センサ１０３（１０４、１０５）の２次側制御回路１３により振動子１１の２次振動を検出した角速度の検出結果と、角速度センサ１０３（１０４、１０５）の１次側制御回路１２と２次側制御回路１３との機能を入れ替えて、１次側制御回路１２により振動子１１の２次振動を検出した角速度の検出結果と、に基づいて、角速度センサ１０３（１０４、１０５）により検出する角速度のバイアス成分をキャンセルする演算を行うように構成されている。　 Further, the control unit 101 detects the angular velocity detection result in which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 103 (104, 105), and the primary of the angular velocity sensor 103 (104, 105). The angular velocity sensor 103 (104) is based on the detection result of the angular velocity in which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 by exchanging the functions of the side control circuit 12 and the secondary side control circuit 13. , 105) is configured to perform an operation to cancel the bias component of the angular velocity detected. Twice
　具体的には、制御部１０１は、図４（Ａ）の時間ｔ１から時間ｔ２の期間において、角速度センサ１０３の２次側制御回路１３により振動子１１の２次振動を検出した角速度を検出（取得）する。また、制御部１０１は、図４（Ａ）の時間ｔ４から時間ｔ５の期間において、角速度センサ１０３の１次側制御回路１２により振動子１１の２次振動を検出した角速度を検出（取得）する。そして、制御部１０１は、時間ｔ１から時間ｔ２の期間において取得した角速度と、時間ｔ４から時間ｔ５の期間において取得した角速度と、に基づいて、角速度センサ１０３のバイアス成分を算出する。 Specifically, the control unit 101 detects the angular velocity at which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 103 during the period from time t1 to time t2 in FIG. 4A (A). get. Further, the control unit 101 detects (acquires) the angular velocity at which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 of the angular velocity sensor 103 during the period from time t4 to time t5 in FIG. 4 (A). .. Then, the control unit 101 calculates the bias component of the angular velocity sensor 103 based on the angular velocity acquired in the period from time t1 to time t2 and the angular velocity acquired in the period from time t4 to time t5.
　また、制御部１０１は、図４（Ｂ）の時間ｔ１１から時間ｔ１２の期間において、角速度センサ１０４の２次側制御回路１３により振動子１１の２次振動を検出した角速度を演算のために取得する。また、制御部１０１は、図４（Ｂ）の時間ｔ１４から時間ｔ１５の期間において、角速度センサ１０４の１次側制御回路１２により振動子１１の２次振動を検出した角速度を演算のために取得する。そして、制御部１０１は、時間ｔ１１から時間ｔ１２の期間において取得した角速度と、時間ｔ１４から時間ｔ１５の期間において取得した角速度と、に基づいて、角速度センサ１０４のバイアス成分を算出（演算）する。 Further, the control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 104 during the period from time t11 to time t12 in FIG. 4B for calculation. do. Further, the control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 of the angular velocity sensor 104 for calculation in the period from the time t14 to the time t15 in FIG. 4 (B). do. Then, the control unit 101 calculates (calculates) the bias component of the angular velocity sensor 104 based on the angular velocity acquired in the period from time t11 to time t12 and the angular velocity acquired in the period from time t14 to time t15.
　また、制御部１０１は、図４（Ｃ）の時間ｔ２１から時間ｔ２２の期間において、角速度センサ１０５の２次側制御回路１３により振動子１１の２次振動を検出した角速度を演算のために取得する。また、制御部１０１は、図４（Ｃ）の時間ｔ２４から時間ｔ２５の期間において、角速度センサ１０５の１次側制御回路１２により振動子１１の２次振動を検出した角速度を演算のために取得する。そして、制御部１０１は、時間ｔ２１から時間ｔ２２の期間において取得した角速度と、時間ｔ２４から時間ｔ２５の期間において取得した角速度と、に基づいて、角速度センサ１０５のバイアス成分を算出（演算）する。 Further, the control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the secondary control circuit 13 of the angular velocity sensor 105 during the period from time t21 to time t22 in FIG. 4C for calculation. do. Further, the control unit 101 acquires the angular velocity at which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 of the angular velocity sensor 105 for calculation in the period from the time t24 to the time t25 in FIG. 4C. do. Then, the control unit 101 calculates (calculates) the bias component of the angular velocity sensor 105 based on the angular velocity acquired in the period from time t21 to time t22 and the angular velocity acquired in the period from time t24 to time t25.
　また、制御部１０１は、角速度センサ１０３（１０４、１０５）の１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後の所定期間は、角速度センサ１０３（１０４、１０５）の角速度のバイアス成分をキャンセルするための角速度の検出を中断するように構成されている。具体的には、図４（Ａ）の角速度センサ１０３の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミング（時間ｔ３）の前後の所定期間（時間ｔ２から時間ｔ４の期間）において、制御部１０１は、角速度センサ１０４、１０５の角速度のバイアス成分をキャンセルするための角速度の検出（演算のための取得）を中断する。また、図４（Ｂ）の角速度センサ１０４の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミング（時間ｔ１３）の前後の所定期間（時間ｔ１２から時間ｔ１４の期間）において、制御部１０１は、角速度センサ１０３、１０５の角速度のバイアス成分をキャンセルするための角速度の検出（演算のための取得）を中断する。また、図４（Ｃ）の角速度センサ１０５の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミング（時間ｔ２３）の前後の所定期間（時間ｔ２２から時間ｔ２４の期間）において、制御部１０１は、角速度センサ１０３、１０４の角速度のバイアス成分をキャンセルするための角速度の検出（演算のための取得）を中断する。 Further, the control unit 101 receives the angular velocity of the angular velocity sensor 103 (104, 105) for a predetermined period before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 103 (104, 105). It is configured to interrupt the detection of the angular velocity to cancel the bias component of. Specifically, a predetermined period (time t2 to time t4) before and after the timing (time t3) for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 103 of FIG. 4 (A). In the period), the control unit 101 interrupts the detection (acquisition for calculation) of the angular velocity for canceling the bias component of the angular velocity of the angular velocity sensors 104 and 105. Further, in a predetermined period (period from time t12 to time t14) before and after the timing (time t13) in which the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 104 of FIG. 4B are exchanged. , The control unit 101 interrupts the detection (acquisition for calculation) of the angular velocity for canceling the bias component of the angular velocity of the angular velocity sensors 103 and 105. Further, in a predetermined period (period from time t22 to time t24) before and after the timing (time t23) in which the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 105 of FIG. 4C are exchanged. , The control unit 101 interrupts the detection (acquisition for calculation) of the angular velocity for canceling the bias component of the angular velocity of the angular velocity sensors 103 and 104.
　また、制御部１０１は、角速度センサ１０３～１０５のうちいずれかにおける、１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後の所定期間において、他の角速度センサ１０３～１０５における、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行うように構成されている。具体的には、制御部１０１は、図４（Ａ）の角速度センサ１０３の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミング（時間ｔ３）の前後の所定期間（時間ｔ２から時間ｔ４の期間）において、角速度センサ１０４および１０５の１次側制御回路１２と２次側制御回路１３との機能を入れ替える。また、制御部１０１は、図４（Ｂ）の角速度センサ１０４の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミング（時間ｔ１３）の前後の所定期間（時間ｔ１２から時間ｔ１４の期間）において、角速度センサ１０３および１０５の１次側制御回路１２と２次側制御回路１３との機能を入れ替える。また、制御部１０１は、図４（Ｃ）の角速度センサ１０５の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミング（時間ｔ２３）の前後の所定期間（時間ｔ２２から時間ｔ２４の期間）において、角速度センサ１０３および１０４の１次側制御回路１２と２次側制御回路１３との機能を入れ替える。 Further, the control unit 101 is used in the other angular velocity sensors 103 to 105 during a predetermined period before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in any of the angular velocity sensors 103 to 105. It is configured to perform control for exchanging the functions of the primary side control circuit 12 and the secondary side control circuit 13. Specifically, the control unit 101 has a predetermined period (time) before and after the timing (time t3) of switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 103 of FIG. 4 (A). In the period from t2 to the time t4), the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 104 and 105 are exchanged. Further, the control unit 101 has a predetermined period (time t12 to time) before and after the timing (time t13) for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 104 of FIG. 4 (B). In the period of t14), the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 and 105 are exchanged. Further, the control unit 101 has a predetermined period (time t22 to time) before and after the timing (time t23) for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensor 105 of FIG. 4 (C). In the period of t24), the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 and 104 are exchanged.
　好ましくは、制御部１０１は、角速度センサ１０３、１０４および１０５における、１次側制御回路１２と２次側制御回路１３と機能を入れ替えるタイミングを略同時するように構成されている。つまり、制御部１０１は、図４（Ａ）の時間ｔ３と、図４（Ｂ）の時間ｔ１３と、図４（Ｃ）の時間ｔ２３とを同じタイミングとして、角速度センサ１０３、１０４および１０５における、１次側制御回路１２と２次側制御回路１３と機能を入れ替える。 Preferably, the control unit 101 is configured so that the timing of switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the angular velocity sensors 103, 104 and 105 is substantially simultaneous. That is, the control unit 101 sets the time t3 in FIG. 4 (A), the time t13 in FIG. 4 (B), and the time t23 in FIG. 4 (C) at the same timing, and sets the angular velocity sensors 103, 104, and 105. The functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged.
（第１実施形態の効果）
　第１実施形態では、以下のような効果を得ることができる。 (Effect of the first embodiment)
In the first embodiment, the following effects can be obtained.
　第１実施形態では、上記のように、角速度センサ１０３～１０５のうちのいずれかにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後で演算に用いるための角速度を検出している場合に、角速度センサ１０３～１０５のうちの他の角速度センサにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行わないように構成された制御部を設ける。これにより、角速度センサ１０３～１０５のいずれかにおいて演算に用いるための角速度を検出している場合に、他の角速度センサ１０３～１０５において１次側制御回路１２と２次側制御回路１３との機能が入れ替わることがないので、共通に設けられた電源部１０２の電力が、１次側制御回路１２と２次側制御回路１３との機能が入れ替えにより変動することがない。その結果、角速度センサ１０３～１０５に、電源部１０２から安定して電力が供給されるので、演算に用いるための角速度を精度よく検出することができる。これにより、共通の電源部１０２に接続された複数の角速度センサ１０３～１０５の各々において、角速度を精度よく検出することができる。 In the first embodiment, as described above, in any of the angular velocity sensors 103 to 105, the angular velocity to be used for the calculation before and after the functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged is determined. A control unit configured not to perform control for switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the other angular velocity sensors among the angular velocity sensors 103 to 105 when detecting. Is provided. As a result, when any of the angular velocity sensors 103 to 105 detects the angular velocity to be used for the calculation, the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the other angular velocity sensors 103 to 105. The power of the power supply unit 102 provided in common does not change due to the replacement of the functions of the primary side control circuit 12 and the secondary side control circuit 13. As a result, the power supply unit 102 stably supplies electric power to the angular velocity sensors 103 to 105, so that the angular velocity for use in the calculation can be detected with high accuracy. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors 103 to 105 connected to the common power supply unit 102.
　また、第１実施形態では、上記のように、制御部１０１を、２次側制御回路１３により振動子１１の２次振動を検出した角速度の検出結果と、１次側制御回路１２と２次側制御回路１３との機能を入れ替えて、１次側制御回路１２により振動子１１の２次振動を検出した角速度の検出結果と、に基づいて、角速度センサ１０３～１０５により検出する角速度のバイアス成分をキャンセルする演算を行うように構成する。これにより、電源部１０２から安定して電力が供給された状態で検出した角速度に基づいて、角速度センサ１０３～１０５により検出する角速度のバイアス成分を精度よく算出することができる。 Further, in the first embodiment, as described above, the control unit 101 has the detection result of the angular velocity in which the secondary vibration of the vibrator 11 is detected by the secondary side control circuit 13, and the primary side control circuits 12 and secondary. The bias component of the angular velocity detected by the angular velocity sensors 103 to 105 based on the detection result of the angular velocity in which the secondary vibration of the vibrator 11 is detected by the primary side control circuit 12 by exchanging the functions with the side control circuit 13. Is configured to perform an operation that cancels. As a result, the bias component of the angular velocity detected by the angular velocity sensors 103 to 105 can be accurately calculated based on the angular velocity detected while the power is stably supplied from the power supply unit 102.
　また、第１実施形態では、上記のように、制御部１０１を、１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後の所定期間は、角速度のバイアス成分をキャンセルするための角速度の検出を中断するように構成する。これにより、１次側制御回路１２と２次側制御回路１３との機能の入れ替えに起因する電源部１０２の電力の変動が発生する期間において、角速度のバイアス成分をキャンセルするための角速度の検出が中断されるので、バイアス成分をキャンセルする演算に用いるための角速度の検出精度が低下するのを効果的に抑制することができる。 Further, in the first embodiment, as described above, the control unit 101 cancels the bias component of the angular velocity for a predetermined period before and after switching the functions of the primary side control circuit 12 and the secondary side control circuit 13. It is configured to interrupt the detection of the angular velocity of. As a result, the angular velocity for canceling the angular velocity bias component can be detected during the period in which the power of the power supply unit 102 fluctuates due to the replacement of the functions of the primary side control circuit 12 and the secondary side control circuit 13. Since it is interrupted, it is possible to effectively suppress a decrease in the detection accuracy of the angular velocity for use in the calculation for canceling the bias component.
　また、第１実施形態では、上記のように、制御部１０１を、角速度センサ１０３～１０５のうちいずれかにおける、１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後の所定期間において、他の角速度センサ１０３～１０５における、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行うように構成する。これにより、角速度センサ１０３～１０５の１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミングを、角速度のバイアス成分をキャンセルするための角速度の検出が中断される所定期間に行うことができる。これにより、角速度センサ１０３～１０５のうち複数において並行して角速度のバイアス成分をキャンセルするための角速度の検出をする場合に、演算に用いるための角速度を各々精度よく検出することができる。 Further, in the first embodiment, as described above, the control unit 101 is predetermined before and after the functions of the primary side control circuit 12 and the secondary side control circuit 13 in any of the angular velocity sensors 103 to 105 are exchanged. During the period, the other angular velocity sensors 103 to 105 are configured to perform control in which the functions of the primary side control circuit 12 and the secondary side control circuit 13 are exchanged. As a result, the timing of switching the functions of the primary side control circuit 12 and the secondary side control circuit 13 of the angular velocity sensors 103 to 105 is performed during a predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted. be able to. Thereby, when the angular velocity for canceling the bias component of the angular velocity is detected in parallel in a plurality of the angular velocity sensors 103 to 105, the angular velocity for use in the calculation can be detected with high accuracy.
　また、第１実施形態では、上記のように、制御部１０１を、角速度センサ１０３～１０５における、１次側制御回路１２と２次側制御回路１３との機能を入れ替えるタイミングを略同時にするように構成する。これにより、角速度のバイアス成分をキャンセルするための角速度の検出が中断される所定期間を最小限にすることができるので、バイアス成分をキャンセルするための角速度の検出のための時間が長くなるのを抑制することができる。 Further, in the first embodiment, as described above, the control unit 101 is configured to switch the functions of the primary side control circuit 12 and the secondary side control circuit 13 in the angular velocity sensors 103 to 105 substantially at the same time. Constitute. As a result, it is possible to minimize the predetermined period during which the detection of the angular velocity for canceling the bias component of the angular velocity is interrupted, so that the time for detecting the angular velocity for canceling the bias component becomes longer. It can be suppressed.
　また、第１実施形態では、上記のように、振動子１１は、リング型の振動子を含む。ここで、リング型の振動子は、対称的な形状を有するので、１次側制御回路１２による振動モードと、２次側制御回路１３による振動モードとが類似する。これにより、リング型の振動子１１を含む角速度センサ１０３～１０５の振動モードの差異の影響を考慮する必要がない。 Further, in the first embodiment, as described above, the vibrator 11 includes a ring type vibrator. Here, since the ring-shaped vibrator has a symmetrical shape, the vibration mode by the primary side control circuit 12 and the vibration mode by the secondary side control circuit 13 are similar. As a result, it is not necessary to consider the influence of the difference in the vibration modes of the angular velocity sensors 103 to 105 including the ring type vibrator 11.
　また、第１実施形態では、上記のように、角速度センサ１０３～１０５のうちのいずれかにおいて、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える前後で演算に用いるための角速度を検出している場合に、角速度センサ１０３～１０５のうちの他の角速度センサにおいて、１次振動を誘起する機能と２次振動を検出する機能とを入れ替える制御を行わないように構成された制御部を設ける。これにより、角速度センサ１０３～１０５のいずれかにおいて演算に用いるための角速度を検出している場合に、他の角速度センサ１０３～１０５において１次振動を誘起する機能と２次振動を検出する機能とが入れ替わることがないので、共通に設けられた電源部１０２の電力が、１次振動を誘起する機能と２次振動を検出する機能との入れ替えにより変動することがない。その結果、角速度センサ１０３～１０５に、電源部１０２から安定して電力が供給されるので、演算に用いるための角速度を精度よく検出することができる。これにより、共通の電源部１０２に接続された複数の角速度センサ１０３～１０５の各々において、角速度を精度よく検出することができる。 Further, in the first embodiment, as described above, in any of the angular velocity sensors 103 to 105, the function for inducing the primary vibration and the function for detecting the secondary vibration are used for calculation before and after switching. When the angular velocity is detected, the other angular velocity sensors among the angular velocity sensors 103 to 105 are configured not to perform control to switch the function of inducing the primary vibration and the function of detecting the secondary vibration. A control unit is provided. As a result, when any of the angular velocity sensors 103 to 105 detects the angular velocity to be used for the calculation, the other angular velocity sensors 103 to 105 have a function of inducing a primary vibration and a function of detecting the secondary vibration. Is not replaced, so that the power of the commonly provided power supply unit 102 does not fluctuate due to the replacement of the function of inducing the primary vibration and the function of detecting the secondary vibration. As a result, the power supply unit 102 stably supplies electric power to the angular velocity sensors 103 to 105, so that the angular velocity for use in the calculation can be detected with high accuracy. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors 103 to 105 connected to the common power supply unit 102.
（第２実施形態）
　次に、図５～図７を参照して、第２実施形態による方位角姿勢角計測装置２００の構成について説明する。第２実施形態では、第１実施形態とは異なり、同軸の角速度を検出するために複数の角速度センサが設けられている構成の例について説明する。なお、第１実施形態と同様の構成については、同じ符号を付し、説明を省略する。 (Second Embodiment)
Next, the configuration of the azimuth / posture angle measuring device 200 according to the second embodiment will be described with reference to FIGS. 5 to 7. In the second embodiment, unlike the first embodiment, an example of a configuration in which a plurality of angular velocity sensors are provided for detecting a coaxial angular velocity will be described. The same components as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.
　方位角姿勢角計測装置２００は、図５に示すように、制御部１０１と、電源部１０２と、角速度センサ１０３ａと、角速度センサ１０３ｂと、角速度センサ１０４ａ、角速度センサ１０４ｂと、角速度センサ１０５ａと、角速度センサ１０５ｂと、を備えている。角速度センサ１０３ａおよび１０３ｂと、角速度センサ１０４ａおよび１０４ｂと、角速度センサ１０５ａおよび１０５ｂとは、互いに交差する軸線回りの角速度を検出するように構成されている。また、角速度センサ１０３ａおよび１０３ｂは、互いに平行または同軸の軸線回りの角速度を検出するように構成されている。また、角速度センサ１０４ａおよび１０４ｂは、互いに平行または同軸の軸線回りの角速度を検出するように構成されている。また、角速度センサ１０５ａおよび１０５ｂは、互いに平行または同軸の軸線回りの角速度を検出するように構成されている。 As shown in FIG. 5, the azimuth angle attitude angle measuring device 200 includes a control unit 101, a power supply unit 102, an angular velocity sensor 103a, an angular velocity sensor 103b, an angular velocity sensor 104a, an angular velocity sensor 104b, and an angular velocity sensor 105a. It includes an angular velocity sensor 105b. The angular velocity sensors 103a and 103b, the angular velocity sensors 104a and 104b, and the angular velocity sensors 105a and 105b are configured to detect angular velocities around axes that intersect each other. Further, the angular velocity sensors 103a and 103b are configured to detect the angular velocity around the axis parallel to or coaxial with each other. Further, the angular velocity sensors 104a and 104b are configured to detect angular velocities around axes parallel to or coaxial with each other. Further, the angular velocity sensors 105a and 105b are configured to detect the angular velocity around the axis parallel to or coaxial with each other.
　具体的には、図６に示すように、角速度センサ１０３ａおよび１０３ｂは、Ｘ軸周りの角速度を検出するように構成されている。また、角速度センサ１０４ａおよび１０４ｂは、Ｙ軸周りの角速度を検出するように構成されている。また、角速度センサ１０５ａおよび１０５ｂは、Ｚ軸周りの角速度を検出するように構成されている。角速度センサ１０３ａおよび１０３ｂは、互いに隣接して配置されている。また、角速度センサ１０４ａおよび１０４ｂは、互いに隣接して配置されている。また、角速度センサ１０５ａおよび１０５ｂは、互いに隣接して配置されている。なお、角速度センサ１０３ａは、請求の範囲の「第１角速度センサ」の一例である。また、角速度センサ１０３ｂは、請求の範囲の「第３角速度センサ」の一例である。また、角速度センサ１０４ａは、請求の範囲の「第２角速度センサ」の一例である。また、角速度センサ１０５ａは、請求の範囲の「第２角速度センサ」の一例である。 Specifically, as shown in FIG. 6, the angular velocity sensors 103a and 103b are configured to detect the angular velocity around the X-axis. Further, the angular velocity sensors 104a and 104b are configured to detect the angular velocity around the Y-axis. Further, the angular velocity sensors 105a and 105b are configured to detect the angular velocity around the Z axis. The angular velocity sensors 103a and 103b are arranged adjacent to each other. Further, the angular velocity sensors 104a and 104b are arranged adjacent to each other. Further, the angular velocity sensors 105a and 105b are arranged adjacent to each other. The angular velocity sensor 103a is an example of the "first angular velocity sensor" in the claims. Further, the angular velocity sensor 103b is an example of the "third angular velocity sensor" in the claims. Further, the angular velocity sensor 104a is an example of the "second angular velocity sensor" in the claims. Further, the angular velocity sensor 105a is an example of the "second angular velocity sensor" in the claims.
　電源部１０２は、角速度センサ１０３ａ、１０３ｂ、１０４ａ、１０４ｂ、１０５ａおよび１０５ｂに電力を供給するように構成されている。また、電源部１０２は、角速度センサ１０３ａ、１０３ｂ、１０４ａ、１０４ｂ、１０５ａおよび１０５ｂに交流電力を供給するように構成されている。 The power supply unit 102 is configured to supply electric power to the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b. Further, the power supply unit 102 is configured to supply AC power to the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b.
　ここで、第２実施形態では、制御部１０１は、角速度センサ１０３ａ、１０３ｂ、１０４ａ、１０４ｂ、１０５ａおよび１０５ｂのうちのいずれかにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える前後で演算に用いるための角速度を検出している場合に、角速度センサ１０３ａ、１０３ｂ、１０４ａ、１０４ｂ、１０５ａおよび１０５ｂのうちの他の角速度センサにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行わないように構成されている。 Here, in the second embodiment, the control unit 101 functions as the primary side control circuit 12 and the secondary side control circuit 13 in any one of the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b. In the other angular velocity sensors of the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b when the angular velocity to be used for the calculation is detected before and after the replacement of the above, the primary side control circuit 12 and the secondary side It is configured so as not to perform control for exchanging the function with the control circuit 13.
　また、制御部１０１は、角速度センサ１０３ｂにおいて、演算に用いるための角速度を検出している場合に、角速度センサ１０３ａにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行わないように構成されている。 Further, when the angular velocity sensor 103b detects the angular velocity to be used for the calculation, the control unit 101 controls the angular velocity sensor 103a to switch the functions of the primary side control circuit 12 and the secondary side control circuit 13. Is configured not to do.
　また、第２実施形態では、制御部１０１は、角速度センサ１０３ａにより、所定期間において、２次側制御回路１３により振動子１１の２次振動に基づく角速度を検出する処理と、１次側制御回路１２と２次側制御回路１３との機能を入れ替えて、１次側制御回路１２により振動子１１の２次振動に基づく角速度を検出する処理と、を行う制御をするように構成されている。具体的には、図７（Ｃ）に示すように、時間ｔ３１から時間ｔ３２まで、および、時間ｔ３４から時間ｔ３５までの所定期間において、角速度センサ１０３ａの２次側制御回路１３により振動子１１の２次振動に基づく角速度を検出する処理と、角速度センサ１０３ａの１次側制御回路１２により振動子１１の２次振動に基づく角速度を検出する処理と、が行われる。 Further, in the second embodiment, the control unit 101 detects the angular velocity based on the secondary vibration of the vibrator 11 by the secondary side control circuit 13 in a predetermined period by the angular velocity sensor 103a, and the primary side control circuit. The functions of the 12 and the secondary side control circuit 13 are exchanged, and the primary side control circuit 12 is configured to perform a process of detecting an angular velocity based on the secondary vibration of the vibrator 11. Specifically, as shown in FIG. 7C, the oscillator 11 is operated by the secondary control circuit 13 of the angular velocity sensor 103a during a predetermined period from time t31 to time t32 and from time t34 to time t35. A process of detecting the angular velocity based on the secondary vibration and a process of detecting the angular velocity based on the secondary vibration of the vibrator 11 by the primary side control circuit 12 of the angular velocity sensor 103a are performed.
　また、制御部１０１は、角速度センサ１０３ｂにより、所定期間において、角速度を検出する処理を行う制御をするように構成されている。具体的には、図７（Ｂ）に示すように、時間ｔ３１から時間ｔ３２まで、および、時間ｔ３４から時間ｔ３５までの所定期間において、角速度センサ１０３ｂの２次側制御回路１３により振動子１１の２次振動に基づく角速度を検出する処理が行われる。 Further, the control unit 101 is configured to control the angular velocity sensor 103b to perform a process of detecting the angular velocity in a predetermined period. Specifically, as shown in FIG. 7B, during a predetermined period from time t31 to time t32 and from time t34 to time t35, the oscillator 11 is operated by the secondary control circuit 13 of the angular velocity sensor 103b. A process for detecting the angular velocity based on the secondary vibration is performed.
　また、制御部１０１は、所定期間において角速度センサ１０３ｂにより検出した第１検出結果と、所定期間において角速度センサ１０３ａにより検出した第２検出結果とに基づいて、角速度センサ１０３ｂのバイアス成分（Ｂ１（ｔ））を算出するように構成されている。 Further, the control unit 101 has a bias component (B1 (t)) of the angular velocity sensor 103b based on the first detection result detected by the angular velocity sensor 103b in the predetermined period and the second detection result detected by the angular velocity sensor 103a in the predetermined period. )) Is configured to be calculated.
　また、制御部１０１は、所定期間において角速度センサ１０３ｂにより検出した第１検出結果の値から、所定期間において角速度センサ１０３ａにより検出した第２検出結果の値を減じることにより、角速度センサ１０３ｂのバイアス成分を算出するように構成されている。 Further, the control unit 101 subtracts the value of the second detection result detected by the angular velocity sensor 103a in the predetermined period from the value of the first detection result detected by the angular velocity sensor 103b in the predetermined period, thereby causing the bias component of the angular velocity sensor 103b. Is configured to calculate.
　なお、所定期間は、２次側制御回路１３により振動子１１の２次振動に基づく角速度を検出する処理を行う第１期間（時間ｔ３１から時間ｔ３２までの期間）と、１次側制御回路１２により振動子１１の２次振動に基づく角速度を検出する処理を行う第２期間（時間ｔ３４から時間ｔ３５までの期間）とを含んでいる。また、第１期間および第２期間は、同じ長さの時間である。図７に示すように、第１期間および第２期間は、各々時間Ｔの長さを有している。 The predetermined period includes a first period (a period from time t31 to time t32) in which the secondary side control circuit 13 detects the angular velocity based on the secondary vibration of the vibrator 11, and the primary side control circuit 12 This includes a second period (a period from time t34 to time t35) in which a process of detecting an angular velocity based on the secondary vibration of the vibrator 11 is performed. Also, the first period and the second period are the same length of time. As shown in FIG. 7, each of the first period and the second period has a length of time T.
　また、第１検出結果は、所定期間において角速度センサ１０３ｂにより検出した角速度の積分値である。また、第２検出結果は、所定期間において角速度センサ１０３ａにより検出した角速度の積分値である。 The first detection result is an integral value of the angular velocity detected by the angular velocity sensor 103b in a predetermined period. The second detection result is an integral value of the angular velocity detected by the angular velocity sensor 103a in a predetermined period.
　また、所定期間は、角速度センサ１０３ａのバイアス成分が略一定である期間である。たとえば、所定期間は、数秒から数十秒程度の長さを有している。また、所定期間は、温度変化の影響が無視でき、角速度センサ１０３ａのバイアス成分が略変わらないと仮定できる期間である。 Further, the predetermined period is a period in which the bias component of the angular velocity sensor 103a is substantially constant. For example, the predetermined period has a length of about several seconds to several tens of seconds. Further, the predetermined period is a period in which the influence of the temperature change can be ignored and it can be assumed that the bias component of the angular velocity sensor 103a does not change substantially.
　図７（Ｂ）に示す、所定期間（時間ｔ３１から時間ｔ３２までの第１期間、および、時間ｔ３４から時間ｔ３５までの第２期間）における第１検出結果の積分値Ｉ１は、式（１）のように表される。
Figure JPOXMLDOC01-appb-M000001
 The integral value I1 of the first detection result in the predetermined period (first period from time t31 to time t32 and second period from time t34 to time t35) shown in FIG. 7B is given by the equation (1). It is expressed as.
Figure JPOXMLDOC01-appb-M000001
　ただし、角速度センサ１０３ｂの２次側制御回路１３により検出した角速度ω１（ｔ）は、図７（Ａ）に示す運動（移動）により生じる角速度（真の角速度）ω０（ｔ）および角速度センサ１０３ｂのバイアスＢ１（ｔ）を用いて、式（２）のように表される。
Figure JPOXMLDOC01-appb-M000002
 However, the angular velocity ω1 (t) detected by the secondary control circuit 13 of the angular velocity sensor 103b is the angular velocity (true angular velocity) ω0 (t) generated by the motion (movement) shown in FIG. 7A and the angular velocity sensor 103b. It is expressed as in Eq. (2) using the bias B1 (t).
Figure JPOXMLDOC01-appb-M000002
　したがって、式（１）は、式（３）のように導出される。
Figure JPOXMLDOC01-appb-M000003
 Therefore, the equation (1) is derived as in the equation (3).
Figure JPOXMLDOC01-appb-M000003
　また、図７（Ｃ）に示す、所定期間（時間ｔ３１から時間ｔ３２までの第１期間、および、時間ｔ３４から時間ｔ３５までの第２期間）における第２検出結果の積分値Ｉ２は、式（４）のように表される。
Figure JPOXMLDOC01-appb-M000004
 なお、時間ｔ３４から時間ｔ３５までの第２期間は、ω２（ｔ）がバイアス成分に対して反転されることを考慮して、積分値を減算している。 Further, the integrated value I2 of the second detection result in the predetermined period (the first period from the time t31 to the time t32 and the second period from the time t34 to the time t35) shown in FIG. 7C is expressed by the formula (C). It is expressed as 4).
Figure JPOXMLDOC01-appb-M000004
 In the second period from the time t34 to the time t35, the integrated value is subtracted in consideration of the fact that ω2 (t) is inverted with respect to the bias component.
　角速度センサ１０３ａの２次側制御回路１３により検出した角速度ω２（ｔ）および１次側制御回路１２により検出した角速度ω２（ｔ）は、図７（Ａ）に示す運動（移動）により生じる角速度（真の角速度）ω０（ｔ）および角速度センサ１０３ａのバイアスＢ２（ｔ）を用いて、それぞれ、式（５）および式（６）のように表される。
Figure JPOXMLDOC01-appb-M000005
 なお、時間ｔ３４から時間ｔ３５までの第２期間の式（６）では、ω0（ｔ）がバイアス成分に対して反転されるため、マイナスがかけられる。 The angular velocity ω2 (t) detected by the secondary side control circuit 13 of the angular velocity sensor 103a and the angular velocity ω2 (t) detected by the primary side control circuit 12 are the angular velocities generated by the motion (movement) shown in FIG. 7 (A). Using the true angular velocity) ω0 (t) and the bias B2 (t) of the angular velocity sensor 103a, they are expressed as equations (5) and (6), respectively.
Figure JPOXMLDOC01-appb-M000005
 In the equation (6) of the second period from the time t34 to the time t35, ω0 (t) is inverted with respect to the bias component, so that a minus is applied.
　したがって、式（４）は、式（７）のように導出される。
Figure JPOXMLDOC01-appb-M000006
 Therefore, the equation (4) is derived as in the equation (7).
Figure JPOXMLDOC01-appb-M000006
　第１検出結果の積分値Ｉ１から第２検出結果の積分値Ｉ２を減じると、式（８）のように導出される。
Figure JPOXMLDOC01-appb-M000007
 When the integral value I2 of the second detection result is subtracted from the integral value I1 of the first detection result, it is derived as shown in the equation (8).
Figure JPOXMLDOC01-appb-M000007
　ここで、時間ｔ３１から時間ｔ３２までの第１期間、および、時間ｔ３４から時間ｔ３５までの第２期間において、角速度センサ１０３ｂのバイアスＢ１（ｔ）と、角速度センサ１０３ａのバイアスＢ２（ｔ）とは、各々、時間的な変化量が無視できるので（一定であるので）、式（９）および式（１０）が成り立つと仮定できる。
Figure JPOXMLDOC01-appb-M000008
 ただし、Ｂ１は、第１期間および第２期間における角速度センサ１０３ｂのバイアス値であり、Ｂ２は、第１期間および第２期間における角速度センサ１０３ａのバイアス値である。 Here, in the first period from time t31 to time t32 and the second period from time t34 to time t35, the bias B1 (t) of the angular velocity sensor 103b and the bias B2 (t) of the angular velocity sensor 103a are Since the amount of change over time is negligible (because it is constant), it can be assumed that Eqs. (9) and (10) hold.
Figure JPOXMLDOC01-appb-M000008
 However, B1 is the bias value of the angular velocity sensor 103b in the first period and the second period, and B2 is the bias value of the angular velocity sensor 103a in the first period and the second period.
　したがって、式（８）から、式（１１）が導出される。
Figure JPOXMLDOC01-appb-M000009
 Therefore, the equation (11) is derived from the equation (8).
Figure JPOXMLDOC01-appb-M000009
　Ｔは、既知であるため、（Ｉ１―Ｉ２）を２Ｔで除算することにより、角速度センサ１０３ｂのバイアス値Ｂ１が算出される。算出したバイアス値Ｂ１を、角速度センサ１０３ｂによる角速度検出に用いる。たとえば、カルマンフィルタの観測更新として利用する。 Since T is known, the bias value B1 of the angular velocity sensor 103b is calculated by dividing (I1-I2) by 2T. The calculated bias value B1 is used for detecting the angular velocity by the angular velocity sensor 103b. For example, it is used as an observation update of the Kalman filter.
　なお、角速度センサ１０３ａの１次側制御回路１２としての機能と、２次側制御回路１３としての機能とを入れ替える制御を行い、バイアス値Ｂ１を算出するための角速度の測定を行う期間中に式（９）および式（１０）の関係が成立していればよい。このため、たとえば、次の処理の開始点となる時間ｔ３６までの時間間隔（ｔ３６－ｔ３５）が大きく、Ｂ１が変化した場合でも、同様に、次の時間ｔ３６からの処理により補正可能である。ただし、常に、Ｂ１の変化が小さくするために、時間間隔（ｔ３６－ｔ３５）を十分に小さくすることが好ましい。 It should be noted that the equation is performed during the period in which the function of the angular velocity sensor 103a as the primary side control circuit 12 and the function of the secondary side control circuit 13 are exchanged and the angular velocity is measured to calculate the bias value B1. It suffices if the relationship between (9) and equation (10) is established. Therefore, for example, even if the time interval (t36-t35) up to the time t36, which is the start point of the next processing, is large and B1 changes, it can be similarly corrected by the processing from the next time t36. However, it is always preferable that the time interval (t36-t35) is sufficiently small in order to reduce the change in B1.
　ここで、角速度センサ１０３ａの１次側制御回路１２としての機能と、２次側制御回路１３としての機能とを入れ替える制御を行い、バイアス値Ｂ１を算出するための角速度の測定を行う期間中に式（１０）の関係が成立しない場合がある。つまり、式（１２）となる場合がある。
Figure JPOXMLDOC01-appb-M000010
 この場合でも、動作開始時（移動開始時）に、αを加味しておき、２つの角速度センサ１０３ｂおよび角速度センサ１０３ａを使用して、相互にバイアス成分を補正することにより、バイアス成分（Ｂ２（ｔ））の時間変化にも対応することが可能である。 Here, during the period in which the function of the angular velocity sensor 103a as the primary side control circuit 12 and the function of the secondary side control circuit 13 are exchanged and the angular velocity is measured to calculate the bias value B1. The relationship of equation (10) may not hold. That is, it may be the equation (12).
Figure JPOXMLDOC01-appb-M000010
 Even in this case, at the start of operation (at the start of movement), the bias component (B2 (B2 (B2) It is possible to cope with the time change of t)).
　つまり、制御部１０１は、第１の所定期間において角速度センサ１０３ｂにより検出した第１検出結果と、第１の所定期間において角速度センサ１０３ａにより検出した第２検出結果とに基づいて、角速度センサ１０３ｂのバイアス成分を算出する。また、制御部１０１は、第２の所定期間において角速度センサ１０３ａにより検出した角速度と、角速度センサ１０３ｂのバイアス成分とを用いて、角速度センサ１０３ａのバイアス成分を算出する。そして、制御部１０１は、これらの制御を交互に繰り返す。つまり、最初のバイアス成分の算出により、角速度センサ１０３ｂのバイアス成分であるＢ１を補正する。次のサイクルにおいて、補正したＢ１を用いて、角速度センサ１０３ａのバイアス成分であるＢ２のαを算出する。そして、さらに次のサイクルにおいて、補正したαを用いて、角速度センサ１０３ｂのバイアス成分であるＢ１を補正する。以降は、これらの処理を交互に繰り返す。 That is, the control unit 101 uses the angular velocity sensor 103b based on the first detection result detected by the angular velocity sensor 103b in the first predetermined period and the second detection result detected by the angular velocity sensor 103a in the first predetermined period. Calculate the bias component. Further, the control unit 101 calculates the bias component of the angular velocity sensor 103a by using the angular velocity detected by the angular velocity sensor 103a in the second predetermined period and the bias component of the angular velocity sensor 103b. Then, the control unit 101 alternately repeats these controls. That is, the bias component B1 of the angular velocity sensor 103b is corrected by calculating the first bias component. In the next cycle, the corrected B1 is used to calculate α of B2, which is a bias component of the angular velocity sensor 103a. Then, in the next cycle, the corrected α is used to correct B1 which is a bias component of the angular velocity sensor 103b. After that, these processes are repeated alternately.
　なお、動作開始時の移動開始前において、静止させた状態（角速度ω０（ｔ）が一定の状態）において、αを求めて、以降、上記のようにして順次α（ｔ）を補正してもよい。 It should be noted that even if α is obtained in a stationary state (a state in which the angular velocity ω0 (t) is constant) before the start of movement at the start of operation, and thereafter, α (t) is sequentially corrected as described above. good.
　また、角速度センサ１０４ａおよび１０４ｂのバイアス成分の算出およびキャンセルを行う処理についても、上記角速度センサ１０３ａおよび１０３ｂのバイアス成分の算出およびキャンセルを行う処理と同様である。また、角速度センサ１０５ａおよび１０５ｂのバイアス成分の算出およびキャンセルを行う処理についても、上記角速度センサ１０３ａおよび１０３ｂのバイアス成分の算出およびキャンセルを行う処理と同様である。 Further, the process of calculating and canceling the bias components of the angular velocity sensors 104a and 104b is the same as the process of calculating and canceling the bias components of the angular velocity sensors 103a and 103b. Further, the process of calculating and canceling the bias components of the angular velocity sensors 105a and 105b is the same as the process of calculating and canceling the bias components of the angular velocity sensors 103a and 103b.
　第２実施形態のその他の構成は、上記第１実施形態と同様である。 Other configurations of the second embodiment are the same as those of the first embodiment.
（第２実施形態の効果）
　第２実施形態では、上記第１実施形態と同様に、角速度センサ１０３ａ、１０３ｂ、１０４ａ、１０４ｂ、１０５ａおよび１０５ｂに、電源部１０２から安定して電力が供給されるので、演算に用いるための角速度を精度よく検出することができる。これにより、共通の電源部１０２に接続された複数の角速度センサ１０３ａ、１０３ｂ、１０４ａ、１０４ｂ、１０５ａおよび１０５ｂの各々において、角速度を精度よく検出することができる。 (Effect of the second embodiment)
In the second embodiment, similarly to the first embodiment, the angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b are stably supplied with electric power from the power supply unit 102, so that the angular velocity is used for calculation. Can be detected accurately. As a result, the angular velocity can be accurately detected in each of the plurality of angular velocity sensors 103a, 103b, 104a, 104b, 105a and 105b connected to the common power supply unit 102.
　また、第２実施形態では、上記のように、制御部１０１は、角速度センサ１０３ｂにおいて、演算に用いるための角速度を検出している場合に、角速度センサ１０３ａにおいて、１次側制御回路１２と２次側制御回路１３との機能を入れ替える制御を行わないように構成する。これにより、同じ軸線回りの角速度を検出する角速度センサ１０３ａおよび角速度センサ１０３ｂを設けた構成において、演算に用いるための角速度を角速度センサ１０３ｂにおいても精度よく検出することができる。 Further, in the second embodiment, as described above, when the angular velocity sensor 103b detects the angular velocity to be used for the calculation, the angular velocity sensor 103a has the primary side control circuits 12 and 2. It is configured so that the control for exchanging the function with the next control circuit 13 is not performed. Thereby, in the configuration provided with the angular velocity sensor 103a and the angular velocity sensor 103b for detecting the angular velocity around the same axis, the angular velocity for use in the calculation can be accurately detected by the angular velocity sensor 103b as well.
　また、第２実施形態のその他の効果は、第１実施形態と同様である。 Further, the other effects of the second embodiment are the same as those of the first embodiment.
（変形例）
　なお、今回開示された実施形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく請求の範囲によって示され、さらに請求の範囲と均等の意味および範囲内でのすべての変更が含まれる。 (Modification example)
It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. The scope of the present invention is shown by the scope of claims rather than the description of the above-described embodiment, and further includes all modifications within the meaning and scope equivalent to the scope of claims.
　たとえば、上記第１および第２実施形態では、リング型の振動子が用いられる例を示したが、本発明はこれに限られない。たとえば、振動子が対称的な形状を有していればよく、円盤型、カップ型（ワイングラス型）、八角形型、などの振動子を用いてもよい。 For example, in the above first and second embodiments, an example in which a ring type vibrator is used is shown, but the present invention is not limited to this. For example, the vibrator may have a symmetrical shape, and a disc type, a cup type (wine glass type), an octagonal type, or the like may be used.
　また、上記第１および第２実施形態では、振動子、増幅回路、同期検波回路、ループフィルタ、変調回路および駆動回路により閉じた制御ループが構成されている例を示したが、本発明はこれに限られない。たとえば、増幅回路、同期検波回路、ループフィルタ、変調回路および駆動回路からなる構成以外の構成により制御ループが構成されていてもよい。 Further, in the first and second embodiments, an example in which a closed control loop is configured by an oscillator, an amplifier circuit, a synchronous detection circuit, a loop filter, a modulation circuit and a drive circuit is shown. Not limited to. For example, the control loop may be configured by a configuration other than the configuration including an amplifier circuit, a synchronous detection circuit, a loop filter, a modulation circuit, and a drive circuit.
　また、上記第１および第２実施形態では、ループフィルタとして積分フィルタが用いられる例を示したが、たとえば、積分フィルタ以外のループフィルタを用いてもよい。 Further, in the first and second embodiments, an example in which an integral filter is used as the loop filter is shown, but for example, a loop filter other than the integral filter may be used.
　また、上記第２実施形態では、角速度センサ１０３ａ（１０４ａ、１０５ａ）（第１角速度センサ）と平行な軸線回りの角速度を検出する角速度センサ１０３ｂ（１０４ｂ、１０５ｂ）（第３角速度センサ）も、角速度センサ１０３ａ（１０４ａ、１０５ａ）（第１角速度センサ）と同様に、１次側制御回路の機能と、２次側制御回路の機能とが入れ替え可能である例を示したが、本発明はこれに限られない。本発明では、第３角速度センサの１次側制御回路の機能と、２次側制御回路の機能とが固定されていてもよい（入れ替えられなくてもよい）。 Further, in the second embodiment, the angular velocity sensors 103b (104b, 105b) (third angular velocity sensor) that detect the angular velocity around the axis parallel to the angular velocity sensors 103a (104a, 105a) (first angular velocity sensor) are also angular velocities. Similar to the sensors 103a (104a, 105a) (first angular velocity sensor), an example is shown in which the function of the primary side control circuit and the function of the secondary side control circuit can be interchanged. Not limited. In the present invention, the function of the primary side control circuit of the third angular velocity sensor and the function of the secondary side control circuit may be fixed (may not be replaced).
　また、上記第１および第２実施形態では、互いに直交するＸ軸、Ｙ軸およびＺ軸の３軸の軸線回りの角速度を検出する複数の角速度センサを設ける構成の例を示したが、本発明はこれに限られない。本発明では、互いに異なる方向の２軸の軸線回りの角速度を検出する複数の角速度センサを設けてもよい。また、互いに異なる方向の４軸の軸線回りの角速度を検出する複数の角速度センサを設けてもよい。また、複数の角速度センサが検出する角速度の軸線は、互いに直交ではない異なる方向であってもよい。 Further, in the first and second embodiments, an example of a configuration in which a plurality of angular velocity sensors for detecting angular velocities around the three axes of the X-axis, the Y-axis, and the Z-axis that are orthogonal to each other are provided has been shown. Is not limited to this. In the present invention, a plurality of angular velocity sensors that detect angular velocities around two axes in different directions may be provided. Further, a plurality of angular velocity sensors may be provided to detect the angular velocities around the four axes in different directions. Further, the axes of the angular velocities detected by the plurality of angular velocity sensors may be in different directions that are not orthogonal to each other.
　また、上記第２実施形態では、平行な軸線回りの角速度を検出する角速度センサを２つずつ設ける構成の例を示したが、本発明はこれに限られない。本発明では、平行な軸線回りの角速度を検出する角速度センサを３つ以上設けてもよいし、一部の軸線回りについて、角速度センサを複数設け、他の軸線回りについて、角速度センサを１つ設けてもよい。 Further, in the second embodiment described above, an example of a configuration in which two angular velocity sensors for detecting angular velocities around parallel axes are provided, but the present invention is not limited to this. In the present invention, three or more angular velocity sensors for detecting angular velocities around parallel axes may be provided, a plurality of angular velocity sensors are provided for some of the axial velocities, and one angular velocity sensor is provided for other axial velocities. You may.
　１１　振動子
　１２　１次側制御回路
　１３　２次側制御回路
　１００　方位角姿勢角計測装置
　１０１　制御部
　１０２　電源部
　１０３、１０３ａ　角速度センサ（第１角速度センサ）
　１０３ｂ　角速度センサ（第３角速度センサ）
　１０４、１０４ａ　角速度センサ（第２角速度センサ）
　１０５、１０５ａ　角速度センサ（第２角速度センサ） 11 Oscillator 12 Primary side control circuit 13 Secondary side control circuit 100 Azimuth angle attitude angle measuring device 101 Control unit 102 Power supply unit 103, 103a Angular velocity sensor (1st angular velocity sensor)
103b Angular velocity sensor (3rd angular velocity sensor)
104, 104a Angular velocity sensor (second angular velocity sensor)
105, 105a Angular velocity sensor (second angular velocity sensor)

Claims (12)

  1. 　第１軸線回りの角速度を検出する第１角速度センサと、
    　前記第１軸線とは異なる方向の第２軸線回りの角速度を検出する第２角速度センサと、
    　前記第１角速度センサおよび前記第２角速度センサに電力を供給する電源部と、
    　制御部と、を備え、
    　前記第１角速度センサおよび前記第２角速度センサは、
    　振動子と、
    　閉じた制御ループを有し、前記閉じた制御ループの出力が前記振動子に１次振動を誘起させる１次側制御回路と、
    　前記振動子に印加される角速度に起因して前記振動子に発生する２次振動を検出する閉じた制御ループを有する２次側制御回路と、を各々含み、
    　前記１次側制御回路と前記２次側制御回路とは、前記１次側制御回路としての機能と、前記２次側制御回路としての機能とを入れ替え可能に構成されており、
    　前記制御部は、前記第１角速度センサおよび前記第２角速度センサのうちの一方において、前記１次側制御回路と前記２次側制御回路との機能を入れ替える前後で演算に用いるための角速度を検出している場合に、前記第１角速度センサおよび前記第２角速度センサのうちの他方において、前記１次側制御回路と前記２次側制御回路との機能を入れ替える制御を行わないように構成されている、方位角姿勢角計測装置。     A first angular velocity sensor that detects the angular velocity around the first axis,
    A second angular velocity sensor that detects the angular velocity around the second axis in a direction different from the first axis, and
    A power supply unit that supplies electric power to the first angular velocity sensor and the second angular velocity sensor,
    With a control unit
    The first angular velocity sensor and the second angular velocity sensor are
    Oscillator and
    A primary control circuit having a closed control loop and the output of the closed control loop inducing a primary vibration in the vibrator.
    Each includes a secondary side control circuit having a closed control loop for detecting the secondary vibration generated in the vibrator due to the angular velocity applied to the vibrator.
    The primary side control circuit and the secondary side control circuit are configured so that the function as the primary side control circuit and the function as the secondary side control circuit can be interchanged.
    The control unit detects the angular velocity for use in the calculation before and after switching the functions of the primary side control circuit and the secondary side control circuit in one of the first angular velocity sensor and the second angular velocity sensor. In this case, the other of the first angular velocity sensor and the second angular velocity sensor is configured not to perform control for switching the functions of the primary side control circuit and the secondary side control circuit. There is an azimuth angle attitude angle measuring device.
  2. 　前記制御部は、前記２次側制御回路により前記振動子の２次振動を検出した角速度の検出結果と、前記１次側制御回路と前記２次側制御回路との機能を入れ替えて、前記１次側制御回路により前記振動子の２次振動を検出した角速度の検出結果と、に基づいて、前記第１角速度センサおよび前記第２角速度センサにより検出する角速度のバイアス成分をキャンセルする演算を行うように構成されている、請求項１に記載の方位角姿勢角計測装置。 The control unit replaces the detection result of the angular velocity in which the secondary vibration of the vibrator is detected by the secondary side control circuit with the functions of the primary side control circuit and the secondary side control circuit. Based on the detection result of the angular velocity in which the secondary vibration of the vibrator is detected by the secondary control circuit, the calculation for canceling the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor is performed. The azimuth angle attitude angle measuring device according to claim 1, which is configured in the above.
  3. 　前記制御部は、前記１次側制御回路と前記２次側制御回路との機能を入れ替える前後の所定期間は、角速度のバイアス成分をキャンセルするための角速度の検出を中断するように構成されている、請求項２に記載の方位角姿勢角計測装置。 The control unit is configured to interrupt the detection of the angular velocity for canceling the bias component of the angular velocity for a predetermined period before and after switching the functions of the primary side control circuit and the secondary side control circuit. , The azimuth / attitude angle measuring device according to claim 2.
  4. 　前記制御部は、前記第１角速度センサおよび前記第２角速度センサのうちの一方における、前記１次側制御回路と前記２次側制御回路との機能を入れ替える前後の所定期間において、前記第１角速度センサおよび前記第２角速度センサのうちの他方における、前記１次側制御回路と前記２次側制御回路との機能を入れ替える制御を行うように構成されている、請求項１に記載の方位角姿勢角計測装置。 The control unit performs the first angular velocity in a predetermined period before and after switching the functions of the primary side control circuit and the secondary side control circuit in one of the first angular velocity sensor and the second angular velocity sensor. The azimuth angle posture according to claim 1, wherein the other of the sensor and the second angular velocity sensor is configured to perform control for switching the functions of the primary side control circuit and the secondary side control circuit. Angular velocity measuring device.
  5. 　前記制御部は、前記第１角速度センサおよび前記第２角速度センサにおける、前記１次側制御回路と前記２次側制御回路との機能を入れ替えるタイミングを略同時にするように構成されている、請求項４に記載の方位角姿勢角計測装置。 The control unit is configured to substantially simultaneously perform timings for switching the functions of the primary side control circuit and the secondary side control circuit in the first angular velocity sensor and the second angular velocity sensor. The azimuth / attitude angle measuring device according to 4.
  6. 　振動子を含み、前記第１軸線回りの角速度を検出する第３角速度センサをさらに備え、
    　前記電源部は、前記第１角速度センサおよび前記第２角速度センサに加えて、前記第３角速度センサに電力を供給するように構成されており、
    　前記制御部は、前記第３角速度センサにおいて、演算に用いるための角速度を検出している場合に、前記第１角速度センサにおいて、前記１次側制御回路と前記２次側制御回路との機能を入れ替える制御を行わないように構成されている、請求項１に記載の方位角姿勢角計測装置。     A third angular velocity sensor including a vibrator and detecting an angular velocity around the first axis is further provided.
    The power supply unit is configured to supply electric power to the third angular velocity sensor in addition to the first angular velocity sensor and the second angular velocity sensor.
    When the control unit detects the angular velocity to be used for the calculation in the third angular velocity sensor, the control unit functions in the first angular velocity sensor with the primary side control circuit and the secondary side control circuit. The azimuth / attitude angle measuring device according to claim 1, which is configured not to perform replacement control.
  7. 　第１軸線回りの角速度を検出する第１角速度センサと、
    　前記第１軸線とは異なる方向の第２軸線回りの角速度を検出する第２角速度センサと、
    　前記第１角速度センサおよび前記第２角速度センサに電力を供給する電源部と、
    　制御部と、を備え、
    　前記第１角速度センサおよび前記第２角速度センサは、
    　振動子と、
    　閉じた制御ループを有し、前記閉じた制御ループの出力が前記振動子に１次振動を誘起させる１次側制御回路と、
    　前記振動子に印加される角速度に起因して前記振動子に発生する２次振動を検出する閉じた制御ループを有する２次側制御回路と、を各々含み、
    　前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替え可能に構成されており、
    　前記制御部は、前記第１角速度センサおよび前記第２角速度センサのうちの一方において、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替える前後で演算に用いるための角速度を検出している場合に、前記第１角速度センサおよび前記第２角速度センサのうちの他方において、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替える制御を行わないように構成されている、方位角姿勢角計測装置。　     A first angular velocity sensor that detects the angular velocity around the first axis,
    A second angular velocity sensor that detects the angular velocity around the second axis in a direction different from the first axis, and
    A power supply unit that supplies electric power to the first angular velocity sensor and the second angular velocity sensor,
    With a control unit
    The first angular velocity sensor and the second angular velocity sensor are
    Oscillator and
    A primary control circuit having a closed control loop and the output of the closed control loop inducing a primary vibration in the vibrator.
    Each includes a secondary side control circuit having a closed control loop for detecting the secondary vibration generated in the vibrator due to the angular velocity applied to the vibrator.
    The function of inducing the primary vibration and the function of detecting the secondary vibration are interchangeable.
    The control unit uses the angular velocity for calculation before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration in one of the first angular velocity sensor and the second angular velocity sensor. In the case of detecting, the other of the first angular velocity sensor and the second angular velocity sensor is not controlled to switch between the function of inducing the primary vibration and the function of detecting the secondary vibration. A directional angle / attitude angle measuring device configured in.
  8. 　前記制御部は、前記振動子の前記２次振動を検出した角速度の検出結果と、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替えて前記振動子の前記２次振動を検出した角速度の検出結果と、に基づいて、前記第１角速度センサおよび前記第２角速度センサにより検出する角速度のバイアス成分をキャンセルする演算を行うように構成されている、請求項７に記載の方位角姿勢角計測装置。 The control unit replaces the detection result of the angular velocity that detected the secondary vibration of the vibrator with the function of inducing the primary vibration and the function of detecting the secondary vibration of the vibrator. The seventh aspect of claim 7, wherein the calculation for canceling the bias component of the angular velocity detected by the first angular velocity sensor and the second angular velocity sensor is performed based on the detection result of the angular velocity in which the vibration is detected. Aspect angle attitude angle measuring device.
  9. 　前記制御部は、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替える前後の所定期間は、角速度のバイアス成分をキャンセルするための角速度の検出を中断するように構成されている、請求項８に記載の方位角姿勢角計測装置。 The control unit is configured to interrupt the detection of the angular velocity for canceling the bias component of the angular velocity for a predetermined period before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration. The azimuth / attitude angle measuring device according to claim 8.
  10. 　前記制御部は、前記第１角速度センサおよび前記第２角速度センサのうちの一方における、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替える前後の所定期間において、前記第１角速度センサおよび前記第２角速度センサのうちの他方における、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替える制御を行うように構成されている、請求項７に記載の方位角姿勢角計測装置。 The control unit performs the first angular velocity sensor and the second angular velocity sensor in a predetermined period before and after switching the function of inducing the primary vibration and the function of detecting the secondary vibration in one of the first angular velocity sensor and the second angular velocity sensor. The seventh aspect of claim 7, wherein the other of the one angular velocity sensor and the second angular velocity sensor is controlled to switch between the function of inducing the primary vibration and the function of detecting the secondary vibration. Aspect angle attitude angle measuring device.
  11. 　前記制御部は、前記第１角速度センサおよび前記第２角速度センサにおける、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替えるタイミングを略同時にするように構成されている、請求項１０に記載の方位角姿勢角計測装置。 The control unit is configured to substantially simultaneously switch the functions of inducing the primary vibration and the function of detecting the secondary vibration in the first angular velocity sensor and the second angular velocity sensor. The azimuth / attitude angle measuring device according to claim 10.
  12. 　振動子を含み、前記第１軸線回りの角速度を検出する第３角速度センサをさらに備え、
    　前記電源部は、前記第１角速度センサおよび前記第２角速度センサに加えて、前記第３角速度センサに電力を供給するように構成されており、
    　前記制御部は、前記第３角速度センサにおいて、演算に用いるための角速度を検出している場合に、前記第１角速度センサにおいて、前記１次振動を誘起する機能と前記２次振動を検出する機能とを入れ替える制御を行わないように構成されている、請求項７に記載の方位角姿勢角計測装置。     A third angular velocity sensor including a vibrator and detecting an angular velocity around the first axis is further provided.
    The power supply unit is configured to supply electric power to the third angular velocity sensor in addition to the first angular velocity sensor and the second angular velocity sensor.
    When the third angular velocity sensor detects an angular velocity to be used for calculation, the control unit has a function of inducing the primary vibration and a function of detecting the secondary vibration in the first angular velocity sensor. The azimuth / attitude angle measuring device according to claim 7, which is configured not to perform control for exchanging and.
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